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CN101738275B - Three-dimensional flexible touch sensor and decoupling method thereof - Google Patents

Three-dimensional flexible touch sensor and decoupling method thereof Download PDF

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CN101738275B
CN101738275B CN2008102341467A CN200810234146A CN101738275B CN 101738275 B CN101738275 B CN 101738275B CN 2008102341467 A CN2008102341467 A CN 2008102341467A CN 200810234146 A CN200810234146 A CN 200810234146A CN 101738275 B CN101738275 B CN 101738275B
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徐菲
黄英
丁俊香
宋全军
王以俊
孙玉苹
郝传光
葛运建
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Hefei Institutes of Physical Science of CAS
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Abstract

本发明公开了一种三维柔性触觉传感器及其解耦方法。传感器包括层面间平行的三层绝缘导线,导线中的第二层导线(3)和第三层导线(5)分别与第一层导线(1)垂直和平行排列,每层导线上分别等间距电连接多只相应层的电极,且每只第一层电极(2)的投影均位于四只第二层电极(4)构成的方形的中心,并同时位于四只第三层电极(6)构成的方形的中心,上述各层导线和电极间置有导电橡胶(7);方法为由行列扫描获得第一层各行与第二层各列以及第一层各行与第三层各行间的电阻值变化来得到受力点的位置,以及垂直于第一层导线(1)层的力Fz的大小、平行于和垂直于第一层导线(1)轴向的力Fx和Fy的大小。它可广泛地用于检测三维力的大小。

Figure 200810234146

The invention discloses a three-dimensional flexible touch sensor and a decoupling method thereof. The sensor includes three layers of insulated wires parallel to each other, the second layer of wires (3) and the third layer of wires (5) are arranged vertically and parallel to the first layer of wires (1) respectively, and the distances between each layer of wires are equal Electrically connect multiple electrodes of the corresponding layer, and the projection of each first-layer electrode (2) is located in the center of the square formed by four second-layer electrodes (4), and at the same time located in the four third-layer electrodes (6) In the center of the square formed, conductive rubber (7) is placed between the above-mentioned layers of wires and electrodes; the method is to obtain the resistance between each row of the first layer and each column of the second layer and each row of the first layer and each row of the third layer by row and column scanning. The value changes to obtain the position of the stress point, and the magnitude of the force Fz perpendicular to the first layer of wire (1) layer, and the magnitude of the forces Fx and Fy parallel to and perpendicular to the axial direction of the first layer of wire (1). It can be widely used to detect the size of three-dimensional force.

Figure 200810234146

Description

三维柔性触觉传感器及其解耦方法Three-dimensional flexible tactile sensor and its decoupling method

技术领域technical field

本发明涉及一种触觉传感器及解耦方法,尤其是一种三维柔性触觉传感器及其解耦方法。The invention relates to a tactile sensor and a decoupling method, in particular to a three-dimensional flexible tactile sensor and a decoupling method thereof.

背景技术Background technique

触觉传感器对机器人特别是服务机器人和仿生机器人的研发和应用是非常重要的,它可使机器人既能敏感准确地感知外部环境,又能灵活自如地运动,实现与人安全自然的接触交互。不仅如此,触觉传感器在体育训练、康复医疗等很多方面都具有广泛的应用。为此,人们为了获得性能优异的触觉传感器,做出了不懈的努力,如在1987年4月14日公开的日本发明专利申请公开说明书JP 62080528A中披露的一种“基于压敏导电橡胶的分布型触觉传感器”。它意欲提供一种能够测量连续力的触觉传感器。该传感器的结构为两片材料相同的有机薄膜上分别按相同的排列方式粘贴有等间距设置的多只电极,两片有机薄膜间置有导电橡胶,上下两层有机薄膜上的多只电极分别与导电橡胶的上下表面接触,且上下表面的多只电极均两两垂直正对,其中,上表面的电极通过上层导线连接后按行排列,下表面的电极通过下层导线连接后按列排列,即上下层面的导线是垂直正交的。当传感器表面受到压力时,上下正对着的两个电极间的导电橡胶的阻值会发生相应的变化,通过行列扫描的方式可得到各个受力点的受力信息。但是,这种触觉传感器存在着不足之处,首先,只能测得垂直于传感器表面的力的大小,也即仅能测量单维力,而不能同时检测出三维力的信息,制约了其的应用范围;其次,结构松散,制作工艺要求高,难以工业化生产。Tactile sensors are very important to the development and application of robots, especially service robots and bionic robots. It enables robots to sense the external environment sensitively and accurately, and move flexibly and freely to achieve safe and natural contact and interaction with humans. Not only that, tactile sensors have a wide range of applications in many aspects such as sports training and rehabilitation medicine. For this reason, people have made unremitting efforts in order to obtain a tactile sensor with excellent performance, such as a "distribution based on pressure-sensitive conductive rubber" disclosed in the Japanese invention patent application publication specification JP 62080528A published on April 14, 1987. type tactile sensor". It is intended to provide a tactile sensor capable of measuring continuous force. The structure of the sensor is that two organic films of the same material are pasted with multiple electrodes at equal intervals in the same arrangement, and conductive rubber is placed between the two organic films, and the multiple electrodes on the upper and lower organic films are respectively It is in contact with the upper and lower surfaces of the conductive rubber, and the multiple electrodes on the upper and lower surfaces are vertically facing each other. Among them, the electrodes on the upper surface are arranged in rows after being connected by upper-layer wires, and the electrodes on the lower surface are arranged in columns after being connected by lower-layer wires. That is, the wires on the upper and lower layers are perpendicular to each other. When the surface of the sensor is under pressure, the resistance value of the conductive rubber between the two facing electrodes will change accordingly, and the force information of each force point can be obtained by row and column scanning. However, this kind of tactile sensor has shortcomings. First, it can only measure the magnitude of the force perpendicular to the surface of the sensor, that is, it can only measure the single-dimensional force, but cannot detect the information of the three-dimensional force at the same time, which limits its application. The scope of application; secondly, the structure is loose, the manufacturing process is high, and it is difficult to industrialize production.

发明内容Contents of the invention

本发明要解决的技术问题为克服现有技术中的不足之处,提供一种能同时检测出三维力的大小,且结构紧凑,使用方便的三维柔性触觉传感器。The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art, and provide a three-dimensional flexible tactile sensor that can simultaneously detect the magnitude of three-dimensional force, and has a compact structure and is easy to use.

本发明要解决的另一个技术问题为提供一种三维柔性触觉传感器的解耦方法。Another technical problem to be solved by the present invention is to provide a decoupling method for a three-dimensional flexible tactile sensor.

为解决本发明的技术问题,所采用的技术方案为:三维柔性触觉传感器包括层面间相互平行的等间距设置的第一层导线和第二层导线,以及第一层导线和第二层导线上分别等间距电连接的多只第一层电极和第二层电极,所述第一层导线与第二层导线垂直排列,所述第一层导线、第二层导线、第一层电极和第二层电极间置有导电橡胶,特别是:In order to solve the technical problem of the present invention, the technical solution adopted is: the three-dimensional flexible tactile sensor includes a first layer of wires and a second layer of wires arranged parallel to each other at equal intervals between the layers, and the first layer of wires and the second layer of wires A plurality of first-layer electrodes and second-layer electrodes electrically connected at equal intervals, the first-layer wires and the second-layer wires are vertically arranged, the first-layer wires, the second-layer wires, the first-layer electrodes and the second-layer wires Conductive rubber is placed between the electrodes on the second layer, especially:

所述第二层导线之下置有等间距设置的第三层导线,所述第三层导线的层面与第二层导线的层面平行,且与所述第一层导线平行排列,其上等间距电连接多只第三层电极,所述第三层导线、第三层电极与所述第二层导线、第二层电极间置有导电橡胶;A third layer of wires arranged at equal intervals is placed under the second layer of wires, the layer of the third layer of wires is parallel to the layer of the second layer of wires, and is arranged in parallel with the first layer of wires, and the upper layer is equal to A plurality of third-layer electrodes are electrically connected at intervals, and conductive rubber is interposed between the third-layer wires and third-layer electrodes and the second-layer wires and second-layer electrodes;

所述每只第一层电极的投影均位于所述四只第二层电极构成的方形的中心,且同时位于所述四只第三层电极构成的方形的中心;The projection of each first-layer electrode is located in the center of the square formed by the four second-layer electrodes, and is also located in the center of the square formed by the four third-layer electrodes;

所述第一层导线、第二层导线和第三层导线均为其外表面裹覆有绝缘层的绝缘导线。The first layer of wires, the second layer of wires and the third layer of wires are all insulated wires whose outer surface is covered with an insulating layer.

作为三维柔性触觉传感器的进一步改进,所述的第一层电极相互间的间距与第一层导线相互间的间距相同;所述的第二层电极相互间的间距与第二层导线相互间的间距相同;所述的第三层电极相互间的间距与第三层导线相互间的间距相同;所述的第二层导线和第三层导线间的层间间距与第一层导线和第二层导线间的层间间距相同。As a further improvement of the three-dimensional flexible tactile sensor, the distance between the first-layer electrodes is the same as the distance between the first-layer wires; the distance between the second-layer electrodes is the same as the distance between the second-layer wires. The spacing is the same; the spacing between the third layer electrodes is the same as the spacing between the third layer wiring; the interlayer spacing between the second layer wiring and the third layer wiring is the same as the first layer wiring and the second layer spacing. The layer-to-layer spacing is the same between layer wires.

为解决本发明的另一个技术问题,所采用的另一个技术方案为:三维柔性触觉传感器的解耦方法包括自导线上采集信号和结合导电橡胶的状态方程Fi=f(△i)得到力Fi的大小,公式中的函数f由导电橡胶的性质决定,△i为i方向上的位移,i为x或y或z,特别是解耦方法包含以下步骤:In order to solve another technical problem of the present invention, another technical solution adopted is: the decoupling method of the three-dimensional flexible tactile sensor includes collecting the signal from the wire and combining the state equation F i = f(△ i ) of the conductive rubber to obtain the force The size of F i , the function f in the formula is determined by the properties of the conductive rubber, △ i is the displacement in the i direction, and i is x or y or z, especially the decoupling method includes the following steps:

步骤1,选定第一层导线,以其为基点,Step 1, select the first layer of wires, take it as the base point,

先检测所有第二层导线与其之间的电阻值,由电阻值的变化得到受力点位于该第一层导线上的轴向位置,以及垂直于第一层导线层的力Fz的大小和平行于第一层导线轴向的力Fx的大小,First detect the resistance value between all the second-layer wires and the resistance value, and obtain the axial position of the stress point on the first-layer wire from the change of the resistance value, as well as the magnitude and parallelism of the force Fz perpendicular to the first-layer wire layer. The magnitude of the force Fx in the axial direction of the first layer of wires,

再检测与该第一层导线相平行且间距最小的两根第三层导线与其之间的电阻值,由电阻值的变化得到垂直于第一层导线轴向的力Fy的大小;Then detect the resistance value between the two third-layer wires parallel to the first-layer wire and with the smallest spacing, and obtain the magnitude of the force Fy perpendicular to the axial direction of the first-layer wire by the variation of the resistance value;

步骤2,依次选择下一第一层导线,重复步骤1,直至选完。Step 2, select the next first layer of wires in sequence, and repeat step 1 until the selection is complete.

作为三维柔性触觉传感器的解耦方法的进一步改进,所述的力Fz的确定为相邻两根第二层导线与第一层导线间的电阻值的变化相同;所述的力Fx的确定为相邻两根第二层导线与第一层导线间的电阻值的变化相反;所述的力Fy的确定为相邻两根第三层导线与第一层导线间的电阻值的变化相反。As a further improvement of the decoupling method of the three-dimensional flexible tactile sensor, the determination of the force Fz is that the change of the resistance value between two adjacent second-layer wires and the first-layer wire is the same; the determination of the described force Fx is The change of the resistance value between two adjacent second layer wires and the first layer wire is opposite; the determination of the force Fy is that the resistance value change between two adjacent third layer wires and the first layer wire is opposite.

相对于现有技术的有益效果是,其一,采用层面间相互平行的三层绝缘导线,三层绝缘导线中的第二层导线与第一层导线垂直排列,第三层导线与第一层导线平行排列,每层导线上分别等间距的电连接多只相应层的电极,且使每只第一层电极的投影均位于四只第二层电极构成的方形的中心,并同时位于四只第三层电极构成的方形的中心,上述各层导线和电极间均置有导电橡胶的结构,使传感器既能同时检测出三维力的大小,又具有柔韧性极好的特点,使其有着类似人的皮肤的特性,还能连续地进行空间三维力的测量,极大地提升了传感器使用的性能和拓展了其应用的范围;其二,由于各层导线和电极间的导电橡胶采用的是整体注射成型工艺来使其定位和定型的,故传感器的结构紧凑,整体性强,从而使其工作稳定,使用方便,适应性好,适用的范围广。传感器不仅制作工艺简单,易于工业化生产,还利于其的商业化应用;其三,解耦采用由行列扫描获得第一层各行与第二层各列以及第一层各行与第三层各行间的电阻值变化,来得到受力点的位置,以及垂直于第一层导线层的力Fz的大小、平行于和垂直于第一层导线轴向的力Fx和Fy的大小的方法,既科学,又简便,还快捷和高效。Compared with the beneficial effects of the prior art, the first is to adopt three-layer insulated wires parallel to each other between layers, the second layer of wires in the three-layer insulated wires is vertically arranged with the first layer of wires, and the third layer of wires is vertically arranged with the first layer of wires. The wires are arranged in parallel, and each layer of wires is electrically connected to multiple electrodes of the corresponding layer at equal intervals, and the projection of each first-layer electrode is located in the center of the square formed by the four second-layer electrodes, and at the same time in the four electrodes. In the center of the square formed by the third layer of electrodes, there is a structure of conductive rubber between the above-mentioned layers of wires and electrodes, so that the sensor can detect the size of the three-dimensional force at the same time, and has the characteristics of excellent flexibility, so that it has a similar The characteristics of human skin can also continuously measure the three-dimensional force in space, which greatly improves the performance of the sensor and expands its application range; The injection molding process is used to position and shape the sensor, so the sensor has a compact structure and strong integrity, so that it works stably, is easy to use, has good adaptability, and has a wide range of applications. The sensor is not only simple in manufacturing process, easy to industrialized production, but also conducive to its commercial application; third, the decoupling adopts row and column scanning to obtain the distance between each row of the first layer and each column of the second layer, and between each row of the first layer and each row of the third layer. The method of changing the resistance value to obtain the position of the force point, the magnitude of the force Fz perpendicular to the first layer of wire layer, and the magnitude of the forces Fx and Fy parallel to and perpendicular to the axial direction of the first layer of wire is scientific, Simple, fast and efficient.

作为有益效果的进一步体现,一是每层电极相互间的间距优选与每层导线相互间的间距相同,以及每层导线的层间间距相同的结构,除使制作工艺更简便之外,还便于行列扫描信息的处理;二是力Fz的确定优选为相邻两根第二层导线与第一层导线间的电阻值的变化相同,力Fx的确定优选为相邻两根第二层导线与第一层导线间的电阻值的变化相反,力Fy的确定优选为相邻两根第三层导线与第一层导线间的电阻值的变化相反,既有针对性,又简单方便。As a further embodiment of the beneficial effects, one is that the distance between the electrodes of each layer is preferably the same as the distance between the wires of each layer, and the structure of the same interlayer distance of the wires in each layer, in addition to making the manufacturing process easier, also facilitates The processing of row and column scan information; the second is that the determination of force Fz is preferably that the change of the resistance value between two adjacent second-layer wires and the first-layer wire is the same, and the determination of force Fx is preferably that two adjacent second-layer wires and The change of the resistance value between the first layer wires is opposite, and the determination of the force Fy is preferably the opposite change of the resistance value between two adjacent third layer wires and the first layer wire, which is targeted, simple and convenient.

附图说明Description of drawings

下面结合附图对本发明的优选方式作进一步详细的描述。The preferred modes of the present invention will be further described in detail below in conjunction with the accompanying drawings.

图1是本发明的传感器的一种基本结构示意图;Fig. 1 is a kind of basic structural representation of sensor of the present invention;

图2是本发明的传感器感受来自z方向力时的受力分析示意图;Fig. 2 is a schematic diagram of force analysis when the sensor of the present invention feels force from the z direction;

图3是本发明的传感器感受来自X方向力时的受力分析示意图;Fig. 3 is a schematic diagram of force analysis when the sensor of the present invention feels force from the X direction;

图4是本发明的传感器感受来自Y方向力时的受力分析示意图。Fig. 4 is a schematic diagram of force analysis when the sensor of the present invention senses force from the Y direction.

具体实施方式Detailed ways

参见图1,三维柔性触觉传感器由层面间相互平行的、且导线间等间距设置的第一层导线1、第二层导线3和第三层导线5,以及第一层导线1、第二层导线3和第三层导线5上分别等间距电连接的多只第一层电极2、第二层电极4和第三层电极6构成。其中,第二层导线3与第一层导线1垂直排列,第三层导线5与第一层导线1平行排列。每只第一层电极2的投影均位于四只第二层电极4构成的方形的中心,且同时位于四只第三层电极6构成的方形的中心。第一层电极2相互间的间距与第一层导线1相互间的间距相同,第二层电极4相互间的间距与第二层导线3相互间的间距相同,第三层电极6相互间的间距与第三层导线5相互间的间距相同,第二层导线3和第三层导线5间的层间间距与第一层导线1和第二层导线3间的层间间距相同。上述第一层导线1、第一层电极2、第二层导线3、第二层电极4、第三层导线5和第三层电极6间均置有导电橡胶7,第一层导线1、第二层导线3和第三层导线5均为其外表面裹覆有绝缘层的绝缘导线。Referring to Fig. 1, the three-dimensional flexible tactile sensor consists of a first layer of wires 1, a second layer of wires 3 and a third layer of wires 5 that are parallel to each other between the layers and arranged at equal intervals between the wires, and the first layer of wires 1, the second layer of wires The conductive wire 3 and the third layer conductive wire 5 are composed of a plurality of first layer electrodes 2 , second layer electrodes 4 and third layer electrodes 6 electrically connected at equal intervals respectively. Wherein, the second layer of wires 3 is vertically arranged with the first layer of wires 1 , and the third layer of wires 5 is arranged in parallel with the first layer of wires 1 . The projection of each first-layer electrode 2 is located in the center of the square formed by the four second-layer electrodes 4 , and is also located in the center of the square formed by the four third-layer electrodes 6 . The distance between the first layer electrodes 2 is the same as the distance between the first layer wires 1, the distance between the second layer electrodes 4 is the same as the distance between the second layer wires 3, and the distance between the third layer electrodes 6 is the same. The spacing is the same as the spacing between the third-layer wires 5 , and the interlayer spacing between the second-layer wires 3 and the third-layer wires 5 is the same as the interlayer spacing between the first-layer wires 1 and the second-layer wires 3 . Above-mentioned first layer wire 1, first layer electrode 2, second layer wire 3, second layer electrode 4, third layer wire 5 and third layer electrode 6 are all provided with conductive rubber 7, first layer wire 1, Both the second-layer wire 3 and the third-layer wire 5 are insulated wires whose outer surface is covered with an insulating layer.

三维柔性触觉传感器在使用的过程中,当其对外受力时,其所受到的力是由三个不同方向,即z方向、x方向和y方向上的力合并而成的,该合力使受力点处的导电橡胶7因受挤压而变形,从而使位于受力点处的第一层电极2与第二层电极4、第三层电极6间的电阻值发生变化。变化着的电阻值由行列扫描获得后,再结合导电橡胶的状态方程Fi=f(Δi)得到力Fi的大小,公式中的函数f由导电橡胶的性质决定,Δi为i方向上的位移,i为x或y或z。参见图2、图3和图4,图2中的Fz为垂直于第一层导线1层面方向上的力,也即z方向上的力,Δz为第一层电极2在垂直于第一层导线1层面方向上的位移;图3中的Fx为平行于第一层导线1轴向上的力,也即x方向上的力,Δx为第一层电极2在平行于第一层导线1轴向上的位移;图4中的Fy为垂直于第一层导线1轴向上的力,也即y方向上的力,Δy为第一层电极2在垂直于第一层导线1轴向上的位移。During the use of the three-dimensional flexible tactile sensor, when it is subjected to an external force, the force it receives is composed of forces in three different directions, namely, the z direction, the x direction and the y direction. The conductive rubber 7 at the force point is deformed due to being squeezed, so that the resistance value between the first layer electrode 2 , the second layer electrode 4 and the third layer electrode 6 at the force point changes. After the changing resistance value is obtained by row and column scanning, combined with the state equation F i = f(Δ i ) of the conductive rubber to obtain the magnitude of the force F i , the function f in the formula is determined by the properties of the conductive rubber, and Δ i is the i direction The displacement on , i is x or y or z. Referring to Fig. 2, Fig. 3 and Fig. 4, Fz in Fig. 2 is the force perpendicular to the layer direction of the first layer wire 1, that is, the force in the z direction, and Δz is the force of the first layer electrode 2 perpendicular to the first layer The displacement in the layer direction of the wire 1; Fx in Figure 3 is the force parallel to the axial direction of the first layer of wire 1, that is, the force in the x direction, and Δx is the displacement of the first layer of electrodes 2 parallel to the first layer of wire 1 Axial displacement; Fy in Figure 4 is the force perpendicular to the axial direction of the first layer of wire 1, that is, the force in the y direction, and Δy is the axial force of the first layer of electrodes 2 perpendicular to the first layer of wire 1. on the displacement.

三维柔性触觉传感器的解耦方法的具体工作步骤为:The specific working steps of the decoupling method of the three-dimensional flexible tactile sensor are:

步骤1,先选定第一层导线1中的某条导线,再以选定的该条导线为基点。然后,先检测所有第二层导线3与该条导线之间的电阻值,由电阻值的变化得到受力点位于该条导线上的轴向位置,以及垂直于该条导线层的力Fz的大小(参见图2)和平行于该条导线轴向的力Fx的大小(参见图3);其中,力Fz的确定为相邻两根第二层导线3与该条导线间的电阻值的变化相同,力Fx的确定为相邻两根第二层导线3与该条导线间的电阻值的变化相反。之后,再检测与该条导线相平行且间距最小的两根第三层导线5与其之间的电阻值,由电阻值的变化得到垂直于该条导线轴向的力Fy的大小(参见图4);其中,力Fy的确定为相邻两根第三层导线5与该条导线间的电阻值的变化相反。Step 1, first select a certain wire in the first layer of wire 1, and then use the selected wire as the base point. Then, first detect the resistance value between all the second layer wires 3 and the wire, and obtain the axial position of the stress point on the wire and the force Fz perpendicular to the wire layer from the change of the resistance value. size (referring to Fig. 2) and the magnitude (referring to Fig. 3) of the force Fx parallel to the axial direction of this wire; Wherein, the determination of force Fz is the resistance value between two adjacent second layer wires 3 and this wire The changes are the same, and the determination of the force Fx is that the change of the resistance value between two adjacent second-layer wires 3 and the wire is opposite. Afterwards, detect the resistance value between the two third-layer wires 5 parallel to the wire and with the minimum spacing, and obtain the magnitude of the force Fy perpendicular to the axial direction of the wire by the variation of the resistance value (see Fig. 4 ); wherein, the determination of the force Fy is opposite to the change of the resistance value between two adjacent third-layer wires 5 and the wire.

步骤2,依次选择下一第一层导线1,即依次选择该条导线的下一第一层导线1中的导线,重复步骤1,直至选完,即可连续地测得三维力的信息。Step 2: Select the next first layer of wires 1 in turn, that is, sequentially select the wires in the first layer of wires 1 next to this wire, and repeat step 1 until the selection is complete, and the information of the three-dimensional force can be continuously measured.

显然,本领域的技术人员可以对本发明的三维柔性触觉传感器及其解耦方法进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若对本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内,则本发明也意图包含这些改动和变型在内。Apparently, those skilled in the art can make various changes and modifications to the three-dimensional flexible tactile sensor and its decoupling method of the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and equivalent technologies, the present invention also intends to include these modifications and variations.

Claims (9)

1.一种三维柔性触觉传感器,包括层面间相互平行的等间距设置的第一层导线(1)和第二层导线(3),以及第一层导线(1)和第二层导线(3)上分别等间距电连接的多只第一层电极(2)和第二层电极(4),所述第一层导线(1)与第二层导线(3)垂直排列,所述第一层导线(1)、第二层导线(3)、第一层电极(2)和第二层电极(4)间置有导电橡胶(7),其特征在于:1. A three-dimensional flexible tactile sensor, comprising a first layer of wires (1) and a second layer of wires (3) arranged at equal intervals parallel to each other between layers, and a first layer of wires (1) and a second layer of wires (3) ) on a plurality of first-layer electrodes (2) and second-layer electrodes (4) that are electrically connected at equal intervals, the first-layer wires (1) and the second-layer wires (3) are vertically arranged, and the first A conductive rubber (7) is interposed between the first layer of wires (1), the second layer of wires (3), the first layer of electrodes (2) and the second layer of electrodes (4), and is characterized in that: 所述第二层导线(3)之下置有等间距设置的第三层导线(5),所述第三层导线(5)的层面与第二层导线(3)的层面平行,且与所述第一层导线(1)平行排列,其上等间距电连接多只第三层电极(6),所述第三层导线(5)、第三层电极(6)与所述第二层导线(3)、第二层电极(4)间置有导电橡胶(7);A third layer of wires (5) arranged at equal intervals is placed under the second layer of wires (3), and the layer of the third layer of wires (5) is parallel to the layer of the second layer of wires (3), and is The first-layer wires (1) are arranged in parallel, and a plurality of third-layer electrodes (6) are electrically connected to them at equal intervals, and the third-layer wires (5), the third-layer electrodes (6) and the second layer Conductive rubber (7) is interposed between the first layer of wires (3) and the second layer of electrodes (4); 所述每只第一层电极(2)的投影均位于所述多只第二层电极(4)中的四只构成的方形的中心,且同时位于所述多只第三层电极(6)中的四只构成的方形的中心;The projection of each first-layer electrode (2) is located at the center of the square formed by four of the plurality of second-layer electrodes (4), and is simultaneously located at the plurality of third-layer electrodes (6) The center of the square formed by four of them; 所述第一层导线(1)、第二层导线(3)和第三层导线(5)均为其外表面裹覆有绝缘层的绝缘导线。The first layer of wires (1), the second layer of wires (3) and the third layer of wires (5) are all insulated wires whose outer surfaces are covered with insulating layers. 2.根据权利要求1所述的三维柔性触觉传感器,其特征是第一层电极(2)相互间的间距与第一层导线(1)相互间的间距相同。2. The three-dimensional flexible tactile sensor according to claim 1, characterized in that the distance between the electrodes (2) of the first layer is the same as the distance between the wires (1) of the first layer. 3.3根据权利要求2所述的三维柔性触觉传感器,其特征是第二层电极(4)相互间的间距与第二层导线(3)相互间的间距相同。3.3 The three-dimensional flexible tactile sensor according to claim 2, characterized in that the distance between the electrodes (4) of the second layer is the same as the distance between the wires (3) of the second layer. 4.根据权利要求3所述的三维柔性触觉传感器,其特征是第三层电极(6)相互间的间距与第三层导线(5)相互间的间距相同。4. The three-dimensional flexible tactile sensor according to claim 3, characterized in that the distance between the electrodes (6) of the third layer is the same as the distance between the wires (5) of the third layer. 5.根据权利要求4所述的三维柔性触觉传感器,其特征是第二层导线(3)和第三层导线(5)间的层间间距与第一层导线(1)和第二层导线(3)间的层间间距相同。5. The three-dimensional flexible tactile sensor according to claim 4, characterized in that the interlayer spacing between the second layer of wires (3) and the third layer of wires (5) is the same as that of the first layer of wires (1) and the second layer of wires (3) have the same interlayer spacing. 6.一种权利要求1所述三维柔性触觉传感器的解耦方法,包括自导线上采集信号和结合导电橡胶的状态方程Fi=f(Δi)得到力Fi的大小,公式中的函数f由导电橡胶的性质决定,Δi为i方向上的位移,i为x或y或z,其特征在于解耦方法包含以下步骤:6. a decoupling method of the three-dimensional flexible tactile sensor as claimed in claim 1, comprising collecting signals from the wire and in conjunction with the state equation F i of conductive rubber = f (Δ i ) to obtain the size of force F i , the function in the formula f is determined by the properties of the conductive rubber, Δi is the displacement in the i direction, i is x or y or z, and it is characterized in that the decoupling method comprises the following steps: 步骤1,选定第一层导线,以其为基点,Step 1, select the first layer of wires, take it as the base point, 先检测所有第二层导线与其之间的电阻值,由电阻值的变化得到受力点位于该第一层导线上的轴向位置,以及垂直于第一层导线层的力Fz的大小和平行于第一层导线轴向的力Fx的大小,First detect the resistance value between all the second-layer wires and the resistance value, and obtain the axial position of the stress point on the first-layer wire from the change of the resistance value, as well as the magnitude and parallelism of the force Fz perpendicular to the first-layer wire layer. The magnitude of the force Fx in the axial direction of the first layer of wires, 再检测与该第一层导线相平行且间距最小的两根第三层导线与其之间的电阻值,由电阻值的变化得到垂直于第一层导线轴向的力Fy的大小;Then detect the resistance value between the two third-layer wires parallel to the first-layer wire and with the smallest spacing, and obtain the magnitude of the force Fy perpendicular to the axial direction of the first-layer wire by the variation of the resistance value; 步骤2,依次选择下一第一层导线,重复步骤1,直至选完。Step 2, select the next first layer of wires in sequence, and repeat step 1 until the selection is complete. 7.根据权利要求6所述的三维柔性触觉传感器的解耦方法,其特征是力Fz的确定为相邻两根第二层导线与第一层导线间的电阻值的变化相同。7. The decoupling method of the three-dimensional flexible tactile sensor according to claim 6, wherein the determination of the force Fz is that the change of the resistance value between two adjacent second-layer wires and the first-layer wire is the same. 8.根据权利要求6所述的三维柔性触觉传感器的解耦方法,其特征是力Fx的确定为相邻两根第二层导线与第一层导线间的电阻值的变化相反。8 . The decoupling method of the three-dimensional flexible tactile sensor according to claim 6 , wherein the determination of the force Fx is opposite to the change of the resistance value between two adjacent second-layer wires and the first-layer wire. 9.根据权利要求6所述的三维柔性触觉传感器的解耦方法,其特征是力Fy的确定为相邻两根第三层导线与第一层导线间的电阻值的变化相反。9. The decoupling method of a three-dimensional flexible tactile sensor according to claim 6, wherein the determination of the force Fy is opposite to the change of the resistance value between two adjacent third-layer wires and the first-layer wire.
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