CN101252805A - Simple Atmospheric Pressure Suspended Electrode Cold Plasma Jet Generator - Google Patents
Simple Atmospheric Pressure Suspended Electrode Cold Plasma Jet Generator Download PDFInfo
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Abstract
本发明属于等离子体放电反应器技术领域，涉及一种简易大气压悬浮电极冷等离子体射流发生器。特征在于：装置主体为一根毫米量级石英管，与供气源相连一端为发生器进气口，另一端为射流出口；射流出口上方有一对针电极嵌入石英管内，两电极呈径向对称，与交流源相连的一侧针电极为功率电极，另一侧针电极悬浮于空气中为悬浮电极；通过施加电压，电极之间放电产生等离子体，经流动气体作用喷射出管外形成射流。本发明的效果和益处在于：针电极结构可降低射流产生及维持电压；悬浮电极不但有利于提高能量利用率，还可有效控制放电强度，维持稳定放电；所获常压等离子体射流具有温度低、长度长、产生及维持电压低、连续工作时间长、结构简单等特点。
The invention belongs to the technical field of plasma discharge reactors, and relates to a simple atmospheric pressure suspension electrode cold plasma jet generator. The feature is: the main body of the device is a millimeter-scale quartz tube, one end connected to the gas supply source is the generator inlet, and the other end is the jet outlet; a pair of needle electrodes are embedded in the quartz tube above the jet outlet, and the two electrodes are radially symmetrical The needle electrode on one side connected to the AC source is the power electrode, and the needle electrode on the other side is suspended in the air as the suspension electrode; by applying voltage, the discharge between the electrodes generates plasma, which is ejected out of the tube by the flowing gas to form a jet. The effects and benefits of the present invention are: the needle electrode structure can reduce the jet generation and maintenance voltage; the suspension electrode not only helps to improve the energy utilization rate, but also can effectively control the discharge intensity and maintain a stable discharge; the obtained atmospheric pressure plasma jet has a low temperature , long length, low generating and maintaining voltage, long continuous working time, simple structure and so on.
Description
技术领域 technical field
本发明属于等离子体放电反应器技术领域，涉及一种冷等离子体射流发生装置，特别涉及到一种简易大气压悬浮电极冷等离子体射流发生器。The invention belongs to the technical field of plasma discharge reactors, and relates to a cold plasma jet generator, in particular to a simple atmospheric pressure suspension electrode cold plasma jet generator.
背景技术 Background technique
低温等离子体空间富集的离子、电子、激发态原子、分子及自由基都是极活泼的反应性物种，这些活性粒子数量大、种类多、活性高，易于和所接触的材料表面发生反应，因此近年来，低温等离子体在灭菌消毒、表面改性(改善纸张、薄膜、纺织品以及纤维的可湿性、吸水性、印染性、粘着性和导电性等方面的性质)、薄膜沉积、刻蚀加工、器件清洗等领域得到越来越广泛的应用。目前，多数低温等离子体是在几百帕的低气压下通过气体放电产生的，但对于大规模工业生产，低气压等离子体存在两个重要缺点：(1)放电和反应室处于低气压状态，需采用真空系统，投资高且应用复杂；(2)分批处理效率低，需要不断地打开真空室取出成品添加试品，然后重新抽真空充入工作气体，难于连续生产。因此，更适合用于大规模低温生产应用的是大气压下形成的低温等离子体。The ions, electrons, excited atoms, molecules and free radicals enriched in the low-temperature plasma space are extremely active reactive species. These active particles have a large number, variety and high activity, and are easy to react with the surface of the material they are in contact with. Therefore, in recent years, low-temperature plasma has been used in sterilization, surface modification (improving the wettability, water absorption, printing and dyeing, adhesion and conductivity of paper, film, textiles and fibers), thin film deposition, etching, etc. Processing, device cleaning and other fields have been more and more widely used. At present, most low-temperature plasmas are produced by gas discharge at a low pressure of several hundred Pa, but for large-scale industrial production, there are two important disadvantages of low-pressure plasma: (1) the discharge and reaction chamber are in a low-pressure state, A vacuum system is required, which requires high investment and complicated application; (2) batch processing is inefficient, and the vacuum chamber needs to be continuously opened to take out finished products and add test products, and then re-vacuumize and fill with working gas, which is difficult for continuous production. Therefore, more suitable for large-scale low-temperature production applications are low-temperature plasmas formed at atmospheric pressure.
大气压冷等离子体射流是近年来兴起的一种新型大气压类辉光等离子体发生技术，这种技术可以将微小空间内的放电加以扩大并引出，形成较为开阔的大气压类辉光放电等离子体。应用多种工作气体及其混合气体都可以有效地产生冷等离子体射流，具有击穿电压较低、离子和亚稳态原子浓度较高、电子温度高、中性粒子温度低、产生的等离子体中均匀部分较大、可控性好等特点，是目前国际上等离子体应用领域的研究热点。传统大气压冷等离子体射流装置多由石英管介质阻挡射频感性耦合或容性耦合放电产生，但是对于这种在介质阻挡方式下由射频放电产生的等离子体射流，当射频功率输入超出某一范围时，射频等离子体射流容易转化为均匀性差的高温电弧，降低了大气压冷等离子体射流的稳定性。同时，传统射流源的结构相对复杂，射频电源的应用也增加了操作、控制及维护的复杂性。Atmospheric pressure-cooled plasma jet is a new type of atmospheric pressure glow plasma generation technology that has emerged in recent years. This technology can expand and extract the discharge in a small space to form a relatively open atmospheric pressure glow discharge plasma. The application of a variety of working gases and their mixed gases can effectively generate cold plasma jets, which have low breakdown voltage, high concentration of ions and metastable atoms, high electron temperature, low temperature of neutral particles, and low temperature of neutral particles in the generated plasma. The large uniform part and good controllability are the current research hotspots in the field of plasma applications in the world. Traditional atmospheric pressure-cooled plasma jet devices are mostly produced by dielectric barrier radio frequency inductive coupling or capacitive coupling discharge in quartz tubes, but for this plasma jet produced by radio frequency discharge in dielectric barrier mode, when the radio frequency power input exceeds a certain range , the RF plasma jet is easily transformed into a high-temperature arc with poor uniformity, which reduces the stability of the atmospheric pressure-cooled plasma jet. At the same time, the structure of the traditional jet source is relatively complex, and the application of radio frequency power also increases the complexity of operation, control and maintenance.
发明内容 Contents of the invention
本发明旨在提供一种简易大气压悬浮电极冷等离子体射流发生器，具有结构简单、实用性强等特点。以氩气或氦气为工作气体，可在常压开放空气环境中获得均匀稳定的冷等离子体射流，具有温度低、长度长、产生及维持电压低、连续工作时间长等优势，可用于灭菌消毒、表面改性、器件清洗等应用领域。The invention aims to provide a simple atmospheric pressure suspension electrode cold plasma jet generator, which has the characteristics of simple structure, strong practicability and the like. With argon or helium as the working gas, a uniform and stable cold plasma jet can be obtained in an open air environment at normal pressure. It has the advantages of low temperature, long length, low generation and maintenance voltage, and long continuous working time. It can be used for extinguishing Bacterial disinfection, surface modification, device cleaning and other application fields.
本发明的技术方案是：该装置的主体部分是一根两端开放的毫米量级石英管，规格为内径5.5mm，外径8mm，其一端作为反应器进气口，通过导管经流量计与供气源相连，供气源所供工作气体为氩气或氦气，另一端作为等离子体射流出口。距离射流出口上方10mm处有一对针电极嵌入石英管内，两针电极呈径向对称，电极之间间距2.5mm。与48kHz交流源相连的一侧针电极为功率电极，交流源电压0-10kV可调；与功率电极相对的另一侧针电极直接悬浮于周围开放空气环境中无须接地，作为悬浮电极。通过施加电压，电极之间发生放电产生等离子体，在流动气体作用下，放电区等离子体被喷射出管外形成射流。当输入工作气体流量保持一定时，持续增大外加电压，该简易大气压悬浮电极冷等离子体射流发生器将经历击穿放电、稳态射流、非稳态射流、射流消失转为管内放电四个阶段，各阶段对应阈值电压根据所使用工作气体不同有所差异。以上四个环节中，可应用于实际生产的为稳态射流阶段及非稳态射流阶段。除外加电压外，气体流量也会影响放电强度及射流形貌。若输入气流过小，则无法产生等离子体射流；若输入气流过大，则射流出口处会形成湍流，不宜射流稳定运行。在上述规格及条件下，形成稳定氩气或氦气等离子体射流的合适气流范围为0.08m3/h-0.3m3/h。总之，通过调节外加电压及工作气体流量，可获得均匀、稳定的冷等离子体射流。The technical solution of the present invention is: the main part of the device is a millimeter-scale quartz tube with open ends, the specification is 5.5 mm in inner diameter and 8 mm in outer diameter, and one end of it is used as the air inlet of the reactor, through the flow meter and the The gas supply source is connected, the working gas supplied by the gas supply source is argon or helium, and the other end is used as the plasma jet outlet. There is a pair of needle electrodes embedded in the quartz tube at a distance of 10 mm above the jet outlet. The two needle electrodes are radially symmetrical, and the distance between the electrodes is 2.5 mm. The needle electrode on one side connected to the 48kHz AC source is a power electrode, and the voltage of the AC source is adjustable from 0-10kV; the needle electrode on the other side opposite to the power electrode is directly suspended in the surrounding open air environment without grounding, and is used as a suspension electrode. By applying a voltage, a discharge occurs between the electrodes to generate plasma, and under the action of the flowing gas, the plasma in the discharge area is ejected out of the tube to form a jet. When the input working gas flow rate remains constant, the external voltage continues to increase, and the simple atmospheric pressure suspended electrode cold plasma jet generator will experience four stages: breakdown discharge, steady state jet flow, unsteady state jet flow, and jet disappearance into tube discharge. , the threshold voltage corresponding to each stage varies according to the working gas used. Among the above four links, the ones that can be applied to actual production are the steady-state jet flow stage and the unsteady-state jet flow stage. In addition to the applied voltage, the gas flow will also affect the discharge intensity and jet morphology. If the input air flow is too small, the plasma jet cannot be generated; if the input air flow is too large, turbulent flow will be formed at the jet outlet, which is not suitable for the stable operation of the jet. Under the above specifications and conditions, the suitable gas flow range for forming a stable argon or helium plasma jet is 0.08m 3 /h-0.3m 3 /h. In conclusion, a uniform and stable cold plasma jet can be obtained by adjusting the applied voltage and the flow rate of the working gas.
本发明的效果和益处在于：通过使用针针电极结构并引入悬浮电极，可有效改进、提高冷等离子体射流性质。由于针电极尖端曲率较大，且两针电极间距较近，因此利用针针电极结构更易于产生较强电场，可明显降低等离子体射流产生及维持电压；悬浮电极的引入大大优化了射流特性，由于不需使用外接器件，在简化电路构造的同时，更降低了能量在外回路的损耗，使能量更易集中在射流产生通道，提高了能量利用率；此外，悬浮电极还可以控制电荷积累，有效控制针针放电强度，增强射流稳定性，防止射流热化。使用该装置，可在常压开放环境下获得均匀、稳定的冷等离子体射流，具有温度低、长度长、产生及维持电压低、连续工作时间长、结构简单等特点。The effect and benefit of the present invention are: by using the needle electrode structure and introducing the suspension electrode, the properties of the cold plasma jet can be effectively improved and enhanced. Due to the large curvature of the tip of the needle electrode and the close distance between the two needle electrodes, it is easier to generate a stronger electric field by using the needle electrode structure, which can significantly reduce the generation and maintenance voltage of the plasma jet; the introduction of the suspension electrode greatly optimizes the jet characteristics. Since there is no need to use external devices, while simplifying the circuit structure, it also reduces the loss of energy in the external circuit, making it easier to concentrate energy on the jet generation channel, and improving energy utilization; in addition, the suspension electrode can also control charge accumulation and effectively control Needle-needle discharge intensity enhances jet stability and prevents jet heating. Using the device, a uniform and stable cold plasma jet can be obtained in an open environment at normal pressure, and has the characteristics of low temperature, long length, low generation and maintenance voltage, long continuous working time, and simple structure.
附图说明 Description of drawings
附图1是本发明简易大气压悬浮电极冷等离子体射流发生器的结构示意图。Accompanying drawing 1 is the structure schematic diagram of the simple atmospheric pressure levitation electrode cold plasma jet generator of the present invention.
图中：In the picture:
101.流量计，用于控制输入反应器的工作气体流量。101. A flow meter for controlling the flow of working gas into the reactor.
102.进气口，用于输入工作气体。102. Air inlet, used for inputting working gas.
103.石英管，反应器主体部分，用于固定电极位置，提供放电发生环境，规格为内径5.5mm，外径8mm。103. Quartz tube, the main part of the reactor, is used to fix the position of the electrode and provide the environment for the discharge to occur. The specification is 5.5mm in inner diameter and 8mm in outer diameter.
104.功率电极，作为能量输入端，位于距离石英管下游端口上方10mm处，与48kHz交流功率源相连。104. The power electrode, as the energy input end, is located 10mm above the downstream port of the quartz tube, and is connected to a 48kHz AC power source.
105.悬浮电极，位于距离石英管下游端口上方10mm处，直接悬浮于周围空气环境中无须接地；与功率电极呈径向对称，两电极之间间距2.5mm。105. The suspension electrode is located 10mm above the downstream port of the quartz tube, directly suspended in the surrounding air environment without grounding; it is radially symmetrical with the power electrode, and the distance between the two electrodes is 2.5mm.
106.射流出口，即石英管下游端口，可将微小空间内放电产生的等离子体引出，形成较为开阔的等离子体。106. The jet outlet, that is, the downstream port of the quartz tube, can lead out the plasma generated by the discharge in the tiny space to form a relatively open plasma.
107.48kHz交流功率源，电压0-10kV可调，用于提供电压。107.48kHz AC power source, voltage 0-10kV adjustable, used to provide voltage.
108.48kHz交流功率源接地。The 108.48kHz AC power source is grounded.
附图2是简易大气压悬浮电极冷等离子体射流发生器俯视图。Accompanying drawing 2 is a top view of a simple atmospheric pressure suspension electrode cold plasma jet generator.
具体实施方式 Detailed ways
以下结合技术方案和附图，详细叙述本发明的具体实施方式。The specific implementation manner of the present invention will be described in detail below in combination with the technical scheme and accompanying drawings.
工作气体(氦气或氩气)经流量计101后，由进气口102进入石英管103。射流出口106上方10mm处有一对针电极嵌入石英管内，与48kHz交流源107相连的一侧针电极为功率电极104，交流源电压0-10kV可调；与功率电极相对的另一侧针电极直接悬浮于周围开放空气环境中无须接地，作为悬浮电极105；两针电极呈径向对称，电极之间间距2.5mm。The working gas (helium or argon) enters the
当通过功率电极施加交流高压达到气体击穿阈值时，两针电极之间产生放电，形成强度较小的微弧；此时略提升电压，使得放电区电离增强，粒子密度增多，在流动气体作用下，放电区等离子体被喷射出管外，在射流出口106处形成均匀稳定的类辉光射流，长度可达50mm-70mm。用示波器及光电倍增管做在线分析发现，稳态射流的光电流与外加电压频率相同，且每半周期出现一次脉冲峰，这一规律与大气压辉光放电电流状态相似；用光纤温度传感器监测发现，当以氩气、氦气为工作气体时，稳态射流温度仅为20℃左右，属典型低温等离子体；通过光谱检测发现，射流区富集OH、O、及激发态原子等活性反应物种。此外，稳态氩气或氦气等离子体射流一旦形成，便可连续、稳定运行数小时。因此，该简易大气压悬浮电极冷等离子体射流发生器所产生的稳态射流可用于灭菌消毒、表面改性、器件清洗等应用领域，特别适于对温度较为敏感的材料表面进行处理。When the AC high voltage is applied through the power electrode to reach the gas breakdown threshold, a discharge is generated between the two needle electrodes, forming a micro-arc with a lower intensity; at this time, the voltage is slightly increased, so that the ionization of the discharge area is enhanced, and the particle density is increased. Next, the plasma in the discharge area is sprayed out of the tube, forming a uniform and stable glow-like jet at the
在稳态基础上进一步提高电压时，放电强度增强，射流区变亮，但射流仍可保持稳态，且射流长度几乎不变；当电压增至一定程度时，射流区内出现少量放电细丝，射流过渡到非稳态，长度略有减小。通过示波器及光电倍增管测量发现，此时在光电流主脉冲上出现若干细小脉冲，具有一定的丝状放电特征；光谱检测发现，射流区仍有大量的OH、O、及激发态原子等活性反应物种。因此，非稳态射流仍可应用于灭菌消毒、器件清洗等方面，但不宜用于布匹、纸张等材料的表面改性，以防局部温度过高，造成烧蚀或穿孔。When the voltage is further increased on the basis of the steady state, the discharge intensity increases and the jet area becomes brighter, but the jet can still maintain a steady state, and the length of the jet remains almost unchanged; when the voltage increases to a certain level, a small amount of discharge filaments appear in the jet area , the jet transitions to an unsteady state with a slight decrease in length. Through the measurement of the oscilloscope and the photomultiplier tube, it is found that several small pulses appear on the main pulse of the photocurrent at this time, which has a certain characteristic of filamentary discharge; the spectral detection shows that there are still a large number of activities such as OH, O, and excited atoms in the jet region. reactive species. Therefore, the unsteady jet can still be used in sterilization, device cleaning, etc., but it is not suitable for surface modification of materials such as cloth and paper, in case the local temperature is too high, resulting in ablation or perforation.
在非稳态基础上进一步加大电压至一定值，射流出口处的等离子体射流将突然消失，转而在射流管内部出现大量无规则螺旋状放电细丝。这一过程避免了射流的进一步热化，加强了装置的可控性，同时增加了对所处理材料的保护。综上，该简易大气压悬浮电极冷等离子体射流发生器的可用阶段为稳态射流及非稳态射流。If the voltage is further increased to a certain value on the basis of the unsteady state, the plasma jet at the jet outlet will suddenly disappear, and a large number of irregular spiral discharge filaments will appear inside the jet tube. This process avoids further thermalization of the jet and enhances the controllability of the device while increasing the protection of the material being processed. To sum up, the available stages of the simple atmospheric-pressure suspended electrode cold plasma jet generator are steady-state jet and unsteady-state jet.
除外加电压外，气体流量也会影响放电强度及射流形貌。若气流过小，则无法产生等离子体射流；若输送气流过大，则射流出口处会形成湍流，不宜射流稳定运行。在上述规格及条件下，形成稳态氩气或氦气射流的合适气流范围为0.08m3/h-0.3m3/h。In addition to the applied voltage, the gas flow will also affect the discharge intensity and jet morphology. If the air flow is too small, the plasma jet cannot be generated; if the delivery air flow is too large, turbulent flow will be formed at the jet outlet, which is not suitable for the stable operation of the jet. Under the above specifications and conditions, the suitable gas flow range for forming a steady-state argon or helium jet is 0.08m 3 /h-0.3m 3 /h.
具体实施例：Specific examples:
采用纯度99.999％的高纯氩气为工作气体，能够产生稳态射流及非稳态射流的流量下限是0.08m3/h。当流量为0.26m3/h时，各阶段阈值电压及射流特性如下：High-purity argon gas with a purity of 99.999% is used as the working gas, and the lower limit of the flow rate capable of producing steady jet flow and unsteady jet flow is 0.08m 3 /h. When the flow rate is 0.26m 3 /h, the threshold voltage and jet characteristics of each stage are as follows:
1.两针电极之间产生放电，形成低强度微弧的击穿阈值是2.7kV。1. When a discharge is generated between two needle electrodes, the breakdown threshold for forming a low-intensity micro-arc is 2.7kV.
2.进一步增大电压，出现稳态射流的电压区间为3.6kV-4.4kV；稳态射流的宏观温度范围是18.7℃-22.3℃，电子激发温度为3329K-3715K；射流长度始终保持在60mm左右。2. Further increase the voltage, the voltage range of steady-state jets is 3.6kV-4.4kV; the macroscopic temperature range of steady-state jets is 18.7°C-22.3°C, and the electron excitation temperature is 3329K-3715K; the length of the jets is always kept at about 60mm .
3.继续增大电压，出现非稳态射流的电压区间是4.4kV-5.6kV；电子激发温度为3329K-4405K；非稳态射流长度较稳态射流略短，约为40mm-60mm。3. Continue to increase the voltage, the voltage range of the unsteady jet is 4.4kV-5.6kV; the electron excitation temperature is 3329K-4405K; the length of the unsteady jet is slightly shorter than the steady jet, about 40mm-60mm.
4.当外加电压大于5.6kV时，射流消失，转而在射流管内部出现大量无规则螺旋状放电细丝。4. When the applied voltage is greater than 5.6kV, the jet disappears, and a large number of irregular spiral discharge filaments appear inside the jet tube.
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