CN101677073B - Front opening wafer box with oval latch structure - Google Patents

Abstract

The utility model provides a preceding open wafer box, mainly includes a box body, and box body inside is equipped with a plurality of slots with a plurality of discs of holding, and a side of box body forms an opening and can supplies the input and the output of above-mentioned a plurality of discs to and a door body, has an surface and an internal surface, and the door body combines together with the opening of internal surface and box body, and be used for the protection to place a plurality of discs inside the box body, wherein preceding open wafer box's characterized in that: the door body is internally provided with at least one latch structure which comprises an elliptical cam, a pair of sliding devices contacted with two ends of the elliptical cam, at least one pulley arranged in the door body and embedded in a sliding groove of the sliding devices, and at least one positioning elastic sheet connected with the sliding devices into a whole.

Description

Front-loading wafer cassette with oval latch structure

technical field

The present invention relates to a front-opening wafer box, in particular to a latch structure (Latch) disposed inside the door body of the front-opening wafer box.

Background technique

Semiconductor wafers will be transported to different workstations due to the need to go through various processes and to cooperate with process equipment. In order to facilitate the handling of the wafers and avoid external contamination, a sealed container is often used for automatic equipment delivery. Please refer to FIG. 1 , which is a schematic diagram of a conventional wafer cassette. This wafer box is a front opening type wafer box (Front Opening Unified Pod, FOUP), which has a box body 10 and a door body 20. There are a plurality of slots 11 inside the box body 10, which can accommodate a plurality of pods horizontally. Wafer, and an opening 12 is provided on one side of the box body 10 for carrying out and loading of the wafer, and the door body 20 has an outer surface 21 and an inner surface 22, and the door body 20 is formed by the inner surface 22 and the box body The opening 12 of the box body 10 is combined to protect a plurality of discs inside the box body 10 . In addition, at least one latch hole 23 is disposed on the outer surface 21 of the door body 20 for opening or closing the front-loading wafer cassette. In the above-mentioned front-opening wafer cassette, since the semiconductor wafers are horizontally placed inside the box body 10, a wafer restraint (wafer restraint) is required during the transportation of the front-opening wafer cassette to avoid rounding. The sheet is dislocated due to vibration or moves toward the opening 12 of the box body 10 .

Please refer to FIG. 2 , which is a schematic diagram of a door body of a front-opening wafer cassette disclosed in US Patent No. 6,736,268. As shown in FIG. 2 , the inner surface 22 of the door body 20 is configured with a recessed area 24, which extends from the top 221 of the inner surface 22 to the bottom 222 and is between the left and right latch structures 230 (inside the door body). In the recessed area 24, a wafer restraint module is further arranged. This wafer restraint module is composed of two left and right wafer restraints 100, and each wafer restraint 100 has a plurality of The wafer contact head 110 is used to support the opposing wafer by the wafer contact head 110, so as to prevent the wafer from being dislocated or moving towards the opening of the box due to vibration during the transmission process. However, the above-mentioned wafer restrictor module is arranged in the recessed area 24 of the inner surface 22 of the door body 20, which makes the wafer only flat against the inner surface 22 of the door body 20 or only slightly fall into the recessed area 24, which is not effective. The wafers are dropped into the recessed area 24 to shorten the size of the front and rear diameters of the front-opening wafer box. In addition, the particle dust produced by the friction between the wafer restraint module and the wafer is easy to accumulate in the recessed area 24. In terms of cleaning, it is necessary to separate the wafer restraint module from the recessed area 24 of the inner surface 22 of the door body 20, and so on. The separation and assembly of the wafers may easily cause the loosening of the wafer restraint module.

In addition, another US Pat. No. 5,711,427 discloses a schematic diagram of the door latch structure 230 of the door body 20 of the front opening wafer cassette. As shown in Figure 3. The combination of the door body 20 and the box body 10 is mainly to set movable plug pins 231 on both sides of the door body 20 (that is, between the outer surface 21 and the inner surface 22 ), and near the edge of the box body 10 opening. An insertion hole (not shown in the figure) is provided to correspond to the insertion pin 231, and the insertion pin 231 is combined with the insertion hole by using the rotation of the bolt opening on the outer surface 21 of the door body 20 to achieve the purpose of locking the door body. 20 is fixed on the box body 10, wherein the rotation of the bolt opening to control the reciprocating movement of the pin 231 can be achieved through a circular cam (cam) 232 .

In the implementation of the semiconductor factory, the opening of the front-loading wafer cassette is mainly by a wafer loading mechanism (not shown in the figure), and the wafer loading mechanism has at least one opening latch (not shown in the figure), The wafer loading mechanism utilizes the opening latch to insert into the latch opening 23 on the outer surface 21 of the door body 20 of the front-loading wafer cassette, and turns the hole cam 232 to drive the movable pin 231 to complete opening or closing of the front-loading cassette. Wafer box.

In addition, there are US5,915,562, US5,957,292, US6622883 and US6902063 etc. in the U.S. patents of the latch structure in the door body of other disclosed front-opening wafer cassettes. In order to achieve the purpose of airtightness when the door body and the box body are joined by these latch structures, the movable spigot will be displaced in the longitudinal direction, so that an elastic airtight part can be fixed by the movable spigot, in order to achieve airtightness at the same time. Close the front opening wafer cassette well for airtight purposes. However, these known latch patents are all composed of complex mechanical structures, which will not only increase the failure rate, but also generate too much mechanical friction during the operation process, which will cause contamination of the wafer; in addition, through The displacement of the movable spigot is used to fasten the elastic air-tight part, but the air-tight effect is not good, and the air-tightness cannot be maintained for a long time.

Moreover, some restricting parts are also arranged on the inner surface of the door body 20 of the current common front-opening wafer box, so that when the door body 20 covers the box body 10, these restricting parts will contact the wafer, so that the wafer It is fully fixed to reduce the misalignment of wafers during transportation in the front opening wafer cassette. And in order to avoid that when the limiter contacts with the disc, the force is too great to cause the collision and friction of the disc; therefore, as shown in FIG. Between the cam 232 and the door body 20, when the cam 232 rotates and drives the movable pin 231 to close the front-opening wafer box, the elastic component 86 can play a damping effect, so that it is arranged on the inner surface of the door body 20 The limited parts can contact the disc in a gentle and smooth state, so that the problems of collision and friction can be solved. These patents include US6,880,718, US7,168,587 and US7,182,203, etc. However, this method similar to lateral traction tends to generate an offset force in the moving direction of the movable pin 231, which will cause it to fail to be inserted into the socket of the box body 10, so that the box body 10 and the door body 20 cannot be connected. cover. At the same time, the manufacturing cost of the front opening wafer cassette will also be increased.

Contents of the invention

In the door structure of the front-loading wafer box according to the known technology, the door latches are composed of complex mechanical structures, which will not only increase the failure rate, but also generate too much mechanical friction during the operation process. , which may cause contamination of the wafer. Therefore, the object of the present invention is to provide a door latch structure equipped with an elliptical cam in the front-opening wafer box, so that the sliding device can only reciprocate on a single plane, so the structure of the door latch can be simplified.

Another object of the present invention is to provide a door latch structure equipped with an elliptical cam in a front-opening wafer box. The design of the pulley can reduce the reciprocating movement when the elliptical cam drives the sliding device to perform reciprocating movement on a single plane. When the friction, it can reduce pollution.

Another object of the present invention is to provide a door latch structure equipped with an elliptical cam in a front-opening wafer box, which can form a recessed area between the door latch structures, so that the recessed area can effectively accommodate the wafers, so The size of the front and rear diameters of the front-opening wafer box can be shortened, and the center of gravity of the whole wafer box can be more concentrated in the center of the wafer box, so as to increase the stability of the wafer box.

Another object of the present invention is to provide a door latch structure equipped with an elliptical cam in a front-opening wafer box, which can be equipped with a wafer restricting member on the inner surface of the door body, and can effectively fix the wafers.

In order to achieve the above-mentioned purposes, the front-opening wafer box provided by the present invention mainly includes a box body, a plurality of slots are arranged inside the box body to accommodate a plurality of wafers, and an opening is formed on one side of the box body It can be used for the input and output of a plurality of wafers, and a door body, which has an outer surface and an inner surface. The door body is combined with the inner surface and the opening of the box body, and is used to protect the plurality of wafers inside the box body. Among them, the front-opening wafer box is characterized in that: the inner surface of the door is configured with a recessed area and the recessed area is located between two protruding platforms, and each protruding platform is equipped with a latch structure inside, which includes an elliptical cam, a For the sliding device in contact with the two ends of the elliptical cam, at least one pulley is arranged inside the protruding platform and embedded in the sliding groove of the sliding device, and a positioning elastic piece integrated with the sliding device.

The present invention then provides a front-opening wafer box, which mainly includes a box body. There are a plurality of slots inside the box body to accommodate a plurality of wafers, and an opening is formed on one side of the box body for a plurality of wafers. The input and output of the wafer, and a door body, which has an outer surface and an inner surface, the door body is combined with the inner surface and the opening of the box body, and is used to protect a plurality of wafers inside the box body, and the front opening type The wafer box is characterized in that: at least one latch structure is arranged between the outer surface and the inner surface of the door, which includes an elliptical cam, a pair of sliding devices in contact with the two ends of the elliptical cam, and at least one pulley is arranged on the outer surface and the inner surface of the door and embedded in the sliding groove of the sliding device, and a positioning elastic piece integrally connected with the sliding device.

Description of drawings

Fig. 1 is the schematic diagram of the wafer box of known technology;

Fig. 2 is the door schematic diagram of the front-opening type wafer box of known technology;

Fig. 3 is a schematic diagram of the door latch structure of the front-opening wafer box of the known technology;

Fig. 4 is the schematic diagram of the door body of the front-opening wafer box of known technology;

Fig. 5 is the upper view of a kind of door body and its latch structure of the front-opening wafer box of the present invention;

Fig. 6 is a partially enlarged schematic view of the latch structure in Fig. 5 of the present invention;

7A to 7C are enlarged schematic views of the sliding device of the latch structure of the present invention;

Fig. 8 is a schematic diagram of the latch structure of the present invention when it is closed;

Fig. 9 is a schematic diagram of a front-opening wafer cassette of the present invention;

Fig. 10 is a schematic diagram of a wafer limiting module of a front-opening wafer cassette of the present invention;

Fig. 11 is a schematic diagram of a front-opening wafer box of the present invention, wherein the wafer limiting member module is fixed to the door body;

Fig. 12 is a schematic diagram of a front-opening wafer cassette of the present invention, whose wafer restricting module is used to restrict wafers;

Fig. 13A is a schematic diagram of the integral formation of the left and right wafer limiting modules of a front-opening wafer box of the present invention;

Fig. 13B is a schematic diagram of a front-opening wafer box of the present invention, in which the left and right wafer limiter modules are integrally formed and fixed on the door body;

Figure 14 is a schematic diagram of another front-opening wafer box of the present invention;

Fig. 15 is a schematic diagram of another front-opening wafer cassette of the present invention, its wafer restraint module;

Fig. 16A is a schematic diagram of another front-opening wafer cassette of the present invention whose wafer limiting member just contacts the wafer;

FIG. 16B is a schematic diagram of another front-opening wafer cassette of the present invention, whose wafer limiting member is used to limit wafers;

Fig. 17 is a schematic diagram of another front-opening wafer cassette of the present invention;

Fig. 18 is a schematic diagram of another front-opening wafer cassette of the present invention, its wafer restraint module;

FIG. 19A is a schematic diagram of another front-opening wafer cassette of the present invention, whose wafer limiting member does not contact the wafer; and

FIG. 19B is a schematic diagram of another front-opening wafer cassette of the present invention, where the wafer limiting member is used to limit the wafers.

Explanation of main component symbols in the drawings

10 boxes 11 slots

12 openings 20 doors

21 outer surface 22 inner surface

23 Latch opening 24 Recessed area

25 protruding platforms 26 protruding columns

27 bolt hole 30 limiter module

31 base 31S short side

31L long side 32 curved extension

32C semicircular protrusion 32G central guide groove

33 mounting holes 34 holes

400 limit piece module 40 limit pieces

41 Base 42 Bending

43 crank arm 44 first contact end

45 second contact end 500 limit piece module

50 limited parts 51 base

52 The first crank arm 53 The second crank arm

54 first contact end 55 second contact end

56 third contact end 57 hub

W disc 60 latch structure

62 elliptical cam 622 positioning slot

64 sliding device 644 positioning pulley

642 chute 66 pulley

662 pulley 664 pulley

68 positioning shrapnel

Detailed ways

In order to fully and clearly disclose the technical content used in the present invention, the purpose of the invention and the effects achieved, the following detailed description is provided with the accompanying drawings.

Please refer to FIG. 5 , which is a top view of a latch structure 60 of a door body 20 of the front opening wafer cassette of the present invention. As shown in Figure 5, a pair of latch structures 60 are included between the outer surface and the inner surface of the door body 20, wherein each latch structure 60 consists of an elliptical cam 62, a pair of sliding devices 64 contacting the two ends of the elliptical cam 62, At least one pulley 66 is disposed between the outer surface and the inner surface of the door body 20 and embedded in the sliding groove 642 of the sliding device 64 and at least one positioning elastic piece 68 integrally connected with the sliding device 64 . Next, please refer to FIG. 6 , which is an enlarged schematic view of the contact end of the elliptical cam 62 and the sliding device 64 in FIG. 5 . As shown in Figure 6, in a preferred embodiment of the present invention, a positioning pulley 644 can be reconfigured at the contact point of the sliding device 64 with the two ends of the elliptical cam 62, and when the elliptical cam 62 rotates, it can be lowered. The friction force between the sliding device 64 and the elliptical cam 62; in addition, also can be by the design of a plurality of positioning grooves 622 on the elliptical cam 62, when making the elliptical cam 62 rotate, the positioning pulley 644 can slide into the positioning groove 622 very smoothly, with As the limit point when the elliptical cam 62 rotates. In the embodiment of the present invention, the elliptical cam 62 can be made of metal material, or it can also be formed of polymer plastic material, which is not limited by the present invention.

Next, please refer to FIG. 7A to FIG. 7C , which are enlarged schematic views of the sliding device 64 of the latch structure 60 of the present invention. A positioning pulley 644 is configured on one end of the sliding device 64, and on the other opposite end, then is a solid plane 646, and a chute 642 is then formed between the two ends, and this chute 642 can be fixed on the The pulleys 66 (shown in FIG. 7B ) inside the door body 20 are embedded together. In addition, the sliding device 64 is connected to one end of the positioning elastic piece 68 near the end of the positioning pulley 644 , and the other end of the positioning elastic piece 68 is fixed on the door body 20 . Therefore when the door body 20 will close the opening 12 of the box body 10, the door body 20 will be combined with the box body 10 first, and then the elliptical cam 62 will be rotated; The edge direction of the body 20 is advanced, so that the solid plane 646 of the sliding device 64 can pass through the latch hole 27 on the door body 20 and extend into the insertion hole (not shown in the figure) that is located near the edge of the opening of the box body 10 and corresponds to the latch hole 27. In the figure), the box body 10 is combined with the door body 20 to complete the action of closing the box body 10. At this time, the positioning elastic piece 68 will be compressed, so when the door body 20 is about to be opened, as the elliptical cam 62 rotates, the positioning elastic piece 68 will also drive the sliding device 64 to return to the open state according to the force provided by Hooke's law. Location. In the embodiment of the present invention, the sliding device 64 and the positioning elastic piece 68 may be made of metal, or may be formed of polymer plastic material, which is not limited by the present invention. And the material of the pulley 66 is not limited.

In addition, as shown in FIG. 7B , in a preferred embodiment, the pulleys 66 are arranged in pairs inside the door body 20 and are separated from each other by an appropriate distance. Therefore, when the pulley 662 and the pulley 664 are embedded in the sliding groove 642 of the sliding device 64 , the pair of pulleys 66 can correctly and smoothly guide the plane 646 of the sliding device 64 to pass through the latch hole 27 on the door body 20 .

It should be emphasized here that in the foregoing process of the present invention, an elliptical cam 62 and a sliding device 64 are used to illustrate the operation process of the door latch structure 60, but in fact, each elliptical cam 62 is in contact with a pair of sliding devices 64 , and a pair of latch structures 60 are disposed inside each door body 20 (as shown in FIG. 5 : at this time, the door body 20 of the present invention is in an open state). Since the cam in the latch structure 60 of the present invention is an elliptical cam 62, the elliptical cam 62 forms a pair of latch openings (not shown in the figure) on the outer surface 21 of the door body 20 . Since the elliptical cam 62 has a longer radius Y and a shorter radius X, the present invention uses the difference between the different radii of the elliptical cam 62 as the starting component for controlling the reciprocating movement of the sliding device 64; for example If it is desired to move the sliding device 64 up or down by 10 mm to 30 mm to the two sides of the door body 20, so that the front end of the sliding device 64 can pass through the door body 20, then the longer radius of the elliptical cam 62 and the larger The length difference between the short radii must be at least 10 mm to 30 mm. Since the two ends of the elliptical cam 62 with a shorter radius are in contact with a pair of sliding devices 64 located at both ends when the door body 20 is opened, obviously, after the door body 20 and the box body 10 are closed, the Rotate the elliptical cam 62 so that the slide 64 positioned at both ends becomes in contact with the longer radius of the elliptical cam 62; because the length difference between the longer radius and the shorter radius of the elliptical cam 62 will have at least 50mm, so When the elliptical cam 62 rotates to the positioning slot 622 at the long radius Y position, the front plane 646 of the sliding device 64 can pass through the latch hole 27 on the door body 20 (as shown in FIG. 8 ). It should be emphasized here that since the sliding device 64 is connected to one end of the positioning elastic piece 68 near the end of the positioning pulley 644 , the other end of the positioning elastic piece 68 is then fixed on the door body 20 . Therefore, when the elliptical cam 62 rotates to the positioning groove 622 on the long radius Y position, the sliding device 64 will be pushed by the elliptical cam 62 to the latch hole 27 on the edge of the door body 20. At this time, the positioning spring 68 will be compressed, so When the door body 20 is about to be opened, as the elliptical cam 62 rotates to the positioning groove 622 at the short radius X position, the positioning spring 68 will also drive the sliding device 64 back to the open state according to the force provided by Hooke's law. position (that is, the locating groove 622 where the elliptical cam 62 stays at the short radius X position).

Next, please refer to FIG. 9 , which is a schematic diagram of a front-loading wafer cassette according to the present invention. The front open wafer box mainly includes a box body 10 and a door body 20. A plurality of slots 11 are provided inside the box body 10 to accommodate a plurality of wafers, and one side of the box body 10 has a The opening 12 can provide the input and output of the wafer, and the door body 20 has an outer surface 21 and an inner surface 22, and the outer surface 21 of the door body 20 is configured with at least one latch opening (not shown in the figure), for To open or close the front-opening wafer box, a recessed area 24 is disposed in the middle of the inner surface 22 of the door body 20 and the recessed area 24 is located between the two protruding platforms 25, wherein the inside of the two protruding platforms 25 The aforementioned latch structure 60 is arranged. The main purpose of the recessed area 24 is to receive a plurality of wafers inside the box body 10, so as to reduce the front and rear diameter dimensions of the entire wafer box, and a wafer restraint module 30 is respectively arranged on the two protruding platforms 25, In addition to restricting the movement of the wafer toward the opening, it can also be used to control the amount of the wafer entering the recessed area 24 .

The length of the recessed area 24 on the inner surface 22 of the door body 20 is related to the spacing between the slots 11 inside the box body 10 and the number of wafers. For a 12-inch (about 30 cm) wafer, the industry has established standards for the spacing between wafers, in order to achieve the maximum wafer loading density and accommodate the robotic arm for wafer input and output. ; And the current common wafer box can accommodate about 25 wafers. However, the width and depth of the recessed area 24 of the present invention can be more flexible. When the thickness of the door body 20 remains unchanged, the depth of the recessed area 24 is set larger, which can allow the wafer to enter the recessed area 24 more. , and at this time, the width of the recessed region 24 also needs to increase accordingly.

Next, please refer to FIG. 10 and FIG. 11 , which are schematic diagrams of a front-opening wafer cassette of the present invention, the wafer limiting member module and its fixing to the door body. The wafer restrictor module 30 has a strip-shaped base 31, the strip-shaped base 31 has two long sides 31L and two short sides 31S, and one of the two long sides 31L is adjacent to the recessed area 24. A plurality of bending portions 32 arranged at intervals are formed on the adjacent long side 31L, and an approximately semicircular protruding portion 32C is formed between each bending portion 32 and its free end, and an approximately semicircular protruding portion 32C A central guide groove 32G is configured on the upper surface, so that the central guide groove 32G of the semicircular protruding portion 32C contacts with the wafer, and the corresponding wafer can be restricted from moving toward the opening direction.

The central guide groove 32G of the above-mentioned approximately semicircular protruding portion 32C is used to accept the wafer. The width of the central guide groove 32G can be the same as the thickness of the wafer, so that the wafer can be trapped in the central guide groove 32G to avoid The up and down movement of the disc. The surface of the central guide groove 32G that contacts the wafer can be coated with a wear-resistant consumable material, such as polyetheretherketone (PEEK), to reduce the friction on the wafer. In addition, the wafer restraint module 30 can be an integrally formed structure, and can be made of one material or two different materials, for example: the base 31 and the bending portion 32 are made of one material In addition, a semicircular protruding portion 32C of another material is formed on the bending portion 32 . Obviously, the elongated base 31 forms an angle with the bending portion 32, and the angle is about 10-60 degrees. Because the wafer restriction module 30 on both sides of the recessed area 24 is symmetrical, therefore, when the wafer restriction module 30 is restricting the wafer (as shown in FIG. 12 ), it can produce a force that is only pushed toward the direction of the center point of the wafer. The combined force will not cause the disc to shake left and right. In addition to restricting the movement of the wafer to the opening direction, the wafer restrictor module 30 also allows the wafer to almost completely fall into the recessed area 24, so that the front and rear diameters of the wafer box are reduced, and the center of gravity of the entire wafer box is reduced. More concentrated in the center of the wafer box to increase the stability of the wafer box. And as shown in Figure 10, since there are gaps between the plurality of semicircular protrusions 32C on the bending part 32, the bending part 32 will be more elastic, which can allow the compression of the wafer and a little out of shape.

In addition, as can be seen from FIG. 11 and FIG. 12 , the base 31 has a plurality of mounting holes 33, and there are protruding columns 26 on the inner surface 22 corresponding to these mounting holes 33, so that the wafer restraint module 30 can be snapped into (snap). on) on the protruding platform 25 on both sides of the recessed area 24 of the inner surface 22 of the door body 20 . Of course, for the convenience of production, it is also possible to directly form the wafer restraint module 30 integrally with the inner surface 22 of the door body 20 to prevent the wafer restraint module 30 from falling off. Next, please refer to FIG. 13A and FIG. 13B , the wafer restrictor modules 30 on both sides of the recessed area 24 can also be integrally formed, and this integrally formed structure has a hole 34 corresponding to the recessed area 24 of the door body 20 . And this integrally formed structure can be fixed on the inner surface 22 of the door body 20 in a snap-on manner or directly integrally formed with the inner surface 22 of the door body 20 .

Next, please refer to FIG. 14 , which is a schematic diagram of another front-opening wafer cassette of the present invention. The front-opening wafer box is the same as the front-opening wafer box shown in FIG. 9 above, and includes a box body 10 and a door body 20. The difference is that the wafer restraints are fixed on both sides of the recessed area 24 on the inner surface 22 of the door body 20. Module 400 is distinct from wafer restraint module 30 described above. As shown in FIGS. 15 and 16A , the wafer restraint modules 400 on both sides of the recessed area 24 are composed of a plurality of wafer restraints 40 arranged at intervals, and each wafer restraint 40 is connected to the other side of the recessed area 24 The opposite wafer restraints 40 on the restraint module 400 are aligned, wherein each restraint 40 has a base 41 fixed on the inner surface 22 of the door body 20, and the base 41 has one side adjacent to the recessed area 24 and above the After the side extends to the opening direction of the box body 10 to form a curved portion 42, it turns to the center of the recessed area 24 and extends to form a curved arm 43. The place where the arm 43 meets the curved portion 42 has a first contact end 44 , and the free end of the curved arm 43 has a second contact end 45 . As shown in FIG. 16A , each wafer limiting member 40 can be an integrally formed elastic structure (such as a thermoplastic elastic structure). The line ( 44 - 45 ) of the first contact end 44 and the second contact end 45 is parallel to the inner surface 22 of the door body 20 . At this time, the disc first contacts the second contact end 45. When the disc contacts the second contact end 45, the bending portion 42 will be deformed and the lever drives the crank arm 43, so that the other contact end on the crank arm 43 is The first contact terminals 44 sequentially contact the wafers. At this time, as shown in FIG. 16B , the door body 20 is in close contact with the box body 10 and the connection (44-45) between the first contact end 44 and the second contact end 45 of the wafer restricting member 40 is connected to the inner surface of the door body 20. 22 forms an included angle. It is clear that each wafer restricting member 40 is in contact with the wafer with two contact ends, which can hold the wafer firmly or limit the movement of the wafer to the opening direction, and can reduce the vibration caused by the vibration during the transportation of the wafer. And produce particulate dust. In addition, the wafers are effectively dropped into the recessed area 24 to shorten the front and rear diameters of the wafer cassette.

The bending portion 42 of the above-mentioned wafer restricting member 40 is an elastic structure (such as a thermoplastic elastic structure), and has a bending angle, so when the door body 20 and the box body 10 are not tightly sealed to tightly closed, the bending angle will change. , so that the first contact end 44 and the second contact end 45 contact the wafer sequentially. In addition, the curved portion 42 and the curved arm 43 can be made of two different materials, such as plastics with different hardnesses, so that the curved portion 42 can be deformed greatly while the curved arm 43 is less likely to be deformed. The first contact end 44 and the second contact end 45 can also have a recess respectively, so that the wafer can sink into the recess to prevent the wafer from moving up and down. In addition, a plurality of wafer restraints 40 can be formed on a base, and the base is fixed on the inner surface 22 of the door body 20 . Of course, the plurality of disc restraints 40 can also be integrally formed directly with the inner surface 22 of the door body 20 , which can reduce the production cost.

Next, please refer to FIG. 17 , which is a schematic diagram of another front-opening wafer cassette of the present invention. The front-opening wafer box is the same as the front-opening wafer box shown in FIG. 14 , including a box body 10 and a door body 20 . The difference is the wafer restraint modules fixed on both sides of the recessed area on the inner surface 22 of the door body 20 500 has three contact ends per wafer restraint. As shown in FIG. 18 and FIG. 19A , the wafer restraint module 500 on both sides of the recessed area 24 is composed of a plurality of wafer restraints 50 arranged, and each wafer restraint 50 is connected to the restraint on the other side of the recessed area 24 The opposite wafer restraints 50 on the module 500 are aligned, wherein each wafer restraint 50 has a base 51, one end of the base 51 is fixed on the inner surface 22 of the door body 20, and the other end is connected to a first curved arm 52, the first crank arm 52 has two free ends, wherein the free end farther away from the center of the recessed area 24 forms a first contact end 54, and the other free end closer to the center of the recessed area 24 is further connected to a The second crank arm 53 is connected, and the second crank arm 53 has a second contact end 55 and a third contact end 56 .

Since the base 51 of the wafer limiting member 50 is an elastic structure (for example: a thermoplastic elastic structure), there is at least one bend, when the door body 20 is not combined with the box body 10 or is just about to be combined, the first part of the wafer limiting member 50 The two curved arms 53 are flat or slightly suspended on or above the surface of the recessed area 24 . At this time, the disc first contacts with the first contact end 54. When the disc contacts the first contact end 54, the base 51 will be deformed, that is, the angle of the bend will change and the lever will drive the first crank arm 52 and the second crank arm 52. The arm 53 makes the second contact end 55 and the third contact end 56 on the second curved arm 53 contact the wafer. At this time, as shown in FIG. 19B, when the door body 20 is tightly sealed with the box body 10, the second curved arm 53 is driven by the lever of the base 51 and the first curved arm 52 to move away from the surface of the recessed area 24, and the wafer restricts The first contact end 54 , the second contact end 55 and the third contact end 56 of the element 50 are in contact with the wafer. Obviously, since each wafer restricting member 50 provides three contact ends to the wafer, it can more firmly restrict the movement of the wafer toward the center of the opening or the movement of the opening toward the sides. Of course, in this embodiment, a hinge 57 can also be arranged between the two free ends of the first curved arm 52 and on one side close to the inner surface 22 of the door body 20, and the hinge 57 is fixed on the inner surface 22 of the door body 20, In this way, when the base 51 is deformed or the angle of its bend changes, the first crank arm 52 and the second crank arm 53 can be leveraged more firmly, so that the first contact end 54, the second contact end 55 and the third contact end 56 are all Can be in close contact with the wafer.

And like the embodiment of the aforementioned two contact ends, each of the plurality of wafer restraints 50 can be an integrally formed elastic structure (for example: thermoplastic elastic structure), and its base 51 is connected to the first curved arm. 52 or the second crank arm 53 can also be made of different materials or elastic structures (for example: thermoplastic elastic structure), such as plastics with different hardness, which can make the base 51 have greater deformation and the crank arm system is less likely to deform. Certainly, the first contact end 54 , the second contact end 55 and the third contact end 56 may also have a recess, which can make the wafer fall into the recess and prevent the wafer from moving up and down. The plurality of disc restraints 50 may also be formed on a base first, and the base is fixed on the inner surface 22 of the door body 20 or the plurality of disc restraints 50 are directly integrated with the inner surface 22 of the door body 20 take shape.

In addition, the inner surface 22 of the door body 20 of the present invention can be a plane without any depression, and at least one latch structure 60 is disposed between the inner surface 22 and the outer surface 21, and in a preferred embodiment it is A pair of latch structures 60 are provided. Since the latch structure 60 is the same as the previous embodiment, it will not be repeated here. In addition, in order to fix the plurality of wafers placed in the box body 10 when the door body 20 and the box body 10 are closed, at least one restricting element module or near the center can be disposed on the inner surface 22 of the above-mentioned plane. The region is configured with at least one restriction module. The present invention does not limit the structure or form of the restrictor module, so it may include the aforementioned restrictor module 30 , restrictor module 400 or restrictor module 500 or similar structures. Likewise, since the detailed structure of the restriction module is the same as that of the foregoing embodiments, it will not be repeated here.

Obviously, under the drive of the elliptical cam 62, the latch structure 60 of the present invention only performs back-and-forth motions forward and backward without any displacement in any longitudinal (i.e. vertical) direction. Therefore, the latch structure 60 of the present invention It is a relatively simple design. When the door body 20 of the present invention is closed with the box body 10, the plurality of disc limiters 50 fixed on the inner surface 22 of the door body 20 directly contact the discs together, and the cam 62 drives a pair of sliding devices 64 toward the door body. 20 moves, and then the front plane 646 of the sliding device 64 passes through the latch hole 27 on the door body 20 and is fastened in the insertion hole near the edge of the opening of the box body 10 and corresponding to the latch hole 27. Finally, an air-tight member (not shown) disposed between the door body 20 and the box body 10 can be inflated through an inflator device, so as to isolate the inside of the box body 10 from the outside.

Although the present invention is described above with the foregoing preferred embodiments, it is not intended to limit the present invention. Those skilled in the art may make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the present invention The protection scope of the rights shall be subject to the content defined by the scope of the claims of the application for the present invention.

Claims (16)

1. front open type wafer box; mainly comprise a box body; this box body inside is provided with most slots with a ccontaining majority disk; and form input and the output of an opening in a side of this box body for this majority disk; and the edge at this box opening place disposes at least one pair of jack; and body; have an outer surface and an inner surface and dispose at least one pair of in the edge of this body and this fastens the hole with a bolt or latch accordingly to jack; this body is to combine with this opening of this box body with this inner surface; and in order to protect this majority disk of this box body inside, wherein this front open type wafer box is characterised in that:

This internal surface configurations one sunk area of this body and this sunk area protrude between the platform two, each should protrude platform internal configurations one bolt structure, the carriage, at least one wheels arrangements that this bolt structure comprises an elliptic cam, a pair of and these elliptic cam two end in contact is inner and be embedded in the chute of this carriage and a Location resilient piece that links into an integrated entity with this carriage in this protrusion platform of this body, makes this carriage travel to and fro between this in jack and this door bolt hole by the rotation of controlling this elliptic cam.

2. front open type wafer box as claimed in claim 1, wherein, an end of this carriage configuration one is located pulley and should be contacted with this elliptic cam by the location pulley.

3. front open type wafer box as claimed in claim 1, wherein, most location notchs of configuration on this elliptic cam.

4. front open type wafer box as claimed in claim 1 wherein, respectively disposes at least one limiting piece module on this two protrusions platform.

5. front open type wafer box as claimed in claim 4, wherein, those limiting piece modules have a base and via this base this limiting piece module are fixed on this protrusion platform, and form most the spaced curved portions that prolong on the long limit of this base, each should curved prolong the protuberance that forms approximate half-circular between portion and its free end, and configuration one central guide groove is contacted with disk by the central guide groove of this semicircular protuberance on the protuberance of each this approximate half-circular on each this limiting piece module.

6. front open type wafer box as claimed in claim 5, wherein, the local surface that the central guide groove of this protuberance contacts with disk coats a wear-resisting consumptive material.

7. front open type wafer box as claimed in claim 4, wherein, those limiting piece modules are made up of most spaced limited parts, limited part on the limiting piece module of each this limited part and this sunk area another side aligns, and each this limited part has a base portion, this base portion is fixed on this inner surface of this body, and those base portions are on a side of contiguous this sunk area, after connecting a bend, each this bend further extends into one to this sunk area centre and cranks arm, and this is cranked arm and is disposed at the top of this sunk area.

8. front open type wafer box as claimed in claim 7, wherein, this limited part is a kind of elastic parts.

9. front open type wafer box as claimed in claim 7, wherein, this is cranked arm and this bend junction forms one first contact jaw, and the free end that this is cranked arm forms one second contact jaw.

10. front open type wafer box as claimed in claim 4, wherein, this limiting piece module is arranged institute by most limited parts and is formed, limited part on the limiting piece module of each this limited part and this sunk area another side aligns, and each this limited part has a base portion, one end of this base portion is fixed on this inner surface of this body, and its other end and one first is cranked arm and is connected, this first is cranked arm and has two free ends, and form one first contact jaw than free end away from this sunk area centre, and another free end of this first contact jaw is also cranked arm and is connected with one second relatively, and this second is cranked arm and have one second contact jaw and one the 3rd contact jaw.

11. front open type wafer box as claimed in claim 10, wherein, this first is cranked arm between this two free end and disposes a hinge near on the side of this inner surface.

12. front open type wafer box as claimed in claim 11, wherein, this hinge and this inner surface are fixed.

13. front open type wafer box; mainly comprise a box body; this box body inside is provided with most slots with a ccontaining majority disk; and form input and the output of an opening in a side of this box body for this majority disk; and the edge at this box opening place disposes at least one pair of jack; and body; have an outer surface and an inner surface and dispose at least one pair of in the edge of this body and this fastens the hole with a bolt or latch accordingly to jack; this body is to combine with this opening of this box body with this inner surface; and in order to protect this majority disk of this box body inside, wherein this front open type wafer box is characterised in that:

At least one bolt structure of configuration between this inner surface of this body and this outer surface, the carriage, at least one wheels arrangements that this bolt structure comprises an elliptic cam, a pair of and these elliptic cam two end in contact is between this inner surface of this body and this outer surface and be embedded in the chute of this carriage and a Location resilient piece that links into an integrated entity with this carriage, makes this carriage travel to and fro between this in jack and this door bolt hole by the rotation of this elliptic cam of control.

14. front open type wafer box as claimed in claim 13, wherein, an end of this carriage configuration one location pulley.

15. front open type wafer box as claimed in claim 13, wherein, most location notchs of configuration on this elliptic cam.

16. front open type wafer box as claimed in claim 13, wherein, at least one limiting piece module of configuration on this inner surface of this body.

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