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CN101728366A - Photoelectric element packaging module and manufacturing method thereof - Google Patents

Photoelectric element packaging module and manufacturing method thereof Download PDF

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Publication number
CN101728366A
CN101728366A CN200810167673A CN200810167673A CN101728366A CN 101728366 A CN101728366 A CN 101728366A CN 200810167673 A CN200810167673 A CN 200810167673A CN 200810167673 A CN200810167673 A CN 200810167673A CN 101728366 A CN101728366 A CN 101728366A
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dielectric layer
semiconductor light
emitting
heat dissipation
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陈隆欣
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Zhanjing Technology Shenzhen Co Ltd
Advanced Optoelectronic Technology Inc
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Advanced Development Optoelectronics Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45117Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/45124Aluminium (Al) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00011Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01015Phosphorus [P]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01047Silver [Ag]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/0132Binary Alloys
    • H01L2924/01322Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases

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Abstract

The invention relates to a photoelectric element packaging module structure of a dielectric layer and a manufacturing method thereof. The packaging module structure comprises a heat dissipation substrate; a dielectric layer located above the heat dissipation substrate; a plurality of semiconductor light emitting crystal grains which are positioned in the concave part of the dielectric layer and fixed on the heat dissipation substrate; a printed circuit board with multiple holes corresponding to the recesses of the dielectric layer, covering the dielectric layer and exposing the semiconductor light-emitting dies; a plurality of metal wires electrically connect the plurality of semiconductor light-emitting crystal grains with the printed circuit board; and a transparent adhesive material for coating the plurality of semiconductor light-emitting dies and the plurality of metal wires. The manufacturing method forms a dielectric layer by a simple and rapid injection molding process, and takes the dielectric layer as a buffer layer and a reflecting cup between the printed circuit board and the radiating substrate, thereby not only effectively reducing the thermal stress between the printed circuit board and the radiating substrate, but also increasing the brightness of light.

Description

光电元件封装模块及其制造方法 Photoelectric element packaging module and manufacturing method thereof

技术领域technical field

本发明涉及一种光电元件的封装模块及其制造方法,特别涉及一种包含介电层的光电元件的封装模块及其制造方法。The invention relates to a packaging module of a photoelectric component and a manufacturing method thereof, in particular to a packaging module of a photoelectric component including a dielectric layer and a manufacturing method thereof.

背景技术Background technique

对于发光二极管(Light Emitting Diode;LED)而言,寿命长、低发热量及低耗电量,并且可以节约能源及减少污染是最大的优点。近年来,发光二极管被广泛应用在广告板、交通标志、液晶显示器(Liquid Crystal Display;LCD)及如行动电话的携带式电子产品的背光源,未来将有机会取代白炽灯泡与日光灯的应用市场。For light emitting diodes (Light Emitting Diode; LED), long life, low calorific value, low power consumption, energy saving and pollution reduction are the biggest advantages. In recent years, light-emitting diodes have been widely used in advertising boards, traffic signs, liquid crystal displays (Liquid Crystal Display; LCD) and backlights of portable electronic products such as mobile phones. In the future, they will have the opportunity to replace incandescent bulbs and fluorescent lamps in the application market.

为达到白光应用,高功率发光二极管模块的封装结构中,由于电流驱动发光二极管模块时会产生高温,不仅会伤害半导体晶粒且加速其老化,包含在发光二极管模块内的相关元件也可能因高温产生热应力而有所损害。因此,具高散热的发光二极管模块封装结构及其简单的模块封装方法为目前各界所追求的。In order to achieve white light applications, in the packaging structure of high-power LED modules, due to the high temperature generated when the LED module is driven by current, it will not only damage the semiconductor grains and accelerate its aging, but also related components contained in the LED module may also be affected by high temperature. Damaged by heat stress. Therefore, a light-emitting diode module packaging structure with high heat dissipation and a simple module packaging method are currently pursued by all walks of life.

中国台湾专利公告号第I281272号中,请参考图1,其为现有技术的一种发光二极管封装结构的剖面图,其封装过程提供一设有多个相间隔贯孔的印刷电路板101,在前述印刷电路板(Printed Circuit Board;PCB)的一面布设有多条电路线,并将前述印刷电路板的另一面通过一胶合层103与一金属基板102黏合在一起后,再将至少一发光二极管晶粒104及105置入各前述的贯孔中,使其贴附在前述的金属基板102上,然后在各前述发光二极管晶粒104与前述印刷电路板101上的所述电路走线之间打线106及107使其电性连接,最后在各前述的贯孔中封胶108,将各前述发光二极管晶粒104封闭在各贯孔中。In Taiwan Patent Publication No. I281272, please refer to FIG. 1, which is a cross-sectional view of a light-emitting diode packaging structure in the prior art. The packaging process provides a printed circuit board 101 with a plurality of spaced through holes. A plurality of circuit lines are arranged on one side of the aforementioned printed circuit board (PCB), and after the other side of the aforementioned printed circuit board is glued together with a metal substrate 102 through an adhesive layer 103, at least one light emitting Diode chips 104 and 105 are put into each of the aforementioned through holes so that they are attached to the aforementioned metal substrate 102, and then between each of the aforementioned LED chips 104 and the circuit traces on the aforementioned printed circuit board 101 Wires 106 and 107 are bonded to make them electrically connected, and finally glue 108 is sealed in each of the above-mentioned through-holes to seal each of the above-mentioned light-emitting diode chips 104 in each of the through-holes.

许多电子产品都面临了热应力的问题,最明显的为电子封装行业,由于在封装过程中异相材料因性质差异,受热胀冷缩而产生互制进而发生翘曲变形及应力。由上述所知,在现有技术的封装过程中,印刷电路板与散热基板之间先以一黏胶直接黏合后再进行固晶的作业,当固晶于高温下进行时,印刷电路板与金属基板之间可能因热膨胀系数(Coefficient of thermalexpansion;CTE)差异而产生热应力(Thermal Stress),导致发光二极管模块封装元件在制造过程中产生第一次模块变形的损伤。此外,封装完成后,当电流驱动发光二极管模块时,发光二极管晶粒产生的高温虽利用散热基板散热,但由于散热基板受热后膨胀,其与印刷电路板及发光二极管晶粒的接合可能因膨胀系数差异产生第二次的热应力。长期处于高温下,发光二极管装置的使用寿命将因各元件间的热效应而缩减。由此可知,发光二极管模块封装不仅需考虑发光二极管晶粒的散热外,包含于模块内的各种元件也影响模块的使用寿命,必须一并考虑其可能发生的不良影响。Many electronic products are faced with the problem of thermal stress, the most obvious is the electronic packaging industry, due to the difference in properties of heterogeneous materials in the packaging process, due to thermal expansion and contraction, mutual restraint occurs, resulting in warping deformation and stress. From the above knowledge, in the packaging process of the prior art, the printed circuit board and the heat dissipation substrate are directly bonded with an adhesive before the die-bonding operation. When the die-bonding is carried out at high temperature, the printed circuit board and the heat-dissipating substrate will Thermal stress (Thermal Stress) may be generated due to the difference in the coefficient of thermal expansion (Coefficient of thermal expansion; CTE) between the metal substrates, resulting in damage to the first module deformation of the LED module packaging components during the manufacturing process. In addition, after the packaging is completed, when the current drives the LED module, although the high temperature generated by the LED die is dissipated by the heat dissipation substrate, due to the expansion of the heat dissipation substrate after being heated, its connection with the printed circuit board and the LED die may be due to expansion. The coefficient difference produces a second thermal stress. Under high temperature for a long time, the service life of the light-emitting diode device will be shortened due to the thermal effect between the various components. It can be seen that the LED module packaging not only needs to consider the heat dissipation of the LED die, but also various components contained in the module also affect the service life of the module, and the possible adverse effects must be considered together.

发明内容Contents of the invention

热胀冷缩是物质的共同本性,不同物质的膨胀系数是不同的,为求散热基板、半导体发光晶粒与印刷电路板之间能够达到散热及降低热应力带来模块变形的损害,本发明的目的在于提供一种包含一介电层的半导体模块的封装结构及其制造方法,其以简单快速的射出成型(Injection Molding)工艺形成一介电层,并以介电层作为印刷电路板及散热基板之间的缓冲层及反射杯,不但可以有效降低印刷电路板及散热基板之间的热应力,并可增加光的亮度。Expansion with heat and contraction with cold is the common nature of substances, and the expansion coefficients of different substances are different. In order to achieve heat dissipation between the heat dissipation substrate, semiconductor light-emitting crystal grains and printed circuit boards, and reduce the damage caused by thermal stress to the module deformation, the present invention The purpose of the present invention is to provide a packaging structure of a semiconductor module comprising a dielectric layer and a manufacturing method thereof, which forms a dielectric layer with a simple and rapid injection molding (Injection Molding) process, and uses the dielectric layer as a printed circuit board and The buffer layer and reflective cup between the heat dissipation substrates can not only effectively reduce the thermal stress between the printed circuit board and the heat dissipation substrate, but also increase the brightness of light.

本发明提出一种光电元件的封装模块,前述的光电元件的封装模块结构包含一散热基板,一介电层位于前述的散热基板上方,具有多个凹处用以露出部分的前述的散热基板,多个半导体发光晶粒,位于前述的介电层的凹处并固定于前述的散热基板上,一具有多个孔洞的印刷电路板,其孔洞相对应于前述的介电层的凹处,覆盖在前述的介电层上并露出前述的多个半导体发光晶粒,多条金属导线将前述的多个半导体发光晶粒与前述的印刷电路板电性连接,以及一透明胶材用以包覆前述的多个半导体发光晶粒与前述的多条金属导线。The present invention proposes a packaging module for optoelectronic components. The packaging module structure for the aforementioned optoelectronic components includes a heat dissipation substrate, a dielectric layer is located above the aforementioned heat dissipation substrate, and has a plurality of recesses for exposing part of the aforementioned heat dissipation substrate. A plurality of semiconductor light-emitting crystal grains are located in the recesses of the aforementioned dielectric layer and fixed on the aforementioned heat dissipation substrate. A printed circuit board with a plurality of holes corresponds to the recesses of the aforementioned dielectric layer, covering The plurality of semiconductor light-emitting crystal grains are exposed on the aforementioned dielectric layer, a plurality of metal wires electrically connect the aforementioned plurality of semiconductor light-emitting crystal grains to the aforementioned printed circuit board, and a transparent adhesive material is used for coating The aforementioned plurality of semiconductor light-emitting crystal grains and the aforementioned plurality of metal wires.

上述的半导体发光晶粒通过至少一条金属导线与上述的印刷电路板电性连接。上述的散热基板其材料是铜、镍、银、铅、金或是前述金属合金,或是铜-钼-铜(CuMoCu)、钨-铜(WCu)、铝碳化硅(AlSiC)、氮化铝(AlN)、硅(Si)、氧化铍(BeO)、金刚石或其他膨胀系数与半导体发光晶粒相近的金属材料。The above-mentioned semiconductor light-emitting crystal grain is electrically connected with the above-mentioned printed circuit board through at least one metal wire. The above-mentioned heat dissipation substrate is made of copper, nickel, silver, lead, gold or the aforementioned metal alloys, or copper-molybdenum-copper (CuMoCu), tungsten-copper (WCu), aluminum silicon carbide (AlSiC), aluminum nitride (AlN), silicon (Si), beryllium oxide (BeO), diamond or other metal materials with expansion coefficients similar to those of semiconductor luminescent grains.

上述的透明封胶材料中还混合光转换材料,其中上述的透明封胶材料是环氧树脂(epoxy)或是硅胶(silicone gel),前述的转换材料可为荧光粉,前述的荧光粉为硅酸盐类、氧化物族系、氮化物族系或是硫化物族系。The above-mentioned transparent sealing material is also mixed with a light conversion material, wherein the above-mentioned transparent sealing material is epoxy resin (epoxy) or silica gel (silicone gel), the aforementioned conversion material can be phosphor powder, and the aforementioned phosphor powder is silicon gel. salts, oxides, nitrides or sulfides.

上述的半导体发光晶粒可为发光二极管晶粒、激光二极管或光感测晶粒。上述的半导体发光晶粒以固晶胶或共晶接合而固定在散热基板上。The above-mentioned semiconductor light-emitting crystal grains can be light-emitting diode crystal grains, laser diodes, or light-sensing grains. The above-mentioned semiconductor light-emitting crystal grains are fixed on the heat dissipation substrate by die-bonding glue or eutectic bonding.

上述介质的凹处为中空反射体,且该介电层的材料是聚邻苯二甲酰胺(Polyphthalamide;PPA)或聚丁炔(PPB)。The recess of the medium is a hollow reflector, and the material of the dielectric layer is polyphthalamide (PPA) or polybutylene (PPB).

本发明还提供一种光电元件的封装模块制造方法,其步骤包含:提供一散热基板,形成一介电层于前述的散热基板上,形成一印刷电路板于前述的介电层上,将多个半导体发光晶粒固定于前述的散热基板上,多条金属导线将前述的半导体发光晶粒与前述的印刷电路板电性连接,以及一透明胶材用以包覆前述的多个半导体发光晶粒与前述的多条金属导线。其中上述的介电层具有多个凹处以露出部分的前述的散热基板,前述的印刷电路板具有多个孔洞,前述的多个孔洞与前述的介电层的多个凹处相对应,以及前述的多个半导体发光晶粒对应于前述的介电层的凹处内。The present invention also provides a method for manufacturing a packaging module of a photoelectric element, the steps of which include: providing a heat dissipation substrate, forming a dielectric layer on the aforementioned heat dissipation substrate, forming a printed circuit board on the aforementioned dielectric layer, and placing multiple A semiconductor light-emitting crystal grain is fixed on the aforementioned heat dissipation substrate, a plurality of metal wires electrically connect the aforementioned semiconductor light-emitting crystal grain to the aforementioned printed circuit board, and a transparent adhesive material is used to cover the aforementioned plurality of semiconductor light-emitting crystal grains pellets with the aforementioned plurality of metal wires. Wherein the above-mentioned dielectric layer has a plurality of recesses to expose part of the aforementioned heat dissipation substrate, the aforementioned printed circuit board has a plurality of holes, the aforementioned plurality of holes correspond to the plurality of recesses of the aforementioned dielectric layer, and the aforementioned The plurality of semiconductor light-emitting grains correspond to the recesses of the aforementioned dielectric layer.

考虑到光电元件的封装模块在制造时,可能因各工艺步骤使用的高低温度有所变异,其元件之间可能因材料的膨胀系数差异而使得模块尚未完成之前已先受热应力的变形损害,本发明还公开另外二种光电元件的封装模块制造方法,其中第一种光电元件的封装模块制造方法的步骤包含:提供一散热基板,形成一介电层于前述的散热基板上,其中前述的介电层包含多个凹处,将多个半导体发光晶粒分别放置于前述的介电层的凹处内并固定于前述的散热基板上,形成一具多个孔洞的印刷电路板,前述的孔洞相对应于前述的介电层的凹处的凹口,覆盖在前述的介电层上,露出前述的半导体发光晶粒,多条金属导线将前述的半导体发光晶粒与前述的印刷电路板电性连接,以及一透明胶材用以包覆前述的多个半导体发光晶粒与前述的多条金属导线。Considering that the packaging module of photoelectric components may vary due to the high and low temperatures used in each process step during manufacture, and the components may be damaged by thermal stress deformation before the module is completed due to the difference in expansion coefficient of the material. The invention also discloses two other manufacturing methods for packaging modules of optoelectronic components, wherein the steps of the first manufacturing method of packaging modules for optoelectronic components include: providing a heat dissipation substrate, forming a dielectric layer on the aforementioned heat dissipation substrate, wherein the aforementioned dielectric layer The electrical layer includes a plurality of recesses, and a plurality of semiconductor light-emitting crystal grains are respectively placed in the recesses of the aforementioned dielectric layer and fixed on the aforementioned heat dissipation substrate to form a printed circuit board with a plurality of holes. The aforementioned holes The notches corresponding to the recesses of the aforementioned dielectric layer cover the aforementioned dielectric layer to expose the aforementioned semiconductor light-emitting grains, and a plurality of metal wires connect the aforementioned semiconductor light-emitting grains to the aforementioned printed circuit board. Sexual connection, and a transparent adhesive material is used to cover the aforementioned plurality of semiconductor light-emitting crystal grains and the aforementioned plurality of metal wires.

第二种光电元件的封装模块制造方法的步骤包含:提供一散热基板,将多个半导体发光晶粒分别固定于前述的散热基板上,形成一介电层于前述的散热基板上,前述的介电层包含多个凹处,前述的凹处分别对应且露出前述的半导体发光晶粒,形成一具多个孔洞的印刷电路板,前述的孔洞相对应于前述的介电层的凹处的凹口,覆盖在前述的介电层上,露出前述的半导体发光晶粒,多条金属导线将前述的半导体发光晶粒与前述的印刷电路板电性连接,以及一透明胶材用以包覆前述的多个半导体发光晶粒与前述的多条金属导线。The steps of the second method of manufacturing a packaging module of an optoelectronic component include: providing a heat dissipation substrate, fixing a plurality of semiconductor light-emitting crystal grains on the aforementioned heat dissipation substrate, forming a dielectric layer on the aforementioned heat dissipation substrate, and the aforementioned dielectric layer The electrical layer includes a plurality of recesses, the aforementioned recesses respectively correspond to and expose the aforementioned semiconductor light-emitting crystal grains, forming a printed circuit board with a plurality of holes, and the aforementioned holes correspond to the recesses of the aforementioned dielectric layer recesses The mouth is covered on the aforementioned dielectric layer, exposing the aforementioned semiconductor light-emitting grains, a plurality of metal wires electrically connect the aforementioned semiconductor light-emitting grains to the aforementioned printed circuit board, and a transparent adhesive material is used to cover the aforementioned A plurality of semiconductor light-emitting crystal grains and the aforementioned plurality of metal wires.

上述的光电元件的封装模块其半导体发光晶粒除了一般打线接合(wirebonding)方式外也可使用覆晶方式(Flip Chip),其光电元件的封装模块制造方法的步骤包含:提供一散热基板,形成一介电层于前述的散热基板上,其中前述的介电层包含多个凹处,将多个覆晶半导体发光晶粒分别放置于前述的介电层的凹处内并固定于前述的散热基板上,形成一具多个孔洞的印刷电路板,前述的孔洞相对应于前述的介电层的凹处的凹口,覆盖在前述的介电层上,露出前述的覆晶半导体发光晶粒,多条金属导线电性连接覆晶半导体发光晶粒的子基板与前述的印刷电路板,以及一透明胶材用以包覆前述的多个覆晶半导体发光晶粒与前述的多条金属导线。In addition to the general wire bonding method, the semiconductor light-emitting dies of the above-mentioned photoelectric component packaging module can also use the flip chip method (Flip Chip). The steps of the manufacturing method of the photoelectric component packaging module include: providing a heat dissipation substrate, A dielectric layer is formed on the aforementioned heat dissipation substrate, wherein the aforementioned dielectric layer includes a plurality of recesses, and a plurality of flip-chip semiconductor light-emitting dies are respectively placed in the recesses of the aforementioned dielectric layer and fixed on the aforementioned On the heat dissipation substrate, a printed circuit board with a plurality of holes is formed. The aforementioned holes correspond to the recesses of the aforementioned dielectric layer and cover the aforementioned dielectric layer, exposing the aforementioned flip-chip semiconductor light-emitting crystal. A plurality of metal wires electrically connect the sub-substrate of the flip-chip semiconductor light-emitting die and the aforementioned printed circuit board, and a transparent adhesive material is used to cover the aforementioned plurality of flip-chip semiconductor light-emitting dies and the aforementioned plurality of metal wires wire.

上述的光电元件的封装模块制造方法中,印刷电路板的孔洞可利用CNC钻孔方式进行。In the above-mentioned manufacturing method of the packaging module of the optoelectronic component, the holes of the printed circuit board can be drilled by CNC.

上述的光电元件的封装模块制造方法中,以射出成型技术形成一介电层,上述的介电层为一中空反射体。In the manufacturing method of the packaging module of the optoelectronic element mentioned above, a dielectric layer is formed by injection molding technology, and the above dielectric layer is a hollow reflector.

上述的光电元件的封装模块制造方法中,以打线接合(wire bonding)技术将上述的半导体发光晶粒与上述的印刷电路板电性连接。In the manufacturing method of the packaging module of the above-mentioned optoelectronic element, the above-mentioned semiconductor light-emitting die is electrically connected to the above-mentioned printed circuit board by wire bonding technology.

上述的散热基板其材料是铜、镍、银、铅、金或是前述金属合金,或是铜-钼-铜(CuMoCu)、钨-铜(WCu)、铝碳化硅(AlSiC)、氮化铝(AlN)、硅(Si)、氧化铍(BeO)、金刚石或其他膨胀系数与其半导体发光晶粒相近的金属材料。The above-mentioned heat dissipation substrate is made of copper, nickel, silver, lead, gold or the aforementioned metal alloys, or copper-molybdenum-copper (CuMoCu), tungsten-copper (WCu), aluminum silicon carbide (AlSiC), aluminum nitride (AlN), silicon (Si), beryllium oxide (BeO), diamond or other metal materials with expansion coefficients similar to their semiconductor luminescent grains.

上述的透明封胶材料中还混合光转换材料,其中前述的透明封胶材料是环氧树脂(epoxy)或是硅胶(silicone gel),前述的转换材料可为荧光粉。The aforementioned transparent sealing material is also mixed with a light conversion material, wherein the aforementioned transparent sealing material is epoxy resin (epoxy) or silica gel (silicone gel), and the aforementioned converting material can be fluorescent powder.

上述的半导体晶粒可为发光二极管晶粒、激光二极管或光感测晶粒。The aforementioned semiconductor die can be a light emitting diode die, a laser diode or a light sensing die.

上述的晶粒以银胶或共晶接合固定在散热基板上。The above crystal grains are fixed on the heat dissipation substrate by silver glue or eutectic bonding.

上述介质的凹处为中空反射体,且该介电层的材料是聚邻苯二甲酰胺(Polyphthalamide;PPA)或聚丁炔(PPB)。The recess of the medium is a hollow reflector, and the material of the dielectric layer is polyphthalamide (PPA) or polybutylene (PPB).

附图说明Description of drawings

图1为现有技术的一种发光二极管封装结构的剖视图;1 is a cross-sectional view of a light emitting diode packaging structure in the prior art;

图2为本发明的发光二极管封装结构的示意图;Fig. 2 is the schematic diagram of the light-emitting diode packaging structure of the present invention;

图3为本发明半导体发光模块封装模块结构的流程图;Fig. 3 is a flow chart of the packaging module structure of the semiconductor light-emitting module of the present invention;

图4(a)~4(g)为本发明固晶技术的半导体发光模块封装模块的实施例之一;Figures 4(a)-4(g) are one of the embodiments of the semiconductor light-emitting module packaging module of the crystal bonding technology of the present invention;

图5(a)~5(g)为本发明固晶技术的半导体发光模块封装模块的实施例之二;Figures 5(a) to 5(g) are the second embodiment of the semiconductor light-emitting module packaging module of the crystal bonding technology of the present invention;

图6(a)~6(g)为本发明固晶技术的半导体发光模块封装模块的实施例之三;Figures 6(a) to 6(g) are the third embodiment of the semiconductor light-emitting module packaging module of the crystal bonding technology of the present invention;

图7(a)~7(h)为本发明覆晶技术的半导体发光模块封装模块的实施例之一。7( a ) to 7 ( h ) are one embodiment of the packaging module of the semiconductor light-emitting module of the flip-chip technology of the present invention.

其中,附图标记说明如下:Wherein, the reference signs are explained as follows:

101印刷电路板                      102金属基板101 Printed circuit board 102 Metal substrate

103胶合层                          104晶粒103 glued layer 104 grain

105晶粒                            106金属导线105 crystal grains 106 metal wires

107金属导线                        108透明封胶107 metal wire 108 transparent sealant

201、401、501、601、701印刷电路板201, 401, 501, 601, 701 printed circuit boards

202、402、502、602、702孔洞202, 402, 502, 602, 702 holes

203、403、503、603、703散热基板203, 403, 503, 603, 703 heat dissipation substrate

204、404、504、604、704介电层204, 404, 504, 604, 704 dielectric layer

205、405、505、605、705凹处205, 405, 505, 605, 705 recesses

206、406、506、606、706半导体发光晶粒206, 406, 506, 606, 706 semiconductor light-emitting grains

207、407、507、607、707金属导线207, 407, 507, 607, 707 metal wire

208、408、508、608、708透明胶材208, 408, 508, 608, 708 transparent glue

209、409、509、609、709光转换材料209, 409, 509, 609, 709 light conversion materials

706覆晶半导体发光晶粒         711凸块706 flip-chip semiconductor light-emitting die 711 bump

712焊垫                       713子基板712 welding pad 713 sub-substrate

具体实施方式Detailed ways

本发明在此描述一种光电元件的封装模块及其制造方法。为了能彻底地了解本发明,将在下列的描述中提出详尽的步骤及其组成。显然地,本发明的实施并未限定于光电元件的封装模块及其制造方法的技术人员所熟知的特殊细节。另一方面,众所周知的组成或步骤并未描述于细节中,以避免造成本发明不必要的限制。本发明的较佳实施例会详细描述如下,然而除了这些详细描述之外,本发明还可以广泛地实施在其他的实施例中,且本发明的范围不受限定,其以所附的权利要求所限定的保护范围为准。The present invention describes a packaging module for optoelectronic components and its manufacturing method. In order to provide a thorough understanding of the present invention, detailed steps and components thereof will be set forth in the following description. Obviously, the practice of the invention is not restricted to specific details well known to those skilled in the art of encapsulation modules for optoelectronic components and methods for their manufacture. On the other hand, well-known components or steps have not been described in detail so as not to unnecessarily limit the invention. Preferred embodiments of the present invention will be described in detail as follows, however, in addition to these detailed descriptions, the present invention can also be widely implemented in other embodiments, and the scope of the present invention is not limited, it is defined in the appended claims The limited scope of protection prevails.

本发明提出一种光电元件的封装模块,请参考图2,此一封装模块包含一散热基板203,其散热基板可为铜、镍、银、铅、金或前述金属合金,或是铜-钼-铜(CuMoCu)、钨-铜(WCu)、铝碳化硅(AlSiC)、氮化铝(AlN)、硅(Si)、氧化铍(BeO)、金刚石或其他膨胀系数与其多个半导体发光晶粒相近的金属材料。一介电层204位于前述的散热基板203上方,具有多个凹处205用以露出部分的前述的散热基板203,其介电层204材料可为聚邻苯二甲酰胺(Polyphthalamide;PPA)或聚丁炔(PPB)。多个半导体发光晶粒206位于前述的介电层204的凹处205并固定于前述的散热基板上,且该半导体发光晶粒206可为打线接合方式或覆晶方式。一具有多个孔洞202的印刷电路板201,其孔洞202相对应于前述的介电层204的凹处205,覆盖在前述的介电层204上并露出前述的多个半导体发光晶粒206。多条金属导线207将前述的多个半导体发光晶粒206与前述的印刷电路板201电性连接,以及一透明胶材208用以包覆前述的多个半导体发光晶粒206与前述的多条金属导线207。前述的透明胶材208可包含光转换材料209,且前述的光转换材料209可为荧光粉,其包含硅酸盐类、氧化物族系、氮化物族系或是硫化物族系。The present invention proposes a packaging module for optoelectronic components, please refer to Figure 2, this packaging module includes a heat dissipation substrate 203, the heat dissipation substrate can be copper, nickel, silver, lead, gold or the aforementioned metal alloys, or copper-molybdenum - Copper (CuMoCu), tungsten-copper (WCu), aluminum silicon carbide (AlSiC), aluminum nitride (AlN), silicon (Si), beryllium oxide (BeO), diamond or other expansion coefficients with multiple semiconductor light emitting grains similar metal materials. A dielectric layer 204 is located above the aforementioned heat dissipation substrate 203, and has a plurality of recesses 205 for exposing part of the aforementioned heat dissipation substrate 203. The material of the dielectric layer 204 can be polyphthalamide (Polyphthalamide; PPA) or Polybutyne (PPB). A plurality of semiconductor light-emitting dies 206 are located in the recess 205 of the aforementioned dielectric layer 204 and fixed on the aforementioned heat dissipation substrate, and the semiconductor light-emitting dies 206 can be wire-bonded or flip-chip. A printed circuit board 201 with a plurality of holes 202 corresponding to the recesses 205 of the aforementioned dielectric layer 204 covers the aforementioned dielectric layer 204 and exposes the aforementioned plurality of semiconductor light emitting crystals 206 . A plurality of metal wires 207 electrically connect the aforementioned plurality of semiconductor light-emitting dies 206 to the aforementioned printed circuit board 201, and a transparent adhesive material 208 is used to cover the aforementioned plurality of semiconductor light-emitting dies 206 and the aforementioned plurality of Metal wire 207 . The aforementioned transparent adhesive material 208 may include a light conversion material 209 , and the aforementioned light conversion material 209 may be phosphor powder, which includes silicates, oxides, nitrides, or sulfides.

本发明公开一种光电元件的封装模块制造流程,请参考图3所示,其包含:The invention discloses a manufacturing process of a packaging module for photoelectric components, please refer to Figure 3, which includes:

步骤1(301):提供一散热基板;Step 1 (301): providing a heat dissipation substrate;

步骤2(302):以射出成型技术形成一介电层于前述的散热基板上,其中前述的介电层包含多个凹处并露出部分的散热基板;Step 2 (302): forming a dielectric layer on the aforementioned heat dissipation substrate by injection molding technology, wherein the aforementioned dielectric layer includes a plurality of recesses and exposes part of the heat dissipation substrate;

步骤3(303):将多个半导体发光晶粒分别放置于各前述介电层的凹处并固定于前述的散热基板上;Step 3 (303): placing a plurality of semiconductor light-emitting crystal grains in the recesses of the aforementioned dielectric layers and fixing them on the aforementioned heat dissipation substrate;

步骤4(304):将一具有孔洞的印刷电路板以孔洞对应前述的介电层凹口后覆盖于前述的介电层上;Step 4 (304): covering a printed circuit board with holes on the aforementioned dielectric layer with the holes corresponding to the notches of the aforementioned dielectric layer;

步骤5(305):再以金属导线电性连接前述的多个半导体发光晶粒与前述的印刷电路板;Step 5 (305): electrically connecting the aforementioned plurality of semiconductor light-emitting dies and the aforementioned printed circuit board with metal wires;

步骤6(306):最后以透明胶材覆盖前述的多个半导体发光晶粒与前述的金属导线上。Step 6 (306): Finally, cover the aforementioned plurality of semiconductor light-emitting dies and the aforementioned metal wires with a transparent adhesive material.

光电元件的封装模块在制造过程中,可能因上述各工艺步骤使用的高低温度有所变异时,其元件之间可能因材料的膨胀系数差异而使得模块在尚未完成之前已先受热应力的变形损害,其制造流程可因使用的温度高低而变动程序,并且以高温度至低温度的程序来降低热应力的影响。During the manufacturing process of the packaging module of optoelectronic components, when the high and low temperatures used in the above-mentioned process steps may vary, the components may be damaged by the deformation of thermal stress before the completion of the module due to the difference in the expansion coefficient of the material. , the manufacturing process can change the program due to the temperature used, and the program from high temperature to low temperature can reduce the influence of thermal stress.

本发明公开一种光电元件的封装模块制造方法,其步骤包含:请参考图4(b)所示,为了提高上述的封装模块的散热问题,本发明提供一散热基板改善封装模块过热的问题,其散热基板403可为铜、镍、银、铅、金或前述金属合金,或是铜-钼-铜(CuMoCu)、钨-铜(WCu)、铝碳化硅(AlSiC)、氮化铝(AlN)、硅(Si)、氧化铍(BeO)、金刚石或其他膨胀系数与其多个半导体发光晶粒相近的金属材料,再以射出成型技术形成一介电层404于前述的散热基板上,其介电层404的凹处405为一中空反射体,可做为材料间热应力的缓冲层及反射杯,并增加半导体发光晶粒的亮度,其介电层404材料可为聚邻苯二甲酰胺(Polyphthalamide;PPA)或聚丁炔(PPB)。一般射出成型(Injection Molding)程序主要有五个程序,(1)预热阶段(Preheating):此阶段包括塑胶的预先烘料、预热以及模具加热。预先烘料即事先将塑料以烘料机加热至低于玻璃转移温度(Glass TransitionTemperature)约10~15℃,维持一段时间已去除塑料中的水分。预热及预先加热射出成型机的螺杆,再转动螺杆将塑料挤入柱塞中准备塑料的射出。此时同时也加热模具以达到射出时的模具温度。(2)填充阶段(Filling):利用油压压力推动螺杆或是柱塞,将熔融的塑料挤出,射入模具里,经由浇道、流道、进口入口模穴,充填满整个模穴全部空间。(3)保压阶段(Packing):在塑化完全充满模穴后,施与高压以注入更多塑料,保压目的有二:(a)充填完成后,避免塑料因为冷却凝固而倒流。(b)使模穴中塑料维持高压,塑料与模壁间不会因为冷却收缩而分开,保持彼此紧贴,让成型品更为致密,使塑料能完全复制模穴中形状不因收缩而失真。(4)冷却阶段(cooling):等待模穴中塑料完全冷却至模具温度,使塑料能够完全固化,达到一定强度,避免开模时因塑料沾黏模具而产生变形。(5)开模阶段(Mold Open):打开模具,将成型品由拉料销拉出固定侧模面,接着以顶出销顶出可动侧模面,使成型品自然掉落。重复循环(1)~(5)五个步骤,为整个射出成型的循环周期。The invention discloses a method for manufacturing a packaging module of a photoelectric component. The steps include: Please refer to FIG. Its heat dissipation substrate 403 can be copper, nickel, silver, lead, gold or the aforementioned metal alloys, or copper-molybdenum-copper (CuMoCu), tungsten-copper (WCu), aluminum silicon carbide (AlSiC), aluminum nitride (AlN ), silicon (Si), beryllium oxide (BeO), diamond or other metal materials with a coefficient of expansion similar to its multiple semiconductor light-emitting crystal grains, and then form a dielectric layer 404 on the aforementioned heat dissipation substrate by injection molding technology. The recess 405 of the electrical layer 404 is a hollow reflector, which can be used as a buffer layer and reflective cup for thermal stress between materials, and increases the brightness of semiconductor light-emitting crystal grains. The material of the dielectric layer 404 can be polyphthalamide (Polyphthalamide; PPA) or polybutyne (PPB). The general injection molding (Injection Molding) procedure mainly has five procedures, (1) Preheating stage (Preheating): This stage includes plastic pre-baking, preheating and mold heating. Pre-baking means heating the plastic with a drying machine to about 10-15°C lower than the Glass Transition Temperature (Glass Transition Temperature), and maintaining it for a period of time to remove the moisture in the plastic. Preheat and preheat the screw of the injection molding machine, and then turn the screw to squeeze the plastic into the plunger to prepare the plastic for injection. At this time, the mold is also heated to reach the mold temperature during injection. (2) Filling stage (Filling): use hydraulic pressure to push the screw or plunger, extrude the molten plastic, inject it into the mold, and fill the entire cavity through the runner, runner, and inlet cavity. space. (3) Packing stage: After the mold cavity is completely filled with plasticization, high pressure is applied to inject more plastic. The purpose of packing is twofold: (a) After filling is completed, the plastic will not flow back due to cooling and solidification. (b) Keep the plastic in the mold cavity at high pressure, the plastic and the mold wall will not separate due to cooling and shrinkage, and keep them close to each other, making the molded product more compact, so that the plastic can completely replicate the shape of the mold cavity without distortion due to shrinkage . (4) Cooling stage (cooling): Wait for the plastic in the mold cavity to completely cool down to the mold temperature, so that the plastic can be completely solidified and reach a certain strength, and avoid deformation caused by the plastic sticking to the mold when the mold is opened. (5) Mold Open: Open the mold, pull the molded product out of the fixed side mold surface by the pull pin, and then push out the movable side mold surface with the ejector pin, so that the molded product falls naturally. Repeat the five steps of (1) to (5) to form the entire injection molding cycle.

请参考图4(c)所示,提供一具有多孔洞的印刷电路板401以环氧树脂(epoxy)为黏着剂黏着于前述的介电层404上方。前述一具多孔洞的印刷电路板401,其基本制作技术可分为减去法(Subtractive)及加成法(Additive)两类过程,另外多层制作技术包含积层法及增层法两种。减去法是利用化学品或机械将空白的电路板(即铺有完整一块的金属箔的电路板)上不需要的地方除去,余下的地方便是所需要的电路。而加成法现在普遍是在一块预先镀上薄铜的基板上,覆盖光阻剂(D/F),经紫外光曝光再显影,把需要的地方露出,然后利用电镀把线路板上正式线路铜厚增厚到所需要的规格,再镀上一层抗蚀刻阻剂-金属薄锡,最后除去光阻剂(此工艺称为去膜),再把光阻剂下的铜箔层蚀刻掉。积层法是制作多层印刷电路板的方法之一,是在制作内层后才包上外层,再把外层以减去法或加成法所处理,不断重复积层的动作,可以得到的多层印刷电路板则为顺序积层法。增层法是制作多层印刷电路板的方法之一,顾名思义是把印刷电路板一层一层的加上。每加上一层就处理至所需的形状。选择上述一种印刷电路板的制造过程并完成后,其孔洞最好在电路布局及电镀加工之前作业完成,可减少钻孔破坏电路分布及表面的电镀层或因产生应力而使板面受损,其孔洞可用CNC钻孔方式进行,且前述的孔洞402的大小必须与前述的介电层凹处的凹口相符,请参考图4(a)所示。Referring to FIG. 4( c ), a printed circuit board 401 with holes is provided and adhered on the above dielectric layer 404 with epoxy as an adhesive. The aforementioned printed circuit board 401 with multiple holes can be divided into two types of processes, the subtractive method and the additive method. In addition, the multi-layer manufacturing technology includes two types: the build-up method and the layer-up method. . The subtraction method is to use chemicals or machinery to remove unnecessary places on a blank circuit board (that is, a circuit board covered with a complete piece of metal foil), and the remaining place is the required circuit. The additive method is now generally on a substrate that is pre-plated with thin copper, covered with photoresist (D/F), exposed to ultraviolet light and then developed, exposing the required place, and then using electroplating to complete the official circuit on the circuit board. The copper thickness is increased to the required specifications, and then coated with a layer of anti-etching resist-metal thin tin, and finally the photoresist is removed (this process is called film removal), and then the copper foil layer under the photoresist is etched away . The lamination method is one of the methods for making multi-layer printed circuit boards. It is to wrap the outer layer after the inner layer is made, and then treat the outer layer with the subtractive method or the additive method, and repeat the lamination action continuously. The resulting multilayer printed circuit board is sequential build-up. The build-up method is one of the methods for making multi-layer printed circuit boards. As the name implies, the printed circuit boards are added layer by layer. Each additional layer is processed to the desired shape. After selecting one of the above-mentioned printed circuit board manufacturing processes and completing them, the holes are preferably completed before the circuit layout and electroplating processing, which can reduce the damage to the circuit distribution and surface plating layer caused by drilling holes or damage the board surface due to stress. , the hole can be drilled by CNC, and the size of the aforementioned hole 402 must match the notch of the aforementioned dielectric layer recess, as shown in FIG. 4(a).

请参考图4(d)所示,将多个半导体发光晶粒406使用银胶或共晶接合方式固定于前述的散热基板403上,前述的半导体发光晶粒406可为发光二极管、激光发光二极管或光感测晶粒。Please refer to FIG. 4 (d), a plurality of semiconductor light emitting crystal grains 406 are fixed on the aforementioned heat dissipation substrate 403 by using silver glue or eutectic bonding. The aforementioned semiconductor light emitting crystal grains 406 can be light emitting diodes, laser light emitting diodes or light-sensing die.

请参考图4(e)所示,多条金属导线407经由打线接合(wire bonding)技术将前述的半导体发光晶粒406与前述的印刷电路板401电性连接,前述的金属导线407可为金线、银线、铜线或是铝线。Please refer to FIG. 4(e), a plurality of metal wires 407 electrically connect the aforementioned semiconductor light-emitting die 406 to the aforementioned printed circuit board 401 via wire bonding (wire bonding) technology, and the aforementioned metal wires 407 can be Gold, silver, copper or aluminum wire.

最后,使用透明胶材408通过转移成型(transfer-molding)或是注入成型(inject-molding)等方式覆盖在半导体发光晶粒406及多条金属导线407上做为一保护层,其透明胶材408的材质可为环氧树脂(epoxy)或是硅胶(silicone gel)。若单独使用透明胶材包覆前述的多个半导体发光晶粒406与前述的多条金属导线407,使得前述的半导体发光晶粒406仅发射出单色波长的电磁辐射波长,也可由前述的透明胶材包含光转换材料409,前述的光转换材料409可为荧光粉,由此前述荧光粉可被激发而产生第二波长并和半导体发光晶粒406产生的一次波长混合而形成白光或是其他多波长的电磁辐射波长。前述的荧光粉包含硅酸盐类、氧化物族系、氮化物族系或是硫化物族系。请参考图4(f)所示。Finally, the transparent adhesive material 408 is used as a protective layer to cover the semiconductor light-emitting die 406 and the plurality of metal wires 407 by means of transfer-molding or injection-molding. The material of 408 can be epoxy resin (epoxy) or silicone gel (silicone gel). If the aforementioned plurality of semiconductor light-emitting crystal grains 406 and the aforementioned plurality of metal wires 407 are coated with a transparent adhesive material alone, so that the aforementioned semiconductor light-emitting crystal grains 406 only emit electromagnetic radiation wavelengths of monochromatic wavelengths, the aforementioned transparent The adhesive material contains a light conversion material 409, and the aforementioned light conversion material 409 can be a phosphor, so that the aforementioned phosphor can be excited to generate a second wavelength and mix with the primary wavelength generated by the semiconductor light-emitting crystal 406 to form white light or other Multiple wavelengths of electromagnetic radiation wavelengths. The aforementioned phosphors include silicates, oxides, nitrides or sulfides. Please refer to Figure 4(f).

另外,可在封胶程序上先包覆第一层含有光转换材料409的胶材后再覆盖第二层透明胶材408,或是先包覆第一层透明胶材408后再覆盖第二层含有光转换材料409的胶材,同样前述光转换材料可为荧光粉因被激发而产生第二波长并和半导体发光晶粒406产生的一次波长混合而形成白光或是其他多波长的电磁辐射波长,请参考图4(g)所示。In addition, in the sealing process, the first layer of adhesive material containing the light conversion material 409 can be coated first, and then the second layer of transparent adhesive material 408 can be covered, or the first layer of transparent adhesive material 408 can be coated first, and then the second layer of transparent adhesive material 408 can be covered. The layer contains a light-converting material 409, and the above-mentioned light-converting material can also be excited to generate a second wavelength and mix with the primary wavelength generated by the semiconductor light-emitting crystal grain 406 to form white light or other multi-wavelength electromagnetic radiation. wavelength, please refer to Figure 4(g).

其中前述的介电层404具有多个凹处405以露出部分的前述的散热基板403,前述的印刷电路板401具有多个孔洞402,其多个孔洞402与前述的介电层404的多个凹处405相对应,以及前述的多个半导体发光晶粒406对应于前述的介电层404的凹处405内。Wherein the aforementioned dielectric layer 404 has a plurality of recesses 405 to expose part of the aforementioned heat dissipation substrate 403, the aforementioned printed circuit board 401 has a plurality of holes 402, the plurality of holes 402 and the plurality of holes 402 of the aforementioned dielectric layer 404 The recess 405 corresponds, and the aforementioned plurality of semiconductor light-emitting dies 406 correspond to the aforementioned recess 405 of the dielectric layer 404 .

考虑到光电元件封装模块在制造过程时,可能因各工艺步骤的高低温度有所变异时,使得其元件之间可能因材料的膨胀系数差异而使得模块在尚未完成之前已先受热应力的变形损害,本发明还公开另外二种光电元件的封装模块制造方法,其中第一种光电元件的封装模块制造方法的步骤包含:请参考图5(b)所示,为了提高封装模块的散热问题,本发明提供一散热基板改善封装模块过热的问题,其散热基板503可为铜、镍、银、铅、金或前述金属合金,或是铜-钼-铜(CuMoCu)、钨-铜(WCu)、铝碳化硅(AlSiC)、氮化铝(AlN)、硅(Si)、氧化铍(BeO)、金刚石或其他膨胀系数与其多个半导体发光晶粒相近的金属材料,再以射出成型技术形成一介电层504于前述的散热基板503上,前述的介电层504具有多个凹处505以露出部分的前述的散热基板503,且前述的介电层504的凹处505为一中空反射体,可做为材料间热应力的缓冲层及反射杯,并增加半导体发光晶粒的亮度,其材料可为聚邻苯二甲酰胺(Polyphthalamide;PPA)或聚丁炔(PPB)。一般射出成型程序主要有五个程序,(1)预热阶段(Preheating):此阶段包括塑胶的预先烘料、预热以及模具加热。预先烘料即事先将塑料以烘料机加热至低于玻璃转移温度(Glass Transition Temperature)约10~15℃,维持一段时间已去除塑料中的水分。预热及预先加热射出成型机的螺杆,再转动螺杆将塑料挤入柱塞中准备塑料的射出。此时同时也加热模具以达到射出时的模具温度。(2)填充阶段(Filling):利用油压压力推动螺杆或是柱塞,将熔融的塑料挤出,射入模具里,经由浇道、流道、进口入口模穴,充填满整个模穴全部空间。(3)保压阶段(Packing):在塑化完全充满模穴后,施与高压以注入更多塑料,保压目的有二:(a)充填完成后,避免塑料因为冷却凝固而倒流。(b)使模穴中塑料维持高压,塑料与模壁间不会因为冷却收缩而分开,保持彼此紧贴,让成型品更为致密,使塑料能完全复制模穴中形状不因收缩而失真。(4)冷却阶段(Cooling):等待模穴中塑料完全冷却至模具温度,使塑料能够完全固化,达到一定强度,避免开模时因塑料沾黏模具而产生变形。(5)开模阶段(Mold Open):打开模具,将成型品由拉料销拉出固定侧模面,接着以顶出销顶出可动侧模面,使成型品自然掉落。重复循环(1)~(5)五个步骤,为整个射出成型的循环周期。Considering that during the manufacturing process of the photoelectric component packaging module, the temperature may vary due to the high and low temperatures of each process step, so that the components may be damaged by thermal stress deformation before the completion of the module due to the difference in the expansion coefficient of the material , the present invention also discloses two other manufacturing methods for packaging modules of optoelectronic components, wherein the steps of the first manufacturing method of packaging modules for optoelectronic components include: Please refer to Figure 5(b), in order to improve the heat dissipation of the packaging modules, this The invention provides a heat dissipation substrate to improve the overheating of the packaged module. The heat dissipation substrate 503 can be copper, nickel, silver, lead, gold or the aforementioned metal alloys, or copper-molybdenum-copper (CuMoCu), tungsten-copper (WCu), Aluminum silicon carbide (AlSiC), aluminum nitride (AlN), silicon (Si), beryllium oxide (BeO), diamond or other metal materials with expansion coefficients similar to their multiple semiconductor light-emitting grains, and then form a medium by injection molding technology The electrical layer 504 is on the aforementioned heat dissipation substrate 503, the aforementioned dielectric layer 504 has a plurality of recesses 505 to expose part of the aforementioned heat dissipation substrate 503, and the aforementioned recesses 505 of the dielectric layer 504 are a hollow reflector, It can be used as a buffer layer and reflective cup for thermal stress between materials, and increase the brightness of semiconductor light-emitting grains. The material can be polyphthalamide (PPA) or polybutylene (PPB). There are five main procedures in the general injection molding process, (1) Preheating stage (Preheating): This stage includes plastic pre-baking, preheating and mold heating. Pre-baking is to heat the plastic in a drying machine to about 10-15°C lower than the Glass Transition Temperature, and keep it for a period of time to remove the moisture in the plastic. Preheat and preheat the screw of the injection molding machine, and then turn the screw to squeeze the plastic into the plunger to prepare the plastic for injection. At this time, the mold is also heated to reach the mold temperature during injection. (2) Filling stage (Filling): use hydraulic pressure to push the screw or plunger, extrude the molten plastic, inject it into the mold, and fill the entire cavity through the runner, runner, and inlet cavity. space. (3) Packing stage: After the mold cavity is completely filled with plasticization, high pressure is applied to inject more plastic. The purpose of packing is twofold: (a) After filling is completed, the plastic will not flow back due to cooling and solidification. (b) Keep the plastic in the mold cavity at high pressure, the plastic and the mold wall will not separate due to cooling and shrinkage, and keep them close to each other, making the molded product more compact, so that the plastic can completely replicate the shape of the mold cavity without distortion due to shrinkage . (4) Cooling stage (Cooling): Wait for the plastic in the mold cavity to completely cool down to the mold temperature, so that the plastic can be completely solidified and reach a certain strength, and avoid deformation caused by the plastic sticking to the mold when the mold is opened. (5) Mold Open: Open the mold, pull the molded product out of the fixed side mold surface by the pull pin, and then push out the movable side mold surface with the ejector pin, so that the molded product falls naturally. Repeat the five steps of (1) to (5) to form the entire injection molding cycle.

请参考图5(c)所示,将多个半导体发光晶粒506使用银胶或共晶接合方式固定于散热基板503上,前述的半导体发光晶粒506可为发光二极管、激光发光二极管或光感测晶粒。Please refer to FIG. 5(c), a plurality of semiconductor light-emitting crystal grains 506 are fixed on the heat dissipation substrate 503 using silver glue or eutectic bonding. The aforementioned semiconductor light-emitting crystal grains 506 can be light-emitting diodes, laser light-emitting diodes or sensing die.

请参考图5(d)所示,提供一具有多孔的印刷电路板501以环氧树脂(epoxy)为黏着剂黏着覆盖于前述的介电层504上方,其多个孔洞502与前述的介电层504的多个凹处505相对应并露出多个半导体发光晶粒506。前述具有多孔的印刷电路板,其基本制作技术可分为减去法(Subtractive)及加成法(Additive)两类过程,另外多层制作技术包含积层法及增层法两种。减去法是利用化学品或机械将空白的电路板(即铺有完整一块的金属箔的电路板)上不需要的地方除去,余下的地方便是所需要的电路。而加成法现在普遍是在一块预先镀上薄铜的基板上,覆盖光阻剂(D/F),经紫外光曝光再显影,把需要的地方露出,然后利用电镀把线路板上正式线路铜厚增厚到所需要的规格,再镀上一层抗蚀刻阻剂-金属薄锡,最后除去光阻剂(此工艺称为去膜),再把光阻剂下的铜箔层蚀刻掉。积层法是制作多层印刷电路板的方法之一,是在制作内层后才包上外层,再把外层以减去法或加成法所处理,不断重复积层法的动作,可以得到的多层印刷电路板则为顺序积层法。增层法是制作多层印刷电路板的方法之一,顾名思义是把印刷电路板一层一层的加上。每加上一层就处理至所需的形状。选择上述一种印刷电路板的制造过程并完成后,其孔洞最好在电路布局及电镀加工之前作业完成,可减少钻孔破坏电路分布及表面的电镀层或因产生应力而使板面受损,其孔洞可用CNC钻孔方式进行,且前述的孔洞501的大小必须与前述的介电层凹处的凹口相符,如请参考图5(a)所示。Please refer to Fig. 5 (d) shown, provide a printed circuit board 501 with holes and use epoxy resin (epoxy) as an adhesive to adhere and cover above the aforementioned dielectric layer 504, and its plurality of holes 502 and the aforementioned dielectric The plurality of recesses 505 of the layer 504 correspond to and expose a plurality of semiconductor light emitting dies 506 . The above-mentioned printed circuit board with holes can be divided into two basic manufacturing techniques: subtractive method and additive method. In addition, multi-layer manufacturing technology includes two types: build-up method and build-up method. The subtraction method is to use chemicals or machinery to remove unnecessary places on a blank circuit board (that is, a circuit board covered with a complete piece of metal foil), and the remaining place is the required circuit. The additive method is now generally on a substrate that is pre-plated with thin copper, covered with photoresist (D/F), exposed to ultraviolet light and then developed, exposing the required place, and then using electroplating to complete the official circuit on the circuit board. The copper thickness is increased to the required specifications, and then coated with a layer of anti-etching resist-metal thin tin, and finally the photoresist is removed (this process is called film removal), and then the copper foil layer under the photoresist is etched away . The lamination method is one of the methods for making multilayer printed circuit boards. The outer layer is wrapped after the inner layer is made, and then the outer layer is processed by subtraction or addition, and the action of the lamination method is repeated continuously. The multilayer printed circuit boards that can be obtained are sequential build-up methods. The build-up method is one of the methods for making multi-layer printed circuit boards. As the name implies, the printed circuit boards are added layer by layer. Each additional layer is processed to the desired shape. After selecting one of the above-mentioned printed circuit board manufacturing processes and completing them, the holes are preferably completed before the circuit layout and electroplating processing, which can reduce the damage to the circuit distribution and surface plating layer caused by drilling holes or damage the board surface due to stress. The hole can be drilled by CNC, and the size of the aforementioned hole 501 must match the notch of the aforementioned dielectric layer recess, as shown in FIG. 5( a ).

请参考图5(e)所示,多条金属导线507经由打线接合(wire bonding)技术将前述的半导体发光晶粒506与前述的印刷电路板502电性连接,前述的金属导线507可为金线、银线、铜线或是铝线。Please refer to FIG. 5(e), a plurality of metal wires 507 are electrically connected to the aforementioned semiconductor light-emitting die 506 and the aforementioned printed circuit board 502 via wire bonding (wire bonding), and the aforementioned metal wires 507 can be Gold, silver, copper or aluminum wire.

最后,使用透明胶材508通过转移成型(transfer-molding)或是注入成型(inject-molding)等方式覆盖在半导体发光晶粒506及多条金属导线507上做为一保护层,其透明胶材508的材质可为环氧树脂(epoxy)或是硅胶(silicone gel)。若单独使用透明胶材包覆前述的多个半导体发光晶粒506与前述的多条金属导线507,使得前述的半导体发光晶粒506仅发射出单色波长的电磁辐射波长,也可由前述的透明胶材包含光转换材料509,前述的光转换材料509可为荧光粉,由此前述荧光粉可被激发而产生第二波长并和半导体发光晶粒506产生的一次波长混合而形成白光或是其他多波长的电磁辐射波长。前述的荧光粉包含硅酸盐类、氧化物族系、氮化物族系或是硫化物族系。请参考图5(f)所示。Finally, the transparent adhesive material 508 is used as a protective layer to cover the semiconductor light-emitting die 506 and the plurality of metal wires 507 by means of transfer-molding or injection-molding. The material of the 508 can be epoxy resin (epoxy) or silicone gel (silicone gel). If the aforementioned plurality of semiconductor light-emitting crystal grains 506 and the aforementioned plurality of metal wires 507 are coated with a transparent adhesive material alone, so that the aforementioned semiconductor light-emitting crystal grains 506 only emit electromagnetic radiation wavelengths of monochromatic wavelengths, the aforementioned transparent The adhesive material contains a light conversion material 509, and the aforementioned light conversion material 509 can be a phosphor, so that the aforementioned phosphor can be excited to generate a second wavelength and mix with the primary wavelength generated by the semiconductor light-emitting crystal 506 to form white light or other Multiple wavelengths of electromagnetic radiation wavelengths. The aforementioned phosphors include silicates, oxides, nitrides or sulfides. Please refer to Figure 5(f).

另外,可在封胶程序上先包覆第一层含有光转换材料509的胶材后再覆盖第二层透明胶材508,或是先包覆第一层透明胶材508后再覆盖第二层含有光转换材料509的胶材,同样前述光转换材料可为荧光粉因被激发而产生第二波长并和半导体发光晶粒506产生的一次波长混合而形成白光或是其他多波长的电磁辐射波长,请参考图5(g)所示。In addition, in the sealing process, the first layer of adhesive material containing the light conversion material 509 can be coated first, and then the second layer of transparent adhesive material 508 can be covered, or the first layer of transparent adhesive material 508 can be coated first, and then the second layer of transparent adhesive material 508 can be covered. The layer contains a light-converting material 509, and the above-mentioned light-converting material can also be excited to generate a second wavelength and mix with the primary wavelength generated by the semiconductor light-emitting crystal grain 506 to form white light or other multi-wavelength electromagnetic radiation. For the wavelength, please refer to Figure 5(g).

第二种光电元件的封装模块制造方法的步骤包含:请参考图6(b)所示,为了提高封装模块的散热问题,本发明提供一散热基板改善封装模块过热的问题,其散热基板603可为铜、镍、银、铅、金或前述金属合金,或是铜-钼-铜(CuMoCu)、钨-铜(WCu)、铝碳化硅(AlSiC)、氮化铝(AlN)、硅(Si)、氧化铍(BeO)、金刚石或其他膨胀系数与其多个半导体发光晶粒606相近的金属材料,再将多个半导体发光晶粒606使用银胶或共晶接合方式固定于散热基板603上,前述的半导体发光晶粒606可为发光二极管、激光发光二极管或光感测晶粒。The steps of the manufacturing method of the packaging module of the second kind of photoelectric element include: Please refer to Fig. 6 (b) shown, in order to improve the heat dissipation problem of the packaging module, the present invention provides a heat dissipation substrate to improve the problem of overheating of the packaging module, and its heat dissipation substrate 603 can be It is copper, nickel, silver, lead, gold or the aforementioned metal alloys, or copper-molybdenum-copper (CuMoCu), tungsten-copper (WCu), aluminum silicon carbide (AlSiC), aluminum nitride (AlN), silicon (Si ), beryllium oxide (BeO), diamond or other metal materials with expansion coefficients similar to the plurality of semiconductor light-emitting crystal grains 606, and then the multiple semiconductor light-emitting crystal grains 606 are fixed on the heat dissipation substrate 603 using silver glue or eutectic bonding, The aforementioned semiconductor light-emitting die 606 can be a light-emitting diode, a laser light-emitting diode, or a light-sensing die.

请参考图6(c)所示,以射出成型技术形成一介电层604于前述的散热基板603上,其介电层604的凹处605为一中空反射体,可做为材料间热应力的缓冲层及反射杯,并增加半导体发光晶粒606的亮度,其材料可为聚邻苯二甲酰胺(Polyphthalamide;PPA)或聚丁炔(PPB)且前述的介电层604包含多个凹处605,前述的凹处605分别对应且露出前述的半导体发光晶粒606。一般射出成型程序主要有五个程序,(1)预热阶段(Preheating):此阶段包括塑胶的预先烘料、预热以及模具加热。预先烘料即事先将塑料以烘料机加热至低于玻璃转移温度(Glass Transition Temperature)约10~15℃,维持一段时间已去除塑料中的水分。预热及预先加热射出成型机的螺杆,再转动螺杆将塑料挤入柱塞中准备塑料的射出。此时同时也加热模具以达到射出时的模具温度。(2)填充阶段(Filling):利用油压压力推动螺杆或是柱塞,将熔融的塑料挤出,射入模具里,经由浇道、流道、进口入口模穴,充填满整个模穴全部空间。(3)保压阶段(Packing):在塑化完全充满模穴后,施与高压以注入更多塑料,保压目的有二:(a)充填完成后,避免塑料因为冷却凝固而倒流。(b)使模穴中塑料维持高压,塑料与模壁间不会因为冷却收缩而分开,保持彼此紧贴,让成型品更为致密,使塑料能完全复制模穴中形状不因收缩而失真。(4)冷却阶段(Cooling):等待模穴中塑料完全冷却至模具温度,使塑料能够完全固化,达到一定强度,避免开模时因塑料沾黏模具而产生变形。(5)开模阶段(Mold Open):打开模具,将成型品由拉料销拉出固定侧模面,接着以顶出销顶出可动侧模面,使成型品自然掉落。重复循环(1)~(5)五个步骤,为整个射出成型的循环周期。Please refer to FIG. 6(c), a dielectric layer 604 is formed on the aforementioned heat dissipation substrate 603 by injection molding technology, and the recess 605 of the dielectric layer 604 is a hollow reflector, which can be used as a thermal stress between materials. The buffer layer and reflective cup, and increase the brightness of the semiconductor light-emitting grain 606, its material can be polyphthalamide (Polyphthalamide; PPA) or polybutyne (PPB) and the aforementioned dielectric layer 604 includes a plurality of concave At 605 , the aforementioned recesses 605 respectively correspond to and expose the aforementioned semiconductor light-emitting dies 606 . There are five main procedures in the general injection molding process, (1) Preheating stage (Preheating): This stage includes plastic pre-baking, preheating and mold heating. Pre-baking is to heat the plastic in a drying machine to about 10-15°C lower than the Glass Transition Temperature, and keep it for a period of time to remove the moisture in the plastic. Preheat and preheat the screw of the injection molding machine, and then turn the screw to squeeze the plastic into the plunger to prepare the plastic for injection. At this time, the mold is also heated to reach the mold temperature during injection. (2) Filling stage (Filling): use hydraulic pressure to push the screw or plunger, extrude the molten plastic, inject it into the mold, and fill the entire cavity through the runner, runner, and inlet cavity. space. (3) Packing stage: After the mold cavity is completely filled with plasticization, high pressure is applied to inject more plastic. The purpose of packing is twofold: (a) After filling is completed, the plastic will not flow back due to cooling and solidification. (b) Keep the plastic in the mold cavity at high pressure, the plastic and the mold wall will not separate due to cooling and shrinkage, and keep them close to each other, making the molded product more compact, so that the plastic can completely replicate the shape of the mold cavity without distortion due to shrinkage . (4) Cooling stage (Cooling): Wait for the plastic in the mold cavity to completely cool down to the mold temperature, so that the plastic can be completely solidified and reach a certain strength, and avoid deformation caused by the plastic sticking to the mold when the mold is opened. (5) Mold Open: Open the mold, pull the molded product out of the fixed side mold surface by the pull pin, and then push out the movable side mold surface with the ejector pin, so that the molded product falls naturally. Repeat the five steps of (1) to (5) to form the entire injection molding cycle.

请参考图6(d)所示,提供一具多个孔洞的印刷电路板601,前述的孔洞602相对应于前述的介电层604的凹处605的凹口,以环氧树脂(epoxy)为黏着剂黏着覆盖于前述的介电层604上方,露出前述的半导体发光晶粒606。前述的一具多孔洞602的印刷电路板601,其基本制作技术可分为减去法(Subtractive)及加成法(Additive)两类过程,另外多层制作技术包含积层法及增层法两种。减去法是利用化学品或机械将空白的电路板(即铺有完整一块的金属箔的电路板)上不需要的地方除去,余下的地方便是所需要的电路。而加成法现在普遍是在一块预先镀上薄铜的基板上,覆盖光阻剂(D/F),经紫外光曝光再显影,把需要的地方露出,然后利用电镀把线路板上正式线路铜厚增厚到所需要的规格,再镀上一层抗蚀刻阻剂-金属薄锡,最后除去光阻剂(此工艺称为去膜),再把光阻剂下的铜箔层蚀刻掉。积层法是制作多层印刷电路板的方法之一,是在制作内层后才包上外层,再把外层以减去法或加成法所处理,不断重复积层的动作,可以得到的多层印刷电路板则为顺序积层法。增层法是制作多层印刷电路板的方法之一,顾名思义是把印刷电路板一层一层的加上。每加上一层就处理至所需的形状。选择上述一种印刷电路板的制造过程并完成后,其孔洞最好在电路布局及电镀加工之前作业完成,可减少钻孔破坏电路分布及表面的电镀层或因产生应力而使板面受损,其孔洞可用CNC钻孔方式进行,且前述的孔洞的大小必须与介电层凹处的凹口相符,请参考图6(a)所示。Please refer to FIG. 6 (d), a printed circuit board 601 with a plurality of holes is provided, the aforementioned holes 602 correspond to the notches of the aforementioned recesses 605 of the dielectric layer 604, and epoxy resin (epoxy) The adhesive covers the aforementioned dielectric layer 604 to expose the aforementioned semiconductor light emitting die 606 . The aforementioned printed circuit board 601 with a plurality of holes 602 can be divided into two types of processes, the subtractive method and the additive method. In addition, the multi-layer manufacturing technology includes the build-up method and the layer-up method. two kinds. The subtraction method is to use chemicals or machinery to remove unnecessary places on a blank circuit board (that is, a circuit board covered with a complete piece of metal foil), and the remaining place is the required circuit. The additive method is now generally on a substrate that is pre-plated with thin copper, covered with photoresist (D/F), exposed to ultraviolet light and then developed, exposing the required place, and then using electroplating to complete the official circuit on the circuit board. The copper thickness is increased to the required specifications, and then coated with a layer of anti-etching resist-metal thin tin, and finally the photoresist is removed (this process is called film removal), and then the copper foil layer under the photoresist is etched away . The lamination method is one of the methods for making multi-layer printed circuit boards. It is to wrap the outer layer after the inner layer is made, and then treat the outer layer with the subtractive method or the additive method, and repeat the lamination action continuously. The resulting multilayer printed circuit board is sequential build-up. The build-up method is one of the methods for making multi-layer printed circuit boards. As the name implies, the printed circuit boards are added layer by layer. Each additional layer is processed to the desired shape. After selecting one of the above-mentioned printed circuit board manufacturing processes and completing them, the holes are preferably completed before the circuit layout and electroplating processing, which can reduce the damage to the circuit distribution and surface plating layer caused by drilling holes or damage the board surface due to stress. , the hole can be drilled by CNC, and the size of the aforementioned hole must match the notch of the dielectric layer, as shown in Figure 6(a).

请参考图6(e)所示,多条金属导线607经由打线接合(wire bonding)技术将前述的半导体发光晶粒606与前述的印刷电路板601电性连接,前述的金属导线607可为金线、银线、铜线或是铝线。Please refer to Figure 6(e), a plurality of metal wires 607 electrically connect the aforementioned semiconductor light-emitting die 606 to the aforementioned printed circuit board 601 via wire bonding (wire bonding) technology, and the aforementioned metal wires 607 can be Gold, silver, copper or aluminum wire.

最后,使用透明胶材608通过转移成型(transfer-molding)或是注入成型(iniect-molding)等方式覆盖在半导体发光晶粒606及多条金属导线607上做为一保护层,其透明胶材608的材质可为环氧树脂(epoxy)或是硅胶(silicone gel)。若单独使用透明胶材包覆前述的多个半导体发光晶粒606与前述的多条金属导线607,使得前述的半导体发光晶粒606仅发射出单色波长的电磁辐射波长,也可由前述的透明胶材包含光转换材料609,前述的光转换材料609可为荧光粉,由此前述荧光粉可被激发而产生第二波长并和半导体发光晶粒606产生的一次波长混合而形成白光或是其他多波长的电磁辐射波长。前述的荧光粉包含硅酸盐类、氧化物族系、氮化物族系或是硫化物族系。请参考图6(f)所示。Finally, the transparent adhesive material 608 is used as a protective layer to cover the semiconductor light-emitting die 606 and the plurality of metal wires 607 by means of transfer-molding or iniect-molding. The material of 608 can be epoxy resin (epoxy) or silicone gel (silicone gel). If the aforementioned plurality of semiconductor light-emitting crystal grains 606 and the aforementioned plurality of metal wires 607 are coated with a transparent adhesive material alone, so that the aforementioned semiconductor light-emitting crystal grains 606 only emit electromagnetic radiation wavelengths of monochromatic wavelengths, the aforementioned transparent The adhesive material contains a light conversion material 609, the aforementioned light conversion material 609 can be a phosphor powder, so the aforementioned phosphor powder can be excited to generate a second wavelength and mix with the primary wavelength generated by the semiconductor light-emitting crystal 606 to form white light or other Multiple wavelengths of electromagnetic radiation wavelengths. The aforementioned phosphors include silicates, oxides, nitrides or sulfides. Please refer to Figure 6(f).

另外,可在封胶程序上先包覆第一层含有光转换材料609的胶材后再覆盖第二层透明胶材608,或是先包覆第一层透明胶材608后再覆盖第二层含有光转换材料609的胶材,同样前述光转换材料可为荧光粉因被激发而产生第二波长并和半导体发光晶粒606产生的一次波长混合而形成白光或是其他多波长的电磁辐射波长,请参考图6(g)所示。In addition, in the sealing process, the first layer of adhesive material containing the light conversion material 609 can be coated first, and then the second layer of transparent adhesive material 608 can be covered, or the first layer of transparent adhesive material 608 can be coated first, and then the second layer can be covered. The layer contains a light-converting material 609 of glue, and the above-mentioned light-converting material can also be a phosphor powder that is excited to generate a second wavelength and mix with the primary wavelength generated by the semiconductor light-emitting crystal grain 606 to form white light or other multi-wavelength electromagnetic radiation For the wavelength, please refer to Figure 6(g).

前述的光电元件的封装模块其半导体发光晶粒除了以打线接合(wirebonding)方式外也可使用覆晶(Flip Chip)方式。一般半导体发光晶粒覆晶结构请参考图7(b)所示,子基座713上配置有焊垫(bonding pad)712,半导体发光晶粒710配置有凸块711,当半导体发光晶粒710倒覆于子基板713时,前述的凸块711会与其对应的焊垫(bonding pad)712相连接,而半导体发光晶粒710通过凸块711与焊垫712电性连接。In addition to the wire bonding method, the semiconductor light-emitting dies of the above-mentioned photoelectric component packaging module can also use a flip chip (Flip Chip) method. Please refer to FIG. 7 (b) for the flip-chip structure of the general semiconductor light-emitting die. The sub-base 713 is provided with a bonding pad 712, and the semiconductor light-emitting die 710 is provided with bumps 711. When the semiconductor light-emitting die 710 When overturned on the sub-substrate 713 , the aforementioned bumps 711 will be connected to their corresponding bonding pads (bonding pads) 712 , and the semiconductor light emitting die 710 is electrically connected to the bonding pads 712 through the bumps 711 .

其覆晶式光电元件的封装模块制造方法的步骤包含:请参考图7(c)所示,为了提高封装模块的散热问题,本发明提供一散热基板改善封装模块过热的问题,其散热基板703可为铜、镍、银、铅、金或前述金属合金,或是铜-钼-铜(CuMoCu)、钨-铜(WCu)、铝碳化硅(AlSiC)、氮化铝(AlN)、硅(Si)氧化铍(BeO)、金刚石或其他膨胀系数与其多个半导体发光晶粒相近的金属材料。再以射出成型技术形成一介电层704于前述的散热基板上,前述的介电层704具有多个凹处705以露出部分的前述的散热基板703,其介电层704的凹处705为一中空反射体,可做为材料间热应力的缓冲层及反射杯,并增加半导体发光晶粒的亮度,其材料可为聚邻苯二甲酰胺(Polyphthalamide;PPA)或聚丁炔(PPB)。一般射出成型程序主要有五个程序,(1)预热阶段(Preheating):此阶段包括塑胶的预先烘料、预热以及模具加热。预先烘料即事先将塑料以烘料机加热至低于玻璃转移温度(Glass Transition Temperature)约10~15℃,维持一段时间已去除塑料中的水分。预热及预先加热射出成型机的螺杆,再转动螺杆将塑料挤入柱塞中准备塑料的射出。此时同时也加热模具以达到射出时的模具温度。(2)填充阶段(Filling):利用油压压力推动螺杆或是柱塞,将熔融的塑料挤出,射入模具里,经由浇道、流道、进口入口模穴,充填满整个模穴全部空间。(3)保压阶段(Packing):在塑化完全充满模穴后,施与高压以注入更多塑料,保压目的有二:(a)充填完成后,避免塑料因为冷却凝固而倒流。(b)使模穴中塑料维持高压,塑料与模壁间不会因为冷却收缩而分开,保持彼此紧贴,让成型品更为致密,使塑料能完全复制模穴中形状不因收缩而失真。(4)冷却阶段(Cooling):等待模穴中塑料完全冷却至模具温度,使塑料能够完全固化,达到一定强度,避免开模时因塑料沾黏模具而产生变形。(5)开模阶段(Mold Open):打开模具,将成型品由拉料销拉出固定侧模面,接着以顶出销顶出可动侧模面,使成型品自然掉落。重复循环(1)~(5)五个步骤,为整个射出成型的循环周期。The steps of the manufacturing method of the packaging module of the flip-chip photoelectric component include: Please refer to FIG. It can be copper, nickel, silver, lead, gold, or alloys of the foregoing metals, or copper-molybdenum-copper (CuMoCu), tungsten-copper (WCu), aluminum silicon carbide (AlSiC), aluminum nitride (AlN), silicon ( Si) beryllium oxide (BeO), diamond or other metal materials with expansion coefficients similar to their multiple semiconductor luminescent grains. Then, a dielectric layer 704 is formed on the aforementioned heat dissipation substrate by injection molding technology. The aforementioned dielectric layer 704 has a plurality of recesses 705 to expose part of the aforementioned heat dissipation substrate 703. The recesses 705 of the dielectric layer 704 are A hollow reflector, which can be used as a buffer layer and reflective cup for thermal stress between materials, and increases the brightness of semiconductor light-emitting crystal grains, and its material can be polyphthalamide (Polyphthalamide; PPA) or polybutyne (PPB) . There are five main procedures in the general injection molding process, (1) Preheating stage (Preheating): This stage includes plastic pre-baking, preheating and mold heating. Pre-baking is to heat the plastic in a drying machine to about 10-15°C lower than the Glass Transition Temperature, and keep it for a period of time to remove the moisture in the plastic. Preheat and preheat the screw of the injection molding machine, and then turn the screw to squeeze the plastic into the plunger to prepare the plastic for injection. At this time, the mold is also heated to reach the mold temperature during injection. (2) Filling stage (Filling): use hydraulic pressure to push the screw or plunger, extrude the molten plastic, inject it into the mold, and fill the entire cavity through the runner, runner, and inlet cavity. space. (3) Packing stage: After the mold cavity is completely filled with plasticization, high pressure is applied to inject more plastic. The purpose of packing is twofold: (a) After filling is completed, the plastic will not flow back due to cooling and solidification. (b) Keep the plastic in the mold cavity at high pressure, the plastic and the mold wall will not separate due to cooling and shrinkage, and keep them close to each other, making the molded product more compact, so that the plastic can completely replicate the shape of the mold cavity without distortion due to shrinkage . (4) Cooling stage (Cooling): Wait for the plastic in the mold cavity to completely cool down to the mold temperature, so that the plastic can be completely solidified and reach a certain strength, and avoid deformation caused by the plastic sticking to the mold when the mold is opened. (5) Mold Open: Open the mold, pull the molded product out of the fixed side mold surface by the pull pin, and then push out the movable side mold surface with the ejector pin, so that the molded product falls naturally. Repeat the five steps of (1) to (5) to form the entire injection molding cycle.

请参考图7(d)所示,将多个覆晶半导体发光晶粒706使用银胶固定于散热基板703上,前述的半导体发光晶粒706可为发光二极管、激光发光二极管或光感测晶粒。Please refer to FIG. 7( d ), a plurality of flip-chip semiconductor light-emitting dies 706 are fixed on the heat dissipation substrate 703 with silver glue. grain.

请参考图7(e)所示,提供一具有多孔的印刷电路板701以环氧树脂(epoxy)为黏着剂黏着于前述的介电层704上方,其多个孔洞701与前述的介电层704的多个凹处705相对应并露出多个覆晶半导体发光晶粒706。前述具有多孔的印刷电路板,其基本制作技术可分为减去法(Subtractive)及加成法(Additive)两类过程,另外多层制作技术包含积层法及增层法两种。减去法是利用化学品或机械将空白的电路板(即铺有完整一块的金属箔的电路板)上不需要的地方除去,余下的地方便是所需要的电路。而加成法现在普遍是在一块预先镀上薄铜的基板上,覆盖光阻剂(D/F),经紫外光曝光再显影,把需要的地方露出,然后利用电镀把线路板上正式线路铜厚增厚到所需要的规格,再镀上一层抗蚀刻阻剂-金属薄锡,最后除去光阻剂(这工艺称为去膜),再把光阻剂下的铜箔层蚀刻掉。积层法是制作多层印刷电路板的方法之一,是在制作内层后才包上外层,再把外层以减去法或加成法所处理,不断重复积层的动作,可以得到的多层印刷电路板则为顺序积层法。增层法是制作多层印刷电路板的方法之一,顾名思义是把印刷电路板一层一层的加上。每加上一层就处理至所需的形状。选择上述一种印刷电路板的制造过程并完成后,其孔洞最好在电路布局及电镀加工之前作业完成,可减少钻孔破坏电路分布及表面的电镀层或因产生应力而使板面受损,其孔洞可用CNC钻孔方式进行,且前述的孔洞501的大小必须与介电层凹处的凹口相符,如请参考图7(a)所示。Please refer to Fig. 7 (e) shown, provide a printed circuit board 701 with holes and use epoxy resin (epoxy) as an adhesive to stick on the above-mentioned dielectric layer 704, its multiple holes 701 and the aforementioned dielectric layer The plurality of recesses 705 of 704 correspond to and expose a plurality of flip-chip semiconductor light emitting dies 706 . The above-mentioned printed circuit board with holes can be divided into two basic manufacturing techniques: subtractive method and additive method. In addition, multi-layer manufacturing technology includes two types: build-up method and build-up method. The subtraction method is to use chemicals or machinery to remove unnecessary places on a blank circuit board (that is, a circuit board covered with a complete piece of metal foil), and the remaining place is the required circuit. The additive method is now generally on a substrate that is pre-plated with thin copper, covered with photoresist (D/F), exposed to ultraviolet light and then developed, exposing the required place, and then using electroplating to complete the official circuit on the circuit board. The copper thickness is increased to the required specifications, and then coated with a layer of anti-etching resist-metal thin tin, and finally the photoresist is removed (this process is called film removal), and then the copper foil layer under the photoresist is etched away . The lamination method is one of the methods for making multi-layer printed circuit boards. It is to wrap the outer layer after the inner layer is made, and then treat the outer layer with the subtractive method or the additive method, and repeat the lamination action continuously. The resulting multilayer printed circuit board is sequential build-up. The build-up method is one of the methods for making multi-layer printed circuit boards. As the name implies, the printed circuit boards are added layer by layer. Each additional layer is processed to the desired shape. After selecting one of the above-mentioned printed circuit board manufacturing processes and completing them, the holes are preferably completed before the circuit layout and electroplating processing, which can reduce the damage to the circuit distribution and surface plating layer caused by drilling holes or damage the board surface due to stress. , the hole can be drilled by CNC, and the size of the aforementioned hole 501 must match the notch of the dielectric layer recess, as shown in FIG. 7(a).

请参考图7(f)所示,多条金属导线707经由打线接合(wire bonding)技术将前述的覆晶半导体发光晶粒706的子基板上的焊垫712与前述的印刷电路板701电性连接,前述的金属导线707可为金线、银线、铜线或是铝线。Please refer to FIG. 7(f), a plurality of metal wires 707 connect the pads 712 on the sub-substrate of the aforementioned flip-chip semiconductor light-emitting die 706 to the aforementioned printed circuit board 701 through wire bonding (wire bonding) technology. The aforementioned metal wire 707 can be a gold wire, a silver wire, a copper wire or an aluminum wire.

最后,使用透明胶材708通过转移成型(transfer-molding)或是注入成型(inject-molding)等方式覆盖在覆晶半导体发光晶粒706及多条金属导线707上做为一保护层,其透明胶材708的材质可为环氧树脂(epoxy)或是硅胶(silicone gel)。若单独使用透明胶材包覆前述的多个半导体发光晶粒706与前述的多条金属导线707,使得前述的半导体发光晶粒706仅发射出单色波长的电磁辐射波长,也可由前述的透明胶材包含光转换材料709,前述的光转换材料709可为荧光粉,由此前述荧光粉可被激发而产生第二波长并和覆晶半导体发光晶粒706产生的一次波长混合而形成白光或是其他多波长的电磁辐射波长。前述的荧光粉包含硅酸盐类、氧化物族系、氮化物族系或是硫化物族系。请参考图7(g)所示。Finally, use a transparent adhesive material 708 to cover the flip-chip semiconductor light-emitting die 706 and the plurality of metal wires 707 as a protective layer through transfer-molding or injection-molding. The material of the glue 708 can be epoxy or silicone gel. If the aforementioned plurality of semiconductor light-emitting crystal grains 706 and the aforementioned plurality of metal wires 707 are coated with a transparent adhesive material alone, so that the aforementioned semiconductor light-emitting crystal grains 706 only emit electromagnetic radiation wavelengths of monochromatic wavelengths, the aforementioned transparent The adhesive material contains a light conversion material 709, and the aforementioned light conversion material 709 can be a phosphor, so that the aforementioned phosphor can be excited to generate a second wavelength and mix with the primary wavelength generated by the flip-chip semiconductor light-emitting die 706 to form white light or are other multi-wavelength electromagnetic radiation wavelengths. The aforementioned phosphors include silicates, oxides, nitrides or sulfides. Please refer to Figure 7(g).

另外,可在封胶程序上先包覆第一层含有光转换材料709的胶材后再覆盖第二层透明胶材708,或是先包覆第一层透明胶材608后再覆盖第二层含有光转换材料709的胶材,同样前述光转换材料可为荧光粉因被激发而产生第二波长并和覆晶半导体发光晶粒706产生的一次波长混合而形成白光或是其他多波长的电磁辐射波长,请参考图7(h)所示。In addition, in the sealing process, the first layer of adhesive material containing the light conversion material 709 can be coated first, and then the second layer of transparent adhesive material 708 can be covered, or the first layer of transparent adhesive material 608 can be coated first, and then the second layer of transparent adhesive material can be covered. The layer contains a light-converting material 709 of glue, and the above-mentioned light-converting material can be excited to generate a second wavelength and mix with the primary wavelength generated by the flip-chip semiconductor light-emitting die 706 to form white light or other multi-wavelength For the wavelength of electromagnetic radiation, please refer to Figure 7(h).

显然地,依照上面实施例中的描述,本发明可能有许多的修正与差异。因此需要在其所附的权利要求所限定的范围内加以理解,除了上述详细的描述外,本发明还可以广泛地在其他的实施例中实施。上述仅为本发明的较佳实施例而已,并非用以限定本发明的申请专利范围;凡其它未脱离本发明所揭示的精神下所完成的等同性改变或修饰,均应包含在所附的权利要求所限定的范围内。Obviously, according to the description in the above embodiments, the present invention may have many modifications and differences. It is therefore to be understood that within the scope defined by the appended claims, the invention may be practiced broadly in other embodiments than those described in detail above. The above are only preferred embodiments of the present invention, and are not intended to limit the patent scope of the present invention; all other equivalent changes or modifications that do not deviate from the spirit disclosed in the present invention shall be included in the attached within the scope of the claims.

Claims (11)

1.一种光电元件的封装模块,包含1. A packaging module for photoelectric components, comprising 一散热基板;a heat dissipation substrate; 一介电层,位于该散热基板上方,具有多个凹处用以露出部分的该散热基板;A dielectric layer, located above the heat dissipation substrate, has a plurality of recesses for exposing part of the heat dissipation substrate; 多个半导体发光晶粒,位于该介电层的凹处并固定于该散热基板上;A plurality of semiconductor light-emitting crystal grains are located in the recess of the dielectric layer and fixed on the heat dissipation substrate; 一具有多个孔洞的印刷电路板,其孔洞相对应于该介电层的凹处,覆盖在该介电层上并露出该多个半导体发光晶粒;A printed circuit board with a plurality of holes, the holes corresponding to the recesses of the dielectric layer, covering the dielectric layer and exposing the plurality of semiconductor light-emitting crystal grains; 多条金属导线将该多个半导体发光晶粒与该印刷电路板电性连接;以及A plurality of metal wires electrically connect the plurality of semiconductor light-emitting dies with the printed circuit board; and 一透明胶材用以包覆该多个半导体发光晶粒与该多条金属导线。A transparent adhesive material is used to cover the plurality of semiconductor light-emitting crystal grains and the plurality of metal wires. 2.如权利要求1所述的光电元件封装模块,其中该半导体发光晶粒为发光二极管、激光发光二极管或光感测晶粒,且该半导体发光晶粒固定于该导热基板上的方式包含使用银胶或共晶接合方式。2. The photoelectric element packaging module according to claim 1, wherein the semiconductor light-emitting die is a light-emitting diode, a laser light-emitting diode, or a light-sensing die, and the method of fixing the semiconductor light-emitting die on the heat-conducting substrate includes using Silver glue or eutectic bonding method. 3.如权利要求2所述的光电元件封装模块,其中该介电层的凹处为中空反射体,且该介电层的材料为聚邻苯二甲酰胺或聚丁炔。3. The photoelectric device packaging module as claimed in claim 2, wherein the recess of the dielectric layer is a hollow reflector, and the material of the dielectric layer is polyphthalamide or polybutylene. 4.如权利要求2所述的光电元件封装模块,其中该散热基板的材料为铜、镍、银、铅、金或前述金属合金,或是铜-钼-铜、钨-铜、铝碳化硅、氮化铝、硅、氧化铍、金刚石或其他膨胀系数与该多个半导体发光晶粒相近的金属材料。4. The photoelectric element packaging module as claimed in claim 2, wherein the material of the heat dissipation substrate is copper, nickel, silver, lead, gold or the aforementioned metal alloys, or copper-molybdenum-copper, tungsten-copper, aluminum silicon carbide , aluminum nitride, silicon, beryllium oxide, diamond or other metal materials with expansion coefficients close to the plurality of semiconductor light-emitting crystal grains. 5.如权利要求2所述的光电元件封装模块,还包含光转换材料混合在该透明胶材内,其中该光转换材料为荧光粉,且该荧光粉为硅酸盐类、氧化物族系、氮化物族系或是硫化物族系。5. The photoelectric element packaging module as claimed in claim 2, further comprising a light conversion material mixed in the transparent adhesive material, wherein the light conversion material is a phosphor powder, and the phosphor powder is a silicate, oxide family , nitride family or sulfide family. 6.一种光电元件的封装模块制造方法,其步骤包含:6. A method for manufacturing a packaged module of a photoelectric element, the steps comprising: 提供一散热基板;providing a heat dissipation substrate; 形成一介电层于该散热基板上;forming a dielectric layer on the heat dissipation substrate; 形成一印刷电路板于该介电层上;forming a printed circuit board on the dielectric layer; 将多个半导体发光晶粒固定于散热基板上;Fixing a plurality of semiconductor light-emitting crystal grains on the heat dissipation substrate; 多条金属导线将该半导体发光晶粒与该印刷电路板电性连接;以及A plurality of metal wires electrically connect the semiconductor light-emitting die with the printed circuit board; and 一透明胶材用以包覆该多个半导体发光晶粒与该多条金属导线;A transparent adhesive material is used to cover the plurality of semiconductor light-emitting crystal grains and the plurality of metal wires; 其中上述的介电层具有多个凹处以露出部分的该散热基板,该印刷电路板具有多个孔洞,其多个孔洞与该介电层的多个凹处相对应,以及该多个半导体发光晶粒对应于该介电层的凹处内。Wherein the above-mentioned dielectric layer has a plurality of recesses to expose part of the heat dissipation substrate, the printed circuit board has a plurality of holes corresponding to the plurality of recesses of the dielectric layer, and the plurality of semiconductor light emitting The grains correspond within the recesses of the dielectric layer. 7.一种光电元件的封装模块制造方法,其步骤包含:7. A method for manufacturing a packaging module of a photoelectric element, the steps comprising: 提供一散热基板;providing a heat dissipation substrate; 形成一介电层于该散热基板上,其中该介电层包含多个凹处;forming a dielectric layer on the heat dissipation substrate, wherein the dielectric layer includes a plurality of recesses; 将多个覆晶半导体发光晶粒分别放置于该介电层的凹处内并固定于该散热基板上;A plurality of flip-chip semiconductor light-emitting crystal grains are respectively placed in the recesses of the dielectric layer and fixed on the heat dissipation substrate; 形成一具多个孔洞的印刷电路板,该孔洞相对应于该介电层的凹处的凹口,覆盖在该介电层上,露出该覆晶半导体发光晶粒;forming a printed circuit board with a plurality of holes, the holes corresponding to the recesses of the recesses of the dielectric layer covering the dielectric layer, exposing the flip-chip semiconductor light-emitting grains; 多条金属导线电性连接覆晶半导体发光晶粒的子基板与该印刷电路板;以及A plurality of metal wires are electrically connected to the sub-substrate of the flip-chip semiconductor light-emitting die and the printed circuit board; and 一透明胶材用以包覆该多个覆晶半导体发光晶粒与该多条金属导线。A transparent adhesive material is used to cover the plurality of flip-chip semiconductor light emitting chips and the plurality of metal wires. 8.如权利要求6或7所述的光电元件封装模块制造方法,其中该半导体发光晶粒为发光二极管、激光发光二极管或光感测晶粒,且该半导体发光晶粒固定于该导热基板上的方法包含使用银胶或共晶接合方式。8. The manufacturing method of an optoelectronic device packaging module as claimed in claim 6 or 7, wherein the semiconductor light-emitting die is a light-emitting diode, a laser light-emitting diode, or a light-sensing die, and the semiconductor light-emitting die is fixed on the heat-conducting substrate Some methods include the use of silver glue or eutectic bonding. 9.如权利要求8所述的光电元件封装模块制造方法,其中该介电层的凹处为中空反射体,且该介电层的材料为聚邻苯二甲酰胺或聚丁炔。9. The method for manufacturing a photoelectric device packaging module as claimed in claim 8, wherein the recess of the dielectric layer is a hollow reflector, and the material of the dielectric layer is polyphthalamide or polybutylene. 10.如权利要求8所述的光电元件封装模块制造方法,其中该散热基板的材料为铜、镍、银、铅、金或前述金属合金,或是铜-钼-铜、钨-铜、铝碳化硅、氮化铝、硅、氧化铍、金刚石或其他膨胀系数与该多个半导体发光晶粒相近的金属材料。10. The method for manufacturing a photoelectric element packaging module as claimed in claim 8, wherein the material of the heat dissipation substrate is copper, nickel, silver, lead, gold or the aforementioned metal alloys, or copper-molybdenum-copper, tungsten-copper, aluminum Silicon carbide, aluminum nitride, silicon, beryllium oxide, diamond or other metal materials with expansion coefficients close to the plurality of semiconductor light-emitting crystal grains. 11.如权利要求8所述的光电元件封装模块制造方法,还包含光转换材料混合在该透明胶材内,其中该光转换材料为荧光粉,且该荧光粉为硅酸盐类、氧化物族系、氮化物族系或是硫化物族系。11. The method for manufacturing an optoelectronic device packaging module as claimed in claim 8, further comprising mixing light conversion materials in the transparent adhesive, wherein the light conversion materials are phosphor powders, and the phosphor powders are silicates, oxides family, nitride family or sulfide family.
CN200810167673A 2008-10-22 2008-10-22 Photoelectric element packaging module and manufacturing method thereof Pending CN101728366A (en)

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CN102244066A (en) * 2011-08-05 2011-11-16 株洲南车时代电气股份有限公司 Power semiconductor module
CN102339945A (en) * 2011-10-29 2012-02-01 华南师范大学 High-power light-emitting diode with diamond powder-copper powder composite material as heat dissipation substrate
CN102354725A (en) * 2011-10-29 2012-02-15 华南师范大学 High-power light emitting diode with radiating substrate made of diamond-like film-copper composite material
WO2012040959A1 (en) * 2010-09-30 2012-04-05 福建中科万邦光电股份有限公司 Package structure of high-power led light source module
CN104362510A (en) * 2014-11-10 2015-02-18 李德龙 VCSEL array packaging structure based on optical encapsulation process and high-power VCSEL laser device of VCSEL array packaging structure
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WO2012040959A1 (en) * 2010-09-30 2012-04-05 福建中科万邦光电股份有限公司 Package structure of high-power led light source module
CN102244066A (en) * 2011-08-05 2011-11-16 株洲南车时代电气股份有限公司 Power semiconductor module
CN102339945A (en) * 2011-10-29 2012-02-01 华南师范大学 High-power light-emitting diode with diamond powder-copper powder composite material as heat dissipation substrate
CN102354725A (en) * 2011-10-29 2012-02-15 华南师范大学 High-power light emitting diode with radiating substrate made of diamond-like film-copper composite material
CN102354725B (en) * 2011-10-29 2013-11-06 华南师范大学 High-power light emitting diode with radiating substrate made of diamond-like film-copper composite material
CN105474050A (en) * 2013-08-12 2016-04-06 肖特股份有限公司 Converter-heat sink composite with metallic solder connection
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