CN102065626B - Atmospheric pressure low temperature plasma electric brush generating device and array combination thereof - Google Patents
Atmospheric pressure low temperature plasma electric brush generating device and array combination thereof Download PDFInfo
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- CN102065626B CN102065626B CN 201110024536 CN201110024536A CN102065626B CN 102065626 B CN102065626 B CN 102065626B CN 201110024536 CN201110024536 CN 201110024536 CN 201110024536 A CN201110024536 A CN 201110024536A CN 102065626 B CN102065626 B CN 102065626B
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Abstract
The invention discloses an atmospheric pressure low-temperature plasma electric brush generating device and an array combination thereof, which aim to solve the problem that the temperature of plasma airflow generated by the atmospheric pressure plasma generating device in the prior art is higher, and a cooling system is required to be additionally configured, so that the actual industrial application is difficult. The structure of the gas-discharge electrode comprises a main body cavity and two electrodes, wherein the main body cavity is provided with a gas inlet port and a gas outlet port, the gas outlet port is in a narrow slit shape, a narrow slit cavity is naturally formed in the part, close to the gas outlet port, in the main body cavity, and the discharge ends of the two electrodes are located at the narrow slit cavity. The atmospheric pressure low-temperature plasma electric brush generating device can generate plasma under normal pressure; the plasma brush generator has the advantages of diversified structural design, low cost and safe and convenient operation, and is much simpler than the traditional low-pressure plasma generator when the plasma brush generator is used for treating objects with large areas or complicated shapes.
Description
Technical field
The present invention relates to a kind of atmos low-temperature plasma brush generating means and array combination thereof, often be applied to the material surface cleaning, material character improvement, the equipment in fields such as the sterilization and the depollution of environment.
Background technology
In recent years, plasma technique (plasma-treating technology) is widely used in semiconductor manufacturing, material removing surface and improvement, industrial circles such as sterilization.Plasma technique is in the successful Application of the above-mentioned numerous industrial circles nonequilibrium behavior because of plasma.In the non-equilibrium plasma system, exist a large amount of cryochemistry active species, when these active species contact with other material surface, can be under the situation that does not influence these material bulk properties, the upgrade materials surface characteristic.
In the Traditional industrial field, mainly rely on the low pressure glow discharge nonequilibrium plasma to carry out material processed, and this plasma production process need expensive vacuum equipment, also there is the unfavorable factor that is processed material and the compatible difficulty of vacuum plant.The investment of huge amount of money vacuum equipment, higher facility maintenance and repair expense and the effects limit such as complexity that control the use on a large scale of low pressure glow discharge nonequilibrium plasma treatment process.
The low pressure glow plasma generating means that has vacuum equipment relatively, atmos low-temperature plasma brush generating means want cheap many, also need not be processed material and be in the vacuum environment.In recent decades, people are devoted to the research and development of atmospheric pressure non-equilibrium plasma equipment, yet report only is several kinds of atmospheric pressure plasma generators few in number.Wherein, The using value maximum that atmospheric pressure plasma jet (APPJ) is potential; It is to use resonant cavity to carry out radio frequency discharge to produce plasma; The RF energy of input is greatly about 300～500 watts, and the annular region between two cylindrical electrodes produces plasma, and dependence is kept to central electrode input radio frequency energy.In order to prevent the generation of electric spark, plasma is kept gas must select helium.In the material surface processing procedure, need keep to plasma and add 0.5～1% active gases in the gas, such as oxygen, fluorocarbon (carbon tetrafluoride etc.), carbon oxyfluoride and halogen etc., produce chemically active species.Yet, atmospheric pressure plasma jet (APPJ), the higher energy of needs causes and keeps.Wherein, most of energy is absorbed and the generation temperature rise by plasma gas.Thereby also need cooling system to guarantee atmospheric pressure plasma jet (APPJ) operate as normal under low-temperature atmosphere-pressure.Other atmospheric pressure plasma also has some characteristics of low pressure plasma concurrently, but the plasma temperature of its generation is higher, in practical application in industry, such as having received very big restriction in the middle of the material processed.At present; Plasma producing apparatus is difficult to obtain the plasma of big volume, and in addition, it is also quite high that the article on plasma body is kept the purity requirement of gas; And also very little to the selectivity of active gases, these unfavorable factors are all limiting atmospheric pressure plasma techniques and are further developing and use.
Summary of the invention
The present invention aims to provide a kind of atmos low-temperature plasma brush generating means; The plasma flow temperature that produces when solving atmospheric pressure plasma generator work in the prior art is higher, needs the additional configuration cooling system and causes being difficult to the problem in practical application in industry.
Technical scheme of the present invention is following:
A kind of atmos low-temperature plasma brush generating means; Comprise main body chamber and two electrodes; The main body chamber has the air inlet port and gives vent to anger port, and the said port of giving vent to anger is the narrow slit shape, and the indoor part near this port of giving vent to anger of main cavity forms narrow slit cavity (outlet of this narrow slit cavity is the port of giving vent to anger of narrow slit shape); The discharge end of said two electrodes is positioned at said narrow slit cavity place, and promptly the discharge end of two electrodes partly discharges at the narrow slit cavity of main body chamber.
Shrink gradually or be tending towards flat (smooth linear changes, phase step type change all can) from air inlet port to the port of giving vent to anger in the aforementioned body chamber, perhaps the indoor integral body of main cavity is the narrow slit cavity.
Also be in series with steady resistance on the loop of above-mentioned two electrodes.
Above-mentioned atmos low-temperature plasma brush generating means also comprises the charge flow rate control unit, and said air inlet port is provided with flowmeter; The said port of giving vent to anger also is provided with temperature sensor, specifically selects thermocouple sensor.
The width of the above-mentioned port of giving vent to anger is 5～100 with the ratio of thickness, is good with 10～100.
The gas that gets into the aforementioned body chamber is that plasma is kept gas and/or active gases; Wherein plasma is kept the mixture that gas comprises any two or more formation in a kind of and above-mentioned gas in inert gas, nitrogen, air, the oxygen, and active gases comprises the mixture of any two or more formation in a kind of and above-mentioned gas in fluorocarbon, carbon oxyfluoride, the halogen gas.
For above-mentioned two electrodes provide the power supply of discharge voltage is DC power supply or AC power, wherein, adjustable in the radio-frequency region of the frequency of AC power from power frequency to 13.56MHz; Electric source modes is continuous or impulse form.
The aforementioned body chamber is processed by polytetrafluoroethylene, insulating ceramics or both composite materials.
Above-mentioned electrode is the electrode that tungsten, nickel, tantalum, platinum or its alloy are processed, two electrodes each other over against the discharge end face be plane or tip-like.
The present invention also provides a kind of plasma brush generating means that is applied to the large tracts of land object handles, and its core is the array combination that is formed by above-mentioned atmos low-temperature plasma brush generating means.
Atmos low-temperature plasma brush generating means provided by the invention and array combination thereof have realized under normal pressure, producing near room temperature, and shape is like the low-temperature plasma jet of brush shape.In the work; Let plasma keep gas and active gases passes through chamber; On two electrodes, add certain voltage and come activated plasma to keep gas and active gases, make the plasma jet of its discharge generation brush shape, from the port ejection of giving vent to anger near the port of giving vent to anger.Utilize steady resistance, select suitable plasma to keep gas and active gases, and reasonably design the narrow slit cavity and can avoid glow discharge to be transformed into arc discharge.Brush shape plasma jet is from the outlet ejection of chamber; This jet has the living features of non-equilibrium plasma; Thereby this plasma generating equipment can be used for carrying out the eliminating of plasma surface treatment and cleaning, plasma-deposited, plasma sterilization and plasma for purification and chemical and biological weapons.
The present invention has the following advantages:
1. atmos low-temperature plasma brush generating means of the present invention can produce plasma under normal pressure.The plasma jet of flat brush shape makes the larger area plasma exposure in atmosphere; The heat that carries from discharge range can promptly be dispersed into the air and go; This structure is except helping eliminating the thermally labile factor; Prevent that glow discharge is transformed into beyond the arc discharge, also played good natural cooling effect.Thereby in some special application facet, this device can produce the plasma jet near room temperature, the highlyest is no more than 200 ℃.Be fit to be used for handling thermo-sensitive material, it is not caused any damage.Adopt steady resistance, and select suitable plasma to keep gas and active gases can prevent that glow discharge is transformed into arc discharge.
2. the structural design of this device has diversity, and with low cost, need not expensive vacuum system and just can produce low-temperature plasma jet; Easy-to-operate does not have strict restriction to the size and dimension that is processed article, adopts plasma brush generating means of the present invention when handling the article of large tracts of land or complex appearance structure, and is simply more than traditional low pressure plasma generation equipment.
3. the plasma jet of brush shape formula can utilize plasma to keep gas and active gases is saved energy efficiently.
4. plasma brush generating means is low in energy consumption, may diminish to several watts, therefore can adopt automobile batteries, even dry cell is supplied power.Under special circumstances, plasma brush generating means also can be worked under the power of several hectowatt.The plasma producing apparatus of array can be handled large-area object with higher efficient.Can hand with the plasma brush array device of dry cell power supply and to use.
5. characteristics simple in structure and low in energy consumption can guarantee that this device develops into portable set.
Description of drawings
Fig. 1 is an agent structure sketch map of the present invention, and wherein a is static sketch map, the sketch map that the plasma electrically scopiform became when b was work;
The work sketch map of Fig. 2 atmos low-temperature plasma brush generating means;
Fig. 3 array atmos low-temperature plasma brush generating means substrate material is handled sketch map.
Embodiment
Atmos low-temperature plasma brush generating means provided by the invention, by a main body chamber, two electrodes, a steady resistance, a mass flowmenter and a power-supply device are formed.The main body chamber comprises two ports, and a port is the air inlet port, and another port is the port of giving vent to anger, and the indoor part near this port of giving vent to anger of main cavity forms the narrow slit cavity naturally.In the main cavity chamber interior, two electrodes against the port arrangements of giving vent to anger, two electrodes face on the wall that is fixed on main body chamber both sides.One of them electrode is connected with steady resistance.The main body chamber is to be made by polymer or insulating ceramic materials as one type of polytetrafluoroethylene; Electrode is heat-resisting metal material, and these metals comprise the alloy of tungsten, nickel, tantalum, platinum and these metals, but is not restricted to above-mentioned material.In the chamber two electrodes over against end face both can be that the plane also can be a tip-like.Mass flowmenter in this device is used for the plasma flow of control flows through chamber.Power-supply device provides direct current or alternating voltage.Wherein, the frequency of AC power can change to the radio frequency of 13.56MHz from power frequency, and electric source modes both can be also can be pulse continuously.The steady resistance of connecting in the circuit can suppress the electric field fluctuation of cathode zone, and the size of discharging current prevents that glow discharge is transformed into arc discharge between restriction the two poles of the earth, thereby makes and in gas chamber, can produce stable glow discharge.
During work, between two electrodes, add certain voltage, plasma is kept gas and active gases from air inlet port inflow chamber chamber, when flowing through regional between two electrodes, with stable plasma gas discharge takes place.The gas that can be used for producing plasma has helium, argon gas, nitrogen, air and their mist, but is not limited only to these gas.Flow out at the narrow slit of the interval plasma flow that forms of two electrode discharges from chamber, narrow slit can guarantee that plasma gas has higher speed in the moment of ejection chamber.The plasma gas that flows out fast from the slit cavity is carrying the heat of part, is just eliminating the thermally labile factor of glow discharge with this.Plasma flow sprays from chamber with very fast speed, stretches out into the stable low-temperature plasma jet of brush shape, forms the atmos low-temperature plasma brush.This plasma jet has the characteristic of low pressure non-equilibrium plasma, thereby this plasma brush generating means can be used for carrying out the eliminating of plasma surface treatment and cleaning, plasma-deposited, plasma sterilization and plasma for purification and chemical and biological weapons.
The shape of plasma brush and volume receive gas flow rate, discharge energy, the width of the structure of chamber and narrow slit cavity and the influence of thickness.Plasma flow may diminish to 0.01L/min or littler, also can be up to several liters of per minute or higher.The ratio of the wide height of design chamber more should be greater than 10 generally speaking greater than 5, and when contacting with the object being treated surface with convenient plasma electrically brush, plasma jet can be evenly distributed on body surface.The voltage that is used to produce the plasma brush can be the hundreds of volt, also can be elevated to several kilovolts, and is perhaps higher, and discharging current is perhaps higher in milliampere to tens milliampere magnitude.Generation is kept the energy of steady glow discharge usually between several watts to tens watts.When power supply was worked with pulse mode, the energy of discharge can further reduce.Low energy consumption can guarantee to form the plasma jet of low temperature.Under the situation of not losing plasma stability, plasma brush generating means can be operated in (a few hectowatt) under the higher discharge energy state.At this moment, the plasma brush will have the temperature of bigger volume and Geng Gao.
Below in conjunction with accompanying drawing to involved in the present invention to concrete link elaborate.
In different drawings, provided similar or identical apparatus structure sketch map.Fig. 1 a is agent structure 10 sketch mapes of atmos low-temperature plasma brush generating means of the present invention.Atmos low-temperature plasma brush generating means comprises main body chamber 12, and main body chamber 12 has two ports, an air inlet port 14 and the port 16 of giving vent to anger.Plasma keeps gas and active gases flows into chamber from air inlet port 14, the flat narrow slit cavity of the main body of flowing through chamber 12 inside (whole in the main body chamber 12 in the present embodiment is the narrow slit cavitys).Plasma brush generating means also comprises two electrodes, an electrode 20 and another electrode 22.Electrode 20 and electrode 22 face all in the inside of main body chamber 12 each other, and near the port 16 of giving vent to anger.When the voltage that is applied to the electrode two ends is enough high, will discharge in the inside of chamber 12, produce plasma.Plasma jet formed sketch map when Fig. 1 b had showed the discharge of plasma brush generating means.Plasma keeps gas and active gases flows into main body chamber 12 from air inlet port 14 constantly, and the plasma flow that produces in chamber interior sprays from the port 16 of giving vent to anger through the narrow slit cavity, forms the jet 24 of brush shape.
Fig. 2 is the work sketch map of atmos low-temperature plasma brush generating means 26 of the present invention.Atmospheric pressure plasma brush generating means 26 also comprises steady resistance 28 and power-supply device 30 except containing a main body chamber 12.In addition, control the mass flowmenter 34 and 32 that plasma is kept gas and active gases flow velocity in addition respectively.
During work, plasma is kept gas and is controlled by way of pipeline 38 again by air inlet port inflow chamber chamber through flowmeter 34; Active gases is controlled by way of pipeline 38 again by air inlet port inflow chamber chamber through flowmeter 32.When the voltage that is added in electrode 20 and 22 two ends was enough high, the gas in the zone of flowing through between two electrodes was just breakdown, and electric discharge phenomena take place, and forms plasma flow.The steady resistance 28 that is connected in the circuit can limit the size of discharging current between the two poles of the earth and the electric field fluctuation of inhibition cathode zone, prevents that the glow discharge between the electrode is transformed into arc discharge.Plasma flow just can spray via the narrow slit cavity with the form of stable brush shape low-temperature plasma jet 24 because of the influence of flow velocity own.The low-temperature plasma jet 24 that low temperature plasma brush generating means 26 is produced touches the surface that is processed object 36, and suitably contacts and moving back and forth with it, just can handle the whole surface or the pretreating surface of object 36.
What be worth explanation is; Fig. 2 has only shown that the assembling of two kinds of gases (plasma is kept gas and active gases) feeding mechanism is fused into single gas gas handling system, and low temperature plasma brush generating means of the present invention also can comprise a plurality of (>=3) gas supply devices and extra gas gas handling system.
The volume of plasma brush and shape mainly receive gas flow rate, discharge energy, the ratio that the narrow slit cavity is wide and high and the influence of chamber structure.For a specific plasma brush generating means; The chamber structure characteristic depends on; But be not restricted to following numerous factor, such as the energy size that power supply provided, the flow velocity of plasma gas, the size and shape of electrode, the spacing between two electrodes, the width of cavity narrow slit and the length of plasma brush etc.Atmospheric pressure plasma brush generating means; The width and the thickness of the port 16 of giving vent to anger (also can be considered the narrow slit cavity) of its main body chamber 12 are respectively 10mm and 1mm usually; Also be that main body chamber 12 whole width and thickness are respectively 10mm and 1mm in the present embodiment; Be spaced apart 15mm between two electrodes, the diameter of each electrode is 0.75mm.What be worth explanation is, above-mentioned size only is a sample of plasma brush generating means of the present invention, and this device size is not restricted to above-mentioned scope.
The design of narrow slit cavity can guarantee that the plasma jet that sprays cavity is utilized efficiently.Pass through the plasma flow of cavity rapidly and can take away the part heat that produces at discharge range, eliminate the thermally labile factor, thereby keep stable glow discharge.It is thus clear that the air-flow of very fast flow velocity helps generating means to produce stable atmos low-temperature plasma brush.
As shown in Figure 3 again, the present invention can also be combined by a plurality of plasma brush generating meanss except can being made up of single plasma brush generating means.Combination back forms plasma brush array, and each brush is responsible for the part on handled object surface, when plasma brush array with the form of integral body when body surface moves around, just handled object is surperficial quickly and efficiently.Certainly, the single narrow slit cavity plasma brush of widening also has identical effect.
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| CN103140011A (en) * | 2011-11-30 | 2013-06-05 | 亚树科技股份有限公司 | vertical plasma generator |
| CN103760147A (en) * | 2014-01-20 | 2014-04-30 | 段忆翔 | Microplasma-based portable chemical volatile matter detector |
| CN104066264B (en) * | 2014-06-18 | 2017-01-25 | 大连理工大学 | Direct-current self-excited pulse large-area high-air-pressure creepage discharge generation device |
| CN104994673B (en) * | 2015-06-29 | 2018-04-17 | 河北大学 | In a kind of generation air ambient under atmospheric pressure homogeneous plasma brush apparatus and method |
| CN105578699B (en) * | 2015-12-30 | 2018-06-08 | 河北大学 | A kind of device and method for generating cold plasma brush |
| CN110916294A (en) * | 2018-09-19 | 2020-03-27 | 钜翁企业有限公司 | Plasma generator for processing shoe material and processing method thereof |
| CN111246651B (en) * | 2020-04-08 | 2022-06-21 | 河北大学 | Device and method for generating large-scale plasma plume by utilizing spray gun array |
| CN113015309B (en) * | 2021-04-14 | 2025-04-22 | 殷振华 | An induced plasma generating device and a manufacturing method thereof |
| CN115351273A (en) * | 2022-08-22 | 2022-11-18 | 广东电网有限责任公司 | Powder filler surface treatment device |
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