CN101726945A - Wide visual angle LCD array substrate and manufacturing method thereof - Google Patents

Abstract

The invention relates to a wide viewing angle liquid crystal display array substrate and a manufacturing method thereof. The array substrate includes gate lines and data lines formed on the substrate, thin film transistors and pixel electrodes are formed in the pixel area defined by the gate line and the data line, and at least one extended electrode is also formed in the pixel area, so that the at least one extended electrode and the pixel A slit for generating a transverse electric field is formed between the electrodes. The manufacturing method includes: forming patterns including gate lines, gate electrodes, data lines, source electrodes, drain electrodes, TFT channel regions and passivation layers on the substrate; depositing a layer of transparent conductive film, and forming in the pixel region by patterning A pattern comprising a pixel electrode and at least one extended electrode, so that a slit for generating a lateral electric field is formed between the at least one extended electrode and the pixel electrode. The invention expands the viewing angles in multiple directions around, realizes uniform viewing angles at various angles, and simultaneously simplifies the structure and manufacturing process of the array substrate.

Description

Wide viewing angle liquid crystal display array substrate and manufacturing method thereof

technical field

The invention relates to a liquid crystal display and a manufacturing method thereof, in particular to a wide viewing angle liquid crystal display array substrate and a manufacturing method thereof.

Background technique

The market of liquid crystal display is growing rapidly, and the application fields are continuously expanding, especially the application of large-size liquid crystal TV, which requires the liquid crystal display to have a wide range of viewing angles. The liquid crystal display includes an array substrate and a color filter substrate in a cell, and a liquid crystal is arranged between them. The liquid crystal is deflected under the action of voltage, and the degree of deflection of the liquid crystal can be controlled by controlling the magnitude of the voltage, so as to achieve the purpose of modulating the transmittance (display gray scale).

Due to the optical anisotropy of liquid crystals, liquid crystal displays have the defect that the viewing angle of the screen is too narrow. For this reason, the prior art proposes a variety of display modes to overcome the defect of too narrow viewing angle. The various display modes include 90° twisted nematic liquid crystal plus compensation Film (Twisted Nematic+film, referred to as TN+film) mode, multi-domain vertical alignment (Multi-domain Vertical Alignment, referred to as MVA) mode, pixel electrode patterned vertical alignment (Patterned Vertical Alignment, referred to as PVA) mode, planar drive mode ( In-Plane Switching (IPS for short) mode and Fringe Field Switching (FFS for short) mode using fringe fields, etc.

Although the above-mentioned display modes have been proposed successively and gradually realized industrialization, actual use shows that the above-mentioned display modes still have corresponding defects. The TN+film mode has very limited improvement on the viewing angle. The viewing angle improvement is limited to the range of 140° horizontally and 100° vertically. It is generally only applied to notebook computers and desktop monitors, and is not suitable for large-size LCD TV applications; MVA mode requires A complex raised structure is manufactured on the side of the color filter substrate (color filter), which increases the manufacturing cost; the PVA mode requires the pixel electrode to be made into a complex slit structure, which affects the light utilization efficiency; while the IPS mode and the FFS mode High process control precision is required, the manufacturing process is difficult, and the contrast is affected.

Contents of the invention

The object of the present invention is to provide a wide viewing angle liquid crystal display array substrate and its manufacturing method, which has wide viewing angle characteristics and uniform viewing angle characteristics, and simultaneously simplifies the array substrate structure and manufacturing method.

In order to achieve the above object, the present invention provides a wide viewing angle liquid crystal display array substrate, including gate lines and data lines formed on the substrate, thin film transistors and pixel electrodes are formed in the pixel area defined by the gate lines and data lines, At least one extension electrode is also formed in the pixel area, so that a slit for generating a lateral electric field is formed between the at least one extension electrode and the pixel electrode.

A groove is formed on one side of the pixel electrode, the extension electrode is disposed in the groove, and the extension electrode is connected to a pixel electrode in an adjacent pixel area.

The pixel electrodes in adjacent pixel regions are pixel electrodes in adjacent pixel regions in the same pixel row or pixel electrodes in adjacent pixel regions in the same pixel column.

Further, the shape of the extension electrode is rectangle, polygon, ellipse or strip, and the shape of the groove corresponds to the shape of the extension electrode. The length of the extension electrode is 1/10˜2/3 of the width of the pixel area. The width of the slit is 1 μm˜6 μm.

On the basis of the above technical solution, a common electrode line forming a storage capacitor together with the pixel electrode is formed in the pixel region, and the extension electrode is located above the common electrode line.

In order to achieve the above object, the present invention also provides a method for manufacturing a wide viewing angle liquid crystal display array substrate, comprising:

Step 1, forming patterns including gate lines, gate electrodes, data lines, source electrodes, drain electrodes, TFT channel regions and passivation layers on the substrate;

Step 2. Deposit a layer of transparent conductive film on the substrate that completed step 1, and form a pattern including the pixel electrode and at least one extended electrode in the pixel area through a patterning process, so that the at least one extended electrode and the pixel electrode are formed between the at least one extended electrode and the pixel electrode. The slit for generating a transverse electric field.

The step 2 specifically includes: depositing a layer of transparent conductive film on the substrate completed in step 1, using a common mask to form a pattern including a pixel electrode and at least one extended electrode in the pixel area through a patterning process, one of the pixel electrodes A groove is formed on the side, and the at least one extension electrode is arranged in the groove, so that a slit for generating a lateral electric field is formed between the at least one extension electrode and the pixel electrode, and the extension electrode and the adjacent pixel area where the pixel electrodes are connected.

On the basis of the above technical solution, the shape of the extension electrode is rectangle, polygon, ellipse or strip, and the shape of the groove corresponds to the shape of the extension electrode. The length of the extension electrode is 1/10˜2/3 of the width of the pixel area. The width of the slit is 1 μm˜6 μm. In the step 1, a common electrode line is also formed, and the extension electrode is located above the common electrode line.

The present invention provides an array substrate of a liquid crystal display with a wide viewing angle and a manufacturing method thereof. A pixel electrode and an extension electrode are arranged in a pixel area, and a slit for generating a lateral electric field is formed between the pixel electrode and the extension electrode, thereby realizing a A novel multi-domain vertically aligned display mode. This display mode adopts negative liquid crystal. When it is not working, the liquid crystal is evenly arranged vertically to the upper and lower substrates under the action of the alignment material on the electrode surface. When it is working, the liquid crystal in the area near the slit between the pixel electrode and the extension electrode will be affected by the liquid crystal. The transverse electric field induces inversion in multiple directions, making the liquid crystal form a multi-domain structure. On the one hand, it expands the viewing angles in multiple directions around it, and on the other hand, it realizes uniform viewing angles at all angles. Furthermore, under the premise of ensuring wide viewing angle and uniform viewing angle, since the technical solution of the present invention does not require a raised structure or a rubbing process, the present invention simplifies the structure and manufacturing process of the array substrate, and its manufacturing process Compatible with traditional TN type TFT-LCD. In actual use, if a negative birefringence compensation film is added inside the polarizer, the viewing angle can be further expanded. The wide viewing angle liquid crystal display array substrate of the present invention is suitable for liquid crystal displays of various driving modes such as frame inversion, row inversion, column inversion, dot inversion, etc., and has wide application prospects.

Description of drawings

FIG. 1 is a schematic structural view of an array substrate of a wide viewing angle liquid crystal display of the present invention;

Fig. 2 is the sectional view of A1-A1 in Fig. 1;

Fig. 3 is the sectional view of B1-B1 direction in Fig. 1;

4 is a plan view of the array substrate of the wide viewing angle liquid crystal display of the present invention after the first patterning process;

Fig. 5 is the sectional view of A2-A2 direction in Fig. 4;

Fig. 6 is the sectional view of B2-B2 in Fig. 4;

7 is a plan view of the array substrate of the wide viewing angle liquid crystal display of the present invention after the second patterning process;

Fig. 8 is the sectional view of A3-A3 direction in Fig. 7;

Fig. 9 is the sectional view of B3-B3 direction in Fig. 7;

10 is a plan view of the array substrate of the wide viewing angle liquid crystal display of the present invention after the third patterning process;

Fig. 11 is the sectional view of A4-A4 direction in Fig. 10;

Fig. 12 is the sectional view of B4-B4 direction in Fig. 10;

Fig. 13 is a plan view after the fourth patterning process of the wide viewing angle liquid crystal display array substrate of the present invention;

Fig. 14 is the sectional view of A5-A5 direction in Fig. 13;

Fig. 15 is a sectional view of B5-B5 direction in Fig. 13;

FIG. 16 is a schematic structural view of the array substrate of the wide viewing angle liquid crystal display of the present invention after patterning with a half-tone or gray-tone mask;

Fig. 17 is a working schematic diagram of the array substrate of the wide viewing angle liquid crystal display of the present invention;

FIG. 18 is a flowchart of a method for manufacturing an array substrate of a wide viewing angle liquid crystal display according to the present invention;

19 is a flow chart of the first embodiment of the method for manufacturing the array substrate of the wide viewing angle liquid crystal display of the present invention;

FIG. 20 is a flow chart of the second embodiment of the method for manufacturing the array substrate of the wide viewing angle liquid crystal display of the present invention.

Explanation of reference signs:

1-substrate; 2-grid line; 3-gate electrode;

4-common electrode line; 5-gate insulating layer; 6-semiconductor layer;

7-doped semiconductor layer; 8-source electrode; 9-drain electrode;

10-data line; 11-passivation layer; 12-passivation layer via;

13-second via hole; 14-pixel electrode; 15-extended electrode;

20-array substrate; 30-color filter substrate; 31-color filter layer;

32-common electrode; 40-liquid crystal.

Detailed ways

The technical solutions of the present invention will be described in further detail below with reference to the accompanying drawings and embodiments.

FIG. 1 is a schematic structural view of an array substrate of a wide viewing angle liquid crystal display according to the present invention, FIG. 2 is a cross-sectional view along A1-A1 in FIG. 1 , and FIG. 3 is a cross-sectional view along B1-B1 in FIG. 1 . As shown in Figures 1 to 3, the main structure of the array substrate of the wide viewing angle liquid crystal display of the present invention includes gate lines 2, data lines 10 and thin film transistors (Thin Film Transistor, referred to as TFT) formed on the substrate; several gate lines 2 Several pixel regions are defined by several data lines 10, a thin film transistor is formed in each pixel region, and is located at the intersection of the gate line 2 and the data line 10; a pixel electrode 14 and at least one pixel electrode 14 are also formed in each pixel region One extension electrode 15 , at least one extension electrode 15 is connected to the pixel electrode in the adjacent pixel area, and a slit for generating a lateral electric field is formed between the extension electrode 15 and the pixel electrode 14 . Specifically, for a pixel area, the pixel electrode 14 is formed in the pixel area, and one side (such as the left side) of the middle part of the pixel electrode 14 is formed with a strip-shaped groove extending toward the center of the pixel electrode 14. The extension electrode 15 is set in the strip-shaped groove, and a horizontal electric field slit is formed between the extension electrode 15 and the pixel electrode 14, and the extension electrode 15 is connected with the adjacent (such as the left) pixel electrode to form an integral structure . For a pixel electrode 14 and an extension electrode 15, the pixel electrode 14 is formed in a pixel area, and the extension electrode 15 with an integral structure with the pixel electrode 14 is formed in an adjacent (such as the right side) pixel area, and the middle part of the pixel electrode 14 is One side (such as the left side) is formed with a strip-shaped groove extending toward the center of the pixel electrode 14, and the other side (such as the right side) in the middle of the pixel electrode 14 is provided with an extension electrode 15, which is formed on the adjacent (such as the right side) ) The extension electrode 15 in the pixel area is also arranged in the strip-shaped groove formed by the adjacent (eg right) pixel electrode, and forms a slit for generating a lateral electric field between the adjacent pixel electrode. When working, because there is a voltage difference between the pixel electrode 14 and the extension electrode 15, a transverse electric field will be generated at the slit between the pixel electrode 14 and the extension electrode 15, and the liquid crystal in the area near the slit is induced to reverse direction by the transverse electric field. In multiple directions, the liquid crystal forms a multi-domain structure.

In the above technical solution of the present invention, a common electrode line (also called a storage capacitor line) 4 may also be formed in the pixel area, and the common electrode line 4 is located between the two gate lines 2 to form a storage capacitor together with the pixel electrode 14 . When the common electrode line 4 is located in the middle of the pixel area, the groove and the extended electrode 15 formed on the pixel electrode 14 of the present invention can be arranged above the common electrode line 4, on the one hand, fully utilizing the structure of the existing array substrate, on the other hand aspect does not affect the aperture ratio. In actual use, there can be one or more extension electrodes 15 in a pixel area; the shape of the extension electrodes 15 can be set in a rectangular, polygonal or elliptical shape according to the needs of forming a multi-domain structure, The shape of the groove on the pixel electrode 14 corresponds to the shape of the extension electrode 15; the width of the extension electrode can be adjusted according to the actual size of the pixel area, preferably less than or equal to the width of the common electrode line 4; the length of the extension electrode 15 can be adjusted according to The requirements for forming a multi-domain structure are adjusted, which can be set to 1/10 to 2/3 of the width of the pixel area. Preferably, the length of the extension electrode 15 is about 1/2 of the width of the pixel area; the distance between the pixel electrode 14 and the extension electrode 15 The width of the slits is 1 μm˜6 μm, preferably, the width of the slits is 2 μm.

In the technical scheme of the present invention, the structure of the thin film transistor is basically the same as that of the TN-type TFT-LCD, including a gate electrode 3, a gate insulating layer 5, an active layer (including a semiconductor layer 6 and a doped semiconductor layer 7), a source electrode 8, Drain electrode 9, TFT channel region and passivation layer 11. Among them, the gate electrode 3 is formed on the substrate 1 and connected to the gate line 2; the gate insulating layer 5 is formed on the gate line 2 and the gate electrode 3 and covers the entire substrate 1; the active layer is formed on the gate insulating layer 5 and is located at the gate Above the electrode 3; one end of the source electrode 8 is located on the active layer, the other end is connected to the data line 10, one end of the drain electrode 9 is located on the active layer, and the other end is connected to the pixel electrode 14 through the passivation layer via hole 12, A TFT channel region is formed between the source electrode 8 and the drain electrode 9; a passivation layer 11 is formed on the TFT channel region and covers the entire substrate 1, and a passivation layer for connecting the pixel electrode 14 to the drain electrode 9 is provided on it. hole 12.

4 to 15 are schematic diagrams of the preparation process of the array substrate of the wide viewing angle liquid crystal display of the present invention. The following takes the five-time patterning process as an example to further illustrate the technical solution of the present invention through the preparation process of the array substrate of the wide viewing angle liquid crystal display. In the following description, The patterning process referred to in the present invention includes processes such as photoresist coating, masking, exposure, etching, stripping, etc., wherein the photoresist is an example of a positive photoresist.

4 is a plan view of the array substrate of a wide viewing angle liquid crystal display of the present invention after the first patterning process, FIG. 5 is a cross-sectional view along the A2-A2 direction in FIG. 4 , and FIG. 6 is a cross-sectional view along the B2-B2 direction in FIG. 4 . A gate metal thin film is deposited on a substrate 1 (such as a glass substrate or a quartz substrate) by magnetron sputtering or thermal evaporation. The gate metal thin film is patterned by the first patterning process using a common mask, and a pattern including the gate line 2 is formed on the substrate 1, and a gate electrode 3 connected to the gate line 2 is formed in each pixel area, as shown in Figure 4 ~ Figure 6. In this embodiment, the common electrode line 4 can also be formed in the first patterning process, and the common electrode line 4 is located in the middle of two adjacent gate lines 2 and parallel to the gate lines 2 .

7 is a plan view after the second patterning process of the wide viewing angle liquid crystal display array substrate of the present invention, FIG. 8 is a sectional view of A3-A3 in FIG. 7, and FIG. 9 is a sectional view of B3-B3 in FIG. 7. On the substrate with the above structural patterns, a gate insulating layer 5, a semiconductor layer 6 and a doped semiconductor layer (ohmic contact layer) 7 are sequentially deposited by plasma enhanced chemical vapor deposition (PECVD) method. The semiconductor layer 6 and the doped semiconductor layer 7 are patterned by a second patterning process using a common mask, and a pattern including an active layer is formed above the gate electrode 3 in each pixel region, as shown in FIGS. 7 to 9 .

10 is a plan view of the array substrate of a wide viewing angle liquid crystal display of the present invention after the third patterning process, FIG. 11 is a sectional view along the A4-A4 direction in FIG. 10 , and FIG. 12 is a sectional view along the B4-B4 direction in FIG. 10 . On the substrate with the above-mentioned structural patterns, a layer of source-drain metal thin film is deposited by magnetron sputtering or thermal evaporation. Patterning the source-drain metal thin film through the third patterning process by using a common mask to form a pattern including the data line 10, and forming a pattern of the source electrode 8, the drain electrode 9, and the TFT channel area in each pixel area, One end of the source electrode 8 is located on the active layer, the other end is connected to the data line 10, one end of the drain electrode 9 is located on the active layer, and the doped semiconductor layer 7 between the source electrode 8 and the drain electrode 9 is completely etched. and etch away part of the semiconductor layer 6 to expose the semiconductor layer 6 to form TFT channel region patterns, as shown in FIGS. 10 to 12 .

13 is a plan view of the array substrate of a wide viewing angle liquid crystal display according to the present invention after the fourth patterning process, FIG. 14 is a sectional view along the A5-A5 direction in FIG. 13 , and FIG. 15 is a sectional view along the B5-B5 direction in FIG. 13 . A passivation layer 11 is deposited on the substrate with the above-mentioned structural patterns by PECVD. The passivation layer is patterned by the fourth patterning process using a common mask, and on the basis that the passivation layer covers the TFT channel region, a pattern including a passivation layer via hole 12 is formed, wherein the passivation layer formed in each pixel region The passivation layer via hole 12 is located at the position of the drain electrode 9 , and the passivation layer 11 inside the passivation layer via hole 12 is completely etched away, exposing the upper surface of the drain electrode 9 , as shown in FIGS. 13 to 15 .

Finally, a layer of transparent conductive film is deposited on the substrate with the above-mentioned structural patterns by magnetron sputtering or thermal evaporation. Patterning the transparent conductive film by using a common mask plate through the fifth patterning process, forming a pattern including a pixel electrode 14 and an extension electrode 15 in each pixel area, and the extension electrode 15 is connected to the pixel electrode in an adjacent pixel area, and A slit for generating a lateral electric field is formed between the extension electrode 15 and the pixel electrode 14 . Specifically, for a pixel region, the pixel electrode 14 is formed in the pixel region, and is connected to the drain electrode 9 through the passivation layer via hole 12 in the pixel region, and one side of the middle part of the pixel electrode 14 (as left side) is formed with a strip-shaped groove extending toward the center of the pixel electrode 14, the strip-shaped extension electrode 15 is arranged in the strip-shaped groove, and a slit is formed between the extension electrode 15 and the pixel electrode 14, and the The extension electrode 15 is connected with the adjacent (eg left) pixel electrode to form an integral structure, as shown in FIGS. 1-3 . For a pixel electrode 14 and an extension electrode 15, the pixel electrode 14 is formed in a pixel area, and the extension electrode 15 with an integral structure with the pixel electrode 14 is formed in an adjacent (such as the right side) pixel area, and the pixel electrode 14 Connected to the drain electrode 9 through the passivation layer via hole 12, one side (such as the left side) of the middle part of the pixel electrode 14 is formed with a strip-shaped groove extending toward the center of the pixel electrode 14, and the other side of the middle part of the pixel electrode 14 ( The extension electrode 15 is set as on the right side), and the extension electrode 15 formed in the adjacent (such as the right) pixel area is simultaneously arranged in the strip-shaped groove formed by the adjacent (such as the right) pixel electrode, and is in line with this phase Slits for generating lateral electric fields are formed between adjacent pixel electrodes. In actual use, there may be one or more extension electrodes 15, and the shape of the extension electrodes 15 may be set in a rectangular, polygonal or elliptical shape.

The five-time patterning process described above is only one implementation method for preparing the array substrate of the wide viewing angle liquid crystal display of the present invention. In actual use, the present invention can also be realized by increasing or decreasing the number of patterning processes and selecting different materials or combinations of materials. For example, the present invention can also be prepared by four patterning processes of multi-step etching, and the aforementioned second patterning process and the third patterning process are combined into one patterning process using a halftone or gray tone mask, which is briefly described below illustrate.

FIG. 16 is a schematic structural view of the array substrate of the wide viewing angle liquid crystal display of the present invention after patterning with a half-tone or gray-tone mask, which is a cross-sectional view along the direction A4-A4 in FIG. 10 . The specific process is as follows: on the substrate with the aforementioned structural patterns, the gate insulating layer 5, the semiconductor layer 6 and the doped semiconductor layer 7 are sequentially deposited by the PECVD method, and then the source-drain metal is deposited by magnetron sputtering or thermal evaporation. film. Afterwards, a layer of photoresist is coated and exposed with a half-tone or gray-tone mask to make the photoresist form a fully exposed area (photoresist completely removed area), a partially exposed area (photoresist partially removed area) and an unexposed area. Area (photoresist fully reserved area), wherein the unexposed area corresponds to the area where the data line, source electrode and drain electrode pattern are located, the partially exposed area corresponds to the area where the TFT channel area pattern is located, and the fully exposed area corresponds to the area other than the above-mentioned figures. area. After the development treatment, the thickness of the photoresist in the unexposed area remains unchanged, the thickness of the photoresist in the partially exposed area becomes thinner, and the photoresist in the fully exposed area is completely removed. Firstly, the fully exposed area is etched for the first time, and the source and drain metal films, the doped semiconductor layer and the semiconductor layer of the fully exposed area are respectively etched away to form data lines, active layers, drain electrodes and source electrode patterns. Perform ashing treatment to completely remove the photoresist in part of the exposed area, perform second etching on part of the exposed area, respectively etch off the source and drain metal thin films and doped semiconductor layers in part of the exposed area, and partially etch off the semiconductor layer, This region is exposed to the semiconductor layer to form a TFT channel region pattern. After this patterning process, the gate insulating layer covers the entire substrate, and the semiconductor layer and doped semiconductor layer in the area outside the active layer pattern are completely etched away, but the semiconductor layer and doped semiconductor layer remain under the data line, source electrode and drain electrode pattern. The semiconductor layer, as shown in Figure 16. This process has been widely used in the field of liquid crystal display manufacturing, so it will not be repeated here.

FIG. 17 is a working diagram of the array substrate of the wide viewing angle liquid crystal display of the present invention. As shown in FIG. 17 , the array substrate 20 and the color filter substrate 30 are aligned vertically to form a wide viewing angle liquid crystal display, and the liquid crystal 40 is disposed between the array substrate 20 and the color filter substrate 30 . The array substrate 20 adopts the structure of the array substrate of the wide viewing angle liquid crystal display of the present invention, at least including the pixel electrode 14 and the extension electrode 15 formed on the substrate, and a slit is formed between the pixel electrode 14 and the extension electrode 15 . The color filter substrate 30 may adopt a conventional structure, at least including a color filter layer 31 and a common electrode 32 formed on the substrate. The liquid crystal 40 uses a material with a negative dielectric constant. When no voltage is applied, under the action of the alignment material on the electrode surface, the long axis direction of the liquid crystal is arranged in a vertical manner. A transverse electric field is generated at the slit between the extension electrodes 15, and the liquid crystal in the area near the slit is induced to fall in multiple directions by the transverse electric field, so that the liquid crystal forms a multi-domain structure, while the electric field in other areas is still the pixel of the array substrate 20 The electric field between the electrode 14 and the common electrode 32 of the color filter substrate 30 . Since the slit between the pixel electrode 14 and the extension electrode 15 runs through the middle of the pixel area, it has a horizontal or nearly horizontal segment, a vertical or near vertical segment, so the formed lateral electric field has a radial characteristic, that is, the lateral electric field has multiple direction, so the liquid crystal in the area near the slit will be induced by the transverse electric field to fall in multiple directions, forming a multi-domain structure, so that the display image can be seen in multiple directions around the slit, on the one hand, it expands the surrounding multiple directions On the other hand, it achieves uniform viewing angles from all angles.

The wide viewing angle liquid crystal display array substrate of the present invention shown in Figures 1 to 3 is only a realization structure, the pixel electrode and the extension electrode are all formed in a pixel row, and various structural deformations can also be used in actual use, for example, the pixel electrode and the The extended electrodes can be formed in a pixel column, which will not be repeated here. In actual use, when both the pixel electrode and the extension electrode are formed in a pixel row, the first column or the last column of multiple pixel areas is a dummy pixel area, which does not display actual content, and only cooperates with adjacent columns to generate a lateral electric field .

Fig. 18 is a flow chart of the method for manufacturing the array substrate of the wide viewing angle liquid crystal display of the present invention, which specifically includes:

Step 1, forming patterns including gate lines, gate electrodes, data lines, source electrodes, drain electrodes, TFT channel regions and passivation layers on the substrate;

Step 2. Deposit a layer of transparent conductive film on the substrate completed in step 1, and form a pattern including a pixel electrode and at least one extended electrode in the pixel area through a patterning process, so that the at least one extended electrode and the pixel electrode are formed. The slit in the transverse electric field.

The technical solution of the method for manufacturing the array substrate of the wide viewing angle liquid crystal display of the present invention will be further described below through specific examples.

Fig. 19 is a flow chart of the first embodiment of the method for manufacturing the array substrate of the wide viewing angle liquid crystal display of the present invention, which specifically includes:

Step 11, depositing a layer of gate metal thin film on the substrate, using a common mask to form a pattern including gate lines, gate electrodes and common electrode lines through a patterning process;

Step 12, sequentially depositing a gate insulating layer, a semiconductor layer and a doped semiconductor layer on the substrate completed in step 11, using a common mask to form a pattern including an active layer through a patterning process;

Step 13, depositing a source-drain metal thin film on the substrate completed in step 12, using a common mask to form a pattern including a data line, a source electrode, a drain electrode and a TFT channel region through a patterning process;

Step 14, depositing a layer of passivation layer on the substrate after step 13, using a common mask to form a passivation layer via hole through a patterning process, and the passivation layer via hole is located at the position of the drain electrode;

Step 15. Deposit a layer of transparent conductive film on the substrate after step 14, and use a common mask to form a pattern including a pixel electrode and at least one extended electrode in the pixel area through a patterning process, and the pixel electrode passes through the passivation layer via hole Connected to the drain electrode, a groove is formed on one side of the pixel electrode, and the at least one extension electrode is arranged in the groove, so that a gap for generating a lateral electric field is formed between the at least one extension electrode and the pixel electrode. The slit, the at least one extended electrode is connected to a pixel electrode in an adjacent pixel area.

In the above technical solution of the present invention, the specific process of step 11 to step 15 has been described in detail in the preparation process shown in Fig. 4 to Fig. 15 and will not be repeated here.

Fig. 20 is a flow chart of the second embodiment of the method for manufacturing the array substrate of the wide viewing angle liquid crystal display of the present invention, which specifically includes:

Step 21, depositing a layer of gate metal film on the substrate, using a common mask to form a pattern including gate lines, gate electrodes and common electrode lines through a patterning process;

Step 22. Deposit a gate insulating layer, a semiconductor layer, a doped semiconductor layer, and a source-drain metal film in sequence on the substrate completed in step 21, and use a half-tone or gray-tone mask to form an active layer, a data line, and a source-drain layer through a patterning process. Patterns of electrodes, drain electrodes and TFT channel regions;

Step 23, depositing a layer of passivation layer on the substrate after step 22, using a common mask to form a passivation layer via hole through a patterning process, and the passivation layer via hole is located at the position of the drain electrode;

Step 24, deposit a layer of transparent conductive film on the substrate after step 23, and use a common mask to form a pattern including a pixel electrode and at least one extended electrode in the pixel area through a patterning process, and the pixel electrode passes through the passivation layer via hole Connected to the drain electrode, a groove is formed on one side of the pixel electrode, and the at least one extension electrode is arranged in the groove, so that a gap for generating a lateral electric field is formed between the at least one extension electrode and the pixel electrode. The slit, the extension electrode is connected to the pixel electrode in the adjacent pixel area.

The main process of this embodiment is basically the same as that of the first embodiment, the difference is that step 12 and step 13 in the first embodiment are combined into a patterning process using a halftone or gray tone mask, and other processes are the same as those of the first embodiment Example is the same. The process of using a half-tone or gray-tone mask has been described in detail in the preparation process shown in FIG. 16 , and will not be repeated here.

The present invention provides an array substrate of a liquid crystal display with a wide viewing angle and a manufacturing method thereof. A pixel electrode and an extension electrode are arranged in a pixel area, and a slit for generating a lateral electric field is formed between the pixel electrode and the extension electrode, thereby realizing a A novel multi-domain vertically aligned display mode. This display mode adopts negative liquid crystal. When it is not working, the liquid crystal is evenly arranged vertically to the upper and lower substrates under the action of the alignment material on the electrode surface. When it is working, the liquid crystal in the area near the slit between the pixel electrode and the extension electrode will be affected by the liquid crystal. The transverse electric field induces inversion in multiple directions, making the liquid crystal form a multi-domain structure. On the one hand, it expands the viewing angles in multiple directions around it, and on the other hand, it realizes uniform viewing angles at all angles. Furthermore, under the premise of ensuring wide viewing angle and uniform viewing angle, since the technical solution of the present invention does not require a raised structure or a rubbing process, the present invention simplifies the structure and manufacturing process of the array substrate, and its manufacturing process Compatible with traditional TN type TFT-LCD. In actual use, if a negative birefringence compensation film is added inside the polarizer, the viewing angle can be further expanded. The wide viewing angle liquid crystal display array substrate of the present invention is suitable for liquid crystal displays of various driving modes such as frame inversion, row inversion, column inversion, dot inversion, etc., and has wide application prospects.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention without limitation, although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be Modifications or equivalent replacements can be made without departing from the spirit and scope of the technical solutions of the present invention.

Claims (13)

1. A wide viewing angle liquid crystal display array substrate, comprising gate lines and data lines formed on the substrate, thin film transistors and pixel electrodes are formed in the pixel area defined by the gate lines and data lines, it is characterized in that the pixel At least one extension electrode is also formed in the region, so that a slit for generating a lateral electric field is formed between the at least one extension electrode and the pixel electrode. 2. The wide viewing angle liquid crystal display array substrate according to claim 1, wherein a groove is formed on one side of the pixel electrode, the extension electrode is arranged in the groove, and the extension electrode is connected to the corresponding The pixel electrodes in the adjacent pixel area are connected. 3. The wide viewing angle liquid crystal display array substrate according to claim 2, wherein the pixel electrodes in the adjacent pixel regions are pixel electrodes in the adjacent pixel regions in the same pixel row or adjacent pixels in the same pixel column area of the pixel electrodes. 4. The wide viewing angle liquid crystal display array substrate according to claim 2, wherein the shape of the extension electrode is rectangle, polygon, ellipse or strip, and the shape of the groove is the same as that of the extension electrode. corresponding to the shape. 5 . The array substrate of a wide viewing angle liquid crystal display according to claim 2 , wherein the length of the extension electrode is 1/10˜2/3 of the width of the pixel area. 6 . The array substrate of a wide viewing angle liquid crystal display according to claim 2 , wherein the width of the slit is 1 μm˜6 μm. 7. The wide viewing angle liquid crystal display array substrate according to any one of claims 1 to 6, wherein a common electrode line forming a storage capacitor together with the pixel electrode is formed in the pixel region, so that The extension electrode is located above the common electrode line. 8. A method for manufacturing a wide viewing angle liquid crystal display array substrate, characterized in that it comprises: Step 1, forming patterns including gate lines, gate electrodes, data lines, source electrodes, drain electrodes, TFT channel regions and passivation layers on the substrate; Step 2. Deposit a layer of transparent conductive film on the substrate that completed step 1, and form a pattern including the pixel electrode and at least one extended electrode in the pixel area through a patterning process, so that the at least one extended electrode and the pixel electrode are formed between the at least one extended electrode and the pixel electrode. The slit for generating a transverse electric field. 9. The method for manufacturing a wide viewing angle liquid crystal display array substrate according to claim 8, wherein said step 2 specifically comprises: depositing a layer of transparent conductive film on the substrate completed in step 1, and adopting a common mask plate to pass through a patterning process A pattern comprising a pixel electrode and at least one extension electrode is formed in the pixel area, a groove is formed on one side of the pixel electrode, and the at least one extension electrode is arranged in the groove, so that the at least one extension electrode is connected to the at least one extension electrode. Slits for generating lateral electric fields are formed between the pixel electrodes, and the extension electrodes are connected to pixel electrodes in adjacent pixel regions. 10. The method for manufacturing an array substrate of a wide viewing angle liquid crystal display according to claim 8 or 9, wherein the shape of the extended electrode is rectangular, polygonal, elliptical or long, and the shape of the groove is consistent with the shape of the Corresponds to the shape of the extension electrode. 11. The method for manufacturing the array substrate of a wide viewing angle liquid crystal display according to claim 8 or 9, wherein the length of the extension electrode is 1/10-2/3 of the width of the pixel area. 12 . The method for manufacturing the array substrate of a wide viewing angle liquid crystal display according to claim 8 or 9 , wherein the width of the slit is 1 μm˜6 μm. 13 . 13. The method for manufacturing the array substrate of a wide viewing angle liquid crystal display according to claim 8 or 9, wherein a common electrode line is further formed in the step 1, and the extension electrode is located above the common electrode line.

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