CN102173238A - Vacuum imprinting device, vacuum laminating device and manufacturing method of laminated optical assembly - Google Patents

Abstract

A method for manufacturing a vacuum imprinting device, a vacuum laminating device and a layered optical component. The vacuum imprinting device and the vacuum laminating device respectively include a vacuum chamber, a downloading platform, an uploading platform and a curing device. The uploading platform is disposed in the vacuum chamber relative to the downloading platform, and can move toward the downloading platform to perform imprinting or tiling operations. The curing device is used to cure an optical adhesive layer to form an optical layer. The manufacturing method respectively utilizes the vacuum imprinting device and the vacuum laminating device to form a plurality of optical layers on a substrate, thereby forming the layered optical component. The present invention uses machines to form an optical adhesive layer in a vacuum environment to effectively suppress the bubble phenomenon generated in the layered structure formed by the optical layer after curing.

Description

Vacuum imprinting device, vacuum lamination device and method for manufacturing layered optical components

technical field

The invention relates to a method for manufacturing a layered optical component and an embossing device and a laminating device thereof, in particular to a method for manufacturing a layered optical component using a vacuum process and a vacuum embossing device and a vacuum laminating device for it.

Background technique

The prior art layered optical components are manufactured by forming multi-layer optical layers on a substrate, and the multi-layer optical layers are sequentially cured by optical glue, wherein patterns can be printed on the optical layer by using a template as required. In the process of the prior art, the layered optical component is sequentially fabricated and formed in an atmospheric environment through processes such as coating, rolling, and curing. In the rolling process, the operator needs to align the template or protective film with the optical adhesive layer, and then use the rolling wheel to roll, which will easily lead to insufficient lamination accuracy, and easy to introduce air bubbles during lamination and rolling , Rolling is not easy to control the lamination gap and the machine needs to be moved before curing, which may easily cause variation in the thickness of the optical adhesive layer. In addition, in the process of forming the optical layer using the rolling process using a template, the template still needs to be manually demoulded after the optical adhesive layer is cured. However, due to the large uncertainties in the manual demoulding operation, it is easy to produce problem of instability.

Contents of the invention

The technical problem to be solved by the present invention is to provide a vacuum imprinting device, which uses the vacuum environment and the characteristics of precise positioning of the machine to effectively control the thickness of the optical layer and suppress the phenomenon of air bubbles between the optical layers after curing.

In order to achieve the above object, the present invention provides a vacuum imprinting device, which includes a vacuum chamber, a loading platform, an loading platform and a curing device. The loading platform is arranged in the vacuum chamber to carry a substrate, and an optical glue layer is arranged on it. The loading platform is arranged in the vacuum chamber relative to the loading platform to carry a template. The loading platform can move towards the loading platform so that the template can imprint a pattern on the optical adhesive layer. The curing device is used for curing the embossed optical adhesive layer to form an optical layer on the substrate. Thereby, the vacuum imprinting device uses vacuum to suppress the possibility of introducing voids when the template imprints the optical adhesive layer, and can control the pressing down of the upper stage smoothly and accurately, so that the thickness of the cured optical layer is uniform and without bubble.

Another object of the present invention is to provide a vacuum lamination device, which also utilizes the characteristics of the vacuum environment and the precise positioning of the machine to effectively control the thickness of the optical layer and suppress the phenomenon of air bubbles between the optical layer and the protective film after curing.

In order to achieve the above object, the present invention provides a vacuum lamination device, which includes a vacuum chamber, a loading platform, an loading platform and a curing device. The loading platform is arranged in the vacuum chamber to carry a substrate, on which a first optical layer is formed, and an optical glue layer is arranged on the first optical layer. The upper stage is arranged in the vacuum chamber relative to the lower stage for carrying a protective film, and the upper stage can move toward the lower stage to spread the protective film on the optical adhesive layer. The curing device is used for curing the optical adhesive layer to form a second optical layer on the first optical layer. In this way, the vacuum lamination device also utilizes vacuum to suppress the possibility of introducing voids when the protective film is spread on the optical adhesive layer, and can control the pressing down of the upper stage smoothly and accurately, so that the cured second The optical layer is uniform in thickness and free of bubbles.

Another object of the present invention is to provide a manufacturing method that utilizes the vacuum embossing device and the vacuum laminating device of the present invention to manufacture a layered optical component. Therefore, the manufacturing method also utilizes the characteristics of the vacuum environment and the precise positioning of the machine to achieve The thickness dimension of each optical layer of the layered optical component is effectively controlled and the phenomenon of air bubbles generated in the layered structure of the layered optical component after curing is suppressed.

In order to achieve the above object, the present invention provides a method for manufacturing a layered optical component, using the vacuum embossing device and vacuum bonding device of the present invention to manufacture a layered optical component, the vacuum embossing device includes a first vacuum chamber, a first loading platform, a first loading platform and a first curing device, the vacuum lamination device includes a second vacuum chamber, a second loading platform, a second loading platform and a second curing device, The first unloading station and the first uploading station are arranged in the first vacuum chamber, and the second unloading station and the second uploading station are arranged in the second vacuum chamber; for other further descriptions, please refer to the foregoing description, and will not repeat them here . The manufacturing method includes: preparing a substrate and placing it on the first loading platform; coating a first optical adhesive layer on the substrate; preparing a template and fixing it on the first loading platform; Vacuuming; moving the first loading platform towards the first loading platform so that the template imprints a pattern on the first optical adhesive layer; using the first curing device to cure the imprinted first optical adhesive layer to forming a first optical layer on the substrate; taking out the substrate and the first optical layer; placing the substrate and the first optical layer on the second loading platform; coating a second optical layer on the first optical layer optical adhesive layer; preparing a protective film, fixed on the second upper stage; vacuuming the second vacuum chamber; moving the first upper stage towards the second lower stage so that the protective film is flat on the first on the second optical adhesive layer; and using the second curing device to cure the second optical adhesive layer to form a second optical layer on the first optical layer, thereby forming the layered optical component. Thereby, the substrate, the first optical layer, the second optical layer and the protective film of the layered optical component can be precisely positioned, and the thicknesses of the first optical layer and the second optical layer can be precisely controlled , the first optical layer, the second optical layer and the protective film can also be closely attached.

The technical effects of the present invention are: the present invention forms the optical adhesive layer in a vacuum environment to effectively suppress the phenomenon of air bubbles generated in the layered structure formed by the optical layer after curing, and uses machines to improve the process accuracy and eliminate manual operations. Instability, so the present invention can effectively solve the problems of the prior art.

The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

Description of drawings

1 is a schematic diagram of a vacuum imprinting device according to a preferred embodiment of the present invention;

2 is a schematic diagram of the vacuum imprinting device in FIG. 1 in another state;

Fig. 3 is a schematic diagram of the relative installation positions of the loading platform, the servo shaft and the gap sensing device;

Fig. 4 is a schematic diagram of relative setting positions of thimble, template and clamping member;

5 is a schematic diagram of the optical layer being released from the template;

6 is a schematic diagram of a vacuum bonding device according to another preferred embodiment of the present invention;

Fig. 7 is a schematic diagram of the vacuum bonding device in Fig. 6 in another state;

Fig. 8 is the schematic diagram of tool;

9 is a flowchart of a method for manufacturing a layered optical component according to a preferred embodiment of the present invention;

Figure 10 is a schematic diagram of a layered optical component.

Among them, reference signs

1 Vacuum imprinting device 4 Layered optical components

5 vacuum pressing device 12, 52 vacuum chamber

14, 54 download station 16, 56 upload station

18, 58 curing device 20 templates

22 clips 24 magnets

26, 68 servo shaft 28, 70 gap sensing device

30 thimbles 32 blowing device

42 substrate 44, 46 optical adhesive layer

45 first optical layer 47 second optical layer

60 protective film 62 magnet

64 fixed plate 66 tools

72 heating device 122, 522 bottom plate

124, 524 cover body 162 center of gravity

182, 582 UV lamps 222 chute

262 angle 322 nozzle

562 Vent 662 Bracket

664 fixed part 666 vacuum suction cup

S100～S124 implementation steps

Detailed ways

Below in conjunction with accompanying drawing, structural principle and working principle of the present invention are specifically described:

Please refer to FIGS. 1 and 2 . FIG. 1 is a schematic diagram of a vacuum imprinting device 1 according to a preferred embodiment of the present invention, and FIG. 2 is a schematic diagram of another state of the vacuum imprinting device 1 in FIG. 1 . The vacuum imprinting device 1 includes a vacuum chamber 12 , a loading platform 14 , an loading platform 16 and a curing device 18 . The vacuum chamber 12 is mainly composed of a base plate 122 and a cover body 124, the cover body 124 can be separated from the base plate 122, so as to put the object into operation; when the base plate 122 and the cover body 124 are closed, as shown in Figure 2, the The vacuum chamber 12 is vacuumed, and the pumping device is a prior art, not otherwise described and shown in the figure. The loading platform 14 is disposed in the vacuum chamber 12 on the bottom plate 122 for supporting a substrate 42 on which an optical glue layer 44 is disposed. The loading platform 16 is disposed in the vacuum chamber 12 relative to the unloading platform 14 for carrying a template 20 . The loading platform 16 can move toward the unloading platform 14 so that the template 20 imprints a pattern on the optical adhesive layer 44 . The curing device 18 is used for curing the embossed optical adhesive layer 44 to form an optical layer on the substrate 42 .

Furthermore, the vacuum imprinting device 1 includes a plurality of L-shaped clamping components 22 , which are disposed on the upper stage 16 to form a sliding slot 222 , and the template 20 can slide into the sliding slot 222 and be clamped by the clamping components 22 . In practice, the template 20 can be a nickel plate. At this time, the vacuum imprinting device 1 can also include a plurality of magnets 24, which can be movably arranged in the loading platform 16 to absorb the template 20 on the loading platform 16; thereby , when the magnet 24 moves toward the download platform 14, the magnet 24 can magnetically attract the template 20 on the loading platform 16, and when the magnet 24 moves away from the download platform 14, the magnetic attraction to the template 20 can be released, so that the template 20 can be automatically The loading table 16 moves away. It should be added that the aforementioned L-shaped clamping member 22 and the magnet 24 can be used alternatively, and the present invention is not limited to using them at the same time.

The vacuum imprinting device 1 includes three servo shafts 26 (please also refer to FIG. 3, in FIG. 1 and FIG. 2, only two servo shafts 26 are shown in the figure), which pass through the cover body 124 and are connected to the upper stage 16. The servo shafts 26 can be independently controlled to drive the loading platform 16 to move relative to the downloading platform 14 . The three servo axes 26 can control the flatness between the loading stage 16 and the unloading stage 14 , that is, control the flatness between the substrate 42 and the template 20 to make the thickness of the optical adhesive layer 44 uniform. In this embodiment, the vacuum imprinting device 1 includes three gap sensing devices 28 (please also refer to FIG. 3, in FIG. 1 and FIG. 2, only two of the gap sensing devices 28 are shown), corresponding to the servo axis 26 is set on the downloading platform 14 to control the movement of the uploading platform 16 . The gap sensing device 28 can sense the distance between the loading stage 16 and the unloading stage 14 to feed back and control the movement of the servo shaft 26 , thereby controlling the thickness of the optical adhesive layer 44 . In this embodiment, the gap sensing device 28 is directly corresponding to the servo shaft 26, which can directly correspond to the control of the movement of the servo shaft 26, simplifying the control, but the present invention is not limited thereto; The shaft 26 is limited to drive the movement of the loading stage 16 .

In addition, the installation position of the servo shaft 26 relative to the loading platform 16 is based on the principle of considering the effective control movement of the loading platform 16 and the average support, for example, the relative installation positions of the loading platform 16, the servo shaft 26 and the gap sensing device 28 in FIG. 3 As shown in the schematic diagram, the outline position of the loading platform 16 is represented by a rectangular frame, the position of the servo shaft 26 is represented by a large circle, the gap sensing device 28 is represented by a small circle, and the center of gravity 162 of the loading platform 16 is represented by a cross mark. The connection between the position of the servo shaft 26 and the center of gravity 162 forms three approximately equal included angles 262 , and the distances between the position of the servo shaft 26 and the center of gravity 162 are not much different. The gap sensing device 28 is disposed close to the corresponding servo shaft 26 to simplify the feedback control complexity. However, the present invention is not limited to the aforementioned arrangement.

Please go back to Figure 1 and Figure 2. In this embodiment, the optical adhesive layer 44 is a UV adhesive, so the curing device 18 includes an ultraviolet lamp 182 for irradiating ultraviolet light on the optical adhesive layer 44 to cure and form the optical layer. Moreover, in this embodiment, the downloading platform 14 is transparent, and the ultraviolet lamp 182 is disposed under the downloading platform 14 to directly and uniformly irradiate the ultraviolet light to the optical adhesive layer 44 . However, the present invention is not limited thereto. In practice, different curing devices can be used in accordance with different characteristics of the optical adhesive layer to achieve curing of the optical adhesive layer.

In this embodiment, the vacuum imprinting device 1 includes a binomial pin 30 disposed through the loading platform 16 for bending the template 20 when the optical layer is released from the mold. The thimble 30 can be driven by a pneumatic cylinder, and the setting position of the thimble 30 relative to the template 20 can be referred to as shown in FIG. The position of the thimble 30 is roughly located in the middle of the clamping member 22 . When the optical layer (i.e. the first optical layer 45 hereinafter) is demolded, the loading platform 16 moves upwards, and the thimble 30 protrudes relative to the loading platform 16 to bend the template 20, as shown in FIG. 5 , which helps The optical layer is released from the mold.

Please go back to Figure 1 and Figure 2. In this embodiment, the vacuum imprinting device 1 includes an air blowing device 32 disposed beside the loading platform 14 for blowing air toward the template 20 and the optical layer through the nozzle 322 when the optical layer is released from the mold. The air blowing device 32 can be disposed outside the cover body 124, which facilitates the installation of the air blowing device 32; however, the present invention is not limited thereto. It should be added that only the nozzle 322 and some pipelines of the air blowing device 32 are shown in FIG. 1 and FIG. 2 to simplify the drawing, and the device (including the gas source) is in the prior art and will not be described in detail. In addition, in this embodiment, the optical layer is demoulded from the template 20 while being assisted by an ejector pin 30 and an air blowing device 32 , as shown in FIG. 5 ; but the present invention is not limited thereto.

Please refer to FIG. 6 and FIG. 7 , FIG. 6 is a schematic diagram of a vacuum bonding device 5 according to another preferred embodiment of the present invention, and FIG. 7 is a schematic diagram of another state of the vacuum bonding device 5 in FIG. 6 . The vacuum lamination device 5 includes a vacuum chamber 52 , a loading platform 54 , an loading platform 56 and a curing device 58 . The vacuum chamber 52 is mainly composed of a base plate 522 and a cover body 524. The cover body 524 can be separated from the base plate 522 for the object insertion operation; when the base plate 522 and the cover body 524 are closed, as shown in FIG. The vacuum chamber 52 is vacuumed, and the pumping device is a prior art, not otherwise described and shown in the figure. The loading platform 54 is disposed in the vacuum chamber 12 on the bottom plate 522 for supporting the substrate 42 , on which a first optical layer 45 is formed, and an optical adhesive layer 46 is disposed on the first optical layer 45 . The loading platform 56 is disposed in the vacuum chamber 52 relative to the loading platform 54 for carrying a protective film 60 . The loading platform 56 can move toward the loading platform 54 to spread the protective film 60 on the optical adhesive layer 46 . The curing device 58 is used for curing the optical glue layer 46 to form a second optical layer on the first optical layer 45 . It should be added that the substrate 42 and the first optical layer 45 formed thereon can be formed by using the vacuum embossing device 1 , or can be obtained from semi-finished products produced by other layered optical component processes.

Furthermore, the vacuum lamination device 5 includes two magnets 62 and two fixing plates 64 , the magnets 62 are disposed in the upper stage 56 , and the fixing plates 64 are adsorbed on the upper stage 56 corresponding to the magnets 62 for fixing the protective film 60 . In this embodiment, the protection film 60 is a PET film, but the present invention is not limited thereto, and other flexible films are also available; the fixing plate 64 can be an iron sheet or other magnetic sheets. In addition, in this embodiment, the upper stage 56 includes a plurality of vent holes 562, which are used to pump air through the vent holes 562 to vacuum absorb the protective film 60 on the upper stage 56, so that the protective film 60 can be placed on the upper stage more easily. on the platform 56 , and is used to ventilate the vent hole 562 to separate the protective film 60 from the loading platform 56 , so that the protective film 60 can be easily detached from the loading platform 56 .

In this embodiment, the vacuum lamination device 5 includes a tool 66 for assisting the attachment of the protective film 60 on the upper stage 56 . Please refer to FIG. 8 , which is a schematic diagram of tool 66 . The tool 66 includes a bracket 662 , two fixing parts 664 and at least one vacuum chuck 666 disposed on each fixing part 664 . When in use, the fixing plate 64 is first placed next to the vacuum chuck 666 , and then the protective film 60 is flatly placed on the fixing plate 64 and the vacuum chuck 666 and sucked by the vacuum chuck 666 . Insert the tool 66 into the vacuum chamber 52, and put the protective film 60 in flat contact with the loading platform 56, the magnet 62 will absorb the fixed plate 64, and then release the vacuum from the vacuum chuck 666, and the operation of attaching the protective film 60 to the loading platform 56 is completed ; At this point the tool 66 can be removed from the vacuum chamber 52 .

Please return to Figure 6 and Figure 7. The vacuum lamination device 5 includes three servo shafts 68 passing through the cover body 524 and connected to the loading platform 56 . The servo shafts 68 can be independently controlled to drive the loading platform 56 to move relative to the unloading platform 54 . In this embodiment, the vacuum lamination device 5 includes a three-gap sensing device 70 , which is disposed on the loading platform 54 corresponding to the servo shaft 68 to control the movement of the loading platform 56 . For other descriptions of the servo shaft 68 and the gap sensing device 70 , refer directly to other descriptions of the aforementioned servo shaft 26 and the gap sensing device 28 , which will not be repeated here.

In this embodiment, the optical adhesive layer 46 is a UV adhesive, so the curing device 58 includes an ultraviolet lamp 582 for irradiating ultraviolet light on the optical adhesive layer 46 to cure and form the second optical layer. Moreover, in this embodiment, the loading platform 56 is transparent, and the ultraviolet lamp 582 is disposed above the loading platform 56 to uniformly irradiate ultraviolet light to the optical adhesive layer 46 , but the invention is not limited thereto. The foregoing description about the curing device 18 is also applicable here, and will not be repeated here.

In this embodiment, the loading platform further includes a heating device 72, such as a heating rod, for heating the optical adhesive layer 46, which can increase the fluidity of the optical adhesive layer 46, and facilitates the protective film 60 to spread on the optical adhesive layer 46 . It is added that when the protective film 60 has an alignment structure on its surface, when the upper stage 56 presses the protective film 60 on the optical adhesive layer 46, the alignment structure can also be imprinted on the optical adhesive layer 46 at the same time. .

Please refer to FIG. 9 , which is a flowchart of a method for manufacturing a layered optical component according to a preferred embodiment of the present invention. The manufacturing method utilizes the vacuum embossing device 1 and the vacuum laminating device 5 to manufacture a layered optical component 4 (see FIG. 10 ), wherein the vacuum embossing device 1 and the vacuum laminating device 5 have been described above and will not be repeated here. In the manufacturing method, a substrate 42 is first prepared and placed on the loading platform 14 of the vacuum imprinting device 1 , as shown in step S100 . The manufacturing method includes coating an optical adhesive layer 44 on the substrate 42, as shown in step S102; wherein, in practice, the optical adhesive layer 44 can be coated on the substrate 42 first, and then the substrate 42 together with the optical adhesive layer 44 Place them on the download platform 14 together. In this manufacturing method, a template 20 is also prepared and fixed on the loading stage 16 of the vacuum imprinting device 1 , as shown in step S104 . The execution sequence of steps S100 to S104 is not limited to the sequence shown in FIG. 9 ; after the above steps are completed, the state of the vacuum imprinting device 1 can be referred to in FIG. 1 .

The manufacturing method then closes the cover body 124 of the vacuum imprinting device 1 with the bottom plate 122 to evacuate the vacuum chamber 12 of the vacuum imprinting device 1, as shown in step S106; the upper stage 16 of the vacuum imprinting device 1 faces The loading platform 14 moves to make the template 20 emboss a pattern on the optical adhesive layer 44 , as shown in step S108 . This pattern is used to form a surface geometric structure on the optical adhesive layer 44 , such as sawtooth, cone, wave, etc., so as to achieve the desired optical effect. After the foregoing steps are completed, the state of the vacuum imprinting device 1 can be referred to FIG. 2 . The manufacturing method then utilizes the curing device 18 of the vacuum imprinting device 1 to cure the embossed optical adhesive layer 44 to form a first optical layer 45 , as shown in step S110 . In practice, before the implementation of step S110, the vacuum chamber 12 can be broken first, and the loading stage 14 can absorb the substrate 42 by vacuum adsorption, which can prevent the first optical layer 45 from introducing excessive residual stress and maintain The relative position of the first optical layer 45 and the substrate 42 . After the curing is completed, the cover body 124 is raised to facilitate taking out the substrate 42 and the first optical layer 45 formed thereon, as shown in step S112 .

Further, step S104 may include sliding the template 20 into the slide groove 222 formed by the clamping member 22 to achieve the purpose of being fixed on the loading platform 16 . Moreover, the vacuum imprinting device 1 is designed to have a magnetic attraction function, so the step S104 may include moving the magnet 24 toward the loading platform 14 to attract the template 20 to the loading platform 16 through the magnet 24 . For other descriptions of the clamping member 22 and the magnet 24 , please refer to the above, and will not repeat them here.

In addition, the vacuum imprinting device 1 is designed with an independently controllable servo shaft 26 to drive the movement of the loading platform 16 , so step S108 may include independently controlling the servo shaft 26 to drive the loading platform 16 to move toward the unloading platform 14 . In addition, the vacuum imprinting device 1 is provided with a gap sensing device 28, so step S108 can independently control the servo shaft 26 to drive the upper stage 16 to move toward the lower stage 14, so that the template 20 contacts the optical adhesive layer 44, and according to the gap The feedback signal from the sensing device 28 controls the stop position of the moving loading stage 16 so that the template 20 imprints the pattern on the optical adhesive layer 44 and can precisely control the thickness of the optical adhesive layer 44 . For other descriptions of the servo shaft 26 and the gap sensing device 28 , please refer to the above, and will not repeat them here.

In addition, in this embodiment, the curing device 18 includes a UV lamp 182, so step S110 can be to break the vacuum of the vacuum chamber 12, and use the UV lamp 182 arranged under the loading platform 14 to irradiate ultraviolet light toward the loading platform 16. Embossing the optical adhesive layer 44 to cure the embossed optical adhesive layer 44 to form the first optical layer 45 . For other descriptions about the curing device 18 , please refer to the above, and will not repeat them here.

In step S112, before taking out the substrate 42 from the vacuum chamber 12, the first optical layer 45 needs to be released from the template 20, and the vacuum imprinting device 1 is designed with a thimble 30 and an air blowing device 32 to assist the release, so the step S112 includes moving the loading platform 16 away from the loading platform 14, while making the thimble 30 protrude from the loading platform 16 to bend the template 20, and blowing air toward the template 20 and the first optical layer 45 using the blowing device 32 at the same time. See Figure 5. For other descriptions about the thimble 30 and the air blowing device 32 , please refer to the above, and will not repeat them here.

Next, the manufacturing method will use the vacuum lamination device 5 to perform another optical layer forming process on the substrate 42 , which will be described as follows. In the manufacturing method, the substrate 42 and the first optical layer 45 formed thereon are placed on the loading platform 54 of the vacuum lamination device 5 , as shown in step S114 . The manufacturing method includes coating an optical adhesive layer 46 on the first optical layer 45, as shown in step S116; wherein, in practice, the optical adhesive layer 46 can be coated on the first optical layer 45 first, and then the tape The substrate 42 with the first optical layer 45 is placed on the loading platform 54 together with the optical glue layer 46 . In this manufacturing method, the protective film 60 is also prepared and fixed on the upper stage 56 of the vacuum lamination device 5, as shown in step S118. The execution sequence of step S114 to step S118 is not limited to the sequence shown in FIG. 9 ; after the above steps are completed, the state of the vacuum lamination device 5 can be referred to in FIG. 6 .

The manufacturing method then seals the cover body 524 of the vacuum lamination device 5 with the bottom plate 522 to evacuate the vacuum chamber 52 of the vacuum lamination device 5, as shown in step S120; make the upper stage 56 of the vacuum lamination device 5 face The loading platform 54 moves to spread the protective film 60 on the optical adhesive layer 46 , as shown in step S122 . After the foregoing steps are completed, the state of the vacuum lamination device 5 can be referred to FIG. 7 . The manufacturing method then utilizes the curing device 58 of the vacuum lamination device 5 to cure the flattened optical adhesive layer 46 to form a second optical layer 47 , and then form the layered optical component 4 , as in step S124 . In practice, before the implementation of step S124, the vacuum chamber 52 can be broken first, and the loading table 54 can absorb the substrate 42 by vacuum adsorption, which can prevent the second optical layer 47 from introducing excessive residual stress and maintain The relative position of the second optical layer 47 and the substrate 42 . After the curing is completed, the cover body 524 is raised to facilitate taking out the substrate 42 and the first optical layer 45 and the second optical layer 47 formed thereon, as shown in FIG. 10 .

Further, the step S118 may include that the fixing plate 64 is adsorbed on the upper stage 56 corresponding to the magnet 62 , so as to fix the protective film 60 on the upper stage 56 . When the tool 66 is used to fix the protective film 60 on the loading platform 56, step S118 may include setting the fixing plate 64 next to the vacuum chuck 666, laying the protective film 60 on the tool 66, and using the vacuum chuck 666 to absorb the protective film 60, Tool 66 is stretched in vacuum chamber 52, and protective film 60 is attached on the upper stage 56, and fixed plate 64 is adsorbed on upper stage 56 by magnet 62 to fix protective film 60, releases the vacuum of vacuum chuck 666, and Tool 66 is removed. Wherein, in order to attach the protective film 60 to the loading platform 56 more flatly, the step S118 may include pumping air through the vent hole 562 to vacuum absorb the protective film 60 on the loading platform 56 . For other descriptions of the tool 66 and the air hole 562 , please refer to the above, and will not repeat them here.

Similar to the vacuum embossing device 1 , the vacuum pressing device 5 is also designed with an independently controllable servo shaft 68 , so step S116 may include independently controlling the servo shaft 68 to drive the loading stage 56 to move toward the unloading stage 54 . Similarly, the vacuum lamination device 5 is provided with a gap sensing device 70, so step S116 can independently control the servo shaft 68 to drive the upper stage 56 to move toward the lower stage 54, so that the protective film 60 contacts the optical adhesive layer 46 , and according to the feedback signal of the gap sensing device 70, control the stop position of the moving loading stage 56, so that the protective film 60 is flatly pressed on the optical adhesive layer 46 and the thickness of the optical adhesive layer 46 can be precisely controlled. For other descriptions of the servo shaft 68 and the gap sensing device 70 , please refer to the above, and will not repeat them here.

In addition, in this embodiment, the curing device 58 includes a UV lamp 582, so step S124 can be to break the vacuum of the vacuum chamber 52, and use the UV lamp 582 arranged above the loading platform 56 to irradiate ultraviolet light toward the loading platform 54. The optical adhesive layer 46 is used to cure the optical adhesive layer 46 to form the second optical layer 47 . For other descriptions about the curing device 58 , please refer to the above, and details will not be repeated here.

In addition, in this embodiment, the loading platform 56 is provided with a heating device 72, so step S116 may include using the heating device 72 to heat the optical adhesive layer 46, which can increase the fluidity of the optical adhesive layer 46 and facilitate the laying of the protective film 60 on the optical adhesive layer 46 . For other descriptions of the heating device 72 , please refer to the above, and will not repeat them here. Furthermore, when the protective film 60 has an alignment structure on its surface, the step S116 may include using the protective film 60 to imprint the alignment structure on the optical adhesive layer 46 . For other descriptions of the alignment structure, please refer to the previous text, and details will not be repeated here.

To sum up, the present invention builds a vacuum manufacturing environment to suppress the bubble phenomenon of the optical layer formed after the optical adhesive layer is cured by using the vacuum characteristics, and uses machine tools to improve the process accuracy and eliminate the instability of manual operation properties to effectively solve the problems of previous technologies.

Certainly, the present invention also can have other multiple embodiments, without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding changes and deformations according to the present invention, but these corresponding Changes and deformations should belong to the scope of protection of the appended claims of the present invention.

Claims (37)

1. a vacuum imprinting apparatus is characterized in that, comprises:

One vacuum chamber;

Once microscope carrier is arranged in this vacuum chamber, and in order to carry a substrate, it is provided with an optics glue-line;

Microscope carrier on one is arranged in this vacuum chamber with respect to this time microscope carrier, and in order to carry a template, microscope carrier can move so that this template impresses a pattern on this optics glue-line towards this time microscope carrier on this; And

One solidification equipment, in order to the optics glue-line that solidifies this impression to form an optical layers on this substrate.

2. vacuum imprinting apparatus as claimed in claim 1 is characterized in that, also comprises a plurality of L shaped holders, is arranged on this on microscope carrier to form a chute, in order to this template of clamping.

3. vacuum imprinting apparatus as claimed in claim 1 is characterized in that, also comprises a magnet, is arranged at movably on this in microscope carrier, in order to adsorb this template on microscope carrier on this.

4. vacuum imprinting apparatus as claimed in claim 1 is characterized in that, also comprises three axis servomotors, is connected with microscope carrier on this, and microscope carrier moves with respect to this time microscope carrier in order to drive upward.

5. vacuum imprinting apparatus as claimed in claim 4 is characterized in that, also comprises three gap sensing apparatus, to should being arranged at this time microscope carrier by three axis servomotors, in order to control moving of microscope carrier on this.

6. vacuum imprinting apparatus as claimed in claim 1 is characterized in that this solidification equipment comprises a ultraviolet lamp, in order to irradiating ultraviolet light in this optics glue-line to solidify to form this optical layers.

7. vacuum imprinting apparatus as claimed in claim 6 is characterized in that, this time microscope carrier is transparent, and this ultraviolet lamp is arranged at this time microscope carrier below.

8. vacuum imprinting apparatus as claimed in claim 1 is characterized in that, also comprises a thimble, runs through microscope carrier setting on this, in order to this template of bending.

9. vacuum imprinting apparatus as claimed in claim 1 is characterized in that, also comprises a blowning installation, is arranged at by this time microscope carrier, in order to blow towards this template and this optical layers.

10. a vacuum pressing-combining device is characterized in that, comprises:

One vacuum chamber;

Once microscope carrier is arranged in this vacuum chamber, in order to carry a substrate, is formed with one first optical layers on it, and this first optical layers is provided with an optics glue-line;

Microscope carrier on one is arranged in this vacuum chamber with respect to this time microscope carrier, and in order to carry a diaphragm, microscope carrier can move so that this diaphragm is tiled on this optics glue-line towards this time microscope carrier on this; And

One solidification equipment is in order to solidify this optics glue-line to form one second optical layers on this first optical layers.

11. vacuum pressing-combining device as claimed in claim 10 is characterized in that, also comprises two magnet and two fixed heads, this magnet is arranged on this in microscope carrier, and this fixed head is to should magnet being adsorbed on this on microscope carrier, in order to fix this diaphragm.

12. vacuum pressing-combining device as claimed in claim 11 is characterized in that, also comprises an instrument, this instrument comprises two vacuum cups, adsorbs this diaphragm in order to utilize this vacuum cup, stretches in this vacuum chamber to fix this diaphragm on microscope carrier on this again.

13. vacuum pressing-combining device as claimed in claim 11; it is characterized in that; should go up microscope carrier and comprise a plurality of passages, in order to this passage being bled with this diaphragm of vacuum suction on microscope carrier this on, and in order to this passage ventilation with certainly upward microscope carrier separated this diaphragm.

14. vacuum pressing-combining device as claimed in claim 10 is characterized in that, also comprises three axis servomotors, is connected with microscope carrier on this, microscope carrier moves with respect to this time microscope carrier in order to drive upward.

15. vacuum pressing-combining device as claimed in claim 14 is characterized in that, also comprises three gap sensing apparatus, to should being arranged at this time microscope carrier by three axis servomotors, in order to control moving of microscope carrier on this.

16. vacuum pressing-combining device as claimed in claim 10 is characterized in that this solidification equipment comprises a ultraviolet lamp, in order to irradiating ultraviolet light in this optics glue-line to solidify to form this second optical layers.

17. vacuum pressing-combining device as claimed in claim 16 is characterized in that, microscope carrier is transparent on this, and this ultraviolet lamp is arranged at microscope carrier top on this.

18. vacuum pressing-combining device as claimed in claim 10 is characterized in that this time microscope carrier also comprises a heater, in order to heat this optics glue-line.

19. vacuum pressing-combining device as claimed in claim 10 is characterized in that this diaphragm has an alignment structure, in order to impress this alignment structure on this optics glue-line.

20. manufacture method, utilize a vacuum imprinting apparatus and a vacuum pressing-combining device to make a stratiform optical module, it is characterized in that, this vacuum imprinting apparatus comprises one first vacuum chamber, one first time microscope carrier, microscope carrier and one first solidification equipment on one first, this vacuum pressing-combining device comprises one second vacuum chamber, one second time microscope carrier, microscope carrier and one second solidification equipment on one second, microscope carrier is arranged in this first vacuum chamber on this first time microscope carrier and this first, microscope carrier is arranged in this second vacuum chamber on this second time microscope carrier and this second, and this manufacture method comprises the following step:

A prepares a substrate, is positioned on this first time microscope carrier;

B is coated with one first optics glue-line on this substrate;

C prepares a template, is fixed in this on first on the microscope carrier;

D vacuumizes this first vacuum chamber;

E make this on first microscope carrier move so that this template impresses a pattern on this first optics glue-line towards this first time microscope carrier;

F utilizes this first solidification equipment to solidify the first optics glue-line of this impression to form one first optical layers on this substrate;

G takes out this substrate and this first optical layers;

H places this substrate and this first optical layers on this second time microscope carrier;

I is coated with one second optics glue-line on this first optical layers;

J prepares a diaphragm, is fixed in this on second on the microscope carrier;

K vacuumizes this second vacuum chamber;

L make this on first microscope carrier move so that this diaphragm is tiled on this second optics glue-line towards this second time microscope carrier; And

M utilizes this second solidification equipment to solidify this second optics glue-line forming one second optical layers on this first optical layers, and then forms this stratiform optical module.

21. manufacture method as claimed in claim 20 is characterized in that, this vacuum imprinting apparatus also comprises a plurality of L shaped holders, is arranged on this first time microscope carrier to form a chute, and step c also comprises the following step: this template is slipped in this chute.

22. manufacture method as claimed in claim 20 is characterized in that, this vacuum imprinting apparatus comprises a magnet, is arranged at this movably on first in the microscope carrier, and step c is implemented by the following step:

This magnet is moved towards this first time microscope carrier; And

By this magnet this template is adsorbed in this on first on the microscope carrier.

23. manufacture method as claimed in claim 20 is characterized in that, this vacuum imprinting apparatus comprises three axis servomotors, with this on first microscope carrier be connected, step e also comprises the following step:

Independent this three axis servomotor of control, with drive this on first microscope carrier move towards this first time microscope carrier.

24. manufacture method as claimed in claim 23 is characterized in that, this vacuum imprinting apparatus also comprises three gap sensing apparatus, and to being arranged at this first time microscope carrier by three axis servomotors, step e is implemented by the following step:

Independent this three axis servomotor of control, with drive this on first microscope carrier move towards this first time microscope carrier so that this template contacts this first optics glue-line; And

According to the feedback signal of this three gaps sensing apparatus, control that this moves first on the stop position of microscope carrier so that this template impresses this pattern on this first optics glue-line.

25. manufacture method as claimed in claim 20 is characterized in that, this first solidification equipment comprises a ultraviolet lamp, and step f is implemented by the following step:

To this first vacuum chamber vacuum breaker; And

Utilize the first optics glue-line of this ultraviolet lamp irradiating ultraviolet light, so that the first optics glue-line of this impression solidify to form this first optical layers in this impression.

26. manufacture method as claimed in claim 25, it is characterized in that this first time microscope carrier is transparent, this ultraviolet lamp is arranged at this first time microscope carrier below, in step f, this ultraviolet lamp from this first time microscope carrier below towards this on first microscope carrier shine this ultraviolet light.

27. manufacture method as claimed in claim 20 is characterized in that, this vacuum imprinting apparatus also comprises a thimble, runs through this microscope carrier setting on first, and step g also comprises the following step:

Make this on first microscope carrier move away from this first time microscope carrier, make this thimble protrude in this microscope carrier on first simultaneously, with this template of bending.

28. manufacture method as claimed in claim 20 is characterized in that, this vacuum imprinting apparatus also comprises a blowning installation, is arranged at by this first time microscope carrier, and step g also comprises the following step:

Make this on first microscope carrier move away from this first time microscope carrier, utilize this blowning installation to blow simultaneously towards this template and this first optical layers.

29. manufacture method as claimed in claim 20 is characterized in that, this vacuum pressing-combining device also comprises two magnet and two fixed heads, and this magnet is arranged at this on second in the microscope carrier, and step j is implemented by the following step:

By this fixed head to should magnet being adsorbed in this on second on the microscope carrier, to fix this diaphragm in this on second on the microscope carrier.

30. manufacture method as claimed in claim 20 is characterized in that, this vacuum pressing-combining device also comprises an instrument, this instrument comprises two vacuum cups, this vacuum pressing-combining device also comprises two magnet and two fixed heads, and this magnet is arranged at this on second in the microscope carrier, and step j is implemented by the following step:

This two fixed head is arranged at by this two vacuum cup;

This diaphragm is tiled on this instrument;

Utilize this vacuum cup to adsorb this diaphragm;

This instrument is stretched in this second vacuum chamber;

Make this diaphragm be attached at this on second on the microscope carrier, and make this fixed head be adsorbed in this on second on the microscope carrier by this magnet;

Discharge this vacuum cup; And

Shift out this instrument.

31. manufacture method as claimed in claim 30 is characterized in that, this on second microscope carrier comprise a plurality of passages, step j also comprises the following step:

This passage is bled with this diaphragm of vacuum suction in this on second on the microscope carrier.

32. manufacture method as claimed in claim 20 is characterized in that, this vacuum pressing-combining device comprises three axis servomotors, with this on second microscope carrier be connected, step l also comprises the following step:

Independent this three axis servomotor of control, with drive this on second microscope carrier move towards this second time microscope carrier.

33. manufacture method as claimed in claim 32 is characterized in that, this vacuum pressing-combining device also comprises three gap sensing apparatus, and to being arranged at this second time microscope carrier by three axis servomotors, step l is implemented by the following step:

Independent this three axis servomotor of control, with drive this on second microscope carrier move towards this second time microscope carrier so that this diaphragm is contacted with on this second optics glue-line; And

According to the feedback signal of this three gaps sensing apparatus, control that this moves second on the stop position of microscope carrier so that this diaphragm concora crush is on this second optics glue-line.

34. manufacture method as claimed in claim 20 is characterized in that, this second solidification equipment comprises a ultraviolet lamp, and step m is implemented by the following step:

To this second vacuum chamber vacuum breaker; And

Utilize this ultraviolet lamp irradiating ultraviolet light in this second optics glue-line, so that this second optics glue-line solidify to form this second optical layers.

35. manufacture method as claimed in claim 34, it is characterized in that, this on second microscope carrier be transparent, this ultraviolet lamp is arranged at this microscope carrier top on second, in step m, this ultraviolet lamp the microscope carrier top shines this ultraviolet light towards this second time microscope carrier from this on second.

36. manufacture method as claimed in claim 20 is characterized in that, this second time microscope carrier also comprises a heater, and step l also comprises the following step:

Utilize this heater to heat this second optics glue-line.

37. manufacture method as claimed in claim 20 is characterized in that, this diaphragm has an alignment structure, and step l also comprises the following step:

Utilize this diaphragm to impress this alignment structure on this second optics glue-line.

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