CN101620988A - Stacked load lock chamber and substrate processing apparatus including the same - Google Patents

Abstract

The present invention relates to a stacked load lock chamber comprising: a first load lock chamber; a second load lock chamber stacked on the first load lock chamber; a first slit valve mover configured to open and close an arrangement a first opening to the atmospheric side of the first load lock chamber; a second slit valve mover configured to open and close a second opening disposed to the atmospheric side of the second load lock chamber; a first arm connected to a first slit valve mover; a second arm connected to the second slit valve mover; and a driver located below the first and second load lock chambers and configured to drive the first and second arms, to move the first and second slit valve moving members through the first and second arms.

Description

Stacked load lock chambers and substrate processing equipment incorporating same

technical field

[0001] The present invention relates to a stack load lock chamber and a substrate processing apparatus including the stack load lock chamber.

Background technique

[0002] Japanese Patent Laid-Open Nos. 11-330199 and 2001-44258 disclose processing apparatuses each including a load lock chamber in which two chambers are stacked in a vertical direction.

[0003] FIG. 1 of Japanese Patent Laid-Open No. 11-330199 discloses a vacuum processing apparatus in which a processing chamber, a transfer chamber, and a load lock chamber are arranged in line in this order. This load lock chamber is a two-stage chamber in which a heating chamber and a cooling chamber are stacked vertically. FIG. 3 of Japanese Patent Laid-Open No. 11-330199 discloses an arrangement in which a gate valve for a heating chamber and a gate valve for a cooling chamber are separately arranged.

[0004] Japanese Patent Laid-Open No. 2001-44258 discloses a substrate processing apparatus in which a plurality of load lock chambers each having a vertical multi-stage are arranged around a transfer chamber so that simultaneous Accommodates multiple target substrates. Also, according to FIGS. 2 to 4 of Japanese Patent Laid-Open No. 11-330199, each load lock chamber of the vertical stage includes an opening/closing door 204 .

[0005] A load lock chamber is a chamber that isolates the atmospheric side from the vacuum side. When loading and unloading substrates from the atmosphere side into the load lock chamber, particles may flow from the atmosphere side into the load lock chamber. If the particles flowing into the load lock chamber adhere to the substrate, defects caused by the particles may appear in the processed substrate.

[0006] In the arrangement where the load lock chamber is provided with a gate valve and an opening/closing door, if the driving mechanism for opening/closing the gate valve or opening/closing door is at a position equal to or higher than the opening position of the load lock chamber, it will not convenient. More specifically, when the drive mechanism operates, the sliding portion of the drive mechanism generates particles. As these particles fall, they flow through its opening into the load lock chamber.

Contents of the invention

[0007] The present invention provides technical advantages for reducing the risk of particles flowing sideways from the atmosphere into a load lock chamber.

[0008] According to a first aspect of the present invention, there is provided a stacked load lock chamber, which includes: a first load lock chamber; a second load lock chamber stacked on the first load lock chamber; the first slit valve movement A member configured to open and close a first opening provided to the atmosphere side of the first load lock chamber; a second slit valve moving member configured to open and close a second opening provided to the atmosphere side of the second load lock chamber. an opening; a first arm connected to the first slit valve mover; a second arm connected to the second slit valve mover; and an actuator located below the first and second load lock chambers and configured to The first and second arms are driven to move the first and second slit valve movers through the first and second arms.

[0009] According to a second aspect of the present invention, there is provided a vacuum processing apparatus comprising: a cylindrical transfer chamber including a polygonal bottom surface and a polygonal upper surface, and a plurality of sides connected to a plurality of processing chambers; and The aforementioned stack load lock chamber connected to adjacent ones of the plurality of sides of the transfer chamber.

[0010] Other features of the present invention will become apparent from the following description of exemplary embodiments with reference to the accompanying drawings.

Description of drawings

1 is a schematic perspective plan view illustrating an arrangement of a substrate processing apparatus according to an embodiment;

[0012] FIG. 2A is a side sectional view of the load lock chamber taken along line A-B in FIG. 1 (seen from the direction of arrow X in FIG. 1);

[0013] FIG. 2B is a side sectional view of the load lock chamber taken along line A-B in FIG. 1 (seen from the direction of arrow X in FIG. 1);

[0014] FIG. 2C is a side sectional view of the load lock chamber taken along line A-B in FIG. 1 (seen from the direction of arrow X in FIG. 1);

[0015] FIG. 3A is a schematic cross-sectional view of the load lock chamber seen from the direction of arrow Y in FIG. 1;

[0016] FIG. 3B is a schematic cross-sectional view of the load lock chamber seen from the direction of arrow Y in FIG. 1;

[0017] FIG. 4 is a schematic sectional view of the load lock chamber seen from the direction of arrow Y in FIG. 1; and

[0018] FIGS. 5A and 5B are schematic sectional views of a vacuum processing apparatus.

Detailed ways

[0019] Embodiments of the present invention will be described below with reference to the accompanying drawings.

[0020] First, an arrangement of a cluster-type substrate processing apparatus according to an embodiment will be explained with reference to FIGS. 1 and 2 . FIG. 1 is a schematic perspective plan view showing the arrangement of a substrate processing apparatus according to this embodiment.

[0021] As shown in FIG. 1, the substrate processing apparatus according to this embodiment includes: a transfer chamber 3 arranged at the center and capable of being evacuated; and a plurality of processing chambers 201 to 206 and a plurality of 2 stacked load lock chambers. According to this embodiment, the transfer chamber 3 forms an almost octagonal cylinder. Eight sides of the transfer chamber 3 are connected to the process chambers 201 , 202 , 203 , 204 , 205 , and 206 and the stack load lock chamber 2 . The transfer chamber 3 is connected to the process chambers 201 to 206 and the stack load lock chamber 2 through gate valves 5 so that the transfer chamber 3 can be maintained airtight. The processing chambers 201 to 206 may be formed as chambers of processing equipment selected from, for example, sputtering deposition equipment, chemical vapor deposition (CVD) equipment, and dry etching equipment. Each stacked load lock chamber 2 includes a plurality of load lock chambers 100 and 150 stacked vertically. "Stacked" in this specification means that two members are arranged vertically to overlap. The two components do not have to overlap completely, but it is sufficient that they overlap by at least half when viewed from the top.

[0022] According to this embodiment, the transfer chamber 3 forms an almost octagonal cylinder. However, the arrangement of the transfer chamber 3 is not limited thereto. For example, the transfer chamber 3 may have a cylindrical shape in which both the bottom surface and the upper surface are arbitrary polygons. Multiple processing chambers are connected to multiple sides of the transfer chamber 3 of this polygonal cylinder.

[0023] Furthermore, as shown in FIG. 1, the substrate processing apparatus of this embodiment may include an automatic loader 41. For example, the automatic loader 41 is constituted by an articulated robot comprising an arm movable in a horizontal plane and vertically. The autoloader 41 transfers the substrate 9 between the load lock chambers 100 and 150 and the three outer cassettes 60 , for example.

The transfer chamber 3 includes a transfer mechanism 42 that transfers the substrate 9 between the process chambers 201 to 206 and the load lock chamber 2 . For example, the transfer mechanism 42 is composed of an articulated robot, and can transfer the substrate 9 to any position in the horizontal plane and any position in the vertical direction within the working range, and the articulated robot includes a substrate 9 to be placed on it. arm.

[0025] The arrangement of the load lock chamber 2 according to this embodiment will be described in detail below with reference to FIGS. 2A to 3B.

[0026] FIGS. 2A to 2C are schematic sectional views of the stacked load lock chamber 2 taken along line A-B in FIG. 1, respectively. In FIGS. 2A to 2C , the transfer chamber 3 on the vacuum side is arranged on the right side, and the automatic loader 41 on the atmosphere side is arranged on the left side. The stacked load lock chamber 2 includes a plurality of load lock chambers 100 and 150 stacked vertically. 2A shows a state in which an upper slit-valve mover 101 and a lower slit-valve mover 151 close the atmosphere-side openings of the upper load-lock chamber 100 and the lower load-lock chamber 150, respectively. 2B shows a state in which the upper slit valve movable member 101 and the lower slit valve movable member 151 of which the atmosphere side openings of the upper load lock chamber 100 and the lower load lock chamber 150 are opened, respectively. 2C shows a state in which the slit valves 101 and 151 are separated from the atmosphere side openings of the upper load lock chamber 100 and the lower load lock chamber 150, respectively, and the slit valve movable members 101 and 151 are retracted to out of the way of the load lock chambers. 100 and 150 for maintenance and cleaning locations. It should be noted that a valve mover may also be referred to as a valve element or a valve.

[0027] FIGS. 3A and 3B are schematic views of the load lock chamber viewed from the direction of arrow Y in FIG. 1. FIG. FIG. 3A shows a state in which the upper slit valve movable member 101 and the lower slit valve movable member 151 close the atmosphere side openings of the upper load lock chamber 100 and the lower load lock chamber 150 , respectively. 3B shows a state in which the upper slit valve movable member 101 and the lower slit valve movable member 151 of which the atmosphere side openings of the upper load lock chamber 100 and the lower load lock chamber 150 are opened.

[0028] The stacked load lock chamber 2 of this embodiment has a structure in which the upper load lock chamber 100 as the second load lock chamber is stacked on the lower load lock chamber 150 as the first load lock chamber, so they are adjacent of. The substrate 9 can be loaded into and unloaded from the upper load lock chamber 100 and the lower load lock chamber 150 through the atmosphere side (autoloader 41 ) opening and the vacuum side (transfer chamber 3 ) opening.

[0029] Each of the upper load lock chamber 100 and the lower load lock chamber 150 of this embodiment accommodates one substrate 9 and has a very small size such as 330 mm (width) × 330 mm (depth) × 15 mm (height). The internal space of the cuboid. Each of the upper load lock chamber 100 and the lower load lock chamber 150 is sized to be able to accommodate a 300 mm diameter semiconductor wafer as the substrate 9 . Each of the load lock chambers 100 and 150 of this embodiment is only 20 mm larger in width and depth than the substrate 9 . Each load lock chamber 100 and 150 of this embodiment has a dedicated exhaust system 231 that includes a pump. Each of the load lock chambers 100 and 150 has a substrate holder 22 having a substrate holding pin 221 in the inner space.

[0030] Each of the load lock chambers 100 and 150 has such a small internal space that the time required to evacuate it by the corresponding exhaust system 231 (hereinafter will be referred to as "exhaust time") is short. As the exhaust system 231 of the load lock chambers 100 and 150, for example, dry pumps each having an exhaust rate of about 1,000 liters/minute may be used. In certain prior art, the evacuation time required to evacuate the load lock chamber to about 1 x 10 ^-1 Torr to 5 x 10 ^-2 Torr (13.3 Pa to 6.67 Pa) by a similar dry pump is about 180 seconds to 240 seconds. With this embodiment, the load lock chamber can be emptied in about 15 to 20 seconds, which is about 1/10 to 1/16 of the time of the prior art.

[0031] The arrangement of the upper load lock chamber 100 and the upper slit valve moving member 101 and the opening operation of the upper slit valve moving member 101 will now be described.

[0032] As shown in FIGS. 2A and 3A, the upper load lock chamber 100 is provided with an upper slit valve movable member 101 serving as a second slit valve movable member that can open/close the atmosphere side opening, so that the upper load lock chamber 100 can be isolated from the atmosphere or open to the atmosphere. A portion of the upper slit valve movable member 101 abutting against the edge end face of the atmosphere side opening of the upper load lock chamber 100 is provided with a sealing member such as an O-ring. Thus, when the upper slit valve moving member 101 closes the atmosphere side opening of the upper load lock chamber 100, the upper load lock chamber 100 forms a highly sealed space.

[0033] The upper slit valve moving member 101 is connected to an upper left arm 103a and an upper right arm 103b as a second arm by connecting members 102a and 102b, respectively. The upper left arm 103 a is connected to the arm driver 110 a arranged below the load lock chamber 2 via the left side of the atmosphere side opening of the load lock chamber 2 . The upper right arm 103 b is connected to the arm driver 110 b arranged below the load lock chamber 2 via the right side of the atmosphere side opening of the load lock chamber 2 . The arm drivers 110a and 110b drive the upper left arm 103a and the upper right arm 103b, respectively, so that the slit valve moving member 101 is in an open position for opening the atmosphere side opening of the upper load lock chamber 100 and a closed position for closing the opening. movement between.

[0034] In this embodiment, the arm driver 110a is formed by an air cylinder. The air cylinder includes a cylinder 113a and a piston 119a that can reciprocate in the cylinder 113a. The cylinder 113a is provided with two gas ports 115 and 117 which move the piston 119a. The gas port 115 communicates with the first space in the cylinder 113a, and the gas port 117 communicates with the second space in the cylinder 113a. The piston 119a separates the first space and the second space from each other. The upper left arm 103a is connected to the U-shaped connecting member 109a through the upper left hinge 107a serving as a second hinge, and one end of the U-shaped connecting member 109a is fixed to the distal end of the piston 119a. The upper left hinge 107a includes a shaft member extending through a hole formed in the upper left arm 103a and a hole formed in the U-shaped connecting member 109a. The upper left arm 103a is rotatable around the shaft member.

[0035] In this embodiment, the arm driver 110b is formed by an air cylinder. The air cylinder includes a cylinder 113b and a piston 119b that can reciprocate in the cylinder 113b. The cylinder 113b is provided with two gas ports 115 and 117 for moving the piston 119b. The upper right arm 103b is connected to the U-shaped connecting member 109b through the upper right hinge 107b serving as a second hinge, and one end of the U-shaped connecting member 109b is fixed to the distal end of the piston 119b. The upper right hinge 107b includes a shaft member extending through a hole formed in the upper right arm 103b and a hole formed in the U-shaped connecting member 109b. The upper right arm 103b is rotatable around the shaft member. The arm drivers 110 a and 110 b are fixed to the lower surface of the base plate 121 arranged below the load lock chamber 2 .

[0036] The opening operation of the upper slit valve moving member 101 will be described with reference to FIGS. 2A and 2B.

[0037] Air is supplied into the cylinders 113a and 113b through the air port 115 and is discharged from the upper cylinders 113a and 113b to the outside through the air port 117. This moves pistons 119a and 119b in cylinders 113a and 113b, respectively, to an upper position in cylinders 113a and 113b (see Figure 2B). As described above, the pistons 119a and 119b are connected to the upper slit valve mover 101 through the connecting members 109a and 109b, the upper arms 103a and 103b, and the connecting members 102a and 102b, respectively. Therefore, when the pistons 119 a and 119 b move to the upper position, the upper slit valve movable member 101 also moves to the upper position shown in FIG. 2B and opens the atmosphere side opening of the upper load lock chamber 100 . In this way, the opening operation of the upper slit valve moving member 101 is realized. The closing operation of the upper slit valve movable member 101 is performed by supplying air into the upper cylinders 113 a and 113 b through the air port 117 and discharging air from the upper cylinders 113 a and 113 b to the outside through the air port 115 .

[0038] As shown in FIG. 2A, between the vacuum side opening of the upper load lock chamber 100 and the transfer chamber 3, an upper slit valve moving member 127 is arranged. The upper slit valve mover 127 is connected to the upper driver 123 arranged above the load lock chamber 2 through the connection member 125 . The upper driver 123 vertically moves the upper slit valve moving member 127 through the connection member 125 . Thus, the upper slit valve mover 127 can open/close the vacuum side opening of the upper load lock chamber 100 .

[0039] The arrangement of the lower load lock chamber 150 and the lower slit valve moving member 151 and the opening operation of the lower slit valve moving member 151 will now be described.

[0040] As shown in FIGS. 2A and 3A, the lower load lock chamber 150 is provided with a lower slit valve moving member 151 serving as a first slit valve that can open/close the atmosphere side opening so that the lower load lock chamber 150 can Isolated from the atmosphere or communicated with the atmosphere. A portion of the lower slit valve movable member 151 that abuts against the edge end face of the atmosphere side opening of the lower load lock chamber 150 is provided with a sealing member such as an O-ring. Thus, when the lower slit valve moving member 151 closes the atmosphere side opening of the lower load lock chamber 150, the lower load lock chamber 150 forms a highly airtight space.

[0041] The lower slit valve moving member 151 is connected to an arm driver 110c arranged below the load lock chamber 2 through a lower arm 153 serving as a first arm. The lower arm 153 vertically extends through the center of the load lock chamber 2, and is connected to the arm driver 110c. The arm driver 110c drives the lower arm 153 to move the lower slit valve mover 151 between an open position for opening the atmosphere side opening of the lower load lock chamber 150 and a closing position for closing the opening.

[0042] In this embodiment, the arm driver 110c is formed by an air cylinder. The air cylinder includes a cylinder 157 and a piston 119c that can reciprocate in the cylinder 157 . The cylinder 157 is provided with two air ports 115 and 117 for moving the piston 119c. The gas port 115 communicates with the first space in the cylinder 157 , and the gas port 117 communicates with the second space in the cylinder 157 . The piston 119c separates the first space and the second space from each other. The lower arm 153 is connected to the L-shaped connecting member 111 through the lower hinge 155 serving as a first hinge, and one end of the L-shaped connecting member 111 is fixed to the distal end of the piston 119c. The lower hinge 155 includes a shaft member extending through a hole formed in the lower arm 153 and a hole formed in the L-shaped connecting member 111 . The lower arm 153 is rotatable around the shaft member.

[0043] The arm driver 110c is fixed to the lower surface of the base plate 121 arranged below the load lock chamber 2 in the same manner as the arm drivers 110a and 110b. Therefore, the arm drivers 110 a , 110 b and 110 c are all fixed to one base plate 121 .

[0044] The opening operation of the lower slit valve moving member 151 will be described with reference to FIGS. 3A and 3B.

[0045] Air is supplied into the lower cylinder 157 through the air port 117 and is discharged from the lower cylinder 157 to the outside through the air port 115. This moves the piston 119c in the lower cylinder 157 to a lower position in the lower cylinder 157 (see FIG. 3B ). As described above, the piston 119c is connected to the lower slit valve moving member 151 through the connecting member 111 and the lower arm 153 . Therefore, when the piston 119c moves to the lower position, the lower slit valve moving member 151 also moves to the lower position shown in FIG. 3B and opens the atmosphere side opening of the lower load lock chamber 150 . In this way, the opening operation of the lower slit valve moving member 151 is realized. The closing operation of the lower slit valve movable member 151 is performed by supplying air into the lower cylinder 157 through the air port 117 and discharging the air from the lower cylinder 157 to the outside through the air port 115 .

[0046] As understood from the above description, the lower slit valve moving member 151 moves downward when opening the atmosphere side opening of the lower load lock chamber 150, and moves upward when closing the opening. In contrast, the upper slit valve moving member 101 moves upward when opening the atmosphere-side opening of the upper load lock chamber 100 and moves downward when closing the opening. Thus, when opening/closing, the lower slit valve moving member 151 and the upper slit valve moving member 101 move in opposite directions.

[0047] As shown in FIG. 2A, between the vacuum side opening of the lower load lock chamber 150 and the transfer chamber 3, a lower slit valve moving member 129 is arranged. The lower slit valve mover 129 is connected to a lower driver 133 arranged above the load lock chamber 2 through a connection member 131 . The lower driver 133 vertically moves the lower slit valve moving member 129 through the connection member 131 . Thus, the lower slit valve mover 129 can open/close the vacuum side opening of the lower load lock chamber 150 .

[0048] As shown in FIG. 2A, between the upper slit valve moving member 101 and the lower slit valve moving member 151, a partition 105 is arranged. The partition 105 serves to receive particles that may be generated around the upper slit valve moving member 101 and fall when the upper slit valve moving member 101 is opened/closed. This prevents particles generated when opening/closing the upper slit valve moving member 101 from falling around the atmosphere-side opening of the lower load lock chamber 150 to flow into the lower load lock chamber 150 .

[0049] The operation of the slit valve mover during cleaning will be described with reference to FIG. 2C.

[0050] As shown in FIGS. 2B and 3B, when the slit valve moving members 101 and 151 are opened, the arms 103a and 103b and 153 connected to them can rotate around the hinges 107b and 155 as axes and tilt toward the atmosphere side. Then, as shown in FIG. 2C , the slit valve moving members 101 and 151 , the arms 103 a and 103 b , and 153 move to positions away from the atmosphere side openings of the load lock chambers 100 and 150 . Therefore, a working space necessary for removing particles adhering to the lower surface (the surface opposite to the load lock chamber) of the slit valves 101 and 151 can be left so that the slit valve movable members 101 and 151 can be cleaned well. Since the arms 103a and 103b and 153 can be tilted individually, the slit valves 101 and 151 can be cleaned individually when necessary.

[0051] The operation of the cluster type substrate processing apparatus will be explained below mainly by referring to FIG. 1 .

[0052] First, the autoloader 41 operates to transfer the unprocessed substrate 9 from the outer cassette 60 to the upper load lock chamber 100 of the corresponding load lock chamber 2. The substrate 9 is placed on the substrate holding pin 221 (see FIG. 2A etc.) of the substrate holder 22 and positioned in the respective load lock chambers 100 and 150 .

The transfer member 42 in the transfer chamber 3 takes out the substrates 9 from the upper load lock chamber 100 of the corresponding stacked load lock chamber 2 and sends them to the processing chambers 201, 202, 203, 204, 205, and 206 in a predetermined order. . For example, the transfer member 42 takes out one substrate 9 from the upper load lock chamber 100 of the left stacked load lock chamber 2 in FIG. 1 , and then takes out another substrate 9 from the upper load lock chamber 100 of the right load lock chamber 2 . The first substrate 9 is sent to the first processing chamber 201 and heated to a predetermined temperature. Then, the second substrate 9 is sent to the second processing chamber 202 and heated to a predetermined temperature in the same manner.

[0054] As a result, the substrates 9 that have been transferred to the respective upper load lock chambers 100 of the two stacked load lock chambers 2 are processed. Then, the autoloader 41 operates again and transfers the unprocessed substrates 9 from the external cassette 60 to the empty corresponding upper load lock chambers 100 so that the upper load lock chambers 100 accommodate the substrates 9, respectively.

[0055] Then, the first substrate 9 in the first processing chamber 201 is sent to the third processing chamber 203 through the transport mechanism 42 and undergoes pretreatment etching. During this time, the second substrate 9 is prepared in the second process chamber 202 . The transport mechanism 42 transports the third substrate 9 from the load lock chamber 2 to the empty first processing chamber 201 .

[0056] Subsequently, when the first substrate 9 is sent to the fourth processing chamber 204 and an underlying film is formed thereon, the second substrate 9 that has been prepared in the second processing chamber 202 is sent to the third processing chamber 204. chamber 203 , and the fourth substrate 9 is sent from the upper load lock chamber 100 of the stacked load lock chamber 2 to the second processing chamber 202 .

[0057] The first substrate 9 is sent from the fourth processing chamber 204 to the fifth processing chamber 205 and subjected to high temperature reflow sputtering. Then, the first substrate 9 is sent to the sixth processing chamber 206 and cooled, and an underlying film is formed thereon. The second substrate 9 is transferred to the processing chamber immediately after the first substrate 9 is unloaded from the processing chamber, and is subjected to the same processing as the first substrate 9 performed in the processing chamber. Thus, the second substrate 9 is subjected to the same processing as that for the first substrate 9 by following the same processing procedure as that for the first substrate 9 . This also applies to the third and subsequent substrates 9 .

[0058] Then, the transfer mechanism 42 returns the first substrate 9 from the sixth processing chamber 206 to the lower load lock chamber 150 of the left stacked load lock chamber 2 in FIG. 1 . The autoloader 41 returns the first substrate 9 from the lower load lock chamber 150 to the original position in the atmosphere-side external cassette 60 . Then, the autoloader 41 is immediately operated to transfer the next substrate 9 to the upper load lock chamber 100 .

[0059] Thus, in the cluster type substrate processing apparatus shown in FIG. 1, the substrates 9 are sent one by one to the corresponding upper load lock chamber 100 of the left and right stacked load lock chambers. The processing chambers 201 to 206 are subjected to processing. The processed substrates 9 are returned to the outer cassette 60 via the lower load lock chambers 150 of the left and right stack lock chambers. By repeating this process, all the substrates 9 set in the three outer cassettes 60 are processed successively, and the processed substrates 9 are returned to their original positions in the outer cassettes 60 .

[0060] According to this embodiment, each of the upper load lock chamber 100 and the lower load lock chamber 150 of each stack load lock chamber 2 has an internal space sufficient to accommodate one substrate 9 so that each stack load lock Chamber 2 is sufficiently compact. This shortens the overall time required to evacuate the stacked load lock chamber 2, thereby increasing the productivity of the plant.

[0061] Furthermore, according to this embodiment, the upper slit valve moving member 101 and the lower slit valve moving member 151 move in opposite directions for opening/closing. Thus, the upper load lock chamber 100 and the lower load lock chamber 150 may be closely stacked with each other. As a result, the load lock chamber 2 can be made compact.

[0062] It is assumed that the upper slit valve moving member 101 and the lower slit valve moving member 151 move in the same direction for opening/closing. It would be inconvenient if the upper load lock chamber 100 and the lower load lock chamber 150 were closely stacked on each other. More specifically, when both the upper slit valve mover 101 and the lower slit valve mover 151 move upward, the lower slit valve mover 151 undesirably partially covers the opening of the upper load lock chamber 100 . When both the upper slit valve mover 101 and the lower slit valve mover 151 move downward, the upper slit valve mover 101 undesirably partially covers the opening of the lower load lock chamber 150 . Therefore, if the upper slit valve movable member 101 and the lower slit valve movable member 151 move in the same direction for opening/closing, the upper load lock chamber 100 and the lower load lock chamber 150 must be spaced apart from each other. In this case, the stack load lock chamber 2 inevitably becomes larger due to the space left between the upper load lock chamber 100 and the lower load lock chamber 150 . In contrast, according to this embodiment, such a space is unnecessary, so that the load lock chamber 2 can be made compact.

[0063] According to this embodiment, the arm drivers 110a to 110c are arranged below the corresponding stack load lock chambers 2. Particles generated during operation of the arm drives 110 a to 110 c thus do not fall onto the load lock chamber 2 . As a result, the likelihood of these particles flowing into the stack load lock chamber 2 and adhering to the substrate is low.

[0064] FIG. 4 shows a load lock chamber having essentially the same arrangement as FIG. 3, additionally including an air supply 160 supplying air to the arm drives 110a and 110b. Air supplied from a single air source flows through the duct and is uniformly supplied to the arm drivers 110a and 110b. Thus, the upper left arm 103a and the upper right arm 103b can move in a synchronized manner.

[0065] In the stacked load lock chamber 2 shown in FIG. More specifically, the vacuum chamber 5 a is connected to one side of the upper load lock chamber 100 of the stacked load lock chamber 2 through an opening. The vacuum chamber 5b is connected to one side of the lower load lock chamber 150 of the stacked load lock chamber 2 through an opening.

[0066] Although not shown, the upper load lock chamber 100 may be provided with an auxiliary exhaust port, and the exhaust port may be connected to an auxiliary pump through a connection member. Similarly, the lower load lock chamber 150 may be provided with another auxiliary exhaust port, and this exhaust port may be connected to an auxiliary pump through a connecting member.

[0067] FIGS. 5A and 5B are views for explaining the above-mentioned vacuum chamber 5a or 5b in detail. 5A is a sectional view of the vacuum processing apparatus, and FIG. 5B is a partial sectional view of the vacuum processing apparatus seen from the direction of arrow X in FIG. 5A .

[0068] As shown in FIG. 5A, a vacuum processing apparatus 1 includes a vacuum chamber 5a or 5b, an exhaust pump 6 communicated with an exhaust port 10 of the vacuum chamber 5a or 5b, and a valve member having an opening/closing exhaust port 10 11 of the gate valve 7 .

[0069] The vacuum chamber 5a or 5b is provided with a connecting member 8. The connection member 8 is connected to the exhaust port 10 when one end thereof is inserted into the exhaust port 10 , and extends from the exhaust port 10 in a direction inclined with respect to the direction of movement of the valve element 11 . The other end of the connection member 8 is connected to the exhaust pump 6 .

[0070] The gate valve 7 includes a valve element 11 arranged in the vacuum chamber 5a or 5b and a driver 12 that drives the valve element 11. The driver 12 has a rod 13 and a cylinder 14 . The rod portion 13 serves as a drive shaft that drives the valve element 11 close to the exhaust port 10 in the direction of arrow a in FIG. 5A and drives the valve element 11 and the exhaust port 10 in the direction of arrow b in FIG. 5A . separate. The cylinder 14 drives the rod 13 . The stem 13 extends parallel to the direction of movement of the valve element 11 , and the valve element 11 is supported at one end of the stem 13 . The cylinder 14 is arranged outside the connecting member 8 and connected to the other end of the rod portion 13 . The connection member 8 is integrally formed with an axial support portion 17 that supports the rod portion 13 so as to be movable in the directions of arrows a and b. Thus, the valve element 11 is supported movable by the drive 12 between a closed position P1 for closing the exhaust port 10 and an open position P2 for opening the exhaust port 10 .

[0071] The size of the outer shape of the valve element 11 is larger than the opening area of one end of the connecting member 8 inserted and connected to the exhaust port 10. Thus, the valve element 11 can close this end of the connecting member 8 . The size of the outer shape of the valve element 11 is smaller than the opening area of the exhaust port 10 of the vacuum chamber 5a or 5b. The end of the connecting member 8 is provided with a sealing portion 16 to hermetically close the inside of the vacuum chamber 5 a or 5 b together with the valve element 11 . Thus, when the valve element 11 is moved to the closing position P1, it abuts against the end face of the end of the connecting member 8 through the sealing portion 16, so it can hermetically close the inside of the vacuum chamber 5a or 5b.

[0072] As shown in FIGS. 5A and 5B, the driver 12 is provided with a bellows 18 covering the outer surface of the rod 13 so as to seal the rod 13 and the cylinder 14 in a vacuum state. One end of the bellows 18 is fixed to the axial support 17 and the other end is fixed to the bearing portion of the cylinder 14 . The airtight sealing mechanism that hermetically seals the rod portion 13 and the cylinder 14 in a vacuum state is not limited to an arrangement using a bellows member such as the bellows 18 . Another arrangement using, for example, an O-ring (not shown) fitted on the outer surface of the stem portion 13 instead of the bellows member is also possible.

[0073] According to this embodiment, the valve element 11, the rod portion 13, the cylinder 14, the connection member 8, and the exhaust pump 6 constituting a set of exhaust system can be relatively easily removed from the vacuum chamber 5a or 5b without removing all of them. Disassemble.

[0074] Assume that with the interior of the connecting member 8 evacuated, the valve element 11 is in the closed position P1 and the interior of the vacuum chamber 5a or 5b is pressurized to near atmospheric pressure. Since the valve element 11 is arranged in the vacuum chamber 5 a or 5 b , this valve element 11 receives the atmospheric pressure acting on the exhaust port 10 . In this case, therefore, atmospheric pressure is not dependent on the driving force closing the valve element 11 by the cylinder 14 . Therefore, the cylinder 14 can be made relatively small in size, which only generates the driving force necessary to move the valve element 11 and the stem 13 in the direction of arrow b when closing the valve element 11 . As a result, according to this embodiment, the cylinder 14 of the driver 12 can be made compact when compared with a conventional arrangement in which the driver requires a driving force equal to or higher than the atmospheric pressure acting on the exhaust port.

[0075] As shown in FIG. 5A , a variable orifice 23 may be arranged between the exhaust port 6 and the connecting member 8 as necessary.

[0076] Regarding the vacuum processing apparatus 1 having the above arrangement according to this embodiment, an operation of evacuating the inside of the vacuum chamber 5a or 5b will be described.

[0077] When the inside of the vacuum chamber 5a or 5b is evacuated, the exhaust pump 6 is driven. In this case, the valve element 11 can be in the closed position P1 or the open position P2.

[0078] First, when recovering, ie opening only the inside of the vacuum chamber 5a or 5b to near atmospheric pressure, the cylinder 14 is driven so that the valve element 11 moves in the direction of arrow b and stops at the closed position P1. Then, only the inside of the vacuum chamber 5a or 5b is opened to near atmospheric pressure.

[0079] Successively, when the inside of the vacuum chamber 5a or 5b is to be evacuated, the auxiliary pump evacuates the inside of the vacuum chamber 5a or 5b. Then, the cylinder 14 moves the rod portion 13 in the direction of the arrow a, so that the valve element 11 stops at the open position P2.

[0080] According to the vacuum processing apparatus 1 of this embodiment, the connecting member 8 extends in a direction oblique to the direction of movement of the valve element 11, and the rod portion 13 of the driver 12 extends in the direction of movement of the valve element 11. With this arrangement, it is possible to reduce the space necessary to install the cylinder 14 for the driver 12 of the gate valve 7 and the exhaust pump 6 outside the vacuum chamber 5a or 5b, thereby reducing the space. Therefore, with the vacuum processing apparatus 1, the entire apparatus can be made compact.

[0081] According to this embodiment, the valve element 11 is smaller than the exhaust port 10 of the vacuum chamber 5a or 5b, and the sealing portion 16 is formed at the end of the connecting member 8. Thus, the exhaust system including the gate valve 7 and the exhaust pump 6 can be removed from the vacuum chamber 5a or 5b and attached to the vacuum chamber 5a or 5b in an assembled state.

[0082] More specifically, the gate valve 7 can be relatively easily removed from the vacuum chamber 5a or 5b without completely disassembling the gate valve 7 and the exhaust pump 6. Therefore, with the vacuum processing apparatus 1, the work efficiency of maintenance of the driver 12 such as the gate valve 7 can be improved.

[0083] Furthermore, according to the present invention, since the valve element 11 is arranged in the vacuum chamber 5a or 5b, the cylinder 14 of the driver 12 can be made compact.

[0084] While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the following claims is to be accorded the broadest interpretation thereby encompassing all such modifications and equivalent structures and functions.

Claims (5)

1. stacked load lock chamber comprises:

First load lock chamber;

Be stacked on second load lock chamber on described first load lock chamber;

The first slit valve movement parts, it is configured to open and seal first opening of the atmospheric side that is set to described first load lock chamber;

The second slit valve movement parts, it is configured to open and seal second opening of the atmospheric side that is set to described second load lock chamber;

The first arm, it is connected to the described first slit valve movement parts;

Second arm, it is connected to the described second slit valve movement parts; And

Driver, it is positioned at the below of described first load lock chamber and second load lock chamber, and is configured to drive the described the first arm and second arm, so that make described first slit valve movement parts and the motion of the second slit valve movement parts by the described the first arm and second arm.

2. stacked load lock chamber according to claim 1, wherein said driver constructions becomes: when opening described first opening and described second opening, drive described first slit valve movement parts and the described second slit valve movement parts in opposite direction; And when described first opening of sealing and described second opening, drive described first slit valve movement parts and the described second slit valve movement parts in opposite direction.

3. stacked load lock chamber according to claim 1 is wherein arranged partition member between described first slit valve movement parts and the described second slit valve movement parts.

4. stacked load lock chamber according to claim 1, wherein

The described first slit valve movement parts is connected to described the first arm, and described the first arm is provided with first hinge, described first hinge allows the described the first arm of rotation, so that make the described first slit valve movement parts move to the described first opening spaced positions with described first load lock chamber

The described second slit valve movement parts is connected to described second arm, and described second arm is provided with second hinge, described second hinge allows described second arm of rotation, so that make the described second slit valve movement parts move to the described second opening spaced positions with described second load lock chamber.

5. vacuum treatment device comprises:

The cylindricality transfer chamber, it comprises polygonal basal surface and polygonal upper surface and a plurality of sides that are connected to a plurality of process chambers; And

Stacked load lock chamber according to claim 1, it is connected to adjacent side in described a plurality of sides of described transfer chamber.

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