CN102073174A - Liquid crystal optical wedge element - Google Patents
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Abstract
该发明属于光电子器件中的液晶光楔器件,包括由两内侧面均带导电层和取向层的上、下透明基板、平行设于两透明基板取向层两端之间的高度不同的两排间隔子,以及将两透明基板及其上的导电层、取向层和间隔子封装成楔子形腔体的壳体,设于腔体内的楔子形液晶。该发明将灌入的液晶根据上、下两个基板及两排间隔子构成的楔子形腔体、直接形成液晶棱镜,提高了液晶斜面的平整度,腔体内的液晶分子的取向方向既可与两排间隔子垂直、也可与两排间隔子平行设置。因而该发明具有结构和制作工艺简单、生产成本低,楔子形液晶斜面的光洁度高且工作时折射率分布均匀,有效提高了液晶光楔器件跟踪、扫瞄光束的质量及跟踪、扫瞄的准确性和效率等特点。
The invention belongs to a liquid crystal wedge device in an optoelectronic device, comprising upper and lower transparent substrates with conductive layers and alignment layers on both inner surfaces, and two rows of spacers with different heights arranged in parallel between the two ends of the alignment layers of the two transparent substrates. sub, and two transparent substrates and conductive layers on them, alignment layers and spacers are packaged into a wedge-shaped cavity housing, and the wedge-shaped liquid crystal is arranged in the cavity. In this invention, the poured liquid crystal is directly formed into a liquid crystal prism according to the wedge-shaped cavity formed by the upper and lower substrates and two rows of spacers, which improves the flatness of the liquid crystal slope, and the orientation direction of the liquid crystal molecules in the cavity can be aligned with that of the liquid crystal. The two rows of spacers are vertical or parallel to the two rows of spacers. Therefore, the invention has the advantages of simple structure and manufacturing process, low production cost, high smoothness of wedge-shaped liquid crystal slope and uniform distribution of refractive index during operation, which effectively improves the quality of tracking and scanning beams of liquid crystal optical wedge devices and the accuracy of tracking and scanning. characteristics such as sex and efficiency.
Description
技术领域technical field
本发明属于液晶光电子器件及制造技术领域,尤其是涉及一种液晶光楔器件。该液晶光楔器件可广泛用于自由空间光通信及激光雷达对目标进行高精度捕获、跟踪和瞄准(ATP)等,既可利用单个液晶光楔器件进行单光束一维跟踪、扫描,也可采用两个液晶光楔器件进行单光束二维跟踪、扫描。The invention belongs to the technical field of liquid crystal optoelectronic devices and manufacture, and in particular relates to a liquid crystal optical wedge device. The liquid crystal wedge device can be widely used in free-space optical communication and lidar for high-precision acquisition, tracking and targeting (ATP) of targets, etc. Two liquid crystal wedge devices are used for two-dimensional tracking and scanning of a single beam.
背景技术Background technique
在自由空间光通信和激光雷达等应用中,激光束的高精度捕获、跟踪和瞄准(ATP)技术是一项非常重要的关键技术和难点,ATP技术水平的高低直接影响到系统整体性能指标。传统ATP方案通常采用万向节等机械方式,由于其受体积大、重量重、功耗高和机械磨损等因素的影响,非机械式的ATP技术逐渐受到关注。目前常用的非机械光束对扫描的调节、控制方式主要有微透镜阵列技术、MEMS(微电子机械系统)技术、电浸润微棱镜技术以及液晶光学相控阵技术;其中,液晶光学相控阵技术是目前最接近实用的一种新型技术。液晶光学相控阵(LCOPA)作为一种可编程(可调控)相位调制器件,它采用具有驱动电压低、相位调制深度大等性能的向列相液晶作为相位调制的电光材料,使器件具有体积小、重量轻、功耗低、易于与微电子控制电路结合等独特优点;不但解决了激光束指向的高分辨率及快速、灵活控制的空间扫描问题,而且使光电系统的集成度更高,柔性控制能力更强,制造成本更低;在自由空间光通信、红外对抗和目标跟踪等领域具有重要的应用价值。不过,液晶光学相控阵器件相对来说制作周期长,成品率低,需要独立编程控制的像素电极数目很大,驱动电路复杂,这些因素阻碍了液晶光学相控阵的推广应用。近期出现的基于光敏聚合物的液晶棱镜,同样也实现了光束角度的可调控式跟踪、扫瞄。相对液晶光学相控阵器件来说,基于光敏聚合物的液晶棱镜制作过程和工艺难度大为简化,该器件被公开在下述论文中:“Liquid-crystal beam steering device with a photopolymer prism”,(《APPLIED PHYSICSLETTERS》2005年第87卷第9期,P091110页,作者:Jae-Hong Parka and Iam Choon Khoo);该器件的基本结构是包括上、下两工作面为透明的立方形液晶盒及其内腔,并在液晶盒内腔填充一个楔子形的聚合物、以使在盒内其余空间所填充的液晶形成相应的楔子形。由于液晶与聚合物的折射率不同,对入射光波将产生一个楔形的光程分布;给液晶盒上、下两工作面上的导电层施加不同的电压后,液晶的折射率会发生变化,导致楔形光程分布的楔形角也发生相应的变化,从而实现光束的扫描。该器件液晶盒内的聚合物棱镜是由聚合物经过紫外曝光固化而形成的,所成聚合物棱镜与许多因素有关,包括:聚合物的扩散和反应常数、聚合物层的厚度、紫外光功率等。这些因素均会降低楔子形斜面的光洁度、进而影响与之重合的楔子形液晶斜面的光洁度及其工作时折射率分布的均匀性,即对跟踪、扫瞄光束的质量产生不良影响;此外,由于该器件内需进行光敏聚合物的设置,其生产工艺复杂、质量难以保证、生产成本亦较高;因而上述技术存在结构及生产工艺复杂、质量难以保证、生产成本高,而所产生的跟踪、扫瞄光束的质量差等缺陷。In applications such as free-space optical communication and lidar, the high-precision acquisition, tracking and targeting (ATP) technology of laser beams is a very important key technology and difficulty. The level of ATP technology directly affects the overall performance indicators of the system. Traditional ATP solutions usually use mechanical methods such as universal joints. Due to the influence of factors such as large size, heavy weight, high power consumption and mechanical wear, non-mechanical ATP technology has gradually attracted attention. At present, the commonly used non-mechanical light beam adjustment and control methods mainly include microlens array technology, MEMS (micro-electro-mechanical system) technology, electro-wetting micro-prism technology and liquid crystal optical phased array technology; among them, liquid crystal optical phased array technology It is a new type of technology that is closest to practicality at present. As a programmable (adjustable) phase modulation device, liquid crystal optical phased array (LCOPA) uses nematic liquid crystal with low driving voltage and large phase modulation depth as the electro-optic material for phase modulation, making the device have a volume Unique advantages such as small size, light weight, low power consumption, and easy integration with microelectronic control circuits; not only solve the problem of high-resolution laser beam pointing and fast, flexible control of space scanning, but also make the optoelectronic system more integrated. It has stronger flexible control capability and lower manufacturing cost; it has important application value in the fields of free space optical communication, infrared countermeasures and target tracking. However, the production cycle of liquid crystal optical phased array devices is relatively long, the yield is low, the number of pixel electrodes that need to be independently programmed and controlled is large, and the driving circuit is complicated. These factors hinder the popularization and application of liquid crystal optical phased array devices. The recent emergence of liquid crystal prisms based on photosensitive polymers also enables adjustable tracking and scanning of beam angles. Compared with liquid crystal optical phased array devices, the manufacturing process and technical difficulty of liquid crystal prisms based on photosensitive polymers are greatly simplified. This device is disclosed in the following paper: "Liquid-crystal beam steering device with a photopolymer prism", (" APPLIED PHYSICSLETTERS "Volume 87, No. 9, 2005, P091110 page, author: Jae-Hong Parka and Iam Choon Khoo); the basic structure of this device is to include the upper and lower two working surfaces as a transparent cubic liquid crystal cell and its inner Cavity, and a wedge-shaped polymer is filled in the cavity of the liquid crystal cell, so that the liquid crystal filled in the rest of the cell forms a corresponding wedge shape. Due to the difference in refractive index between liquid crystal and polymer, a wedge-shaped optical path distribution will be generated for the incident light wave; after different voltages are applied to the conductive layers on the upper and lower working surfaces of the liquid crystal cell, the refractive index of the liquid crystal will change, resulting in The wedge angle of the wedge-shaped optical path distribution also changes accordingly, thereby realizing the scanning of the light beam. The polymer prism in the liquid crystal cell of the device is formed by curing the polymer through ultraviolet exposure. The formed polymer prism is related to many factors, including: the diffusion and reaction constant of the polymer, the thickness of the polymer layer, and the power of ultraviolet light. wait. These factors will reduce the smoothness of the wedge-shaped slope, and then affect the smoothness of the overlapping wedge-shaped liquid crystal slope and the uniformity of the refractive index distribution during operation, that is, have a bad influence on the quality of the tracking and scanning beams; in addition, due to The device needs to be equipped with a photosensitive polymer, and its production process is complicated, quality is difficult to guarantee, and production cost is also high; therefore, the above-mentioned technology has complex structure and production process, difficult quality assurance, high production cost, and the resulting tracking, scanning Defects such as poor quality of the aiming beam.
发明内容Contents of the invention
本发明的目的是在背景技术基础上改进设计一种液晶光楔器件,以达到简化其结构和生产工艺、降低生产成本,有效提高楔子形液晶斜面的光洁度及液晶光楔器件跟踪、扫瞄光束的质量,以及实现工作时折射率分布的均匀,跟踪、扫瞄准确和高效率等目的。The purpose of the present invention is to improve and design a liquid crystal optical wedge device on the basis of the background technology, so as to simplify its structure and production process, reduce production costs, effectively improve the smoothness of the wedge-shaped liquid crystal slope and the tracking and scanning beam of the liquid crystal optical wedge device The quality, as well as the uniformity of the refractive index distribution during work, the accuracy of tracking and scanning, and high efficiency.
本发明的解决方案是针对背景技术存在的缺陷,将液晶光楔器件的上、下两个设有导电层及取向层的基板由传统的平行设置,改为将上、下两个基板作为斜面的楔子形设置,使所填充的液晶根据上、下两个基板构成的楔子形腔体直接形成液晶棱镜,从而省去背景技术在液晶盒内所必须填充的楔子形光敏聚合物、同时也就避免了因该楔子形聚合物的存在对跟踪、扫瞄光束质量的不良影响;本发明上、下两个基板所构成的楔形角的大小,通过平行设于上、下两个基板之间的两排不同高度(直径)的间隔子设定(即通过调节两排间隔子的直径差或调节两排间隔子的间距确定),然后经常规初固定后灌入液晶、密封式封装处理,即制得本发明所述液晶光楔器件。因此,本发明液晶光楔器件包括由两内侧面均带导电层和取向层的上、下透明基板及平行设于两透明基板取向层两端之间的两排间隔子,将两透明基板及其上的导电层、取向层和间隔子封装成腔体的壳体,以及设于腔体内的液晶,关键在于该液晶光楔器件中平行设于两透明基板取向层两端之间的间隔子为高度(直径)不同的两排间隔子,(带导电层及取向层的)上、下透明基板通过其上的取向层分别固定于两排间隔子的上、下部位,构成以上、下两个透明基板作为斜面的楔子形腔体,以使灌入该腔体内的液晶亦呈相应的楔子形;带导电层及取向层的上、下透明基板,平行设于两透明基板取向层两端之间的两排间隔子以及设于楔子形腔体内的液晶按常规封装、密封式固定成一体。The solution of the present invention is to aim at the defects of the background technology, and change the upper and lower substrates of the liquid crystal wedge device with conductive layers and alignment layers from the traditional parallel arrangement to use the upper and lower substrates as inclined planes The wedge-shaped setting makes the filled liquid crystal directly form a liquid crystal prism according to the wedge-shaped cavity formed by the upper and lower substrates, thereby saving the wedge-shaped photosensitive polymer that must be filled in the liquid crystal cell in the background technology, and also Avoiding the adverse effects on tracking and scanning beam quality due to the existence of the wedge-shaped polymer; the size of the wedge angle formed by the upper and lower substrates of the present invention is determined by the Two rows of spacers with different heights (diameters) are set (that is, determined by adjusting the diameter difference between the two rows of spacers or adjusting the distance between the two rows of spacers), and then poured into liquid crystals after conventional initial fixation and sealed packaging treatment, that is The liquid crystal wedge device of the present invention is obtained. Therefore, the liquid crystal wedge device of the present invention comprises upper and lower transparent substrates with conductive layers and alignment layers on both inner surfaces and two rows of spacers parallel to each other between the two ends of the alignment layers of the two transparent substrates. The conductive layer, alignment layer and spacers on it are packaged into the casing of the cavity, and the liquid crystal arranged in the cavity. The key lies in the spacer arranged in parallel between the two ends of the alignment layer of the two transparent substrates in the liquid crystal wedge device. It is two rows of spacers with different heights (diameters), the upper and lower transparent substrates (with conductive layer and orientation layer) are respectively fixed on the upper and lower parts of the two rows of spacers through the orientation layer on it, forming the upper and lower two A wedge-shaped cavity with a transparent substrate as an inclined plane, so that the liquid crystal poured into the cavity is also in a corresponding wedge shape; the upper and lower transparent substrates with a conductive layer and an alignment layer are arranged in parallel at both ends of the alignment layer of the two transparent substrates. The two rows of spacers and the liquid crystals arranged in the wedge-shaped cavity are packaged and sealed as a whole in a conventional manner.
上述设于楔子形腔体内的液晶分子的取向方向(液晶分子的长轴方向)与两排间隔子垂直或与两排间隔子平行。所述楔子形腔体的楔形角为0.001°-2°。所述间隔子为球形间隔子或条形间隔子。The orientation direction of the liquid crystal molecules (the long axis direction of the liquid crystal molecules) arranged in the wedge-shaped cavity is perpendicular to the two rows of spacers or parallel to the two rows of spacers. The wedge angle of the wedge-shaped cavity is 0.001°-2°. The spacer is a spherical spacer or a strip spacer.
本发明由于将液晶光楔器件上的上、下两个基板作为斜面,使其构成的液晶腔体呈楔子形,所灌入的液晶根据上、下两个基板及两排间隔子构成的楔子形腔体直接形成液晶棱镜,提高楔子形液晶斜面的平整度,且腔体内的液晶分子的取向方向既可与两排间隔子垂直、也可与两排间隔子平行设置;从而具有结构和制作工艺简单、生产成本低,楔子形液晶斜面的光洁度高且工作时折射率分布均匀,有效提高了液晶光楔器件跟踪、扫瞄光束的质量及跟踪、扫瞄的准确性和效率等特点。本发明液晶光楔器件既可利用单个器件进行单光束一维跟踪、扫描,也可采用两个液晶光楔器件进行单光束二维跟踪、扫描。In the present invention, the upper and lower substrates on the liquid crystal wedge device are used as inclined planes, so that the liquid crystal cavity formed is wedge-shaped, and the liquid crystal poured in is formed according to the wedge formed by the upper and lower substrates and two rows of spacers. The liquid crystal prism is directly formed in the cavity, which improves the flatness of the wedge-shaped liquid crystal slope, and the orientation direction of the liquid crystal molecules in the cavity can be arranged vertically or parallel to the two rows of spacers; thus it has the advantages of structure and production The technology is simple, the production cost is low, the smoothness of the wedge-shaped liquid crystal slope is high, and the refractive index distribution is uniform during operation, which effectively improves the quality of the tracking and scanning beam of the liquid crystal optical wedge device, and the accuracy and efficiency of tracking and scanning. The liquid crystal optical wedge device of the present invention can not only use a single device to perform one-dimensional tracking and scanning of a single beam, but also use two liquid crystal optical wedge devices to perform two-dimensional tracking and scanning of a single beam.
附图说明Description of drawings
图1为本发明结构及实施例1结构示意图(剖视图);Fig. 1 is structure of the present invention and embodiment 1 structural representation (sectional view);
图2为本发明实施例2结构示意图(剖视图);Fig. 2 is a schematic structural view (sectional view) of Embodiment 2 of the present invention;
图3为实施例1在不同加载电压下光束偏转的角度测结果坐标曲线图。Fig. 3 is a coordinate graph of the angle measurement results of beam deflection under different loading voltages in Example 1.
图中:1-1、2-1:上、下透明基板,1-2、2-2:导电层,1-3、2-3:取向层,3-1、3-2:间隔子,4.壳体,5.液晶。In the figure: 1-1, 2-1: upper and lower transparent substrates, 1-2, 2-2: conductive layer, 1-3, 2-3: alignment layer, 3-1, 3-2: spacer, 4. Housing, 5. Liquid crystal.
具体实施方式Detailed ways
实施例1:本实施例以楔形角为0.03°、器件有效面积(长×宽)10×10mm液晶光楔器件为例,上、下透明基板1-1、2-1采用市售已带导电层1-2、2-2的液晶显示器用ITO导电玻璃、厚1.1mm,其中导电层1-2、2-2厚100nm;其上按常规方法旋涂上聚酰亚胺(PI)膜分别作为取向层1-3、2-3,本实施例在聚酰亚胺(PI)膜固化后顺斜面方向作摩擦处理、以便使灌入液晶5的分子取向(长轴)沿斜面方向(即垂直于两排间隔子)排列;间隔子3-1直径为6μm,间隔子3-2直径为11μm,按常规方法将间隔子3-1及3-2分别置于乙醇内后、再分别采用吹喷的方法固定在下基板2-2的两端,然后将上基板2-1置于间隔子3-1及3-2上并采用紫外固化胶将上、下基板1-1、2-1与间隔子3-1及3-2进行初固定后,再将液晶5灌入腔体内,最后采用紫外固化胶封装,即制成本实施例液晶光楔器件。Embodiment 1: In this embodiment, a liquid crystal wedge device with a wedge angle of 0.03° and a device effective area (length×width) of 10×10mm is an example, and the upper and lower transparent substrates 1-1 and 2-1 are commercially available with conductive The liquid crystal display of layer 1-2, 2-2 uses ITO conductive glass, thick 1.1mm, wherein conductive layer 1-2, 2-2 thick 100nm; Spin-coat polyimide (PI) film respectively on it by conventional method As alignment layers 1-3, 2-3, the present embodiment performs rubbing treatment along the slope direction after the polyimide (PI) film is solidified, so that the molecular orientation (major axis) poured into the
实施例2:本实施例以楔形角为0.6°、器件有效面积(长×宽)10×10mm液晶光楔器件为例,本实施例在聚酰亚胺(PI)膜层固化后沿与两排间隔子平行的方向作摩擦处理、以便使灌入液晶5的分子取向(长轴)与两排间隔子平行排列,间隔子3-1直径为3μm、间隔子3-2直径为100μm;其余均与实施例1同,。Embodiment 2: In this embodiment, a liquid crystal wedge device with a wedge angle of 0.6° and a device effective area (length×width) of 10×10 mm is taken as an example. In this embodiment, the polyimide (PI) film layer is cured and the two Rub the direction parallel to the row of spacers so that the molecular orientation (major axis) poured into the
以上两实施例所得液晶光楔器件单独使用时,向透明基板1-1、2-1上的两导电层1-2、2-2加载变化的电压时即可实现单光束一维跟踪、扫描;当将实施例1与实施例2分别所得两个液晶光楔器件按液晶5的分子取向(长轴)相同的方向叠合,并对两个液晶光楔器件分施加变化的电压,即可实现单光束二维跟踪、扫描。When the liquid crystal wedge devices obtained in the above two embodiments are used alone, one-dimensional tracking and scanning of a single beam can be realized when the two conductive layers 1-2, 2-2 on the transparent substrate 1-1, 2-1 are loaded with varying voltages. When the two liquid crystal wedge devices obtained in embodiment 1 and embodiment 2 are superimposed in the same direction as the molecular orientation (major axis) of
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CN104092494A (en) * | 2014-06-24 | 2014-10-08 | 西安空间无线电技术研究所 | A high-precision optical phase control tracking system |
CN106054490A (en) * | 2016-07-29 | 2016-10-26 | 西安空间无线电技术研究所 | Large-angle wave beam control system based on optical phased array |
CN106959547A (en) * | 2017-03-09 | 2017-07-18 | 苏州晶萃光学科技有限公司 | A kind of liquid crystal beam deviation and scanner and method |
CN107632427A (en) * | 2017-11-06 | 2018-01-26 | 南京华日触控显示科技有限公司 | Test liquid crystal photoelectric parameter wedge of glass box and preparation method |
CN107885008A (en) * | 2017-09-29 | 2018-04-06 | 西安空间无线电技术研究所 | One kind cascade liquid crystal optical phased array antenna, shaping and application process |
CN110058340A (en) * | 2019-05-10 | 2019-07-26 | 中国科学院长春光学精密机械与物理研究所 | A kind of liquid crystal polarization gratings preparation method |
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US12345998B2 (en) | 2022-06-03 | 2025-07-01 | Ii-Vi Delaware, Inc. | Tunable optical wedge for reducing crosstalk in wavelength selective switch |
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CN102520557B (en) * | 2011-12-29 | 2014-05-28 | 西安空间无线电技术研究所 | Efficient space light-optical fiber coupling method |
CN104092494A (en) * | 2014-06-24 | 2014-10-08 | 西安空间无线电技术研究所 | A high-precision optical phase control tracking system |
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CN106959547A (en) * | 2017-03-09 | 2017-07-18 | 苏州晶萃光学科技有限公司 | A kind of liquid crystal beam deviation and scanner and method |
CN107885008A (en) * | 2017-09-29 | 2018-04-06 | 西安空间无线电技术研究所 | One kind cascade liquid crystal optical phased array antenna, shaping and application process |
CN107885008B (en) * | 2017-09-29 | 2022-03-04 | 西安空间无线电技术研究所 | A cascaded liquid crystal optical phased array antenna, forming and application method |
CN107632427A (en) * | 2017-11-06 | 2018-01-26 | 南京华日触控显示科技有限公司 | Test liquid crystal photoelectric parameter wedge of glass box and preparation method |
CN110058340A (en) * | 2019-05-10 | 2019-07-26 | 中国科学院长春光学精密机械与物理研究所 | A kind of liquid crystal polarization gratings preparation method |
CN110058340B (en) * | 2019-05-10 | 2021-08-17 | 中国科学院长春光学精密机械与物理研究所 | A kind of preparation method of liquid crystal polarization grating |
CN111025737A (en) * | 2019-12-23 | 2020-04-17 | 中国兵器装备研究院 | Electric scanning continuous light beam orientation device |
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