CN101356017B - dust removal device - Google Patents

Abstract

The invention discloses a dust removing device, which includes: a rotating brush for removing dust attached to a workpiece; a workpiece conveying unit for conveying the workpiece in a direction intersecting the axial direction of the rotating brush; a brush rotating unit for The rotating brush rotates around its axis; and the brush advancing and retreating unit makes the rotating brush advance and retreat along its axis. The dust removal device further includes a motor as a common drive source for the brush rotation unit and the brush advance and retreat unit. The brush rotation unit has a power transmission unit that transmits the power of the motor to the rotary brush as the rotary motion of the rotary brush, and the brush advance and retreat unit has a power transmission unit that converts the power of the motor into the forward and backward motion of the rotary brush and transmits it to the rotary brush.

Description

dust removal device

technical field

The present invention relates to a dust removal device for removing dust adhering to workpieces such as glass substrates.

Background technique

Conventionally, there is known a dust removal device that removes dust adhering to a workpiece by scraping it by bringing a rotary brush into contact with the conveyed workpiece (JP-A-2003-334499 and JP-A-2005-211722) . The dust removal device described in Japanese Patent Laid-Open No. 2005-211722 makes the rotating brush rotate around its axis by a special rotation motor, and at the same time makes the rotating brush advance and retreat along its axis by a special motor for advancing and retreating, thereby improving the effect of dust removal. A slider crank mechanism is used as a mechanism for advancing and retreating the rotating brush.

However, in the conventional dust removal device, the installation space of the slider crank mechanism is large, and it is difficult to achieve miniaturization. Furthermore, since two dedicated motors are provided for the rotation and forward and backward movement of the rotary brush, the overall size of the device increases and the cost increases.

Contents of the invention

An object of the present invention is to provide a dust removal device capable of efficiently removing dust, and capable of downsizing the entire device and reducing costs.

The dust removal device of the present invention includes: a rotating brush for removing dust adhering to a workpiece; a workpiece conveying unit for conveying the workpiece in a direction intersecting the axial direction of the rotating brush; The workpiece conveying unit is synchronized to make the rotating brush rotate around its axis; the brush advance and retreat unit is synchronized with the workpiece conveying unit to make the rotating brush advance and retreat along its axis; and the motor acts as the brush to rotate unit and the brush advance and retreat unit common drive source. Wherein, the brush rotating unit has a power transmission unit that transmits the power of the motor to the rotating brush as the rotating motion of the rotating brush, and the brush advancing and retreating unit has a function of converting the power of the motor into the rotating brush. The forward and backward movement of the brush is transmitted to the power transmission unit of the rotating brush.

According to this configuration, since one motor is used for both the rotation and the forward and backward movement of the rotary brush, it is possible to reduce the size of the entire device and reduce the cost compared to the case of separately providing dedicated motors.

Here, examples of workpiece types include printed wiring boards, liquid crystal glass substrates, flexible substrates, ceramic substrates, plastic plates, liquid crystal display panels, vacuum disks, lenses, light guide plates, films, and paper. The outer shape of the workpiece may be a rectangle, or a disc shape such as a wafer (described later).

Preferably, the power transmission unit of the brush advancing and retreating unit has a cam mechanism, and the cam mechanism includes: a cam follower; and a cylindrical cam having a cam portion guiding the cam follower, while passing the The power of the electric motor is used to rotate. The cylindrical cam is connected to the rotating brush so as to rotate coaxially with the rotating brush and move forward and backward. The cam follower is fixed in a stationary position such that when the motor rotates, it converts the rotation of the stud cam into back and forth motion of the stud cam while allowing the rotation of the stud cam.

According to this configuration, when the motor rotates, the rotary brush and the columnar cam rotate, and the columnar cam advances and retreats integrally with the rotary brush via the cam follower. Thus, with such a simple mechanism (for example, a cam mechanism using a columnar cam), it is possible to perform rotation and advance and retreat of the rotary brush with a single motor. Also, the cam portion may be a groove formed on the peripheral surface of the cylindrical cam, or may be a protrusion attached to the peripheral surface of the cylindrical cam.

Preferably, the dust removing device of the present invention further includes: a base for fixing the cam follower at the stationary position; and a rotating shaft for connecting the cylindrical cam with the rotating brush, And it rotates and advances and retreats integrally with the cylindrical cam and the rotating brush. The rotating shaft is inserted through the inside of the cylindrical cam and fixed to the inside of the cylindrical cam, and the part of the rotating shaft protruding outward in the axial direction from the inside of the cylindrical cam is rotatable and can advance and retreat. supported on the base.

According to such a configuration, by effectively utilizing the base that fixes the cam follower, the rotating shaft can be rotatably supported in a forward-backward manner. Also, the cylindrical cam can be rotatably supported by the supported rotation shaft.

In this case, it is preferable that the rotating shaft includes two rotating shafts arranged coaxially with each other, and the two rotating shafts are inserted through the inside of the cylindrical cam and fixed to the inside of the cylindrical cam.

According to this configuration, since the rotating shaft includes two rotating shafts, it is possible to easily assemble the rotating shaft, the cylindrical cam, and the rotating brush. Moreover, since the two rotating shafts are fixed inside the cylindrical cam, the cylindrical cam can be effectively used as a coupling for connecting the two rotating shafts.

Preferably, the cam follower has a pin shape. Preferably, the cam portion is set such that the number of rotations of the cylindrical cam is the same as the number of amplitudes of the cylindrical cam in the forward and backward direction. Preferably, the stud cam is made of plastic and the cam follower is made of metal. Alternatively, the stud cam and said cam follower are made of metal.

Preferably, the rotating brush is configured to perform a reciprocating motion in a forward and backward direction once it rotates. Preferably, the rotating brush includes a first end and a second end, wherein the power for the rotating motion is input from the power transmission unit of the brush rotating unit to the first end for the forward and backward movement The power is input from the power transmission unit of the brush advancing and retreating unit to the second end. Preferably, the first end and the second end are located at the axis of the rotating brush. Preferably, the electric motor has an output shaft coaxial with the rotating brush. Preferably, the output shaft is connected to the shaft center of the rotating brush through a power transmission unit of the brush rotating unit. Alternatively, the power transmission unit of the brush rotation unit includes: a main shaft connected to the output shaft, a spline protrusion integrally formed with the main shaft, a spline shaft fitted into the spline protrusion, and a A coupling for connecting the splined shaft with the rotating brush.

Preferably, the workpiece conveying unit conveys the workpiece in a direction perpendicular to an axial direction of the rotating brush. Preferably, the rotating brush is configured to be able to contact the workpiece. Preferably, the rotating brush has an implanted portion composed of conductive fibers, and the implanted portion is in rotational contact with the surface of the workpiece. Preferably, the dust removing device of the present invention further includes a height adjustment mechanism configured to adjust the height of the rotating brush according to the thickness of the workpiece.

According to another preferred embodiment of the present invention, the power transmission unit of the brush advancing and retreating unit has a cam mechanism. The cam mechanism includes: a cam follower; and a cylindrical cam having a cam portion guiding the cam follower while being rotated by power of the motor. The axial direction of the columnar cam is set parallel to the axial direction of the rotating brush. The cam follower is connected to the rotating brush so as to advance and retreat integrally with the rotating brush when the motor rotates.

According to this configuration, when the motor rotates, the rotary brush and the cylindrical cam rotate, and the cam follower (driven node) reciprocates integrally with the rotary brush and parallel to the rotary brush (forward and backward motion) by the rotation of the cylindrical cam. ). Thus, with such a simple mechanism (for example, a cam mechanism using a columnar cam), it is possible to perform rotation and advance and retreat of the rotary brush with a single motor. Also, the cam portion may be a groove formed on the peripheral surface of the cylindrical cam, or may be a protrusion attached to the peripheral surface of the cylindrical cam.

According to another aspect of reaching the present invention, the dust removing device of the present invention can be applied not only to workpieces being conveyed but also to workpieces being rotated.

That is, the dust removal device includes: a rotating brush for removing dust attached to the surface of a disc-shaped workpiece; a workpiece rotating unit for rotating the workpiece around its axis; a brush rotating unit for synchronizing with the workpiece rotating unit. , to make the rotating brush rotate around its axis; the brush advancing and retreating unit, synchronized with the workpiece rotating unit, makes the rotating brush advance and retreat along the diameter direction of the workpiece; and a motor, as the brush rotating unit and the Common drive source for brush advance and retreat units. The brush rotating unit has a power transmission unit that transmits the power of the motor to the rotating brush as a rotating motion of the rotating brush. The brush advancing and retreating unit has a power transmission unit that converts the power of the motor into the advancing and retreating motion of the rotating brush and transmits it to the rotating brush.

Furthermore, examples of the disk-shaped workpiece include disk media such as wafers and CDs (compact disks).

According to the dust removal device of the present invention, dust can be efficiently removed, and the entire device can be downsized and cost can be reduced.

Description of drawings

FIG. 1 is a front view of a dust removing device according to a first embodiment;

Fig. 2 is a plan view of the dust removing device shown in Fig. 1;

3 is an enlarged schematic cross-sectional view of a main part of the dust removing device shown in FIG. 1;

Fig. 4 is the same schematic sectional view as Fig. 3, (a) is the view of the initial state, (b) is the view from the initial state to the motor rotation 1/4, (c) is the view from the initial state to the motor rotation 2 The view at /4, (d) is the view from the initial state to when the motor rotates 3/4;

5 is an enlarged schematic sectional view of a main part of a dust removing device according to a second embodiment; and

6 is an enlarged schematic cross-sectional view of a main part of a dust removing device according to a third embodiment.

Detailed ways

Hereinafter, a dust removing device according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings. This dust removal device removes waste, dust, dust, and the like adhering to the surface (upper surface) of a workpiece (various substrates) with a brush. Hereinafter, waste, dust, and dust will be collectively referred to as dust for description.

first embodiment

FIG. 1 is a front view of the main part of the dust removal device, and FIG. 2 is a plan view of the main part of the dust removal device.

The dust removal device 1 has a lower base 2 on a stand (not shown), and a workpiece processing area for removing dust on a workpiece W (substrate) is formed on the upper side of the lower base 2 .

The types of workpiece W include, for example, printed wiring boards, liquid crystal glass substrates, flexible substrates, ceramic substrates, plastic plates, liquid crystal display panels, vacuum disks, lenses, light guide plates, films, and paper. Here, a workpiece W having a rectangular shape is used.

On the lower base 2, there are provided a first support frame 3 and a second support frame 4 spaced apart left and right. The upper base 5 extends on the upper part between the first support frame 3 and the second support frame 4 . The upper base 5 has a main body base 51 extending in the left-right direction. A right vertical base 52 , a central vertical base 53 , and a left vertical base 54 hang down from below the main body base 51 . The right vertical base 52 and the left vertical base 54 can slide up and down relative to the first support frame 3 and the second support frame 4 .

The first support frame 3 and the second support frame 4 respectively have height adjustment mechanisms 6 and 6 mounted on the upper ends. The height adjustment mechanisms 6 and 6 make the upper base 5 move up and down through the right vertical base 52 and the left vertical base 54 . In this manner, according to the thickness of the workpiece W, the vertical positions of various components (for example, the rotating brush 11 described later) assembled on the upper base 5 can be adjusted.

Disposed in the workpiece processing area are: a rotating brush 11 for removing dust attached to the workpiece W; a workpiece conveying unit 12 for conveying the workpiece W in one direction; a brush rotating unit 13 synchronized with the workpiece conveying unit 12 for The rotating brush 11 is rotated around its axis; and the brush advancing and retreating unit 14 is synchronized with the workpiece conveying unit 12 for advancing and retreating the rotating brush 11 along its axial direction. The brush rotation unit 13 and the brush advance and retreat unit 14 have the motor 15 as a common drive source.

The axial direction of the rotating brush 11 (that is, the forward and backward direction of the rotating brush 11 ) is perpendicular to the conveyance direction of the workpiece W. As shown in FIG. However, the two directions can also intersect at angles other than 90 degrees.

The dust removal operation is performed by the dust removal device 1 in which the rotating brush 11 is moved forward and backward in the axial direction while rotating a part of the conveyed workpiece W from above. In this way, dust is removed from the entire surface of the workpiece W. As shown in FIG. Also, during the dust removal action, air is blown to the workpiece W with a blower (not shown), and the blown air is suctioned and discharged out of the workpiece processing area together with the dust.

The rotary brush 11 is constituted by a so-called conductive brush, and conductive fibers having a diameter of, for example, several tens of μm are implanted on the peripheral surface of a substantially cylindrical brush body. The implanted portion of the rotating brush 11 comes into rotational contact with the surface of the workpiece W, scrapes off dust attached to the workpiece W, and removes static electricity from the surface of the workpiece W at the same time.

The height (gap) of the rotating brush 11 is adjusted by the above-mentioned height adjustment mechanisms 6 and 6, and can cope with workpieces W of different thicknesses. Further, the rotating brush 11 is extended in the left-right direction so as to be able to cope with a workpiece W having a wide width. The rotational power of the brush rotating unit 13 is input to the protruding right end 41 of the rotating brush 11 , and the reciprocating power of the brush advancing and retreating unit 14 is input to the protruding left end 42 of the rotating brush 11 . The right end portion 41 and the left end portion 42 are located at the axis of the rotary brush 11 .

The workpiece conveying unit 12 has a pair of left and right guides 34 , 34 for guiding both side surfaces of the workpiece W to be conveyed. The workpiece conveyance unit 12 includes: a pair of belt conveyors (not shown) for supporting the lower portions of both ends of the workpiece W while conveying the workpiece W; and a drive motor for driving the respective belt conveyors. A pair of belt conveyors conveys the workpiece W facing the upper rotating brush 11 such that the workpiece W comes into contact with the rotating brush 11 while passing through the rotating brush.

The workpiece transport unit 12 has a workpiece width adjustment mechanism composed of a pair of front and rear rails 36 , 36 provided on the lower base 2 . With the workpiece width adjustment mechanism, the pair of belt conveyors can convey various workpieces W having different widths while guiding the workpiece W by the pair of guides 34 , 34 .

The motor 15 is constituted by a DC motor or a stepping motor with a commutator or brushes. The output shaft 61 of the motor 15 is coaxial with the rotating brush 11 and connected to the axis of the rotating brush 11 through a power transmission unit 70 described later. During the dust removal operation, the motor 15 rotates synchronously with the driving motor of the workpiece conveyance unit 12 .

The motor 15 is mounted on a bracket 63 , and the bracket 63 is fixed to the right vertical base 52 of the upper base 5 in such a manner as to pass through the first support frame 3 . Therefore, when the upper base 5 moves up and down to adjust the gap, the motor 15 moves up and down integrally with the rotating brush 11 .

FIG. 3 is an enlarged schematic cross-sectional view of a main part of the dust removing device 1 shown in FIG. 1 .

The brush rotating unit 13 has a power transmission unit 70 for transmitting the power of the motor 15 to the rotating brush 11 as the rotating motion of the rotating brush 11 .

The brush advancing and retreating unit 14 has a power transmission unit 80 for converting the power of the motor 15 into the advancing and retreating motion of the rotating brush 11 and transmitting it to the rotating brush 11 .

The power transmission unit 70 includes a main shaft 72 connected to the output shaft 61 of the electric motor 15 , a spline protrusion 73 integrally formed with the main shaft 72 , and a spline shaft 74 fitted on the spline protrusion 73 . The spline protrusion 73 is rotatably supported by the right vertical base 52 of the upper base 5 through a bearing 76 . The spline shaft 74 is connected to the right end portion 41 of the rotary brush 11 through a coupling 77 .

The square spline formed by the spline protrusion 73 and the spline shaft 74 is integrally rotated by the rotation of the motor 15 . The rotary brush 11 (transmitted with the rotational force of the motor 15 ) is rotated by this square spline, and allows the rotary brush 11 to advance and retreat in the axial direction during the rotation. Of course, ball splines can also be used instead of square splines.

The power transmission unit 80 has a cam mechanism including a cylindrical cam 81 and a cam follower 82 . A cam groove (cam portion) 83 that guides the cam follower 82 is formed on the peripheral surface of the cylindrical cam 81 . Also, instead of the cam groove 83 , a protrusion that guides the cam follower 82 may be provided on the peripheral surface of the cylindrical cam 81 .

The cylindrical cam 81 is arranged coaxially with the rotating brush 11 . The rotary shaft 91 is inserted into the shaft center of the cylindrical cam 81 . The rotary shaft 91 includes two rotary shafts 91 a , 91 b arranged coaxially with each other, and the two rotary shafts 91 a , 91 b are fixed inside the cylindrical cam 81 . That is, the cylindrical cam 81 functions as a coupling, and connects the two rotation shafts 91a, 91b to each other.

One end of the rotating shaft 91 a is inserted into the columnar cam 81 from the right side and is fixed to the columnar cam 81 , and the other end is connected to the left end of the rotary brush 11 through the coupling 92 . Further, the middle portion of the rotary shaft 91 a extending from the inside of the columnar cam 81 to the outside in the axial direction is rotatably supported by the central vertical base 53 through a sleeve 93 so as to advance and retreat.

One end of the rotating shaft 91 b is inserted into the cylindrical cam 81 from the left side and fixed to the cylindrical cam 81 . Further, the portion on the other end side extending from the inside of the columnar cam 81 to the outside in the axial direction is rotatably supported by the left vertical base 54 through a bush 94 so as to be able to advance and retreat. Furthermore, the other end of the rotating shaft 91 b inserted through the boss 94 is configured to be able to pass through the second support frame 4 .

With such a structure, the rotation shaft 91 (rotation shaft 91a, 91b) connects the cylindrical cam 81 and the rotary brush 11, and rotates integrally with the cylindrical cam 81 and the rotary brush 11, and advances and retreats. As in the present embodiment, the rotating shaft 91 is composed of two rotating shafts 91a, 91b, so that the rotating shaft 91, the columnar cam 81, and the rotating brush 11 are easily assembled.

Specifically, in the case where the columnar cam 81 is provided between the central vertical base 53 and the left vertical base 54, and the rotating shaft 91 is supported by these vertical bases 53, 54 via bushings 93, 94, operability can be improved. Furthermore, operability when the rotating brush 11 and the rotating shaft 91 are connected by the coupling 92 can be improved. Furthermore, the center vertical base 53 and the left vertical base 54 function as bush holders for holding the bushes 93 , 94 and are formed integrally or separately from the main body base 51 .

The cam follower 82 has a pin shape. The cam follower 82 is attached to the attachment 101 fixed to the lower surface of the main body base 51 so as to face downward. In this way, the cam follower 82 is fixed in a stationary position so that the cam follower 82 does not move when the motor 15 rotates. When the motor 15 rotates, the cam follower 82 is guided along the cam groove 83 , converting the rotation of the cylindrical cam 81 into a forward and backward motion of the cylindrical cam 81 while allowing the rotation of the cylindrical cam 81 .

That is, when the motor 15 rotates, the cylindrical cam 81 and the rotary brush 11 integrally advance and retreat in the axial direction and rotate through the cam follower 82 positioned at a fixed position. Moreover, the cam groove 83 of this embodiment is set so that the number of rotations of the columnar cam 81 is the same as the number of amplitudes (number of reciprocations) in the forward and backward direction, and the columnar cam 81 and the rotating brush 11 perform one reciprocating motion in the forward and backward direction once they rotate.

Here, hard resin or various metals can be used as the materials of the columnar cam 81 and the cam follower 82 . For example, both the cylindrical cam 81 and the cam follower 82 can be made of plastic such as nylon, and one of them can be made of metal such as stainless steel. When plastic is used in the material, the operating sound of the device can be reduced. However, from the viewpoint of suppressing wear of the cam groove 83, both the cylindrical cam 81 and the cam follower 82 are preferably formed of stainless steel.

Fig. 4 is the same schematic sectional view as Fig. 3, showing the forward and backward movement of the rotary brush 11 over time.

In the initial state shown in FIG. 4( a ), when the motor 15 rotates 1/4, the rotating brush 11 and the columnar cam 81 advance leftward while rotating, and move to the position shown in FIG. 4( b ). When the motor 15 continues to rotate by 1/4, the rotating brush 11 and the columnar cam 81 move forward to the left to the maximum while rotating, and move to the position shown in FIG. 4( c ). Then, when the motor 15 continued to rotate 1/2, the rotating brush 11 and the columnar cam 81 began to advance to the right while rotating, and after the position shown in Fig. Return to the position shown in Figure 4(a).

As described above, according to the dust removal device 1 of this embodiment, since the rotating brush 11 is in rotational contact with the surface of the conveyed workpiece W, and the rotating brush 11 advances and retreats along its axial direction, it is possible to better remove dust attached to the workpiece. W dust. In particular, since the number of advances and retreats (the number of reciprocations) of the rotating brush 11 is the same as the number of rotations thereof, dust can be effectively removed.

Furthermore, since the rotation and advance and retreat of the rotating brush 11 can be performed with one motor 15, the number of motors can be reduced and the cost can be reduced compared with the case where dedicated motors for rotation and advance and retreat are provided. In addition, since the cam mechanism having the columnar cam 81 is adopted, a simple mechanism for advancing and retreating the rotating brush 11 can be realized, and the reduction of the installation space and the miniaturization of the entire device can be realized.

Furthermore, instead of the structure for conveying the workpiece W of the present embodiment, the workpiece W may be set at a predetermined position in a stationary state, and the rotating brush 11 may be moved along the workpiece W while advancing and retreating relative to the workpiece W. The forward and backward direction moves vertically. In this case, for example, a mobile base that integrally supports the brush rotation unit 13 and the brush advance and retreat unit 14 may be provided and synchronized with the brush rotation unit 13 and the brush advance and retreat unit 14, and the mobile base may be driven in one direction by a ball screw or the like (the conveyance direction of the above-mentioned workpiece W) moves.

second embodiment

Next, referring to FIG. 5, a dust removing device 1 according to a second embodiment of the present invention will be described focusing on differences from the first embodiment. The difference from the first embodiment is that the power transmission unit 80 of the brush advancing and retreating unit 14 is changed. In addition, the rotating brush 11 , the workpiece conveying unit 12 , the brush rotating unit 13 , and the motor 15 are the same as those of the first embodiment, and thus the same reference numerals as those of the first embodiment are assigned and descriptions thereof are omitted.

The power transmission unit 80 has a cam mechanism including a cylindrical cam 121 and a cam follower 122 . A cam groove (cam portion) 123 that guides the cam follower 122 is formed on the peripheral surface of the cylindrical cam 121 . Also, instead of the cam groove 123 , a protrusion that guides the cam follower 122 may be provided on the peripheral surface of the cylindrical cam 121 .

The axial direction of the cylindrical cam 121 is parallel to the axial direction of the rotating brush 11 . The support shaft 130 is inserted into the shaft center of the cylindrical cam 121 . The support shaft 130 is rotatably held on the lower side portions of the central vertical base 53 and the left vertical base 54 . A gear 140 for inputting power by rotating the support shaft 130 is fixed on one end of the support shaft 130 .

The drive gear 141 is fixed to the output shaft 61 of the motor 15 . The driving gear 141 transmits power to the gear 140 meshing with the gear 146 through, for example, a gear train composed of three gears 142 , 143 , 144 , a transmission shaft 145 , and a gear 146 . With such a structure, the cylindrical cam 121 is rotated by the power of the motor 15 .

The cam follower 122 is mounted on the forward and backward shaft 150 through the mount 101 . The advancing and retreating shaft 150 is placed coaxially with the rotating brush 11 and extends in left and right directions. One end side of the advancing and retreating shaft 150 is supported on the left vertical base 54 through a bushing 94 so as to be able to advance and retreat. The other end of the advancing and retreating shaft 150 is connected to the joint part 160 .

The joint portion 160 coaxially connects the advancing/retracting shaft 150 and the rotating shaft 170 , and is configured to block transmission of rotational force from the rotating shaft 170 to the advancing/retracting shaft 150 . That is, even if the rotating shaft 170 rotates, the advancing and retreating shaft 150 does not rotate. On the other hand, when the advance and retreat shaft 150 advances and retreats in the left and right direction, the rotation shaft 170 advances and retreats in the left and right direction integrally with the joint part 160 and the advance and retreat shaft 150 .

One end of the rotating shaft 170 is connected to the joint part 160 , and the other end is connected to the coupling 92 . The left end portion 42 of the rotary brush 11 is connected to a coupling 92 . Moreover, the middle portion of the rotating shaft 170 is rotatably supported by the central vertical base 53 through the bushing 93 so as to advance and retreat.

With the above structure, when the motor 15 rotates, the rotating brush 11, the rotating shaft 170, and the cylindrical cam 121 rotate. At this time, by guiding the cam follower 122 along the cam groove 123, the cam follower 122 and the advance and retreat shaft 150 advance and retreat in the left and right direction. This forward and backward movement is transmitted to the rotary brush 11 through the joint portion 160, the rotating shaft 170, and the like. Therefore, when the motor 15 rotates, the rotary brush 11 advances and retreats integrally with the cam follower 122 while rotating.

Therefore, the dust removing device 1 of the present embodiment can produce the same operations and effects as those of the first embodiment. In particular, according to this embodiment, by setting the gear ratios of various gears (140, 141, 142, 143, 144, 146), the number of rotations of the rotating brush 11 and the number of amplitudes in the forward and backward direction (number of reciprocations) can be changed. , and both can be set to different numbers. Also, the materials of the columnar cam 121 and the cam follower 122 may be the same as those of the first embodiment.

third embodiment

Referring to FIG. 6, a dust removing device 1 according to a third embodiment of the present invention will be described focusing on differences from the first embodiment. The outer shape of the workpiece W used in this embodiment is a disk, for example, a silicon semiconductor wafer or a disk medium such as a CD (Compact Disk). Therefore, instead of the workpiece conveying unit 12 of the first embodiment, the third embodiment has a workpiece rotation unit 171 that rotates the workpiece W around its axis 173 . Also, the structures other than the workpiece W and the workpiece rotating unit 171 are the same as those of the first embodiment, so the same reference numerals as those of the first embodiment are assigned and descriptions thereof are omitted.

The workpiece rotation unit 171 has a rotation shaft (not shown) provided coaxially with the central axis 173 of the workpiece W, and a rotation table (not shown) mounted on the front end of the rotation shaft, on which the workpiece W can be mounted. Furthermore, the rotating brush 11 is provided above the workpiece rotating unit 171 , and the above-mentioned brush rotating unit 13 and the brush advancing and retreating unit 14 are connected to the rotating brush 11 . Furthermore, the brush rotation unit 13 and the brush advance and retreat unit 14 have the motor 15 as a common drive source.

In the dust removal operation performed by the dust removal device 1 of this embodiment, the motor 15 rotates in synchronization with the rotation of the workpiece W by the workpiece rotation unit 171 . In this way, with respect to the rotating workpiece W, the rotating brush 11 advances and retreats in the axial direction while rotating around the axis. Therefore, this embodiment can produce the same actions and effects as those of the first embodiment.

Furthermore, in each of the above-described embodiments, although the rotating brush 11 is brought into direct contact with the surface of the workpiece W, even when the rotating brush 11 is not in contact with the surface of the workpiece W, that is, when the rotating brush 11 and the surface of the workpiece W Even when there is a slight gap between them, the dust on the surface of the workpiece W can be removed by the rotating brush 11 .

Claims (19)

1. dust remover comprises:

Rotating brush is used to remove the dust that invests workpiece;

The work transporting unit is used for the described workpiece of direction conveyance that intersects along the direction of principal axis with described rotating brush;

The brush rotary unit, with described work transporting units synchronization, making described rotating brush is the center rotation with its axle center;

Brush advance and retreat unit with described work transporting units synchronization, makes described rotating brush along its direction of principal axis advance and retreat; And

Motor, as the common drive source of described brush rotary unit and described brush advance and retreat unit,

Wherein, described brush rotary unit has gives the power transfer unit that rotatablely move of described rotating brush as described rotating brush with the transmission of power of described motor,

The power conversion that described brush advance and retreat unit has described motor is the advance and retreat motion of described rotating brush and the power transfer unit that passes to described rotating brush,

The power transfer unit of described brush advance and retreat unit has cam mechanism,

Described cam mechanism comprises: cam follower; And columnar cam, described columnar cam has the cam part of the described cam follower of guiding, and the power by described motor is rotated simultaneously,

Described columnar cam is connected in described rotating brush in the mode with coaxial integratedly rotation of described rotating brush and advance and retreat,

Described cam follower is fixed in motionless position, makes when described motor rotates, and the rotation of described columnar cam is converted to the advance and retreat motion of described columnar cam when allowing described columnar cam rotation.

2. dust remover according to claim 1 also comprises:

Base is used for described cam follower is fixed on described motionless position; And

Rotating shaft is used for described columnar cam is connected with described rotating brush, and rotates integratedly with described columnar cam and described rotating brush and advance and retreat,

Wherein, described rotating shaft is inserted the inside of logical described columnar cam and is fixed in the inside of described columnar cam, and the part that axially give prominence to laterally the inside from described columnar cam of described rotating shaft rotatably also can be supported on the described base with advancing and retreat.

3. dust remover according to claim 2, wherein, described rotating shaft comprises two rotating shafts of mutual coaxial setting, and described two rotating shafts are inserted inside that leads to described columnar cam and the inside of being fixed in described columnar cam.

4. dust remover according to claim 1, wherein, described cam follower has the pin shape.

5. dust remover according to claim 1, wherein, described cam part is configured to make that the revolution of described columnar cam is identical at the amplitude number of advance and retreat direction with described columnar cam.

6. dust remover according to claim 1, wherein, described columnar cam is made of plastics, and described cam follower is made of metal.

7. dust remover according to claim 1, wherein, described columnar cam and described cam follower are made of metal.

8. dust remover according to claim 1, wherein, described rotating brush is configured to rotate the reciprocating motion of direction of once just once advancing and retreat.

9. dust remover according to claim 1, wherein, described rotating brush comprises first end and the second end, wherein, the power that is used to rotatablely move is input to described first end by the power transfer unit from described brush rotary unit, and the power that moves that is used to advance and retreat is input to described the second end by the power transfer unit from described brush advance and retreat unit.

10. dust remover according to claim 9, wherein, described first end and described the second end are positioned at the axle center of described rotating brush.

11. dust remover according to claim 1, wherein, described motor has the output shaft coaxial with described rotating brush.

12. dust remover according to claim 11, wherein, described output shaft is connected in the axle center of described rotating brush by the power transfer unit of described brush rotary unit.

13. dust remover according to claim 11, wherein, the power transfer unit of described brush rotary unit comprises: the splined projections that is connected in the main shaft of described output shaft, forms with described integrated spindle axis, be embedded in the splined shaft of described splined projections and the shaft coupling that described splined shaft is connected with described rotating brush.

14. dust remover according to claim 1, wherein, described work transporting unit is along the direction conveyance described workpiece vertical with the direction of principal axis of described rotating brush.

15. dust remover according to claim 1, wherein, described rotating brush is constituted as and can contacts with described workpiece.

16. dust remover according to claim 1, wherein, described rotating brush has the implant part that is made of conducting fibre, and described implant part contacts with the surface rotation of described workpiece.

17. dust remover according to claim 1 also comprises Height Adjustment mechanism, described Height Adjustment mechanism is configured to adjust according to the thickness of described workpiece the height of described rotating brush.

18. dust remover according to claim 1, wherein, described workpiece is at least a in printing distributing board, liquid crystal glass base, flexible base, board, ceramic substrate, plastic plate, display panels, vacuum pan, lens, LGP and the film.

19. dust remover according to claim 1, wherein, the monnolithic case of described workpiece is a rectangle.

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