CN101521197B - Three- or four-piezoelectric parallel-propelled stepper and its scanning probe microscope body - Google Patents

Abstract

The stepper with three or four piezoelectric bodies propelled in parallel and the scanning probe microscope body thereof of the present invention relate to a piezoelectric positioner, including three or four piezoelectric bodies, a base, a slider, and three or four piezoelectric bodies The bodies are arranged in a triangle or square and parallel to the expansion and contraction direction, fixedly standing on the base, and the sliders are set to slide and cooperate with the three or four piezoelectric bodies in the expansion and contraction direction. The positive pressure of the free end of the piezoelectric body and the sliding block, among the maximum static friction force produced by the three or four positive pressures on the sliding block, any one is smaller than the sum of the other two or three. The slider is pressed against the free end of each piezoelectric body by elastic force. Each piezoelectric body and the base can be integrally arranged, and a piezoelectric scanning tube fixed on the base is covered outside the stepper to form a scanning probe microscope mirror body that can work in a small space. The invention has the advantages of small size, simple and firm structure, large working temperature range and large driving force, is suitable for various extreme physical conditions, and is close to an ideal stepper.

Description

Three- or four-piezoelectric parallel-propelled stepper and its scanning probe microscope body

technical field

The invention relates to a piezoelectric stepper, in particular to a stepper propelled by three or four piezoelectric bodies in parallel and a mirror body of a scanning probe microscope made of the stepper, which belongs to the technical field of piezoelectric positioners.

Background technique

At the same time, it has nano-level positioning accuracy, millimeter-level large stroke, large working temperature range from ultra-low temperature to higher than room temperature, large driving force, small size, simple and firm structure and simple and reliable control. It is a coveted positioning tool for atomic/molecular manipulation and even subatomic structure imaging, especially in the field of nanoscience research under extreme physical conditions such as ultra-low temperature and ultra-strong magnetic field, it is even more inseparable from such an ideal positioning device. For example, ultra-low temperature conditions can generally only be obtained in a small space, and atomic imaging and manipulation under such conditions must use a miniature stepper with a large working temperature range to position the probe or sample. Another example: building a scanning tunneling microscope (scanning tunneling microscope, referred to as STM) in which the sample can be rotated at any angle relative to the direction of the magnetic field in a commercially available 52 mm aperture 20 tesla super magnet requires miniature, firm structure and A stepper with a large drive capacity, otherwise it is difficult to perform an omnidirectional (especially in the vertical direction where gravity needs to be overcome) probe-sample coarse approach in a small space. But the real ideal positioner has not yet appeared, which is why no one in the world has been able to manufacture an STM that can rotate the sample arbitrarily in a 52 mm aperture 20 Tesla super magnet. Although this STM is very important, it can reveal Important effect between the orientation of the magnetic field and the orientation of the sample lattice. The biggest difficulty in realizing the above-mentioned ideal positioner is that it is difficult to have both small size, simple and firm structure, high driving force and large working temperature range. For example: Although the inertial piezoelectric stepper is small in size, large in working temperature range and simple in structure, its structure is not firm and its driving force is small, making it difficult to drive heavy samples at any angle.

Another example: the inchworm stepper described in US Patent Nos. 3902084 and 3902085, the principle is: the left, middle and right piezoelectric bodies are connected in a straight line and a shaft passes through them. Under the action of respective signals, the left piezoelectric body first grips the shaft while the right piezoelectric body does not, and then the middle piezoelectric body stretches and pushes the left piezoelectric body together with its gripped shaft away from the right piezoelectric body , then the right piezoelectric body holds the shaft tightly while the left piezoelectric body does not, and then the middle piezoelectric body contracts to pull the left and right piezoelectric bodies closer together, and the shaft moves one step to the left relative to the middle piezoelectric body, and so on. Can step left. It is also possible to reversely push the shaft by changing the signal sequence of the piezoelectric body. The propulsion of the inchworm stepper depends on the piezoelectric body holding and not holding the shaft in turn, so it cannot work in a large temperature range, because the thermal expansion and contraction of the shaft and the piezoelectric body do not match and the expansion and contraction range of the piezoelectric body It is only on the order of microns, so that the piezoelectric body will slip due to too small grip force or be broken due to too large grip force when the temperature difference is large. In addition, the in-line arrangement of the tri-piezoelectric body also increases its size, which is very unfavorable for applications under extreme conditions and weak signals.

The shearing piezoelectric stepper described in International Patent No. WO 93/19494 can solve the defect of the narrow working temperature range of the inchworm stepper. Clamp. If a certain shear piezoelectric body is passed through a signal to generate tangential deformation, its contact surface on the object to be moved will slide tangentially, but it will not move the object to be moved, because the friction force generated by a single piezoelectric body Not enough to overcome the total friction force of the remaining piezoelectric bodies. Therefore, all the shearing piezoelectric bodies can be slid away from the original contact points one by one in the same direction, while the object to be moved remains in its original position. When the signals on all the shear piezoelectric bodies are canceled at the same time (deformation restoration), the frictional force in the same direction (deformation restoration direction) will be generated on the object to be moved, making it move one step in this direction. Reciprocating like this can allow the object to be moved to step. Since the shearing piezoelectric body clamps the object to be moved by the elastic force with a long range of action instead of directly clamping it with stress, it will not produce too large or too small gap between the piezoelectric body and the clamped object when the temperature difference is large. Clamping force, the piezoelectric body will not shatter. However, the shear piezoelectric stepper also has major defects: each piezoelectric body is separated, which is not conducive to integration and small space applications; the tangential driving force of the shear piezoelectric material is generally small, and it is difficult to produce a large displacement. force.

The present invention will propose an ideal positioner, which can solve the above-mentioned defects, and can realize the STM which can rotate the sample arbitrarily in a small space.

Contents of the invention

In order to solve the problem that the existing nano-precision steppers cannot have small size, simple and firm structure, large driving force and large working temperature range at the same time, a stepper with three or four piezoelectric bodies propelled in parallel and a stepper made of it are provided. Scanning probe microscope body capable of working in small spaces.

The technical scheme that the present invention realizes above-mentioned purpose is:

The present invention is a stepper that is propelled by three piezoelectric bodies in parallel. Its structural feature is that it includes three piezoelectric bodies, a base, and a slider. It is characterized in that the three piezoelectric bodies are arranged in a triangle and stretching Set in parallel and stand fixedly on the base, set a slider that is slidingly matched with the three piezoelectric bodies in the telescopic direction, and set the free ends of the three piezoelectric bodies with the telescopic direction perpendicular to the three piezoelectric bodies. The normal pressure of the sliding blocks, among the maximum static friction forces generated by the three positive pressures on the slider, the maximum static friction force of any one is smaller than the sum of the other two maximum static friction forces.

The structural characteristics of the stepper propelled by the three piezoelectric bodies in parallel in the present invention also lie in:

The slider presses the free ends of the three piezoelectric bodies through the elasticity of the slider itself and/or the elasticity of the three piezoelectric bodies and/or the addition of elastic bodies.

The three piezoelectric bodies are all in the shape of a one-third circular tube cut along the axial direction of the tube, and they are surrounded by a circular tube and fixed on the circular base to form a three-tube piezoelectric body structure. .

The three piezoelectric bodies are set as a whole, or the three piezoelectric bodies and the base are set as a whole.

A force transmission block fixed on the free end of the piezoelectric body is added between the free end of each piezoelectric body and the slider, and the force transmission block generates the positive pressure on the slider.

The technical solution adopted by the scanning probe microscope mirror body made of the stepper propelled by the three piezoelectric bodies in parallel in the present invention is: comprising a piezoelectric scanning tube and a stepper propelled by the three piezoelectric bodies in parallel, The piezoelectric scanning tube is either sleeved outside the stepper or placed inside it, and one end of the piezoelectric scanning tube is fixedly standing on the base of the stepper.

The present invention is a stepper with four piezoelectric bodies propelled in parallel. Its structural feature is that it includes four piezoelectric bodies, a base, and a slider. The parallel arrangement is fixed on the base, the slider is set to slide and cooperate with the four piezoelectric bodies in the telescopic direction, and the free ends of the four piezoelectric bodies or The normal pressure of the force transmission block fixed on the free ends of the four piezoelectric bodies and the slider. Among the maximum static friction forces generated by the four positive pressures on the slider, the maximum static friction force of any one is smaller than that of the other three maximum static friction forces. and.

The structural characteristics of the stepper that the four piezoelectric bodies of the present invention advance in parallel also lie in:

The slider presses against the free ends of the four piezoelectric bodies through the elasticity of the slider itself and/or the elasticity of the four piezoelectric bodies and/or the addition of elastic bodies.

The four piezoelectric bodies are all in the shape of a quarter tube cut along the axial direction of the tube, and they are surrounded into a tube shape and fixedly standing on the circular base, forming a structure of four piezoelectric bodies in the tube .

The four piezoelectric bodies are set as a whole, or the four piezoelectric bodies and the base are set as a whole.

The working principle of the stepper propelled by three piezoelectric bodies in parallel in the present invention is:

When working, the initial state can be set as the contraction state of the three piezoelectric bodies. Then, the three piezoelectric bodies elongate at the same time, which will drive the slider to move along the elongation direction of the three piezoelectric bodies, because at this time, the static friction forces generated by the free ends of the three piezoelectric bodies on the slider are in the same direction. Move the slider to the elongation direction of the three piezoelectric bodies. The slider moves one step relative to the base, but there is no sliding relative to the free ends of the three piezoelectric bodies. The maximum thrust is the sum of the maximum static friction generated by the free ends of the three piezoelectric bodies on the slider, so the thrust (driving force) is very large.

Then, one of the three piezoelectric bodies shrinks (deformation reduction), and the other two remain in the elongated state. At this time, the free end of the contracted piezoelectric body will slide on the slider, and the other two piezoelectric bodies will slide on the slider. Neither the free end nor the base moves relative to the slider, because the maximum static friction force generated by the free end of the shrinking piezoelectric body on the slider is smaller than the sum of the maximum static friction forces generated by the free ends of the other two piezoelectric bodies on the slider. Shrinking the piezo restores the original contracted state without moving the slider relative to the base. Then, the two piezoelectric bodies that are still in the stretched state contract one by one. Similarly, they can also return to the original contracted state without moving the slider relative to the base. So far, the slider has stepped one step relative to the base, and the three piezoelectric bodies have all returned to their original contracted state. Repeating the above steps can make the slider step by step relative to the base along the elongation direction of the three piezoelectric bodies.

In the same way, if the above-mentioned three piezoelectric bodies whose initial states are all contracted are repeated in the order of: one elongation-the other elongation-the third elongation-simultaneous contraction, the slider can be moved relative to the base Step by step along the shrinking direction of the three piezoelectric bodies.

The above-mentioned positive pressure for pressing the slider against the free ends of the three piezoelectric bodies can be realized by the elastic body. These elastic bodies can be fixed to one of the above-mentioned pressing two sides, or not fixed to both sides, or simply be a part of the slider, or simply be the elasticity of the piezoelectric body itself.

The above three piezoelectric bodies can be different parts of a complete piezoelectric body, and the three piezoelectric bodies can also be different parts of a complete piezoelectric body with the four bases, as long as the expansion and contraction of the three piezoelectric bodies are independently controllable That's it.

The above-mentioned three piezoelectric bodies can all be in the shape of a third circular tube cut along the axial direction of the circular tube. They are enclosed and fixed to stand on the ring-shaped base to form a three-piezoelectric structure of the circular tube, and the slider is a circular tube. The tube or cylindrical shape is placed inside the three-piezoelectric body structure of the round tube, or the slide block is set in the shape of a round tube outside the three-piezoelectric body structure of the round tube.

A force transmission block fixed on the free end of the piezoelectric body can be added between the free end of each piezoelectric body and the slider among the three piezoelectric bodies, and the force transmission block can generate the positive pressure on the slider. The function of the force transmission block is: (1) to transmit the positive pressure to the slide bar to avoid the piezoelectric body directly rubbing against the slide bar and causing damage to the piezoelectric body (2) to make the positive pressure transmitted to the slide bar not follow the movement of the slide bar While variation (3) defines the area of action of said positive pressure (4) changes the coefficient of friction on the slide bar.

An important benefit of the stepper propelled by the three piezoelectric bodies in parallel is: if the three piezoelectric bodies are selected to be identical and arranged in an equilateral triangle on the base (especially if the three piezoelectric bodies are of the same piezoelectric body). When the electric tube is cut out in three equal parts along the axial direction), and the slider is also three-degree symmetric, the three positive pressures generated by the three piezoelectric bodies on the slider and the resulting three maximum static friction are equivalent, which Not only the condition that "any maximum static friction force is less than the sum of the other two" is automatically satisfied, but also the situation that can generate the maximum thrust.

The stepper that the above-mentioned three piezoelectric bodies advance in parallel can be made into a scanning probe microscope mirror body: a piezoelectric scanning tube is added, and the piezoelectric scanning tube is either sleeved outside the stepper or placed inside it to form an embedded One end of the piezoelectric scanning tube is fixedly standing on the base of the stepper. In this way, if the probe and the sample are respectively fixed on the free end of the piezoelectric scanning tube and the slider of the stepper (the sample and the probe can be adjusted) and the probe points to the surface of the sample, the stepper can realize The rough approach between the probe and the sample, and the piezoelectric scanning tube can realize the scanning imaging between the probe and the sample. Fixing the base or the outer wall of the nested structure on a unidirectional or universal rotating wheel can realize a scanning probe microscope capable of rotating a sample at any angle relative to an external magnetic field.

The working principle of the stepper with four piezoelectric body parallel propulsion of the present invention is:

Similar to the above-mentioned stepper with three piezoelectric bodies propelled in parallel, when working, the above-mentioned four piezoelectric bodies, which are all contracted in the initial state, are extended at the same time, which will drive the slider to move along the elongation direction of the four piezoelectric bodies , and the thrust is very large, which is the sum of the static friction forces of the four piezoelectric bodies. The slider does not slide relative to the free ends of the four piezoelectric bodies, but it takes a step relative to the base. Then, one of the four piezoelectric bodies shrinks, and the other three remain in an extended state. At this time, the free end of the contracted piezoelectric body will slide on the slider, while the free ends of the other three piezoelectric bodies and the base The seat does not move relative to the slider, because the maximum static friction force generated by the free end of the contracting piezoelectric body on the slider is less than the sum of the maximum static friction forces generated by the free ends of the other three piezoelectric bodies on the slider, the contracting piezoelectric body is restored The initial retracted state without moving the slider relative to the base. Then, the three piezoelectric bodies that are still in the stretched state contract one by one. Similarly, they can also return to the initial contracted state without moving the slider relative to the base. So far, the slider has made a step relative to the base, and the four piezoelectric bodies have all returned to the original contracted state. Repeating the above steps can make the slider step by step relative to the base along the elongation direction of the four piezoelectric bodies. In the same way, if the above-mentioned four piezoelectric bodies whose initial states are all contracted are repeated in the order of: one elongation-the other elongation-the third elongation-the fourth elongation-simultaneous contraction, the sliding The block is stepped relative to the base step by step in the contraction direction of the four piezoelectric bodies.

The above-mentioned positive pressure for pressing the slider against the free ends of the four piezoelectric bodies can be realized by the elastic body. These elastic bodies can be fixed to one of the above-mentioned pressing two sides, or not fixed to both sides, or simply be a part of the slider, or simply be the elasticity of the piezoelectric body itself.

The above four piezoelectric bodies can be different parts of a complete piezoelectric body, and the four piezoelectric bodies can also be different parts of a complete piezoelectric body with the five bases, as long as the expansion and contraction of the four piezoelectric bodies are independently controllable That's it.

The above four piezoelectric bodies can all be in the shape of a quarter tube cut along the axial direction of the tube. They are enclosed and fixed to stand on the annular base to form a structure of four piezoelectric bodies in a tube. The slider is a tube. Shaped or cylindrical placed inside the circular tube four piezoelectric body structure, or the slider is a circular tube shape set outside the circular tube four piezoelectric body structure.

A force transmission block fixed on the free end of the piezoelectric body can be added between the free end of each piezoelectric body and the slider among the above four piezoelectric bodies, and the force transmission block can generate the positive pressure on the slider.

Although the above-mentioned stepper with four piezoelectric bodies propelled in parallel has one more piezoelectric body than the stepper with three piezoelectric bodies in parallel, the stepper with four piezoelectric bodies in parallel can not only have the stepping function, but also have Scan imaging function. For example: cut the piezoelectric scanning tube fixedly standing on the base from its free end along the gap of the four electrodes, but not completely cut the scanning tube. When scanning, apply voltages with opposite polarities to the two opposite electrodes of the uncut part of the scanning tube, so that one of the two electrodes can be extended and the other can be shortened. The overall effect is to make the scanning tube tilt to one side to obtain the scanning effect. Applying a voltage of opposite polarity to another pair of opposite electrodes can cause the scan tube to scan in the other direction.

According to above-mentioned principle as can be seen, compared with prior art, beneficial effect of the present invention is embodied in:

(1) At the same time, it has the following important properties:

(a) Small size: The piezoelectric body is arranged in parallel, which is greatly reduced in size compared with the design of head-to-tail serial connection, and the length of the stepper can be less than 30 mm, so that it can be placed in a commercial standard 52 mm aperture 20 Tesla ultra- In a strong magnet, a scanning probe microscope is made to rotate the sample at any angle of 20 tesla.

(b) The structure is simple and firm: All piezoelectric bodies clamp the slider at the same time. Other circuits and components of the device will cause greater interference. In particular, the four-piezoelectric stepper can have both a stepping function and a scanning imaging function.

(c) Large working temperature range: Since the positive pressure from the piezoelectric body acting on the slider is a long-range elastic force, the mismatch between thermal expansion and contraction will not produce significant changes in each positive pressure, The stepping condition can still be satisfied when the temperature changes greatly, and the requirements for machining accuracy are not high. This enables the invention to work in a super-large temperature range from ultra-low temperature to higher than room temperature, and is especially suitable for applications in variable temperature and extremely low temperature conditions.

(d) Large driving force: The driving force comes from the cooperation of the stretching stress of the piezoelectric body and the frictional force. Because the expansion and contraction stress of the piezoelectric body can be made larger, if a stacked piezoelectric body (piezo stack) is used, its driving force can be as high as a ton level, so the driving force can be much greater than that of the angular deformation (shear piezoelectric body) propelled shear piezoelectric stepper or inertial force propelled inertial piezoelectric stepper.

(e) Nano-level positioning accuracy: It has nano-level positioning accuracy because it is piezoelectric positioning.

(f) Millimeter-level large stroke: It has a millimeter-level large stroke because it can repeat stepping.

(2) A scanning probe microscope that can rotate the sample arbitrarily in a small space: because of its small size, it is firm (can be inverted), has a large driving force (can lift the sample vertically), and has a large working temperature range (can work at ultra-low temperature) .

(3) The cost is greatly reduced: because the structure and control are simple.

(4) close to ideal stepper: because of above-mentioned advantage, the present invention has just been very close to ideal stepper.

Description of drawings

Fig. 1 is a schematic diagram of the structure of a stepper for parallel propulsion of the basic type of three piezoelectric bodies of the present invention.

Fig. 2 is a structural schematic diagram of a stepper for parallel propulsion of integral tri-piezoelectric bodies of the present invention.

Fig. 3 is a schematic diagram of the structure of a stepper for parallel propulsion of three tubular piezoelectric bodies according to the present invention.

Fig. 4 is a structural schematic diagram of a stepper in which three piezoelectric bodies of a circular tubular slider are propelled in parallel according to the present invention.

Fig. 5 is a schematic diagram of the structure of a scanning probe microscope mirror body made of a stepper that advances three piezoelectric bodies in parallel according to the present invention.

Fig. 6 is a schematic diagram of the structure of a basic four-piezoelectric parallel-propelled stepper of the present invention.

Fig. 7 is a schematic diagram of a circular tube four piezoelectric body structure, one of the components of the present invention.

Fig. 8 is a schematic diagram of the structure of a stepper in which four piezoelectric bodies in the form of an integral circular tube are propelled in parallel according to the present invention.

Labels in the figure: 1 slider, 2 base, 3 piezoelectric body 1, 3a positive pressure generated by the free end of piezoelectric body 1 on the slider, 3b expansion and contraction direction of piezoelectric body 1, 4 piezoelectric body 2, 4a The positive pressure generated by the free end of piezoelectric body 2 on the slider, 4b the expansion and contraction direction of piezoelectric body 2, 5 piezoelectric body 3, 5a the positive pressure generated by the free end of piezoelectric body 3 on the slider, 5b piezoelectric body Three expansion and contraction directions, six force transmission blocks, seven tubular piezoelectric body slits, eight slider incisions, nine piezoelectric tube electrode gaps, ten piezoelectric body four, and eleven piezoelectric scanning tubes.

The present invention will be further described below through specific embodiments and structural drawings.

Detailed ways

Embodiment 1: Stepper with parallel propulsion of basic three piezoelectric bodies

Referring to Figure 1, the basic stepper with three piezoelectric bodies propelled in parallel includes a slider 1, a base 2 and three piezoelectric bodies: piezoelectric body 1 3, piezoelectric body 2 4 and piezoelectric body 3 5, It is characterized in that the three piezoelectric bodies 3, 4 and 5 are fixedly standing on the base 2 in a triangular arrangement and parallel to the expansion and contraction directions 3b, 4b and 5b, and are arranged with the three piezoelectric bodies 3, 4 and 5 In the telescopic direction, the slide block 1 is slidingly fitted, and the three piezoelectric bodies 3, 4, and 5 are vertically arranged in the telescopic direction to press the free ends of the three piezoelectric bodies 3, 4, and 5 against the slide block 1. The positive pressures 3a, 4a and 5a, among the maximum static friction forces generated by the three positive pressures 3a, 4a and 5a on the slider 1, any one of the maximum static friction forces is smaller than the sum of the other two maximum static friction forces.

When working, the above-mentioned three piezoelectric bodies 3, 4 and 5 whose initial state is set to be contracted are extended at the same time. At this time, the static friction force generated by the free ends of the three piezoelectric bodies 3, 4 and 5 on the slider 1 All move the slider 1 to the elongation direction of the three piezoelectric bodies 3, 4 and 5. Slider 1 has stepped one step relative to base 2 , but there is no sliding relative to the free ends of the three piezoelectric bodies 3 , 4 and 5 . Then, the first piezoelectric body 3 contracts, and the second piezoelectric body 4 and the third piezoelectric body 5 maintain the stretched state. At this time, the free end of the contracting piezoelectric body 1 will slide on the slider 1, and the free ends of the piezoelectric body 2 4 and piezoelectric body 3 5 will not slide on the slider 1, because the contracting piezoelectric body 1 3 is free The maximum static friction force generated by the end to the slider is less than the sum of the maximum static friction forces generated by the free ends of the piezoelectric body 2 4 and the piezoelectric body 3 5 on the slider 1, and the shrinking piezoelectric body 3 returns to the original shrinkage state and Slider 1 is not moved relative to base 2 . Then, the piezoelectric body 2 4 and the piezoelectric body 3 5 that are still in the stretched state contract one by one. Similarly, they can also return to the original contracted state without moving the slider 1 relative to the base 2 . So far, the slider 1 has made a step relative to the base 2, and the three piezoelectric bodies 3, 4 and 5 have all returned to the original contracted state. Repeating the above steps can make the slider 1 step by step relative to the base 2 along the elongation directions of the three piezoelectric bodies.

In the same way, if the above-mentioned three piezoelectric bodies whose initial states are all in the contracted state follow: piezoelectric body one 3 elongates, then piezoelectric body two 4 elongates, then piezoelectric body three 5 elongates, and then three piezoelectric bodies Repeat the sequence that the piezoelectric body shrinks at the same time, so that the slider 1 can step by step along the contraction directions of the three piezoelectric bodies relative to the base 2 .

The above working principle reveals that the present invention has the following positive effects: (1) small size: because the three piezoelectric bodies are arranged in parallel, the design size is greatly reduced compared with the design size of the head-to-tail serial connection; (2) the structure is simple and firm: all piezoelectric bodies The body clamps the slider at the same time, which is a very simple and firm structure, which is not easily disturbed by external vibrations, and the control is also very simple, which can not only improve the stability of its work, but also not cause great interference to other circuits and components around it; (3) Large working temperature range: Since the positive pressure from the piezoelectric body acting on the slider is a long-range elastic force, the mismatch between thermal expansion and contraction will not produce significant changes in each positive pressure. The requirements for machining accuracy are not high. (4) Large driving force: The driving force comes from the cooperation of the piezoelectric stress and frictional force. Because the stretching stress of the piezoelectric body can be made larger, if a stacked piezoelectric body (piezo stack) is used, the driving force can be as high as a ton level.

Embodiment 2: A stepper for parallel propulsion of elastic tri-piezoelectric bodies

In Embodiment 1, the positive pressures 3a, 4a and 5a that press the slider 1 and the free ends of the three piezoelectric bodies 3, 4 and 5 can be passed through the elasticity of the slider 1 itself (for example, cut in Figure 4). tubular slider) and/or the elasticity of the three piezoelectric bodies 3, 4 and 5 themselves and/or adding an elastic body (for example, placing a spring in the cut tubular slider in accompanying drawing 4) to achieve .

Embodiment 3: A stepper for parallel propulsion of integral type three piezoelectric bodies

The three piezoelectric bodies 3, 4 and 5 in the above embodiment can be different parts of a complete piezoelectric body, and the three piezoelectric bodies 3, 4 and 5 can also form a complete piezoelectric body with the base 2. Different parts of the electric body can be realized by dividing the electrodes and cutting the piezoelectric body, as long as the expansion and contraction of the three piezoelectric bodies 3, 4 and 5 are independently controllable. For example, the outer electrode of a complete cylindrical piezoelectric tube is divided into three third cylindrical electrodes along the axial direction, and then the piezoelectric tube is cut along the gap between the three electrodes but not completely cut, so that the piezoelectric tube The three cut-out parts of the electric tube constitute the three piezoelectric bodies 3 , 4 and 5 , while the uncut part can be regarded as the base 2 , see FIG. 2 .

Embodiment 4: A stepper for parallel advancement of circular tube-shaped three piezoelectric bodies

The three piezoelectric bodies 3, 4 and 5 in the above-mentioned embodiment are all in the shape of a third circular tube cut along the axial direction of the cylindrical piezoelectric body, and they surround a circular tube shape and stand fixedly on the annular base 2, forming a circular tube three piezoelectric body structure, as shown in Figure 3, a tubular piezoelectric body slit 7 is formed at the section.

Embodiment 5: A stepper in which three piezoelectric bodies of a circular tube or a cylindrical slider advance in parallel

In the above-mentioned embodiment 4, the slider 1 is placed in the three-piezoelectric body structure of the circular tube, the slider 1 is a circular tube or a cylinder, and one end thereof is cut into the other end along its axis direction to form a slider notch 8 , but not completely cut, the cut end produces elastic sheets (see Figure 4), and the outer wall of the elastic sheet is pressed against the inner sides of the three piezoelectric bodies 3, 4 and 5 free ends of the three piezoelectric body structures of the circular tube with elastic force.

If the three piezoelectric bodies 3, 4 and 5 are cut out from the same piezoelectric tube in three equal parts along the axial direction and the slider 1 is also three-degree symmetric, then the three piezoelectric bodies produce three positive forces on the slider 1. Pressure and the resulting three maximum static friction equivalents, which not only automatically satisfy the condition of "any maximum static friction is less than the sum of the other two", but also the situation that can generate the maximum thrust.

Embodiment 6: A stepper for parallel advancement of three piezoelectric bodies of the slider casing type

In the above-mentioned embodiment 4, the slider 1 is set outside the three-piezoelectric structure of the circular tube. The slider 1 is in the shape of a circular tube, and one end of it is cut into the other end along the axis direction to form a slider cutout 8, but Incompletely cut, the cut end produces an elastic sheet (see Figure 4), and the inner wall of the elastic sheet presses against the outside of the free ends of the three piezoelectric bodies 3, 4 and 5 of the circular tube three piezoelectric body structure with elastic force.

Embodiment 7: Stepper with parallel propulsion of force-transmitting block type tri-piezoelectric bodies

In the above-mentioned embodiments 1 to 6, a force transmission block 6 fixed on the free end of the piezoelectric body is added between the free end of each piezoelectric body and the slider 1 (see Fig. 2 and Fig. 3 ) Slider 1 generates said positive pressure. The function of the force transmission block 6 is: (1) to transmit the positive pressure to the slide bar 1 to prevent the piezoelectric body from directly rubbing against the slide bar 1 and causing damage to the piezoelectric body (2) to make the positive pressure transmitted to the slide bar 1 not follow The walking of the slider 1 changes (3) defines the acting area of the positive pressure (4) changes the coefficient of friction on the slider 1 .

Example 8: A scanning probe microscope mirror body made of a stepper propelled by three piezoelectric bodies in parallel

The steppers in which the three piezoelectric bodies in the above-mentioned embodiments 1 to 7 are advanced in parallel can be made into a scanning probe microscope mirror body, as shown in Fig. 5: a piezoelectric scanning tube 11 is added, and the piezoelectric scanning tube 11 may be placed on the The three piezoelectric bodies propelled in parallel outside or inside the stepper to form a nested structure, and one end of the piezoelectric scanning tube 11 stands fixedly on the base 2 . In this way, if the free end of the piezoelectric scanning tube 11 and the slide block 1 of the stepper respectively fix the probe and the sample (the sample and the probe can be reversed) and the probe points to the sample surface, the stepper will The rough approach between the probe and the sample can be realized, and the piezoelectric scanning tube 11 can realize the scanning imaging between the probe and the sample, and the working space of the scanning probe microscope can be small. Fixing the base 2 or the outer wall of the nested structure on a unidirectional or universal rotating wheel can realize a scanning probe microscope capable of rotating samples at any angle relative to an external magnetic field.

Embodiment 9: Basic four-piezoelectric body parallel-propelled stepper

Referring to Fig. 6, the four piezoelectric bodies 3, 4, 5 and 10 are arranged in a square and parallel to the expansion and contraction direction, and are fixedly standing on the base 2, and the four piezoelectric bodies 3, 4, 5 and 10 are arranged to be stretched and extended. The sliding block 1 in the direction is a sliding fit, and the free ends of the four piezoelectric bodies 3, 4, 5 and 10 or the force transmission device fixed to the free ends of the four piezoelectric bodies are set in the direction perpendicular to the expansion and contraction direction of the four piezoelectric bodies. The positive pressures 3a, 4a, 5a and 10a that press the block and the slider 1, among the maximum static friction forces generated by these four positive pressures on the slider 1, any one of the maximum static friction forces is smaller than the sum of the other three maximum static friction forces. The working principle of the basic parallel-propelled stepper with four piezoelectric bodies in this embodiment can be compared to the working principle of the parallel-propelled stepper with three piezoelectric bodies in Embodiment 1.

Embodiment 10: A stepper with parallel propulsion of four piezoelectric bodies in the shape of a circular tube

The four piezoelectric bodies 3, 4, 5, and 10 in the above-mentioned embodiment 9 are all in the shape of a quarter tube cut along the axial direction of the tube-shaped piezoelectric body, and they surround a round tube shape and stand fixedly on the On the ring-shaped base 2, a circular tube with four piezoelectric structures is formed (see FIG. 7).

Embodiment 11: A stepper with parallel advancement of four piezoelectric bodies of a circular tube or a cylindrical slider

In the above-mentioned embodiment 10, the slider 1 is placed in the four-piezoelectric body structure of the circular tube, the slider 1 is a circular tube or a cylinder, and one end of it is cut into the other end along its axis direction to form a slider cutout 8 , but not completely cut, the cut end produces four pieces of elastic body, and the outer wall of each piece is pressed against the inner side of the free ends of the four piezoelectric bodies 3, 4, 5 and 10 of the four piezoelectric body structure of the circular tube with elastic force.

Embodiment 12: A stepper with four piezoelectric bodies propelled in parallel of the slider sleeve type

In the above-mentioned embodiment 10, the slider 1 is set outside the structure of the four piezoelectric bodies of the circular tube. The slider 1 is in the shape of a circular tube, and one end of the slider is cut into the other end along the axis direction to form a slider cutout 8, but Incomplete cutting, four pieces of elastic body are produced at the cut end, and the inner wall of each piece is pressed against the outside of the free ends of the four piezoelectric bodies 3, 4, 5 and 10 of the circular tube four piezoelectric body structure.

Embodiment 13: A stepper with elastic four piezoelectric bodies propelled in parallel

In Embodiments 9 to 12, the positive pressure to press the slider 1 against the free ends of the four piezoelectric bodies 3, 4, 5 and 10 can be achieved by the elasticity of the slider 1 itself and/or the four piezoelectric bodies 3 , 4, 5 and 10 of the elasticity and / or the addition of elastic body to achieve.

Embodiment 14: Stepper with parallel propulsion of integral four piezoelectric bodies

The four piezoelectric bodies 3, 4, 5 and 10 in the above-mentioned embodiments 9 to 13 are different parts of a complete piezoelectric body, which can be realized by dividing electrodes and cutting piezoelectric bodies, as long as the four piezoelectric bodies 3, The expansion and contraction of 4, 5 and 10 can be controlled independently. For example, the outer electrode of a complete cylindrical piezoelectric tube is divided into four quarter-shaped tubular electrodes in the axial direction to form the piezoelectric tube electrode gap 9, and then the piezoelectric tube is cut along the gaps between the four electrodes. Not completely cut, so that the four cut parts of the piezoelectric tube constitute the four piezoelectric bodies 3, 4, 5 and 10, and the uncut part can be regarded as the base 2, see FIG. 8 .

Embodiment 15: Parallel propulsion of piezoelectric stepper with four piezoelectric bodies of force transmission block

In the above-mentioned embodiments 9 to 14, a force transmission block 6 fixed on the free end of the piezoelectric body is added between the free end of each piezoelectric body and the slider 1, and the force transmission block 6 is used to generate the positive pressure on the slider 1 .

Claims (10)

1. A stepper with three piezoelectric bodies propelled in parallel, comprising three piezoelectric bodies, a base, and a slide block, characterized in that the three piezoelectric bodies are arranged in a triangle and parallel to the stretching direction and fixedly stand On the base, a slider that is slidingly matched with the three piezoelectric bodies in the direction of expansion and contraction is provided. Positive pressure, among the maximum static friction forces generated by the three positive pressures on the slider, any one of the maximum static friction forces is less than the sum of the other two maximum static friction forces. 2. According to claim 1, the stepper propelled by three piezoelectric bodies in parallel is characterized in that the slider uses the elasticity of the slider itself and/or the elasticity of the three piezoelectric bodies and/or the addition of elastic bodies and the three piezoelectric bodies. The free ends of a piezoelectric body are pressed against each other. 3. The stepper propelled by three piezoelectric bodies in parallel according to claim 1, characterized in that the three piezoelectric bodies are all in the shape of a third circular tube cut along the axial direction of the circular tube, and they are enclosed into a A circular tube-shaped fixed station is placed on the circular base to form a circular tube three-piezoelectric body structure. 4. The stepper with three piezoelectric bodies propelled in parallel according to claim 1, characterized in that the three piezoelectric bodies are integrally arranged, or the three piezoelectric bodies and the base are integrally arranged. 5. According to claim 1 or 2 or 3 or 4 described three piezoelectric body parallel propelling steppers, it is characterized in that between the free end of each piezoelectric body and the slider, a transmission device fixed at the free end of the piezoelectric body is added. The force block generates the positive pressure on the slide block with the force transmission block. 6. A scanning probe microscope mirror body made of a stepper propelled by the three piezoelectric bodies in parallel according to claim 1, characterized in that it comprises a piezoelectric scanning tube and a stepper propelled by the three piezoelectric bodies in parallel , the piezoelectric scanning tube is either sleeved outside the stepper or placed inside it, and one end of the piezoelectric scanning tube is fixedly standing on the base of the stepper. 7. A stepper with four piezoelectric bodies propelled in parallel, comprising four piezoelectric bodies, a base, and a slider, characterized in that the four piezoelectric bodies are arranged in a square and fixedly standing in parallel with stretching directions On the base, set a slide block that is slidingly matched with the four piezoelectric bodies in the direction of expansion and contraction, and set the free ends of the four piezoelectric bodies or fix them on the four piezoelectric bodies in the direction perpendicular to the expansion and contraction direction of the four piezoelectric bodies. The positive pressure of the force transmission block at the free end of the electric body and the slider, among the maximum static friction forces generated by the four positive pressures on the slider, any one of the maximum static friction forces is less than the sum of the other three maximum static friction forces. 8. The stepper propelled by four piezoelectric bodies in parallel according to claim 7, characterized in that the slider uses the elasticity of the slider itself and/or the elasticity of the four piezoelectric bodies and/or the addition of elastic bodies and the four piezoelectric bodies. The free ends of a piezoelectric body are pressed against each other. 9. The stepper propelled by four piezoelectric bodies in parallel according to claim 7, characterized in that the four piezoelectric bodies are all in the shape of a quarter tube cut along the axial direction of the tube, and they are surrounded by A round tube is fixed on the circular base, forming a round tube four piezoelectric body structure. 10. The stepper propelled by four piezoelectric bodies in parallel according to claim 7, characterized in that the four piezoelectric bodies are integrally arranged, or the four piezoelectric bodies and the base are integrally arranged.

Images