CN101499438B - Light-transmitting thin-film solar cell module and manufacturing method thereof - Google Patents

Abstract

The invention discloses a light-transmitting thin-film solar cell module and a manufacturing method thereof. According to the manufacturing method, the cutting channels in two directions are formed in the first electrode material layer on the opaque substrate, so that the problem of short circuit caused by a subsequent high-temperature laser cutting process can be avoided, and the process yield is influenced. In addition, the light-transmitting thin-film solar cell module is provided with the hole penetrating through the opaque substrate, so that the light transmittance of the cell can be improved.

Description

Light-transmitting thin-film solar cell module and manufacturing method thereof

technical field

The present invention relates to a solar cell (photovoltaic) module and its manufacturing method, and in particular to a light-transmitting thin-film solar cell module and its manufacturing method. the

Background technique

Solar energy is an energy source that is inexhaustible and non-polluting. It has always been the focus of attention when solving the problems of pollution and shortage of petrochemical energy. Among them, the solar cell (solar cell) can directly convert solar energy into electric energy, and has become a very important research topic at present. the

At present, in the solar cell market, cells using monocrystalline silicon and polycrystalline silicon account for more than 90 percent. However, these solar cells need to use silicon chips with a thickness of about 150 microns to 350 microns as materials, and the cost is relatively high. Furthermore, since high-quality silicon crystal ingots are used as raw materials for solar cells, due to the obvious growth in usage in recent years, it has become increasingly insufficient. Therefore, the research and development of thin film solar cells has become a new development direction. Moreover, thin-film solar cells have the advantages of low cost, easy large-area production, and simple modularization process. the

Please refer to FIG. 1 , which is a schematic diagram illustrating a known thin film solar cell module. The thin film solar cell module 150 includes a glass substrate 152 , a transparent electrode 154 , a photoelectric conversion layer 156 and a metal electrode 158 . Wherein, the transparent electrode 154 is disposed on the glass substrate 152 . The photoelectric conversion layer 156 is disposed on the transparent electrode 154 in a manner that the position corresponding to the transparent electrode 154 is shifted by a distance. In addition, the metal electrode 158 is disposed on the photoelectric conversion layer 156 in a manner of offsetting a distance corresponding to the position of the photoelectric conversion layer 156 , and is in contact with the transparent electrode 154 below. In the thin-film solar cell module 150, the photoelectric conversion layer is usually a p-i-n structure formed by stacking p-type semiconductors, intrinsic semiconductors, and n-type semiconductors. Electron and hole pairs are generated, and the electrons and hole pairs are separated through the built-in electric field to form voltage and current, which are then transmitted to the load through wires for use. In order to improve the efficiency of the battery, it is known that the thin film solar cell module 150 makes the surface of the transparent electrode 154 into a pyramid structure or a textured structure (not shown) to reduce light reflection. The photoelectric conversion layer usually uses amorphous silicon thin film, but because its energy gap is usually between 1.7 and 1.8eV, it can only absorb sunlight with a wavelength of less than 800nm. In order to increase the utilization of light, it is usually stacked again. A layer of micro-crystalline (micro-crystalline or nano-crystalline) silicon film to form a p-i-n/p-i-n stacked (tandem) solar cell, the energy gap of microcrystalline silicon is usually between 1.1 and 1.2eV, and can absorb light with a wavelength of less than 1100nm sunshine. the

In the early days, solar cells were expensive and difficult to manufacture, and could only be used in special fields such as space. Today, the application of solar cells can be extended to ordinary residential buildings, high-rise buildings, even campers, and mobile small refrigerators. They can be used everywhere by taking advantage of their ability to convert sunlight into electrical energy. However, in some specific applications, silicon wafer solar cells are not suitable, such as the need for light-transmitting glass curtains, and the application of building integrated photovoltaic (BIPV) combined with other solar cells. Thin film solar cell of see-through type has the advantages of energy saving and aesthetics in these applications, and is more in line with the needs of human living. the

At present, some US patents have disclosed related technologies about light-transmissive thin-film solar cells and their manufacturing methods. the

In US Patent No. 6,858,461 (US 6,858,461 B2), a partially transparent solar cell module ("PARTIALLY TRANSPARENT PHOTOVOLATICMODULES") is proposed. As shown in FIG. 2 , the solar cell module 110 includes a transparent substrate 114 , a transparent conductive layer 118 , a back electrode 122 and a photoelectric conversion layer located between the transparent conductive layer 118 and the metal electrode 122 . Likewise, light will be irradiated from below the transparent substrate 114 . In the solar cell module 110, laser cutting (laser scribing) is used to remove part of the metal electrode 122 and the photoelectric conversion layer to form at least one groove (groove) 140, so that the solar cell module 110 can achieve partial light transmission. the goal of. However, since the laser cutting method is carried out at high temperature, it is easy to make the metal electrode 122 produce metal particles or melt and accumulate in the groove, causing the upper and lower electrodes to be short-circuited (short); or the amorphous silicon photoelectric conversion layer is exposed to high temperature Recrystallization occurs on the sidewall of the trench to form low-resistance microcrystalline silicon, which increases the leakage current, thereby affecting the process yield and the efficiency of the solar cell. On the other hand, the surface of the transparent conductive layer 118 is usually made into a pyramidal structure or a roughened surface structure to improve the efficiency of the battery, so that light will be scattered when it is irradiated from the bottom of the transparent substrate 114, so that the light transmittance failed to improve effectively. the

Based on the above, in order to achieve a certain degree of light transmittance in the solar cell, more metal electrodes and photoelectric conversion layers need to be stripped. Please refer to Table 1, which is the product specification of various light-transmitting thin-film batteries of MakMax TAIYO KOGYO in Japan. It can be seen from Table 1 that in order to increase the light transmittance, it is obvious that a considerable area of metal electrodes and photoelectric conversion layers needs to be removed, so that the maximum output, efficiency and fill factor (FF) will decrease. the

Table 1

model KN-38 KN-45 KN-60 Dimensions (mm) 980×950 980×950 980×950 Transmittance(%) 10 5 <1 Maximum output (W) 38.0 45.0 58.0 Vpm(V) 58.6 64.4 68.0 Ipm(A) 0.648 0.699 0.853 Voc(V) 91.8 91.8 91.8 Isc(A) 0.972 1.090 1.140 efficiency(%) 4.1 4.8 6.2 FF 0.43 0.45 0.55

In addition, US Patent No. 4,795,500 (US 4795500) proposes a solar cell device ("PHOTOVOLATIC DEVICE"). As shown in FIG. 3 , the solar cell element includes a transparent substrate 1 , a transparent conductive layer 3 , a photoelectric conversion layer 4 , a metal electrode 5 and a photoresist 8 . In the solar cell element, holes 6 are formed in the metal electrode 5 and the photoelectric conversion layer 4 , or even included in the transparent conductive layer 3 , to achieve the purpose of light transmission. However, this patent needs to use a yellow light process, and its related equipment is quite expensive, which will increase the cost. Moreover, if the patent uses laser cutting to directly form the hole 6, it will also cause metal particle pollution and short circuit problems, which will affect the process yield. the

Contents of the invention

In view of this, the purpose of the present invention is to provide a light-transmitting thin-film solar cell module and its manufacturing method, which can improve the light transmittance of the cell module, and can avoid the problems of short circuit and leakage current caused by known processes, and further Process yield and solar cell efficiency can be improved. the

The invention provides a method for manufacturing a light-transmitting thin-film solar cell module. First, a first electrode material layer is formed on an opaque substrate. Then, remove part of the first electrode material layer to form a plurality of first Y-direction cutting lines that can separate the first electrode material layer into a plurality of strip-shaped electrode material layers, and a plurality of first Y-direction cutting lines that intersect with the first Y-direction cutting lines. A plurality of first X-direction cutting lines separates the first electrode material layer into a first comb-shaped electrode and a plurality of block-shaped first electrodes arranged two-dimensionally. Next, a photoelectric conversion layer is formed to cover the opaque substrate, the first electrode and part of the first comb-shaped electrode. Subsequently, a part of the photoelectric conversion layer is removed to form a plurality of second Y-direction cutting lines parallel to the first Y-direction cutting lines above the first electrode. After that, a second electrode material layer is formed to cover the photoelectric conversion layer, the first electrode and the opaque substrate. Next, part of the second electrode material layer and part of the photoelectric conversion layer are removed to form a plurality of third Y-direction cutting lines exposing the surface of the first electrode, and a plurality of second X-direction cutting lines are formed in the first X-direction cutting lines. The cutting line exposes the opaque substrate, and separates the second electrode material layer into a second comb-shaped electrode and a plurality of block-shaped second electrodes arranged two-dimensionally. Afterwards, removing part of the opaque substrate exposed by the second X-direction scribe line and the third Y-direction scribe line to form a plurality of holes in the opaque substrate. The photoelectric conversion layer covers the first electrode around the hole.

In the above-mentioned manufacturing method of the light-transmissive thin film solar cell module, when removing part of the photoelectric conversion layer to form the second Y-direction scribe, it also includes forming a plurality of third X-direction scribes in the first X-direction scribe . The first, second and third Y-direction cutting lines and the first, second and third X-direction cutting lines are prepared by laser cutting. Moreover, the first electrode material layer of the light-transmitting thin-film solar cell module is a transparent conductive oxide layer, and its material is, for example, zinc oxide, tin dioxide, indium tin oxide or indium oxide. The first electrode material layer can also be a metal layer, such as aluminum, silver, copper, molybdenum or other suitable metals or alloys. The photoelectric conversion layer has a single-layer structure or a stacked-layer structure. The material of the photoelectric conversion layer is, for example, amorphous silicon and its alloys, cadmium sulfide, copper indium gallium diselenide, copper indium gallium diselenide, cadmium telluride or organic materials. The second electrode material layer is a transparent conductive oxide layer, such as zinc oxide, tin dioxide, indium tin oxide or indium oxide. the

The present invention further provides a light-transmitting thin-film solar cell module, which has a plurality of cells connected in series and arranged on an opaque substrate. Between the cells there are holes through the opaque substrate. The light-transmissive thin-film solar cell module includes a first electrode, a second electrode and a photoelectric conversion layer. Wherein, the first electrode is arranged on the opaque substrate, and the first electrode is composed of a first comb-shaped electrode and a plurality of block-shaped first electrodes arranged two-dimensionally. The second electrode is arranged above the first electrode, and the second electrode is composed of a second comb-shaped electrode and a plurality of block-shaped second electrodes arranged two-dimensionally, and the gap between the second comb-shaped electrode and the aforementioned block-shaped second electrodes A part of the aforementioned first bulk electrode, a part of the opaque substrate, or the aforementioned hole is exposed. As mentioned above, the second comb-shaped electrodes and the first comb-shaped electrodes are arranged in a left-right manner, while the first block-shaped electrodes and the second block-shaped electrodes are arranged in a parallel displacement manner. In addition, the photoelectric conversion layer is disposed between the first electrode and the second electrode. The photoelectric conversion layer is composed of multiple photoelectric conversion material layers arranged two-dimensionally. The photoelectric conversion layer covers the first electrode around the hole. the

The first electrode of the above light-transmissive thin film solar cell module is a transparent conductive oxide layer, and its material is, for example, zinc oxide, tin dioxide, indium tin oxide or indium oxide. The first electrode can also be a metal layer, and its material is, for example, aluminum, silver, copper, molybdenum or other suitable metals or alloys. The photoelectric conversion layer has a single-layer structure or a stacked-layer structure. The material of the photoelectric conversion layer is, for example, amorphous silicon and its alloys, cadmium sulfide, copper indium gallium diselenide, copper indium gallium diselenide, cadmium telluride or organic materials. In addition, the second electrode is a transparent conductive oxide layer, and its material is, for example, zinc oxide, tin dioxide, indium tin oxide or indium oxide. the

The invention further proposes a method for manufacturing a light-transmitting thin-film solar cell module. First, a first electrode material layer is formed on an opaque substrate. Then, part of the first electrode material layer is removed to form a plurality of first Y-direction slits that can separate the first electrode material layer into a plurality of strip-shaped electrode material layers, and a plurality of first X in a two-dimensional arrangement. The window is cut in the same direction, so that the first electrode material layer becomes a plurality of first window-type electrodes. Next, a photoelectric conversion layer is formed to cover the first window electrode and the opaque substrate. Subsequently, a part of the photoelectric conversion layer is removed to form a plurality of second Y-direction cutting lines parallel to the first Y-direction cutting lines above the first window electrode. Afterwards, a second electrode material layer is formed on the photoelectric conversion layer. Next, removing part of the second electrode material layer and part of the photoelectric conversion layer to form a plurality of third Y-direction cutting lines exposing the surface of the first window-shaped electrode, and forming a third Y-direction cutting line in each first X-direction cutting window. The window is cut in the second X direction, so that the second electrode material layer becomes a plurality of second window-shaped electrodes exposing the opaque substrate. Afterwards, the opaque substrate exposed by the second X-direction cutting window is removed to form a plurality of holes in the opaque substrate. The photoelectric conversion layer covers the first electrode around the hole. the

In the above-mentioned manufacturing method of the light-transmissive thin-film solar cell module, when removing part of the photoelectric conversion layer to form the second Y-direction dicing line, a plurality of third X-cutting lines can be further formed in the first X-direction cutting window. Direction cut window. the

In the above-mentioned manufacturing method of the light-transmitting thin film solar cell module, the first, second, and third Y-direction cutting lines and the first, second, and third X-direction cutting windows are prepared by laser cutting. Moreover, the first electrode material layer of the light-transmitting thin-film solar cell module is a transparent conductive oxide layer, and its material is, for example, zinc oxide, tin dioxide, indium tin oxide or indium oxide. The first electrode material layer can also be a metal layer, such as aluminum, silver, copper, molybdenum or other suitable metals or alloys. The photoelectric conversion layer has a single-layer structure or a stacked-layer structure. The material of the photoelectric conversion layer is, for example, amorphous silicon and its alloys, cadmium sulfide, copper indium gallium diselenide, copper indium gallium diselenide, cadmium telluride or organic materials. The second electrode material layer is a transparent conductive oxide layer, such as zinc oxide, tin dioxide, indium tin oxide or indium oxide. the

The present invention further proposes a light-transmitting thin-film solar cell module, which has a plurality of cells connected in series in the X direction and parallel in the Y direction, and has a plurality of through holes penetrating through the opaque substrate between the cells. The light-transmitting thin-film solar cell module includes an opaque substrate, a first electrode, a second electrode and a photoelectric conversion layer. Wherein, the opaque substrate has a plurality of holes. The first electrode is arranged on the opaque substrate, and the first electrode is composed of a plurality of bulk first window-shaped electrodes. The aforementioned block-shaped first window-shaped electrode has a plurality of first cutting windows corresponding to the aforementioned holes. The second electrode is arranged above the first electrode, and the second electrode is composed of a plurality of bulk second window-shaped electrodes. The block-shaped second window-shaped electrode has a plurality of second cutting windows corresponding to the holes and the first cutting windows and jointly forming the through hole. The aforementioned second window-type electrodes and the first window-type electrodes are arranged in a parallel displacement manner. In addition, the photoelectric conversion layer is disposed between the first electrode and the second electrode. The photoelectric conversion layer is composed of multiple window-shaped photoelectric conversion material layers. The photoelectric conversion layer covers the first electrode around the hole. the

The first electrode of the above light-transmissive thin film solar cell module is a transparent conductive oxide layer, and its material is, for example, zinc oxide, tin dioxide, indium tin oxide or indium oxide. The first electrode can also be a metal layer, and its material is, for example, aluminum, silver, copper, molybdenum or other suitable metals or alloys. The photoelectric conversion layer has a single-layer structure or a stacked-layer structure. The material of the photoelectric conversion layer is, for example, amorphous silicon and its alloys, cadmium sulfide, copper indium gallium diselenide, copper indium gallium diselenide, cadmium telluride or organic materials. In addition, the second electrode is a transparent conductive oxide layer, and its material is, for example, zinc oxide, tin dioxide, indium tin oxide or indium oxide. the

In the light-transmitting thin-film solar cell module and the manufacturing method thereof of the present invention, cutting lines or cutting windows in two directions have been formed at the same time when the first electrode is made, so that the prepared light-transmitting thin-film solar cell module does not have defects. Problems of short circuit and leakage current caused by high temperature laser cutting process can improve process yield and solar cell efficiency. In addition, compared with the known light-transmissive thin-film solar cell module, the light-transmissive thin-film solar cell module of the present invention has a plurality of through holes penetrating through the opaque substrate, and will not be made into a pyramid-shaped structure or rough due to the surface of the transparent oxide electrode. The structure causes light scattering, so the light transmittance of the element can be greatly improved. the

In order to make the above and other objects, features and advantages of the present invention more comprehensible, preferred embodiments are described below in detail together with accompanying drawings. the

Description of drawings

FIG. 1 is a schematic diagram illustrating a known thin film solar cell module. the

FIG. 2 is a schematic diagram illustrating a known solar cell module. the

FIG. 3 is a schematic diagram illustrating a known solar cell element. the

4 to 9 are schematic flowcharts of the manufacturing method of the light-transmissive thin-film solar cell module according to the embodiment of the present invention. Wherein, the sub-figures 4(a), 5(a), 6(a), 7(a), and 8(a) of Figures 4 to 8 are schematic diagrams showing top views, and the sub-figures 4(b), 5(b ), 6(b), 7(b), and 8(b) are schematic cross-sectional views along the section line II'; sub-figures 9(a) and 9(a') of Fig. The top view schematic diagrams of different embodiments, sub-figure 9 (b) and sub-figure 9 (b') are schematic cross-sectional views of two different embodiments shown along the section line II', sub-figure 9 (c) is a drawing A schematic cross-sectional view along the section line II-II' is shown.

10 to 15 are schematic flowcharts of a manufacturing method of a light-transmissive thin film solar cell module according to another embodiment of the present invention. Wherein, sub-figures 10(a), 11(a), 12(a), 13(a), 14(a), and 15(a) of FIGS. 10 to 15 are schematic diagrams showing top views, and sub-figures 10(b ), 11(b), 12(b), 13(b), 14(b), 15(b) are schematic cross-sectional views along section line II'; ), 12(c), 13(c), 14(c), and 15(c) are schematic cross-sectional views along the section line II-II'. the

Explanation of reference signs

1, 114, 402, 502: opaque substrate 3, 118: transparent conductive layer

4, 156: photoelectric conversion layer 5, 158: metal electrode

6: Hole 8: Photoresist

110: Solar cell module 122: Back electrode

140: Groove 150: Thin Film Solar Cell Module

152: Glass substrate 154: First electrode

400, 500: light-transmitting thin-film solar cell module

401, 501: battery 404, 418, 504, 520: electrode material layer

406, 416, 420, 506, 514, 522: cutting lanes in Y direction

408, 422: cutting lines in X direction 410, 424, 424’, 426’: block electrodes

412, 426: Comb electrode 414, 512: Photoelectric conversion layer

425: Connecting part 450, 550: Hole

460, 560: light 470, 570: first electrode

480, 580: second electrode 510, 526: window electrode

508, 516, 524: cutting window 555: through hole

Detailed ways

4 to 9 are schematic flowcharts of a manufacturing method of a light-transmissive thin-film solar cell module according to an embodiment of the present invention. Wherein, the sub-figures (a) and (a') of Fig. 4 to Fig. 9 are schematic diagrams showing top views respectively, and sub-figures (b) and sub-figures (b') are schematic cross-sectional views along the section line II' , sub-figure (c) is a schematic cross-sectional view along the section line II-II'. the

First, please refer to FIG. 9(a), FIG. 9(b), FIG. 9(b') and FIG. 9(c), the light-transmissive thin-film solar cell module 400 of this embodiment is composed of a plurality of cells connected in series ( cell) 401. These batteries 401 are composed of a first electrode 470 , a photoelectric conversion layer 414 and a second electrode 480 . These cells 401 are arranged in an array. The batteries 401 in the columns are separated by the X-direction cutting lines 422 and 408 ; the batteries 401 in the rows are separated by the Y-direction cutting lines 420 and the Y-direction cutting lines 406 . the

In other words, the X-direction cutting lines 408 and 422 can separate the first electrode 470 and the second electrode 480 into several rows, exposing the opaque substrate 402 . The Y-direction cutting lines 420 separate the second electrodes 480 into several rows, exposing part of the first electrodes 470 and part of the opaque substrate 402 . The Y-direction cutting lines 406 separate the first electrodes 470 into several rows, exposing the opaque substrate 402 . Moreover, the opaque substrate 402 exposed by the X-direction cutting line 422 and the Y-direction cutting line 420 has a plurality of holes 450 passing through the two surfaces 402a and 402b thereof. the

More specifically, the light-transmissive thin-film solar cell module 400 includes an opaque substrate 402 and a first electrode 470 , a photoelectric conversion layer 414 and a second electrode 480 disposed thereon. Wherein, the first electrode 470 is directly arranged on the opaque substrate 402, which is composed of a comb-shaped electrode 412 cut out by the X-direction cutting line 408 and the Y-direction cutting line 406 and a plurality of block electrodes 410 arranged two-dimensionally. . The material of the first electrode 470 is a transparent conductive oxide film or a metal layer. The material of the TCO is, for example, zinc oxide (ZnO), tin dioxide (SnO ₂ ), indium tin oxide (ITO) or indium oxide (In ₂ O ₃ ). The material of the metal layer is, for example, aluminum (Al), silver (Ag), molybdenum (Mo), copper (Cu) or other suitable metals or alloys.

The second electrode 480 is disposed above the first electrode 470 and is composed of a comb-shaped electrode 426 cut by the X-direction cutting line 422 and the Y-direction cutting line 422 and a plurality of block electrodes 424 arranged two-dimensionally. Moreover, the comb-shaped electrodes 412 and 426 are arranged in a left-right manner, and the block-shaped electrodes 410 and 424 are arranged in a parallel displacement manner. The material of the second electrode 480 is a transparent conductive oxide film. The material of the TCO is, for example, zinc oxide, tin dioxide, indium tin oxide (ITO) or indium oxide (In ₂ O ₃ ).

In addition, the photoelectric conversion layer 414 is disposed between the first electrode 470 and the second electrode 480 , and the photoelectric conversion layer 414 is composed of a plurality of photoelectric conversion material layers arranged two-dimensionally. The photoelectric conversion layer 414 may have a single layer structure or a stacked layer structure. The material of the photoelectric conversion layer 414 is, for example, amorphous silicon and its alloys, cadmium sulfide (CdS), copper indium gallium diselenide (CuInGaSe ₂ , CIGS), copper indium diselenide (CuInSe ₂ , CIS), cadmium telluride (CdTe), Multilayer structure of organic materials or stacks of the above materials.

Among the above-mentioned cutting lines, the Y-direction cutting lines 406 for dividing the first electrode 470 are covered by the photoelectric conversion layer 414 and the second electrode 480 . The Y-direction cutting line 420 for dividing the second electrode 480 exposes part of the first electrode 470 and the opaque substrate 402 . The positions of the X-direction cutting lines 408 for dividing the first electrodes 470 and the Y-direction cutting lines 422 for dividing the second electrodes 480 correspond to and expose the opaque substrate 402 . the

It is particularly worth noting that in the present invention, the X-direction cutting lines 422, 406 and the Y-direction cutting line 420 not only expose the opaque substrate 402, but also have a plurality of penetrating two surfaces 402a and 402b in the exposed opaque substrate 402. The hole 450. the

The size of the holes 440 on the surface 402a of the opaque substrate 402 may be the same as or different from the size extending to the surface 402b. For example, the size of the holes 440 may be gradually larger or smaller extending from the surface 402a to the surface 402b of the opaque substrate 402 . In addition, the pattern of the holes 440 on the opaque substrate 402 is not particularly limited, and the patterns on the surfaces 402a and 402b of the opaque substrate 402 can present various shapes, such as circles, squares, rectangles, triangles, polygons, etc. or irregular. the

Since the light-transmissive thin-film solar cell module 400 of this embodiment has the X-direction cutting lines 422, 406 and the Y-direction cutting lines 420 that can expose the opaque substrate 402, and the opaque substrate 402 has a plurality of holes 450, when the light ( When sunlight) is irradiated by the second electrode 480 above the surface 402a of the opaque substrate 402, it can pass through the X-direction cutting line 422 and the Y-direction cutting line 420 and the holes in the opaque substrate 402 to make the light-transmitting thin film solar cell module 400 Achieve higher light transmission characteristics. Compared with the known light-transmissive thin-film solar cell module, the light-transmissive thin-film solar cell module 400 of this embodiment can greatly improve the light transmittance of the element. the

On the other hand, as shown in FIG. 9(c), since the first electrode will be covered by the photoelectric conversion layer 414, when forming the X-direction cutting line 422, the high-temperature laser cutting process will not make the second electrode The generated residue contacts the first electrode, which causes a short circuit (short) problem; or the amorphous silicon photoelectric conversion layer recrystallizes at the side wall of the trench at high temperature, forming a low-resistance microcrystalline silicon, which increases the leakage current , and then affect the process yield (yield) and the efficiency of solar cells. the

Hereinafter, the manufacturing method of the light-transmissive thin-film solar cell module 400 of this embodiment will be described in detail with reference to FIGS. 4 to 9 . the

First, referring to FIG. 4( a ) and FIG. 4( b ), an opaque substrate 402 is provided. The material of the opaque substrate 402 is, for example, a thin metal plate, a plastic substrate, a ceramic substrate or other suitable opaque materials. or other suitable opaque material. Next, an electrode material layer 404 is formed on the opaque substrate 402 . The electrode material layer 404 is a transparent conductive oxide (TCO) film or a metal layer. The material of the TCO is, for example, zinc oxide (ZnO), tin dioxide (SnO ₂ ), indium tin oxide (ITO) or indium oxide (In ₂ O ₃ ). The material of the metal layer is, for example, aluminum (Al), silver (Ag), molybdenum (Mo), copper (Cu) or other suitable metals or alloys. The electrode material layer 404 can be formed by, for example, a chemical vapor deposition method (CVD method), a sputtering method or other suitable methods.

Of course, in order to improve the efficiency of the battery, the electrode material can also be treated with a textured surface to reduce light reflection. Rough surface treatment will cause uneven surface to cause light scattering (scattering), reduce the reflection of incident light, and increase the travel distance of incident light in the photoelectric conversion layer, which usually makes the surface of the electrode material V Font groove, pyramid structure (not shown) or reverse pyramid. the

Then, referring to FIG. 5( a ) and FIG. 5( b ), part of the electrode material layer 404 is removed to form a plurality of Y-direction cutting lines 406 and a plurality of X-direction cutting lines 408 intersecting these Y-direction cutting lines 406 . Wherein, when only the cutting lines 406 in the Y direction are formed, the electrode material layer 404 can be divided into a plurality of strip-shaped electrode material layers (not shown). After forming the Y-direction cutting lines 406 and the X-direction cutting lines 408 , the electrode material layer 404 can be divided into comb-shaped electrodes 412 and a plurality of block electrodes 410 arranged two-dimensionally to form the first electrodes 470 of the battery module. Based on the above, the method for forming the Y-direction cutting line 406 and the X-direction cutting line 408 is, for example, using a laser scribing process to remove part of the electrode material layer 404 . the

After that, referring to FIG. 6( a ) and FIG. 6( b ), a photoelectric conversion layer 414 is formed on the opaque substrate 402 . The photoelectric conversion layer 414 covers the opaque substrate 402 , the bulk electrodes 410 and part of the comb electrodes 412 . The photoelectric conversion layer 414 may have a single layer structure or a stacked layer structure. The material of the photoelectric conversion layer 414 is, for example, amorphous silicon and its alloys, cadmium sulfide (CdS), copper indium gallium diselenide (CuInGaSe ₂ , CIGS), copper indium diselenide (CuInSe ₂ , CIS), cadmium telluride (CdTe), Multilayer structure of organic materials or stacks of the above materials. The photoelectric conversion layer 414 can be formed by, for example, chemical vapor deposition, sputtering or other suitable methods. In addition, it should be noted that the above-mentioned amorphous silicon alloy refers to adding hydrogen atoms (H), fluorine atoms (F), chlorine atoms (Cl), germanium atoms (Ge), oxygen atoms (O ), carbon atoms (C) or nitrogen atoms (N) and other atoms. If hydrogen atoms, fluorine atoms, and chlorine atoms are added to amorphous silicon, the defects in the silicon film can be repaired to obtain better film quality; if germanium atoms are added to amorphous silicon, the energy gap of the silicon film can be changed. Small, absorbing longer-wavelength solar rays; if oxygen atoms, carbon atoms, and nitrogen atoms are added to amorphous silicon, the energy gap of the silicon film can be enlarged to absorb shorter-wavelength solar rays.

Next, referring to FIG. 7( a ) and FIG. 7( b ), part of the photoelectric conversion layer 414 is removed to form a plurality of cutting lines 416 in the Y direction. These Y-direction cutting lines 416 are relatively parallel to the Y-direction cutting lines 406 and expose the underlying bulk electrodes 410 . As mentioned above, the method for forming the Y-direction cutting line 416 is, for example, to remove part of the photoelectric conversion layer 414 by using a laser cutting process. the

Subsequently, referring to FIG. 8( a ) and FIG. 8( b ), an electrode material layer 418 is formed on the opaque substrate 402 . The electrode material layer 418 covers the photoelectric conversion layer 414 , the electrode 410 and the opaque substrate 402 . The electrode material layer 418 is a transparent conductive oxide (TCO) film. The material of the TCO is, for example, zinc oxide (ZnO), tin dioxide (SnO ₂ ), indium tin oxide (ITO) or indium oxide (In ₂ O ₃ ). The electrode material layer 418 can be formed by, for example, chemical vapor deposition, sputtering or other suitable methods.

Next, please refer to FIG. 9(a), FIG. 9(b), FIG. 9(b') and FIG. 9(c), forming a plurality of Y-direction cutting lines 420 and a plurality of cutting lines 420 intersecting these Y-direction cutting lines 420 X-direction cutting line 422 . In one embodiment, the Y direction cutting line 420 cuts off the electrode material layer 418 along the Y direction, and the X direction cutting line 422 cuts off the electrode material layer 418 along the X direction, so that the electrode material layer 418 is separated into comb-shaped electrodes 426 A plurality of bulk electrodes 424 arranged two-dimensionally form the second electrode 480 of the battery module. In another embodiment, the Y-direction cutting line 420 disconnects the electrode material layer 418, while the X-direction cutting line 422 does not disconnect the electrode material layer 418, as shown in FIG. 9(a'), but the electrode material layer 418 Separated into a plurality of block electrodes 424 and block electrodes 426 ′ to form the second electrode 480 of the battery module. In other words, the cutting line 422 in the X direction does not break the electrode material layer 418, but makes the plurality of block electrodes 424 arranged two-dimensionally in FIG. They are also electrically connected through the connection part 425, and the comb parts of the comb-shaped electrode 426 are also connected through the connection part 425' to form block electrodes 424' and 426' in FIG. 9(a'). The shape and quantity of the connecting portion 425 are not limited by the drawing, and can be in various shapes or quantities, as long as the X-direction cutting line 422 does not disconnect the electrode material layer 418 , it is within the scope of the present invention. The X-direction cutting line 422 is formed by removing part of the electrode material layer 418 and part of the photoelectric conversion layer 414 in the X-direction cutting line 408 until the surface of the opaque substrate 402 is exposed. In addition, the Y-direction cutting line 420 is formed by removing part of the electrode material layer 418 in the Y-direction cutting line 416 until the electrode 410 and the surface of the opaque substrate 402 are exposed. the

In yet another embodiment, as shown in FIG. 9(b'), the Y-direction cutting line 420 can also be formed by removing part of the electrode material layer 418 and the photoelectric conversion layer 414 until the surface of the electrode 410 is exposed, and formed on the opposite Where the position of the cutting line 416 in the Y direction is offset. Similarly, the Y-direction cutting line 420 and the X-direction cutting line 422 can be formed by removing part of the electrode material layer 418 and part of the photoelectric conversion layer 414 by using a laser cutting process. the

Afterwards, a plurality of holes 450 are formed in the opaque substrate 402 exposed by the X-direction cutting lines 422 and the Y-direction cutting lines 420 . The patterns of these holes 450 are not particularly limited, and the patterns on the surfaces 402a and 402b of the opaque substrate 402 can present various shapes, such as circles, squares, rectangles, polygons, grooves, etc., or irregular shapes. . Furthermore, the sizes of the holes 450 extending from the surface 402a to the surface 402b of the opaque substrate 402 may be the same or different. For example, the holes 450 may gradually increase or decrease in size extending from the surface 402a to the surface 402b of the opaque substrate 402 . The method of forming the hole 450 is, for example, using a laser cutting method to remove the substrate by utilizing its high temperature, or removing the substrate by etching. the

Based on the above, after performing the above steps, the light-transmissive thin film solar cell module 400 of this embodiment can be completed. When in use, light (sunlight) 460 is irradiated from the second electrode 480, and part of the light is absorbed by the photoelectric conversion layer 414 of each cell 401 to generate a photoelectric conversion effect to generate voltage; while the other part of the light 460 passes through Pass through the X-direction cutting line 422 and the Y-direction cutting line 420 , and then pass through the hole 450 of the opaque substrate 402 to reach the surface 402 b of the opaque substrate 402 . the

In addition, the light-transmissive thin-film solar cell module 400 of this embodiment can also be prepared in other ways. Based on the above, when forming the Y-direction cutting lines 416 in the photoelectric conversion layer 414 (as shown in FIGS. (not shown), so that the photoelectric conversion layer 414 becomes a plurality of bulk photoelectric conversion layers (not shown). Next, subsequent steps are the same as those in the above-mentioned embodiment, and will not be repeated here. the

In addition to the above-mentioned embodiments, the present invention also has other implementation forms. the

10 to 15 are schematic flowcharts of a manufacturing method of a light-transmissive thin film solar cell module according to another embodiment of the present invention. Among them, the sub-figure (a) of Fig. 10 to Fig. 15 is a schematic diagram showing a top view, the sub-figure (b) is a schematic sectional view along the section line II', and the sub-figure (c) is a schematic diagram along the section line Schematic cross-section of H-II'. In FIGS. 10 to 15 , possible overlapping descriptions of components that are the same as those in FIGS. 4 to 9 are omitted. the

First, please refer to FIG. 15(a), FIG. 15(b) and FIG. 15(c), the light-transmissive thin-film solar cell module 500 of this embodiment has a plurality of cells connected in series in the X direction and in parallel with each other in the Y direction. 501. Moreover, there are a plurality of X-direction cut windows 524 exposing the opaque substrate 502 between the cells 501 . When light (sunlight) 560 is irradiated from above the opaque substrate 502, it can pass through the cut window 524 in the X direction, so that the light-transmissive thin-film solar cell module 500 can achieve the purpose of light transmission. the

The light-transmissive thin-film solar cell module 500 includes an opaque substrate 502 and a first electrode 570 , a second electrode 580 and a photoelectric conversion layer 512 disposed thereon. Wherein, the opaque substrate 502 has a plurality of holes 550 . The first electrode 570 is directly disposed on the opaque substrate 502 and is composed of a plurality of window-shaped electrodes 510 arranged in parallel and having a plurality of cutting windows 508 . The first electrode 570 is a transparent conductive oxide film or a metal layer. The material of the TCO is, for example, zinc oxide (ZnO), tin dioxide (SnO ₂ ), indium tin oxide (ITO) or indium oxide (In ₂ O ₃ ). The material of the metal layer is, for example, aluminum (Al), silver (Ag), molybdenum (Mo), copper (Cu) or other suitable metals or alloys. The second electrode 580 is disposed above the first electrode 570 and is composed of a plurality of window-shaped electrodes 526 with a plurality of cutting windows 524 arranged in parallel. Moreover, the window electrodes 510 and 526 are arranged in a parallel displacement manner. The second electrode 580 is a transparent conductive oxide film. The material of the TCO is, for example, zinc oxide (ZnO), tin dioxide (SnO ₂ ), indium tin oxide (ITO) or indium oxide (In ₂ O ₃ ). In addition, the photoelectric conversion layer 512 is disposed between the first electrode 570 and the second electrode 580 , and the photoelectric conversion layer 512 is composed of a plurality of window-shaped photoelectric conversion material layers with a plurality of cutting windows 516 arranged in parallel. The photoelectric conversion layer 512 may have a single layer structure or a stacked layer structure. The material of the photoelectric conversion layer 512 is, for example, amorphous silicon and its alloys, cadmium sulfide (CdS), copper indium gallium diselenide (CuInGaSe ₂ , CIGS), copper indium diselenide (CuInSe ₂ , CIS), cadmium telluride (CdTe), Multilayer structure of organic materials or stacks of the above materials. The cutting window 516 , the cutting window 508 and the cutting window 524 all correspond to the plurality of holes 550 of the opaque substrate 502 , and therefore, a plurality of through holes 555 can be formed. The shape of the through hole 555 is not particularly limited, and it can be in various shapes, such as circular, square, rectangular, polygonal, or irregular.

The size of the holes 550 on the surface 502 a of the opaque substrate 502 may be the same as or different from the size extending to the surface 502 b. For example, the size of the holes 550 may be gradually larger or smaller extending from the surface 502a to the surface 502b of the opaque substrate 502 . In addition, the pattern of the holes 550 on the opaque substrate 502 is not particularly limited, and the patterns on the surfaces 502a and 502b of the opaque substrate 502 can present various shapes, such as circles, squares, rectangles, polygons, etc., or in the form of Irregular shape. the

Because the light-transmissive thin-film solar cell module 500 of this embodiment has a plurality of through holes 555, which can increase the light transmittance of the cell module. Therefore, compared with the known light-transmissive thin-film solar cell module, the light-transmissive thin-film solar cell module of this embodiment can greatly improve the light transmittance of the element. In addition, as shown in Figure 15(c), since the first electrode 570 will be covered by the photoelectric conversion layer 512, it can be avoided that the high-temperature laser cutting process will cause the second electrode 580 to be formed when the X-direction cutting window 524 is formed. The metal particles may melt and come into contact with the first electrode 570 to cause problems of short circuit and leakage current, thereby affecting the process yield and the efficiency of the solar cell. the

Hereinafter, the manufacturing method of the light-transmissive thin-film solar cell module 500 of this embodiment will be described in detail with reference to FIGS. 10 to 15 . the

First, referring to FIG. 10( a ) and FIG. 10( b ), an opaque substrate 502 is provided. The material of the opaque substrate 502 is, for example, a thin metal plate, a plastic substrate, a ceramic substrate or other suitable opaque materials. Next, an electrode material layer 504 is formed on the opaque substrate 502 . The electrode material layer 504 is a transparent conductive oxide film or a metal layer. The material of the TCO is, for example, zinc oxide (ZnO), tin dioxide (SnO ₂ ), indium tin oxide (ITO) or indium oxide (In ₂ O ₃ ). The material of the metal layer is, for example, aluminum (Al), silver (Ag), molybdenum (Mo), copper (Cu) or other suitable metals or alloys.

Then, please refer to FIG. 11(a), FIG. 11(b) and FIG. 11(c), in the electrode material layer 504, a plurality of Y-direction strips that can separate the electrode material layer 504 into a plurality of strip-shaped electrode material layers are formed. A cutting line 506 and a plurality of X-direction cutting windows 508 arranged two-dimensionally. The Y-direction cutting lines 506 and the X-direction cutting windows 508 can form the electrode material layer 504 into a plurality of window-shaped electrodes 510 . the

Next, referring to FIG. 12( a ), FIG. 12( b ) and FIG. 12( c ), a photoelectric conversion layer 512 is formed on the opaque substrate 502 . The photoelectric conversion layer 512 covers the opaque substrate 502 and the window electrode 510 . the

After that, referring to FIG. 13( a ), FIG. 13( b ) and FIG. 13( c ), part of the photoelectric conversion layer 512 is removed to form a plurality of Y-direction cutting lines 514 and a plurality of X-direction cutting windows 516 . Among them, a plurality of Y-direction cutting lines 514 are formed above the window electrode 510 and are relatively parallel to the Y-direction cutting lines 506; X-direction cutting windows 516 are formed in the X-direction cutting windows 508 and arranged two-dimensionally. the

In this step process, part of the photoelectric conversion layer 512 can also be removed, and only a plurality of cutting lines 514 in the Y direction are formed, but the X direction in FIG. 13(a), FIG. 13(b) and FIG. 13(c) is not formed. The window 516 is cut. The figures of the above-mentioned embodiments are not shown here because they are known to those skilled in the art. the

Next, referring to FIG. 14( a ), FIG. 14( b ) and FIG. 14( c ), an electrode material layer 520 is formed on the opaque substrate 502 . The electrode material layer 520 covers the photoelectric conversion layer 512 , the window electrode 510 and the opaque substrate 502 . The electrode material layer 520 is a transparent conductive oxide (TCO) film. The material of the TCO is, for example, zinc oxide (ZnO), tin dioxide (SnO ₂ ), indium tin oxide (ITO) or indium oxide (In ₂ O ₃ ).

Subsequently, please refer to Fig. 15 (a), Fig. 15 (b) and Fig. 15 (c), form a plurality of Y direction cutting lines 522 and a plurality of X direction cutting windows 524, so that the electrode material layer 520 becomes a plurality of window shapes Electrode 526. Wherein, the Y-direction cutting line 522 is formed by removing part of the electrode material layer 520 and part of the photoelectric conversion layer 512 until the surface of the window electrode 510 is exposed. The X-direction cutting window 524 is formed by removing part of the electrode material layer 520 in the X-direction cutting window 516 to expose the underlying opaque substrate 502 . the

Based on the above, if the last step is to only form a plurality of Y-direction cutting lines 514, then in this step process, the X-direction cutting window 524 needs to remove part of the electrode material layer 520 and part of the photoelectric conversion layer in the X-direction cutting window 516. 512 and formed. the

Next, the opaque substrate 502 exposed by the X-direction cutting window 516 is removed to form a hole 550 penetrating the two surfaces 502a, 502b therein. The plurality of holes 550 of the opaque substrate 502 correspond to the cutting window 516 , the cutting window 508 and the cutting window 524 to form a plurality of through holes 555 . The method of forming the hole 550 is, for example, using a laser cutting method to remove the substrate by utilizing its high temperature, or removing the substrate by etching. the

After performing the above steps, the light-transmissive thin-film solar cell module 500 with a plurality of through holes 555 in this embodiment can be completed. the

In summary, the light-transmissive thin-film solar cell module and its manufacturing method of the present invention have simultaneously formed cutting lines or cutting windows in two directions when making the first electrode, so that the prepared light-transmitting thin-film solar cell can The module will not have the problems of short circuit and leakage current caused by the high temperature laser cutting process, which will affect the process yield and solar cell efficiency. In addition, compared with the known light-transmissive thin-film solar cell module, the light-transmissive thin-film solar cell module of the present invention has an opening that can expose the opaque substrate, which can greatly improve the light transmittance of the battery module. the

Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Those skilled in the art may make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection of the present invention The scope is to be determined as defined by the appended claims. the

Claims (37)

1. A method for manufacturing a light-transmissive thin-film solar cell module, comprising: forming a first electrode material layer on an opaque substrate; Removing part of the first electrode material layer to form a plurality of first Y-direction cutting lines separating the first electrode material layer into a plurality of strip-shaped electrode material layers, and a plurality of cutting lines intersecting the first Y-direction cutting lines A first X-direction cutting line, so that the first electrode material layer is separated into a first comb-shaped electrode and a plurality of first bulk electrodes arranged two-dimensionally; forming a photoelectric conversion layer covering the opaque substrate, the first electrode and part of the first comb-shaped electrode; removing part of the photoelectric conversion layer to form a plurality of second Y-direction cutting lines relatively parallel to the first Y-direction cutting lines above the first electrode; forming a second electrode material layer covering the photoelectric conversion layer, the first electrode and the opaque substrate; removing part of the second electrode material layer and part of the photoelectric conversion layer to form a plurality of third Y-direction cutting lines exposing the surface of the first bulk electrode and the surface of the opaque substrate, and cutting in the first X-direction A plurality of second X-direction cutting lines are formed in the line to expose the opaque substrate, so that the second electrode material layer is separated into a second comb-shaped electrode and a plurality of second bulk electrodes arranged two-dimensionally; and removing part of the opaque substrate exposed by the second X-direction scribe line and the third Y-direction scribe line to form a plurality of holes in the opaque substrate, and the photoelectric conversion layer wraps the first electrode around the holes . 2. The manufacturing method of the light-transmissive thin-film solar cell module according to claim 1, wherein when removing part of the photoelectric conversion layer to form the second Y-direction scribe, it is also included in the first X-direction scribe A plurality of third X-direction cutting lines are formed. 3. The manufacturing method of the light-transmissive thin-film solar cell module as claimed in claim 2, wherein the third X-direction scribe line is prepared by laser cutting. 4. The manufacturing method of the light-transmitting thin film solar cell module as claimed in claim 1, wherein the first, second, third Y-direction scribes and the first and second X-direction scribes are made by laser cutting preparation. 5. The method for manufacturing a light-transmissive thin-film solar cell module as claimed in claim 1, wherein the first electrode material layer is a transparent conductive oxide layer or a metal layer. 6. The manufacturing method of the light-transmissive thin-film solar cell module as claimed in claim 5, wherein the material of the transparent conductive oxide layer comprises zinc oxide, tin dioxide, indium tin oxide or indium oxide; the material of the metal layer comprises aluminum , silver, copper, molybdenum or their alloys. 7. The method for manufacturing a light-transmissive thin-film solar cell module as claimed in claim 1, wherein the photoelectric conversion layer has a single-layer structure or a stacked-layer structure. 8. The manufacturing method of the light-transmissive thin-film solar cell module as claimed in claim 1, wherein the material of the photoelectric conversion layer comprises amorphous silicon and its alloys, cadmium sulfide, copper indium gallium diselenide, copper indium diselenide, tellurium cadmium chloride or organic materials. 9. The method for manufacturing a light-transmissive thin-film solar cell module as claimed in claim 1, wherein the second electrode material layer is a transparent conductive oxide layer. 10. The manufacturing method of the light-transmissive thin-film solar cell module as claimed in claim 9, wherein the material of the transparent conductive oxide layer comprises zinc oxide, tin dioxide, indium tin oxide or indium oxide. 11. The manufacturing method of the light-transmissive thin-film solar cell module as claimed in claim 9, wherein the method of forming the hole in the opaque substrate comprises a laser cutting method or an etching method. 12. The manufacturing method of the light-transmitting thin film solar cell module according to claim 1, wherein between the multiple comb portions of the second comb-shaped electrode and between the second block-shaped electrodes arranged side by side in the Y direction, multiple A connecting part is connected. 13. A light-transmissive thin-film solar cell module, which has a plurality of cells connected in series on an opaque substrate, with a plurality of holes penetrating through the opaque substrate between the cells, the module comprising: the opaque substrate having the hole; The first electrode is arranged on the opaque substrate, and the first electrode is composed of a first comb-shaped electrode and a plurality of first block electrodes arranged two-dimensionally; The second electrode is arranged above the first electrode, and the second electrode is composed of a second comb-shaped electrode and a plurality of block-shaped second electrodes arranged two-dimensionally, the second comb-shaped electrode and the block-shaped second electrode part of the first bulk electrode, part of the opaque substrate, or the hole are exposed to each other, Wherein the second comb-shaped electrode and the first comb-shaped electrode are arranged in a left-right manner, and the first and second block electrodes are arranged in a parallel displacement manner; and The photoelectric conversion layer is arranged between the first electrode and the second electrode. The photoelectric conversion layer is composed of a plurality of photoelectric conversion material layers arranged two-dimensionally. The photoelectric conversion layer wraps the first electrode around the hole. electrode. 14. The light-transmitting thin film solar cell module as claimed in claim 13, wherein the first electrode is a transparent conductive oxide layer or a metal layer. 15. The light-transmitting thin film solar cell module as claimed in claim 14, wherein the material of the transparent conductive oxide layer comprises zinc oxide, tin dioxide, indium tin oxide or indium oxide; the material of the metal layer comprises aluminum, silver , copper, molybdenum or their alloys. 16. The light-transmissive thin-film solar cell module as claimed in claim 13, wherein the photoelectric conversion layer is a single-layer structure or a stacked-layer structure. 17. The light-transmitting thin film solar cell module as claimed in claim 13, wherein the material of the photoelectric conversion layer comprises amorphous silicon and its alloys, cadmium sulfide, copper indium gallium diselenide, copper indium diselenide, cadmium telluride or organic material. 18. The light-transmitting thin film solar cell module as claimed in claim 13, wherein the second electrode is a transparent conductive oxide layer. 19. The light-transmitting thin film solar cell module as claimed in claim 18, wherein the material of the transparent conductive oxide layer comprises zinc oxide, tin dioxide, indium tin oxide or indium oxide. 20. The light-transmissive thin-film solar cell module according to claim 18, wherein a plurality of connection parts are respectively arranged between the plurality of comb parts of the second comb-shaped electrode and between the second block-shaped electrodes arranged side by side in the Y direction connect. 21. A method for manufacturing a light-transmissive thin-film solar cell module, comprising: forming a first electrode material layer on an opaque substrate; removing part of the first electrode material layer to form a plurality of first Y-direction cutting lines separating the first electrode material layer into a plurality of strip-shaped electrode material layers, and forming two-dimensional lines with the first Y-direction cutting lines A plurality of first X-direction cut windows arranged so that the first electrode material layer becomes a plurality of first window-type electrodes; forming a photoelectric conversion layer to cover the first window electrode and the opaque substrate; removing part of the photoelectric conversion layer to form a plurality of second Y-direction slits relatively parallel to the first Y-direction slits above the first window electrode; forming a second electrode material layer on the photoelectric conversion layer; and removing part of the second electrode material layer and part of the photoelectric conversion layer to form a plurality of third Y-direction cutting lines exposing the surface of the first window-type electrode, and forming a plurality of third Y-direction cutting lines in each of the first X-direction cutting windows A second X-direction cut window exposing the opaque substrate, so that the second electrode material layer becomes a plurality of second window-type electrodes; and The opaque substrate exposed by the second X-direction cutting window is removed to form a plurality of holes in the opaque substrate, and the photoelectric conversion layer wraps the first electrode around the holes. 22. The manufacturing method of the light-transmitting thin-film solar cell module as claimed in claim 21, wherein when removing part of the photoelectric conversion layer to form the second Y-direction scribe line, further comprising: cutting in the first X-direction Multiple third X-direction cutting windows are formed in the window. 23. The manufacturing method of the light-transmitting thin film solar cell module as claimed in claim 21, wherein the first, second, and third Y-direction cutting lines and the first, second, and third X-direction cutting windows are made by using Prepared by laser cutting. 24. The method of manufacturing a light-transmissive thin-film solar cell module as claimed in claim 21, wherein the first electrode material layer is a transparent conductive oxide layer or a metal layer. 25. The manufacturing method of the light-transmissive thin-film solar cell module as claimed in claim 24, wherein the material of the transparent conductive oxide layer comprises zinc oxide, tin dioxide, indium tin oxide or indium oxide; the material of the metal layer comprises Aluminum, silver, copper, molybdenum or their alloys. 26. The method for manufacturing a light-transmissive thin-film solar cell module as claimed in claim 21, wherein the photoelectric conversion layer has a single-layer structure or a stacked-layer structure. 27. The manufacturing method of the light-transmissive thin-film solar cell module as claimed in claim 21, wherein the material of the photoelectric conversion layer comprises amorphous silicon and its alloys, cadmium sulfide, copper indium gallium diselenide, copper indium diselenide, tellurium cadmium chloride or organic materials. 28. The method for manufacturing a light-transmissive thin-film solar cell module as claimed in claim 21, wherein the second electrode material layer is a transparent conductive oxide layer. 29. The manufacturing method of the light-transmissive thin-film solar cell module as claimed in claim 28, wherein the material of the transparent conductive oxide layer comprises zinc oxide, tin dioxide, indium tin oxide or indium oxide. 30. The manufacturing method of the light-transmissive thin-film solar cell module as claimed in claim 21, wherein the method of forming the hole in the opaque substrate comprises a laser cutting method or an etching method. 31. A light-transmissive thin-film solar cell module, which has a plurality of cells connected in series in the X direction and in parallel with each other in the Y direction, and has a plurality of through holes penetrating through the opaque substrate between the cells, the module comprising: The opaque substrate has a plurality of holes; The first electrode is arranged on the opaque substrate, and the first electrode is composed of a plurality of block-shaped first window-shaped electrodes, and the block-shaped first window-shaped electrodes have a plurality of first cutting windows corresponding to the holes ; The second electrode is arranged above the first electrode, and the second electrode is composed of a plurality of block-shaped second window-shaped electrodes, and the block-shaped second window-shaped electrode has a plurality of second cutting windows, which are connected with the hole Corresponding to the first cutting window and jointly forming the through hole, wherein the second window-shaped electrode and the first window-shaped electrode are arranged in a parallel displacement manner; and The photoelectric conversion layer is disposed between the first electrode and the second electrode. The photoelectric conversion layer is composed of a plurality of window-shaped photoelectric conversion material layers. The photoelectric conversion layer covers the first electrode around the hole. 32. The light-transmitting thin film solar cell module as claimed in claim 31, wherein the first electrode is a transparent conductive oxide layer or a metal layer. 33. The light-transmitting thin film solar cell module as claimed in claim 32, wherein the material of the transparent conductive oxide layer comprises zinc oxide, tin dioxide, indium tin oxide or indium oxide; the material of the metal layer comprises aluminum, silver , copper, molybdenum or their alloys. 34. The light-transmissive thin-film solar cell module as claimed in claim 31, wherein the photoelectric conversion layer is a single-layer structure or a stacked-layer structure. 35. The light-transmitting thin film solar cell module as claimed in claim 31, wherein the material of the photoelectric conversion layer comprises amorphous silicon and its alloys, cadmium sulfide, copper indium gallium diselenide, copper indium diselenide, cadmium telluride or organic material. 36. The light-transmissive thin film solar cell module as claimed in claim 31, wherein the second electrode is a transparent conductive oxide layer. 37. The light-transmitting thin film solar cell module as claimed in claim 36, wherein the material of the transparent conductive oxide layer comprises zinc oxide, tin dioxide, indium tin oxide or indium oxide.

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