CN101546133B - Exposure device and an exposure method - Google Patents
Exposure device and an exposure method Download PDFInfo
- Publication number
- CN101546133B CN101546133B CN2009101182133A CN200910118213A CN101546133B CN 101546133 B CN101546133 B CN 101546133B CN 2009101182133 A CN2009101182133 A CN 2009101182133A CN 200910118213 A CN200910118213 A CN 200910118213A CN 101546133 B CN101546133 B CN 101546133B
- Authority
- CN
- China
- Prior art keywords
- belt
- exposure
- pressing plate
- identification marking
- calibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title abstract description 10
- 238000003825 pressing Methods 0.000 claims abstract description 92
- 230000005540 biological transmission Effects 0.000 description 16
- 238000010521 absorption reaction Methods 0.000 description 13
- 238000004804 winding Methods 0.000 description 13
- 238000001179 sorption measurement Methods 0.000 description 12
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 7
- 229910052804 chromium Inorganic materials 0.000 description 7
- 239000011651 chromium Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000005755 formation reaction Methods 0.000 description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 6
- 230000009471 action Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000005355 lead glass Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000000844 transformation Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The present invention relates to an exposure device and an exposure method. The exposure device 100 feeds a body (T) to be exposed with preset width and film shape to an exposure bench 50, and exposes a circuit pattern of a mask (M) on the body. The exposure body has a pressing board 42 pressing the body; an image recognization section 54 for observing a first correction recognization mark (AM) formed on the body and a second correction recognization mark (MM) formed on the circuit pattern; and a first moving section 43 moving the pressing board and the image recognization section in preset width direction of the body.
Description
Technical field
The present invention relates to transmit the belt of film shape to exposure portion, and will be sent to the exposure device and the exposure method of winding side at the belt that this exposure portion makes public from supply side.
Background technology
Usually, because the body of the various small-sized machines of mobile phone, mobile office machine etc. is compact, the circuit base material that therefore is used for the circuit substrate (printed circuit board) of small-sized machine uses thin and high-precision film shape belt (below, be called " belt ").
The material of this belt tends to thickness and is about 0.1mm the slimming to 0.06mm gradually.Have again, recently used thickness below 0.05mm, width is that 100～250mm, length are the banded and very long belt of the Bao Erkuan of 700m.Owing to be long belt therefore usually the coiling tubular use.
When on the belt of this drum, making circuit substrate, following situation can occur: the belt of drum is sent in the way of exposure portion piecewise becomes lax, perhaps near the belt the eyelet of banded workpiece W, produces fold.Owing to fold occurs on the belt, even therefore vacuum suction belt in this state, belt can not be adsorbed on the pedestal surface.There is disclosed technology in the patent documentation 1 in exposure device as eliminating this problem points.
Disclosed film exposure device is provided with the belt pressing mechanism in order to carry out vacuum suction reliably in patent documentation 1, and this belt pressing mechanism is pushed the marginal portion of belt from the both sides of belt width direction.
But in the disclosed film exposure device, if belt width changes, then existence needs to change the problem of pressing plate in patent documentation 1.In addition also existence need be on the narrow and small operating area between projection optics system and the vaccum bench problem points of arrangement of straps pressing mechanism.
Patent documentation 1: TOHKEMY 2005-274670 communique
Summary of the invention
Therefore, the present invention is the invention of putting in view of the above problems, and its purpose is, even situation about changing in belt width need not changed the operation of pressing plate yet.Another object of the present invention is, can prevent the warpage of belt or lax through the belt of nearby pushing in the calibration identification marking, and the calibration identification marking that can observe belt.
The exposure device of the 1st viewpoint is with being delivered on the exposure desk by the exposure body of the film shape with Rack, and with the exposure of the circuit pattern of mask by the exposure device on the exposure body.This exposure device has: push by the pressing plate of exposure body; Be used to observe be formed on by the 1st calibration identification marking (for example: calibrate identification marking AM) on the exposure body and be formed on the 2nd on the circuit pattern mask and (for example: image recognition portion mask identification marking MM) calibrate identification marking; Make pressing plate and image recognition portion simultaneously to the 1st moving part that is moved by the Rack direction of exposure body.
According to this formation, because therefore the 1st moving part simultaneously moving press plate and image recognition portion can shorten absorption and calibrated the required time afterwards by whole of exposure body.In addition, owing to need not to be provided with other moving part, therefore can reduce manufacturing cost.
The pressing plate of the exposure device of the 2nd viewpoint pushes by the exposure body and be pressed into ratio the 1st calibration identification marking position more in the inner part on the Rack direction, and pressing plate has the view window of observing the 1st calibration identification marking and the 2nd calibration identification marking.
Owing to use the pressing plate of the length that can cover the 1st calibration identification marking and the 2nd calibration identification marking, therefore can push reliably by the end of exposure body.Have, the 1st and the 2nd calibration identification marking can be observed from view window by image recognition portion again.
The pressing plate of the exposure device of the 3rd viewpoint is only pushed ratio the 1st calibration identification marking position more in the outer part on the Rack direction.
Especially, if roughly constant, then shorten pressing plate and also can push reliably by the end of exposure body by the Rack of exposure body.
The 1st moving part of the exposure device of the 4th viewpoint has the 2nd moving part, and the 2nd moving part makes pressing plate along moving with the direction of being intersected by the exposure body, so that pressing plate touches by the exposure body.
The 1st moving part of the exposure device of the 5th viewpoint makes pressing plate and image recognition portion being served as that axle is rotated by the direction of transfer of exposure body.
The exposure device of the 6th viewpoint is provided with 2 image recognition portions at least.Thus, can calibrate mask and quilt exposure body.
Even exposure device involved in the present invention also can be rapidly when the width of belt changes and is carried out correspondence neatly, can aim at the calibration identification marking accurately simultaneously in addition, therefore can improve the exposure that mask pattern overlaps.
Description of drawings
Fig. 1 is the skeleton diagram of the related exposure device 100 of expression embodiment of the present invention.
Fig. 2 is that the related belt transmission of expression embodiment of the present invention is 60 approximate three-dimensional map.
Fig. 3 is the related calibration plotting unit 30 of expression embodiment of the present invention and the approximate three-dimensional map of calibrated cameras 40.
Fig. 4 transmits the planimetric map that roller 64 sides have been observed calibrated cameras 40a and calibrated cameras 40b from the 1st.
Fig. 5 A is the side view of pressing plate 42.
Fig. 5 B is the planimetric map of pressing plate 42.
Fig. 6 A is the planimetric map of the pressing plate 42-1 of the 1st variation.
Fig. 6 B is the planimetric map of the pressing plate 42-2 of the 2nd variation.
Fig. 6 C is the planimetric map of the pressing plate 42-3 of the 3rd variation.
Fig. 7 is the action flow chart of calibrated cameras 40.
Fig. 8 is the figure of the variation of the related calibrated cameras 40 of expression embodiment 2.
Symbol description:
The 10-mercury vapor lamp, 12-elliptical reflector, 14-catoptron, 16-fly's-eye lens, 18-collector lens, 20-projection optics system; 30-calibrates plotting unit, 31-end face detecting device, and 33-calibration identification marking is used photomask, 35-ultraviolet light source, 40-calibrated cameras, 41-photograph portion; The 42-pressing plate, 42R-bend, 42W-view window, 43-calibrated cameras movable part, 43L-guide rail, 43M-motor; 43ar, 45ar-arrow, 44-pressing plate movable part, 45-pressing plate support portion, 45M-motor, 50-exposure desk, 51-camera lens; The 52-Lighting Division, the 53-half-mirror, 54-photography portion, the 55-adsorption hole, the 56-escape hole, the 60-band transports and is; 61-supply roll rotating part, 62-supply side the 1st guide rolls, 63-supply side the 2nd guide rolls, 63M-the 2nd guide rolls motor, 64-the 1st transmits roller, 64a-adsorption hole; 64M-transmits the roller motor, and 66-the 2nd transmits roller, 66a-adsorption hole, 67-winding side the 1st guide rolls, 68-winding side the 2nd guide rolls, 69-coiling sleeve rotating part; 70-calibrated cameras rotating part, 71-central shaft, 72-photography camera support portion, 72a-urceolus, 72b-inner core; The 72M-motor, 80-supplies with sleeve, 81-flange part, 90-coiling sleeve, 100-projection aligner; D1-supply side relaxation absorption portion, D2-winding side relaxation absorption portion, the M-photomask, AM-calibrates identification marking, BM-chromium identification marking; MM-mask identification marking, the belt of T-film shape, HR-surface level, the reflected light of AM1-calibration identification marking AM, the incident light of MM1-mask identification marking MM.
Embodiment
(embodiment 1)
< formation of exposure device >
Situation with projection aligner is an example, and example of the present invention is described.
Fig. 1 is the skeleton diagram of the related projection aligner 100 of expression embodiment of the present invention.At this, projection aligner involved in the present invention 100 transmits film like belts (below be called belt) T, and will be plotted in circuit pattern exposure on the photomask M on its belt T.
Belt T is by constituting as the flexible substrate of circuit substrate or the material of film like belt.This belt T be by thickness for example below 0.05mm, width is that 100～250mm, length are that the parts of the Bao Erkuan of 700m constitute, and is wound on the supply roll rotating part 61.The belt T that has following shape: on the left and right sides edge part of this belt T, be formed with the belt T of eyelet (not shown), perhaps do not have the belt T of eyelet.At this, coating in advance is applicable to the photoresist of mercury vapor lamp 10 on the surface of belt T.
Projection aligner 100 intermittently transmits belt T to the exposure desk 50 along the vertical direction setting piecewise.Projection aligner 100 utilizes the light from mercury vapor lamp 10 then, and the circuit pattern through photomask M makes public to the belt T that transmits piecewise one by one.
It is 20 that projection aligner 100 has mercury vapor lamp 10, catoptron 14, fly's-eye lens 16, collector lens 18, photomask M and projection optics.Mercury vapor lamp 10 irradiations comprise the ultraviolet light of 365nm wavelength.Except mercury vapor lamp 10, can also use ultraviolet laser or ultraviolet LED.Elliptical reflector 12 is configured in the position of the back that covers this mercury vapor lamp 10.Catoptron 14 will reflect to photomask M from the light that mercury vapor lamp 10 irradiates.
Fly's-eye lens 16 is that a plurality of positive element are arranged along the mode of optical axis extending with its central axis in length and breadth and carefully.Fly's-eye lens 16 plays the effect of adjusting equably from the illumination patterns of catoptron 14.
The overlapping irradiation of light beam of having passed through collector lens 18 is formed with the photomask M of circuit pattern.Transmission be 20 by the light beam of the mask M that throws light on of exposure light towards projection optics.Around the circuit pattern of photomask M, be formed with mask identification marking MM, be used to aim at belt T and photomask M.
Photomask M remains on the not shown mask stage, can move along the direction that with respect to projection optics is 20 light shaft positive cross.Projection optics be 20 only can use the refractive that constitutes with lens system, with the reflection-refraction type of the reflection-type that constitutes, compound lens and the catoptron of catoptron etc.Projection optics be 20 can also use amplify optical system, etc. times optical system or dwindle any of optical system.
Be to dispose exposure desk 50 on 20 the focal position at projection optics.Exposure desk 50 adsorbs and keeps belt T, can utilize not shown exposure desk driving mechanism to move along Z-direction with the mode of vacuum suction.Exposure desk 50 utilizes not shown focus detection device to detect the focal position of belt T and moves along X-direction.Like this, be that 20 light beams that penetrate form images at belt T from projection optics.That is, the circuit pattern of photomask M forms images on belt T, and circuit pattern is replicated on the belt T by being coated on the photoresist on the belt T.
It is 60 that projection aligner 100 has the belt transmission that is configured in Fig. 1 left side, so that belt T is delivered on the exposure desk 50.
In addition, projection aligner 100 has: the calibration plotting unit 30 of on the regulation position of belt T, drawing the calibration identification marking; And be configured in projection optics be 20 and exposure desk 50 between calibrated cameras 40.
<belt transmits the formation of system >
Fig. 2 is that the related belt transmission of expression embodiment of the present invention is 60 approximate three-dimensional map.
It is 60 to have that this belt transmits: be installed on the central reel hole of the supply roll 80 that is wound with belt T and make the supply roll rotating part 61 of supply roll 80 rotations; Supply side the 1st guide rolls 62 of the belt T that guiding is transmitted; And supply side the 2nd guide rolls 63.
In addition, projection aligner 100 has: be configured in and be used to transmit the 1st of belt T on the upper-lower position of exposure desk 50 and transmit roller 64 and the 2nd and transmit roller 66; Winding side the 1st guide rolls 67 and winding side the 2nd guide rolls 68; And the reel spool rotating part 69 that makes reel spool 90 rotations of coiling belt T.Projection aligner 100 also has lax supply side relaxation absorption D1 of portion and the winding side relaxation absorption D2 of portion that absorption belt T produces in transmission.
Supply roll rotating part 61 is to be used for axle to support to have reeled and see the parts of belt T as the supply roll 80 of the spool-like of the belt T of circuit base material off, and is made up of the metal shaft in the reel hole that supply roll 80 is installed.This metal shaft utilizes not shown driving motor to be rotated.
At this, supply roll 80 is that the parts of 750mm constitute by the diameter of winding part for example, and on left and right edges, has flange part 81.The belt T that is wound on this supply roll 80 is transmitted roller 64 tensions by the 1st, together rotates with supply roll rotating part 61 thus and is sent on supply side the 1st guide rolls 62.
Supply side the 1st guide rolls 62 is that volume is linked with the auxiliary roller of sub-T, and the belt T that is wound on the supply roll 80 is seen off to the supply side relaxation absorption D1 of portion, and rotates freely as the center with axial region and to set.The supply side relaxation absorption D1 of portion for example relaxes into the device that the U font comes to apply to belt T tension force through belt T because of self weight; Make the belt T that sends from supply roll rotating part 61 between supply roll rotating part 61 and supply side the 1st guide rolls 62, and transmit in supply side the 2nd guide rolls 63 and the 1st and not produce excessive load or lax when transmitting between the roller 64.
Supply side the 2nd guide rolls 63 transmits roller 64 from the supply side relaxation absorption D1 of portion to the 1st and transmits belt T, and has the strap position adjusting mechanism that can move belt T to Width (arrow ar).This supply side the 2nd guide rolls 63 has the 2nd guide rolls motor 63M and not shown bearing etc.
The 2nd guide rolls motor 63M can make supply side the 2nd guide rolls 63 move while the direction of principal axis (Width of belt T) that rotates to arrow ar, thus the position on the Width of adjustment belt T.In addition, the 2nd guide rolls motor 63M can through just change and reverse adjust supply side the 2nd guide rolls 63 and after state the 1st transmit the belt T between the roller 64 tension force.
Supply side the 2nd guide rolls 63 that constitutes as described above makes the position of belt T move to the Y direction to be adjusted on the suitable position through rotating the 2nd guide rolls motor 63M, can correctly calibrate describing of calibration identification marking on the plotting unit 30 thus.
The 1st transmits roller 64 transmits belt T from supply side the 2nd guide rolls 63 to exposure desk 50, intermittently rotates driving the 1st transmission roller 64 through transmission roller motor 64M belt T is transmitted piecewise.Transmit to have on the roller 64 the 1st and make belt T be adsorbed on the 1st adsorption hole 64a that transmits on the roller surface of roller 64, and be connected the not shown vacuum plant that is used to adsorb belt T through adsorption hole 64a.
In addition, the 1st transmits the below that roller 64 is configured in the z direction of supply side the 2nd guide rolls 63, and with belt T and the surperficial parallel mode of exposure desk 50 be configured in exposure desk 50 directly over.
The 2nd transmits the downstream that roller 66 is configured in the direction of transfer of exposure desk 50, and the belt T that on exposure desk 50, has made public is sent to winding side, and be configured in the 1st transmit roller 64 and exposure desk 50 under.The 2nd transmission roller 66 has and the 1st transmission roller 64 identical construction, transmits the adsorption hole 66a that has on the roller 66 on the roller surface that belt T is adsorbed on the 2nd transmission roller 66 the 2nd.
The downstream that winding side the 1st guide rolls 67 is configured in the direction of transfer of the 2nd transmission roller 66 is sent to belt T on the winding side relaxation absorption D2 of portion.Winding side the 1st guide rolls 67 has and supply side the 2nd guide rolls 63 identical construction, and has the 1st guiding motor 67M that carries out strap position adjustment etc.
Winding side the 2nd guide rolls 68 is the auxiliary rollers that are used to guide belt T, so that the belt T that need be wound on the coiling sleeve 90 is sent on the reel spool 90, and has and supply side the 1st guide rolls 62 identical construction.
Reel spool rotating part 69 supports coiling sleeve 90, the belt that this coiling sleeve 90 is reeled and on exposure desk 50, made public.The axial region that this reel spool rotating part 69 will be equipped with the beam barrel portion of coiling sleeve 90 rotates as the center and is configured freely, and drives through driving motor (not shown).
< calibration plotting unit and calibrated cameras >
Fig. 3 is the related calibration plotting unit 30 of expression embodiment of the present invention and the approximate three-dimensional map of calibrated cameras 40.
" formation of calibration plotting unit 30 "
End face detecting device 31 is made up of linear CCD or two-dimensional CCD or CMOS camera, the end face that detects belt T through reflected light or the transmitted light of accepting from belt T.End face detecting device 31 has the 1st end face sensor 31a and the 2nd end face sensor 31b that are separated from each other at least for the degree of tilt of the direction of transfer that detects belt T on direction of transfer.These sensors are located in position, and are fixed on not shown framework etc.At this, as long as can determine the position and the degree of tilt of belt T end face through camera, promptly alternative end face detecting device 31 and using.Here, camera has the visual field of the whole Width that can observe belt T.
The calibration identification marking is photomasks of on the crystal glass plate, having made calibration identification marking pattern (chromium identification marking BM) with chromium etc. with photomask 33.Because the thermal expansivity of crystal glass is little and transmission of ultraviolet rays is high; Therefore very outstanding as the material of mask, in addition because the cohesive of chromium and crystal glass is good, ultraviolet cover very outstanding; And As time goes on change very little, therefore very suitable.The calibration identification marking can move along the Y direction with photomask 33, and has: the 1st calibration identification marking with 2 chromium identification marking BM is used photomask 33a; And have 2 chromium identification marking BM the 2nd the calibration identification marking use photomask 33b so that control easily.
Ultraviolet light source 35 can use the LED (UVLED) of irradiation ultraviolet radiation, and this ultraviolet ray makes public to the photoresist that is coated on the belt T.Also the light of drawing from mercury vapor lamp 10 can be used, the light of drawing from the UV LASER Light Source of other preparation can also be used by optical fiber by optical fiber.Ultraviolet light source 35 is made up of 4 UVLED35a, 35b, 35c and 35d, and ultraviolet light source 35 quantity are consistent with the quantity of chromium identification marking BM here.
Be used to grasp the position of belt T from the signal of end face detecting device 31; According to this position from ultraviolet light source 35 irradiation ultraviolet radiations, and coat depict on the lip-deep photoresist of belt T be plotted in the calibration identification marking with the calibration identification marking picture on the photomask 33.The calibration identification marking AM that is depicted on the belt T is the identification marking before the video picture, is commonly referred to as sub-image.That is, the exposure of calibration identification marking picture makes exposure place send and the photoresist various colors on the photoresist of belt T, thereby can discern as calibration identification marking AM.
At this, though as long as the quantity of calibration identification marking AM is consistent with the quantity of mask identification marking MM on being formed on photomask M, at the needs more than 2 at least on every side of 1 circuit pattern.Suppose, when forming 6 calibration identification marking AM, perhaps prepare the calibration identification marking again, perhaps make the conveying capacity of belt T be about half of 1 and all describe to calibrate identification marking AM for every time with photomask 33.
At this, as shown in Figure 2, calibration plotting unit 30 is configured in supply side the 2nd guide rolls 63 and the 1st and transmits between the roller 64.The enlarged drawing that has amplified calibration plotting unit 30 is illustrated on Fig. 3.At this, calibration plotting unit 30 can also be configured in the 1st and transmit between roller 64 and the exposure desk 50.
" 40 of calibrated cameras constitutes "
Calibrated cameras 40 shown in Figure 3 is made up of with pressing plate 42 photograph portion 41, makes the structure that can utilize calibrated cameras movable part 43 and pressing plate movable part 44 to move.In this embodiment, calibrated cameras 40 is arranged on 4 places, and subtend is configured in the Width of belt T.Calibrated cameras 40a and calibrated cameras 40b are arranged on the 1st and transmit roller 64 sides, and calibrated cameras 40c and calibrated cameras 40d are arranged on the 2nd and transmit roller 66 sides.For calibrated cameras movable part 43 and pressing plate movable part 44, describe in the back.
Calibrated cameras 40 detects the sub-image of the calibration identification marking AM that is formed by calibration plotting unit 30, and also detecting through projection optics is the projection image of the mask identification marking MM on every side of the 20 photomask M that form.Utilize a plurality of calibrated cameras 40 to detect calibration identification marking AM and mask identification marking MM, the photomask M shown in Fig. 1 is moved on the YZ plane based on its detection signal.Secondly, in the situation of calibration identification marking AM and mask identification marking MM coincidence, calibrated cameras 40 is kept out of the way from belt T.Afterwards, the open shutter (not shown) that covers the photomask M zone of mercury vapor lamp 10 light sources, the circuit pattern with photomask M is replicated on the belt T thus.
At this; When calibrating the situation that identification marking AM and mask identification marking MM stagger; Do not move photomask M; And utilize not shown exposure desk driving mechanism to make belt T move the position of adjusting belt T in Y direction, Z-direction and θ direction, a plurality of calibration identification marking AM and mask identification marking MM are overlapped.
< formation of calibrated cameras movable part 43, pressing plate movable part 44 and exposure desk 50 >
Fig. 4 transmits the planimetric map that roller 64 sides have been observed calibrated cameras 40a and calibrated cameras 40b from the 1st.At this, Fig. 4 has also represented the internal structure of photograph portion 41, so that understand the formation of calibrated cameras 40.Because calibrated cameras 40a has identical structure with calibrated cameras 40b, therefore following calibrated cameras 40a is described as representative.In addition, not shown calibrated cameras 40c and calibrated cameras 40d also have identical construction.
Pressing plate 42 is formed by the elastomeric element of laminated spring etc., and is bonded on the pressing plate support portion 45.In Fig. 5 A and Fig. 5 B and Fig. 6 A, Fig. 6 B and Fig. 6 C, pressing plate 42 is elaborated.
Calibrated cameras movable part 43 is bonded in the photograph portion 41, and has stepping motor 43M and driving motor 45M in inside.Can replace stepping motor 43M and use the drive unit that is easy to positioning control.In addition, can replace driving motor 45M and use the drive unit of cylinder etc.
Set inside at calibrated cameras movable part 43 has guide rail 43L.Thereby photograph portion 41 can move to Y direction (arrow 43ar direction) through the stepping motor 43M of rotary pressure plate movable part 44.Use stepping motor 43M to position easily according to the width of belt T.
Pressing plate support portion 45 is made up of turning axle, this turning axle support by for example not shown bearing etc., and on the leading section of pressing plate support portion 45, have the clamping part 45C of clamping pressing plate 42.The clamping part 45C of pressing plate support portion 45 makes the structure of changing easily according to the position (Y direction) of calibration identification marking AM.Pressing plate support portion 45 can be through being rotatably provided in pressing plate movable part 44 the motor 45M of inside move to X-direction (arrow 45ar direction).Pressing plate 42 can move on the position of regulation through pressing plate support portion 45 and apply suitable pressure to belt T.
Because calibrated cameras 40a can move freely along arrow 43ar direction; Therefore, also can photograph portion 41 and pressing plate 42 be moved on the position corresponding to the calibration identification marking AM of belt T width through changing setting value even variation has taken place for the width of belt T or the position (Y direction) of the calibration identification marking AM on the belt T.
Be formed with the adsorption hole 55 of vacuum suction belt T on the surface of exposure desk 50.On exposure desk 50, have the escape hole 56 of air, and utilize vacuum pump (not shown) to deflate to make that be formed on exposure desk 50 inner adsorption holes 55 is negative pressure, adsorbs belt T thus.
The belt T that the 1st transmission roller 64 and the 2nd transmits between the roller 66 becomes the state that has applied tension force through the 1st transmission roller 64 and the 2nd transmission roller 66 mutual tensions.There are differences on the stretching difficulty owing to be applied in central part and the end of Width of the belt T of tension force, so belt T produces and is out of shape.In addition, belt T also can cause distortion by being formed on metal film on the belt T etc.That is, near the end of belt T quilt exposure desk 50 starts as illustrated in fig. 4, and belt T observes from its long axis direction and is arc.Even arc belt T is attracted by the adsorption hole 55 of exposure desk 50, also only can adsorb belt T Width central part and the end is not easy to be adsorbed.Therefore, this belt of absorption T end is assisted in the end that utilizes pressing plate 42 to push belt T, and the whole width of belt T is attracted on the exposure desk 50.Belt T is in case by exposure desk 50 absorption, only otherwise stop to bleed of vacuum pump, also can not come off even remove the pressure belt T of pressing plate 42.
Be adsorbed on the lip-deep state of exposure desk 50 fully at belt T, utilize calibrated cameras 40 alignment light mask M and belt T, and with the circuit pattern exposure of photomask M on belt T.At this, because the surface of exposure desk 50 is vertical state on the Z direction, therefore if remove the vacuum suction of belt T, then belt T is broken away from from the surface of exposure desk 50 by the weight of self.
Shown in the left side calibrated cameras 40a of Fig. 4, utilize from the illumination light of Lighting Division 52 view window 42W calibration identification marking AM is thrown light on, thereby appear the sub-image of calibration identification marking AM in one's mind through pressing plate 42.On half-mirror, produces reflection through camera lens 51 and by 54 detections of photography portion from the reflected light AM1 of the sub-image that appears in one's mind.
On the other hand; Shown in the right side calibrated cameras 40b of Fig. 4; The incident light MM1 of mask identification marking MM injects from X-direction, and passes through the half-mirror 53 and camera lens 51 of calibrated cameras 40b, and the view window 42W through pressing plate 42 forms images on the surface of belt T again.The mask identification marking MM of imaging produces reflection through view window 42W and camera lens 51 and is detected by photography portion 54 on half-mirror 53.
In order to help to understand; In Fig. 4, make from the reflected light AM1 of sub-image and the incident light MM1 of mask identification marking MM to be injected into respectively among calibrated cameras 40a and the calibrated cameras 40b, but each photography portion 54 is observed from the reflected light AM1 of sub-image and the incident light MM1 of mask identification marking MM simultaneously.
Fig. 5 A makes pressing plate 42 be pressed into the side view of the assigned position of exposure desk 50.Fig. 5 B is the planimetric map of Fig. 5 A.
Pressing plate 42 is formed by the rubber-like metal material of laminated spring etc., exerts pressure with the mode of not damaging belt T, and under the state of exerting pressure, is deformed into the parallel in shape with belt T.In order not damage belt T, can carry out fluororesin processing or stick resin film in the belt T of pressing plate 42 side.Near pressing plate 42 front ends, be formed with view window 42W, can observe position observation mask identification marking MM and the calibration identification marking AM of belt T from view window 42W.Front end at pressing plate 42 is formed with bend 42R, plays the effect that prevents that belt T is impaired.
View window 42W is rounded shown in Fig. 5 B, and near the size that can enter into fully the center of view window 42W with calibration identification marking AM and mask identification marking MM in addition forms.View window 42W also forms with the intensity of not damaging pressing plate 42 and the mode of flexibility.
The central shaft of the center of view window 42W and camera lens 51 is unanimous on the whole.Though view window 42W is circular in Fig. 5 B, only otherwise infringement intensity and flexibility, also can be the polygon of quadrilateral etc.Though in this embodiment, represent to calibrate identification marking AM in addition with cruciform, represent mask identification marking MM with 4 quadrilaterals, also can use shapes such as circle and annulus.
Fig. 6 A is the planimetric map that the other pressing plate 42-1 with view window 42N is pressed into the assigned position of exposure desk 50.Fig. 6 B is the planimetric map that the pressing plate 42-2 that does not form hole or recess is pressed into the assigned position of exposure desk 50.Fig. 6 C is the planimetric map that the pressing plate 42-3 that length is short is pressed into the assigned position of exposure desk 50.
Shown in Fig. 6 A, pressing plate 42-1 has the view window 42N that begins to form recess from front end.Calibrated cameras 40 also can utilize this view window 42N that calibration identification marking AM etc. is observed.
In addition, the pressing plate 42-2 shown in Fig. 6 B is formed by the high resin plate of transmittance such as propylene or polycarbonate.Therefore, even on pressing plate 42-2, do not form hole or recess, calibrated cameras 40 also can be observed calibration identification marking AM etc. through pressing plate 42-2.That is, pressing plate 42-2 itself constitutes view window.
In addition, the length of the pressing plate 42-3 shown in Fig. 6 C is shorter, the feasible end that only can push belt T.Therefore, pressing plate 42-3 does not cover calibration identification marking AM etc.If the width of the various belt T that use is roughly constant, the pressing plate 42-3 of length that does not then cover calibration identification marking AM etc. is just very effective.
< action of calibrated cameras >
Below, the action to calibrated cameras 40 describes with reference to the process flow diagram of Fig. 7.As stated, calibrated cameras 40 is arranged on 2 places at least in this embodiment, but owing to all carry out identical action synchronously, therefore will calibrate camera 40a and describe as representative.
In step S1, transmit roller 64 and the 2nd transmission roller 66 rotation ormal weights through making the 1st, a slice belt T that is equivalent to circuit pattern that will be formed with calibration identification marking AM is sent on the exposure desk 50.
In step S2, pressing plate movable part 44 inner stepping motor 43M are rotated.Secondly, photograph portion 41 and pressing plate 42 are moved on the assigned position of exposure desk 50 sides.
In step S3, pressing plate movable part 44 inner driving motor 45M are rotated.Thus, pressing plate support portion 45 is near exposure desk 50 sides and move on the assigned position.The pressing plate 42 of pressing plate support portion 45 is pushed the end of belt T.The end of belt T is pressed against on the exposure desk 50, and the whole face of belt T is attracted on the exposure desk 50 thus.
In step S4, the vacuum pump of operation exposure desk 50 utilizes adsorption hole 55 absorption belt T.At this, because this moment, belt T was the state that is applied in tension force, so the end of belt T started, and observes from the long axis direction of belt T to be arc.Thereby, become the state of the middle section that has only adsorbed belt T.
In step S5, mask identification marking MM and calibration identification marking AM detect from the view window 42W of pressing plate 42 in the photography portion 54 of photograph portion 41.Because the center of view window 42W roughly overlaps with the central shaft of the camera lens 51 of calibration identification marking AM, therefore there is no need to utilize stepping motor 43M to move calibrated cameras 40 once more in order to observe mask identification marking MM and calibration identification marking AM.
In step S6, judge whether mask identification marking MM and the position of calibration identification marking AM stagger.At the situation continued execution in step S7 that does not stagger, revise the position of staggering at the situation execution in step S10 that staggers.
In step S7,44 inner stepping motor 43M and driving motor 45M keep out of the way calibrated cameras 40a and pressing plate 42 through retrograde rotation pressing plate movable part.Because in the end that step S4 center platen 42 has been pushed belt T, even if therefore pressing plate 42 is kept out of the way, the whole face of belt T also is adsorbed on the exposure desk 50.
In step S8, the shutter in open photomask M zone, the light beam of mercury vapor lamp 10 that has passed through the circuit pattern of photomask M thus forms images on the tram of belt T and duplicates.
In step S9, move not shown solenoid valve on the air outlet 56 (with reference to Fig. 4) be connected exposure desk 50 to atmosphere opening adsorption hole 55, belt T utilizes tension force to break away from from exposure desk 50 naturally thus.
In step S10, through move the position of staggering that photomask M revises mask identification marking MM and calibrates identification marking AM along Y direction, Z-direction and θ direction.Revised behind the position of staggering execution in step S6 once more.
Projection aligner can be according to the circuit pattern of the photomask M of the process flow diagram of Fig. 7 exposure a slice part, and can come through the step S1 that gets back to Fig. 7 once more a slice is down partly carried out exposure-processed.At this, wholely wear sub-T and be attracted on the exposure desk 50 if make in the end that step S4 center platen 42 is pushed belt T, then also can pressing plate 42 be left from belt T at retrograde rotation driving motor 45M before the execution in step S5.
(embodiment 2)
Fig. 8 representes the movable manner and embodiment 1 condition of different of calibrated cameras 40, and is to transmit the planimetric map that roller 64 sides are observed from the 1st with Fig. 4 identically.Because other formations of projection aligner 100 is identical with embodiment 1, so only the movable manner of calibrated cameras 40 is described.At this, calibrated cameras 40a is described as representative with embodiment 1 identically.
Because therefore the calibrated cameras 40a of this embodiment travelling shot simultaneously photo studio 41 and pressing plate 42 can reduce treatment process and number of components.
Photograph support portion 72 changes radius of turn through turning motor 72M; Even situation about changing has taken place, also can photograph portion 41 and pressing plate 42 be moved on the position corresponding to the calibration identification marking of belt T width through changing setting value at the width of belt T.In addition, photograph support portion 72 is bonded on the calibrated cameras rotating part 70, and to utilize motor (not shown) be that the center is rotated with the central shaft 71 of calibrated cameras rotating part 70 (axle parallel with the direction of transfer of belt T).
Make the central shaft 71 of adsorption plane and calibrated cameras rotating part 70 of the belt T on the exposure desk 50 consistent with horizontal H R, pressing plate 42 can vertically be exerted pressure to belt T thus.
The situation of the calibrated cameras of the action of the calibrated cameras of embodiment 2 and embodiment illustrated in fig. 71 is roughly the same.Especially step S3, the S7 of the process flow diagram of Fig. 7 are explained simply at this.
In the step S3 of the process flow diagram of Fig. 7, the driving of calibrated cameras rotating part 70 through motor is configured on the position of the calibrated cameras 40a shown in the solid line of Fig. 8.Photograph portion 41 is configured on the assigned position, can detect mask identification marking MM and calibration identification marking AM thus, and pressing plate 42 can be pushed belt T through rotational alignment camera rotating part 70 simultaneously.
In the step S7 of the process flow diagram of Fig. 7, the rotation of calibrated cameras rotating part 70 through motor is configured on the position of the calibrated cameras 40a shown in the dotted line of Fig. 8.The position that the position of the calibrated cameras 40a of dotted line has rotated 90 degree for the detection position from mask identification marking MM and calibration identification marking AM can be kept out of the way from the exposure range of the circuit pattern of photomask M.At this, though calibrated cameras rotating part 70 revolve and turn 90 degrees and make and keep out of the way action, also can Rotate 180 and keep out of the way.
On industry is utilized; The present invention is not limited to above-mentioned embodiment; Even if for example contact exposure (Contact Exposure) mode or closely connect the device of exposure (Proximity exposure) mode; Also can in its technological thought scope, carry out various transformations and change, the present invention also relates to the invention of these transformations and change.For example, though this exposure device 100 is obvious especially to the belt effect that does not form eyelet or calibration identification marking, to having calibration identification marking or the calibration situation with perforation, the situation of calibration identification marking of drawing other purposes at needs is also effective.
Though the calibrated cameras of in this embodiment, having used 40 at 4 places; Even but use calibrated cameras 40 also can detect calibration identification marking AM and mask identification marking MM at 2 places; But, be preferably in the detection that identification marking AM and mask identification marking MM are calibrated in many places along with the maximization of photomask M.
Claims (6)
1. exposure device, this exposure device will have being delivered on the exposure desk by the exposure body of film shape of Rack, and with the circuit pattern exposure of mask on by the exposure body, it is characterized in that having:
Push said by the pressing plate of exposure body;
Be used to observe be formed on said by exposure the 1st on body calibration identification marking and the image recognition portion that is formed on the calibration of the 2nd on said mask identification marking;
Make said pressing plate and said image recognition portion simultaneously to said the 1st moving part that is moved by the Rack direction of exposure body.
2. exposure device according to claim 1 is characterized in that,
Said pressing plate is pushed said by the exposure body, be pressed into said the 1st calibration identification marking position more in the inner part of ratio on the said Rack direction, and said pressing plate has the view window of observing said the 1st calibration identification marking and said the 2nd calibration identification marking.
3. exposure device according to claim 1 is characterized in that,
Said pressing plate is only pushed said the 1st calibration identification marking position more in the outer part of ratio on the said Rack direction.
4. according to the described exposure device of claim 1～3, it is characterized in that,
Said the 1st moving part has the 2nd moving part, and said the 2nd moving part makes said pressing plate along being moved by the exposure body direction of intersecting with said, so that said pressing plate touches is said by the body that makes public.
5. according to any described exposure device of claim 1 to 3, it is characterized in that,
It serves as that axle is rotated with said direction of transfer by the exposure body that said the 1st moving part makes said pressing plate and said image recognition portion.
6. exposure device according to claim 1 is characterized in that,
2 said image recognition portions are set at least.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008084251A JP5117243B2 (en) | 2008-03-27 | 2008-03-27 | Exposure equipment |
| JP2008-084251 | 2008-03-27 | ||
| JP2008084251 | 2008-03-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101546133A CN101546133A (en) | 2009-09-30 |
| CN101546133B true CN101546133B (en) | 2012-07-04 |
Family
ID=41193328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101182133A Active CN101546133B (en) | 2008-03-27 | 2009-02-25 | Exposure device and an exposure method |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5117243B2 (en) |
| CN (1) | CN101546133B (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101816327B1 (en) * | 2010-02-12 | 2018-01-08 | 가부시키가이샤 니콘 | Substrate processing device |
| US20120064460A1 (en) * | 2010-09-07 | 2012-03-15 | Nikon Corporation | Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method |
| JP5951044B2 (en) * | 2012-01-17 | 2016-07-13 | エーエスエムエル ネザーランズ ビー．ブイ． | Method for carrying in flexible substrate, device manufacturing method, apparatus for carrying in flexible substrate, and lithographic apparatus |
| CN102692831B (en) * | 2012-05-28 | 2014-03-26 | 京东方科技集团股份有限公司 | Counterpoint mark and method for using same to manufacture workpieces in exposure process |
| KR101600810B1 (en) * | 2014-05-12 | 2016-03-08 | 주식회사 옵티레이 | Roll to roll exposure device |
| DE202014011053U1 (en) * | 2014-08-05 | 2017-07-26 | Nanoscribe Gmbh | Lithography device for producing a structure |
| CN107608177B (en) * | 2017-10-22 | 2024-01-02 | 长春工业大学 | Device and method for manufacturing ultra-large area nano-imprinting seamless pattern |
| JP7441076B2 (en) * | 2020-03-03 | 2024-02-29 | 株式会社Ｓｃｒｅｅｎホールディングス | drawing device |
| JP7446687B2 (en) * | 2020-07-22 | 2024-03-11 | 株式会社オーク製作所 | direct exposure equipment |
| CN112777381B (en) * | 2020-12-21 | 2022-09-30 | 江苏迪盛智能科技有限公司 | Tailing identification method and device, electronic equipment and storage medium |
| CN112693947B (en) * | 2020-12-21 | 2022-09-27 | 江苏迪盛智能科技有限公司 | Drawing deviation processing method, device, electronic device and storage medium |
| CN113204176A (en) * | 2021-04-27 | 2021-08-03 | 合肥芯碁微电子装备股份有限公司 | Tool, detection system and method for detecting and debugging imaging light path of equipment |
| CN119165744B (en) * | 2024-04-29 | 2025-06-06 | 上海微电子装备（集团）股份有限公司 | Edge pressing device and photoetching equipment |
| CN119542241B (en) * | 2025-01-22 | 2025-05-16 | 上海微电子装备（集团）股份有限公司 | Workpiece stage assembly, semiconductor production equipment and method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0147807A2 (en) * | 1983-12-27 | 1985-07-10 | Rogers Corporation | Method for forming a substrate for tape automated bonding for electronic circuit elements |
| JP3049785B2 (en) * | 1991-02-13 | 2000-06-05 | 松下電器産業株式会社 | Bump shaping method |
| CN1932646A (en) * | 2005-09-14 | 2007-03-21 | 东海商事株式会社 | Exposure device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002368378A (en) * | 2001-06-04 | 2002-12-20 | Dainippon Screen Mfg Co Ltd | Board clamping device |
| JP3741013B2 (en) * | 2001-09-17 | 2006-02-01 | ウシオ電機株式会社 | Belt-shaped workpiece exposure device with meandering correction mechanism |
| JP4082104B2 (en) * | 2002-06-21 | 2008-04-30 | ウシオ電機株式会社 | Pattern inspection device |
| JP4407333B2 (en) * | 2004-03-23 | 2010-02-03 | ウシオ電機株式会社 | Strip workpiece exposure system |
| JP4479383B2 (en) * | 2004-07-05 | 2010-06-09 | ウシオ電機株式会社 | Pattern inspection device |
-
2008
- 2008-03-27 JP JP2008084251A patent/JP5117243B2/en active Active
-
2009
- 2009-02-25 CN CN2009101182133A patent/CN101546133B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0147807A2 (en) * | 1983-12-27 | 1985-07-10 | Rogers Corporation | Method for forming a substrate for tape automated bonding for electronic circuit elements |
| JP3049785B2 (en) * | 1991-02-13 | 2000-06-05 | 松下電器産業株式会社 | Bump shaping method |
| CN1932646A (en) * | 2005-09-14 | 2007-03-21 | 东海商事株式会社 | Exposure device |
Non-Patent Citations (2)
| Title |
|---|
| JP平2-176662A 1990.07.09 |
| JP特许第3049785号B2 2000.06.05 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009237334A (en) | 2009-10-15 |
| CN101546133A (en) | 2009-09-30 |
| JP5117243B2 (en) | 2013-01-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101546133B (en) | Exposure device and an exposure method | |
| CN101377624B (en) | Exposure device and exposure process | |
| TWI381252B (en) | A focal length adjustment method for an exposure apparatus of a belt-like workpiece and an exposure apparatus for a belt-like workpiece | |
| JP6927348B2 (en) | Pattern formation method | |
| CN101258448B (en) | Exposure apparatus | |
| US8451426B2 (en) | Exposure method and exposure apparatus | |
| CN103282832B (en) | Exposure device | |
| TWI481971B (en) | Exposure method and exposure apparatus | |
| JP5235061B2 (en) | Exposure equipment | |
| KR102352984B1 (en) | Direct exposure apparatus | |
| JP5645126B2 (en) | Exposure apparatus and exposure method | |
| KR101660918B1 (en) | Exposure device and photo mask | |
| EP0443106B1 (en) | Exposure apparatus | |
| CN107450276A (en) | Exposure device | |
| JP5499399B2 (en) | Exposure apparatus and exposure method | |
| TW201314384A (en) | Film exposure device | |
| JP2798158B2 (en) | Film exposure equipment | |
| JP2801685B2 (en) | Projection position adjustment method in exposure apparatus | |
| JP5499398B2 (en) | Exposure apparatus and exposure method | |
| JP2859433B2 (en) | Moving mechanism and exposure apparatus using this moving mechanism | |
| TWI548947B (en) | Exposure apparatus and photomask | |
| JP6460699B2 (en) | Direct exposure system | |
| JP2786945B2 (en) | Film exposure equipment | |
| JPH05152384A (en) | Focal point detection method of film exposure device | |
| JPH04121342A (en) | Sheet conveyer for copying machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |