CN101985752B - 喷蚀装置 - Google Patents
喷蚀装置 Download PDFInfo
- Publication number
- CN101985752B CN101985752B CN2009103048891A CN200910304889A CN101985752B CN 101985752 B CN101985752 B CN 101985752B CN 2009103048891 A CN2009103048891 A CN 2009103048891A CN 200910304889 A CN200910304889 A CN 200910304889A CN 101985752 B CN101985752 B CN 101985752B
- Authority
- CN
- China
- Prior art keywords
- pipeline section
- pipe connecting
- circuit board
- pipe
- shower nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0736—Methods for applying liquids, e.g. spraying
- H05K2203/075—Global treatment of printed circuits by fluid spraying, e.g. cleaning a conductive pattern using nozzles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/08—Treatments involving gases
- H05K2203/082—Suction, e.g. for holding solder balls or components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/15—Position of the PCB during processing
- H05K2203/1509—Horizontally held PCB
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- ing And Chemical Polishing (AREA)
Abstract
Description
Claims (8)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009103048891A CN101985752B (zh) | 2009-07-28 | 2009-07-28 | 喷蚀装置 |
US12/766,903 US8388800B2 (en) | 2009-07-28 | 2010-04-25 | Apparatus for wet processing substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009103048891A CN101985752B (zh) | 2009-07-28 | 2009-07-28 | 喷蚀装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101985752A CN101985752A (zh) | 2011-03-16 |
CN101985752B true CN101985752B (zh) | 2013-01-09 |
Family
ID=43525873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009103048891A Expired - Fee Related CN101985752B (zh) | 2009-07-28 | 2009-07-28 | 喷蚀装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8388800B2 (zh) |
CN (1) | CN101985752B (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101985752B (zh) * | 2009-07-28 | 2013-01-09 | 富葵精密组件(深圳)有限公司 | 喷蚀装置 |
KR101125568B1 (ko) * | 2009-12-14 | 2012-03-22 | 삼성모바일디스플레이주식회사 | 식각 장치 |
CN102453915B (zh) * | 2010-10-27 | 2014-03-12 | 富葵精密组件(深圳)有限公司 | 蚀刻装置及使用该蚀刻装置蚀刻基板的方法 |
KR101386677B1 (ko) * | 2012-10-30 | 2014-04-29 | 삼성전기주식회사 | 미세회로 제조방법 |
CN103849873A (zh) * | 2012-11-30 | 2014-06-11 | 深南电路有限公司 | 去除残铜的方法及装置 |
CN107295752A (zh) * | 2016-04-11 | 2017-10-24 | 嘉联益电子(昆山)有限公司 | 基材蚀刻处理方法 |
CN105979713B (zh) * | 2016-05-05 | 2019-03-29 | 广合科技(广州)有限公司 | 一种pcb线路板预防真空蚀刻线线路狗牙加工方法 |
CN106955861A (zh) * | 2017-04-19 | 2017-07-18 | 东莞宇宙电路板设备有限公司 | 导向性水刀装置 |
CN107333398B (zh) * | 2017-08-30 | 2019-07-30 | 深圳市博敏兴电子有限公司 | 大尺寸线路板蚀刻方法及设备 |
JP7381370B2 (ja) * | 2020-03-05 | 2023-11-15 | キオクシア株式会社 | 半導体製造装置および半導体装置の製造方法 |
CN111465203A (zh) * | 2020-04-22 | 2020-07-28 | 郑振华 | 一种电路板的蚀刻装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101113523A (zh) * | 2006-07-28 | 2008-01-30 | 富葵精密组件(深圳)有限公司 | 蚀刻液喷射装置及蚀刻方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3896827A (en) * | 1973-08-31 | 1975-07-29 | Norman R Robinson | Dish machine monitoring of time, temperature, alkalinity, and pressure parameters |
NL7902218A (nl) * | 1979-03-21 | 1980-09-23 | Gist Brocades Nv | Inrichting voor het behandelen van doppen. |
DE4121032A1 (de) * | 1991-06-26 | 1993-01-07 | Schmid Gmbh & Co Geb | Vorrichtung zum behandeln von plattenfoermigen gegenstaenden, insbesondere leiterplatten |
JP2754300B2 (ja) * | 1991-12-06 | 1998-05-20 | 大和製罐株式会社 | Di缶表面処理方法およびその装置 |
US6142500A (en) * | 1997-07-02 | 2000-11-07 | Sargent; Frank T. | Adjustable, weight distributing trailer hitch apparatus with spring dampening assembly |
DE10039558B4 (de) | 2000-08-12 | 2005-09-08 | Pill E.K. | Vorrichtung zur Sprühbehandlung von Leiterplatten |
DE102005039385A1 (de) * | 2005-08-20 | 2007-02-22 | Premark Feg L.L.C., Wilmington | Transport-Geschirrspülmaschine |
CN101610641B (zh) * | 2008-06-19 | 2011-06-29 | 富葵精密组件(深圳)有限公司 | 湿处理系统及湿处理方法 |
CN101985752B (zh) * | 2009-07-28 | 2013-01-09 | 富葵精密组件(深圳)有限公司 | 喷蚀装置 |
-
2009
- 2009-07-28 CN CN2009103048891A patent/CN101985752B/zh not_active Expired - Fee Related
-
2010
- 2010-04-25 US US12/766,903 patent/US8388800B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101113523A (zh) * | 2006-07-28 | 2008-01-30 | 富葵精密组件(深圳)有限公司 | 蚀刻液喷射装置及蚀刻方法 |
Also Published As
Publication number | Publication date |
---|---|
US20110024042A1 (en) | 2011-02-03 |
US8388800B2 (en) | 2013-03-05 |
CN101985752A (zh) | 2011-03-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C53 | Correction of patent for invention or patent application | ||
CB02 | Change of applicant information |
Address after: 518103 Shenzhen Province, Baoan District Town, Fuyong Tong tail Industrial Zone, factory building, building 5, floor, 1 Applicant after: Fuku Precision Components (Shenzhen) Co., Ltd. Co-applicant after: Zhending Technology Co., Ltd. Address before: 518103 Shenzhen Province, Baoan District Town, Fuyong Tong tail Industrial Zone, factory building, building 5, floor, 1 Applicant before: Fuku Precision Components (Shenzhen) Co., Ltd. Co-applicant before: Honsentech Co., Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130109 Termination date: 20130728 |