CN102198641B - Super-hard abrasive grinding wheel with head face having abrasives in phyllotaxis arrangement and production method thereof - Google Patents
Super-hard abrasive grinding wheel with head face having abrasives in phyllotaxis arrangement and production method thereof Download PDFInfo
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Abstract
本发明的叶序排布磨料端面超硬磨料砂轮,包括砂轮基体,砂轮基体的工作表面具有符合生物学叶序理论的多个磨粒或磨粒族,多个磨粒或磨粒族通过金属结合剂固定在砂轮基体上,多个磨粒或磨粒族按生物学的叶序理论形成多条逆时针叶列线沟槽,和多条顺时针叶列线沟槽。本发明可确保砂轮工作表面磨粒或磨粒族排布符合叶序理论的H.Vogel模型,实现砂轮工作表面的地貌形态可控性。磨料的固结使用镍或镍钴合金作为结合剂固结。该砂轮能够控制磨削区域内磨粒切削状态、冷却液的分布和磨削温度分布,达到最小的磨削力与比能耗、最小的磨削温度与烧伤,最小的砂轮磨损和最佳的工件表面完整性等,提高了超硬磨料砂轮端面磨削的综合磨削性能。
The superabrasive grinding wheel with phyllotaxy arrangement abrasive end face of the present invention comprises a grinding wheel base body, the working surface of the grinding wheel base body has a plurality of abrasive particles or groups of abrasive particles conforming to the theory of biological phyllotaxy, and the plurality of abrasive particles or groups of abrasive particles pass through the metal The bonding agent is fixed on the grinding wheel substrate, and multiple abrasive grains or groups of abrasive grains form multiple counterclockwise leaf line grooves and multiple clockwise leaf line grooves according to the biological phyllotaxy theory. The invention can ensure that the arrangement of abrasive particles or groups of abrasive particles on the working surface of the grinding wheel complies with the H. Vogel model of the phyllotaxy theory, and realizes the controllability of the topography of the working surface of the grinding wheel. Abrasives are consolidated using nickel or nickel-cobalt alloy as a binder. The grinding wheel can control the cutting state of abrasive grains, the distribution of coolant and the distribution of grinding temperature in the grinding area to achieve the minimum grinding force and specific energy consumption, the minimum grinding temperature and burns, the minimum grinding wheel wear and the best The surface integrity of the workpiece, etc., improves the comprehensive grinding performance of the end face grinding of the superabrasive grinding wheel.
Description
技术领域 technical field
本发明属于高效精密磨削加工领域,是一种新型的超硬磨料磨具的设计与制造方法。该砂轮的特点是把生物学中的叶序理论应用到磨削加工中的砂轮设计及制造领域中,使端面磨削用超硬磨料砂轮表面形貌满足葵花籽粒分布排列的H.Vogel 模型。主要应用于磨削加工光学零件、半导体晶片、陶瓷零件和难加工金属材料零件等的制造领域过程中,能够获得较高的表面完整性,减低磨削热损伤、磨削力和比能耗,提高砂轮的使用寿命和磨削效率,对高效精密磨削精密零件有着重要的意义。 The invention belongs to the field of high-efficiency precision grinding, and is a novel design and manufacturing method of superhard abrasives. The characteristic of this grinding wheel is that the phyllotaxy theory in biology is applied to the design and manufacture of grinding wheels in grinding processing, so that the surface morphology of superabrasive grinding wheels for end grinding meets the H. Vogel model of sunflower seed distribution. Mainly used in the manufacturing process of grinding optical parts, semiconductor wafers, ceramic parts and difficult-to-machine metal material parts, etc., it can obtain high surface integrity, reduce grinding heat damage, grinding force and specific energy consumption, Improving the service life and grinding efficiency of grinding wheels is of great significance for efficient and precise grinding of precision parts.
背景技术 Background technique
磨削加工是机械制造中重要的加工工艺。随着机械产品精度、可靠性和寿命的要求不断提高,难加工金属材料、工程陶瓷材料、光学晶体材料和半导体材料的应用增多,给磨削加工提出了许多新挑战,在这种情况下超硬磨料磨具得到了广泛的发展和应用。根据磨削原理可知,影响磨削加工过程的因素很多,例如磨粒粒度、有效磨粒数、切削厚度、切削宽度和接触弧长等因素。在众多的影响因素中,砂轮表面磨粒的分布情况对加工精度的影响最大。目前超硬磨料砂轮表面的磨料分布是一种随机分布,而且是不可控的。随机分布带来无效磨削刃和磨削比能耗增大,砂轮阻塞和磨削表面损伤大问题,因此,如何实现砂轮表面工程化可控是领域的技术关键所在。 Grinding is an important processing technology in mechanical manufacturing. With the continuous improvement of the precision, reliability and service life of mechanical products, the application of difficult-to-machine metal materials, engineering ceramic materials, optical crystal materials and semiconductor materials has increased, and many new challenges have been raised for grinding. Hard abrasive abrasives have been widely developed and used. According to the grinding principle, there are many factors that affect the grinding process, such as abrasive grain size, effective abrasive grain number, cutting thickness, cutting width, and contact arc length. Among the many influencing factors, the distribution of abrasive grains on the surface of the grinding wheel has the greatest impact on the machining accuracy. At present, the abrasive distribution on the surface of the superabrasive grinding wheel is a random distribution, and it is uncontrollable. Random distribution brings about invalid grinding edges and increased specific energy consumption of grinding, as well as major problems of grinding wheel clogging and grinding surface damage. Therefore, how to realize controllable engineering of grinding wheel surface is the key technology in the field.
近年来,磨粒有序化排布和开槽砂轮的研究表明,特定的砂轮的地貌特征和砂轮的结构在提高砂轮的磨削性能方面有显著效果,但在砂轮表面设计参数的合理化选择问题上缺少理论依据。如果参数选择不当,就会引起磨削的不稳定性和磨削效率低下。因此本发明基于生物学的进化结果而得到的叶序排布理论,来设计制造实现砂轮工作表面磨料的排布,实现砂轮表面磨料分布的可控性,解决上面所述的磨削中问题。实现端面磨削用超硬磨料砂轮的高效精密磨削。 In recent years, studies on the orderly arrangement of abrasive grains and grooved grinding wheels have shown that the specific topographical characteristics of the grinding wheel and the structure of the grinding wheel have a significant effect on improving the grinding performance of the grinding wheel, but the rational selection of the design parameters of the grinding wheel surface lack of theoretical basis. If the parameters are not selected properly, it will cause grinding instability and low grinding efficiency. Therefore, the present invention designs and manufactures the arrangement of abrasives on the working surface of the grinding wheel based on the theory of phyllotaxy arrangement obtained from the biological evolution results, realizes the controllability of the distribution of abrasives on the surface of the grinding wheel, and solves the above-mentioned problems in grinding. Realize high-efficiency and precise grinding of superabrasive grinding wheels for end face grinding.
发明内容 Contents of the invention
本发明的目的是为解决上述磨削中的问题而提供一种叶序排布磨料端面超硬磨料砂轮及其生产方法 The object of the present invention is to provide a superabrasive grinding wheel with phyllotaxy arrangement abrasive end face and its production method in order to solve the above-mentioned problems in grinding
采用的技术方案是: The technical solutions adopted are:
本发明的叶序排布磨料端面超硬磨料砂轮,包括砂轮基体,其特征在于所述的砂轮基体的工作表面具有符合生物学叶序理论的多个磨粒或磨粒族,多个磨粒或磨粒族通过金属结合剂固定在砂轮基体上,多个磨粒或磨粒族按生物学的叶序理论形成多条逆时针叶列线沟槽,和多条顺时针叶列线沟槽。 The superabrasive grinding wheel with phyllotaxy arrangement abrasive end face of the present invention comprises a grinding wheel base, which is characterized in that the working surface of the grinding wheel base has a plurality of abrasive grains or abrasive grain families conforming to the biological phyllotaxy theory, and a plurality of abrasive grains Or the abrasive grain family is fixed on the grinding wheel substrate through a metal bond, and multiple abrasive grains or abrasive grain families form multiple counterclockwise leaf line grooves and multiple clockwise leaf line grooves according to the biological phyllotaxy theory .
本发明的叶序排布磨料端面超硬磨料砂轮的生产方法,包括以下工艺过程: The production method of the phyllotaxy arrangement abrasive end face superabrasive grinding wheel of the present invention comprises the following process:
首先,设计并制造出砂轮基体,砂轮基体的材料是碳钢,砂轮基体的硬度在HRC40以上,直径可根据使用要求确定;然后,更根据砂轮表面所设计的叶序排布磨料(粗粒度磨料以磨粒点排布,细粒度磨料以多磨粒形成的族作为排布点)图案制造出光刻掩膜版;在后,将砂轮基体涂覆紫外光光刻胶,并在紫外光下利用模版进行掩膜光刻和固化;最后,采用电镀超硬磨料砂轮的电镀工艺进行预电镀基体、置砂、加厚电镀和前后处理工艺得到叶序排布磨粒或磨粒族端面磨削用超硬磨料砂轮。这样的制造工艺方法可以实现磨粒或磨料族的叶序排布可控性。 Firstly, design and manufacture the base of the grinding wheel. The material of the base of the grinding wheel is carbon steel. The hardness of the base of the grinding wheel is above HRC40, and the diameter can be determined according to the requirements of use; then, the abrasives (coarse-grained abrasives) are arranged according to the leaf sequence designed on the surface of the grinding wheel. Arrangement of abrasive grains, fine-grained abrasives are arranged in groups of multiple abrasive grains as arrangement points) pattern to manufacture a photolithographic mask; after that, the grinding wheel substrate is coated with ultraviolet photoresist, and the template is used under ultraviolet light Mask photolithography and curing; finally, the electroplating process of electroplated superabrasive grinding wheel is used for pre-plating substrate, sand placement, thickening electroplating and pre- and post-processing processes to obtain phyllotaxic arrangement of abrasive grains or super abrasive grains for end face grinding. Hard abrasive wheels. Such a manufacturing process method can realize the controllability of the phyllotaxic arrangement of abrasive grains or abrasive groups.
本发明可确保砂轮工作表面磨粒或磨粒族排布符合叶序理论的H. Vogel 模型,实现砂轮工作表面的地貌形态可控性。磨料的固结使用镍或镍钴合金作为结合剂固结。该砂轮能够控制磨削区域内磨粒切削状态、冷却液的分布和磨削温度分布,达到最小的磨削力与比能耗、最小的磨削温度与烧伤,最小的砂轮磨损和最佳的工件表面完整性等,提高了超硬磨料砂轮端面磨削的综合磨削性能。 The invention can ensure that the arrangement of abrasive particles or groups of abrasive particles on the working surface of the grinding wheel conforms to the H. Vogel model of the phyllotaxy theory, and realizes the controllability of the topography of the working surface of the grinding wheel. Abrasives are consolidated using nickel or nickel-cobalt alloy as a binder. The grinding wheel can control the cutting state of abrasive grains, the distribution of coolant and the distribution of grinding temperature in the grinding area to achieve the minimum grinding force and specific energy consumption, the minimum grinding temperature and burns, the minimum grinding wheel wear and the best The surface integrity of the workpiece, etc., improves the comprehensive grinding performance of the end face grinding of the superabrasive grinding wheel.
附图说明 Description of drawings
图1 是磨粒或磨粒族叶序排布砂轮的结构示意图。 Figure 1 is a schematic diagram of the structure of abrasive grains or abrasive grain family phyllodes arrangement grinding wheel.
图2是磨粒叶序排布砂轮的电镀法制造工艺流程图。 Fig. 2 is a flow chart of the electroplating manufacturing process of the grinding wheel with phyllotaxy arrangement of abrasive grains.
具体实施方式 Detailed ways
本发明的叶序排布磨料端面超硬磨料砂轮,包括砂轮基体1,砂轮基体1的工作表面具有符合生物学叶序理论的多个磨粒2,多个磨粒2通过镍结合剂固定在砂轮基体1上。多个磨粒2按生物学的叶序理论形成多条逆时针叶列线沟槽3,和多条顺时针叶列线沟槽4。
The superabrasive grinding wheel with phyllotaxy arrangement abrasive end face of the present invention comprises a grinding wheel base body 1, the working surface of the grinding wheel base body 1 has a plurality of
生物学的叶序理论H.Vogel 模型,即植物的籽粒极坐标角度满足 ,籽粒块极坐标径向位置满足。其中n是籽粒的序数,k是生长系数。H.Vogel 模型是典型的描述葵花籽粒结构排布规律的模型。葵花籽粒结构的排布具有表面对热辐射的最大吸收,形成的斜列线螺旋沟槽对流体作用时有发散效应的特征,籽粒的几何排布满足黄金分割律。这些为砂轮表面合理化排布磨料,实现砂轮高性能化提供了可观可行性。在砂轮表面工程化设计时,可以把一个磨粒或多个磨粒所组成的磨粒族作为一个籽粒点进行排布,形成具有叶序排布磨料的超硬砂轮。通过改变H.Vogel 模型中的相关参数实现磨粒或磨粒族排布的可控性,从而获得最优化的端面磨削用超硬磨料砂轮,提高其磨削性能。 Biological phyllotaxy theory H. Vogel model, that is, the polar coordinate angle of the plant grain satisfies , the radial position of the polar coordinates of the grain block satisfies . where n is the ordinal number of the kernel and k is the growth coefficient. The H. Vogel model is a typical model describing the structure and arrangement of sunflower seeds. The arrangement of the sunflower grain structure has the maximum absorption of heat radiation on the surface, and the formed oblique helical groove has the characteristics of divergence effect when acting on the fluid, and the geometric arrangement of the grain satisfies the law of the golden section. These provide considerable feasibility for the rational arrangement of abrasives on the surface of the grinding wheel and the realization of high performance of the grinding wheel. In the engineering design of the grinding wheel surface, one abrasive grain or a group of abrasive grains composed of multiple abrasive grains can be arranged as a grain point to form a superhard grinding wheel with phyllodesically arranged abrasives. By changing the relevant parameters in the H.Vogel model, the controllability of the arrangement of abrasive grains or abrasive grain groups can be realized, so as to obtain the optimal superabrasive grinding wheel for end grinding and improve its grinding performance.
本发明的叶序排布磨料端面超硬磨料砂轮的生产方法,包括以下工艺过程: The production method of the phyllotaxy arrangement abrasive end face superabrasive grinding wheel of the present invention comprises the following process:
1).利用CAD软件基于H.Vogel 模型(,)制作出按叶序理论排布的图案,并通过制版机制作掩膜版。 1). Using CAD software based on the H.Vogel model ( , ) to make a pattern arranged according to the phyllotaxy theory, and make a mask plate through the plate making machine.
2).设计出磨粒叶序排布砂轮的基体结构。基体材料可选择中碳钢、碳素工具钢、合金钢或轴承钢等,镀覆超硬磨料表面的热处理硬度大于HRC40,直径可根据实际需求确定,基体的其他尺寸和结构可根据具体实际需求确定。 2). Design the matrix structure of the abrasive grain phyllotaxy arrangement grinding wheel. The matrix material can be medium carbon steel, carbon tool steel, alloy steel or bearing steel, etc., the heat treatment hardness of the coated superabrasive surface is greater than HRC40, the diameter can be determined according to actual needs, and other dimensions and structures of the matrix can be determined according to specific actual needs Sure.
3). 按照图2的工艺流程制造砂轮。其中各个过程相关说明如下: 3). Manufacture the grinding wheel according to the technological process in Fig. 2. The relevant descriptions of each process are as follows:
a) 光刻叶序排布图案:对砂轮工作表面进行去毛刺(使用砂纸)→电化学除油与溶剂处理→干燥→涂覆紫外感光胶(SU8或感光油墨)→干燥固化→掩膜曝光(可利用打印好叶序排布图案的菲林版覆盖在紫外线感光干膜上,然后利用紫外线灯管进行曝光)→显影(放入到显影剂溶液中,显影剂按1:100兑水)→清洗与干燥。电化学除油时的电化学除油剂配方为氢氧化钠16g/L, 碳酸钠40g/L,磷酸钠16g/L;除油时把砂轮基体转挂在电化学除油剂溶液中,溶液温度为50℃~60℃,接通电流密度为10的电源,电极为石墨,先阴极处理1分钟,然后阳极处理3分钟。溶剂除油是采用丙酮溶剂擦洗。 a) Photolithographic phyllotaxy pattern: deburring the working surface of the grinding wheel (using sandpaper) → electrochemical degreasing and solvent treatment → drying → coating UV photosensitive adhesive (SU8 or photosensitive ink) → drying and curing → mask exposure (You can use the film plate with the printed phyllotaxy pattern to cover the UV photosensitive dry film, and then use the UV lamp to expose)→Development (put it into the developer solution, and the developer is mixed with water at a ratio of 1:100)→ Wash and dry. The electrochemical degreasing agent formula for electrochemical degreasing is sodium hydroxide 16g/L, sodium carbonate 40g/L, sodium phosphate 16g/L; The temperature is 50 ℃ ~ 60 ℃, the current density is 10 The power supply, the electrode is graphite, and the cathode is treated for 1 minute, and then the anode is treated for 3 minutes. Solvent degreasing is scrubbing with acetone solvent.
b). 基体表面涂非导电绝缘胶。 b). The surface of the substrate is coated with non-conductive insulating glue.
c). 配制电镀液:硫酸镍250g/L~300g/L氯化镍30~60 g/L;硫酸钴8 g/L;硼酸35~40g/L;十二烷基硫酸钠0.05~0.1g/L;1,4-丁炔醇0.3g/L;糖精0.8 g/L; c). Preparation of electroplating solution: nickel sulfate 250g/L~300g/L Nickel chloride 30-60 g/L; cobalt sulfate 8 g/L; boric acid 35-40 g/L; sodium lauryl sulfate 0.05-0.1 g/L; 1,4-butynol 0.3 g/L; saccharin 0.8g/L;
d). 镀前处理:酸洗(盐酸,体积比为1:1)→冷水冲洗→阳极处理(阳极处理溶液:硫酸,按体积比为2:3兑水;在溶液温度为20℃~30℃,电流密度为25的电流作用下,电源负极用石墨,正极接砂轮基体,通电3分钟)→冲洗入电镀槽电镀。 d). Pre-plating treatment: pickling (hydrochloric acid, volume ratio 1:1) → cold water rinse → anodic treatment (anodic treatment solution: sulfuric acid, mixed with water at a volume ratio of 2:3; when the solution temperature is 20 ℃ ~ 30 ℃, the current density is 25 Under the action of current, graphite is used for the negative electrode of the power supply, and the positive electrode is connected to the grinding wheel substrate, and the power is applied for 3 minutes)→Rinse into the electroplating tank for electroplating.
e). 磨粒前处理:丙酮浸泡10分钟,然后稀硝酸煮30分钟→冷却→蒸馏水冲洗至中性→浸泡在电镀液中待用。 e). Pretreatment of abrasive grains: Soak in acetone for 10 minutes, then cook in dilute nitric acid for 30 minutes → cool → rinse with distilled water until neutral → soak in electroplating solution for use.
f).电镀过程:基体做接阴极,镍板接阳极。电镀的工艺条件为电镀液pH值为3~5 ,温度为45℃~60℃。预镀和上砂的电流密度为0.25~0.5,上砂厚度为磨粒平均半径的10﹪左右;加厚的电流密度为1~2,加厚厚度为磨粒的2/3高度。 f). Electroplating process: the substrate is connected to the cathode, and the nickel plate is connected to the anode. The process conditions of electroplating are that the pH value of the electroplating solution is 3-5, and the temperature is 45°C-60°C. The current density of pre-plating and sanding is 0.25-0.5, and the thickness of sanding is about 10% of the average radius of abrasive grains; the current density of thickening is 1-2 , the thickened thickness is 2/3 of the height of the abrasive grains.
g).后处理:脱膜(利用脱膜剂溶液,脱膜剂按1:60兑水)去除胶层,清洗,形成叶序排布磨粒或磨粒族电镀结合剂超硬砂轮。 g). Post-processing: stripping (using the stripping agent solution, the stripping agent is mixed with water at a ratio of 1:60) to remove the glue layer, clean, and form a phyllotaxic arrangement of abrasive grains or abrasive grain group electroplating bond superhard grinding wheels.
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