Embodiment
For the purpose, technical scheme and the advantage that make the embodiment of the invention clearer; To combine the accompanying drawing in the embodiment of the invention below; Technical scheme in the embodiment of the invention is carried out clear, intactly description; Obviously, described embodiment is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the present invention's protection.
Embodiment one
The side-looking cross-sectional view of the liquid crystal panel that Fig. 2 provides for the embodiment of the invention one.This liquid crystal panel comprises array base palte and the color membrane substrates that box is provided with, and is filled with liquid crystal layer therebetween.
Fig. 3 is the plan structure synoptic diagram of the array base palte of liquid crystal panel among Fig. 2, and the array base palte of Fig. 2 dissects along the C-C line among Fig. 3.As shown in Figure 3, array base palte comprises various conductive structures of formation and insulation course on first underlay substrate, 101, the first underlay substrates 101, to constitute the pixel cell of active matrix.The outer peripheral areas 120 that on first underlay substrate 101 of array base palte, mainly is divided into pixel region 110 with pixel region 110 peripheries at pixel cell place.Conductive structure on first underlay substrate 101 comprises target reparation line at least, and other non-target is repaired line can repair different layer setting of line and horizontal vertical the intersection with target.Present embodiment is specifically repaired line, repaired line with grid line 102 as non-target as target with data line 103 is that example describes.
Data line 103 is provided with grid line 102 horizontal vertical intersections and different layer, and with gate insulation layer 104 spaces, data line 103 all extends to outer peripheral areas 120 with grid line 102.Public electrode wire 105 on the array base palte is provided with layer with grid line 102, is connected to four jiaos in outer peripheral areas 120 to converge line 106, its objective is that the circuit of simplification grid line 102 sides is laid.In the present embodiment, converging that line 106 also is equivalent to is that non-target is repaired line.Also be provided with two first maintenance threads 111 on this array base palte, be formed on first underlay substrate 101, and outer peripheral areas 120, the first maintenance threads 111 that are positioned at array base palte are provided with data line 103 different layers and intersect each other with the two ends of data line 103 respectively.Be formed with four in the gate insulation layer 104 that on first maintenance thread 111, covers and connect via hole 112, connect the top that via hole 112 is positioned at first maintenance thread 111, corresponding to the two ends of every first maintenance thread 111.In connecting via hole 112, be filled with connection electrode 113, connection electrode 113 is connected with data line 103 and exposes the surface at array base palte.This connection electrode 113 preferably with array base palte on pixel electrode form with layer; And the pattern space of the pattern of connection electrode 113 and pixel electrode; Can utilize the existing technology that forms pixel electrode to go to form connection electrode 113, not increase process complexity.General and the data line 103 different layer setting of pixel electrode can be passed through passivation layer 114 spaces.Then connection electrode 113 can keep insulation through passivation layer 114 and data line 103 grades.
Fig. 4 is the plan structure synoptic diagram of the color membrane substrates of liquid crystal panel among Fig. 2, and the color membrane substrates among Fig. 2 dissects along the D-D line among Fig. 4.Color membrane substrates comprises second underlay substrate 201, and color film resin 202 and black matrix 203 are set on it at interval, also comprises the public electrode 204 that covers on color film resin 202 and the black matrix 203.On second underlay substrate 201, also be formed with two second maintenance threads, 205, the second maintenance threads 205 and be positioned at the surface of color membrane substrates, and lay respectively at the two ends of first maintenance thread 111 accordingly.After to box, second maintenance thread 205 intersects with the two ends of grid line 102 respectively each other.The 205 preferred and public electrode 204 layer formation together of second maintenance thread; Can utilize the material of public electrode 204; Form the pattern of second maintenance thread 205 and public electrode 204, the pattern space of the pattern of second maintenance thread 205 and public electrode 204 respectively through composition technology.
Between color membrane substrates and array base palte, also comprise electric conductor; Be formed between array base palte and the color membrane substrates; Electric conductor is communicated with second maintenance thread 205 and first maintenance thread 111 through contact connection electrode 113, thereby makes second maintenance thread 205 and first maintenance thread, 111 head and the tail connect into ring.Preferably the area of connection electrode 113 can increase the reliability that electric conductor contacts with connection electrode 113 greater than the area that connects via hole 112.Electric conductor preferably is entrained in the conducting sphere 301 in the envelope frame glue, and envelope frame glue is coated in desired location.Being communicated with public electrode 204 with the envelope frame glue that comprises conducting sphere 301 is prior arts with public electrode wire 105; Present embodiment can utilize this existing technology; Do not increase technology difficulty, public electrode 204 promptly still can keep being interconnected with conducting sphere 301 with public electrode wire 105 corresponding adjustment one upper/lower positions.
The effect of first maintenance thread is when broken data wire, and first maintenance thread through the data line two ends is communicated with, and the effect of second maintenance thread is to be communicated with two first maintenance threads.Liquid crystal panel in use, for avoiding the influence to showing, maintenance thread need be prepared in outer peripheral areas, is difficult to avoid the overlapping with existing conducting wire.Adopt the technical scheme of present embodiment; Second maintenance thread is formed on the color membrane substrates; Even there is the overlapping part; Distance owing to overlap between two conductive patterns of part is increased to the distance between the two substrates from the distance of an original insulation course, therefore can significantly reduce the capacitance of overlapping part coupling capacitance.So coupling capacitance reduces the influence of institute's transmission signals in the maintenance thread, has optimized display quality.Especially in the large scale liquid crystal panel, also can adopt the technology of maintenance thread, the defective of having avoided the large scale liquid crystal panel can't repair because of no maintenance thread.
Embodiment two
The side-looking cross-sectional view of the liquid crystal panel that Fig. 5 provides for the embodiment of the invention two; Fig. 6 is the plan structure synoptic diagram of the array base palte of liquid crystal panel among Fig. 5; And the array base palte of Fig. 5 dissects along the E-E line among Fig. 6; Fig. 7 is the plan structure synoptic diagram of the color membrane substrates of liquid crystal panel among Fig. 5, and the color membrane substrates of Fig. 5 dissects along the F-F line among Fig. 7.The difference of present embodiment and embodiment one is: repair line with grid line 102 as the target of maintenance thread in the present embodiment, repair line with data line 103 as non-target.When there being public electrode wire 105, when perhaps public electrode wire 105 is communicated with to converge line 106, public electrode wire 105 or to converge that line 106 etc. also is equivalent to be that non-target is repaired line.
In the present embodiment, two first maintenance threads 111 lay respectively at the two ends of grid line 102, intersect each other with the two ends of grid line 102, and first maintenance thread 111 is preferred to be formed with layer with the data lines 103 of repairing line as non-target.Article two, second maintenance thread 205 is formed on the color membrane substrates, intersects each other accordingly with data line 103.First maintenance thread 111 and second maintenance thread 205 are interconnected through conducting sphere 301 and connection electrode 113.
Present embodiment and embodiment one are similar, can realize the reparation to grid line, and have reduced the coupling capacitance of overlapping region between maintenance thread and other metal wires, can reduce the decay of transmission signals in the maintenance thread, have improved display quality.
The technical scheme of embodiment one and embodiment two can independently adopt, and also can combine to adopt.Outer peripheral areas can be provided with a circle or enclose the maintenance thread of data line more, a circle also can be set or enclose the maintenance thread of grid line more.Each encloses the maintenance thread certain distance that staggers each other and gets final product, mutually not influence.
First maintenance thread, second maintenance thread and the quantity that is connected via hole all are not limited to shown in embodiment one and the embodiment two; As long as second maintenance thread can be communicated with first maintenance thread as requested; The maintenance requirements design that line is repaired according to target in the quantity of first maintenance thread and position, the quantity and the position that connect via hole are set according to the connection position needs of first maintenance thread and second maintenance thread.One second maintenance thread can connect two first maintenance threads, and two second maintenance threads can join end to end into ring with two first maintenance threads.
Embodiment three
The fragmentary top TV structure synoptic diagram of array base palte in the liquid crystal panel that Fig. 8 provides for the embodiment of the invention three.In the present embodiment, with data line 103 be target to repair line be that example describes, the situation that grid line 102 is repaired line as target is similarly.In the present embodiment, second maintenance thread 205 (zone shown in the dot-and-dash line is the position of second maintenance thread on the corresponding color membrane substrates among Fig. 8) intersects with the data line 103 of repairing line as target each other, and with first maintenance thread 111 certain distance that staggers each other; Connect the side that via hole 112 is formed at least two data lines 103, specifically be formed in the side of every data line 103 in the present embodiment; The pattern of connection electrode 113 extends to the below of second maintenance thread 205.
The purpose that second maintenance thread 205 and first maintenance thread 111 stagger is: when liquid crystal panel is implemented to repair after to box, should avoid blocking of second 205 pairs first maintenance threads 111 of maintenance thread.When needs are repaired certain bar data line 103; The crossover location of this data line 103 and first maintenance thread 111 is welded to each other with formation pad 1, and first maintenance thread 111 is cut off to form cut-out point 2 in the position in these data line 103 both sides connection electrode 113 outsides.Same reparation operation is done in the opposite end of this data line 103.Through such recovery scenario, the data line 103 of this disconnection can be connected to first maintenance thread 111 through connection electrode 113, conducting sphere 301 and second maintenance thread 205, is connected to the opposite end again, accomplishes and repairs.Can not form coupling capacitance with each bar data line 103 after first maintenance thread 111 breaks off, second maintenance thread 205 intersects to come conducting image voltage signal each other with each bar data line 103, but because distance increases the influence that can significantly reduce coupling capacitance.
Form the situation of connection electrode for the side that has only two data lines; If certain the bar data line between these two data lines breaks off; Can weld; And with two connection electrode both sides cut-outs, then the image voltage signal can play the effect that reduces coupling capacitance through second maintenance thread to a certain extent in the zone at these two connection electrode two ends.Density is set can sets as required of connection electrode, for example several data lines promptly are provided with a connection electrode at interval, reduce coupling capacitance and process implementing difficulty two aspect problems thereby take into account.
In the present embodiment, first maintenance thread 111 can as shown in Figure 8ly form ring-type like this on array base palte, perhaps also can be pattern independently, in conjunction with connecting into ring by second maintenance thread 205 shown in the previous embodiment.
Liquid crystal panel provided by the present invention, first maintenance thread and second maintenance thread are not limited to through being connected via hole and connection electrode is connected.For example, first maintenance thread and second maintenance thread can be formed on the superficial layer of substrate, directly link to each other through electric conductor.Perhaps, second maintenance thread also can be directed to substrate surface through similar connection via hole and the connection electrode that is arranged on the color membrane substrates, thereby realizes being communicated with.
The embodiment of the invention also provides a kind of LCD, comprises the liquid crystal panel that any embodiment of the present invention provides.Through the part maintenance thread is arranged on the color membrane substrates, increased the distance between the All other routes overlapping region on maintenance thread and the array base palte, can reduce coupling capacitance, reduce the attenuation of coupling capacitance to institute's transmission signals in the maintenance thread.
The embodiment of the invention also provides a kind of manufacturing approach of liquid crystal panel; Comprise and make array base palte and color membrane substrates respectively; And with array base palte and color membrane substrates flow process to box and filling liquid crystal layer; The flow process of making array base palte is included at least and forms the step that target is repaired line pattern on first underlay substrate, and also comprises:
On first underlay substrate, form the pattern of first maintenance thread, this first maintenance thread is positioned at the outer peripheral areas of array base palte, and first maintenance thread is repaired the different layer setting of line with target and intersected each other;
On second underlay substrate of color membrane substrates, form the pattern of second maintenance thread;
Array base palte and color membrane substrates during to box, are being formed electric conductor between array base palte and color membrane substrates, this electric conductor is communicated with first maintenance thread and second maintenance thread.
Wherein, specifically can be doped with conducting sphere in this envelope frame glue between array base palte and color membrane substrates, applying envelope frame glue at formation electric conductor between array base palte and the color membrane substrates, conducting sphere is as electric conductor.
Can first maintenance thread and second maintenance thread all be formed on the surface of substrate, so that directly contact with electric conductor.In the practical application, it generally is data line or grid line etc. that target is repaired line.When target reparation line was data line, then first maintenance thread and grid line adopted composition technology to form synchronously.When target reparation line was grid line, then first maintenance thread and data line adopted composition technology to form synchronously.
First maintenance thread generally is formed on grid line layer or data line layer, so, can further include the step that preparation connects via hole and connection electrode, that is:
On first maintenance thread, form at least two in the dielectric layer covered and connect via hole, connect the top that via hole is positioned at first maintenance thread; In connecting via hole, fill connection electrode, this connection electrode connects first maintenance thread and exposes the surface at array base palte.
The pattern of second maintenance thread generally is positioned at the surface of color membrane substrates, and electric conductor can be communicated with first maintenance thread and second maintenance thread through the contact connection electrode.
For reducing change, preferably to existing technology:
Public electrode on second maintenance thread and the color membrane substrates adopts composition technology to form synchronously, and the pattern space of the pattern of second maintenance thread and public electrode;
Pixel electrode on connection electrode and the array base palte adopts composition technology to form synchronously, and the pattern space of the pattern of connection electrode and pixel electrode.
Because the concrete preparation technology of liquid crystal panel depends on the structure in the liquid crystal panel, the application's technical scheme can be corresponding has multiple embodiment, is that example describes with typical four mask composition technologies below.
Embodiment four
Fig. 9 and Figure 10 are respectively the process flow diagram of manufacturing array substrate and color membrane substrates in the manufacturing approach of the liquid crystal panel that the embodiment of the invention four provides, and specifically liquid crystal panel structure is that example describes to present embodiment among the embodiment one to form.
The method of manufacturing array substrate is as shown in Figure 9, comprising:
Step 11, on first underlay substrate, adopt magnetron sputtering technique deposition grid metallic film, form the pattern that comprises grid line, gate electrode, public electrode wire, converges the line and first maintenance thread through composition technology;
The thickness of grid metallic film can adopt metals such as molybdenum, aluminium, alumel, molybdenum and tungsten alloy, chromium or copper for
to
, also can use the unitized construction of above-mentioned different materials film.Composition technology specifically comprise adopt that mask is made public, sequence of operations such as development and chemical etching.
Step 12, employing chemical vapor deposition method successive sedimentation gate insulation layer film, amorphous silicon membrane and data line metallic film on first underlay substrate that forms above-mentioned pattern adopt the duotone mask to carry out composition technology and form the pattern that comprises data line, source electrode, drain electrode and active layer;
The gate insulation layer membraneous material is silicon nitride normally; Also can use monox and silicon oxynitride etc.; Its thickness for
to
amorphous silicon membrane that thickness is about
is identical with the material of grid line to
material of data line metallic film, its thickness is about
arrives
Step 13, forming deposit passivation layer film on first underlay substrate of above-mentioned pattern, forming through composition technology and comprise passivation layer via hole and the pattern that is connected via hole;
Passivation layer via hole is formed in the passivation layer corresponding to the position of drain electrode.Connect the position of via hole, and be formed in passivation layer and the gate insulation layer corresponding to first maintenance thread.The material of passivation layer can be silicon nitride or silicon dioxide, and its thickness is about
to
Step 14, form deposit transparent conductive film on first underlay substrate of above-mentioned pattern, forming the pattern that comprises pixel electrode and connection electrode through composition technology.
The material of transparent conductive film can be indium tin oxide (Indium Tin Oxides; Be called for short ITO) or indium-zinc oxide (Indium Zinc Oxides; Be called for short IZO) or aluminum zinc oxide, its thickness is between
to
.
The method of making color membrane substrates is shown in figure 10, comprising:
Step 21, on second underlay substrate, utilize chemical vapor deposition method deposit red resin bed, form red color film resin through composition technology;
Step 22, utilize chemical vapor deposition method deposition green resin layer on second underlay substrate of above-mentioned pattern forming, form green color film resin through composition technology;
Step 23, utilize chemical vapor deposition method deposition blue resins layer on second underlay substrate of above-mentioned pattern forming, form blue color film resin through composition technology;
The order of step 21-23 is not limit, and the thickness of color film resin is about
to
Step 24, deposit black resin layer forming on second underlay substrate of above-mentioned pattern, form black matrix, can also further form chock insulator matter on the black matrix so that after to box, keep box thick through composition technology;
Step 25, form deposit transparent conductive film on second underlay substrate of above-mentioned pattern, forming the pattern that comprises the common electrode layer and second maintenance thread through composition technology.
Coated with liquid crystal alignment films on the array base palte of accomplishing above-mentioned steps and color membrane substrates, and form orientation slots.Splash into liquid crystal on a substrate therein then, and coating frame sealing glue is to box.Include conducting sphere in the envelope frame glue, its diameter is the 3-5 micron, is about array base palte behind the box and the box between the color membrane substrates thickly, and second maintenance thread can pass through the conducting sphere connection with being connected.For guaranteeing reliable linking to each other, need to guarantee to be about 0.1-0.4MPa to certain pressure is arranged behind the box.
The manufacturing approach of liquid crystal panel provided by the invention is not limited to the foregoing description, can make the liquid crystal panel that any embodiment of the present invention provides, and according to the difference of concrete structure in the liquid crystal panel corresponding flow process is arranged.Adopt technical scheme of the present invention, less to the flow process change of existing manufacturing liquid crystal panel, it is low therefore to improve cost, is easy to realize.
What should explain at last is: above embodiment is only in order to explaining technical scheme of the present invention, but not to its restriction; Although with reference to previous embodiment the present invention has been carried out detailed explanation, those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement; And these are revised or replacement, do not make the spirit and the scope of the essence disengaging various embodiments of the present invention technical scheme of relevant art scheme.