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CN102074540A - Matrix dual in-line package (DIP) lead frame, integrated circuit (IC) packages based on frame and production method of IC packages - Google Patents

Matrix dual in-line package (DIP) lead frame, integrated circuit (IC) packages based on frame and production method of IC packages Download PDF

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Publication number
CN102074540A
CN102074540A CN2010105613032A CN201010561303A CN102074540A CN 102074540 A CN102074540 A CN 102074540A CN 2010105613032 A CN2010105613032 A CN 2010105613032A CN 201010561303 A CN201010561303 A CN 201010561303A CN 102074540 A CN102074540 A CN 102074540A
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chip
framework
gold
carrier
copper
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CN102074540B (en
Inventor
周永寿
陈国岚
慕蔚
郭丽花
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Tianshui Huatian Technology Co Ltd
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Tianshui Huatian Technology Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32135Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/32145Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
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    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/4501Shape
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
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    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
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    • H01L2224/481Disposition
    • H01L2224/48135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48137Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
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    • H01L2224/481Disposition
    • H01L2224/48135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
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    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
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    • H01L2924/181Encapsulation

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  • Lead Frames For Integrated Circuits (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

The invention provides a matrix dual in-line package (DIP) lead frame, integrated circuit (IC) packages based on the frame and a production method of the IC packages. The matrix DIP lead frame comprises a frame and a plurality of unit frames in the frame, wherein the unit frames are distributed on the frame in a matrix manner and are in odd-numbered lines; the base islands of the adjacent unit frames in the 2n-1<th> line and the 2n<th> line are connected with the borders of the frame via connecting bars; and the outer lead pins of the adjacent unit frames in the 2n-1<th> line and the 2n<th> line are arranged in a staggered manner and are connected with the borders of the frame via grids. The invention improves the use ratio of the frame materials, has simple and reasonable structure, has the advantages of low cost, energy conservation and emission reduction and the like, can be widely applied in the fields such as LED tubes, computer interface types, power supply modules, network transformers, DIP switches, pressure sensors, standard logic ICs, large-scale integration (LSI) of memories and the like and is convenient for implementing printed circuit board (PCB) perforating and welding.

Description

The IC packaging part and the production method thereof of matrix form DIP lead frame, this framework
Technical field
The present invention relates to the DIP lead frame of semiconductor packages, based on the IC chip package and the production method thereof of this lead frame.
Background technology
For a long time, the encapsulation of DIP series of products is made and is limited by the lead frame pattern that develops the early stage eighties always, at that time because of being subjected to the influence of lead frame rolled copper foil manufacturing technology, diel and stamping technology, the encapsulation aspect is subjected to plastic package die, electroplate the restriction select coating technology, to cut muscle shaping dies technology, go up conditions such as the accuracy of identification of core/pressure welding equipment and operation window scope, lead frame generally designs at 10mm~30mm with interior width, be double or single design, every 10~20 unit do not wait.This framework adopts traditional plastic package die, and the rack plating line is electroplated, manually Trim Molding.Such mode of production not only production efficiency is low, and security risk is big when using traditional plastic package die, rack plating line to electroplate, manually cut muscle shaping dies configuration converted products, and the product design dimensional uniformity is poor, the encapsulation rate of finished products is low, the quality of product is checked on by the polygamy inspector, causes production cost height, efficient low.
Through 20 years of development, huge variation has all taken place in manufacturing technology that above-mentioned material manufacturing technology and production equipment supporting technology, encapsulation are produced and package application technology and standardization level thereof.The wall scroll framework can accomplish that 70mm~80mm is wide, if be designed to many rows, denumerable multiple can improve the utilance of material in available frame (single/double) quantity concerning lead frame manufactory.
Because at present list/double DIP series of products belong to people intensive encapsulating products, have that production efficiency is low, stock utilization is low, course of processing error rate height, use equipment are many, cause problems such as floor space is big, energy resource consumption is big, the manual processing mold security risk of DIP is big.
Unit framework on the circuit lead frame is the single file distribution at present, and the outer pin and the Ji Dao of each unit framework both sides are connected in respectively on the framework border of both sides.Since the progress of integrated circuit technique, electronic product level and functional promotion trend multifunction, high speed, high capacity, densification, lightweight.Therefore the carrier structure technology and the material of many novelties are developed, because the integrated circuit volume need increase the quantity of integrated circuit modules when reducing, just need further reduce the volume of integrated circuit package module, promptly dwindle the volume of integrated circuit encapsulation.Therefore, the lead frame volume potential must also require to dwindle.
Summary of the invention
One of purpose of the present invention is to provide a kind of matrix form DIP lead frame;
Two of purpose is to provide the IC packaging part based on described matrix form DIP lead frame;
Three of purpose is to provide the production technology of described IC packaging part;
Thereby reach the consumption that reduces frame material and improve the plastic packaging material utilance, improve production efficiency and product quality reduces error rate, reduces security risk, be a kind ofly reduce cost, the effective way of energy-saving and emission-reduction.
The present invention is achieved in that a kind of matrix form DIP lead frame, form by framework and several unit frameworks of being located in the framework, described unit framework is the matrix form distribution on described framework and line number is an odd-numbered line, wherein the capable Ji Dao with the capable adjacent cells framework of 2n of 2n-1 links to each other with described framework border by intercell connector, 2n-1 is capable and the outer lead pin of the adjacent cells framework that 2n is capable is staggered, and is connected with described framework border by grizzly bar.
Described unit framework input and output benefit comparative analysis are that 5 row are optimum.
A kind of pair of chip IC packaging part, comprise that carrier on the described unit framework and this stack of carriers place first, second chip, be specially: put an IC chip on this carrier earlier, pad on the one IC chip links to each other with interior pin by bonding line, afterwards, put the 2nd IC chip on the one IC chip again, first, the 2nd IC chip is linked by copper or gold solder line, adopt copper or gold thread the terminal pin of the 2nd IC chip and unit framework to be linked to each other by ball bonding, at last, plastic-sealed body has covered first, the terminal pin of the 2nd IC chip bonding gold or copper cash and unit framework and constituted circuit integral body.
The packaging technology flow process of a kind of pair of chip IC packaging part is as follows:
Figure 657782DEST_PATH_IMAGE001
A. attenuate/scribing
The wafer thickness thinning of lower floor's chip correspondence is: 200 μ m+10 μ m, roughness Ra 0.10mm~0.05mm, the wafer thickness thinning of upper strata chip correspondence is: 180 μ m+10 μ m, and the attenuate facility are equipped with the ultra-thin attenuated polishing function in 8 "~12 ", adopt the thin attenuated polishing technology of anti-warpage;
B, once go up core
Adopt single carrier element framework, use the special-purpose feed collet of going up, Glue dripping head uniformly with adhesive dots on lead frame carrier, lower floor's chip (large chip) is bonded on the carrier, and the adjustable height of core is 4000-6500step on the suction nozzle, and the thimble lifting height is 100-160 step, the thimble rising delay time is 5-10ms, point glue height is 1400-2000step, and bonding die glue THICKNESS CONTROL is solidified baking nitrogen flow>0.8 l/h in 8-38um;
Core on c, the secondary
Put insulating cement (QMI538NB) earlier in the ground floor chip front side, again second chip aimed at stick on top, be placed on the front of one deck chip.One-step solidification behind the core on twice, baking temperature: 150-175 ℃, stoving time: 180min;
D, pressure welding
Twin-core sheet stacked package generally speaking, connects the bonding wire of chip chamber up and down earlier, next connects line between lower floor's chip and pin, welds at last between upper strata chip and pin to be connected, and the bonding wire height is wanted strict control, camber is controlled at 150um-300um, prevents short circuit between the levels bonding wire.Distance between centers of tracks directly is bad less than 2 times line;
Plastic packaging, printing, plating, Trim Molding method are with DIP single-chip package part.
The present invention is because the adjacent leads of adjacent cells framework adopts interior staggered design, frame size is controlled in 255mm * 80mm, with DIP8L-5P is example, can make adjacent cells only be 13.716mm in the step pitch of directions X, and the pin of the adjacent frame of existing single or double lead frame is parallel continuous design, is example with DIP8L-2P, and its adjacent cells is 18.288mm in the step pitch of directions X, the DIP8L-5P step pitch has reduced 4.572mm than DIP8L-2P, has improved the utilance of frame material.Compare with existing double framework, the blaster fuse frame material utilance has improved 26.93%(and has seen Table 1);
Table 1 DIP8L-5P and DIP8L-2P framework consumption contrast
Project Every frame size (mm) Average every area (mm) 2 Area is than (%)
DIP8L-2P 182.88×24.638 225.8 S 2p/S 5p: 136.36
DIP8L-5P 251.3076×59.436 165 S 5p/S 2p: 73.07
The structure of matrix form DIP lead frame of the present invention makes that producing allocation plan optimizes more, can adopt MGP plastic package die, automatic screening machine and swash of wave road machine, automatically cut muscle formation system (cutting muscle, shaping, each secondary mould of separation), the high-speed line plating line is electroplated, with DIP8L is example, the production efficiency of 5 row's frameworks is double framework 2.25 times (seeing Table 2), saves plastic packaging material 42.26%(and sees Table 3).
Table 2 DIP8L-5P and the contrast of DIP8L-2P plastic packaging production efficiency
Project Every modulus amount (only) Modulus every day (inferior) Encapsulation quantity (only) Production efficiency contrast (%)
DIP8L-2P 320 400 128000 S 2p/S 5p: 56.14
DIP8L-5P 720 400 288000 S 5p/S 2p: 2.25
Table 3 DIP8L-5P and DIP8L-2P plastic packaging material consumption contrast
Project Every modulus amount only Weight * piece is counted g Average every quantity g/ only Every amount ratio (%)
DIP8L-2P 320 80×3 0.75 C2P/C5P:173.2
DIP8L-5P 720 6.5×48 0.433 C5P?/C2P:55.73
The structure of matrix form DIP lead frame of the present invention can be selected bonding die glue, the plastic packaging material of domestic brand common material and environment-friendly materials for use, the selection application that can realize lower cost materials reaches based on copper wire bonding technology, and the gold thread bonding is the low-cost production scheme and the technology of assisting.
The present invention is simple and reasonable, have advantages such as cost is low, energy-saving and emission-reduction, be widely used in LED fluorescent tube, computer interface type, power supply module, network transformer, DIP switch, pressure sensor, the convenient piercing welding that realizes pcb board, and fields such as standard logic IC, memory LSI.
Description of drawings
Fig. 1 is a matrix form DIP lead frame structure schematic diagram of the present invention;
Fig. 2 is the I enlarged drawing among Fig. 1, is adjacent encapsulation unit framework list carrier structure schematic diagram;
Fig. 3 is the I enlarged drawing among Fig. 1, is the two carrier structure schematic diagrames of adjacent encapsulation unit framework;
Fig. 4 is the single carrier twin-core of a present invention plate plane packaging part generalized section;
Fig. 5 is the two carrier twin-core plate plane packaging part generalized sections of the present invention;
Fig. 6 is a twin-core sheet stack package generalized section of the present invention.
Embodiment
The present invention is further illustrated below in conjunction with accompanying drawing.
Embodiment 1, with reference to Fig. 1, Fig. 2, a kind of single carrier matrix formula DIP lead frame, its unit framework is that single carrier structure and line number are odd-numbered line, wherein the capable Ji Dao with the capable adjacent cells framework of 2n of 2n-1 links to each other with described framework border by intercell connector 18,2n-1 is capable and the outer lead pin of the adjacent cells framework that 2n is capable is staggered, and is connected with described framework border by grizzly bar 19.For example: framework A unit and framework B unit are two adjacent unit frameworks, wherein B8 is clipped between A1, the A2 terminal pin, A2 is clipped between B8 and the B7 terminal pin, B7 is clipped between A2 and the A3 terminal pin, A3 is clipped between B7 and the B6 terminal pin, B6 is clipped between A3 and the A4 terminal pin, and A4 is clipped between B6 and the B5 terminal pin, other and the like.
Embodiment 2, and with reference to Fig. 1, Fig. 3, a kind of pair of carrier matrix formula DIP lead frame, its unit framework are that two carrier structures and line number are odd-numbered line, and promptly each unit framework has 2 carriers; Wherein pin A7, the A8 of unit framework A link to each other with carrier Z2, pin A3 links to each other with carrier Z1, and the pin B7 of adjacent cells framework B links to each other with carrier Z4 with B8, pin B3 is connected with carrier Z3; Wherein the capable Ji Dao with the capable adjacent cells framework of 2n of 2n-1 links to each other with described framework border by intercell connector 18, and 2n-1 is capable, and outer lead pin with the capable adjacent cells framework of 2n is staggered, and is connected with described framework border by grizzly bar 19.For example: unit framework A and unit framework B are two adjacent encapsulation units, wherein B8 is clipped between A1, the A2 terminal pin, A2 is clipped between B8 and the B7 terminal pin, B7 is clipped between A2 and the A3 terminal pin, A3 is clipped between B7 and the B6 terminal pin, B6 is clipped between A3 and the A4 terminal pin, and A4 is clipped between B6 and the B5 terminal pin, other and the like.And the abnormally-structured framework that also has more structures as required.
Embodiment 3, with reference to Fig. 1, Fig. 2, Fig. 4, a kind of two chip IC packaging parts of the unit framework based on embodiment 1, comprise the carrier 1 on the described unit framework, parallel placement first on the carrier 1 of this unit framework, the 2nd IC chip 11,12, each plants a gold thread or copper cash soldered ball 10 in advance earlier on the pad on the one IC chip 11 and the 2nd IC chip 12, on the gold thread of an IC chip 11 or copper cash ball 10, pile up gold thread or copper wire bonding ball with gold thread or copper cash then, the arcing of arch silk is piled up gold or copper bond ball on the gold of the pad on the 2nd IC chip 12 or copper ball, form bond ball 20, this bond ball 20 makes first, the 2nd IC chip 11,12 link to each other; The outer pad of described first, second IC chip 11,12 links to each other with the interior pin 4 of unit framework by copper or gold solder line 5 bondings; At last, plastic-sealed body 6 has covered the terminal pin 4 of first, second IC chip 11,12, bonding gold or copper cash 5,9, gold or copper ball 10, bond ball 20 and unit framework fully and has constituted circuit integral body.
Embodiment 4, with reference to Fig. 1, Fig. 2, Fig. 6, a kind of two chip IC stack package of the unit framework based on embodiment 1, comprise that carrier 1 and this carrier 1 on the described encapsulation unit pile up first of placement, second chip 13,14, be specially: put an IC chip 13 on this carrier 1 earlier, pad on the one IC chip 13 links to each other with interior pin 4 by bonding line 5, afterwards, put the 2nd IC chip 14 on the one IC chip 13 again, first, the 2nd IC chip 13,14 are linked by copper or gold solder line 15, adopt copper or gold thread 16 terminal pin 4 of the 2nd IC chip 14 and unit framework to be linked to each other by ball bonding, at last, plastic-sealed body 6 has covered first, the 2nd IC chip 13,14, bonding gold or copper cash 5,15,16 and the terminal pin 4 of unit framework and constituted circuit integral body.
Can realize 3 chips or 4 chips or 5 chips or 6 chip-stacked many chip IC packaging parts after chip process corase grind in the present embodiment, fine grinding, the polishing.
Embodiment 5, with reference to Fig. 1, Fig. 3, Fig. 5, a kind of two chip IC packaging parts of the unit framework based on embodiment 2, comprise the carrier 7 on the described unit framework, 8, this carrier 7, split first on 8, the 2nd IC chip 11,12, each plants a gold or copper ball 10 in advance earlier on the pad on the one IC chip 11 or the 2nd IC chip 12, on the gold of an IC chip 11 or copper ball 10, pile up gold or copper bond ball with gold or copper cash then, the arcing of arch silk is piled up gold or copper bond ball on the gold of the pad on the 2nd IC chip 12 or copper ball, form bond ball 20, this bond ball 20 makes first, the 2nd IC chip 11,12 link to each other; Described first, second IC chip 11,12 outer pads link to each other with the interior pin 4 of encapsulation unit by gold or copper-weld wire 5 bondings, at last, plastic-sealed body 6 has covered the terminal pin 4 of first, second IC chip 11,12, bonding gold or copper cash 5,9, gold or copper ball 10, bond ball 20 and unit framework fully and has constituted circuit integral body.
The packaging technology flow process of two chip IC packaging parts of embodiment 3 and embodiment 5 is as follows:
Figure 651146DEST_PATH_IMAGE002
A. wafer attenuate/scribing
The wafer attenuate speed of mainshaft is 2400 rpm-3000 rpm, wafer thickness thinning 380um ± 20um;
The equipment of wafer attenuate, scribing and technology are with common double framework encapsulation wafer attenuate, scribing process;
B, last core
Adopt single carrier element framework or two carrier element framework, earlier putting bonding die glue (conducting resinl or insulating cement) on single or two carrier, chip is bonded on the carrier, if different chip, earlier sticking little chip, glued the chip on sticking again another carrier behind all little chips, die Bonder adopts AD829A and two kinds of die Bonder of AD828 usually, select the shape and size of suction nozzle and Glue dripping head according to the size of chip size and chip size, the adjustable height of core is 4000-6500step on the suction nozzle, the thimble lifting height is 100-160step, and the thimble rising delay time is 5-10ms, and some glue height is 1400-2000step, bonding die glue THICKNESS CONTROL is in 8-38um, solidify baking nitrogen flow>0.8 l/h, baking temperature 175-180 ℃, 3 hours;
C, pressure welding
Substrate heating temperature is 228 ℃-235 ℃, regulating the sparking flow is 2600mA-3100mA, regulating the discharge time of striking sparks is 630us-710us, the gold goal head is melted to obtain the slick and sly flawless gold goal FAB in surface, the time that adds on the wiring chopper is ultrasonic wave and the pressure of 10ms ± 3ms, and supersonic frequency is 120KHZ ± 10 KHZ, and the way of output is an electric current, power is 41mw ± 3mw, and pressure is output as 32gf ± 2gf;
Solidify d, plastic packaging, back
Many row's matrix form framework plastic packagings use the MGP plastic package die, injection pressure: (1200-1800) Psi, injection time: 7-15S, mold temperature: 160-180 ℃, matched moulds pressure welding: 8-20Mpa, curing time: 120-150s, back curing temperature 175-180 ℃, 7 hours;
E, printing
With common DIP plastic packaged integrated circuit production technology;
F, plating
Electroplating device from before the rack plating plating mode change the high-speed line plating mode into, earlier the product behind the plastic packaging is sent the high speed electrodeposition line to electroplate, bath temperature: 35-45 ℃, electroplating current: 95 ± 5A/ groove, thickness of coating is controlled at: 7.0-20.32um;
G, Trim Molding
Adopt automatic Trim Molding system, pipe is gone in automatic feed automatically.
The packaging technology flow process of two chip IC stack package of embodiment 4 is as follows:
Figure 93891DEST_PATH_IMAGE003
A. attenuate/scribing
The wafer thickness thinning of lower floor's chip correspondence is: 200 μ m+10 μ m, roughness Ra 0.10mm~0.05mm, the wafer thickness thinning of upper strata chip correspondence is: 180 μ m+10 μ m, and the attenuate facility are equipped with the ultra-thin attenuated polishing function in 8 "~12 ", adopt the thin attenuated polishing technology of anti-warpage;
B, once go up core
Adopt single carrier element framework, use the special-purpose feed collet of going up, Glue dripping head uniformly with adhesive dots on lead frame carrier, lower floor's chip (large chip) is bonded on the carrier, and the adjustable height of core is 4000-6500step on the suction nozzle, and the thimble lifting height is 100-160step, the thimble rising delay time is 5-10ms, point glue height is 1400-2000step, and bonding die glue THICKNESS CONTROL is solidified baking nitrogen flow>0.8 l/h in 8-38um;
Core on c, the secondary
Put insulating cement (QMI538NB) earlier in the ground floor chip front side, again second chip aimed at stick on top, be placed on the front of one deck chip.One-step solidification behind the core on twice, baking temperature: 150-175 ℃, stoving time: 180min;
D, pressure welding
Twin-core sheet stacked package generally speaking, connects the bonding wire of chip chamber up and down earlier, next connects line between lower floor's chip and pin, welds at last between upper strata chip and pin to be connected, and the bonding wire height is wanted strict control, camber is controlled at 150um-300um, prevents short circuit between the levels bonding wire.Distance between centers of tracks directly is bad less than 2 times line;
Plastic packaging, printing, plating, Trim Molding method are with DIP single-chip package part.
Utilize the production technology of single-chip IC packaging part of embodiment 1 the same with the production procedure of conventional DIP plastic packaged integrated circuit.

Claims (9)

1. matrix form DIP lead frame, form by framework and several unit frameworks of being located in the framework, it is characterized in that: described unit framework is the matrix form distribution on described framework and line number is an odd-numbered line, wherein the capable Ji Dao with the capable adjacent cells framework of 2n of 2n-1 links to each other with described framework border by intercell connector (18), 2n-1 is capable and the outer lead pin of the adjacent cells framework that 2n is capable is staggered, and is connected with described framework border by grizzly bar (19).
2. matrix form DIP lead frame according to claim 1, it is characterized in that: described unit framework is that single carrier structure and line number are odd-numbered line, wherein the capable Ji Dao with the capable adjacent cells framework of 2n of 2n-1 links to each other with described framework border by intercell connector (18), 2n-1 is capable and the outer lead pin of the adjacent cells framework that 2n is capable is staggered, and is connected with described framework border by grizzly bar (19).
3. matrix form DIP lead frame according to claim 1 is characterized in that: described unit framework is that two carrier structures and line number are odd-numbered line, and promptly each unit framework has two carriers; Wherein pin A7, the A8 of unit framework A link to each other with carrier Z2, pin A3 links to each other with carrier Z1, and the pin B7 of adjacent cells framework B links to each other with carrier Z4 with B8, pin B3 is connected with carrier Z3; Wherein the capable Ji Dao with the capable adjacent cells framework of 2n of 2n-1 links to each other with described framework border by intercell connector (18), 2n-1 is capable and the outer lead pin of the adjacent cells framework that 2n is capable is staggered, and is connected with described framework border by grizzly bar (19).
4. according to claim 1 or 2 or 3 described matrix form DIP lead frames, it is characterized in that: described unit framework is 5 row.
5. two chip IC packaging parts according to claim 2, it is characterized in that: comprise the carrier (1) on the described unit framework, the carrier of this unit framework (1) is gone up parallel placement first, the 2nd IC chip (11,12), each plants a gold or copper ball (10) in advance earlier on the pad on the one IC chip (11) and the 2nd IC chip (12), use gold or copper cash on the gold of an IC chip (11) or copper ball (10), to pile up gold thread or copper wire bonding ball then, the arcing of arch silk is piled up gold thread or copper wire bonding ball on the gold of the pad on the 2nd IC chip (12) or copper ball, form bond ball (20), this bond ball (20) makes first, the 2nd IC chip (11,12) link to each other; The outer pad of described first, second IC chip (11,12) links to each other with the interior pin (4) of unit framework by copper or gold solder line (5) bonding; At last, plastic-sealed body (6) has covered first, second IC chip (11,12), bonding gold or copper cash (5,9), gold or copper ball (10), bond ball (20) and unit framework terminal pin (4) fully and has constituted circuit integral body.
6. two chip IC packaging parts according to claim 2, it is characterized in that: comprise the carrier (1) on the described unit framework, and pile up first of placement in this carrier (1), second chip (13,14) be specially: put an IC chip (13) on this carrier (1) earlier, pad on the one IC chip (13) links to each other with interior pin (4) by bonding line (5), afterwards, put the 2nd IC chip (14) on the one IC chip (13) again, first, the 2nd IC chip (13,14) be linked by copper or gold solder line (15), adopt copper or gold thread (16) terminal pin (4) of the 2nd IC chip (14) and unit framework to be linked to each other by ball bonding, at last, plastic-sealed body (6) has covered first, the 2nd IC chip (13,14), bonding gold or copper cash (5,15,16) and the terminal pin of unit framework (4) and constituted circuit integral body.
7. two chip IC packaging parts according to claim 3, it is characterized in that: comprise the carrier (7 on the described unit framework, 8), this carrier (7,8) split first on, the 2nd IC chip (11,12), each plants a gold or copper ball (10) in advance earlier on the pad on the one IC chip (11) or the 2nd IC chip (12), use gold or copper cash on the gold of an IC chip (11) or copper ball (10), to pile up gold thread or copper wire bonding ball then, the arcing of arch silk is piled up gold thread or copper wire bonding ball on the gold of the pad on the 2nd IC chip (12) or copper ball, form bond ball (20), this bond ball (20) makes an IC chip (11) link to each other with the 2nd IC chip (12); The outer pad of described first, second IC chip (11,12) links to each other with the interior pin (4) of described unit framework by gold or copper-weld wire (5) bonding, at last, plastic-sealed body (6) has covered the terminal pin (4) of first, second IC chip (11,12), bonding gold or copper cash (5,9), gold or copper ball (10), bond ball (20) and unit framework fully and has constituted circuit integral body.
8. the packaging technology flow process according to two chip IC packaging parts of claim 5 or 7 is as follows:
Figure 210259DEST_PATH_IMAGE001
A. wafer attenuate/scribing
The wafer attenuate speed of mainshaft is 2400 rpm-3000 rpm, wafer thickness thinning 380um ± 20um;
The equipment of wafer attenuate, scribing and technology are with common double framework encapsulation wafer attenuate, scribing process;
B, last core
Adopt single carrier element framework or two carrier element framework, earlier putting bonding die glue (conducting resinl or insulating cement) on single or two carrier, chip is bonded on the carrier, if different chip, earlier sticking little chip, glued the chip on sticking again another carrier behind all little chips, die Bonder adopts AD829A and two kinds of die Bonder of AD828 usually, select the shape and size of suction nozzle and Glue dripping head according to the size of chip size and chip size, the adjustable height of core is 4000-6500step on the suction nozzle, the thimble lifting height is 100-160 step, and the thimble rising delay time is 5-10ms, and some glue height is 1400-2000step, bonding die glue THICKNESS CONTROL is in 8-38um, solidify baking nitrogen flow>0.8 l/h, baking temperature 175-180 ℃, 3 hours;
C, pressure welding
Substrate heating temperature is 228 ℃-235 ℃, regulating the sparking flow is 2600mA-3100mA, regulating the discharge time of striking sparks is 630us-710us, the gold goal head is melted to obtain the slick and sly flawless gold goal FAB in surface, the time that adds on the wiring chopper is ultrasonic wave and the pressure of 10ms ± 3ms, and supersonic frequency is 120KHZ ± 10 KHZ, and the way of output is an electric current, power is 41mw ± 3mw, and pressure is output as 32gf ± 2gf;
Solidify d, plastic packaging, back
Many row's matrix form framework plastic packagings use the MGP plastic package die, injection pressure: (1200-1800) Psi, injection time: 7-15s, mold temperature: 160-180 ℃, matched moulds pressure welding: 8-20Mpa, curing time: 120-150s, back curing temperature 175-180 ℃, 7 hours;
E, printing
With common DIP plastic packaged integrated circuit production technology;
F, plating
Electroplating device from before the rack plating plating mode change the high-speed line plating mode into, earlier the product behind the plastic packaging is sent the high speed electrodeposition line to electroplate, bath temperature: 35-45 ℃, electroplating current: 95 ± 5A/ groove, thickness of coating is controlled at: 7.0-20.32um;
G, Trim Molding
Adopt automatic Trim Molding system, pipe is gone in automatic feed automatically.
9. the packaging technology flow process according to two chip IC packaging parts of claim 6 is as follows:
Figure 939181DEST_PATH_IMAGE002
A. attenuate/scribing
The wafer thickness thinning of lower floor's chip correspondence is: 200 μ m+10 μ m, roughness Ra 0.10mm~0.05mm, the wafer thickness thinning of upper strata chip correspondence is: 180 μ m+10 μ m, and the attenuate facility are equipped with the ultra-thin attenuated polishing function in 8 "~12 ", adopt the thin attenuated polishing technology of anti-warpage;
B, once go up core
Adopt single carrier element framework, use the special-purpose feed collet of going up, Glue dripping head uniformly with adhesive dots on the unit framework carrier, lower floor's chip (large chip) is bonded on the carrier, and the adjustable height of core is 4000-6500step on the suction nozzle, and the thimble lifting height is 100-160 step, the thimble rising delay time is 5-10ms, point glue height is 1400-2000step, and bonding die glue THICKNESS CONTROL is solidified baking nitrogen flow>0.8 l/h in 8-38um;
Core on c, the secondary
Put insulating cement (QMI538NB) earlier in the ground floor chip front side, again second chip aimed at stick on top, be placed on the front of one deck chip; One-step solidification behind the core on twice, baking temperature: 150-175 ℃, stoving time: 180min;
D, pressure welding
Twin-core sheet stacked package generally speaking, connects the bonding wire of chip chamber up and down earlier, next connects line between lower floor's chip and pin, welds at last between upper strata chip and pin to be connected, and the bonding wire height is wanted strict control, camber is controlled at 150um-300um, prevents short circuit between the levels bonding wire; Distance between centers of tracks directly is bad less than 2 times line; Plastic packaging, printing, plating, Trim Molding method are with existing DIP single-chip package part.
Figure 955678DEST_PATH_IMAGE003
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