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CN102156561B - Touch panel structure and manufacturing method thereof - Google Patents

Touch panel structure and manufacturing method thereof Download PDF

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CN102156561B
CN102156561B CN 201010115338 CN201010115338A CN102156561B CN 102156561 B CN102156561 B CN 102156561B CN 201010115338 CN201010115338 CN 201010115338 CN 201010115338 A CN201010115338 A CN 201010115338A CN 102156561 B CN102156561 B CN 102156561B
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touch panel
metal
manufacturing
filling
transparent conductive
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CN102156561A (en
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张原彰
郭光埌
徐伟智
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New Materials Co ltd
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New Materials Co ltd
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Abstract

The invention relates to a touch panel structure and a manufacturing method thereof, wherein the touch panel is provided with a light-transmitting substrate, and the lower surface of the light-transmitting substrate is provided with a plurality of lower transparent conductive structures which are arranged at intervals; the upper surface of the light-transmitting substrate is provided with a plurality of metal structures and upper transparent conductive structures which are arranged at intervals, filling structures are arranged among the metal structures, the thickness difference between the filling structures and the metal structures is within +/-30%, the upper transparent conductive structures cover the metal structures, the metal structures are protected by the upper transparent conductive structures, the metal structures can be prevented from being oxidized or scratched due to exposure, and the circuit can be prevented from short circuit.

Description

触控面板结构及其制造方法Touch panel structure and manufacturing method thereof

技术领域 technical field

本发明有关触控面板结构及其制造方法,旨在提供一种可保护金属结构而不会形成氧化或刮伤,确保电路不会发生短路的触控面板结构及其制造方法。The present invention relates to a touch panel structure and a manufacturing method thereof, and aims to provide a touch panel structure and a manufacturing method thereof that can protect metal structures from oxidation or scratches and ensure that circuits are not short-circuited.

背景技术 Background technique

触控板(Touch Panel)通常被配置在手机、照相机、PDA等电子产品的显示屏前方使用,以便增进机具操控及讯号输入的便利性;而在各式触控板种类中,由于电容式触控板具有性能稳定、使用寿命长等优点,因此逐渐被广泛使用在通讯产品(Communication)、计算机产品(Computer)以及消费类电子产品(Consumer)等方面;如所知者,习知电容式触控板的电容感测结构略包括一X轴感应层及一Y轴感应层,使X、Y轴感应层绝缘地设置该触控板体之内,并将X、Y轴感应层分别接地并连接至一控制电路,运作时,藉由使用者的手指或导体碰触的瞬间产生一个电容效应,因而可藉由电容值的变化确定手指或导体的位置;由于电容式触控板可用手指进行输入,具有输入操作的便利性,而其输入操作不需经过触压,不会让面板有承受反复应力、变形导致损害的缺点,所以产品性能稳定、使用寿命长。Touch panels are usually used in front of the display screens of electronic products such as mobile phones, cameras, PDAs, etc., in order to improve the convenience of machine control and signal input; among various types of touch panels, capacitive touch panels The control board has the advantages of stable performance and long service life, so it is gradually widely used in communication products (Communication), computer products (Computer) and consumer electronics products (Consumer); as you know, the conventional capacitive touch The capacitive sensing structure of the control panel roughly includes an X-axis sensing layer and a Y-axis sensing layer, so that the X-axis and Y-axis sensing layers are insulated to be set inside the touch panel body, and the X-axis and Y-axis sensing layers are respectively grounded and Connected to a control circuit, during operation, a capacitive effect is generated when the user's finger or conductor is touched, so the position of the finger or conductor can be determined by the change of capacitance value; since the capacitive touch panel can be controlled by fingers Input has the convenience of input operation, and its input operation does not need to go through touch pressure, which will not cause the panel to suffer repeated stress and deformation to cause damage, so the product performance is stable and the service life is long.

如图1所示为一种习有触控面板的结构示意图,该触控面板1设有一透光基板11,该透光基板11上表面设有复数间隔排列的上透明导电结构12,以作为X轴感应层,而该透光基板11下表面设有复数间隔排列的下透明导电结构13,以作为Y轴感应层,而各上透明导电结构12并覆盖有金属结构14,而各金属结构14裸露在外,容易形成氧化或被刮伤,使得电路无法正常传递而形成短路,进而影响整触控面板导通的结果。As shown in Figure 1 is a schematic structural view of a conventional touch panel, the touch panel 1 is provided with a light-transmitting substrate 11, the upper surface of the light-transmitting substrate 11 is provided with a plurality of upper transparent conductive structures 12 arranged at intervals, as The X-axis sensing layer, and the lower surface of the light-transmitting substrate 11 is provided with a plurality of lower transparent conductive structures 13 arranged at intervals as the Y-axis sensing layer, and each upper transparent conductive structure 12 is covered with a metal structure 14, and each metal structure 14 is exposed outside, which is easy to be oxidized or scratched, so that the circuit cannot be transmitted normally and a short circuit is formed, thereby affecting the conduction result of the entire touch panel.

故出现另种习有结构,如图2所示,进一步于各金属结构14上覆盖有透明光阻15,虽该透明光阻15覆盖于各金属结构14上可形成保护作用,可防止氧化及刮伤的情形;然而,制作透明光阻的步骤于制作上透明导电结构之后,而制作透明光阻需要较高的温度(例如150℃~250℃),此制作温度会影响上透明导电结构的特性,容易产生缺陷,进而影响整触控面板的特性。Therefore another kind of conventional structure appears, as shown in Figure 2, is further covered with transparent photoresist 15 on each metal structure 14, although this transparent photoresist 15 covers on each metal structure 14 can form protective effect, can prevent oxidation and The situation of scratches; however, the step of making transparent photoresist is after making the upper transparent conductive structure, and making transparent photoresist requires a higher temperature (for example, 150 ° C ~ 250 ° C), this manufacturing temperature will affect the upper transparent conductive structure characteristics, it is easy to produce defects, and then affect the characteristics of the entire touch panel.

发明内容 Contents of the invention

本发明所解决的技术问题在于提供一种可保护金属结构而不会形成氧化或刮伤,确保电路不会发生短路的触控面板结构及其制造方法。The technical problem to be solved by the present invention is to provide a touch panel structure and its manufacturing method that can protect the metal structure from oxidation or scratches and ensure that the circuit will not be short-circuited.

为达上述目的,本发明的触控面板设有一透光基板,而该透光基板下表面设有复数间隔排列的下透明导电结构;其中,该透光基板上表面设有复数间隔排列的金属结构以及上透明导电结构,各金属结构间设有填充结构,该填充结构与金属结构间的厚度差为±30%以内,而上透明导电结构则覆盖于各金属结构上,藉由上透明导电结构来保护该金属结构,可防止该金属结构因外露而形成氧化或刮伤,确保电路不会因此而短路。To achieve the above purpose, the touch panel of the present invention is provided with a light-transmitting substrate, and the lower surface of the light-transmitting substrate is provided with a plurality of lower transparent conductive structures arranged at intervals; wherein, the upper surface of the light-transmitting substrate is provided with a plurality of metal structures arranged at intervals structure and the upper transparent conductive structure, each metal structure is provided with a filling structure, the thickness difference between the filling structure and the metal structure is within ±30%, and the upper transparent conductive structure covers each metal structure, through the upper transparent conductive structure to protect the metal structure, which can prevent the metal structure from being oxidized or scratched due to exposure, so as to ensure that the circuit will not be short-circuited.

附图说明 Description of drawings

图1为习有触控面板的结构示意图;FIG. 1 is a schematic structural diagram of a conventional touch panel;

图2为另种习有触控面板的结构示意图;FIG. 2 is a schematic structural diagram of another conventional touch panel;

图3为本发明中触控面板的结构示意图;FIG. 3 is a schematic structural view of a touch panel in the present invention;

图4A~E为本发明中触控面板的制造流程示意图。4A-E are schematic diagrams of the manufacturing process of the touch panel in the present invention.

【图号说明】【Description of figure number】

触控面板1             透光基板11Touch panel 1 Translucent substrate 11

上透明导电结构12      下透明导电结构13Upper transparent conductive structure 12 Lower transparent conductive structure 13

金属结构14            透明光阻15Metal structure 14 Transparent photoresist 15

触控面板2             透光基板21Touch panel 2 Translucent substrate 21

上表面211             下表面212Upper surface 211 Lower surface 212

下透明导电结构22        金属结构23Lower transparent conductive structure 22 Metal structure 23

上透明导电结构24        开口25Upper transparent conductive structure 24 Opening 25

填充结构26              填充表层27Filling structure 26 Filling surface 27

感光区域271             未感光区域272Photosensitive area 271 Non-photosensitive area 272

具体实施方式 Detailed ways

本发明的触控面板2设有一透光基板21,如图3所示,该透光基板21设有上、下表面211、212,而该透光基板下表面212设有复数间隔排列的下透明导电结构22,该下透明导电结构22可以为铟锡氧化物(Indium Tin Oxide,ITO),该透光基板上表面211设有复数间隔排列的金属结构23以及上透明导电结构24,各金属结构23间设有开口25,各开口25内设有填充结构26(可以为透明光阻),该填充结构26与金属结构23间的厚度差为±30%以内,如图所示的实施例中,该填充结构26的厚度与该金属结构23的厚度相同,而上透明导电结构24则覆盖于各金属结构23上,该上透明导电结构24可以为铟锡氧化物(Indium TinOxide,ITO)。The touch panel 2 of the present invention is provided with a light-transmitting substrate 21. As shown in FIG. A transparent conductive structure 22, the lower transparent conductive structure 22 can be indium tin oxide (Indium Tin Oxide, ITO), the upper surface 211 of the light-transmitting substrate is provided with a plurality of metal structures 23 arranged at intervals and an upper transparent conductive structure 24, each metal Openings 25 are provided between the structures 23, and each opening 25 is provided with a filling structure 26 (which may be a transparent photoresist). The thickness difference between the filling structure 26 and the metal structure 23 is within ±30%, as shown in the embodiment shown in the figure Among them, the thickness of the filling structure 26 is the same as that of the metal structure 23, and the upper transparent conductive structure 24 covers each metal structure 23, and the upper transparent conductive structure 24 can be Indium Tin Oxide (Indium TinOxide, ITO) .

而本发明的触控面板结构制造方法,其至少包含下列步骤:And the manufacturing method of the touch panel structure of the present invention at least includes the following steps:

步骤A、提供一透光基板21,如图4A所示;Step A, providing a transparent substrate 21, as shown in FIG. 4A;

步骤B、形成复数金属结构23,藉由溅镀方式于该透光基板21一表面211形成复数金属结构23,而各金属结构23间并形成有开口25,其中先利用溅镀方式于该透光基板表面形成一金属膜,再利用黄光制程形成复数金属结构;Step B, forming a plurality of metal structures 23, forming a plurality of metal structures 23 on a surface 211 of the light-transmitting substrate 21 by sputtering, and forming openings 25 between each metal structure 23. Form a metal film on the surface of the optical substrate, and then use the yellow light process to form a complex metal structure;

步骤C、形成填充结构26,于各金属结构23间的开口25处形成有填充结构26,其中,先于透光基板21设置金属结构23的表面211涂布设置填充表层27(可以为透明光阻),如图4B所示,该填充表层27填充于开口25以及覆盖于金属结构23表面;再进行背面曝光,于透光基板21另侧表面212进行曝光,如图4C所示,并藉由各金属结构23作为光罩,并使该填充表层27形成有复数感光区域271以及未感光区域272;最后,可藉由显影方式移除各未感光区域272,各感光区域则形成填充结构26,如图4D所示,且如图所示的实施例中,该填充结构26可高于该金属结构23,且该填充结构26与金属结构23间的厚度差为±30%以内,该金属结构23以及填充结构26的厚度可以为1000A~5000A,而上述形成填充结构的制作温度可控制为150℃~250℃(以230℃为佳),制作时间可为30~60分钟(以30分钟为佳);Step C, forming the filling structure 26, the filling structure 26 is formed at the opening 25 between each metal structure 23, wherein, the surface 211 of the metal structure 23 is provided before the light-transmitting substrate 21, and the filling surface layer 27 (which can be transparent light Resistor), as shown in FIG. 4B, the filling surface layer 27 fills the opening 25 and covers the surface of the metal structure 23; and then performs back exposure, and exposes on the other side surface 212 of the light-transmitting substrate 21, as shown in FIG. 4C, and by Each metal structure 23 is used as a photomask, and the filling surface layer 27 is formed with a plurality of photosensitive regions 271 and non-photosensitive regions 272; finally, each non-photosensitive region 272 can be removed by developing, and each photosensitive region forms a filling structure 26 , as shown in FIG. 4D, and in the embodiment shown in the figure, the filling structure 26 can be higher than the metal structure 23, and the thickness difference between the filling structure 26 and the metal structure 23 is within ±30%, the metal The thickness of the structure 23 and the filling structure 26 can be 1000A to 5000A, and the fabrication temperature for forming the filling structure can be controlled at 150°C to 250°C (preferably 230°C), and the fabrication time can be 30 to 60 minutes (30 minutes or less). preferred);

步骤D、形成上透明导电结构24,如图4E所示,于各金属结构23上覆盖有上透明导电结构24;Step D, forming an upper transparent conductive structure 24, as shown in FIG. 4E, each metal structure 23 is covered with an upper transparent conductive structure 24;

步骤E、形成下透明导电结构22,于该透光基板另侧表面212形成复数间隔排列的下透明导电结构22,如图3所示。Step E, forming the lower transparent conductive structure 22 , forming a plurality of lower transparent conductive structures 22 arranged at intervals on the other surface 212 of the transparent substrate, as shown in FIG. 3 .

本发明藉由上透明导电结构24来覆盖保护该金属结构23,可防止该金属结构23因外露而形成氧化或刮伤,确保电路不会因此而短路,进而确保触控面板导通的结果,且本发明填充结构(透明光阻)的制作步骤于制作上透明导电结构之前,故不会影响上透明导电结构的特性,当然不容易产生缺陷,而不会影响整触控面板的特性。The present invention uses the upper transparent conductive structure 24 to cover and protect the metal structure 23, which can prevent the metal structure 23 from being oxidized or scratched due to exposure, and ensure that the circuit will not be short-circuited, thereby ensuring the conduction of the touch panel. Moreover, the manufacturing step of the filling structure (transparent photoresist) of the present invention is before manufacturing the upper transparent conductive structure, so the characteristics of the upper transparent conductive structure will not be affected, and of course defects are not easy to occur, and the characteristics of the entire touch panel will not be affected.

Claims (14)

1.一种触控面板结构,该触控面板设有一透光基板,而该透光基板下表面设有复数间隔排列的下透明导电结构;其特征在于: 1. A touch panel structure, the touch panel is provided with a light-transmitting substrate, and the lower surface of the light-transmitting substrate is provided with a plurality of lower transparent conductive structures arranged at intervals; it is characterized in that: 该透光基板上表面设有复数间隔排列的金属结构以及上透明导电结构,各金属结构间设有填充结构,而上透明导电结构则仅仅直接地覆盖于各金属结构上,而不覆盖与所述填充结构上; The upper surface of the light-transmitting substrate is provided with a plurality of metal structures arranged at intervals and an upper transparent conductive structure, and a filling structure is arranged between each metal structure, while the upper transparent conductive structure only directly covers each metal structure, and does not cover the metal structures. on the filling structure; 其中,所述填充结构为透明光阻。 Wherein, the filling structure is a transparent photoresist. 2.如权利要求1所述的触控面板结构,其特征在于,该上、下透明导电结构为铟锡氧化物。 2. The touch panel structure according to claim 1, wherein the upper and lower transparent conductive structures are indium tin oxide. 3.如权利要求1所述的触控面板结构,其特征在于,该填充结构进行背面曝光,于透光基板另侧表面进行曝光,并藉由各金属结构作为光罩,形成于各金属结构间。 3. The touch panel structure according to claim 1, wherein the filling structure is exposed on the other side of the light-transmitting substrate through back exposure, and is formed on each metal structure by using each metal structure as a photomask between. 4.如权利要求1所述的触控面板结构,其特征在于,该填充结构的厚度与该金属结构的厚度相同。 4. The touch panel structure according to claim 1, wherein the filling structure has the same thickness as the metal structure. 5.如权利要求1所述的触控面板结构,其特征在于,该填充结构与金属结构间的厚度差为±30%以内。 5 . The touch panel structure according to claim 1 , wherein the thickness difference between the filling structure and the metal structure is within ±30%. 6.一种触控面板结构的制造方法,其特征在于,其至少包含下列步骤: 6. A method for manufacturing a touch panel structure, characterized in that it at least comprises the following steps: A、提供一透光基板; A. Provide a transparent substrate; B、形成复数金属结构,于该透光基板一表面形成复数金属结构,而各金属结构间并形成有开口; B. Forming a plurality of metal structures, forming a plurality of metal structures on one surface of the light-transmitting substrate, and forming openings between each metal structure; C、形成填充结构,于各金属结构间的开口处形成有填充结构; C. A filling structure is formed, and a filling structure is formed at the openings between the metal structures; D、形成上透明导电结构,于各金属结构上覆盖有上透明导电结构; D. Forming an upper transparent conductive structure, covering each metal structure with an upper transparent conductive structure; E、形成下透明导电结构,于该透光基板另侧表面形成复数间隔排列的下透明导电结构。 E. Forming a lower transparent conductive structure, forming a plurality of lower transparent conductive structures arranged at intervals on the other surface of the light-transmitting substrate. 7.如权利要求6所述触控面板结构的制造方法,其特征在于,该步骤C进一步包含有下列步骤: 7. The manufacturing method of the touch panel structure according to claim 6, characterized in that the step C further comprises the following steps: C1、于透光基板设置金属结构的表面设置填充表层,该填充表层填充于开口以及覆盖于金属结构表面; C1. A filling surface layer is provided on the surface of the metal structure on the light-transmitting substrate, and the filling surface layer fills the opening and covers the surface of the metal structure; C2、进行背面曝光,于透光基板另侧表面进行曝光,并藉由各金属结构作为光罩,并使该填充表层形成有复数感光区域以及未感光区域; C2. Carry out back exposure, and perform exposure on the other side surface of the light-transmitting substrate, and use each metal structure as a photomask, and form a plurality of photosensitive areas and non-photosensitive areas on the filled surface layer; C3、移除各未感光区域,各感光区域则形成填充结构。 C3. Removing each non-photosensitive area, and forming a filling structure in each photosensitive area. 8.如权利要求7所述触控面板结构的制造方法,其特征在于,该步骤C3中藉由显影方式将未感光区域移除。 8 . The manufacturing method of the touch panel structure according to claim 7 , wherein in the step C3 , the unsensitized area is removed by developing. 9.如权利要求6或7所述触控面板结构的制造方法,其特征在于,该步骤B中先利用溅镀方式于该透光基板表面形成一金属膜,再利用黄光制程形成复数金属结构。 9. The manufacturing method of the touch panel structure according to claim 6 or 7, characterized in that in step B, a metal film is first formed on the surface of the light-transmitting substrate by sputtering, and then a plurality of metal films are formed by yellow light process structure. 10.如权利要求6或7所述触控面板结构的制造方法,其特征在于,该金属结构以及填充结构的厚度为1000A~5000A。 10 . The manufacturing method of the touch panel structure according to claim 6 or 7 , wherein the thickness of the metal structure and the filling structure is 1000A˜5000A. 11 . 11.如权利要求6或7所述触控面板结构的制造方法,其特征在于,该步骤C中形成填充结构的制作温度控制为150℃~250℃,制作时间为30~60分钟。 11. The manufacturing method of the touch panel structure according to claim 6 or 7, characterized in that, in the step C, the manufacturing temperature for forming the filling structure is controlled at 150° C.-250° C., and the manufacturing time is 30-60 minutes. 12.如权利要求11所述触控面板结构的制造方法,其特征在于,该制作温度为以230℃。 12 . The manufacturing method of the touch panel structure according to claim 11 , wherein the manufacturing temperature is 230° C. 13.如权利要求11所述触控面板结构的制造方法,其特征在于,该制作时间为30分钟。 13. The manufacturing method of the touch panel structure according to claim 11, wherein the manufacturing time is 30 minutes. 14.如权利要求6或7所述触控面板结构的制造方法,其特征在于,该步骤C中该填充结构与金属结构间的厚度差为±30%以内。 14. The manufacturing method of the touch panel structure according to claim 6 or 7, wherein in the step C, the thickness difference between the filling structure and the metal structure is within ±30%.
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CN102929472A (en) * 2012-11-27 2013-02-13 南昌欧菲光科技有限公司 Transparent conductor for capacitive touch panel
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CN107957819A (en) * 2017-12-29 2018-04-24 信利光电股份有限公司 A kind of production method of touch-screen
CN108417585B (en) * 2018-03-12 2021-04-13 京东方科技集团股份有限公司 Display substrate, manufacturing method thereof and display device

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