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CN101613187B - A Method for Improving the Gas-induced Cycle Performance of WO3 Membrane - Google Patents

A Method for Improving the Gas-induced Cycle Performance of WO3 Membrane Download PDF

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CN101613187B
CN101613187B CN2009100553013A CN200910055301A CN101613187B CN 101613187 B CN101613187 B CN 101613187B CN 2009100553013 A CN2009100553013 A CN 2009100553013A CN 200910055301 A CN200910055301 A CN 200910055301A CN 101613187 B CN101613187 B CN 101613187B
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CN101613187A (en
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吴广明
高国华
梁田
张增海
史继超
沈军
周斌
倪星元
张志华
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Abstract

本发明属于环保、节能材料技术领域,涉及一种提高WO3薄膜气致变色循环性能的方法,采用可提高WO3气致变色薄膜孔隙率的无机物对WO3溶胶进行掺杂,所述无机物包括SiO2、Al2O3、P2O5、Fe2O3、CuO2。采用Sol-gel法制备稳定的WO3复合溶胶;采用提拉法或旋涂法在普通玻璃上镀制透明均匀的掺催化剂的复合WO3多孔薄膜。通过本发明掺杂复合过的溶胶制备的气致变色薄膜与未经过处理的薄膜相比,大幅提高了气致变色的循环性;与磁控溅射等方法制备的气致变色薄膜致色相比性能相同,成本大幅将低;与电致变色薄膜相比亦有同样优点。本发明很好的弥补了溶胶凝胶法制备的气致变色灵巧窗的缺点,使此类灵巧窗技术更趋于成熟。The invention belongs to the technical field of environmental protection and energy-saving materials, and relates to a method for improving the aerochromic cycle performance of a WO 3 thin film. The WO 3 sol is doped with inorganic substances that can increase the porosity of the WO 3 aerochromic thin film. The inorganic Compounds include SiO 2 , Al 2 O 3 , P 2 O 5 , Fe 2 O 3 , CuO 2 . The stable WO 3 composite sol was prepared by the Sol-gel method; a transparent and uniform composite WO 3 porous film doped with catalyst was plated on ordinary glass by the pulling method or the spin coating method. Compared with the untreated film, the aerochromic thin film prepared by doping and compounding the sol of the present invention greatly improves the cycle of aerochromic color; compared with the aerochromic thin film prepared by magnetron sputtering, etc. The performance is the same, and the cost will be significantly lower; compared with the electrochromic film, it also has the same advantages. The invention well makes up for the shortcomings of the aerochromic smart windows prepared by the sol-gel method, and makes the technology of such smart windows more mature.

Description

一种提高WO3薄膜气致循环性能的方法A Method for Improving the Gas-induced Cycle Performance of WO3 Membrane

技术领域 technical field

本发明属于环保、节能材料技术领域,涉及WO3薄膜气致变色技术,尤其是提高WO3薄膜气致循环性能的方法。The invention belongs to the technical field of environmental protection and energy-saving materials, and relates to the gas-induced color change technology of WO3 thin film, especially a method for improving the gas-induced cycle performance of WO3 thin film.

背景技术 Background technique

目前,能源短缺已成为各级政府日益关心的问题,清洁、再生、安全可靠能源的使用已迫在眉睫。建筑物是高能耗单位之一,在我国其能耗已达到社会总能耗的27.6%,并将超过33%,其中40%的能量损失是由窗户造成的,为发达国家的2-3倍。据统计,在采暖或空调条件下,冬季单玻璃窗所损失的热量约占热负荷的30-50%,夏季因太阳辐射热透过玻璃窗射入室内而消耗冷量约占空调负荷的20-30%。因此,新型节能材料和节能技术以及太阳能的综合利用已被提到议事议程。如果在这种高能耗的窗玻璃上镀一层透明隔热保温薄膜材料,可以有效地节约能量。据美国MIT估计,单层玻璃窗(不镀膜时)的热损失每年约7美元/m2,若在玻璃上镀一层透明隔热保温薄膜材料后,可使窗户热损失降至每年约3.2美元/m2。据瑞典Uppsala大学估计,在欧洲中部的气候条件下,在窗户玻璃上镀一层透明隔热保温薄膜,可使家庭节能20%,办公场所节能12%。At present, energy shortage has become an issue of increasing concern to governments at all levels, and the use of clean, renewable, safe and reliable energy is imminent. Buildings are one of the units with high energy consumption. In my country, their energy consumption has reached 27.6% of the total energy consumption of the society and will exceed 33%. 40% of the energy loss is caused by windows, which is 2-3 times that of developed countries. . According to statistics, under heating or air conditioning conditions, the heat lost by single glass windows in winter accounts for about 30-50% of the heat load, and in summer, the cooling energy consumed due to solar radiation heat entering the room through glass windows accounts for about 20% of the air conditioning load. -30%. Therefore, the comprehensive utilization of new energy-saving materials and energy-saving technologies and solar energy has been brought to the agenda. If the window glass with high energy consumption is coated with a layer of transparent thermal insulation film material, energy can be effectively saved. According to the estimate of MIT in the United States, the heat loss of single-layer glass windows (without coating) is about 7 US dollars/m 2 per year. If a layer of transparent heat insulation film material is coated on the glass, the heat loss of the window can be reduced to about 3.2 per year. USD/m 2 . According to the estimates of Uppsala University in Sweden, under the climatic conditions in central Europe, coating a layer of transparent thermal insulation film on the window glass can save energy by 20% in the home and 12% in the office.

早在上世纪80年代,欧洲、美国、日本、中国等国家就开展了透明隔热保温节能薄膜材料研究,并在现代建筑中取得了很好的应用(即玻璃幕墙),达到了较好的节能效果。但是,这种材料功能单一、光谱特性固定。无论是晴天还是白昼,室内依然采用灯光照明,人们无法享受大自然的阳光,而且夏天节能,则冬天耗能;反之,冬天节能,夏天则耗能。对于我们所处的温带地区,其光学特性与节能特性无法随季节、昼夜的变化而调节。因此,为了提供舒适的人居、工作环境,长期以来,人们正在寻找一种能智能化控制、光学特性能随外界环境改变而发生可逆变化,集节能、装饰、隔热、保温于一体的镀膜玻璃材料。致色性灵巧窗的诞生,能够解决这一难题。As early as the 1980s, Europe, the United States, Japan, China and other countries carried out research on transparent thermal insulation and energy-saving film materials, and achieved good applications in modern buildings (ie glass curtain walls), achieving better energy saving effect. However, this material has a single function and fixed spectral characteristics. Regardless of whether it is sunny or daytime, indoor lighting is still used, people cannot enjoy the sunlight of nature, and energy saving in summer consumes energy in winter; conversely, energy saving in winter consumes energy in summer. For the temperate zone where we live, its optical characteristics and energy-saving characteristics cannot be adjusted with the changes of seasons and day and night. Therefore, in order to provide a comfortable living and working environment, people have long been looking for a coating that can be intelligently controlled, whose optical properties can change reversibly with changes in the external environment, and that integrates energy saving, decoration, heat insulation, and heat preservation. glass material. The birth of the chromogenic smart window can solve this problem.

致色性灵巧窗能够动态、可逆、任意地对通过窗户的阳光进行智能化控制,可广泛应用于建筑、汽车、宇宙飞船等作为高能效阳光控制节能窗户,特别适应于现代建筑大厦的发展,为现代节能窗户系统的制造提供了全新的设计方法。Chromogenic smart windows can intelligently control the sunlight passing through the windows dynamically, reversibly and arbitrarily, and can be widely used in buildings, automobiles, spaceships, etc. It provides a new design method for the manufacture of modern energy-saving window systems.

通常,致色性灵巧窗分为热致变色、光致变色以及电致变色等几种。从作用形式上讲,光致变色与热致变色是一种被动式变色材料,只有在外界条件如光强、温度发生变化时才发生变色现象,人们不能灵活调控。而电致变色材料则是主动式功能材料,其光学特性(如透射率、颜色)可根据周围环境的变化,通过电场作用,发生离子与电子的共注入与共抽出,使材料的光学特性发生连续、可逆、任意地变化,从而实现光密度连续可调,因此,最具有实际应用前景,美国、日本以及欧洲等发达国家以及国内多家单位正在进行商业应用研究,但是这种致色性灵巧窗通常由五层薄膜材料组成,器件结构复杂、影响因素多、制备成本高,而且难于大面积生产。虽然这种电致变色材料已有汽车倒视镜、太阳眼镜等小尺寸商业产品,但是作为大尺寸的建筑节能窗至今仍未实现商业化应用。Generally, chromogenic smart windows are divided into thermochromic, photochromic, and electrochromic. In terms of the form of action, photochromism and thermochromism are passive color-changing materials, which only change color when external conditions such as light intensity and temperature change, and people cannot flexibly control them. The electrochromic material is an active functional material. Its optical properties (such as transmittance, color) can be changed according to the surrounding environment. , reversible, and arbitrarily changed, so that the optical density can be continuously adjusted. Therefore, it has the most practical application prospects. Developed countries such as the United States, Japan, and Europe, as well as many domestic units, are conducting commercial application research, but this color-causing smart window Usually composed of five layers of thin film materials, the structure of the device is complex, there are many influencing factors, the preparation cost is high, and it is difficult to produce on a large scale. Although this electrochromic material already has small-sized commercial products such as car mirrors and sunglasses, it has not been commercially applied as a large-sized building energy-saving window.

近年来,国际上致色性材料的最新研究表明,一种与电致变色具有相似变色机理的变色材料——气致变色薄膜正引起人们的极大兴趣。这种致色性灵巧窗仅由一层致色薄膜和一层极薄的催化剂层或一层含有催化剂的致色薄膜构成,气体分子(如氢气)被催化剂分解为原子,通过扩散进入致色材料中引起光学特性的变化,从而导致薄膜材料透射率连续、可逆、任意地变化。这种固态结构的致色性材料结构简单、影响因素少,而且光学调节范围更广、便于大面积生产,器件运行无能耗。这种新型气致变色灵巧窗率首先由德国费琅霍夫太阳能系统研究所提出和发展,之后美国、斯洛文尼亚等少数国家的大学、研究所相继开展了这方面工作。国内目前仅有同济大学、中科院广州太阳能研究所等单位开展这方面研究。In recent years, the latest research on chromogenic materials in the world shows that a color-changing material with a similar color-changing mechanism to electrochromism—aerochromic film is attracting great interest. This chromogenic smart window is only composed of a chromogenic film and an extremely thin catalyst layer or a chromogenic film containing a catalyst. Gas molecules (such as hydrogen) are decomposed into atoms by the catalyst and enter the chromogenic film through diffusion. Changes in optical properties are caused in the material, resulting in continuous, reversible, and arbitrary changes in the transmittance of the thin film material. The chromogenic material with a solid-state structure has a simple structure, fewer influencing factors, and a wider optical adjustment range, which is convenient for large-scale production, and the device operates without energy consumption. This new type of aerochromic smart window was first proposed and developed by the Fraunhofer Institute for Solar Energy Systems in Germany, and then universities and research institutes in a few countries such as the United States and Slovenia have carried out work in this area. At present, only Tongji University and the Guangzhou Institute of Solar Energy Research of the Chinese Academy of Sciences have carried out research in this area in China.

从原理上,电致变色灵巧窗器件是小的阳离子和电子在电场作用下双重注入和抽出致色性薄膜,发生电致变色和退色效应。而对于气致变色灵巧窗器件,氢分子经催化剂作用后分解成氢原子,扩散至致色性薄膜中发生致色效应,而当氧原子或空气扩散至薄膜中产生退色,因此,两者氢注入/退出驱动机制不同,从而要求薄膜材料的微结构特性各异。In principle, the electrochromic smart window device is that small cations and electrons are double-injected and extracted from the chromogenic film under the action of an electric field, resulting in electrochromic and fading effects. For gasochromic smart window devices, hydrogen molecules are decomposed into hydrogen atoms after being acted on by catalysts, which diffuse into the chromogenic film to produce a color-causing effect, and when oxygen atoms or air diffuse into the film, fading occurs. Therefore, both hydrogen Different injection/exit drive mechanisms require different microstructural properties of thin film materials.

当前国际上,集中研究最具应用前景的非晶WO3薄膜材料的气致变色性能为主,就如何提高以非晶WO3薄膜材料制成的气致变色窗器件的氢原子扩散速度、扩散均匀性、颜色一致性、变色速率、耐用性等问题正进行深入研究。At present, in the world, the most promising aerochromic properties of amorphous WO 3 thin film materials are mainly studied, and how to improve the hydrogen atom diffusion rate and diffusion rate of aerochromic window devices made of amorphous WO 3 thin film materials. Issues of uniformity, color consistency, rate of color change, durability, etc. are being intensively studied.

SiO2或者P2O5、Al2O3、Fe2O3等相对氢气稳定的材料的溶胶是一种常见廉价材料,以这种材料制备的薄膜具有原料低廉、制备工艺简单、物理和化学性能稳定等的特点。The sol of SiO 2 or P 2 O 5 , Al 2 O 3 , Fe 2 O 3 and other relatively hydrogen-stable materials is a common and cheap material. The film prepared from this material has the advantages of low raw material, simple preparation process, physical and chemical Features such as stable performance.

目前还没有采用WO3/SiO2两相分散掺杂的技术提高非晶WO3薄膜材料的气致变色性能的相关专利报道。At present, there is no relevant patent report on improving the aerochromic performance of amorphous WO 3 thin film material by using WO3/SiO2 two-phase dispersed doping technology.

发明内容 Contents of the invention

本发明的目的在于提供一种提高WO3薄膜气致循环性能的方法。The object of the present invention is to provide a method for improving the gas-induced cycle performance of the WO 3 film.

一种提高WO3薄膜气致循环性能的方法,采用可提高WO3气致变色薄膜孔隙率的无机物对WO3溶胶进行掺杂,所述无机物包括SiO2、Al2O3/AAO模板、P2O5、Fe2O3、CuO2A method for improving the gas-induced cycle performance of WO 3 thin film, the WO 3 sol is doped with inorganic substances that can increase the porosity of WO 3 aerochromic thin films, and the inorganic substances include SiO 2 , Al 2 O 3 /AAO templates , P 2 O 5 , Fe 2 O 3 , CuO 2 .

进一步:包括以下步骤:Further: Include the following steps:

制备WO3溶胶;Preparation of WO 3 sol;

选取与制备SiO2、Al2O3溶胶;Selection and preparation of SiO 2 and Al 2 O 3 sols;

制备掺催化剂的WO3/SiO2、WO3/Al2O3溶胶:Preparation of catalyst-doped WO 3 /SiO 2 , WO 3 /Al 2 O 3 sols:

制备掺催化剂的WO3/SiO2、WO3/Al2O3薄膜。Catalyst-doped WO 3 /SiO 2 and WO 3 /Al 2 O 3 films were prepared.

WO3溶胶的制备:Preparation of WO 3 sol:

采用sol-gel法,在常温常压下,将钨粉和过氧化氢溶液搅拌反应50-70分钟,钨粉和过氧化氢的摩尔比为1∶3~1∶4,离心分离,过滤得到淡黄色透明溶液;然后向所得溶液中加入无水乙醇,无水乙醇的加入量为容器体积的1/2至4/5,在75-85℃油浴回流1.5-2小时,至溶胶转化为橘黄色,即得到WO3乙醇溶胶;Using the sol-gel method, under normal temperature and pressure, tungsten powder and hydrogen peroxide solution were stirred and reacted for 50-70 minutes, the molar ratio of tungsten powder and hydrogen peroxide was 1:3-1:4, centrifuged and filtered to obtain Light yellow transparent solution; then add absolute ethanol to the resulting solution, the amount of absolute ethanol added is 1/2 to 4/5 of the volume of the container, and reflux in an oil bath at 75-85°C for 1.5-2 hours until the sol is transformed into Orange yellow, that is, to obtain WO 3 ethanol sol;

SiO2溶胶的制备:Preparation of SiO sol :

SiO2溶胶的制备过程主要涉及硅源的水解,而水解速度与硅源、水的比例、溶液PH值以及室温条件非常相关,下面我们推荐以正硅酸四乙酯水解The preparation process of SiO 2 sol mainly involves the hydrolysis of silicon source, and the hydrolysis rate is very related to the ratio of silicon source, water, solution pH value and room temperature conditions. Below we recommend tetraethyl orthosilicate hydrolysis

(1)选取与制备SiO2溶胶(1) Selection and preparation of SiO 2 sol

①酸性催化SiO2溶胶的制备:① Preparation of acidic catalytic SiO 2 sol:

用容量瓶和移液管分别精确量取去离子水、无水乙醇、硅源(如:正硅酸乙酯),比例根据实验温度、硅源种类、试验时间的需求可以适当调整,我们推荐以正硅酸乙酯为硅源,室温条件下采用比例为:23.5/100/77.8(其中无水乙醇的比例作用在于溶液浓度,与实际所需薄膜致色深度等相应调节,以此种水与TEOS的比例是成膜较好比例,也可根据其他原料响应调节);去离子水与正硅酸乙酯的比例需要结合考虑WO3溶胶内的水、硅源、室温等多种因素,关键比例不小于溶胶凝胶时的比例、不大于影响溶胶成膜的比例。Use a volumetric flask and a pipette to accurately measure deionized water, absolute ethanol, and silicon source (such as tetraethyl orthosilicate). The ratio can be adjusted appropriately according to the requirements of the experimental temperature, type of silicon source, and test time. Using tetraethyl orthosilicate as the silicon source, the ratio used at room temperature is: 23.5/100/77.8 (the ratio of absolute ethanol depends on the concentration of the solution, which is adjusted accordingly to the actual required film color depth, etc., with this water The ratio to TEOS is the best ratio for film formation, and can also be adjusted according to the response of other raw materials); the ratio of deionized water to tetraethyl orthosilicate needs to be considered in combination with various factors such as water in WO3 sol, silicon source, room temperature, etc., the key The ratio is not less than the ratio of the sol-gel, and not greater than the ratio that affects the film formation of the sol.

其中按照所取去离子水的量精确称量浓盐酸(可以采用多种酸催化,例如:钨酸、硝酸、磷酸、草酸等)配制成pH<7的盐酸溶液,推荐PH=2,倒入烧杯A中,将清洁磁力搅拌子一枚放入烧杯A中;再将精确量取所需的正硅酸四乙酯和所需量的无水乙醇依次倒入烧杯A中;用清洁薄膜和橡皮筋将烧杯A瓶口密封后放置在磁力搅拌机上进行搅拌,按照上面推荐比例制备的酸性SiO2溶胶搅拌时间为2-4小时就可以制得酸性SiO2溶胶,如果PH值比较小可以采用比较短的搅拌时间。Among them, according to the amount of deionized water taken, the concentrated hydrochloric acid (can be catalyzed by various acids, such as: tungstic acid, nitric acid, phosphoric acid, oxalic acid, etc.) In beaker A, put a clean magnetic stirring bar into beaker A; then pour the required tetraethyl orthosilicate and the required amount of anhydrous ethanol into beaker A in sequence; use cleaning film and Seal the mouth of the beaker A with a rubber band and place it on a magnetic stirrer for stirring. The acidic SiO 2 sol prepared according to the above recommended ratio can be prepared after stirring for 2-4 hours. If the pH value is relatively small, it can be used relatively short stirring time.

或者②碱性催化SiO2溶胶的制备:Or ② Preparation of basic catalytic SiO 2 sol:

碱性催化法制备SiO2溶胶所需原材料及配比比例根据实验温度、硅源种类、试验时间的需求可以适当调整,推荐摩尔比例如下:正硅酸乙酯(TEOS)∶乙醇∶氨水=1/38/2.45(此比例的氨水是水解较快的比例,其他比例亦可),溶胶的配制过程应在干净清洁、相对湿度小于60%的环境下进行,具体步骤如下:用容量瓶和移液管精确量取所需量1/2的无水乙醇倒入烧杯A中;用移液管精确量取所需量的pH=12的浓氨水倒入烧杯A中(此比例的氨水是水解较快的比例,其他比例亦可,涉及与WO3的混合需要尽量减少氨水的量,但是需要pH>7,需要有一个碱性的环境。);将清洁磁力搅拌子一枚放入烧杯A中,用清洁薄膜和橡皮筋将烧杯A瓶口密封后放置在磁力搅拌机上进行搅拌20min左右,达到均匀分散的目的;The raw materials and proportions required for the preparation of SiO sol by the basic catalytic method can be appropriately adjusted according to the requirements of the experimental temperature, type of silicon source, and test time. The recommended molar ratio is as follows: tetraethyl orthosilicate (TEOS): ethanol: ammonia water = 1 /38/2.45 (ammonia water in this ratio is the ratio of faster hydrolysis, and other ratios are also acceptable). The preparation process of the sol should be carried out in a clean environment with a relative humidity of less than 60%. The specific steps are as follows: use a volumetric flask and a pipette Use a pipette to accurately measure 1/2 of the required amount of absolute ethanol and pour it into beaker A; use a pipette to accurately measure the required amount of concentrated ammonia water with pH = 12 and pour it into beaker A (the ammonia water in this proportion is hydrolyzed The faster ratio, other ratios are also available, and the mixing with WO3 needs to reduce the amount of ammonia water as much as possible, but the pH>7 is required, and an alkaline environment is required.); Put a clean magnetic stirrer into beaker A , seal the mouth of beaker A with a clean film and a rubber band, place it on a magnetic stirrer and stir for about 20 minutes to achieve the purpose of uniform dispersion;

用容量瓶和移液管精确量取所需正硅酸乙酯和所需量1/2的无水乙醇依次倒入烧杯B中;将清洁磁力搅拌子一枚放入烧杯B中,用清洁薄膜和橡皮筋将烧杯B瓶口密封后放置在磁力搅拌机上进行搅拌20min左右,达到均匀分散的目的;用磁铁沿外壁将烧杯A中的磁力搅拌子中取出,并将烧杯A中混合溶液倒入梨形分液漏斗中;将梨形分液漏斗中的混合溶液缓慢地逐滴滴入放置在磁力搅拌器上的烧杯B中,同时保持搅拌均匀;滴加结束后继续搅拌2h左右,使其混合均匀,随后用磁铁沿外壁取出烧杯B中的搅拌子;Use a volumetric flask and a pipette to accurately measure the required tetraethyl orthosilicate and 1/2 of the required amount of absolute ethanol and pour them into beaker B in sequence; put a clean magnetic stirring bar into beaker B, and use a clean Seal the mouth of beaker B with a film and rubber band, place it on a magnetic stirrer and stir for about 20 minutes to achieve uniform dispersion; use a magnet to take out the magnetic stirrer in beaker A along the outer wall, and pour the mixed solution in beaker A into the pear-shaped separating funnel; slowly drop the mixed solution in the pear-shaped separating funnel into the beaker B placed on the magnetic stirrer, while keeping stirring evenly; It is mixed evenly, and then the stirring bar in the beaker B is taken out along the outer wall with a magnet;

将烧杯B用清洁的薄膜和橡皮筋密封好静置在稳定的环境下(16-24℃,相对湿度<50%)进行老化,老化后的溶胶呈淡蓝色乳胶状,此时溶胶内颗粒的平均粒径小于10nm,将溶胶取出倒入圆底烧瓶中,溶胶不得浸没烧瓶2/3以上;在圆底烧瓶中加入少量洁净的分子筛防止爆沸,然后将烧瓶用铁架台固定浸没在盛有硅油的水浴加热锅中;调节油浴温度在80℃~85℃之间,保持溶胶液面的微沸状态;利用蛇形回流管进行回流,用润湿后的定量pH试纸在回流管管口进行测试,至pH试纸无变化后,停止加温,待自然冷却后将烧瓶取出;将溶胶倒入烧杯中密封保存;Seal the beaker B with a clean film and a rubber band and let it stand in a stable environment (16-24°C, relative humidity <50%) for aging. The aged sol is in the form of light blue latex. At this time, the particles in the sol The average particle size of the sol is less than 10nm. Take out the sol and pour it into a round bottom flask. The sol must not be immersed in more than 2/3 of the flask; add a small amount of clean molecular sieve to the round bottom flask to prevent bumping, and then fix the flask with an iron stand In a water bath heating pot with silicone oil; adjust the temperature of the oil bath between 80°C and 85°C to keep the sol liquid surface in a slightly boiling state; use a serpentine reflux tube for reflux, and use the wetted quantitative pH test paper in the reflux tube Test at the pH test paper until there is no change in the pH test paper, stop heating, and take out the flask after natural cooling; pour the sol into a beaker and seal it for storage;

或者③其他SiO2溶胶的制备Or ③ Preparation of other SiO 2 sols

利用正硅酸四乙酯、甲基三乙氧基硅烷等硅源与酒精按所需比例(此比例根据实际操作中的情况而调整,值任意)混合配成相应浓度的溶胶。Use tetraethyl orthosilicate, methyl triethoxysilane and other silicon sources to mix with alcohol according to the required ratio (this ratio is adjusted according to the actual operation, and the value is arbitrary) to prepare a sol with a corresponding concentration.

或者④Al2O3溶胶的制备Or ④ Preparation of Al 2 O 3 sol

容量瓶和移液管分别精确量取无水氯化铝+去离子水+乙醇+环氧丙烷(6mmol∶0.65ml∶6-40ml∶0.32ml);或者异丙醇铝+水+异丙醇+催化剂(酸或者碱,以盐酸为例),比例为1mmol∶3mmol∶1-10ml∶0.1mmol(此比例);(上面两种比例需要结合考虑WO3溶胶内的水、铝源、室温等多种因素,关键比例不小于溶胶凝胶时的比例、不大于影响溶胶成膜的比例,在此只能给出推荐值,此两种催化剂的量为推荐比例,催化剂建议用滴加的方式不形成凝胶为好)将精确量取所需的溶胶倒入烧杯中;用清洁薄膜和橡皮筋将烧杯瓶口密封后放置在磁力搅拌机上进行搅拌,搅拌时间为4小时;50度老化1小时。Volumetric flask and pipette respectively accurately measure anhydrous aluminum chloride + deionized water + ethanol + propylene oxide (6mmol: 0.65ml: 6-40ml: 0.32ml); or aluminum isopropoxide + water + isopropanol + Catalyst (acid or base, take hydrochloric acid as an example), the ratio is 1mmol: 3mmol: 1-10ml: 0.1mmol (this ratio); (the above two ratios need to be considered in combination with water, aluminum source, room temperature, etc. in WO3 sol The key ratio is not less than the ratio of the sol-gel and not greater than the ratio affecting the film formation of the sol. Only recommended values can be given here. The amount of these two catalysts is the recommended ratio. The catalyst is recommended to be added dropwise. It is better to form a gel) Pour the required sol into the beaker; seal the mouth of the beaker with a cleaning film and a rubber band, place it on a magnetic stirrer for stirring, and the stirring time is 4 hours; aging at 50 degrees for 1 hour .

(3)WO3和SiO2复合溶胶制备:(3) Preparation of WO 3 and SiO 2 composite sol:

向步骤(1)所得的溶胶中加入步骤(2)所得溶胶,分散比例(SiO2/WO3摩尔比)>0/1均有循环性能的提高,循环性的衰减不同,但是当>1/1时较容易利用干燥手段达到循环性的恢复。这里建议摩尔比为:1/1。Add the sol obtained in step (2) to the sol obtained in step (1), and the dispersion ratio (SiO 2 /WO 3 molar ratio) > 0/1 has the improvement of cycle performance, and the attenuation of cycle performance is different, but when > 1/ 1 It is easier to use drying means to achieve cyclic recovery. The suggested molar ratio here is: 1/1.

(4)掺催化剂的WO3/SiO2溶胶的制备:(4) Preparation of catalyst-doped WO 3 /SiO 2 sol:

向步骤(3)所得的溶胶中掺入催化剂,常温下搅拌2~3小时,待溶胶呈微红褐色稳定溶胶时,在常压零度条件下保存备用;催化剂与钨粉的摩尔比为1∶40~1∶100,所述催化剂为K2[PtCl4]或PdCl2Add catalyst to the sol obtained in step (3), stir at normal temperature for 2 to 3 hours, when the sol is a reddish-brown stable sol, store it under normal pressure and zero temperature for subsequent use; the molar ratio of catalyst to tungsten powder is 1: 40~1:100, the catalyst is K 2 [PtCl 4 ] or PdCl 2 ;

(5)掺催化剂的WO3薄膜制备:采用提拉浸镀法或采用旋转镀膜法制备:(5) Preparation of catalyst-doped WO 3 film: prepared by pulling dipping method or spin coating method:

①采用提拉浸镀法在载玻片或抛光硅片表面制备掺催化剂的WO3薄膜,提拉速度为4-6.5cm/min;①Use the pulling and immersion plating method to prepare catalyst-doped WO 3 thin films on the surface of glass slides or polished silicon wafers, and the pulling speed is 4-6.5cm/min;

或者:②采用旋转镀膜法,在硅片或K9玻璃表面制备掺催化剂的WO3薄膜,预涂速率为900-1100r/min,旋涂速率为2500-3500r/min;Or: ②Use the spin coating method to prepare catalyst-doped WO 3 film on the surface of silicon wafer or K9 glass, the pre-coating rate is 900-1100r/min, and the spin-coating rate is 2500-3500r/min;

将所得掺催化剂的WO3薄膜在空气氛围中,烤胶温度为50℃-250℃,时间为50-70分钟。The obtained catalyst-doped WO 3 thin film is baked in an air atmosphere at a temperature of 50°C-250°C for 50-70 minutes.

或者③AAO模板法,把70nm Al2O3模板浸泡权所制备的掺钯WO3溶胶中,在超声中震荡30分钟;取出该Al2O3模板,将所得掺催化剂的WO3薄膜在空气氛围中,烤胶温度为50℃-250℃,时间为50-70分钟。Or ③AAO template method, immerse the 70nm Al 2 O 3 template in the prepared palladium-doped WO 3 sol, vibrate in ultrasonic for 30 minutes; take out the Al 2 O 3 template, and place the obtained catalyst-doped WO 3 thin film in the air , the baking temperature is 50°C-250°C, and the time is 50-70 minutes.

为了获得较厚的薄膜,采用提高WO3溶胶浓度或提拉速度的方法,浓度越高,提拉速度越快薄膜越厚(具体数值需根据溶胶、镀膜间环境情况调整),或者采用多次旋涂的方法,每两次旋涂之间,将薄膜在40-55℃温度之间热处理2-5min。In order to obtain a thicker film, use the method of increasing the concentration of WO 3 sol or the pulling speed. In the method of spin coating, the film is heat-treated at a temperature of 40-55° C. for 2-5 minutes between every two spin coatings.

WO3与SiO2均匀的分散复合,上述SiO2溶胶制备方式及配比只是两种实例涉及的SiO2溶胶可以采用任何形式的SiO2溶胶以进行WO3的分散,比如利用HNO3酸、钨酸等各类酸作为催化剂,或者采用其他的硅源来制备SiO2WO 3 and SiO 2 are uniformly dispersed and compounded. The above-mentioned SiO 2 sol preparation methods and proportions are only two examples. The SiO 2 sol involved can use any form of SiO 2 sol to disperse WO 3 , such as using HNO 3 acid, tungsten SiO 2 is prepared by using various acids such as acid as a catalyst, or using other silicon sources.

对所得的WO3薄膜气致变色性能进行测试:The aerochromic performance of the obtained WO 3 film is tested:

采用紫外/可见/红外分光光度计(V-570型,Jasco Inc.)对紫外处理过的掺催化剂的WO3薄膜气致变色性能的测试。将已镀膜的玻璃与未镀膜的玻璃四周边缘用玻璃胶封成中空(内侧镀膜)结构的器件,并留一个小孔(为通入氢气所留),形成气致变色器件。测试气致变色特性时,通入体积含量为5%氢气的氩气,采用4ρ/min气流量和0.15MPa气压。用紫外/可见/红外分光光度计(V-570型,Jasco Inc.)对致色前后薄膜的透射率进行测试,波长范围190-2500cm-1,波长准确度为1.5nm,光源在可见光区为卤钨灯,紫外光区为氘灯,光源自动切换。A UV/visible/infrared spectrophotometer (V-570, Jasco Inc.) was used to test the aerochromic performance of the UV-treated WO 3 film mixed with catalyst. The surrounding edges of the coated glass and the uncoated glass are sealed with glass glue to form a device with a hollow (coated inside) structure, and a small hole (reserved for the introduction of hydrogen gas) is left to form an aerochromic device. When testing the aerochromic properties, argon gas with a volume content of 5% hydrogen is introduced, and a gas flow rate of 4ρ/min and an air pressure of 0.15 MPa are adopted. UV/visible/infrared spectrophotometer (V-570 type, Jasco Inc.) was used to test the transmittance of the film before and after the coloration, the wavelength range was 190-2500cm -1 , the wavelength accuracy was 1.5nm, and the light source in the visible light region was Halogen tungsten lamp, deuterium lamp in the ultraviolet region, automatic switching of light source.

实验结果显示,经过分散的WO3/SiO2复合溶胶,薄膜WO3/SiO2分散均匀,薄膜的稳定性得以提高;薄膜由单一项WO3薄膜的致密态变成有大空间孔径结构,薄膜内H2O的出入变得更加容易,循环500次后依然没见到有明显的减弱迹象。以WO3/SiO2摩尔比1.25∶1左右调节可以制备良好透过性能和循环性能的气致变色窗。The experimental results show that after the dispersed WO 3 /SiO 2 composite sol, the film WO 3 /SiO 2 is uniformly dispersed, and the stability of the film is improved; The entry and exit of H 2 O becomes easier, and there is still no obvious sign of weakening after 500 cycles. An aerochromic window with good permeability and cycle performance can be prepared by adjusting the molar ratio of WO 3 /SiO 2 to about 1.25:1.

本发明采用两相分散掺杂的方法是提高非晶掺催化剂的WO3薄膜材料的气致变色循环性的技术方法。The method of adopting two-phase dispersed doping in the present invention is a technical method for improving the aerochromic cycle performance of the amorphous catalyst-doped WO3 thin film material.

本发明采用溶胶凝胶法制备的WO3溶胶和SiO2溶胶,通过两相按照一定比例分散掺杂,得到稳定并具有大空间孔径结构的非晶掺催化剂的WO3薄膜,从而达到让非晶掺催化剂的WO3薄膜材料的改性。In the present invention, the WO 3 sol and SiO 2 sol prepared by the sol-gel method are dispersed and doped by the two phases according to a certain ratio to obtain a stable amorphous WO 3 film doped with a catalyst with a large spatial pore structure, so as to make the amorphous Modification of catalyst-doped WO3 thin film materials.

本发明采用紫外/可见/红外分光光度计(V-570型,Jasco Inc.)对复合掺杂的掺催化剂的WO3薄膜气致变色性能的测试。以本发明方式制备的气致变色薄膜与单一相WO3的薄膜相比,大幅提高了气致变色的循环性能;与磁控溅射等方法制备的气致变色薄膜致色相比性能相同,成本大幅将低;与电致变色薄膜相比亦有同样优点。本发明很好的弥补了之前溶胶凝胶法制备的气致变色灵巧窗的缺点,使此类灵巧窗技术更趋于成熟。The present invention uses an ultraviolet/visible/infrared spectrophotometer (type V-570, Jasco Inc.) to test the aerochromic performance of a composite doped WO 3 thin film doped with a catalyst. Compared with the thin film of single phase WO3 , the aerochromic thin film prepared by the method of the present invention has greatly improved the cycle performance of aerochromic; compared with the aerochromic thin film prepared by methods such as magnetron sputtering, the performance is the same, and the cost is the same. Significantly lower; compared with electrochromic film, it also has the same advantages. The invention makes up for the shortcomings of the previous aerochromic smart windows prepared by the sol-gel method, and makes the technology of such smart windows more mature.

附图说明 Description of drawings

图1为实施例1中普通掺钯WO3薄膜气致变色效果图Fig. 1 is common palladium-doped WO 3 thin film aerochromic effect figure in embodiment 1

图2为实施例1中掺钯WO3/SiO2薄膜气致变色效果图Fig. 2 is the aerochromic effect figure of palladium-doped WO 3 /SiO 2 thin film in embodiment 1

图3为实施例1中普通掺钯WO3薄膜循环变色曲线Fig. 3 is common palladium-doped WO in embodiment 1 Circular discoloration curve of thin film

图4为实施例1中掺钯WO3/SiO2薄膜450次-500次循环变色曲线Fig. 4 is the discoloration curve of 450-500 cycles of palladium-doped WO 3 /SiO 2 films in Example 1

图5为实施例1中掺钯WO3薄膜表面结构图。5 is a surface structure diagram of the palladium-doped WO 3 thin film in Example 1.

图6为实施例1中掺钯WO3/SiO2薄膜表面结构图Fig. 6 is the surface structure diagram of palladium-doped WO 3 /SiO 2 film in embodiment 1

图7为实施例1中掺钯WO3薄膜微观的形貌图。FIG. 7 is a microscopic topography diagram of the palladium-doped WO 3 thin film in Example 1.

图8为实施例1中掺钯WO3/SiO2薄膜微观的形貌图Figure 8 is the microscopic topography of the palladium-doped WO 3 /SiO 2 film in Example 1

图9为实施例1中不同含量SiO2复合薄膜的循环性示意图。FIG. 9 is a schematic diagram of the circulation of the composite films with different SiO 2 contents in Example 1.

具体实施方式 Detailed ways

下面通过实施例进一步说明本发明。The present invention is further illustrated below by way of examples.

实施例1:制备两相混合掺杂WO3/SiO2薄膜,具体步骤如下:Embodiment 1: prepare two-phase mixed doping WO3/ SiO2 film, concrete steps are as follows:

(1)WO3溶胶的制备:(1) Preparation of WO 3 sol:

采用sol-gel法,在常温常压下,将钨粉和过氧化氢溶液搅拌反应50-70分钟,钨粉和过氧化氢的摩尔比为1∶3~1∶4,离心分离,过滤得到淡黄色透明溶液;然后向所得溶液中加入无水乙醇,无水乙醇的加入量为容器体积的1/2至4/5,在75-85℃油浴回流1.5-2小时,至溶胶转化为橘黄色,即得到WO3乙醇溶胶。Using the sol-gel method, under normal temperature and pressure, tungsten powder and hydrogen peroxide solution were stirred and reacted for 50-70 minutes, the molar ratio of tungsten powder and hydrogen peroxide was 1:3-1:4, centrifuged and filtered to obtain Light yellow transparent solution; then add absolute ethanol to the resulting solution, the amount of absolute ethanol added is 1/2 to 4/5 of the volume of the container, and reflux in an oil bath at 75-85°C for 1.5-2 hours until the sol is transformed into Orange yellow, namely to obtain WO 3 ethanol sol.

(2)酸性催化SiO2溶胶的制备(2) Preparation of acidic catalytic SiO2 sol

用容量瓶和移液管分别精确量取去离子水,无水乙醇(Eth),正硅酸乙酯(TEOS),比例为:23.5/100/77.8;按照所取去离子水的量精确称量浓盐酸配制成PH=2的盐酸溶液,倒入烧杯A中,将清洁磁力搅拌子一枚放入烧杯A中;再将精确量取所需的正硅酸四乙酯和所需量的无水乙醇(Eth)依次倒入烧杯A中;用清洁薄膜和橡皮筋将烧杯A瓶口密封后放置在磁力搅拌机上进行搅拌,搅拌时间为4小时;Accurately measure deionized water, absolute ethanol (Eth), and tetraethyl orthosilicate (TEOS) with a volumetric flask and a pipette. The ratio is: 23.5/100/77.8; Measure concentrated hydrochloric acid to prepare a hydrochloric acid solution with PH=2, pour it into beaker A, put a clean magnetic stirring bar into beaker A; then accurately measure the required tetraethyl orthosilicate and the required amount of Pour absolute ethanol (Eth) into beaker A in turn; seal the mouth of beaker A with a cleaning film and a rubber band, place it on a magnetic stirrer for stirring, and the stirring time is 4 hours;

(3)WO3和SiO2复合溶胶制备(3) Preparation of WO 3 and SiO 2 composite sol

向步骤(1)所得的溶胶中加入步骤(2)所得溶胶,此种溶胶的比例按照所需的薄膜的厚度和致色深度进行调节,此分散比例建议采用WO3/SiO2摩尔比为1.25/1Add the sol obtained in step (2) to the sol obtained in step (1), and the ratio of this sol is adjusted according to the thickness and color depth of the required film. This dispersion ratio is recommended to adopt WO3/ SiO The molar ratio is 1.25/ 1

(4)掺催化剂的WO3/SiO2溶胶的制备:(4) WO3/SiO sol of doping catalyst Preparation:

向步骤(3)所得的溶胶中掺入催化剂,常温下搅拌2~3小时,待溶胶呈微红褐色稳定溶胶时,在常压零度条件下保存备用;催化剂与钨粉的摩尔比为1∶40~1∶100,催化剂为K2[PtCl4]或PdCl2Add catalyst to the sol obtained in step (3), stir at normal temperature for 2 to 3 hours, when the sol is a reddish-brown stable sol, store it under normal pressure and zero temperature for subsequent use; the molar ratio of catalyst to tungsten powder is 1: 40~1:100, the catalyst is K 2 [PtCl 4 ] or PdCl 2 ;

(5)掺催化剂的WO3薄膜制备:采用提拉浸镀法或采用旋转镀膜法制备:(5) Preparation of catalyst-doped WO 3 film: prepared by pulling dipping method or spin coating method:

①采用提拉浸镀法在载玻片或抛光硅片表面制备掺催化剂的WO3薄膜,提拉速度为4-6.5cm/min;①Use the pulling and immersion plating method to prepare catalyst-doped WO 3 thin films on the surface of glass slides or polished silicon wafers, and the pulling speed is 4-6.5cm/min;

或者:②采用旋转镀膜法,在硅片或K9玻璃表面制备掺催化剂的WO3薄膜,预涂速率为900-1100r/min,旋涂速率为2500-3500r/min;Or: ②Use the spin coating method to prepare catalyst-doped WO 3 film on the surface of silicon wafer or K9 glass, the pre-coating rate is 900-1100r/min, and the spin-coating rate is 2500-3500r/min;

将所得掺催化剂的WO3薄膜在空气氛围中,烤胶温度为50℃-250℃,时间为50-70分钟;Baking the obtained catalyst-doped WO 3 film in an air atmosphere at a temperature of 50°C-250°C for 50-70 minutes;

此方法制备的薄膜循环性能良好,500次以后依然没有任何明显衰减。The film prepared by this method has good cycle performance, and there is still no obvious attenuation after 500 cycles.

实施例2:制备两相混合掺杂WO3/SiO2薄膜的制备Embodiment 2: Preparation of two-phase mixed doping WO3/ SiO2 film preparation

(1)WO3溶胶的制备:(1) Preparation of WO 3 sol:

采用sol-gel法,在常温常压下,将钨粉和过氧化氢溶液搅拌反应50-70分钟,钨粉和过氧化氢的摩尔比为1∶3~1∶4,离心分离,过滤得到淡黄色透明溶液;然后向所得溶液中加入无水乙醇,无水乙醇的加入量为容器体积的1/2至4/5,在75-85℃油浴回流1.5-2小时,至溶胶转化为橘黄色,即得到WO3乙醇溶胶。Using the sol-gel method, under normal temperature and pressure, tungsten powder and hydrogen peroxide solution were stirred and reacted for 50-70 minutes, the molar ratio of tungsten powder and hydrogen peroxide was 1:3-1:4, centrifuged and filtered to obtain Light yellow transparent solution; then add absolute ethanol to the resulting solution, the amount of absolute ethanol added is 1/2 to 4/5 of the volume of the container, and reflux in an oil bath at 75-85°C for 1.5-2 hours until the sol is transformed into Orange yellow, namely to obtain WO 3 ethanol sol.

(2)酸性催化SiO2溶胶的制备(2) Preparation of acidic catalytic SiO2 sol

用容量瓶和移液管分别精确量取去离子水,无水乙醇(Eth),正硅酸乙酯(TEOS),比例为:23.5/100/77.8;按照所取去离子水的量精确称量浓盐酸(或硝酸、草酸、磷酸)配制成PH=2的酸溶液,倒入烧杯A中,将清洁磁力搅拌子一枚放入烧杯A中;再将精确量取所需的正硅酸四乙酯和所需量的无水乙醇(Eth)依次倒入烧杯A中;用清洁薄膜和橡皮筋将烧杯A瓶口密封后放置在磁力搅拌机上进行搅拌,搅拌时间为4小时;Accurately measure deionized water, absolute ethanol (Eth), and tetraethyl orthosilicate (TEOS) with a volumetric flask and a pipette. The ratio is: 23.5/100/77.8; Measure concentrated hydrochloric acid (or nitric acid, oxalic acid, phosphoric acid) to prepare an acid solution with PH=2, pour it into beaker A, put a clean magnetic stirring bar into beaker A; then accurately measure the required orthosilicic acid Tetraethyl ester and required amount of absolute ethanol (Eth) are poured into the beaker A successively; After the mouth of the beaker A is sealed with a cleaning film and a rubber band, place it on a magnetic stirrer for stirring, and the stirring time is 4 hours;

(3)WO3和SiO2复合溶胶制备(3) Preparation of WO 3 and SiO 2 composite sol

向步骤(1)所得的溶胶中加入步骤(2)所得溶胶,此种溶胶的比例按照所需的薄膜的厚度和致色深度进行调节,此分散比例建议采用WO3/SiO2摩尔比为1.25/1Add the sol obtained in step (2) to the sol obtained in step (1), and the ratio of this sol is adjusted according to the thickness and color depth of the required film. This dispersion ratio is recommended to adopt WO3/ SiO The molar ratio is 1.25/ 1

(4)掺催化剂的WO3/SiO2溶胶的制备:(4) WO3/SiO sol of doping catalyst Preparation:

向步骤(3)所得的溶胶中掺入催化剂,常温下搅拌2~3小时,待溶胶呈微红褐色稳定溶胶时,在常压零度条件下保存备用;催化剂与钨粉的摩尔比为1∶40~1∶100,催化剂为K2[PtCl4]或PdCl2Add catalyst to the sol obtained in step (3), stir at normal temperature for 2 to 3 hours, when the sol is a reddish-brown stable sol, store it under normal pressure and zero temperature for subsequent use; the molar ratio of catalyst to tungsten powder is 1: 40~1:100, the catalyst is K 2 [PtCl 4 ] or PdCl 2 ;

(5)掺催化剂的WO3薄膜制备:采用提拉浸镀法或采用旋转镀膜法制备:(5) Preparation of catalyst-doped WO 3 film: prepared by pulling dipping method or spin coating method:

①采用提拉浸镀法在载玻片或抛光硅片表面制备掺催化剂的WO3薄膜,提拉速度为4-6.5cm/min;①Use the pulling and immersion plating method to prepare catalyst-doped WO 3 thin films on the surface of glass slides or polished silicon wafers, and the pulling speed is 4-6.5cm/min;

或者:②采用旋转镀膜法,在硅片或K9玻璃表面制备掺催化剂的WO3薄膜,预涂速率为900-1100r/min,旋涂速率为2500-3500r/min;Or: ②Use the spin coating method to prepare catalyst-doped WO 3 film on the surface of silicon wafer or K9 glass, the pre-coating rate is 900-1100r/min, and the spin-coating rate is 2500-3500r/min;

将所得掺催化剂的WO3薄膜在空气氛围中,烤胶温度为50℃-250℃,时间为50-70分钟;Baking the obtained catalyst-doped WO 3 film in an air atmosphere at a temperature of 50°C-250°C for 50-70 minutes;

此方法制备的薄膜循环性能良好,500次以后依然没有任何明显衰减。The film prepared by this method has good cycle performance, and there is still no obvious attenuation after 500 cycles.

实施例3:制备两相混合掺杂WO3/SiO2薄膜的制备Embodiment 3: Preparation of two-phase mixed-doped WO3/ SiO2 film preparation

(1)WO3溶胶的制备:(1) Preparation of WO 3 sol:

采用sol-gel法,在常温常压下,将钨粉和过氧化氢溶液搅拌反应50-70分钟,钨粉和过氧化氢的摩尔比为1∶3~1∶4,离心分离,过滤得到淡黄色透明溶液;然后向所得溶液中加入无水乙醇,无水乙醇的加入量为容器体积的1/2至4/5,在75-85℃油浴回流1.5-2小时,至溶胶转化为橘黄色,即得到WO3乙醇溶胶。Using the sol-gel method, under normal temperature and pressure, tungsten powder and hydrogen peroxide solution were stirred and reacted for 50-70 minutes, the molar ratio of tungsten powder and hydrogen peroxide was 1:3-1:4, centrifuged and filtered to obtain Light yellow transparent solution; then add absolute ethanol to the resulting solution, the amount of absolute ethanol added is 1/2 to 4/5 of the volume of the container, and reflux in an oil bath at 75-85°C for 1.5-2 hours until the sol is transformed into Orange yellow, namely to obtain WO 3 ethanol sol.

(2)碱性催化SiO2溶胶的制备(2) Preparation of basic catalytic SiO2 sol

碱性催化法制备SiO2溶胶所需原材料及配比(摩尔比)下:正硅酸乙酯(TEOS)∶乙醇(EtOH)∶氨水(NH3·H2O)=1/38/2.45,溶胶的配制过程应在干净清洁、相对湿度小于60%的环境下进行,具体步骤如下:用容量瓶和移液管精确量取所需量1/2的无水乙醇(Eth)倒入烧杯A中;用移液管精确量取所需量的PH=12的浓氨水倒入烧杯A中;将清洁磁力搅拌子一枚放入烧杯A中,用清洁薄膜和橡皮筋将烧杯A瓶口密封后放置在磁力搅拌机上进行搅拌,搅拌时间为20min;用容量瓶和移液管精确量取所需正硅酸乙酯(TEOS)和所需量1/2的无水乙醇(Eth)依次倒入烧杯B中;将清洁磁力搅拌子一枚放入烧杯B中,用清洁薄膜和橡皮筋将烧杯A瓶口密封后放置在磁力搅拌机上进行搅拌,搅拌时间为20min;用磁铁沿外壁将烧杯A中的磁力搅拌子中取出,并将烧杯A中混合溶液倒入梨形分液漏斗中;将梨形分液漏斗中的混合溶液缓慢地逐滴滴入放置在磁力搅拌器上的烧杯B中,同时保持搅拌均匀;滴加结束后继续搅拌2h,随后用磁铁沿外壁取出烧杯B中的搅拌子。将烧杯B用清洁的薄膜和橡皮筋密封好静置在稳定的环境下(20℃,相对湿度20%)进行老化,老化时间:72h;老化后的溶胶呈淡蓝色乳胶状(此时溶胶内颗粒的平均粒径小于10nm),将溶胶取出倒入圆底烧瓶中,溶胶不得浸没烧瓶2/3以上;在圆底烧瓶中加入少量洁净的分子筛防止爆沸,然后将烧瓶用铁架台固定浸没在盛有硅油的水浴加热锅中。调节油浴温度在80℃~85℃之间,保持溶胶液面的微沸状态;利用蛇形回流管进行回流,回流时间视溶胶多少不同;用润湿后的定量PH试纸在回流管管口进行测试,至PH试纸无变化后,停止加温,待自然冷却后将烧瓶取出;将溶胶倒入烧杯中密封保存。The raw materials and proportions (molar ratio) required for the preparation of SiO2 sol by basic catalytic method are as follows: ethyl orthosilicate (TEOS): ethanol (EtOH): ammonia water (NH3 H2O) = 1/38/2.45, the preparation process of the sol It should be carried out in a clean environment with a relative humidity of less than 60%. The specific steps are as follows: use a volumetric flask and a pipette to accurately measure 1/2 of the required amount of absolute ethanol (Eth) and pour it into beaker A; Accurately measure the required amount of concentrated ammonia water with pH = 12 and pour it into beaker A; put a clean magnetic stirring bar into beaker A, seal the mouth of beaker A with a clean film and rubber band, and place it on a magnetic Stir on a mixer for 20 minutes; use a volumetric flask and a pipette to accurately measure the required tetraethyl silicate (TEOS) and 1/2 of the required amount of absolute ethanol (Eth) and pour them into beaker B in turn ; Put a clean magnetic stirrer into beaker B, seal the mouth of beaker A with a clean film and rubber band, and place it on a magnetic stirrer for 20 minutes; Take out the stirring bar, and pour the mixed solution in the beaker A into the pear-shaped separating funnel; slowly drop the mixed solution in the pear-shaped separating funnel into the beaker B placed on the magnetic stirrer, while keeping Stir evenly; continue to stir for 2 h after the dropwise addition, and then use a magnet to take out the stirring bar in beaker B along the outer wall. Seal the beaker B with a clean film and a rubber band and place it in a stable environment (20°C, relative humidity 20%) for aging, aging time: 72h; the aged sol is in the form of light blue latex (at this time, the sol The average particle size of the inner particles is less than 10nm), take out the sol and pour it into a round bottom flask, the sol must not submerge more than 2/3 of the flask; add a small amount of clean molecular sieve into the round bottom flask to prevent bumping, and then fix the flask with an iron stand Submerged in a water bath filled with silicone oil. Adjust the temperature of the oil bath between 80°C and 85°C to keep the liquid surface of the sol in a slightly boiling state; use a serpentine reflux tube for reflux, and the reflux time depends on the amount of sol; Carry out the test, stop heating until the pH test paper has no change, take out the flask after natural cooling; pour the sol into a beaker and seal it for storage.

(3)WO3和SiO2复合溶胶制备(3) Preparation of WO 3 and SiO 2 composite sol

向步骤(1)所得的溶胶中加入步骤(2)所得溶胶,此种溶胶的比例按照所需的薄膜的厚度和致色深度进行调节,此分散比例建议采用WO3/SiO2摩尔比为1.25/1Add the sol obtained in step (2) to the sol obtained in step (1), and the ratio of this sol is adjusted according to the thickness and color depth of the required film. This dispersion ratio is recommended to adopt WO3/ SiO The molar ratio is 1.25/ 1

(4)掺催化剂的WO3/SiO2溶胶的制备:(4) WO3/SiO sol of doping catalyst Preparation:

向步骤(3)所得的溶胶中掺入催化剂,常温下搅拌2~3小时,待溶胶呈微红褐色稳定溶胶时,在常压零度条件下保存备用;催化剂与钨粉的摩尔比为1∶40~1∶100,催化剂为K2[PtCl4]或PdCl2Add catalyst to the sol obtained in step (3), stir at normal temperature for 2 to 3 hours, when the sol is a reddish-brown stable sol, store it under normal pressure and zero temperature for subsequent use; the molar ratio of catalyst to tungsten powder is 1: 40~1:100, the catalyst is K 2 [PtCl 4 ] or PdCl 2 ;

(5)掺催化剂的WO3薄膜制备:采用提拉浸镀法或采用旋转镀膜法制备:(5) Preparation of catalyst-doped WO 3 film: prepared by pulling dipping method or spin coating method:

①采用提拉浸镀法在载玻片或抛光硅片表面制备掺催化剂的WO3薄膜,提拉速度为4-6.5cm/min;①Use the pulling and immersion plating method to prepare catalyst-doped WO 3 thin films on the surface of glass slides or polished silicon wafers, and the pulling speed is 4-6.5cm/min;

或者:②采用旋转镀膜法,在硅片或K9玻璃表面制备掺催化剂的WO3薄膜,预涂速率为900-1100r/min,旋涂速率为2500-3500r/min;Or: ②Use the spin coating method to prepare catalyst-doped WO 3 film on the surface of silicon wafer or K9 glass, the pre-coating rate is 900-1100r/min, and the spin-coating rate is 2500-3500r/min;

将所得掺催化剂的WO3薄膜在空气氛围中,烤胶温度为50℃-250℃,时间为50-70分钟;Baking the obtained catalyst-doped WO 3 film in an air atmosphere at a temperature of 50°C-250°C for 50-70 minutes;

此方法制备的薄膜循环性能良好,500次以后依然没有任何明显衰减。The film prepared by this method has good cycle performance, and there is still no obvious attenuation after 500 cycles.

实施例4:制备两相混合掺杂WO3/SiO2薄膜的制备Embodiment 4: Preparation of two-phase mixed doping WO3/ SiO2 film preparation

(1)WO3溶胶的制备:(1) Preparation of WO 3 sol:

采用sol-gel法,在常温常压下,将钨粉和过氧化氢溶液搅拌反应50-70分钟,钨粉和过氧化氢的摩尔比为1∶3~1∶4,离心分离,过滤得到淡黄色透明溶液;然后向所得溶液中加入无水乙醇,无水乙醇的加入量为容器体积的1/2至4/5,在75-85℃油浴回流1.5-2小时,至溶胶转化为橘黄色,即得到WO3乙醇溶胶。Using the sol-gel method, under normal temperature and pressure, tungsten powder and hydrogen peroxide solution were stirred and reacted for 50-70 minutes, the molar ratio of tungsten powder and hydrogen peroxide was 1:3-1:4, centrifuged and filtered to obtain Light yellow transparent solution; then add absolute ethanol to the resulting solution, the amount of absolute ethanol added is 1/2 to 4/5 of the volume of the container, and reflux in an oil bath at 75-85°C for 1.5-2 hours until the sol is transformed into Orange yellow, namely to obtain WO 3 ethanol sol.

(2)Si溶胶的制备(2) Preparation of Si sol

用容量瓶和移液管分别精确量取正硅酸乙酯(TEOS)或者甲基三乙氧基硅烷和酒精,比例为:77.8/100;用清洁薄膜和橡皮筋将烧杯A瓶口密封后放置在磁力搅拌机上进行搅拌,搅拌时间为半小时;Use a volumetric flask and a pipette to accurately measure orthoethyl silicate (TEOS) or methyltriethoxysilane and alcohol, the ratio is: 77.8/100; seal the mouth of beaker A with a cleaning film and a rubber band Place it on a magnetic stirrer for stirring, and the stirring time is half an hour;

(3)WO3和SiO2复合溶胶制备(3) Preparation of WO 3 and SiO 2 composite sol

向步骤(1)所得的溶胶中加入步骤(2)所得溶胶,此种溶胶的比例按照所需的薄膜的厚度和致色深度进行调节,此分散比例建议采用WO3/SiO2摩尔比为1/1Add step (2) gained sol in the sol of step (1) gained, the ratio of this kind of sol is adjusted according to the thickness of required film and the depth of coloring, and this dispersion ratio suggests adopting WO3/ SiO Molar ratio is 1/ 1

(4)掺催化剂的WO3/SiO2溶胶的制备:(4) WO3/SiO sol of doping catalyst Preparation:

向步骤(3)所得的溶胶中掺入催化剂,常温下搅拌2~3小时,待溶胶呈微红褐色稳定溶胶时,在常压零度条件下保存备用;催化剂与钨粉的摩尔比为1∶40~1∶100,催化剂为K2[PtCl4]或PdCl2Add catalyst to the sol obtained in step (3), stir at normal temperature for 2 to 3 hours, when the sol is a reddish-brown stable sol, store it under normal pressure and zero temperature for subsequent use; the molar ratio of catalyst to tungsten powder is 1: 40~1:100, the catalyst is K 2 [PtCl 4 ] or PdCl 2 ;

(5)掺催化剂的WO3薄膜制备:采用提拉浸镀法或采用旋转镀膜法制备:(5) Preparation of catalyst-doped WO 3 film: prepared by pulling dipping method or spin coating method:

①采用提拉浸镀法在载玻片或抛光硅片表面制备掺催化剂的WO3薄膜,提拉速度为4-6.5cm/min;①Use the pulling and immersion plating method to prepare catalyst-doped WO 3 thin films on the surface of glass slides or polished silicon wafers, and the pulling speed is 4-6.5cm/min;

或者:②采用旋转镀膜法,在硅片或K9玻璃表面制备掺催化剂的WO3薄膜,预涂速率为900-1100r/min,旋涂速率为2500-3500r/min;Or: ②Use the spin coating method to prepare catalyst-doped WO 3 film on the surface of silicon wafer or K9 glass, the pre-coating rate is 900-1100r/min, and the spin-coating rate is 2500-3500r/min;

将所得掺催化剂的WO3薄膜在空气氛围中,烤胶温度为50℃-250℃,时间为50-70分钟;Baking the obtained catalyst-doped WO 3 film in an air atmosphere at a temperature of 50°C-250°C for 50-70 minutes;

此方法制备的薄膜循环性能良好,500次以后依然没有任何明显衰减。The film prepared by this method has good cycle performance, and there is still no obvious attenuation after 500 cycles.

实施例5:制备两相混合掺杂WO3/Al2O3薄膜的制备Example 5: Preparation of two-phase mixed doped WO3/Al 2 O 3 film preparation

(1)WO3溶胶的制备:(1) Preparation of WO 3 sol:

采用sol-gel法,在常温常压下,将钨粉和过氧化氢溶液搅拌反应50-70分钟,钨粉和过氧化氢的摩尔比为1∶3~1∶4,离心分离,过滤得到淡黄色透明溶液;然后向所得溶液中加入无水乙醇,无水乙醇的加入量为容器体积的1/2至4/5,在75-85℃油浴回流1.5-2小时,至溶胶转化为橘黄色,即得到WO3乙醇溶胶。Using the sol-gel method, under normal temperature and pressure, tungsten powder and hydrogen peroxide solution were stirred and reacted for 50-70 minutes, the molar ratio of tungsten powder and hydrogen peroxide was 1:3-1:4, centrifuged and filtered to obtain Light yellow transparent solution; then add absolute ethanol to the resulting solution, the amount of absolute ethanol added is 1/2 to 4/5 of the volume of the container, and reflux in an oil bath at 75-85°C for 1.5-2 hours until the sol is transformed into Orange yellow, namely to obtain WO 3 ethanol sol.

(2)Al2O3溶胶的制备(2) Preparation of Al 2 O 3 sol

容量瓶和移液管分别精确量取无水氯化铝+去离子水+乙醇+环氧丙烷(6mmol∶0.65ml∶6-40ml∶0.32ml);或者异丙醇铝+水+异丙醇+催化剂(酸或者碱,以盐酸为例),比例为1mmol∶3mmol∶1-10ml∶0.1mmol;将精确量取所需的溶胶倒入烧杯中;用清洁薄膜和橡皮筋将烧杯瓶口密封后放置在磁力搅拌机上进行搅拌,搅拌时间为4小时;50度老化1小时。Volumetric flask and pipette respectively accurately measure anhydrous aluminum chloride + deionized water + ethanol + propylene oxide (6mmol: 0.65ml: 6-40ml: 0.32ml); or aluminum isopropoxide + water + isopropanol + Catalyst (acid or alkali, take hydrochloric acid as an example), the ratio is 1mmol: 3mmol: 1-10ml: 0.1mmol; accurately measure the required sol into the beaker; seal the mouth of the beaker with a cleaning film and a rubber band Finally, it was placed on a magnetic stirrer for stirring for 4 hours; aging at 50°C for 1 hour.

(3)WO3和Al2O3复合溶胶制备(3) Preparation of WO 3 and Al 2 O 3 composite sol

向步骤(1)所得的溶胶中加入步骤(2)所得溶胶,此种溶胶的比例按照所需的薄膜的厚度和致色深度进行调节,此分散比例建议采用WO3/SiO2摩尔比为1.25/1Add the sol obtained in step (2) to the sol obtained in step (1), and the ratio of this sol is adjusted according to the thickness and color depth of the required film. This dispersion ratio is recommended to adopt WO3/ SiO The molar ratio is 1.25/ 1

(4)掺催化剂的WO3/Al2O3溶胶的制备:(4) Preparation of catalyst-doped WO3/Al 2 O 3 sol:

向步骤(3)所得的溶胶中掺入催化剂,常温下搅拌2~3小时,待溶胶呈微红褐色稳定溶胶时,在常压零度条件下保存备用;催化剂与钨粉的摩尔比为1∶40~1∶100,催化剂为K2[PtCl4]或PdCl2Add catalyst to the sol obtained in step (3), stir at normal temperature for 2 to 3 hours, when the sol is a reddish-brown stable sol, store it under normal pressure and zero temperature for subsequent use; the molar ratio of catalyst to tungsten powder is 1: 40~1:100, the catalyst is K 2 [PtCl 4 ] or PdCl 2 ;

(5)掺催化剂的WO3薄膜制备:采用提拉浸镀法或采用旋转镀膜法制备:(5) Preparation of catalyst-doped WO 3 film: prepared by pulling dipping method or spin coating method:

①采用提拉浸镀法在载玻片或抛光硅片表面制备掺催化剂的WO3薄膜,提拉速度为4-6.5cm/min;①Use the pulling and immersion plating method to prepare catalyst-doped WO 3 thin films on the surface of glass slides or polished silicon wafers, and the pulling speed is 4-6.5cm/min;

或者:②采用旋转镀膜法,在硅片或K9玻璃表面制备掺催化剂的WO3薄膜,预涂速率为900-1100r/min,旋涂速率为2500-3500r/min;Or: ②Use the spin coating method to prepare catalyst-doped WO 3 film on the surface of silicon wafer or K9 glass, the pre-coating rate is 900-1100r/min, and the spin-coating rate is 2500-3500r/min;

将所得掺催化剂的WO3薄膜在空气氛围中,烤胶温度为50℃-250℃,时间为50-70分钟;Baking the obtained catalyst-doped WO 3 film in an air atmosphere at a temperature of 50°C-250°C for 50-70 minutes;

此方法制备的薄膜循环性能良好,500次以后依然没有任何明显衰减。The film prepared by this method has good cycle performance, and there is still no obvious attenuation after 500 cycles.

实施例6:制备两相混合掺杂WO3/Al2O3薄膜的制备Example 6: Preparation of two-phase mixed doped WO3/Al 2 O 3 thin film

(1)WO3溶胶的制备:(1) Preparation of WO 3 sol:

采用sol-gel法,在常温常压下,将钨粉和过氧化氢溶液搅拌反应50-70分钟,钨粉和过氧化氢的摩尔比为1∶3~1∶4,离心分离,过滤得到淡黄色透明溶液;然后向所得溶液中加入无水乙醇,无水乙醇的加入量为容器体积的1/2至4/5,在75-85℃油浴回流1.5-2小时,至溶胶转化为橘黄色,即得到WO3乙醇溶胶。Using the sol-gel method, under normal temperature and pressure, tungsten powder and hydrogen peroxide solution were stirred and reacted for 50-70 minutes, the molar ratio of tungsten powder and hydrogen peroxide was 1:3-1:4, centrifuged and filtered to obtain Light yellow transparent solution; then add absolute ethanol to the resulting solution, the amount of absolute ethanol added is 1/2 to 4/5 of the volume of the container, and reflux in an oil bath at 75-85°C for 1.5-2 hours until the sol is transformed into Orange yellow, namely to obtain WO 3 ethanol sol.

(2)掺催化剂的WO3/SiO2溶胶的制备:(2) WO3/ SiO sol of doping catalyst Preparation:

向步骤(1)所得的溶胶中掺入催化剂,常温下搅拌2~3小时,待溶胶呈微红褐色稳定溶胶时,在常压零度条件下保存备用;催化剂与钨粉的摩尔比为1∶40~1∶100,催化剂为K2[PtCl4]或PdCl2Add catalyst to the sol obtained in step (1), stir at normal temperature for 2 to 3 hours, when the sol is a reddish-brown stable sol, store it under normal pressure and zero temperature for subsequent use; the molar ratio of catalyst to tungsten powder is 1: 40~1:100, the catalyst is K 2 [PtCl 4 ] or PdCl 2 ;

(3)WO3溶胶与Al2O3模板的复合薄膜制备(3) Composite film preparation of WO 3 sol and Al 2 O 3 template

把70nm Al2O3模板浸泡在(2)所制备的溶胶中,在超声中震荡30分钟;取出该Al2O3模板,将所得掺催化剂的WO3薄膜在空气氛围中,烤胶温度为50℃-250℃,时间为50-70分钟;Soak the 70nm Al 2 O 3 template in the sol prepared in (2), and vibrate in ultrasonic for 30 minutes; take out the Al 2 O 3 template, and place the obtained catalyst-doped WO 3 thin film in the air atmosphere, and bake the glue at a temperature of 50°C-250°C, the time is 50-70 minutes;

此方法制备的薄膜循环性能良好,500次以后依然没有任何明显衰减。The film prepared by this method has good cycle performance, and there is still no obvious attenuation after 500 cycles.

本发明应以固化分散技术,利用添加材料降低WO3的团聚提高、WO3气致变色薄膜的孔隙率进而实现气致变色薄膜循环使用寿命。采用Sol-gel法制备稳定的WO3复合溶胶;采用提拉法或旋涂法在普通玻璃上镀制透明均匀的掺催化剂的复合WO3多孔薄膜。此固化分散技术改善和强化了薄膜的孔隙结构,降低了WO3之间的相互作用,提高了溶胶凝胶技术制备的气致变色薄膜的循环使用寿命和热稳定性。通过本发明掺杂复合过的溶胶制备的气致变色薄膜与未经过处理的薄膜相比,大幅提高了气致变色的循环性;与磁控溅射等方法制备的气致变色薄膜致色相比性能相同,成本大幅将低;与电致变色薄膜相比亦有同样优点。本发明很好的弥补了溶胶凝胶法制备的气致变色灵巧窗的缺点,使此类灵巧窗技术更趋于成熟。The present invention should use solidification and dispersion technology to reduce the agglomeration of WO 3 and improve the porosity of WO 3 aerochromic film by using additive materials to realize the cycle life of the aerochromic film. The stable WO 3 composite sol was prepared by the Sol-gel method; a transparent and uniform composite WO 3 porous film doped with catalyst was plated on ordinary glass by the pulling method or the spin coating method. This curing dispersion technology improves and strengthens the pore structure of the film, reduces the interaction between WO 3 , and improves the cycle life and thermal stability of the aerochromic film prepared by the sol-gel technology. Compared with the untreated film, the aerochromic thin film prepared by doping and compounding the sol of the present invention greatly improves the cycle of aerochromic color; compared with the aerochromic thin film prepared by magnetron sputtering, etc. The performance is the same, and the cost will be significantly lower; compared with the electrochromic film, it also has the same advantages. The invention well makes up for the shortcomings of the aerochromic smart windows prepared by the sol-gel method, and makes the technology of such smart windows more mature.

上述的对实施例的描述是为便于该技术领域的普通技术人员能理解和应用本发明。熟悉本领域技术的人员显然可以容易地对这些实施例做出各种修改,并把在此说明的一般原理应用到其他实施例中而不必经过创造性的劳动。因此,本发明不限于这里的实施例,本领域技术人员根据本发明的揭示,对于本发明做出的改进和修改都应该在本发明的保护范围之内。The above description of the embodiments is for those of ordinary skill in the art to understand and apply the present invention. It is obvious that those skilled in the art can easily make various modifications to these embodiments, and apply the general principles described here to other embodiments without creative effort. Therefore, the present invention is not limited to the embodiments herein, and improvements and modifications made by those skilled in the art according to the disclosure of the present invention should fall within the protection scope of the present invention.

Claims (5)

1.一种提高WO3薄膜气致循环性能的方法,其特征在于:采用可提高WO3气致变色薄膜孔隙率的无机物对WO3溶胶进行掺杂,所述无机物包括SiO2、Al2O31. A method for improving WO 3 film gas-induced cycle performance, characterized in that: adopting WO 3 The inorganic matter that can improve the porosity of the aerochromic thin film is doped to WO 3 sol, and said inorganic matter includes SiO 2 , Al 2 O 3 ; 所述方法包括以下步骤:The method comprises the steps of: (1)制备WO3溶胶;(1) preparation of WO 3 sol; (2)选取与制备SiO2、Al2O3溶胶;(2) Selection and preparation of SiO 2 and Al 2 O 3 sols; (3)WO3和SiO2、Al2O3复合溶胶制备:(3) Preparation of WO 3 and SiO 2 , Al 2 O 3 composite sol: (4)制备掺催化剂的WO3/SiO2、WO3/Al2O3溶胶:(4) Preparation of catalyst-doped WO 3 /SiO 2 , WO 3 /Al 2 O 3 sols: (5)制备掺催化剂的WO3/SiO2、WO3/Al2O3薄膜;(5) Preparation of catalyst-doped WO 3 /SiO 2 , WO 3 /Al 2 O 3 films; 所述WO3溶胶的制备:The preparation of the WO 3 sol: 采用sol-gel法,在常温常压下,将钨粉和过氧化氢溶液搅拌反应50-70分钟,钨粉和过氧化氢的摩尔比为1∶3~1∶4,离心分离,过滤得到淡黄色透明溶液;然后向所得溶液中加入无水乙醇,无水乙醇的加入量为容器体积的1/2至4/5,在75-85℃油浴回流1.5-2小时,至溶胶转化为橘黄色,即得到WO3乙醇溶胶;Using the sol-gel method, under normal temperature and pressure, tungsten powder and hydrogen peroxide solution were stirred and reacted for 50-70 minutes, the molar ratio of tungsten powder and hydrogen peroxide was 1:3-1:4, centrifuged and filtered to obtain Light yellow transparent solution; then add absolute ethanol to the resulting solution, the amount of absolute ethanol added is 1/2 to 4/5 of the volume of the container, and reflux in an oil bath at 75-85°C for 1.5-2 hours until the sol is transformed into Orange yellow, that is, to obtain WO 3 ethanol sol; 所述SiO2、Al2O3溶胶的制备:包括:The preparation of the SiO 2 and Al 2 O 3 sols: including: ①酸性SiO2溶胶的制备:① Preparation of acidic SiO 2 sol: 用容量瓶和移液管分别精确量取去离子水、无水乙醇、硅源采用正硅酸乙酯,比例根据实验温度、硅源种类、试验时间的需求可以适当调整,室温条件下去离子水与正硅酸乙酯采用比例为:23.5/77.8;其中按照所取去离子水的量精确称量酸配制成pH<7的酸溶液,倒入烧杯A中,将清洁磁力搅拌子一枚放入烧杯A中;再将精确量取所需的正硅酸乙酯和所需量的无水乙醇依次倒入烧杯A中;用清洁薄膜和橡皮筋将烧杯A瓶口密封后放置在磁力搅拌机上进行搅拌,按照上述比例制备的酸性SiO2溶胶搅拌时间为2-4小时就可以制得酸性SiO2溶胶;Use a volumetric flask and a pipette to accurately measure deionized water, absolute ethanol, and tetraethyl orthosilicate as the silicon source. The ratio can be adjusted appropriately according to the experimental temperature, type of silicon source, and test time. Deionized water at room temperature The proportion of tetraethyl orthosilicate is: 23.5/77.8; the acid is accurately weighed according to the amount of deionized water taken to prepare an acid solution with pH<7, pour it into beaker A, and put a clean magnetic stirring bar into beaker A; then accurately measure the required amount of tetraethyl orthosilicate and the required amount of absolute ethanol into beaker A in turn; seal the mouth of beaker A with a cleaning film and rubber band and place it in a magnetic stirrer Stir on, according to the acidic SiO prepared according to the above ratio The sol stirring time is 2-4 hours and just can make the acidic SiO sol ; 或者②碱性SiO2溶胶的制备:Or ② Preparation of Alkaline SiO 2 Sol: 碱性催化法制备SiO2溶胶所需原材料及配比比例,摩尔比例如下:正硅酸乙酯(TEOS)∶乙醇∶氨水=1/38/2.45,溶胶的配制过程应在干净清洁、相对湿度小于60%的环境下进行,步骤如下:用容量瓶和移液管精确量取所需量1/2的无水乙醇倒入烧杯A中;用移液管精确量取所需量的pH=12的浓氨水倒入烧杯A中;将清洁磁力搅拌子一枚放入烧杯A中,用清洁薄膜和橡皮筋将烧杯A瓶口密封后放置在磁力搅拌机上进行搅拌20min左右,达到均匀分散的目的;The raw materials and proportions required for the preparation of SiO2 sol by alkaline catalysis, the molar ratio is as follows: tetraethyl orthosilicate (TEOS): ethanol: ammonia water = 1/38/2.45, the preparation process of the sol should be in a clean, relative humidity Carry out under the environment of being less than 60%, the steps are as follows: use volumetric flask and pipette to accurately measure the dehydrated alcohol of required amount 1/2 and pour in beaker A; Use pipette to accurately measure required amount of pH= Pour 12% concentrated ammonia water into beaker A; put a clean magnetic stirrer into beaker A, seal the mouth of beaker A with a cleaning film and rubber band, place it on a magnetic stirrer and stir for about 20 minutes to achieve uniform dispersion Purpose; 用容量瓶和移液管精确量取所需正硅酸乙酯和所需量1/2的无水乙醇依次倒入烧杯B中;将清洁磁力搅拌子一枚放入烧杯B中,用清洁薄膜和橡皮筋将烧杯B瓶口密封后放置在磁力搅拌机上进行搅拌20min左右,达到均匀分散的目的;用磁铁沿外壁将烧杯A中的磁力搅拌子中取出,并将烧杯A中混合溶液倒入梨形分液漏斗中;将梨形分液漏斗中的混合溶液缓慢地逐滴滴入放置在磁力搅拌器上的烧杯B中,同时保持搅拌均匀;滴加结束后继续搅拌2h左右,使其混合均匀,随后用磁铁沿外壁取出烧杯B中的搅拌子;Use a volumetric flask and a pipette to accurately measure the required tetraethyl orthosilicate and 1/2 of the required amount of absolute ethanol and pour them into beaker B in sequence; put a clean magnetic stirring bar into beaker B, and use a clean Seal the mouth of beaker B with a film and rubber band, place it on a magnetic stirrer and stir for about 20 minutes to achieve uniform dispersion; use a magnet to take out the magnetic stirrer in beaker A along the outer wall, and pour the mixed solution in beaker A into the pear-shaped separating funnel; slowly drop the mixed solution in the pear-shaped separating funnel into the beaker B placed on the magnetic stirrer, while keeping stirring evenly; It is mixed evenly, and then the stirring bar in the beaker B is taken out along the outer wall with a magnet; 将烧杯B用清洁的薄膜和橡皮筋密封好静置在稳定的环境下:16-24℃,相对湿度<50%进行老化,老化后的溶胶呈淡蓝色乳胶状,此时溶胶内颗粒的平均粒径小于10nm,将溶胶取出倒入圆底烧瓶中,溶胶不得浸没烧瓶2/3以上;在圆底烧瓶中加入少量洁净的分子筛防止爆沸,然后将烧瓶用铁架台固定浸没在盛有硅油的水浴加热锅中;调节油浴温度在80℃~85℃之间,保持溶胶液面的微沸状态;利用蛇形回流管进行回流,用润湿后的定量pH试纸在回流管管口进行测试,至pH试纸无变化后,停止加温,待自然冷却后将烧瓶取出;将溶胶倒入烧杯中密封保存;Seal the beaker B with a clean film and a rubber band and let it stand in a stable environment: 16-24°C, relative humidity <50% for aging. The aged sol is in the form of light blue latex. At this time, the particles in the sol The average particle size is less than 10nm. Take out the sol and pour it into a round bottom flask. The sol must not be immersed in more than 2/3 of the flask; add a small amount of clean molecular sieve to the round bottom flask to prevent bumping, and then fix the flask with an iron stand Silicone oil in a water bath heating pot; adjust the temperature of the oil bath between 80°C and 85°C to keep the sol liquid surface in a slightly boiling state; use a serpentine reflux tube for reflux, and use the wetted quantitative pH test paper at the mouth of the reflux tube Carry out the test until the pH test paper has no change, stop heating, take out the flask after natural cooling; pour the sol into a beaker and seal it for storage; 或者③其他SiO2溶胶的制备:Or ③ preparation of other SiO 2 sols: 利用甲基三乙氧基硅烷硅源与酒精按所需比例混合配成相应浓度的溶胶;Use methyltriethoxysilane silicon source and alcohol to mix according to the required ratio to form a sol with corresponding concentration; 或者④Al2O3溶胶的制备:Or ④ Preparation of Al 2 O 3 sol: 容量瓶和移液管分别精确量取无水氯化铝+去离子水+乙醇+环氧丙烷,或者异丙醇铝+水+异丙醇+催化剂;将精确量取所需的溶胶倒入烧杯中;用清洁薄膜和橡皮筋将烧杯瓶口密封后放置在磁力搅拌机上进行搅拌,搅拌时间为4小时;50度老化1小时;Volumetric flasks and pipettes were used to accurately measure anhydrous aluminum chloride + deionized water + ethanol + propylene oxide, or aluminum isopropoxide + water + isopropanol + catalyst; pour the required sol into In a beaker; seal the mouth of the beaker with a cleaning film and a rubber band and place it on a magnetic stirrer for stirring for 4 hours; aging at 50°C for 1 hour; 所述WO3和SiO2、Al2O3复合溶胶制备:Preparation of the WO 3 and SiO 2 , Al 2 O 3 composite sol: 向步骤(1)所得的溶胶中加入步骤(2)所得溶胶,分散比例:SiO2∶WO3摩尔比为≥1/1或Al2O3∶WO3摩尔比为:1/1;Add the sol obtained in step (2) to the sol obtained in step (1), the dispersion ratio: SiO 2 : WO 3 molar ratio ≥ 1/1 or Al 2 O 3 : WO 3 molar ratio: 1/1; 所述掺催化剂的WO3/SiO2、WO3/Al2O3溶胶的制备:Preparation of the catalyst-doped WO 3 /SiO 2 , WO 3 /Al 2 O 3 sols: 向步骤(3)所得的溶胶中掺入催化剂,常温下搅拌2~3小时,待溶胶呈微红褐色稳定溶胶时,在常压零度条件下保存备用;催化剂与钨粉的摩尔比为1∶40~1∶100,所述催化剂为K2[PtCl4]或PdCl2Add catalyst to the sol obtained in step (3), stir at normal temperature for 2 to 3 hours, when the sol is a reddish-brown stable sol, store it under normal pressure and zero temperature for subsequent use; the molar ratio of catalyst to tungsten powder is 1: 40 to 1:100, the catalyst is K 2 [PtCl 4 ] or PdCl 2 . 2.根据权利要求1所述的方法,其特征在于:所述掺催化剂的WO3/SiO2、WO3/Al2O3薄膜制备:采用提拉浸镀法或采用旋转镀膜法制备:2. The method according to claim 1, characterized in that: the catalyst-doped WO 3 /SiO 2 , WO 3 /Al 2 O 3 thin films are prepared by pulling and dipping or spin coating: ①采用提拉浸镀法在载玻片或抛光硅片表面制备掺催化剂的WO3/SiO2、WO3/Al2O3薄膜,提拉速度为4-6.5cm/min;①Prepare catalyst-doped WO 3 /SiO 2 , WO 3 /Al 2 O 3 thin films on the surface of glass slides or polished silicon wafers by pulling dip-plating method, the pulling speed is 4-6.5cm/min; 或者:②采用旋转镀膜法,在硅片或K9玻璃表面制备掺催化剂的WO3/SiO2、WO3/Al2O3薄膜,预涂速率为900-1100r/min,旋涂速率为2500-3500r/min;Or: ②Use the spin coating method to prepare catalyst-doped WO 3 /SiO 2 , WO 3 /Al 2 O 3 thin films on the surface of silicon wafers or K9 glass. The pre-coating rate is 900-1100r/min, and the spin-coating rate is 2500- 3500r/min; 将所得掺催化剂的WO3/SiO2、WO3/Al2O3薄膜在空气氛围中,烤胶温度为50℃-250℃,时间为50-70分钟。The obtained catalyst-doped WO 3 /SiO 2 and WO 3 /Al 2 O 3 films are baked in an air atmosphere at a temperature of 50°C-250°C for 50-70 minutes. 3.根据权利要求1所述的方法,其特征在于:为了获得较厚的薄膜,采用提高WO3溶胶浓度或提拉速度的方法,浓度越高,提拉速度越快薄膜越厚;或者采用多次旋涂的方法,每两次旋涂之间,将薄膜在40-55℃温度之间热处理2-5min。3. The method according to claim 1, characterized in that: in order to obtain a thicker film, adopt the method of improving WO sol concentration or pulling speed, the higher the concentration, the faster the pulling speed and the thicker the film; or adopt In the method of multiple spin coatings, the film is heat-treated at a temperature of 40-55° C. for 2-5 minutes between each spin coating. 4.根据权利要求1所述的方法,其特征在于:所述酸性SiO2溶胶的制备中催化剂是盐酸、钨酸、硝酸、磷酸、草酸中的一种,调节pH=2。4. The method according to claim 1, characterized in that: the catalyst in the preparation of the acidic SiO sol is one of hydrochloric acid, tungstic acid, nitric acid, phosphoric acid, oxalic acid, and the pH=2 is adjusted. 5.根据权利要求1所述的方法,其特征在于:所述Al2O3溶胶的制备中,无水氯化铝+去离子水+乙醇+环氧丙烷的比例为6mmol∶0.65ml∶6-40ml∶0.32ml;或者异丙醇铝+水+异丙醇+盐酸的比例为1mmol∶3mmol∶1-10ml∶0.1mmol。5. The method according to claim 1, characterized in that: in the preparation of the Al2O3 sol, the ratio of anhydrous aluminum chloride+deionized water+ethanol+propylene oxide is 6mmol: 0.65ml : 6 - 40ml: 0.32ml; or the ratio of aluminum isopropoxide + water + isopropanol + hydrochloric acid is 1mmol: 3mmol: 1-10ml: 0.1mmol.
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