CN102011087B - Ion chemical heat treating furnace having glow discharge-aided heating function - Google Patents
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 73
- 239000000126 substance Substances 0.000 title claims abstract description 44
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims abstract description 7
- 239000010959 steel Substances 0.000 claims abstract description 7
- 230000005855 radiation Effects 0.000 claims abstract description 3
- 238000004140 cleaning Methods 0.000 abstract description 6
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 238000009529 body temperature measurement Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 38
- 238000005121 nitriding Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- 238000005255 carburizing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- 238000004321 preservation Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
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Abstract
本发明公开了一种辉光放电辅助加热离子化学热处理炉，在炉体(2)的真空室内放置一钢制圆筒(4)，欲处理的工件(5)摆放在工作台上(6)上，圆筒、工作台、炉体之间相互绝缘。离子化学热处理前，先通过转换开关(8)将离子化学热处理炉的直流电源(1)负极接在圆筒上，圆筒产生辉光放电并被加热，利用圆筒的热辐射对工件进行预热。待工件达到预热温度后，将直流电源的负极切换到工作台上，工件开始辉光放电加热并进行离子化学热处理，这样可以缩短工件溅射清理的时间，防止直流电源因过流损坏。在离子化学热处理过程中，圆筒与工件也可以同时接直流电源的负极，依靠圆筒的辅助加热提高工件温度均匀性，并解决了工件测温难的问题。
The invention discloses a glow discharge assisted heating ion chemical heat treatment furnace. A steel cylinder (4) is placed in a vacuum chamber of a furnace body (2), and a workpiece (5) to be treated is placed on a workbench (6 ), the cylinder, workbench and furnace body are insulated from each other. Before the ion chemical heat treatment, connect the negative electrode of the DC power supply (1) of the ion chemical heat treatment furnace to the cylinder through the switch (8), and the cylinder generates glow discharge and is heated, and the workpiece is pre-heated by the heat radiation of the cylinder. hot. After the workpiece reaches the preheating temperature, the negative pole of the DC power supply is switched to the workbench, and the workpiece starts glow discharge heating and undergoes ion chemical heat treatment, which can shorten the time for sputtering cleaning of the workpiece and prevent the DC power supply from being damaged due to overcurrent. During the ion chemical heat treatment process, the cylinder and the workpiece can also be connected to the negative pole of the DC power supply at the same time, relying on the auxiliary heating of the cylinder to improve the temperature uniformity of the workpiece and solve the problem of difficult temperature measurement of the workpiece.
Description
技术领域 technical field
本发明属于一种金属材料表面离子化学热处理装置，更具体地说它是一种带有辉光辅助加热功能的离子化学热处理装置。The invention belongs to a metal material surface ion chemical heat treatment device, more specifically it is an ion chemical heat treatment device with glow auxiliary heating function.
背景技术 Background technique
离子化学热处理包括离子渗氮、渗碳、氮碳共渗、渗硫、渗金属、等离子体化学气相沉积等。它是将欲处理的工件置于离子化学热处理炉的真空室内，工件接直流辉光放电电源的负极，炉体接正极。在直流电场作用下，炉内气体发生辉光放电，生成的正离子轰击阴极(工件)的表面，将工件加热到所需要的化学热处理温度(一般在400～600℃之间)，同时气体辉光放电激活了反应气体，在工件表面发生一系列的物理化学反应，达到工件表面改性处理的目的。Ion chemical heat treatment includes ion nitriding, carburizing, nitrocarburizing, sulfurizing, metallizing, plasma chemical vapor deposition, etc. It places the workpiece to be processed in the vacuum chamber of the ion chemical heat treatment furnace, the workpiece is connected to the negative pole of the DC glow discharge power supply, and the furnace body is connected to the positive pole. Under the action of a DC electric field, the gas in the furnace undergoes glow discharge, and the positive ions generated bombard the surface of the cathode (workpiece), heating the workpiece to the required chemical heat treatment temperature (generally between 400 and 600°C), and the gas glows at the same time. Photodischarge activates the reactive gas, and a series of physical and chemical reactions occur on the surface of the workpiece to achieve the purpose of surface modification of the workpiece.
在辉光放电的初始阶段，由于工件表面不可避免地存在一些未清洗干净的污物，如棉花毛、油污、锈斑等，工件表面打弧十分频繁，容易烧伤工件表面，大电流的弧光放电也容易损坏直流辉光放电电源，这时应采取低直流电压、低真空室气体压强的办法，缓慢升高工件的温度。当工件被加热到约350℃以上后，打弧现象逐渐消失，这时可以升高直流电压和炉内气体压强，将工件快速加热到离子化学热处理所需要的温度。离子化学热处理前的溅射清理时间取决于装炉前工件表面的清洗程度和工件的装炉量，一般为数小时之多，是影响离子化学热处理周期的重要因素。In the initial stage of glow discharge, due to the unavoidable existence of some uncleaned dirt on the surface of the workpiece, such as cotton wool, oil stains, rust spots, etc., arcing on the surface of the workpiece is very frequent, which is easy to burn the surface of the workpiece. It is easy to damage the DC glow discharge power supply. At this time, the method of low DC voltage and low vacuum chamber gas pressure should be adopted to slowly increase the temperature of the workpiece. When the workpiece is heated above 350°C, the arcing phenomenon gradually disappears. At this time, the DC voltage and the gas pressure in the furnace can be increased to quickly heat the workpiece to the temperature required for ion chemical heat treatment. The sputtering cleaning time before ion chemical heat treatment depends on the degree of cleaning of the surface of the workpiece before loading and the amount of furnace loading of the workpiece, generally as many as several hours, which is an important factor affecting the cycle of ion chemical heat treatment.
为了减少工件溅射清理时间，除了加强装炉前工件表面的清洗工作外，有的离子化学热处理炉安装了电阻辅助加热装置，如外辅助加热式离子轰击热处理炉(中国专利99217521.6)和内辅助加热式离子氮化炉(http://www.whrcl.com)。在工件接通直流电源产生辉光放电前，先利用装在炉外或炉内的电阻辅助加热装置将工件预热到一定高的温度，待工件表面的污物烘烤干净后再接通直流电源，这时工件表面就很少会出现打弧现象，大大缩短了离子化学热处理的周期。In order to reduce the sputtering cleaning time of the workpiece, in addition to strengthening the cleaning of the workpiece surface before loading the furnace, some ion chemical heat treatment furnaces are equipped with resistance auxiliary heating devices, such as external auxiliary heating ion bombardment heat treatment furnace (Chinese patent 99217521.6) and internal auxiliary Heated plasma nitriding furnace (http://www.whrcl.com). Before the workpiece is connected to the DC power supply to generate glow discharge, the workpiece is preheated to a certain high temperature by using the resistance auxiliary heating device installed outside or inside the furnace, and the DC is connected after the dirt on the surface of the workpiece is baked clean. Power supply, at this time, arcing rarely occurs on the surface of the workpiece, which greatly shortens the cycle of ion chemical heat treatment.
但是，离子化学热处理炉的电阻辅助加热也有一些不足之处，如外辅助加热式离子化学热处理炉的加热效率低、炉体结构复杂、维护困难；而内辅助电阻加热装置要占据炉内较大的有效工作空间，电阻加热器若直接采用交流三相380V供电不安全，采用低电压大电流供电时需要一台功率较大的降压变压器。两种电阻辅助加热器都要配备专用的测温、控温装置，大大增加了离子化学热处理炉的成本。However, the resistance-assisted heating of the ion chemical heat treatment furnace also has some shortcomings, such as the low heating efficiency of the external auxiliary heating ion chemical heat treatment furnace, the complex structure of the furnace body, and difficult maintenance; and the internal auxiliary resistance heating device occupies a large area in the furnace. If the resistance heater is directly powered by AC three-phase 380V, it is not safe to use a low-voltage and high-current power supply, and a step-down transformer with large power is required. Both resistance auxiliary heaters must be equipped with special temperature measuring and temperature control devices, which greatly increases the cost of the ion chemical heat treatment furnace.
发明内容Contents of the invention
本发明的目的是要提供一种利用离子化学热处理设备本身的直流辉光放电电源进行辅助加热，它能有效地缩短离子化学热处理初始阶段的工件溅射清理时间。The object of the present invention is to provide an auxiliary heating using the DC glow discharge power supply of the ion chemical heat treatment equipment itself, which can effectively shorten the sputtering cleaning time of the workpiece in the initial stage of the ion chemical heat treatment.
本发明的目的是这样实现的：在离子化学热处理炉的真空室内靠近炉壁的部位放置一个钢制薄壁圆筒，圆筒的上端封闭。欲处理的工件摆放在圆筒中间的工作台上，圆筒、工作台、离子化学热处理炉的炉体之间相互绝缘，将离子化学热处理设备本身的直流电源的负极根据处理工艺的需要接在圆筒或工作台上，直流电源的正极接在炉体外壳上，并接地保护。在离子化学热处理的初始阶段，先将直流电源的负极接在圆筒上，圆筒开始辉光放电并被加热。在圆筒的热辐射作用下，工件被加热到一定高的温度，待工件表面的污物烘烤干净后再将直流电源的负极连接到工件上，工件开始辉光放电加热，当工件被加热至离子化学热处理所需要的温度后，开始进行离子化学热处理。The object of the present invention is achieved in that a steel thin-walled cylinder is placed near the furnace wall in the vacuum chamber of the ion chemical heat treatment furnace, and the upper end of the cylinder is closed. The workpiece to be processed is placed on the workbench in the middle of the cylinder, and the cylinder, workbench, and furnace body of the ion chemical heat treatment furnace are insulated from each other, and the negative pole of the DC power supply of the ion chemical heat treatment equipment itself is connected to the On the cylinder or workbench, the positive pole of the DC power supply is connected to the shell of the furnace body and grounded for protection. In the initial stage of ion chemical heat treatment, the negative pole of the DC power supply is first connected to the cylinder, and the cylinder starts glow discharge and is heated. Under the action of the thermal radiation of the cylinder, the workpiece is heated to a certain high temperature. After the dirt on the surface of the workpiece is baked clean, the negative pole of the DC power supply is connected to the workpiece, and the workpiece starts to be heated by glow discharge. When the workpiece is heated After reaching the temperature required for ion chemical heat treatment, ion chemical heat treatment begins.
为了减少辉光辅助加热圆筒的热损失，可以在炉壁和圆筒之间安装一隔热屏，隔热屏与炉体之间不绝缘，同为辉光放电的阳极。In order to reduce the heat loss of the glow-assisted heating cylinder, a heat shield can be installed between the furnace wall and the cylinder. The heat shield and the furnace body are not insulated, and they are also the anode of the glow discharge.
在离子化学热处理过程中，也可以将圆筒与工作台都与直流电源的负极相接，利用圆筒的辅助加热功能来提高圆筒内的空间温度，改善工件的温度均匀性。这时离子化学热处理炉内测量工件温度的热电偶可以改为测量圆筒内的空间温度，而不必测量带有负高压电的工件温度。In the process of ion chemical heat treatment, the cylinder and the workbench can also be connected to the negative pole of the DC power supply, and the auxiliary heating function of the cylinder can be used to increase the space temperature in the cylinder and improve the temperature uniformity of the workpiece. At this time, the thermocouple measuring the temperature of the workpiece in the ion chemical heat treatment furnace can be changed to measure the space temperature in the cylinder instead of measuring the temperature of the workpiece with negative high voltage.
钢制圆筒也可以用钢板网加工成筒形网状结构，这样可以减少圆筒的表面积，减少圆筒直流辉光放电加热的电流。另外，由于网状圆筒的热容比板状圆筒小，所以网状圆筒的升温速度要比板状圆筒快，辅助加热的效果更好。The steel cylinder can also be processed into a cylindrical mesh structure with steel mesh, which can reduce the surface area of the cylinder and reduce the current heated by the DC glow discharge of the cylinder. In addition, since the heat capacity of the mesh cylinder is smaller than that of the plate cylinder, the heating rate of the mesh cylinder is faster than that of the plate cylinder, and the effect of auxiliary heating is better.
本发明具有如下的优点：①由于圆筒一直都是放置在离子化学热处理炉内，表面始终是“干净”的，所以每次起辉放电都不会发生打弧现象。②由于减少了离子化学热处理初始阶段的弧光放电，缩短生产周期，也避免了直流电源因频繁过流而损坏。③圆筒辉光放电加热电源与工件辉光放电电源为同一套直流电源，只需通过转换开关即可分别实现圆筒加热和工件加热，所以这种辅助加热方式的设备比较简单。④当工件被加热到不会打弧的温度后，将直流电源的负极从圆筒上切换到工件上，工件开始辉光放电加热，这时不带电的圆筒可以与炉内原有的隔热屏一起组成双层隔热屏，进一步提高了工件的温度均匀性和节能的效果。⑤在离子化学热处理过程中，圆筒和工件也可以同时与直流电源的负极相接，这时圆筒可以起到辅助加热的作用，提高了炉内工件的温度均匀性，并解决了离子化学热处理炉内工件温度测量难的问题。The present invention has the following advantages: ① Since the cylinder is always placed in the ion chemical heat treatment furnace, the surface is always "clean", so arcing does not occur every time the glow discharge occurs. ②Because the arc discharge in the initial stage of ion chemical heat treatment is reduced, the production cycle is shortened, and the damage of the DC power supply due to frequent overcurrent is also avoided. ③The cylinder glow discharge heating power supply and the workpiece glow discharge power supply are the same set of DC power supply, and the cylinder heating and workpiece heating can be realized separately only through the switch, so the equipment of this auxiliary heating method is relatively simple. ④When the workpiece is heated to a temperature that will not strike an arc, switch the negative pole of the DC power supply from the cylinder to the workpiece, and the workpiece starts to be heated by glow discharge. At this time, the uncharged cylinder can be insulated from the original heat in the furnace The screen together forms a double-layer heat shield, which further improves the temperature uniformity of the workpiece and the effect of energy saving. ⑤ During the ion chemical heat treatment process, the cylinder and the workpiece can also be connected to the negative pole of the DC power supply at the same time. At this time, the cylinder can play the role of auxiliary heating, which improves the temperature uniformity of the workpiece in the furnace and solves the problem of ion chemistry. It is difficult to measure the temperature of the workpiece in the heat treatment furnace.
附图说明 Description of drawings
图1是本发明结构示意图。Fig. 1 is a schematic diagram of the structure of the present invention.
下面结合附图详细说明依据本发明提出的具体装置细节及工作情况。The specific device details and working conditions proposed according to the present invention will be described in detail below in conjunction with the accompanying drawings.
图1中(2)为离子化学热处理炉的炉体，炉内装有一钢制圆筒(4)，炉体内壁与圆筒之间装有隔热屏(3)，炉体和隔热屏之间不绝缘。欲处理的工件(5)摆放在工作台(6)上，圆筒将其罩在其中。离子化学热处理炉的直流辉光放电电源(1)的负极通过转换开关(8)可以分别与圆筒和工作台相接，直流电源的正极接在炉体上，并接地保护。真空泵(11)将真空室内空气抽出后，离子化学热处理所需的工作气体通过供气系统(7)送入真空室内。真空控制系统(10)可以保证离子化学热处理是在一定的压强范围内进行，工件的温度则是由温度控制系统(9)测量并控制。Among Fig. 1 (2) is the furnace body of the ion chemical heat treatment furnace, a steel cylinder (4) is housed in the furnace, and a heat shield (3) is housed between the inner wall of the furnace and the cylinder, between the furnace body and the heat shield Not insulated. The workpiece (5) to be processed is placed on the workbench (6), and the cylinder covers it therein. The negative pole of the DC glow discharge power supply (1) of the ion chemical heat treatment furnace can be connected to the cylinder and the workbench respectively through the switch (8), and the positive pole of the DC power supply is connected to the furnace body and grounded for protection. After the vacuum pump (11) draws out the air in the vacuum chamber, the working gas required for ion chemical heat treatment is sent into the vacuum chamber through the gas supply system (7). The vacuum control system (10) can ensure that the ion chemical heat treatment is carried out within a certain pressure range, and the temperature of the workpiece is measured and controlled by the temperature control system (9).
具体实施方式 Detailed ways
实施例1：本发明离子化学热处理炉的炉体内径尺寸为φ650×1200毫米，炉内放置一个用1毫米厚钢板卷制的圆筒，尺寸为φ550×900毫米，工作台上摆放200公斤的欲离子渗氮处理的工件，用氨气作为离子渗氮的工作气体。在离子渗氮处理的初始阶段，先将直流电源的负极接在圆筒上，圆筒开始辉光放电加热，此时直流电压为750V，直流电流为20A，炉内气体压强为200Pa。待工件被加热到400℃时，将直流电源的负极切换到工作台上，这时工件开始辉光放电加热，此时工件表面已很少有打弧的现象，可以用较快的升温速度加热工件。Embodiment 1: the inner diameter of the ion chemical heat treatment furnace of the present invention is φ650 × 1200 millimeters, and a cylinder with a thickness of 1 millimeter is placed in the furnace, and the size is φ550 × 900 millimeters, and 200 kilograms are placed on the workbench For workpieces to be treated by ion nitriding, ammonia gas is used as the working gas for ion nitriding. In the initial stage of ion nitriding treatment, the negative electrode of the DC power supply is connected to the cylinder first, and the cylinder starts to be heated by glow discharge. At this time, the DC voltage is 750V, the DC current is 20A, and the gas pressure in the furnace is 200Pa. When the workpiece is heated to 400°C, switch the negative pole of the DC power supply to the workbench, and the workpiece starts to be heated by glow discharge. artifact.
实施例2：在实施例1的基础上，当工件被加热到400℃后，将圆筒和工作台都与直流电源的负极相接，这时圆筒和工件同时产生辉光放电并被加热，待工件被加热到520℃时，开始进入离子渗氮的保温阶段。在此温度下离子渗氮1小时后，圆筒内的空间温度为510℃，接近工件的实际温度，比没有辉光放电辅助加热的空间温度约高100℃。Example 2: On the basis of Example 1, when the workpiece is heated to 400°C, both the cylinder and the workbench are connected to the negative pole of the DC power supply, and the cylinder and the workpiece simultaneously generate glow discharge and are heated , when the workpiece is heated to 520 ° C, it begins to enter the heat preservation stage of ion nitriding. After ion nitriding at this temperature for 1 hour, the space temperature in the cylinder is 510°C, which is close to the actual temperature of the workpiece, and is about 100°C higher than the space temperature without glow discharge auxiliary heating.
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| CN111074222B (en) * | 2019-12-12 | 2022-11-18 | 广东汇成真空科技股份有限公司 | Arc electron source enhanced glow discharge heating process applied to PVD (physical vapor deposition) coating |
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| CN1590578A (en) * | 2004-06-07 | 2005-03-09 | 大连海事大学 | Ion nitriding furnace |
| CN1944688A (en) * | 2006-05-10 | 2007-04-11 | 青岛科技大学 | Heat insulation type multifunction ionic thermal processing device |
| JP2008202105A (en) * | 2007-02-21 | 2008-09-04 | Nippon Coating Center Kk | Method for carbonitriding metallic member |
| CN101591763A (en) * | 2009-04-11 | 2009-12-02 | 青岛科技大学 | Insulating type multifunctional ion chemical heat treatment device |
| CN201809431U (en) * | 2010-10-11 | 2011-04-27 | 青岛科技大学 | Ion chemical heat treatment furnace for glow discharge auxiliary heating |
-
2010
- 2010-10-11 CN CN2010105156959A patent/CN102011087B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1221804A (en) * | 1997-12-29 | 1999-07-07 | 杨贤镛 | Ion chemical heat treatment appts. |
| CN2386048Y (en) * | 1999-08-03 | 2000-07-05 | 北京莫泊特离子金属热处理技术有限公司 | Out-layer auxiliary heat controllable cooling ion bombardment heat treatment furnace |
| CN1590578A (en) * | 2004-06-07 | 2005-03-09 | 大连海事大学 | Ion nitriding furnace |
| CN1944688A (en) * | 2006-05-10 | 2007-04-11 | 青岛科技大学 | Heat insulation type multifunction ionic thermal processing device |
| JP2008202105A (en) * | 2007-02-21 | 2008-09-04 | Nippon Coating Center Kk | Method for carbonitriding metallic member |
| CN101591763A (en) * | 2009-04-11 | 2009-12-02 | 青岛科技大学 | Insulating type multifunctional ion chemical heat treatment device |
| CN201809431U (en) * | 2010-10-11 | 2011-04-27 | 青岛科技大学 | Ion chemical heat treatment furnace for glow discharge auxiliary heating |
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| CN102011087A (en) | 2011-04-13 |
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Application publication date: 20110413 Assignee: Jiangsu Fengdong Thermal Technology Co., Ltd. Assignor: Qingdao University of Science & Technology Contract record no.: 2013320000131 Denomination of invention: Ion chemical heat treating furnace having glow discharge-aided heating function Granted publication date: 20120704 License type: Exclusive License Record date: 20130318 |
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