CN101887749B - Memory device and method of operating the same - Google Patents
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- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000013500 data storage Methods 0.000 claims abstract description 133
- 238000009826 distribution Methods 0.000 claims description 67
- 238000003860 storage Methods 0.000 claims description 46
- 238000001514 detection method Methods 0.000 claims description 19
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 230000015654 memory Effects 0.000 abstract description 155
- 230000000694 effects Effects 0.000 description 26
- 239000004020 conductor Substances 0.000 description 12
- 230000008859 change Effects 0.000 description 5
- 239000002784 hot electron Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005036 potential barrier Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
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- 239000000463 material Substances 0.000 description 2
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- 230000006399 behavior Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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Abstract
Description
技术领域 technical field
本发明是有关于一种操作存储器的方法与存储器装置,且特别是有关于在存储器装置中减少第二位效应(second bit effect)的方法与存储器装置。The present invention relates to a method of operating a memory and a memory device, and more particularly to a method and a memory device for reducing second bit effects in a memory device.
背景技术 Background technique
存储器是一种用来储存信息或数据的半导体元件。随着计算机微处理器的功能越来越强大,通过软件执行的程序与操作也随之增加。因此,对于具有高储存容量存储器的需求也逐渐增加。Memory is a semiconductor component used to store information or data. As computer microprocessors have become more powerful, the number of programs and operations performed by software has also increased. Therefore, the demand for memories with high storage capacity is gradually increasing.
在各种存储器产品中,非易失性存储器(non-volatile存储器)允许多次的数据编程(programming)、读取(reading)以及擦除(erasing)操作,且甚至在存储器的电源中断之后还能够保存储存于其中的数据。由于这些优点,非易失性存储器已成为个人计算机与电子设备中广泛使用的存储器。Among various memory products, non-volatile memory (non-volatile memory) allows multiple data programming (programming), reading (reading) and erasing (erasing) operations, and even after the power supply of the memory is interrupted Ability to save data stored in it. Due to these advantages, nonvolatile memory has become a widely used memory in personal computers and electronic equipment.
熟知的关于电荷储存结构(charge storage structure)的电子可编程可擦除(electrically programmable and erasable)非易失性存储器技术如电子可擦除可编程只读存储器(electrically erasable programmable read-only存储器,EEPROM)以及闪存(flash存储器)已经使用于各种现代化应用。闪存设计成具有存储单元阵列,其可以独立地编程与读取。一般的闪存存储单元将电荷储存于浮置栅极(floating gate)。另一种闪存使用电荷捕捉结构(charge-trapping structure),如一层非导体氮化硅(SiN)材料,而非用于浮置栅极元件中的导体栅极材料。当电荷捕捉存储单元被编程时,电荷被捕捉且不会移动穿过非导体层。电荷通过电荷捕捉层来保持直到存储单元被擦除,在不持续供应电源时保持数据状态。电荷捕捉存储单元可以被操做成为二端存储单元(two-sided cell)。也就是说,由于电荷不会移动穿过非导体电荷捕捉层,因此电荷可以位于不同的电荷捕捉处。换言之,在使用电荷捕捉结构的闪存元件中,超过一位的信息储存在每一个存储单元中。Well-known electrically programmable and erasable (electrically programmable and erasable) non-volatile memory technologies for charge storage structures such as electrically erasable programmable read-only memory (EEPROM) ) and flash memory (flash memory) have been used in various modern applications. Flash memory is designed with an array of memory cells that can be programmed and read independently. A general flash memory cell stores charge in a floating gate. Another type of flash memory uses a charge-trapping structure, such as a layer of nonconducting silicon nitride (SiN) material, rather than the conductive gate material used in floating gate devices. When a charge trapping memory cell is programmed, charge is trapped and does not move through the nonconductive layer. The charge is held by the charge trapping layer until the memory cell is erased, maintaining the data state when power is not continuously supplied. The charge trapping memory cell can be operated as a two-sided cell. That is, since the charges do not move through the nonconductive charge trapping layer, the charges can be located at different charge traps. In other words, more than one bit of information is stored in each memory cell in a flash memory device using a charge trapping structure.
一个单独的存储单元可以被编程为在电荷捕捉结构中储存二个完全分离的位(以电荷分别集中靠近源极区与漏极区的方式)。存储单元的编程可以通过通道热电子(channel hot electron,CHE)注入来进行,其在通道区产生热电子。一些热电子获得能量而被捕捉在电荷捕捉结构中。通过将施加至源极端与漏极端的偏压(bias)互换,电荷被捕捉至电荷捕捉结构的任一部分(靠近源极区、靠近漏极区或二者)。A single memory cell can be programmed to store two completely separate bits in the charge-trapping structure (in such a way that charges are concentrated near the source and drain regions, respectively). Programming of memory cells can be performed by channel hot electron (CHE) injection, which generates hot electrons in the channel region. Some hot electrons gain energy and are trapped in the charge trapping structure. By reversing the biases applied to the source and drain terminals, charge is trapped to either part of the charge trapping structure (near the source region, near the drain region, or both).
因此,如果没有电荷储存在存储单元中,存储单元的阈值电压(threshold voltage)具有对应位1与1的组合的最小值。如果电荷储存在电荷捕捉结构中靠近源极区但不靠近漏极区,阈值电压具有对应位1与0的组合的不同值。如果电荷储存在靠近漏极区但不靠近源极区,阈值电压具有另一个值。在此状况下,阈值电压对应位0与1的组合。最后,如果电荷储存在靠近源极区与漏极区,阈值电压为最高,且对应位0与0的组合。因此,可以储存四种不同的组合(位00、01、10与11),且每一种组合具有相对应的阈值电压。在读取操作期间,流过存储单元的电流将取决于存储单元的阈值电压而改变。典型地,此电流将具有四个不同值,而每一者对应于不同的阈值电压。因此,通过检测此电流,可以判定储存于存储单元中的字节合。Therefore, if no charge is stored in the memory cell, the threshold voltage of the memory cell has a minimum value corresponding to the combination of
全部有效的电荷范围或阈值电压范围可以归类为存储器操作裕度(memory operation window)。换言之,存储器操作裕度通过编程电平(level)与擦除电平之间的差异来定义。由于存储单元操作需要各种状态之间的良好电平分离(level separation),因此需要大的存储器操作裕度。然而,二位存储单元的效能通常随着所谓的″第二位效应″而降低。在第二位效应之下,在电荷捕捉结构中定域化的(localized)电荷彼此互相影响。举例来说,在反向读取(reverse reading)操作期间,施加读取偏压至漏极端且检测到储存在靠近源极区的电荷(即″第一位″)。然而,之后靠近漏极区的位(即″第二位″)产生读取靠近源极区的第一位的电位势垒(potential barrier)。此势垒可通过施加适当的偏压来克服,使用漏极感应势垒降低(drain-induced barrierlowering,DIBL)效应来抑制靠近漏极区的第二位的效应,且允许检测第一位的储存状态。然而,当靠近漏极区的第二位被编程至高阈值电压状态且靠近源极区的第一位在未编程状态时,第二位实质上提高了势垒。因此,随着关于第二位的阈值电压增加,第一位的读取偏压已不足够克服第二位产生的电位势垒。因此,由于关于第二位的阈值电压增加,关于第一位的阈值电压也提高,因而降低了存储器操作裕度。第二位效应减少了2-bit/cell操作的存储器操作裕度。因此,需要抑制存储器元件中的第二位效应的方法与元件。The entire effective charge range or threshold voltage range can be classified as a memory operation window. In other words, the memory operation margin is defined by the difference between the programming level and the erasing level. Since memory cell operations require good level separation between various states, a large memory operation margin is required. However, the performance of 2-bit memory cells generally degrades with the so-called "second bit effect". Under the second-site effect, the localized charges in the charge-trapping structure influence each other. For example, during a reverse reading operation, a read bias is applied to the drain terminal and the charge stored near the source region (ie, the "first bit") is detected. However, then the bit near the drain region (ie, the "second bit") creates a potential barrier to reading the first bit near the source region. This barrier can be overcome by applying an appropriate bias, using the drain-induced barrier lowering (DIBL) effect to suppress the effect of the second bit close to the drain region and allow detection of the storage of the first bit. state. However, when the second bit near the drain region is programmed to a high threshold voltage state and the first bit near the source region is in an unprogrammed state, the second bit substantially raises the barrier. Thus, as the threshold voltage with respect to the second bit increases, the read bias of the first bit is no longer sufficient to overcome the potential barrier created by the second bit. Therefore, since the threshold voltage with respect to the second bit increases, the threshold voltage with respect to the first bit also increases, thereby reducing the memory operation margin. The second bit effect reduces the memory operation margin for 2-bit/cell operation. Accordingly, there is a need for methods and devices for suppressing second bit effects in memory devices.
发明内容 Contents of the invention
本发明提供一种读取存储单元的方法,其可以减轻第二位效应。The invention provides a method for reading a memory cell, which can alleviate the second bit effect.
本发明另提供一种操作存储单元的方法,其可以缩减操作裕度。The invention also provides a method for operating a storage unit, which can reduce the operating margin.
本发明提出一种操作具有第一数据储存区(data storage)与第二数据储存区的存储单元的方法。此方法包括施加第一位线电压至存储单元来检测存储单元的第一电流。当第一电流大于关于第一位线电压的第一参考电流时,判定第一数据储存区为未编程状态。当第一电流小于第一参考电流时,施加第二位线电压至存储单元来检测存储单元的第二电流。然后,当第一电流与第二电流之间的第一差异大于第一参考电流与第二参考电流之间的第二差异时,判定第一数据储存区为未编程状态。然而,当第一差异小于或等于第二差异时,判定第一数据储存区为编程状态。The present invention proposes a method of operating a storage unit having a first data storage area and a second data storage area. The method includes applying a first bit line voltage to the memory cell to detect a first current of the memory cell. When the first current is greater than the first reference current about the first bit line voltage, it is determined that the first data storage area is in an unprogrammed state. When the first current is less than the first reference current, a second bit line voltage is applied to the memory cell to detect a second current of the memory cell. Then, when the first difference between the first current and the second current is greater than the second difference between the first reference current and the second reference current, it is determined that the first data storage area is in an unprogrammed state. However, when the first difference is less than or equal to the second difference, it is determined that the first data storage region is in a programmed state.
依照本发明的实施例,第二位线电压与第一位线电压不同。According to an embodiment of the present invention, the second bit line voltage is different from the first bit line voltage.
依照本发明的实施例,第二位线电压大于第一位线电压。According to an embodiment of the present invention, the second bit line voltage is greater than the first bit line voltage.
依照本发明的实施例,用于检测第一电流的第一字线电压等于用于检测第二电流的第二字线电压。According to an embodiment of the present invention, the first word line voltage for detecting the first current is equal to the second word line voltage for detecting the second current.
依照本发明的实施例,此方法更包括定义存储单元的编程确认电压(program verify voltage)以及定义存储单元的低阈值电压分布的上限。此外,编程确认电压与低阈值电压分布的上限之间的差异约为600mV。According to an embodiment of the present invention, the method further includes defining a program verify voltage of the memory cell and defining an upper limit of the low threshold voltage distribution of the memory cell. In addition, the difference between the program confirm voltage and the upper limit of the low threshold voltage distribution is about 600mV.
本发明另提出一种存储器装置。此存储器装置包括存储器与控制器。存储器具有多个存储单元。每一个存储单元具有第一数据储存区与第二数据储存区。控制器用于对每一个存储单元进行读取步骤(reading process)。对于每一个存储单元,读取步骤包括施加第一位线电压至存储单元来检测存储单元的第一电流。当第一电流大于关于第一位线电压的第一参考电流时,判定第一数据储存区为未编程状态。当第一电流小于第一参考电流时,施加第二位线电压至存储单元来检测存储单元的第二电流。然后,当第一电流与第二电流之间的第一差异大于第一参考电流与第二参考电流之间的第二差异时,判定第一数据储存区为未编程状态。然而,当第一差异小于或等于第二差异时,判定第一数据储存区为编程状态。The invention further provides a memory device. The memory device includes a memory and a controller. The memory has a plurality of memory cells. Each storage unit has a first data storage area and a second data storage area. The controller is used to perform a reading process on each storage unit. For each memory cell, the step of reading includes applying a first bit line voltage to the memory cell to detect a first current of the memory cell. When the first current is greater than the first reference current about the first bit line voltage, it is determined that the first data storage area is in an unprogrammed state. When the first current is less than the first reference current, a second bit line voltage is applied to the memory cell to detect a second current of the memory cell. Then, when the first difference between the first current and the second current is greater than the second difference between the first reference current and the second reference current, it is determined that the first data storage area is in an unprogrammed state. However, when the first difference is less than or equal to the second difference, it is determined that the first data storage region is in a programmed state.
本发明又提供一种存储器装置。此存储器装置包括存储器、检测电路与控制器。存储器具有多个存储单元。每一个存储单元具有第一数据储存区与第二数据储存区。检测电路用于在读取步骤期间施加第一位线电压至存储单元来检测存储单元的第一电流,其中当第一电流小于关于第一位线电压的第一参考电流时,检测电路施加第二位线电压至存储单元来检测存储单元的第二电流。控制器用于参考编程确认电压而对每一个存储单元进行读取步骤。对于每一个存储单元,读取步骤包括检测第一数据储存区的第一阈值电压,然后当第一阈值电压小于编程确认电压时判定第一数据储存区为未编程状态。The invention also provides a memory device. The memory device includes a memory, a detection circuit and a controller. The memory has a plurality of memory cells. Each storage unit has a first data storage area and a second data storage area. The detection circuit is used to apply a first bit line voltage to the memory cell during the reading step to detect a first current of the memory cell, wherein when the first current is less than a first reference current with respect to the first bit line voltage, the detection circuit applies the first current. The second bit line voltage is applied to the storage unit to detect the second current of the storage unit. The controller is used to read each memory cell with reference to the program verify voltage. For each memory cell, the reading step includes detecting a first threshold voltage of the first data storage area, and then judging that the first data storage area is in an unprogrammed state when the first threshold voltage is lower than the program verification voltage.
在本发明中,当自存储单元中的每一个数据储存区读取数据时,在不同的位线电压下目标数据储存区(target data storage)的阈值电压分布的表现用来判定目标数据储存区的编程状态。因此,即使操作裕度很小,甚至操作裕度不存在(closed),当检测电流小于参考电流时,在第二位效应下的具有位“1”的数据储存区以及具有位“0”的数据储存区可以被正确地区别。因此,当存储单元的尺寸缩小时,操作裕度将不再是阻碍。此外,减轻了对于存储单元操作的第二位效应。另外,由于减轻了第二位效应且具有小的操作裕度,因此增加了编程速度以及减少了编程存储单元的时间。In the present invention, when reading data from each data storage area in the memory cell, the performance of the threshold voltage distribution of the target data storage area (target data storage) under different bit line voltages is used to determine the target data storage area programming status. Therefore, even if the operating margin is small, even if the operating margin is closed, when the detection current is smaller than the reference current, the data storage area with a bit "1" and the data storage area with a bit "0" under the second bit effect Datastores can be correctly distinguished. Therefore, when the size of memory cells shrinks, operating margin will no longer be an obstacle. Additionally, second bit effects on memory cell operations are mitigated. In addition, since the second bit effect is mitigated and has a small operating margin, the programming speed is increased and the time to program memory cells is reduced.
为让本发明的上述特征和优点能更明显易懂,下文特举实施例,并配合所附图式作详细说明如下。In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail together with the accompanying drawings.
附图说明 Description of drawings
图1为依照本发明一实施例所绘示的存储单元的剖面示意图。FIG. 1 is a schematic cross-sectional view of a memory cell according to an embodiment of the invention.
图2为依照本发明一实施例所绘示的存储器装置的功能方块图。FIG. 2 is a functional block diagram of a memory device according to an embodiment of the invention.
图3为图2中的存储器装置的存储器的电路图。FIG. 3 is a circuit diagram of a memory of the memory device in FIG. 2 .
图4A为依照本发明一实施例的当存储器的存储单元被编程而感测到第一电流时存储单元的阈值电压分布图。FIG. 4A is a graph showing threshold voltage distributions of memory cells when a first current is sensed when the memory cells are programmed according to an embodiment of the present invention.
图4B为依照本发明一实施例的当存储器的存储单元被编程而感测到第二电流时存储单元的阈值电压分布图。FIG. 4B is a graph showing threshold voltage distributions of memory cells when a second current is sensed when the memory cells are programmed according to an embodiment of the present invention.
图5为依照本发明一实施例所绘示的存储器的存储单元的读取方法的步骤流程图。FIG. 5 is a flow chart of steps of a method for reading a storage unit of a memory according to an embodiment of the present invention.
图6A为依照本发明一实施例的在具有多种位线电压的未编程状态“11”下存储单元中数据储存区的阈值电压分布图。FIG. 6A is a graph showing threshold voltage distributions of data storage regions in memory cells in an unprogrammed state “11” with various bit line voltages according to an embodiment of the present invention.
图6B为依照本发明一实施例的在具有多种位线电压的编程状态“00”下存储单元中数据储存的阈值电压分布图。FIG. 6B is a graph showing threshold voltage distributions of data storage in memory cells under programming state "00" with various bit line voltages according to an embodiment of the present invention.
图6C为依照本发明一实施例的在具有多种位线电压的编程状态“01”/“10”下存储单元中数据储存区的阈值电压分布图。FIG. 6C is a graph showing threshold voltage distributions of data storage regions in memory cells under programming states “01”/“10” with various bit line voltages according to an embodiment of the present invention.
图7为依照本发明一实施例所绘示的定义工艺裕度的步骤流程图。FIG. 7 is a flow chart illustrating the steps of defining a process margin according to an embodiment of the present invention.
图8为依照本发明一实施例所绘示的存储器的存储单元的读取方法的步骤流程图。FIG. 8 is a flow chart of steps of a method for reading a storage unit of a memory according to an embodiment of the present invention.
【主要元件符号说明】[Description of main component symbols]
100:存储单元100: storage unit
110a:第一数据储存区110a: first data storage area
110b:第二数据储存区110b: Second data storage area
102:衬底102: Substrate
104:源极/漏极区104: source/drain region
108、112:绝缘层108, 112: insulating layer
110:电荷捕捉层110: charge trapping layer
114:导体栅极114: conductor grid
200:存储器装置200: memory device
202:存储器202: memory
204:控制器204: Controller
206:列译码器206: column decoder
208:行译码器208: row decoder
210:检测电路210: detection circuit
212:模拟至数字转换器212: Analog to Digital Converter
402:第一阈值电压分布402: First threshold voltage distribution
404:第二阈值电压分布404: Second Threshold Voltage Distribution
406:第三阈值电压分布406: Third Threshold Voltage Distribution
602、604:阈值电压分布群组602, 604: threshold voltage distribution groups
B0-Bm+1:位线B0-Bm+1: bit line
D1、D2:电压差D1, D2: voltage difference
Dr:参考电压差Dr: Reference voltage difference
S501-S511、S701-S703、S801-S815:步骤S501-S511, S701-S703, S801-S815: steps
W0-Wn:字线W0-Wn: word line
具体实施方式 Detailed ways
图1为依照本发明一实施例所绘示的存储单元的剖面示意图。如图1所示,存储单元100具有衬底102。衬底102中形成有二个源极/漏极区104。存储单元100的底部绝缘层108形成于源极/漏极区104之间的通道上。电荷捕捉层110位于绝缘层108的顶部上,其通过绝缘层108而与衬底102电性隔离。当热电子被注入电荷捕捉层110中时,热电子被捕捉,使得存储单元100的阈值电压将在控制下被调整。顶部绝缘层112形成于电荷捕捉层110上,以将导体栅极114与电荷捕捉层110电性隔离。存储单元100具有靠近源极/漏极区104其中之一的第一数据储存区110a与靠近源极/漏极区104其中另一的第二数据储存区110b。第一数据储存区110a与第二数据储存区110b为可编程,以储存一位的数据。因此,二位的数据将被储存在存储单元100中。FIG. 1 is a schematic cross-sectional view of a memory cell according to an embodiment of the invention. As shown in FIG. 1 ,
当编程第一数据储存区110a时,施加电压至导体栅极114以及靠近第一数据储存区110a的源极/漏极区104,因而产生垂直与横向的电场,以使电子由另一个源极/漏极区104沿存储单元100的通道而加速远离第一数据储存区110a。当电子沿通道移动,一些电子得到足够的能量而跃过底部绝缘层108的电位势垒,并被捕捉在第一数据储存区110a周围的电荷捕捉层110中。因此,当未编程状态的位被定义为逻辑“1”时,第一数据储存区110a的阈值电压增加,且第一数据储存区110a的位由“1”转变为“0”,亦即由第一逻辑状态转变为第二逻辑状态。同样地,当编程第二数据储存区110b时,施加电压至导体栅极114以及靠近第二数据储存区110b的源极/漏极区104,以使电子被捕捉在第二数据储存区110b周围的电荷捕捉层110中。因此,第二数据储存区110b的阈值电压将增加,且第二数据储存区110b的位由“1”转变为“0”。When programming the first
图2为依照本发明一实施例所绘示的存储器装置的功能方块图。图3为图2中的存储器装置的存储器的电路图。如图2与图3所示,存储器装置200具有存储器202、控制器204、列译码器(row decoder)206、行译码器(column decoder)208、检测电路210以及模拟至数字转换器(analog-to-digital converter)212。存储器202具有多个存储单元100(如图1所示)。存储器202的存储单元100以n列m行的方式配置成阵列,其中n与m为大于1的整数。控制器204耦接至列译码器206与行译码器208,以控制存储器202的存储单元100的操作。模拟至数字转换器212耦接至控制器204,以将所检测的电流与参考电流分别转换为数字值的形式。列译码器206经由存储器装置200的多个字线W0-Wn而施加字线电压至存储单元100的导体栅极114。行译码器208经由存储器装置200的多个位线B0-Bm+1而施加位线电压至存储单元100。如图1与图3所示,每一个存储单元100的导体栅极114耦接至字线W0-Wn中一条对应的字线。每一个存储单元100的源极/漏极区104耦接至位线B0-Bm+1中二条相邻的位线。举例来说,最左上方的存储单元100的导体栅极耦接至字线W0,且左上方的存储单元100的源极/漏极区分别耦接至位线B0与B1。FIG. 2 is a functional block diagram of a memory device according to an embodiment of the invention. FIG. 3 is a circuit diagram of a memory of the memory device in FIG. 2 . As shown in FIG. 2 and FIG. 3 , the
当从存储单元100的一个数据储存区读取数据信息时,经由字线W0-Wn中一条对应的字线对存储单元100的导体栅极114施加字线电压(例如5V),在读取操作下将靠近数据储存区的源极/漏极区接地(grounded),以及经由位线B0-Bm+1中一条对应的位线对靠近另一个数据储存区的另一个源极/漏极区施加位线电压(例如1.6V)。如图1所示,当读取存储单元100的第一数据储存区110a的位时,对导体栅极114施加字线电压,将靠近第一数据储存区110a的源极/漏极区104接地,以及对另一个源极/漏极区104施加第二位线电压。如果字线电压高于第一数据储存区110a的阈值电压,则源极/漏极区104之间的通道被开启(turned on),且电流从源极/漏极区104(远离第一数据储存区110a)经过源极/漏极区104(靠近第一数据储存区110a)与位线B0-Bm+1中一条对应的位线而流到检测电路210。然而,如果字线电压低于第一数据储存区110a的阈值电压,则源极/漏极区104之间的通道被关闭(turned off),且检测电路210将不会检测到来自存储单元100的电流。因此,检测电路210将通过检测来自存储单元100的电流来判定第一数据储存区110a的位的逻辑状态。同样地,当读取存储单元100的第二数据储存区110b的位时,对导体栅极114施加字线电压,对源极/漏极区104(远离第二数据储存区110b)施加位线电压,以及将源极/漏极区104(靠近第二数据储存区110b)接地。如果字线电压高于第二数据储存区110b的阈值电压,则源极/漏极区104之间的通道被开启,且电流从源极/漏极区104(远离第二数据储存区110b)经过源极/漏极区104(靠近第二数据储存区110b)与位线B0-Bm+1中一条对应的位线而流到检测电路210。然而,如果字线电压低于第二数据储存区110b的阈值电压,则源极/漏极区104之间的通道被关闭,且检测电路210将不会检测到来自存储单元100的电流。When reading data information from a data storage area of the
对于二位储存的存储单元(如存储单元100),至少具有四种编程状态(包括11、01、10与00)。在此实施例中,存储单元的未编程状态定义为逻辑“11”。因此,当第一数据储存区与第二数据储存区皆被编程时,存储单元的编程状态定义为逻辑“00”。此外,每一个存储单元的编程状态可以由对应的阈值电压分布来表示。图4A为依照本发明一实施例的当存储器的存储单元被编程而感测到第一电流时存储单元的阈值电压分布图。图4B为依照本发明一实施例的当存储器的存储单元被编程而感测到第二电流时存储单元的阈值电压分布图。如图4A所示,图4A中的水平轴表示存储单元100的第一数据储存区110a与第二数据储存区110b的字线电压,而垂直轴表示由存储单元100的第一数据储存区110a与第二数据储存区110b所储存的位的数量。如图4A所示,第一阈值电压分布402表示具有“11”编程状态的存储单元100的位“1”的阈值电压的分布。换言之,当存储单元的第一数据储存区与第二数据储存区皆为未编程状态时,第一阈值电压分布402为存储单元的未编程的位的低阈值电压分布。For a memory cell with 2-bit storage (such as the memory cell 100), there are at least four programming states (including 11, 01, 10 and 00). In this embodiment, the unprogrammed state of the memory cell is defined as logic "11". Therefore, when both the first data storage area and the second data storage area are programmed, the programming state of the memory cell is defined as logic "00". In addition, the programmed state of each memory cell can be represented by a corresponding threshold voltage distribution. FIG. 4A is a graph showing threshold voltage distributions of memory cells when a first current is sensed when the memory cells are programmed according to an embodiment of the present invention. FIG. 4B is a graph showing threshold voltage distributions of memory cells when a second current is sensed when the memory cells are programmed according to an embodiment of the present invention. As shown in FIG. 4A, the horizontal axis in FIG. 4A represents the word line voltages of the first
此外,第二阈值电压分布404表示具有“01”与“10”编程状态的存储单元100的位“1”的阈值电压的分布。也就是说,第二阈值电压分布404表示当第一数据储存区或第二数据储存区被编程时存储单元的未编程元的阈值电压分布。换言之,第二阈值电压分布404为在第二位效应下存储单元的未编程元的阈值电压分布。第三阈值电压分布406表示存储单元100的位“0”的阈值电压的分布。换言之,第三阈值电压分布406表示存储单元的已编程位的阈值电压分布。In addition, the second
如图4A所示,第二阈值电压分布404除了与第一阈值电压分布402部分重叠之外,还与第三阈值电压分布406部分重叠。明显可知,读取存储单元的数据信息的操作裕度非常小,甚至不存在。本发明提供了读取储存在第一数据储存区110a与第二数据储存区110b其中之一中的数据信息的操作方法。通过应用本发明的操作方法,在第二位效应下可以轻易地与数据储存区的编程状态做区别,即使第二阈值电压分布404与第三阈值电压分布重叠且读取操作的操作裕度不存在。图5为依照本发明一实施例所绘示的存储器的存储单元的读取方法的步骤流程图。当读取存储单元100中第一数据储存区110a的数据信息时,控制器204通过经由字线W0-Wn施加字线电压至存储单元100的导体栅极114以及在存储单元100的源极/漏极区104之间施加偏压来进行读取步骤。也就是说,通过将第一位线电压施加至源极/漏极区104(远离第一数据储存区110a)以及将靠近第一数据储存区110b的源极/漏极区104接地来完成施加在源极/漏极区104之间的偏压。如图5所示,在源极/漏极区104检测到由第一位线电压所引发的第一电流(步骤S501)。As shown in FIG. 4A , the second
在步骤S503中,将第一电流与关于第一位线电压的第一参考电流做比较,且将字线电压施加至存储单元100。典型地,对于读取存储单元中的数据信息,施加预定且固定的字线电压至导体栅极114,且施加预定且固定的位线电压至远离待读取的数据储存区的源极/漏极区104。通过比较所产生的电流与关于字线电压的参考电流以及施加位线电压至存储单元来将所产生的电流转换(mapped)为编程状态。如果读取的电流高于参考电流,将存储单元被判定为一种逻辑状态(即未编程状态)。换言之,如果电流低于参考电流,则将存储单元判定为另一种逻辑状态(即编程状态)。In step S503 , the first current is compared with a first reference current related to the first bit line voltage, and the word line voltage is applied to the
因此,在步骤S505中,当第一电流大于关于第一位线电压的第一参考电流时,判定第一数据储存区为未编程状态。就第一数据储存区110a的阈值电压而言,电流越高,则阈值电压越低。因此,当第一电流大于关于第一位线电压的第一参考电流时,第一数据储存区110a的阈值电压小于关于参考电流的参考电压。如图4A所示,关于参考电流的参考电压高于第一阈值电压分布402的上限与部分第二阈值电压分布404,使得具有小于参考电压的阈值电压的全部位可以被正确地区分为逻辑“1”,且没有逻辑“0”的位被错误地判定为逻辑“1”。因此,当检测高于参考电流的第一电流而从存储单元100的第一数据储存区110a读取数据信息时,第一数据储存区110a中的数据信息被判定为逻辑“1”,且第一数据储存区110a被判定为未编程状态。Therefore, in step S505, when the first current is greater than the first reference current with respect to the first bit line voltage, it is determined that the first data storage region is in an unprogrammed state. Regarding the threshold voltage of the first
此外,由于第二位效应增加了从目标数据储存区(邻近另一个编程状态的数据储存区)读取数据信息的势垒,因此当所检测的电流小于参考电流时,不容易通过简单地将所检测的电流转换(mapping)为编程状态来判定存储单元中目标数据储存区的数据信息。就阈值电压而言,电流越小,则阈值电压越高。如图4A所示,对于从目标数据储存区读取数据信息,当所检测的电流小于参考电流时,目标数据储存区的阈值电压高于关于参考电流的参考电压。然而,如图4A所示,除了位“0”的数据储存区具有高于参考电压的阈值电压之外,在第二位效应下位“1”的数据储存区也具有高于参考电压的阈值电压。因此,当阈值电压高于参考电压时,在第二位效应下或目标数据储存区中位仅为逻辑“0”的编程状态,通过简单地参考所检测的目标数据储存区的电流并不容易判定目标数据储存区中的位是否为存储单元的逻辑“1”。In addition, since the second bit effect increases the potential barrier for reading data information from the target data storage area (adjacent to the data storage area of another programmed state), it is not easy to simply convert the selected current when the detected current is smaller than the reference current. The detected current is mapped to the programming state to determine the data information of the target data storage area in the memory cell. In terms of threshold voltage, the smaller the current, the higher the threshold voltage. As shown in FIG. 4A , for reading data information from the target data storage area, when the detected current is lower than the reference current, the threshold voltage of the target data storage area is higher than the reference voltage with respect to the reference current. However, as shown in FIG. 4A, in addition to the data storage area of bit "0" having a threshold voltage higher than the reference voltage, the data storage area of bit "1" also has a threshold voltage higher than the reference voltage under the second bit effect. . Therefore, when the threshold voltage is higher than the reference voltage, under the second bit effect or the programmed state where the bit in the target data storage area is only logic "0", it is not easy to simply refer to the detected current of the target data storage area. Determine whether the bit in the target data storage area is a logic "1" of the storage unit.
图6A为依照本发明一实施例的在具有多种位线电压的未编程状态“11”下存储单元中数据储存区的阈值电压分布图。图6B为依照本发明一实施例的在具有多种位线电压的编程状态“00”下存储单元中数据储存的阈值电压分布图。值得注意的是,图6A、图6B与图6C中的位线电压变化可以通过透过外部电源装置探测(probing)位线的不同电压来表现。如图6A所示,不论位线电压如何由1V改变为1.6V与2.3V,“11”编程状态的存储单元100的位“1”的阈值电压分布的图案几乎都相同。此外,在排除由于电流随不同的位线电压变化而产生的电压偏离系数(voltage deviationfactor)之后,关于不同位线电压的阈值电压分布不会彼此偏移开。同样地,如图6B所示,明显可知,“00”编程状态的存储单元100的位“0”的阈值电压分布的图案几乎都相同。此外,在排除电压偏离系数之后,阈值电压分布不会彼此偏移开。值得注意的是,“00”编程状态的存储单元100的位“0”的阈值电压分布与“11”编程状态的存储单元100的位“1”的阈值电压分布不会被施加不同位线电压而影响。FIG. 6A is a graph showing threshold voltage distributions of data storage regions in memory cells in an unprogrammed state “11” with various bit line voltages according to an embodiment of the present invention. FIG. 6B is a graph showing threshold voltage distributions of data storage in memory cells under programming state "00" with various bit line voltages according to an embodiment of the present invention. It should be noted that the voltage variation of the bit line in FIG. 6A , FIG. 6B and FIG. 6C can be represented by probing different voltages of the bit line through an external power supply device. As shown in FIG. 6A , no matter how the bit line voltage is changed from 1V to 1.6V and 2.3V, the threshold voltage distribution pattern of the bit “1” of the
图6C为依照本发明一实施例的在具有多种位线电压的编程状态“01”/“10”下存储单元中数据储存区的阈值电压分布图。如图6C所示,阈值电压分布群组602表示当位线电压由1V改变为1.6V、2.3V与3V时“10”或“01”编程状态的存储单元100的位“0”的阈值电压分布。此外,阈值电压分布群组604表示当位线电压由1V改变为1.6V、2.3V与3V时“01”或“10”编程状态的存储单元100的位“1”的阈值电压分布。如图6C所示,明显可知,在“10”或“01”编程状态的存储单元100的位“0”的阈值电压分布群组602中,阈值电压分布的图案几乎相同。此外,在排除电压偏离系数之后,阈值电压分布不会彼此偏移开。FIG. 6C is a graph showing threshold voltage distributions of data storage regions in memory cells under programming states “01”/“10” with various bit line voltages according to an embodiment of the present invention. As shown in FIG. 6C, the threshold voltage distribution group 602 represents the threshold voltage of the bit "0" of the
然而,如阈值电压分布群组604所示,“10”或“01”编程状态的存储单元100的位“1”的阈值电压分布的图案稍微地扭曲。最重要的是,在排除电压偏离系数之后,随着位线电压由1V改变为1.6V、2.3V与3V,阈值电压分布朝较低的阈值电压偏移。显然地,如图6A、图6B与图6C所示,仅在第二位效应下的具有位“1”的数据储存区被位线电压的改变强烈地影响。也就是说,仅在第二位效应下的位“1”阈值电压分布将明显地偏移。因此,当阈值电压大于参考电压时(所检测的电流小于参考电流),数据储存区的数据信息可以通过进一步施加不同的位线电压来检测存储单元的电流的变化而准确地判定。However, as shown by threshold voltage distribution group 604, the pattern of threshold voltage distributions for bit "1" of
特别是,如图4B所示,当大于第一位线电压的第二位线电压施加至源极/漏极区104(远离待读取的数据储存区)且字线电压保持相同时,检测到第二电流。如果待读取的数据储存区为编程状态,在不同的位线电压下的所检测的电流的变化小于或等于电压偏离系数(通过因施加不同的位线电压而产生的参考电流变化表示)。也就是说,如图4A与图4B所示,就阈值电压而言,对照图4A中的阈值电压分布406,在图4B中的编程状态下数据储存区的阈值电压分布406’向右偏移电压差D1(小于或等于参考电压差Dr,其关于当施加不同位线电压时的参考电流变化)。In particular, as shown in FIG. 4B, when a second bit line voltage greater than the first bit line voltage is applied to the source/drain region 104 (away from the data storage area to be read) and the word line voltage remains the same, the detection to the second current. If the data storage area to be read is in the programmed state, the change of the detected current under different bit line voltages is less than or equal to the voltage deviation coefficient (represented by the change of the reference current due to the application of different bit line voltages). That is to say, as shown in FIG. 4A and FIG. 4B, in terms of threshold voltage, compared with the
如果待读取的数据储存区为具有第二位效应的未编程状态,在不同的位线电压下所检测的电流的变化大于因施加不同的位线电压而产生的电压偏离系数。换言之,如图4A与图4B所示,就阈值电压而言,对照图4A中的阈值电压分布404,在图4B中具有第二位效应的未编程状态的数据储存区的阈值电压分布404’向右偏移电压差D2(大于参考电压差Dr,其关于当施加不同位线电压时的参考电流变化)。If the data storage area to be read is in the unprogrammed state with the second bit effect, the detected current variation under different bit line voltages is larger than the voltage deviation coefficient caused by applying different bit line voltages. In other words, as shown in FIG. 4A and FIG. 4B , in terms of threshold voltages, compared to the
因此,如图5所示,当第一电流小于参考电流时,施加第二位线电压(不同于第一位线电压)至源极/漏极区104(远离第一数据储存区110a),且字线电压保持相同,以检测第二电流(步骤S507)。值得注意的是,第二位线电压大于第一位线电压。然后,在步骤S509中,将第二电流与第一电流之间的差异与因施加至存储单元100的不同位线电压而产生的参考电流变化做比较。也就是说,通过排除因施加不同的位线电压而产生的电压偏离系数,在施加不同的位线电压之后阈值电压分布的真实表现可以被检测。因此,当第二电流与第一电流之间的差异小于或等于关于第一位线电压的第一参考电流与关于第二位线电压的第二参考电流之间的差异时,第一数据储存区的阈值电压分布不受所施加的不同位线电压影响。因此,第一数据储存区110a的数据信息被判定为逻辑“0”,且第一数据储存区110a被判定为编程状态(步骤S511)。Therefore, as shown in FIG. 5, when the first current is smaller than the reference current, a second bit line voltage (different from the first bit line voltage) is applied to the source/drain region 104 (away from the first
另一方面,当第二电流与第一电流之间的差异大于关于第一位线电压的第一参考电流与关于第二位线电压的第二参考电流之间的差异时,第一数据储存区的阈值电压分布会被所施加的不同位线电压严重影响。因此,第一数据储存区110a的数据信息被判定为具有第二位效应的逻辑“1”,且第一数据储存区110a被判定为未编程状态(步骤S505)。On the other hand, when the difference between the second current and the first current is greater than the difference between the first reference current with respect to the first bit line voltage and the second reference current with respect to the second bit line voltage, the first data storage The threshold voltage distribution of a region can be heavily influenced by different applied bit line voltages. Therefore, the data information of the first
图7为依照本发明一实施例所绘示的定义工艺裕度的步骤流程图。如图7所示,在第一数据储存区110a或第二数据储存区110b被读取或编程之前,本发明更包括定义存储单元的低阈值电压分布的上限的步骤(步骤S701)以及定义存储单元的编程确认电压的步骤(步骤S703)。明显地,编程确认电压与存储单元的低阈值电压分布的上限之间的差异可以小如600mV。此外,步骤S701与步骤S703进行顺序并不能改变。FIG. 7 is a flow chart illustrating the steps of defining a process margin according to an embodiment of the present invention. As shown in FIG. 7, before the first
图8为依照本发明一实施例所绘示的存储器的存储单元的读取方法的步骤流程图。在本发明的另一实施例中,如图8所示,检测由施加至源极/漏极区104(远离待读取的数据储存区)的第一位线电压所引起的第一电流(步骤S801)。然后,在步骤S803中,将第一电流与关于第一位线电压与施加至存储单元100的字线电压的第一参考电流分别模拟至数字转换为第一电流数字值与第一参考数字值,以进行纪录。在步骤S805中,将第一电流数字值第一参考数字值进行比较,以判定待读取的数据储存区的编程状态。当第一电流数字值大于第一参考数字值时,待读取的数据储存区被判定为未编程状态(步骤S807)。另一方面,当第一电流数字值小于第一参考数字值时,数据储存区无法被确实地判定是否为编程状态或具有第二位效应的未编程状态。FIG. 8 is a flow chart of steps of a method for reading a storage unit of a memory according to an embodiment of the present invention. In another embodiment of the present invention, as shown in FIG. 8 , the first current ( Step S801). Then, in step S803, the first current and the first reference current about the first bit line voltage and the word line voltage applied to the
此外,如图8所示,在步骤S809中,当第一电流数位值小于第一参考数位值时,施加第二位线电压(不同于第一位线电压)至源极/漏极区104(远离待读取的数据储存区),且字线电压保持相同,以检测第二电流。然后,在步骤S811中,将第二电流与关于第二位线电压与施加至存储单元100的字线电压的第二参考电流分别模拟至数字转换为第二电流数字值与第二参考数字值,以进行记录。此外,在步骤S813中,判定待读取的数据储存区的编程状态。也就是说,将第二电流数字值与第一电流数字值之间的差异以及施加至存储单元100的不同位线电压所产生的参考数字值变化做比较。如果第二电流数字值与第一电流数字值之间的差异小于或等于第一参考数字值与第二参考数字值之间的差异,则判定待读取的数据储存区为编程状态(步骤S815)。如果第二电流数字值与第一电流数字值之间的差异大于第一参考数字值与第二参考数字值之间的差异,则判定待读取的数据储存区为具有第二位效应的未编程状态(步骤S807)。In addition, as shown in FIG. 8, in step S809, when the first current digital value is smaller than the first reference digital value, a second bit line voltage (different from the first bit line voltage) is applied to the source/drain region 104 (away from the data storage area to be read), and the word line voltage remains the same to detect the second current. Then, in step S811, analog-to-digital conversion of the second current and the second reference current about the second bit line voltage and the word line voltage applied to the
在本发明中,当从存储单元的每一个数据储存区读取数据时,将在不同位线电压下目标数据储存区的阈值电压分布的表现用来判定目标数据储存区的编程状态。因此,即使操作裕度很小或甚至不存在,当检测电流小于参考电流时,在第二位效应下的具有位“1”的数据储存区以及具有位“0”的数据储存区可以被正确地区分。因此,对于缩小存储单元的尺寸来说,操作裕度将不再是阻碍。此外,对于存储单元操作的第二位效应也被减轻。另外,由于减轻了第二位效应且操作裕度很小,因此增加了编程速度,以及缩短了编程存储单元的时间。In the present invention, when data is read from each data storage area of the memory cell, the performance of the threshold voltage distribution of the target data storage area under different bit line voltages is used to determine the programming state of the target data storage area. Therefore, even if the operating margin is small or even non-existent, when the detection current is smaller than the reference current, the data storage area with the bit "1" and the data storage area with the bit "0" under the second bit effect can be corrected. District distinction. Therefore, operating margin will no longer be an obstacle to shrinking the size of memory cells. In addition, second bit effects on memory cell operations are also mitigated. In addition, since the second bit effect is reduced and the operation margin is small, the programming speed is increased, and the time for programming memory cells is shortened.
虽然本发明已以实施例揭露如上,然其并非用以限定本发明,任何所属技术领域中具有通常知识者,在不脱离本发明的精神和范围内,当可作些许的更动与润饰,故本发明保护范围当视权利要求所界定的范围为准。Although the present invention has been disclosed as above with the embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be determined by the scope defined in the claims.
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