CN102095489B - Flow noise resistant sensitive body for vector hydrophone - Google Patents
Flow noise resistant sensitive body for vector hydrophone Download PDFInfo
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- CN102095489B CN102095489B CN2010105822485A CN201010582248A CN102095489B CN 102095489 B CN102095489 B CN 102095489B CN 2010105822485 A CN2010105822485 A CN 2010105822485A CN 201010582248 A CN201010582248 A CN 201010582248A CN 102095489 B CN102095489 B CN 102095489B
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Abstract
本发明涉及MEMS传感器领域中的矢量水听器，具体是一种矢量水听器用抗流噪声型敏感体。解决了现有矢量水听器抗流噪声能力弱的问题，包括用于敏感水声信号的敏感结构，敏感结构由双框结构支撑固定，双框结构包含外框、内框，内框的两正对边框分别通过折叠式弹簧与外框连接固定；敏感结构悬置于内框内，敏感结构半导体框架的两正对边框分别通过折叠式弹簧与内框连接固定，敏感结构半导体框架与内框间折叠式弹簧的伸缩方向、及外框与内框间折叠式弹簧的伸缩方向呈垂直关系。结构合理、紧凑，应用了芯片级减振弹簧，使得矢量水听器抑制流噪声的能力大为增强，探测距离延长，并能一次集成加工完成，一致性好，性能更加优异，更能适应水下恶劣的环境。
The invention relates to a vector hydrophone in the field of MEMS sensors, in particular to an anti-flow noise type sensitive body for a vector hydrophone. It solves the problem of weak anti-flow noise of existing vector hydrophones, including the sensitive structure used for sensitive underwater acoustic signals. The sensitive structure is supported and fixed by a double-frame structure. The double-frame structure includes an outer frame and an inner frame. The opposite frames are respectively connected and fixed by folding springs to the outer frame; the sensitive structure is suspended in the inner frame, and the two opposite frames of the sensitive structure semiconductor frame are respectively connected and fixed by folding springs to the inner frame, and the sensitive structure semiconductor frame is connected to the inner frame The expansion and contraction directions of the folding springs between the outer frame and the inner frame are perpendicular to the expansion and contraction directions of the folding springs. The structure is reasonable and compact, and the chip-level damping spring is applied, which greatly enhances the ability of the vector hydrophone to suppress flow noise, prolongs the detection distance, and can be completed in one integrated process, with good consistency, better performance, and better adaptability to underwater under harsh environment.
Description
Technical field
The present invention relates to the vector hydrophone in the MEMS sensor field, specifically is that a kind of vector hydrophone is with anti-current noisy-type sensitive body.
Background technology
Sonar is the knowledge that MISSILE LAUNCHING was advanced, implemented to the warship submarine in the rivers,lakes and seas, and its important component part-vector hydrophone is the perception and the conversion portion of sonar, is the critical component of decision sonar performance quality.The effect of vector hydrophone is the useful under water acoustical signal of perception, in order to the accurate position of definite target sound source, and various ground unrest is arranged in the rivers,lakes and seas; Comprise movable sound of aquatic organisms such as flow noise, sound of sea wave, fish and civilian ship or the like; With the sea, the sea originally is that There are billows three feet high even if there is no wind, even the surface is calm; Spring up as undercurrent under water in fact, so it is the most serious to the influence of vector hydrophone measurement result in this numerous ground unrest, will to count flow noise.In case vector hydrophone has picked up the acoustical signal that contains a large amount of flow noises, want filtering flow noise in follow-up processing of circuit, be very difficult and trouble.For example: the patent No. discloses a kind of " micro-electromechanical vector hydrophone " for the Chinese invention patent of " 200910073993.4 ", and this vector hydrophone has good sensitivity and frequency response effect in desirable anechoic tank.But just find once sea examination, when there is certain distance in the echo signal source, during code book fainter (like super-silent submarine), after passing through the decay of certain distance, just be buried among the flow noise.Flow noise in the ground unrest becomes the shielding of useful signal, has seriously restricted the performance optimization development and the practical applications of vector hydrophone.
In addition; The mounting means of vector hydrophone is one of factor that influences its measurement result equally; Its mounting means comprises hard connection and is flexible coupling; The hard connection refers to directly rigid being installed on the naval vessel of vector hydrophone, can't avoid naval vessel self engine vibration, stormy waves pontoon to wave the influence to vector hydrophone; Be flexible coupling and refer to that vector hydrophone realizes itself and the fixing of naval vessel by elastic medium; Cushioning effect based on elastic medium; Can improve the ability of vector hydrophone anti-current noise greatly; Microminiaturization can't be realized but be flexible coupling, and when realizing that hydrophone array is formed, the consistance and the stability of each nautical receiving set can't be guaranteed.
Summary of the invention
The present invention provides a kind of vector hydrophone with anti-current noisy-type sensitive body, in order to the overall performance of raising vector hydrophone in order to solve the problem a little less than the existing vector hydrophone anti-current noise ability.
The present invention adopts following technical scheme to realize: vector hydrophone is with anti-current noisy-type sensitive body; Comprise the sensitive structure that is used for responsive underwater sound signal; Said sensitive structure comprises semiconductor frame, is set up in the central cruciform semi-girder of semiconductor frame, vertical fixing in the miniature column of cruciform semi-girder central authorities (i.e. four beam infalls); Four beam end of cruciform semi-girder are respectively arranged with strain sensor (for example: voltage dependent resistor (VDR), resonance tunnel-through diode RTD etc.), and connect to form the Wheatstone bridge that is used to measure underwater sound signal; Said sensitive structure is by the two mount structure support fixation that adopt the processing of MEMS micro-processing technology to obtain; Said pair of mount structure comprises housing, is suspended in the inside casing in the housing, and two of inside casing is connected fixing through the consistent folding spring of flexible direction respectively over against frame with housing; Sensitive structure is suspended in the inside casing; Two of sensitive structure semiconductor frame is connected with inside casing through the consistent folding spring of flexible direction respectively over against frame fixes, and the flexible direction (direction promptly is set), the flexible direction that reaches folding spring between housing and inside casing of folding spring is vertical relation between sensitive structure semiconductor frame and inside casing.
The semiconductor frame of said sensitive structure, cruciform semi-girder and two mount structure adopt existing MEMS processing technology to process acquisition simultaneously, have guaranteed the consistance and the stability of sensitive body.
Compared with prior art; The present invention sets up unique two mount structures outside sensitive structure; Realize support fixation with two mount structures to sensitive structure, in two mount structures rational Application folding spring structure-chip-scale shock-absorbing spring, make sensitive body according to the invention when using; As run into current anxious when big (be flow noise); Deformation can take place in the folding spring in two mount structures, as the effective pressure of extenuating current of vibroshock, and then improves the anti-current noise ability of vector hydrophone greatly.
Sensitive body according to the invention is carried out the finite element simulation analysis:
1, analyze the size of folding spring in two mount structures:
Use control variate method, only change vertical thickness, horizontal width, one-sided length and the number of turn of spring respectively, the stiffness of test spring (stubborn) coefficient obtains as drawing a conclusion:
The stiffness of spring (stubborn) coefficient is directly proportional with vertical thickness, is directly proportional with the cube of horizontal width, is inversely proportional to the m power of the one-sided length of spring, and wherein 2＜m＜3 are inversely proportional to the spring number of turn.
Spring is long more thin more, and stiffness (stubborn) coefficient is more little, and deformation promptly takes place more easily, and impulsive force is converted into the elastic force of spring more easily, the difficult more Relative Oscillation thereupon of core texture, and promptly the beam upper stress is more little, and effectiveness in vibration suppression is unreasonable to be thought; But mean that also elastic limit is more little simultaneously; The promptly more difficult inner core sensitive structure (because the effect of gravity is arranged) of supporting; And because of normal the impact causes the possibility of spring breakage big more, the elastic restoring force of impacting the spring that causes simultaneously is also limited more, and cost is high more.
With the example that is designed to of the X axis upper spring size between housing and inside casing, because the m power of the stiffness of spring (stubborn) coefficient and the one-sided length of spring is inversely proportional to, 2＜m＜3 wherein can not surpass the length of side of housing again; When being l=6400um, so the one-sided length l=3000um of design spring with the length of side of housing; Because the stiffness of spring (stubborn) coefficient is directly proportional with the cube of horizontal width, and with other all only become the first power ratio, so horizontal width is a main determining factor, so design level width w=30um; Take all factors into consideration in conjunction with stiffness (stubborn) coefficient k ≈ 5N/m, the folding number of turn of design spring is 2, and vertical thickness is d=150um.The comprehensive Design spring is of a size of l=3000um, w=30um, n=2, d=150um, stiffness (stubborn) the coefficient k ≈ 5N/m of spring at this moment.In like manner, the axial upper spring of Y between inside casing and sensitive structure semiconductor frame is designed and sized to l=5000um, w=30um, and n=2, d=300um, this moment, stiffness (stubborn) coefficient of spring also was k ≈ 5N/m.
2, analyze the position of folding spring:
For two groups of springs are acted on separately, be not coupled mutually, promptly only embody tangential rigidity on the application of force direction can't be acting, the effect of spring on the application of force direction, play the effect of anti-current noise.The design spring position is as shown in Figure 1.
3, contrast test:
Through test: folding spring degree of coupling in various analyses is very little in two mount structures, and cycle spring plays cushioning effect (like Fig. 2) on X axis, Y axially in coil spring play cushioning effect (like Fig. 4).Total is tending towards always static (like Fig. 3, Fig. 5); Find out by Fig. 6 contrast; Original structure (promptly not setting up the sensitive structure that two mount structures carry out support fixation) is the triangular wave that slowly reduces; It is thus clear that structure of the present invention (promptly optimizing structure) makes external impact energy basically all by external damping effect loss, has obviously played the effect of anti-current noise.Relatively can be known that by Fig. 7,8 miniature column is one-sided in the sensitive structure of original structure and structure of the present invention receives onesize acoustic pressure and do the time spent (P=1Pa), beam upper stress value is basic identical, is about 2191 * 10 respectively
2Pa and 2205 * 10
2Pa has proved absolutely that structure of the present invention does not influence the collection to useful signal, does not promptly influence sensitivity.
The present invention is rational in infrastructure, compact, has used the chip-scale shock-absorbing spring, and the ability that makes vector hydrophone suppress flow noise greatly strengthens; Detection range prolongs, and can once integratedly machine high conformity; Performance is excellent more, more can adapt to rugged environment under water.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 receives the equivalent stress cloud atlas of X when impacting for the present invention;
Fig. 3 receives X structural vibrations changes in amplitude figure when impacting for the present invention;
Fig. 4 receives the equivalent stress cloud atlas of Y when impacting for the present invention;
Fig. 5 receives Y structural vibrations changes in amplitude figure when impacting for the present invention;
The comparison diagram of beam upper stress variation when Fig. 6 receives uniform impingement for the present invention and existing vector hydrophone sensitive body;
Fig. 7 is the variation diagram of beam upper stress when miniature column one side receives the 1Pa acoustic pressure in the existing vector hydrophone sensitive structure;
The variation diagram of beam upper stress when Fig. 8 receives the 1Pa acoustic pressure for miniature column one side in the sensitive structure of the present invention;
Among the figure: the 1-semiconductor frame; 2-cruciform semi-girder; The miniature column of 3-; The 4-housing; The 5-inside casing; 6,7-folding spring; 8,9-folding spring.
Embodiment
Vector hydrophone is with anti-current noisy-type sensitive body; Comprise the sensitive structure that is used for responsive underwater sound signal; Said sensitive structure comprises semiconductor frame 1, is set up in the cruciform semi-girder 2 of semiconductor frame 1 central authorities, vertical fixing in the miniature column 3 of cruciform semi-girder 2 central authorities (i.e. four beam infalls); Four beam end of cruciform semi-girder 2 are respectively arranged with strain sensor (for example: voltage dependent resistor (VDR), resonance tunnel-through diode RTD etc.), and connect to form the Wheatstone bridge that is used to measure underwater sound signal; Said sensitive structure is by the two mount structure support fixation that adopt the processing of MEMS micro-processing technology to obtain; Said pair of mount structure comprises housing 4, is suspended in the inside casing 5 in the housing 4, and two of inside casing 5 is connected fixing through the consistent folding spring 6,7 of flexible direction respectively over against frame with housing 4; Sensitive structure is suspended in the inside casing 5; Two of sensitive structure semiconductor frame 1 is connected with inside casing 5 through the consistent folding spring 8,9 of flexible direction respectively over against frame fixes, and the flexible direction (direction promptly is set) of sensitive structure semiconductor frame 1 and 5 folding springs of inside casing 8,9, the flexible direction that reaches housing 4 and 5 folding springs of inside casing 6,7 are vertical relation.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010105822485A CN102095489B (en) | 2010-12-10 | 2010-12-10 | Flow noise resistant sensitive body for vector hydrophone |
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| CN2010105822485A CN102095489B (en) | 2010-12-10 | 2010-12-10 | Flow noise resistant sensitive body for vector hydrophone |
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| CN102095489B true CN102095489B (en) | 2012-08-08 |
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| CN103064060B (en) * | 2012-12-20 | 2014-06-04 | 中北大学 | Quaternary array micro-electromechanical system (MEMS) vector hydrophone microstructure |
| CN103335755A (en) * | 2013-06-14 | 2013-10-02 | 浙江大学 | Strain axis type soil pressure sensor |
| US9604840B1 (en) * | 2016-01-27 | 2017-03-28 | Taiwan Semiconductor Manufacturing Comapny Ltd. | MEMS device |
| US9725299B1 (en) * | 2016-01-27 | 2017-08-08 | Taiwan Semiconductor Manufacturing Company Ltd. | MEMS device and multi-layered structure |
| CN107102297B (en) * | 2017-03-15 | 2021-04-09 | 上海大学 | A wireless ocean sound field monitoring and positioning device |
| CN107823971A (en) * | 2017-10-27 | 2018-03-23 | 中车南京浦镇车辆有限公司 | A kind of rail vehicle return air filter screen structure |
| CN112113653B (en) * | 2020-04-30 | 2022-09-06 | 北京航天控制仪器研究所 | Folded beam type optical fiber laser hydrophone |
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| US5335210A (en) * | 1992-10-28 | 1994-08-02 | The Charles Stark Draper Laboratory Inc. | Integrated liquid crystal acoustic transducer |
| JP2713206B2 (en) * | 1995-01-31 | 1998-02-16 | 日本電気株式会社 | Underwater acoustic signal detection device |
| CN2814340Y (en) * | 2005-04-30 | 2006-09-06 | 中国船舶重工集团公司第七一五研究所 | Vector sensor |
| CN100470214C (en) * | 2005-12-08 | 2009-03-18 | 哈尔滨工程大学 | Capacitive co-oscillating vector hydrophone and its technology |
| CN101726354B (en) * | 2009-12-16 | 2011-07-20 | 中国科学院半导体研究所 | Optical fiber laser vector hydrophone |
| CN101881785B (en) * | 2010-06-22 | 2011-11-30 | 吉林大学 | Four-folding beam variable area differential capacitance structure micro-acceleration sensor and manufacture method thereof |
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Inventor after: Zhang Binzhen Inventor after: Jiao Xinquan Inventor after: Zhang Guojun Inventor after: Liu Xibao Inventor after: Xue Chenyang Inventor after: Guan Linggang Inventor after: He Changde Inventor after: Xiong Jijun Inventor after: Zhang Wendong Inventor before: Xue Chenyang Inventor before: Zhang Guojun Inventor before: Guan Linggang Inventor before: Wang Hongliang Inventor before: He Changde Inventor before: Liu Xibao Inventor before: Xiong Jijun Inventor before: Zhang Wendong |
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