CN101356017A - dust removal device - Google Patents
dust removal device Download PDFInfo
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- CN101356017A CN101356017A CNA2006800504562A CN200680050456A CN101356017A CN 101356017 A CN101356017 A CN 101356017A CN A2006800504562 A CNA2006800504562 A CN A2006800504562A CN 200680050456 A CN200680050456 A CN 200680050456A CN 101356017 A CN101356017 A CN 101356017A
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- brush
- cam
- rotating brush
- retreat
- advance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
- B08B1/34—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members rotating about an axis parallel to the surface
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/26—Cleaning or polishing of the conductive pattern
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
- H05K2203/0257—Brushing, e.g. cleaning the conductive pattern by brushing or wiping
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
本发明公开了一种灰尘除去装置，其包括：旋转刷，用于除去附于工件的灰尘；工件搬送单元，用于沿着与旋转刷的轴方向交叉的方向搬送工件；刷子旋转单元，使旋转刷以其轴心为中心旋转；以及刷子进退单元，使旋转刷沿其轴方向进退。灰尘除去装置还包括作为刷子旋转单元和刷子进退单元共同的驱动源的电动机。刷子旋转单元具有将电动机的动力传递给旋转刷并作为旋转刷的旋转运动的动力传递单元，刷子进退单元具有将电动机的动力转换为旋转刷的进退运动并传递给旋转刷的动力传递单元。
The invention discloses a dust removing device, which includes: a rotating brush for removing dust attached to a workpiece; a workpiece conveying unit for conveying the workpiece in a direction intersecting the axial direction of the rotating brush; a brush rotating unit for The rotating brush rotates around its axis; and the brush advancing and retreating unit makes the rotating brush advance and retreat along its axis. The dust removal device further includes a motor as a common drive source for the brush rotation unit and the brush advance and retreat unit. The brush rotation unit has a power transmission unit that transmits the power of the motor to the rotary brush as the rotary motion of the rotary brush, and the brush advance and retreat unit has a power transmission unit that converts the power of the motor into the forward and backward motion of the rotary brush and transmits it to the rotary brush.
Description
Technical field
The present invention relates to the dust remover that a kind of dust that will invest workpiece such as glass substrate is removed.
Background technology
At present, known have a kind of dust remover, its by with rotating brush with contacted by the workpiece of conveyance, remove the dust (spy opens the 2003-334499 communique and the spy opens the 2005-211722 communique) that invests workpiece in the mode of swiping.The spy opens the dust remover of putting down in writing in the 2005-211722 communique makes rotating brush by rotating definite-purpose motor around its axle center rotation, rotating brush is advanced and retreat along its direction of principal axis by the definite-purpose motor of advancing and retreat, thereby improve the effect of removing of dust.As the mechanism that makes the rotating brush advance and retreat, use slider crank mechanism.
But, in existing dust remover, slider crank mechanism that the space is set is bigger, be difficult to realize miniaturization.And owing to be provided with the rotation that is used for rotating brush and two definite-purpose motors of advance and retreat, thereby making that device is whole maximizes, and makes cost increase.
Summary of the invention
The object of the present invention is to provide a kind of dust remover, it can carry out removing of dust effectively, and can make the device integral miniaturization and cost is reduced.
Dust remover of the present invention comprises: rotating brush is used to remove the dust that invests workpiece; The work transporting unit is used for the described workpiece of direction conveyance that intersects along the direction of principal axis with described rotating brush; The brush rotary unit, with described work transporting units synchronization, making described rotating brush is the center rotation with its axle center; Brush advance and retreat unit with described work transporting units synchronization, makes described rotating brush along its direction of principal axis advance and retreat; And motor, as the common drive source of described brush rotary unit and described brush advance and retreat unit.Wherein, described brush rotary unit has gives the power transfer unit that rotatablely move of described rotating brush as described rotating brush with the transmission of power of described motor, and the power conversion that described brush advance and retreat unit has described motor is the advance and retreat motion of described rotating brush and the power transfer unit that passes to described rotating brush.
According to this formation, because the rotation of rotating brush and advance and retreat are all used a motor, therefore compare with the situation that special-purpose motor is set respectively, can make the device integral miniaturization and cost is reduced.
Here, the kind as workpiece for example comprises: printing distributing board, liquid crystal glass base, flexible base, board, ceramic substrate, plastic plate, display panels, vacuum pan, lens, LGP, film and paper etc.The outer shape of workpiece can be a rectangle, also can be the discoid of for example wafer (waiting a moment description).
Preferably, the power transfer unit of described brush advance and retreat unit has cam mechanism, and described cam mechanism comprises: cam follower; And columnar cam, described columnar cam has the cam part of the described cam follower of guiding, and the power by described motor is rotated simultaneously.Described columnar cam is connected in described rotating brush in the mode with coaxial integratedly rotation of described rotating brush and advance and retreat.Described cam follower is fixed in motionless position, makes when described motor rotates, and the rotation of described columnar cam is converted to the advance and retreat motion of described columnar cam when allowing described columnar cam rotation.
According to this formation, when motor rotates, rotating brush and columnar cam rotation, columnar cam is advanced and retreat integratedly by cam follower and rotating brush simultaneously.Like this, by this simple mechanism (for example using the cam mechanism of columnar cam), can utilize single motor to be rotated the rotation and the advance and retreat of brush.And cam part can be formed in the groove on the circumferential surface of columnar cam, also can be the projection that invests the circumferential surface of columnar cam.
Preferably, dust remover of the present invention also comprises: base is used for described cam follower is fixed on described motionless position; And rotating shaft, be used for described columnar cam is connected with described rotating brush, and rotate integratedly with described columnar cam and described rotating brush and advance and retreat.Described rotating shaft is inserted the inside of logical described columnar cam and is fixed in the inside of described columnar cam, and the part that axially give prominence to laterally the inside from described columnar cam of described rotating shaft rotatably also can be supported on the described base with advancing and retreat.
According to this formation, by effectively utilizing the base of stationary cam driven member, the ground supporting rotating shaft of can rotatably and can advancing and retreat.And, by supported rotating shaft, support drum cam rotatably.
In this case, preferably described rotating shaft comprises two rotating shafts of mutual coaxial setting, and described two rotating shafts are inserted inside that leads to described columnar cam and the inside of being fixed in described columnar cam.
According to this formation,, thereby can assemble rotating shaft, columnar cam and rotating brush easily because rotating shaft comprises two rotating shafts.And, because two rotating shafts are fixed in the inside of columnar cam, thereby can effectively utilize columnar cam as the shaft coupling that connects two rotating shafts.
Preferably, cam follower has the pin shape.Preferably, cam part is configured to make that the rotation number of described columnar cam is identical at the amplitude number of advance and retreat direction with described columnar cam.Preferably, columnar cam is made of plastics, and described cam follower is made of metal.Perhaps, columnar cam and described cam follower are made of metal.
Preferably, described rotating brush is configured to rotate the reciprocating motion of direction of once just once advancing and retreat.Preferably, described rotating brush comprises first end and the second end, wherein, the power that is used to rotatablely move is input to described first end by the power transfer unit from described brush rotary unit, and the power that moves that is used to advance and retreat is input to described the second end by the power transfer unit from described brush advance and retreat unit.Preferably, described first end and described the second end are positioned at the axle center of described rotating brush.Preferably, described motor has the output shaft coaxial with described rotating brush.Preferably, described output shaft is connected in the axle center of described rotating brush by the power transfer unit of described brush rotary unit.Perhaps, the power transfer unit of described brush rotary unit comprises: the splined projections that is connected in the main shaft of described output shaft, forms with described integrated spindle axis, be embedded in the splined shaft of described splined projections and the shaft coupling that described splined shaft is connected with described rotating brush.
Preferably, described work transporting unit is along the direction conveyance described workpiece vertical with the direction of principal axis of described rotating brush.Preferably, described rotating brush is constituted as and can contacts with described workpiece.Preferably, described rotating brush has the implant part that is made of conducting fibre, and described implant part contacts with the surface rotation of described workpiece.Preferably, dust remover of the present invention also comprises Height Adjustment mechanism, and described Height Adjustment mechanism is configured to adjust according to the thickness of described workpiece the height of described rotating brush.
According to another preferred embodiment of the invention, the power transfer unit of described brush advance and retreat unit has cam mechanism.Described cam mechanism comprises: cam follower; And columnar cam, described columnar cam has the cam part of the described cam follower of guiding, and the power by described motor is rotated simultaneously.The direction of principal axis of described columnar cam is configured to parallel with the direction of principal axis of described rotating brush.Described cam follower is connected in described rotating brush in the mode of advancing and retreat with described rotating brush one when the rotation of described motor.
According to this formation, when motor rotates, the rotation of rotating brush and columnar cam, by the rotation of columnar cam, cam follower (driven node) move back and forth abreast integratedly and with rotating brush with rotating brush (advance and retreat motion).Like this, by this simple mechanism (for example using the cam mechanism of columnar cam), can utilize single motor to be rotated the rotation and the advance and retreat of brush.And cam part can be formed in the groove on the circumferential surface of columnar cam, also can be the projection that invests the circumferential surface of columnar cam.
According to reaching another viewpoint of the present invention, dust remover of the present invention not only goes for by the workpiece of conveyance, but also the workpiece that goes for being rotated.
That is, dust remover comprises: rotating brush is used to remove the dust on the surface that invests discoid workpiece; The workpiece rotary unit, making workpiece is the center rotation with its axle center; The brush rotary unit, synchronous with described workpiece rotary unit, making described rotating brush is the center rotation with its axle center; Brush advance and retreat unit, synchronous with described workpiece rotary unit, make the diametric(al) advance and retreat of described rotating brush along workpiece; And motor, as the common drive source of described brush rotary unit and described brush advance and retreat unit.Described brush rotary unit has gives described rotating brush with the transmission of power of described motor and as the power transfer unit that rotatablely moves of described rotating brush.The power conversion that described brush advance and retreat unit has described motor is the advance and retreat motion of described rotating brush and the power transfer unit that passes to described rotating brush.
And, as discoid workpiece, for example comprise wafer, CD disks such as (CDs) medium etc.
According to dust remover of the present invention, can carry out removing of dust effectively, and can make the device integral miniaturization and cost is reduced.
Description of drawings
Fig. 1 is the front elevation according to the dust remover of first embodiment;
Fig. 2 is the plane of the dust remover shown in Fig. 1;
Fig. 3 is the schematic sectional view of amplification of the major part of the dust remover shown in Fig. 1;
Fig. 4 is the schematic sectional view identical with Fig. 3, (a) be the view of A-stage, (b) being to rotate 1/4 o'clock view from the A-stage to the motor, (c) is to rotate 2/4 o'clock view from the A-stage to the motor, (d) is to rotate 3/4 o'clock view from the A-stage to the motor;
Fig. 5 is the schematic sectional view according to the amplification of the major part of the dust remover of second embodiment; And
Fig. 6 is the schematic sectional view according to the amplification of the major part of the dust remover of the 3rd embodiment.
The specific embodiment
With reference to the accompanying drawings, dust remover is according to the preferred embodiment of the invention described.This dust remover will invest the refuse, dust, dust etc. on workpiece (various substrate) surface (top) and remove by brush.Below refuse, dust, dust are referred to as dust and describe.
First embodiment
Fig. 1 is the front elevation of the major part of dust remover, and Fig. 2 is the plane of the major part of dust remover.
Dust remover 1 has lower bottom base 2 on the pallet (not shown), constituted at the upside of lower bottom base 2 workpiece W (substrate) is carried out the workpiece processing region that dust is removed action.
Kind as workpiece W for example comprises: printing distributing board, liquid crystal glass base, flexible base, board, ceramic substrate, plastic plate, display panels, vacuum pan, lens, LGP, film and paper etc.Here, use the workpiece W of profile as rectangle.
On lower bottom base 2, separate first bracing frame 3 and second bracing frame 4 of configuration about being provided with.Upper bed-plate 5 extends on the top between first bracing frame 3 and second bracing frame 4.Upper bed-plate 5 has the main body base 51 that extends along left and right directions.Vertically base 54 is sagging below main body base 51 for right vertical base 52, central vertical base 53 and a left side.Right vertical base 52 can slide up and down with respect to first bracing frame 3 and second bracing frame 4 with the vertical base 54 in a left side.
Dispose in the workpiece processing region: rotating brush 11 is used to remove the dust that invests workpiece W; Work transporting unit 12 is used for along a direction conveyance workpiece W; Brush rotary unit 13, synchronous with work transporting unit 12, being used to make rotating brush 11 is the center rotation with its axle center; And brush advance and retreat unit 14, synchronous with work transporting unit 12, be used to make rotating brush 11 along its direction of principal axis advance and retreat.Brush rotary unit 13 and brush advance and retreat unit 14 have the motor 15 as common drive source.
The direction of principal axis of rotating brush 11 (that is the advance and retreat direction of rotating brush 11) is vertical with the conveyance direction of workpiece W.But this both direction also can be with the angular cross beyond 90 degree.
Carry out dust by dust remover 1 and remove action, wherein, make rotating brush 11, this rotating brush 11 is axially advanced and retreat from last sideway swivel for by the part of the workpiece W of conveyance.Like this, dust is removed by the whole surface from workpiece W.And, dust remove action during, utilize the hair-dryer (not shown) that workpiece W is blown into air, and the air that is blown into is attracted and is discharged to outside the workpiece processing region with dust.
Rotating brush 11 is made of so-called conduction brush, and implants the conducting fibre with for example tens of μ m diameters on the circumferential surface of the brush body of substantial cylindrical.The implant part of rotating brush 11 contacts with the surface rotation of workpiece W, removes the dust that invests workpiece W in the mode of scraping, removes the static on the surface of workpiece W simultaneously.
Rotating brush 11 is adjusted by above-mentioned Height Adjustment 6,6 pairs of height of mechanism (gap), and can tackle the workpiece W of different-thickness.And rotating brush 11 prolongs along left and right directions, so that can tackle the workpiece W of wider width.And the rotary power of brush rotary unit 13 is input to the right part 41 of the overshooting shape of rotating brush 11, and the reciprocating power of brush advance and retreat unit 14 is input to the left part 42 of the overshooting shape of rotating brush 11.Right part 41 and left part 42 are positioned at the axle center of rotating brush 11.
Motor 15 is installed on carriage 63, and carriage 63 is fixed in the right vertical base 52 of upper bed-plate 5 in the mode that runs through first bracing frame 3.Therefore, when upper bed-plate 5 moved up and down for the adjusting play, motor 15 moved up and down with rotating brush 11 one.
Fig. 3 is the schematic sectional view of amplification of the major part of the dust remover 1 shown in Fig. 1.
Brush advance and retreat unit 14 has power transfer unit 80, and being used for the power conversion of motor 15 is the advance and retreat motion of rotating brush 11, and passes to rotating brush 11.
The square spline that is made of splined projections 73 and splined shaft 74 is the one rotation by the rotation of motor 15.Rotating brush 11 (being transmitted the revolving force of motor 15) rotates by this square spline, and allows rotating brush 11 during rotation can axially advance and retreat.Certainly, also can use ball spline to replace square spline.
The end of rotating shaft 91a inserts the inside of columnar cam 81 and is fixed in columnar cam 81 from the right side, the other end is connected in the left part of rotating brush 11 by shaft coupling 92.And, axially the pars intermedia of the rotating shaft 91a that extends laterally from the inside of columnar cam 81 by axle sleeve 93 by rotatable and can be supported in central vertical base 53 with advancing and retreat.
The end of rotating shaft 91b inserts the inside of columnar cam 81 and is fixed in columnar cam 81 from the left side.And, axially another distolateral position of extending laterally from the inside of columnar cam 81 by axle sleeve 94 by rotatable and can be supported in the vertical base 54 in a left side with advancing and retreat.And the other end of inserting the rotating shaft 91b of axis cover 94 is configured to connect second bracing frame 4.
By such structure, rotating shaft 91 (rotating shaft 91a, 91b) makes columnar cam 81 be connected with rotating brush 11, and rotates integratedly with columnar cam 81 and rotating brush 11 and advance and retreat.As present embodiment, rotating shaft 91 is made of two rotating shaft 91a, 91b, thereby rotating shaft 91, columnar cam 81 and rotating brush 11 assemblings are easily.
Specifically, between columnar cam 81 is arranged on central vertical base 53 and the vertical base 54 in a left side, and rotating shaft 91 by axle sleeve 93,94 by under the situation of these vertical bases 53,54 supports, can improve operability.And, the operability in the time of can improving rotating brush 11 and be connected by shaft coupling 92 with rotating shaft 91.And central vertical base 53 and the vertical base 54 in a left side have the effect of the axle sleeve retainer that is used to keep axle sleeve 93,94, and with main body base 51 one or separate formation.
That is, when motor 15 rotations, by the cam follower 82 that is positioned at the fixed position, columnar cam 81 and rotating brush 11 be advance and retreat and rotation integratedly axially.And the rotation number that the cam path 83 of present embodiment is set to columnar cam 81 is identical with the amplitude number (reciprocal time) of advance and retreat direction, and columnar cam 81 and rotating brush 11 rotate the reciprocating motion of the direction of once just once advancing and retreat.
Here, as the material of columnar cam 81 and cam follower 82, can use the resin or the various metal of hard.For example, columnar cam 81 and cam follower 82 can be made by plastics such as nylon, and one of them can be made by metals such as stainless steels.When using plastics in the material, can reduce the operational sound of device.But from the viewpoint of the wearing and tearing that suppress cam path 83, columnar cam 81 and cam follower 82 are preferably all formed by stainless steel.
Fig. 4 is the schematic sectional view identical with Fig. 3, shows the advance and retreat motion of rotating brush 11 along with the time.
In the A-stage that Fig. 4 (a) illustrates, when motor 15 rotation 1/4, rotating brush 11 and columnar cam 81 in rotation left direction advance, move to the position that Fig. 4 (b) illustrates.When motor 15 continues rotation 1/4, rotating brush 11 and columnar cam 81 in rotation left direction advance to greatest extent, move to the position that Fig. 4 (c) illustrates.Then, when motor 15 continued to rotate 1/2, rotating brush 11 and columnar cam 81 began to advance to right in rotation, after the position that process Fig. 4 (d) illustrates, advanced to greatest extent to right, and turned back to the position that Fig. 4 (a) illustrates.
As mentioned above,,, make rotating brush 11 simultaneously, therefore can remove the dust that invests workpiece W better along its direction of principal axis advance and retreat because rotating brush 11 contacts with the surface rotation of the workpiece W that is come by conveyance according to the dust remover 1 of present embodiment.Especially, the advance and retreat number (reciprocal time) of rotating brush 11 is identical with its rotation number, therefore can remove dust effectively.
And, owing to can enough motor 15 be rotated the rotation and the advance and retreat of brush 11, therefore be provided with rotation with comparing with the situation of the definite-purpose motor of advance and retreat usefulness, can reduce the quantity of motor, and can reduce cost.In addition,, therefore can realize being used to make the simple mechanism of rotating brush 11 advance and retreat, and can realize being provided with the miniaturization that reduces and install integral body in space owing to adopt cam mechanism with columnar cam 81.
And, replace the structure of the conveyance workpiece W of present embodiment, can be with workpiece W with motionless setting state at preposition, and can when making rotating brush 11, rotating brush 11 be moved along the direction vertical with its advance and retreat direction with respect to workpiece W advance and retreat.In this case, for example, the movable base that one supports brush rotary unit 13 and brush advance and retreat unit 14 can be set, and synchronous with brush rotary unit 13 and brush advance and retreat unit 14, this movable base can move along a direction (the conveyance direction of above-mentioned workpiece W) by ball screw-driven etc.
Second embodiment
Below with reference to Fig. 5, attach most importance to the place different with first embodiment, the dust remover 1 according to second embodiment of the invention is described.With the difference of first embodiment for a change the power transfer unit 80 of brush advance and retreat unit 14.And rotating brush 11, work transporting unit 12, brush rotary unit 13 and motor 15 are identical with first embodiment, thus the mark label identical and omit its explanation with first embodiment.
The direction of principal axis of columnar cam 121 is parallel with the direction of principal axis of rotating brush 11.Back shaft 130 is inserted the inside in the axle center of through post shape cam 121.Back shaft 130 is rotatably remained on the lower portion of central vertical base 53 and the vertical base 54 in a left side.Be used to rotate back shaft 130 and the gear 140 of input power is fixed in an end of back shaft 130.
One end of rotating shaft 170 is connected in connector portions 160, and the other end is connected in shaft coupling 92.The left part 42 of rotating brush 11 is connected in shaft coupling 92.And, the mid portion of rotating shaft 170 by axle sleeve 93 by rotatable and can be supported in central vertical base 53 with advancing and retreat.
By said structure, when motor 15 rotations, rotating brush 11, rotating shaft 170 and columnar cam 121 rotations.At this moment, by along cam path 123 guide cam driven members 122, cam follower 122 and advance and retreat axle 150 be the direction advance and retreat to the left and right.These advance and retreat move through connector portions 160 and rotating shaft 170 etc. and pass to rotating brush 11.Therefore, when motor 15 rotations, rotating brush 11 is advanced and retreat integratedly with cam follower 122 in rotation.
Therefore, the dust remover 1 of present embodiment can produce effect and the effect identical with first embodiment.Especially, according to present embodiment, by setting the gear ratio of various gears (140,141,142,143,144,146), can change the amplitude number (reciprocal time) of rotation number with the advance and retreat direction of rotating brush 11, and both can be set at different numbers.And the material of columnar cam 121 and cam follower 122 can be used and the first embodiment identical materials.
The 3rd embodiment
Below with reference to Fig. 6, attach most importance to the place different with first embodiment, the dust remover 1 according to third embodiment of the invention is described.The outer shape of the workpiece W that uses in the present embodiment is discoid, for example, and semiconductor silicon wafer or CD disk media such as (CDs).Therefore, in the 3rd embodiment, have the workpiece rotary unit 171 that makes workpiece W 173 rotations, replace the work transporting unit 12 of first embodiment around its axle center.And other structures beyond workpiece W and the workpiece rotary unit 171 are identical with first embodiment, thus the mark label identical and omit its explanation with first embodiment.
Remove in the action at the dust that the dust remover 1 that utilizes present embodiment carries out, motor 15 with utilize the rotation of the workpiece W of workpiece rotary unit 171 to rotate synchronously.Like this, with respect to the workpiece W in the rotation, rotating brush 11 with the axle center be the center when being rotated along its direction of principal axis advance and retreat, at this moment, rotating brush 11 contact workpiece W, and the dust that will invest the surface of workpiece W is removed.Therefore, present embodiment can produce effect and the effect identical with first embodiment.
And, in the various embodiments described above, though rotating brush 11 is directly contacted with the surface of workpiece W, even but be under the non-contacting state on the surface of rotating brush 11 with workpiece W, promptly between the surface of rotating brush 11 and workpiece W, exist under the situation in small gap, also can remove the dust on the surface of workpiece W by rotating brush 11.
Claims (21)
1. dust remover comprises:
Rotating brush is used to remove the dust that invests workpiece;
The work transporting unit is used for the described workpiece of direction conveyance that intersects along the direction of principal axis with described rotating brush;
The brush rotary unit, with described work transporting units synchronization, making described rotating brush is the center rotation with its axle center;
Brush advance and retreat unit with described work transporting units synchronization, makes described rotating brush along its direction of principal axis advance and retreat; And
Motor, as the common drive source of described brush rotary unit and described brush advance and retreat unit,
Wherein, described brush rotary unit has gives the power transfer unit that rotatablely move of described rotating brush as described rotating brush with the transmission of power of described motor,
The power conversion that described brush advance and retreat unit has described motor is the advance and retreat motion of described rotating brush and the power transfer unit that passes to described rotating brush.
2. dust remover according to claim 1, wherein, the power transfer unit of described brush advance and retreat unit has cam mechanism,
Described cam mechanism comprises: cam follower; And columnar cam, described columnar cam has the cam part of the described cam follower of guiding, and the power by described motor is rotated simultaneously,
Described columnar cam is connected in described rotating brush in the mode with coaxial integratedly rotation of described rotating brush and advance and retreat,
Described cam follower is fixed in motionless position, makes when described motor rotates, and the rotation of described columnar cam is converted to the advance and retreat motion of described columnar cam when allowing described columnar cam rotation.
3. dust remover according to claim 2 also comprises:
Base is used for described cam follower is fixed on described motionless position; And
Rotating shaft is used for described columnar cam is connected with described rotating brush, and rotates integratedly with described columnar cam and described rotating brush and advance and retreat,
Wherein, described rotating shaft is inserted the inside of logical described columnar cam and is fixed in the inside of described columnar cam, and the part that axially give prominence to laterally the inside from described columnar cam of described rotating shaft rotatably also can be supported on the described base with advancing and retreat.
4. dust remover according to claim 3, wherein, described rotating shaft comprises two rotating shafts of mutual coaxial setting, and described two rotating shafts are inserted inside that leads to described columnar cam and the inside of being fixed in described columnar cam.
5. according to each described dust remover in the claim 2 to 4, wherein, described cam follower has the pin shape.
6. according to each described dust remover in the claim 2 to 5, wherein, described cam part is configured to make that the revolution of described columnar cam is identical at the amplitude number of advance and retreat direction with described columnar cam.
7. according to each described dust remover in the claim 2 to 6, wherein, described columnar cam is made of plastics, and described cam follower is made of metal.
8. according to each described dust remover in the claim 2 to 6, wherein, described columnar cam and described cam follower are made of metal.
9. according to each described dust remover in the claim 1 to 8, wherein, described rotating brush is configured to rotate the reciprocating motion of direction of once just once advancing and retreat.
10. according to each described dust remover in the claim 1 to 9, wherein, described rotating brush comprises first end and the second end, wherein, the power that is used to rotatablely move is input to described first end by the power transfer unit from described brush rotary unit, and the power that moves that is used to advance and retreat is input to described the second end by the power transfer unit from described brush advance and retreat unit.
11. dust remover according to claim 10, wherein, described first end and described the second end are positioned at the axle center of described rotating brush.
12. according to each described dust remover in the claim 1 to 11, wherein, described motor has the output shaft coaxial with described rotating brush.
13. dust remover according to claim 12, wherein, described output shaft is connected in the axle center of described rotating brush by the power transfer unit of described brush rotary unit.
14. dust remover according to claim 12, wherein, the power transfer unit of described brush rotary unit comprises: the splined projections that is connected in the main shaft of described output shaft, forms with described integrated spindle axis, be embedded in the splined shaft of described splined projections and the shaft coupling that described splined shaft is connected with described rotating brush.
15. according to each described dust remover in the claim 1 to 14, wherein, described work transporting unit is along the direction conveyance described workpiece vertical with the direction of principal axis of described rotating brush.
16. according to each described dust remover in the claim 1 to 15, wherein, described rotating brush is constituted as and can contacts with described workpiece.
17. according to each described dust remover in the claim 1 to 16, wherein, described rotating brush has the implant part that is made of conducting fibre, and described implant part contacts with the surface rotation of described workpiece.
18. according to each described dust remover in the claim 1 to 17, also comprise Height Adjustment mechanism, described Height Adjustment mechanism is configured to adjust according to the thickness of described workpiece the height of described rotating brush.
19. according to each described dust remover in the claim 1 to 18, wherein, described workpiece is at least a in printing distributing board, liquid crystal glass base, flexible base, board, ceramic substrate, plastic plate, display panels, vacuum pan, lens, LGP and the film.
20. according to each described dust remover in the claim 1 to 19, wherein, the monnolithic case of described workpiece is a rectangle.
21. dust remover according to claim 1, wherein, the power transfer unit of described brush advance and retreat unit has cam mechanism,
Described cam mechanism comprises: cam follower; And columnar cam, described columnar cam has the cam part of the described cam follower of guiding, and the power by described motor is rotated simultaneously,
The direction of principal axis of described columnar cam is configured to parallel with the direction of principal axis of described rotating brush,
Described cam follower is connected in described rotating brush in the mode of advancing and retreat with described rotating brush one when the rotation of described motor.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP005363/2006 | 2006-01-12 | ||
| JP2006005363A JP4611900B2 (en) | 2006-01-12 | 2006-01-12 | Dust removal equipment |
| PCT/JP2006/311648 WO2007080662A1 (en) | 2006-01-12 | 2006-06-09 | Dust remover |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101356017A true CN101356017A (en) | 2009-01-28 |
| CN101356017B CN101356017B (en) | 2010-07-28 |
Family
ID=38256077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006800504562A Active CN101356017B (en) | 2006-01-12 | 2006-06-09 | dust removal device |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20090276970A1 (en) |
| JP (1) | JP4611900B2 (en) |
| CN (1) | CN101356017B (en) |
| DE (1) | DE112006003654T5 (en) |
| WO (1) | WO2007080662A1 (en) |
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| CN103075686A (en) * | 2013-01-18 | 2013-05-01 | 福建鸿博光电科技有限公司 | Illuminating system and matched cleaning equipment and lamplight illuminating structure thereof |
| CN103878667A (en) * | 2014-03-23 | 2014-06-25 | 山西中电科新能源技术有限公司 | Polycrystalline silicon ingot edge material surface cleaning device |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP4611900B2 (en) | 2011-01-12 |
| WO2007080662A1 (en) | 2007-07-19 |
| DE112006003654T5 (en) | 2009-02-19 |
| US20090276970A1 (en) | 2009-11-12 |
| CN101356017B (en) | 2010-07-28 |
| JP2007189036A (en) | 2007-07-26 |
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