CN101354029A - Microfluidic pump with multi-channel active control capability - Google Patents
Microfluidic pump with multi-channel active control capability Download PDFInfo
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- CN101354029A CN101354029A CNA2008100693796A CN200810069379A CN101354029A CN 101354029 A CN101354029 A CN 101354029A CN A2008100693796 A CNA2008100693796 A CN A2008100693796A CN 200810069379 A CN200810069379 A CN 200810069379A CN 101354029 A CN101354029 A CN 101354029A
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- 239000007788 liquid Substances 0.000 claims abstract description 101
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- 230000010349 pulsation Effects 0.000 claims abstract 2
- 239000000919 ceramic Substances 0.000 claims description 33
- 238000005086 pumping Methods 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 11
- 230000000737 periodic effect Effects 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 3
- 230000036316 preload Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 120
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000005755 formation reaction Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 3
- 230000037361 pathway Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
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- 238000004458 analytical method Methods 0.000 description 1
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Abstract
本发明公开了一种多通道主动控制微流体泵，采用具有圆环面边界的微流体主动控制阀构成多个进液阀和多个出液阀，采用同一电可控薄膜执行元件覆盖在泵体的圆柱形沉孔的开口面构成同一个泵腔，泵腔与多个微流体阀的圆环柱形液腔相连，且多个微流体阀的圆柱形中心孔液腔分别与进液口和出液口相连。通过作用于多个微流体阀与泵的薄膜执行元件的控制信号控制泵流量、脉动性、输出压力。本发明的微流体泵为多向可控的具有主动精确控制能力的微流体泵，多个微流体阀可以任意设置进液阀和出液阀，也可以让任意个微流体阀处于关闭状态。本发明可用于采用同一泵对多个对象同时供给微流体、采用同一泵从多个对象同时获取微流体以及微流体混合等。
The invention discloses a multi-channel active control micro-fluid pump. A micro-fluid active control valve with a torus boundary is used to form a plurality of liquid inlet valves and a plurality of liquid outlet valves. The same electrically controllable film actuator is used to cover the pump. The opening surface of the cylindrical counterbore of the body constitutes the same pump chamber, the pump chamber is connected with the annular cylindrical liquid chambers of multiple microfluidic valves, and the cylindrical central hole liquid chambers of multiple microfluidic valves are connected with the liquid inlets respectively. connected to the outlet. The pump flow, pulsation, and output pressure are controlled by control signals acting on multiple microfluidic valves and membrane actuators of the pump. The microfluidic pump of the present invention is a multi-directional controllable microfluidic pump with active and precise control capability. A plurality of microfluidic valves can be arbitrarily set with liquid inlet valves and liquid outlet valves, and any microfluidic valves can also be closed. The present invention can be used for simultaneously supplying microfluids to multiple objects by using the same pump, simultaneously obtaining microfluids from multiple objects by using the same pump, mixing microfluids, and the like.
Description
Technical field
The invention belongs to the microfluid machinery technical field, be specifically related to a kind of micro-fluid pump of realizing having the initiatively accurate control ability of multichannel.
Background technique
Fast development along with the micromechanics electronics science, in chemical analysis and detection, medicine release, bioengineering, IC chip, miniature component, microminiaturized production system (micro factory) and chip lab fields such as (Lab-on-Chip), be badly in need of carrying tiny flow quantity and the high fluid delivery system of precision.The various countries scholar has proposed and has studied the fluid pump of multiple structural type for this reason.In research process, the flow control accuracy and the extremely low flow control of realization that focus on how improving pump of concern.For how to obtain fluid and how not have good solution for a plurality of objects the fluid source pumping of same pump chamber from a plurality of fluid sources.At present, also not about the correlation technique report of micro-fluid pump with multi-channel active control capability.
Summary of the invention
The invention discloses a kind of multichannel and initiatively accurately control the principle and the specific embodiment of micro-fluid pump, adopt a kind of microfluid active control valve to constitute a plurality of feed liquor valves and a plurality of liquid valve with toroid boundary, wherein, also can allow any a plurality of valve close, but the opening surface that adopts same electricity controlled thin film executive component to cover the cylindrical bore of the pump housing constitutes same pump chamber, pump chamber links to each other with loop column type (cylinder type center hole) sap cavity of a plurality of valves, and cylinder type center hole (loop column type) sap cavity of a plurality of valves links to each other with liquid outlet with liquid entering hole respectively.Change frequency, amplitude, phase relationship control pump flow, pulsating nature, the delivery pressure of the control signal (periodic signal, positive signal) of the film executive component that acts on a plurality of valves and pump.The film executive component of microfluidic valve and ring border do not have pre-pressing force when having drive signal, are in closed condition.The micro-fluid pump of the initiatively accurate control ability of multichannel of the present invention is the multidirectional controlled micro-fluid pump with initiatively accurate control ability, a plurality of valves can be set to a feed liquor valve and a plurality of liquid valve arbitrarily, be set to a plurality of feed liquor valves and a liquid valve arbitrarily, also can be set to a plurality of feed liquor valves and a plurality of liquid valve arbitrarily, also can allow any a plurality of valve be in closed condition.The present invention can be used for adopting same pump that a plurality of objects are supplied with microfluid simultaneously, adopted same pump to obtain microfluid and Microfluidic Mixing etc. simultaneously from a plurality of objects.
The present invention is achieved in that
A kind of micro-fluid pump with multi-channel active control capability, comprise: a cylindrical pump chamber, a plurality of annulus cylindricality valve pockets and respectively with the coaxial cylindrical center bore of described a plurality of annulus cylindricality valve pockets, an annulus cylindricality valve pocket and the cylindrical center bore coaxial with it constitute a microfluidic valve, form a toroid boundary between the cylindrical center bore of each microfluidic valve and the coaxial separately annulus cylindricality valve pocket, the film executive component of each microfluidic valve contacts the described annulus cylindricality valve pocket that described cylindrical center bore and this cylindrical center bore is coaxial and separates with toroid boundary separately, wherein, described a plurality of microfluidic valve can be set to a feed liquor valve and a plurality of liquid valve arbitrarily, or be set to a plurality of feed liquor valves and a liquid valve arbitrarily, or be set to a plurality of feed liquor valves and a plurality of liquid valve arbitrarily, also can allow wherein any a plurality of microfluidic valves be in closed condition, described each annulus cylindricality valve pocket links to each other with described cylindrical pump chamber by flow channels respectively, it is characterized in that: the airtight pump chamber of cylindrical pump chamber top formation that the film executive component of micro-fluid pump is covered the pump housing, the film executive component of described each microfluidic valve is covered annulus cylindricality valve pocket on the pump housing and the cylindrical center bore top of the described microfluidic valve coaxial with it constitutes a plurality of microfluidic valves, the orderly vibration or the displacement of the film executive component by described a plurality of microfluidic valves and the film executive component of micro-fluid pump make corresponding microfluidic valve active opening and closing realize pumping into of micro-fluid pump, pump, the continuously accurate ACTIVE CONTROL of fluid stopping and flow and pressure.The film executive component that constitutes a plurality of microfluidic valves is specific as follows with the arrangement of the film executive component that constitutes micro-fluid pump:
(1) described feed liquor valve, liquid valve and described cylindrical pump chamber are that the center is circumference in the same side of the pump housing with described cylindrical pump chamber, described film executive component and pump chamber and valve pocket natural enclosing, each valve pocket and pump chamber seal by seal ring alone, and are pressed on the pump housing by a pump cover.
(2) the film executive component of described feed liquor valve and liquid valve is arranged on the surface of the same side of the cylinder type pump housing, described microfluidic valve is distributed on two concentric circumference, the microfluidic valve that is positioned on the inner circumference is in the neutral position that is positioned at adjacent two microfluidic valves on the excircle, the film executive component that constitutes micro-fluid pump be arranged in the cylindrical pump housing a relative side the surface and be symmetry status with the film executive component that constitutes feed liquor valve and liquid valve, the film executive component that constitutes valve contacts respectively by the seal ring and the pump housing with the film executive component that constitutes pump and constitutes valve pocket and pump chamber, and is pressed on the pump housing by valve gap and pump cover.
(3) described microfluidic valve is symmetric arrangement at the center on five surfaces of the cube pump housing, and described cylindrical pump chamber is arranged in the 6th center of the cube pump housing.The cylinder type center hole of microfluidic valve that is positioned at two opposing sides of the cube pump housing directly links to each other, be positioned at the cylindrical center bore of cylindrical pump chamber apparent surface's microfluidic valve and directly link to each other with the cylinder type pump chamber, the cylindrical center bore of all microfluidic valves all is communicated with cylindrical pump chamber, the film executive component of film executive component and pump covers the surface of valve pocket and pump chamber by seal ring, and is pressed on the pump housing respectively by valve gap and pump cover.The described cube pump housing is installed each surface of microfluidic valve can uniform a plurality of microfluidic valves, as long as the circle ring column valve pocket can link to each other with the liquid entering hole/liquid outlet on suitable surface, its cylindrical center bore directly links to each other with pump chamber, and the circle ring column valve pocket links to each other with the liquid entering hole/liquid outlet that is installed in suitable surface.
Described a plurality of microfluidic valve can be set to a feed liquor valve and a plurality of liquid valve arbitrarily, be set to a plurality of feed liquor valves and a liquid valve arbitrarily, can be set to a plurality of feed liquor valves and a plurality of liquid valve arbitrarily, also can allow any a plurality of valve be in closed condition, but have a microfluidic valve formation feed liquor valve at least and have at least a microfluidic valve to constitute liquid valve.The microfluidic valve that constitutes feed liquor valve and liquid valve is not having drive signal to be in closed condition (nature) as the time spent, and the film executive component and the toroid boundary of valve have certain pre-pressing force, make micro-fluid pump have good fluid stopping characteristic (fluid stopping state).
The periodic signal of employing same frequency drives the film executive component and the pump film executive component of a plurality of feed liquor valves and a plurality of liquid valves when realizing pumping into and pumping, and the control signal of film executive component that acts on the feed liquor valve is at first effective, it is effective that the control signal phase lag that acts on pump film executive component acts on 1/4 cycle of control signal of film executive component of feed liquor valve, and the control signal of film executive component that acts on liquid valve is more effective than the control signal of the film executive component that acts on pump 1/4 cycle that lagged behind; When in running order pump transfers the fluid stopping state to, in the end one to pump into the control signal that acts on feed liquor valve film executive component after state is finished at first invalid, invalid through 1/4 all after date pump film executive component control signals, control signal through 1/4 all after date liquid valve film executive components is invalid again, and pump changes the fluid stopping state over to.Acting on and drive the feed liquor valve and the film executive component of liquid valve and the control signal of pump film executive component can be square signal, sinusoidal signal or other periodic signals, can reach the effect of square signal when adopting linear electric controllable execution element drives film executive component, the frequency, amplitude, the phase relationship that change the control signal that acts on the film executive component that drives feed liquor valve and liquid valve and pump film executive component can change pump duty, pulsating nature, delivery pressure.
The film executive component that constitutes feed liquor valve and liquid valve and pump can be to stick on the disc piezoelectric ceramic on the flexible sheet, the oscillator that disc electrostriction ceramics sheet constitutes, it also can be the flexible sheet that linear electric controllable execution element connects, and the flexible sheet quilt is that the valve gap at center or the ring edge of pump cover are pressed on the pump housing with final controlling element, and the center region of the flexible sheet that valve gap or pump cover edge are not pressed onto is vibration or deformed region.The film executive component that constitutes feed liquor valve and liquid valve is being pasted final controlling element (as disc piezoelectric ceramic, disc electrostriction ceramics sheet) formation oscillator and is being connected linear electric may command final controlling element with an other side of liquid contacting side with the film executive component of pump, guarantee that the film executive component to distortion of the liquid outside and displacement, reaches the purpose of insulation simultaneously.
The invention has the beneficial effects as follows;
1. the micro-fluid pump of the initiatively accurate control ability of multichannel of the present invention is the multidirectional controlled micro-fluid pump with initiatively accurate control ability, a plurality of valves can be set to a feed liquor valve and a plurality of liquid valve arbitrarily, be set to a plurality of feed liquor valves and a liquid valve arbitrarily, also can be set to a plurality of feed liquor valves and a plurality of liquid valve arbitrarily, also can allow any a plurality of valve be in closed condition.The present invention can be used for adopting same pump that a plurality of objects are supplied with microfluid simultaneously, adopted same pump to obtain microfluid and Microfluidic Mixing etc. simultaneously from a plurality of objects.
2. the micro-fluid pump of the initiatively accurate control ability of multichannel of the present invention adopts a kind of microfluid active control valve with toroid boundary to constitute a plurality of feed liquor valves and liquid valve, ability with ACTIVE CONTROL fluid can reach extremely low flow and high control accuracy;
3. the micro-fluid pump of the initiatively accurate control ability of multichannel of the present invention adopts a kind of microfluid active control valve with toroid boundary to constitute a plurality of feed liquor valves and liquid valve, and the executive component of valve and toroid boundary have pre-pressing force when not acting on control signal, make pump reach high fluid stopping ability when the fluid stopping state;
4. multichannel of the present invention is the accurately valve pocket of the micro-fluid pump of control ability and the same side that pump chamber is distributed in the pump housing initiatively, adopts a pump cover to compress, have simple in structure, volume is little, in light weight, advantage of simple technology.
5. the valve pocket of the micro-fluid pump of the initiatively accurate control ability of multichannel of the present invention and pump chamber are by film executive component natural enclosing, and the executive component and the Signal connector thereof of realization control all do not contact good insulation preformance with liquid;
6. multichannel of the present invention initiatively accurately the micro-fluid pump of control ability can reduce the retardation phenomenon of valve by the active opening and closing of ACTIVE CONTROL valve, increase work efficiency;
7. multichannel of the present invention initiatively accurately the micro-fluid pump of control ability can change pump duty, pulsating nature, delivery pressure etc. by frequency, amplitude, the phase relationship that change acts on the control signal (displacement) of the film executive component that drives feed liquor valve and liquid valve and pump film executive component;
8. the micro-fluid pump of the initiatively accurate control ability of multichannel of the present invention is the two-way controlled micro-fluid pump with initiatively accurate control ability, and any one valve can become feed liquor valve (liquid valve), and a then other passage becomes liquid valve (feed liquor valve) naturally.
Description of drawings
Fig. 1 is the present invention eight passage ACTIVE CONTROL micro-fluid pump embodiments' a sectional view;
Fig. 2 A shifts out pump cover among Fig. 1 and the plan view behind the film executive component;
Fig. 2 B and Fig. 2 C are the plan views behind the pump cover that shifts out among Fig. 1;
Fig. 3 is the sectional view of eight passage ACTIVE CONTROL micro-fluid pump embodiments' valve gap shown in Fig. 1 and 2 of the present invention;
Fig. 4 is the plan view of eight passage ACTIVE CONTROL micro-fluid pump embodiments' valve gap shown in Fig. 1 and 2 of the present invention;
Fig. 5 is the initiatively accurately drive signal during the film executive component work of the valve of control micro-fluid pump and pump and the sequential charts of film executive component of eight passages shown in Fig. 1 and 2 of the present invention;
Fig. 6 and the control system circuit theory diagrams that are the initiatively accurate control micro-fluid pump of the present invention's eight passages embodiment;
Fig. 7 is the sectional view that the present invention's eight passages are initiatively accurately controlled another embodiment of micro-fluid pump;
Fig. 8 is the plan view behind the film executive component that shifts out among Fig. 7;
Fig. 9 is the sectional view that the present invention's eight passages are initiatively accurately controlled a kind of embodiment of micro-fluid pump;
Figure 10 A shifts out pump cover among Fig. 9 and the plan view behind the film executive component;
Figure 10 B is the plan view behind the pump cover that shifts out among Fig. 9;
Figure 11 is the present invention eight another embodiment's of passage ACTIVE CONTROL micro-fluid pump a sectional view;
Figure 12 A shifts out pump cover among Figure 11 and the plan view behind the film executive component;
Figure 12 B is the plan view behind the pump cover that shifts out among Figure 11;
Figure 13 is the sectional view that the present invention's 16 passages are initiatively accurately controlled micro-fluid pump embodiment;
Figure 14 be the present invention's 16 passages initiatively accurately control micro-fluid pump embodiment remove plan view behind pump cover and the film executive component;
Figure 15 is the sectional view that the present invention's 16 passages are initiatively accurately controlled another embodiment of micro-fluid pump;
Figure 16 be the present invention's 16 passages shown in Figure 15 initiatively accurately another embodiment of control micro-fluid pump remove plan view behind pump cover and the film executive component;
Figure 17 is the plan view that the present invention's 5 passages are initiatively accurately controlled micro-fluid pump embodiment;
Figure 18 is the A-A sectional view that the present invention's 5 passages shown in Figure 17 are initiatively accurately controlled micro-fluid pump embodiment;
Figure 19 is the B-B sectional view that the present invention's 5 passages shown in Figure 17 are initiatively accurately controlled micro-fluid pump embodiment;
Figure 20 is the plan view that the present invention's 5 passages are initiatively accurately controlled another embodiment of micro-fluid pump;
Figure 21 is the A-A sectional view that the present invention's 5 passages shown in Figure 20 are initiatively accurately controlled micro-fluid pump embodiment;
Figure 22 is the B-B sectional view that the present invention's 5 passages shown in Figure 20 are initiatively accurately controlled micro-fluid pump embodiment;
Figure 23 is the plan view that the present invention's 5 passages are initiatively accurately controlled the third embodiment of micro-fluid pump;
Figure 24 is the A-A sectional view that the present invention's 5 passages shown in Figure 23 are initiatively accurately controlled the third embodiment of micro-fluid pump;
Figure 25 is the B-B sectional view that the present invention's 5 passages shown in Figure 23 are initiatively accurately controlled the third embodiment of micro-fluid pump;
Figure 26 is the plan view that the present invention's 5 passages are initiatively accurately controlled the 4th kind of embodiment of micro-fluid pump;
Figure 27 is the A-A sectional view that the present invention's 5 passages shown in Figure 26 are initiatively accurately controlled the 4th kind of embodiment of micro-fluid pump;
Figure 28 is the B-B sectional view that the present invention's 5 passages shown in Figure 26 are initiatively accurately controlled the 4th kind of embodiment of micro-fluid pump.
Embodiment
With reference to accompanying drawing, hereinafter will introduce the embodiment of multichannel ACTIVE CONTROL micro-fluid pump of the present invention in detail.
In the accompanying drawing: 1,168 is the pump housing, 3,14,21,85,112,123,124,125,191,203,209,217,231,226,256,259,264,266,270,274,284,285,286,21,287,288,289,307,308,309,310,311,312,313,314 is the film executive component, 39,43,51,56,28,59,66,73,164,191,195,201,219,234,228 is the toroidal surface boss, 38,44,52,57,26,60,65,74,118,194,202,216,233,227 is the cylindrical center bore of valve, 104,149,150,153,157,95,99,146,106,108,155,158,97,101,102,189,206,214,237,222 is feed pathway (liquid outlet channel), 27,37,100,161,103,105,147,148,107,151,109,152,154,156,159,94,96,98,181,187,172,178,188 is liquid entering hole (liquid outlet), 35,46,47,53,31,64,70,71 is flow channels, 33,167,163,212,238 is cylindrical pump chamber, 5,42,48,54,19,61,68,75,239,240,241,242,243,244,245,246,86,87,88,89,90,91,92,93,248,249,250,251,252,253,254,255,184,192,179,173,180,267,260,263,272,276 is feed liquor valve (liquid valve), 40,45,50,55,24,62,67,72,117,215,198,199,235,229 is annulus cylindricality valve pocket, 2,22,16,110,220,197,200,211,230,224,315,316,317,318,319,320,321,322,306 is flexible sheet, 4,20,15,84,111,218,193,204,210,232,225 is disc piezoelectric constant circular disc/disc electrostriction ceramics sheet, 36,41,49,58,29,63,69,76,81,116,221,174,205,207,223,236 is seal ring, 23,83,281,283,169,280 is pump cover, 25,170,186,196,176 is connecting bolt, 77,78,79,122,268,261,262,271,275,278,323,324,325,78,326,327,328 (stack the type piezoelectric ceramic actuator for linear electric controllable execution device, stack type electrostriction ceramics final controlling element, magnetostrictive actuator and other microdisplacement actuators), 282,283,185,190,177,171,182,257,258,265,269,273 is valve gap, 10,17,6,115,166 is lead, 7,11,18,113,120 is the viscose glue of fixing cord, 9,165 is the lead fixed clip, 34,30,130,131,133,135,139,141,144,124,129,131,127,114 is crossed beam trunking, 8,121 is cable-through hole.
Embodiment one: (Fig. 2 A shifts out pump cover among Fig. 1 and the plan view behind the film executive component with reference to Fig. 1 and 2 A-2C, Fig. 2 B and Fig. 2 C are the plan views behind the pump cover that shifts out among Fig. 1), be first kind of embodiment's of the present invention's eight passage ACTIVE CONTROL micro-fluid pumps sectional view and plan view.One side center of the pump housing 1 has uniform annulus cylindricality valve pocket 40,45,50,55,24,62,67,72 and coaxial with the center of annulus cylindricality valve pocket 40,45,50,55,24,62,67,72 respectively cylindrical center bore 38,44,52,57,26,60,65,74 on cylindrical pump chamber 33 and the circumference 284 identical with the center of cylindrical pump chamber 33.The cylindrical cavity top that film executive component 14 covers the pump housing 1 constitutes pump chamber 33, seal ring 32 is set between the upper surface of the film executive component 14 and the pump housing 1 prevents to leak.Film executive component 3,284,285,286,21,287,288,289 covers the top formation valve 5,42,48,54,19,61,68,75 of the annulus cylindricality valve pocket 40,45,50,55,24,62,67,72 on the pump housing 1 respectively, and the film executive component 3,284,285,286,21,287,288,289 and the pump housing 1 prevent escape of liquid by seal ring 36,41,49,58,29,63,69,76 sealings respectively.The loop column type valve pocket 40,45,50,55,24,62,67,72 of valve 5,42,48,54,19,61,68,75 links to each other with cylinder type pump chamber 33 respectively by flow channels 35,46,47,53,31,64,70,71, and the cylinder type center hole 38,44,52,57,26,60,65,74 that constitutes valve 5,42,48,54,19,61,68,75 links to each other with liquid entering hole/liquid outlet 27,37,100,161,103,105,147,148 respectively.The toroid boundary 39,43,51,56,28,59,66,73 of microfluidic valve 5,42,48,54,19,61,68,75 contacts closely with film executive component 3,284,285,286,21,287,288,289 respectively and respectively the fluid in annulus cylindricality valve pocket 40,45,50,55,24,62,67,72 and the cylindrical center bore 38,44,52,57,26,60,65,74 is separated.The film executive component 3,284,285,286,21,287,288,289 of microfluidic valve 5,42,48,54,19,61,68,75 connects flexible sheet 2,300,301,302,22,303,304,305 by disc piezoelectric constant circular disc/disc electrostriction ceramics sheet 4,294,295,296,20,297,298,299 respectively and constitutes.The film executive component 14 of micro-fluid pump connects flexible sheet 16 by disc piezoelectric constant circular disc/disc electrostriction ceramics sheet 15 and constitutes.The film executive component of microfluidic valve 5,42,48,54,19,61,68,75 and micro-fluid pump also can be to paste disc piezoelectric constant circular disc/disc electrostriction ceramics sheet 4,294,295,296,20,297,298,299,15 formations on a slice flexible sheet 306.Drive signal was not being acted on the film executive component at 3,284,285,286,21,287,288,289 o'clock, film executive component 3,284,285,286,21,287,288,289 is indeformable and contact closely with toroid boundary 39,43,51,56,28,59,66,73, and film executive component 3,284,285,286,21,287,288,289 keeps enough predeformation to improve the difficulty that the pump outer fluid flows in pump.So long as not making film executive component 3,284,285,286,21,287,288,289 leave toroid boundary 39,43,51,56,28,59,66,73 too greatly owing to supply with the variation in pressure of fluid, at this moment disconnect between liquid entering hole/liquid outlet 27,37,100,161,103,105,147,148, fluid does not flow, and is in the fluid stopping state.In the valve 5,42,48,54,19,61,68,75 any one can be arranged to feed liquor valve, liquid valve, normal off status.
With reference to Fig. 3 and 4, be that the multichannel of the present invention that Fig. 1 and 2 provides has initiatively the accurately sectional view and the plan view of the pump cover 23 of the micro-fluid pump of control ability.The film executive component 3,284,285,286,21,287,288,289 that deformation space 123,128,132,134,136,138,140,143 is respectively valve 5,42,48,54,19,61,68,75 and pump cover between the deformation space that forms, deformation space 142 is the deformation space of film executive component 14 between itself and pump cover of pump.The lead of the film executive component 3,284,285,286,21,287,288,289 of valve 5,42,48,54,19,61,68,75 is introduced annular crossed beam trunking 130 backs by crossed beam trunking 124,129,131,133,135,139,141,144 separately respectively and is drawn by cable-through hole 8.The lead of the film executive component 14 of micro-fluid pump is introduced annular crossed beam trunking 130 backs by the crossed beam trunking 127 of micro-fluid pump and is drawn by cable-through hole 8.
With reference to Fig. 5, be the initiatively accurately drive signal during the film executive component work of the valve of control micro-fluid pump and pump and the sequential charts of film executive component of eight passages shown in Fig. 1 and 2 of the present invention.In Fig. 5, valve 5,42 is set to the feed liquor valve, and valve 54,19,61,68,75 is set to liquid valve, and valve 48 is set to normal closed condition, constitutes many inputs of 2 passages inputs, the output of 5 passages, 1 pathway closure/export microfluid ACTIVE CONTROL pump more.Fig. 5 has shown that micro-fluid pump that multichannel of the present invention has a control ability initiatively accurately changes working state (pump into and pump), working state, drive signal when changing the fluid stopping state over to by working state and the sequential chart of film executive component over to by the fluid stopping state; When realizing pumping into and pumping, adopt periodic signal (positive signal) the driving feed liquor valve of same frequency and the film executive component and the pump film executive component of liquid valve, and act on 2 feed liquor valves 5, the control signal of 42 film executive component is at first effective, the control signal phase lag that acts on pump film executive component acts on feed liquor valve 5,1/4 cycle of control signal of 42 film executive component is effective, acts on 5 liquid valves 54,19,61,68, the control signal of 75 film executive component is more effective than the control signal of the film executive component that acts on pump 1/4 cycle that lagged behind; Control signal invalid (vanishing) that pumps into the film executive component that acts on feed liquor valve 5,42 after state is finished the in the end when pump of in running order (pump into and pump) transfers the fluid stopping state to, the control signal that acts on pump film executive component through 1/4 all after dates is invalid, the control signal that acts on liquid valve film executive component after 1/4 all after dates is invalid, and pump changes the fluid stopping state over to; The frequency, amplitude, the phase relationship that change the control signal act on the film executive component that drives 2 feed liquor valves and 5 liquid valves and pump film executive component can change pump duty, pulsating nature, delivery pressure etc.Wherein, the executive component of valve 48 is in closed condition always.
With reference to Fig. 6, be the control system circuit theory diagrams that the present invention's eight passages shown in Fig. 1 and 2 are initiatively accurately controlled micro-fluid pump embodiment.Be set to feed liquor valve, liquid valve and normal off status and mutually deserved flow and pressure are set by control interface 293 any one in can valve 5,42,48,54,19,61,68,75.Control module 292 is converted to control signal corresponding according to the input information at control interface 293 with user's request and is converted to the analog control voltage signal by 8 channel modulus converters 291 and delivers to power driver module 290, carry out the film executive component 14 of power amplification rear driving pump and the film executive component 3,284,285,286,21,287,288,289 of valve 5,42,48,54,19,61,68,75 by power model 290, make it produce corresponding distortion.
Embodiment two: with reference to Fig. 7 and 8 (Fig. 8 is the plan view behind the film executive component that shifts out among Fig. 7), be sectional view and the plan view that the present invention's eight passages are initiatively accurately controlled second kind of embodiment of micro-fluid pump.The initiatively accurate control micro-fluid pump of the present invention's eight passages that Fig. 7 and 8 provides embodiment is that with the initiatively accurate control micro-fluid pump of the present invention's eight passages embodiment's that Fig. 1 and 2 provides the main distinction pump chamber 167 is different with pump chamber 33.The pump chamber 167 that the present invention's eight passages that Fig. 7 and 8 provides are initiatively accurately controlled micro-fluid pump embodiment is the cylindrical holes that are positioned at the center of the cylindrical pump housing 1, relative side at the film executive component 14 of micro-fluid pump has another one film executive component 85, film executive component 14 and 85 respectively by seal ring 32 and 81 with pump housing sealing, thereby formation pump chamber 167. Film executive component 14 and 85 is synchronized with the movement when work, can increase the variation of pump chamber volume, improves the flow and the delivery pressure of micro-fluid pump.
Embodiment three: (Figure 10 A shifts out pump cover among Fig. 9 and the plan view behind the film executive component with reference to Fig. 9 and 10A, 10B, Figure 10 B is the plan view behind the pump cover that shifts out among Fig. 9), be the plan view after the present invention's eight passages are initiatively accurately controlled the third embodiment's of micro-fluid pump sectional view and removed pump cover and film executive component.The present invention's eight passages that Fig. 9 and 10A, 10B provide initiatively accurately control micro-fluid pump embodiment and the present invention's eight passages that Fig. 1 and 2 the provides main distinction of initiatively accurately controlling micro-fluid pump embodiment to be to constitute the film executive component of microfluidic valve different.Constitute microfluidic valve 239,240,241,242,243,244,245,246 film executive component 307,308,309,310,311,312,313,314 (stack the type piezoelectric ceramic actuator by the electric controllable execution element of linearity respectively, stack type electrostriction ceramics final controlling element, magnetostrictive actuator and other microdisplacement actuators) 77,323,324,325,78,326,327,328 are connected flexible sheet 315,316,317,318,319,320,321, constitute on 322.The film executive component 14 of micro-fluid pump connects flexible sheet 16 by disc piezoelectric constant circular disc/disc electrostriction ceramics sheet 15 and constitutes.
Embodiment four: (Figure 12 A shifts out pump cover among Figure 11 and the plan view behind the film executive component with reference to Figure 11 and 12A, 12B, Figure 12 B is the plan view behind the pump cover that shifts out among Figure 11), be the plan view after active of the present invention is accurately controlled the 4th kind of embodiment's of micro-fluid pump sectional view and removed pump cover and film executive component.The present invention's eight passages that Figure 11 and 12A, 12B provide initiatively accurately control micro-fluid pump embodiment and the present invention's eight passages that Fig. 1 and 2 the provides main distinction of initiatively accurately controlling micro-fluid pump embodiment to be to constitute the film executive component of microfluidic valve and micro-fluid pump different.Constitute microfluidic valve 239,240,241,242,243,244,245,246 film executive component 307,308,309,310,311,312,313,314 (stack the type piezoelectric ceramic actuator by the electric controllable execution element of linearity respectively, stack type electrostriction ceramics final controlling element, magnetostrictive actuator and other microdisplacement actuators) 77,323,324,325,78,326,327,328 are connected flexible sheet 315,316,317,318,319,320,321, constitute on 322.The film executive component 125 that constitutes micro-fluid pump connects formation on the flexible sheet 329 by the electric controllable execution element of linearity (stack the type piezoelectric ceramic actuator, stack type electrostriction ceramics final controlling element, magnetostrictive actuator and other microdisplacement actuators) 79.
Embodiment five; With reference to Figure 13 and 14, be the plan view after multichannel of the present invention is initiatively accurately controlled micro-fluid pump the 5th embodiment's sectional view and removed pump cover and film executive component.One side center of the cylindrical pump housing 1 has cylindrical pump chamber 163.The cylindrical cavity top that film executive component 85 covers the pump housing 1 constitutes pump chamber 163, seal ring 81 is set between the upper surface of the film executive component 85 and the pump housing 1 prevents to leak.Uniform microfluidic valve 5,42,48,54,19,61,68,75 on the bigger circumference 284 of the opposite side of the pump housing 1, the same side of the pump housing 1 another with the concentric less circumference 285 of circumference 284 on uniform microfluidic valve 87,88,89,90,91,92,93,86.The loop column type valve pocket of valve 5,42,48,54,19,61,68,75,87,88,89,90,91,92,93,86 links to each other with liquid entering hole (liquid outlet) 100,103,147,107,109,154,159,96,161,105,148,151,152,156,94,98 by feed pathway (liquid outlet channel) 101,102,146,106,108,155,158,97,162,104,149,150,153,157,95,99 respectively.The cylinder type center hole that constitutes valve 5,42,48,54,19,61,68,75,87,88,89,90,91,92,93,86 all links to each other with pump chamber 163.The film executive component that constitutes 16 microfluidic valves 5,42,48,54,19,61,68,75,87,88,89,90,91,92,93,86 connects flexible sheet by disc piezoelectric constant circular disc/disc electrostriction ceramics sheet respectively and constitutes.The film executive component 85 of micro-fluid pump connects flexible sheet 82 by disc piezoelectric constant circular disc/disc electrostriction ceramics sheet 84 and constitutes.The film executive component that constitutes 16 microfluidic valves contacts closely with separately toroid boundary respectively and respectively the fluid in annulus cylindricality valve pocket and the cylindrical center bore is separated.The film executive component of 16 microfluidic valves of formation and the pump housing 1 prevent escape of liquid by seal ring sealing separately.When drive signal not being acted on the film executive component, the film executive component is indeformable and contact closely with toroid boundary, and the film executive component keeps enough predeformation to improve the difficulty that the pump outer fluid flows in pump under the effect of toroid boundary.So long as not making the film executive component leave mutually deserved toroid boundary too greatly owing to supply with the variation in pressure of fluid, at this moment disconnect between liquid entering hole/liquid outlet 100,103,147,107,109,154,159,96,161,105,148,151,152,156,94,98, fluid does not flow, and is in the fluid stopping state.In the valve 5,42,48,54,19,61,68,75,87,88,89,90,91,92,93,86 any one can be arranged to feed liquor valve, liquid valve, normal off status.
Embodiment six: with reference to Figure 15 and 16, be the plan view after multichannel of the present invention is initiatively accurately controlled the 6th kind of embodiment's of micro-fluid pump sectional view and removed pump cover and film executive component.Figure 15 and 16 passages shown in 16 initiatively accurately control micro-fluid pump 16 passages embodiment and shown in Figure 13 and 14 initiatively accurately control micro-fluid pump embodiment's the main distinction to be to constitute the film executive component of 16 microfluidic valves different.With the valve 239 among the initiatively accurate control micro-fluid pump of 16 passages shown in Figure 15 and 16 embodiment, 253 film executive component 123,112 is example, the 123rd, linear electric controllable execution element (stacks the type piezoelectric ceramic actuator, stack type electrostriction ceramics final controlling element, magnetostrictive actuator and other microdisplacement actuators) 77 connection flexible sheets, 2 formations, the 112nd, linear electric controllable execution element (stacks the type piezoelectric ceramic actuator, stack type electrostriction ceramics final controlling element, magnetostrictive actuator and other microdisplacement actuators) 122 connection flexible sheets, 110 formations.
Embodiment seven: Figure 17,18, the 19th, multichannel of the present invention initiatively accurately control micro-fluid pump the 7th embodiment's plan view, A-A sectional view, B-B sectional view.Microfluidic valve 184,192,179,173,180 is symmetric arrangement at the center on five surfaces of the cube pump housing 168, and described cylindrical pump chamber 212 is arranged in the 6th center of the cube pump housing 168.Be positioned at the microfluidic valve 184 of two opposing sides of the cube pump housing, 179 cylinder type center hole 216,202 directly link to each other, be positioned at the microfluidic valve 173 of two opposing sides of the cube pump housing, 180 cylinder type center hole 233,227 directly link to each other, be positioned at the cylindrical center bore 194 of cylindrical pump chamber 212 apparent surfaces' microfluidic valve 192 and link to each other with cylinder type pump chamber 212 by flow channels 213, the cylindrical center bore of all microfluidic valves intersects and is communicated with cylindrical pump chamber 212 at the center of the pump housing, microfluidic valve 184,192,179,173,180 film executive component 217,191,203,231,226 pass through seal ring 221 separately, 174,205,236,223 cover the surface of valve pocket, and by valve gap 185,190,177,171,182 are pressed on respectively on the pump housing 168.The film executive component 209 of pump covers on the pump chamber 212, and is pressed on the pump housing by pump cover 169.The circle ring column valve pocket 215,198,199,235,229 of microfluidic valve 184,192,179,173,180 links to each other with liquid entering hole/liquid outlet by flow channels respectively.The film executive component 217,191,203,231,226 of microfluidic valve connects flexible sheet 220,197,200,230,224 by disc piezoelectric constant circular disc/disc electrostriction ceramics sheet 218,193,204,232,225 respectively and constitutes.The film executive component 209 of micro-fluid pump connects flexible sheet 221 by disc piezoelectric constant circular disc/disc electrostriction ceramics sheet 210 and constitutes.The described cube pump housing is installed each surface of microfluidic valve can uniform a plurality of microfluidic valves, as long as the circle ring column valve pocket can link to each other with the liquid entering hole/liquid outlet on suitable surface, its cylindrical center bore directly links to each other with pump chamber, and the circle ring column valve pocket links to each other with the liquid entering hole/liquid outlet that is installed in suitable surface.
Embodiment eight: Figure 20,21, the 22nd, multichannel of the present invention initiatively accurately control the 8th kind of embodiment's of micro-fluid pump plan view, A-A sectional view, B-B sectional view.Figure 20,21, the 22nd, the present invention's 5 passages initiatively accurately control micro-fluid pump embodiment, and its main distinction with the initiatively accurate control micro-fluid pump of 5 passages shown in Figure 17,18,19 embodiment is the different of pump chamber.Initiatively accurately control among the micro-fluid pump embodiment at the present invention's 5 passages that Figure 20,21,22 provides, cylindrical pump chamber 238 has passed through the center of the pump housing, makes the cylindrical center bore 216,202,194,233,227 of all microfluidic valves 184,192,179,173,180 directly to link to each other with pump chamber.
Embodiment nine: Figure 23,24, the 25th, multichannel of the present invention initiatively accurately control micro-fluid pump the 9th embodiment's plan view, A-A sectional view, B-B sectional view.Figure 23,24,25 the present invention, 5 passages initiatively accurately control micro-fluid pump embodiment and 5 passages shown in Figure 17,18,19 main distinction of initiatively accurately controlling micro-fluid pump embodiment to be to constitute the film executive component of microfluidic valve different.Initiatively accurately control among the micro-fluid pump embodiment at Figure 23,24,25 the present invention, 5 passages, the film executive component 266,259,264,270,274 that constitutes microfluidic valve 267,260,263,260,276 is respectively by constituting on the electric controllable execution element of linearity (stack the type piezoelectric ceramic actuator, stack type electrostriction ceramics final controlling element, magnetostrictive actuator and other microdisplacement actuators) 268,261,262,261, the 275 connection flexible sheets 220,197,200,230,224.
Embodiment ten: Figure 26,27, the 28th, multichannel of the present invention initiatively accurately control micro-fluid pump the tenth embodiment's plan view, A-A sectional view, B-B sectional view.Figure 26,27, the 28th, the present invention's 5 passages initiatively accurately control micro-fluid pump embodiment and 5 passages shown in Figure 23,24,25 main distinction of initiatively accurately controlling micro-fluid pump embodiment are to constitute film executive component different of pump.At Figure 26,27, the 28th, the present invention's 5 passages are initiatively accurately controlled among the micro-fluid pump embodiment, and the film executive component 279 of pump constitutes by being connected on the flexible sheets 211 by the electric controllable execution element of linearity (stack the type piezoelectric ceramic actuator, stack type electrostriction ceramics final controlling element, magnetostrictive actuator and other microdisplacement actuators) 278.
For the those skilled in the art, based on principle of the present invention to multichannel initiatively accurately the control micro-fluid pump obvious change and conspicuous distortion does not all depart from the scope of the present invention and spirit.Carry out detailed description though the present invention gets in touch specific embodiment, be not limited only to described embodiment.Only however the version that deviates from this invention scope and spirit all should regard as within the protection domain that belongs to claim of the present invention.
Claims (10)
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| CN2008100693796A CN101354029B (en) | 2008-02-20 | 2008-02-20 | Micro-fluid pump with multi-channel active control capability |
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| CN2008100693796A CN101354029B (en) | 2008-02-20 | 2008-02-20 | Micro-fluid pump with multi-channel active control capability |
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| CN104508342A (en) * | 2012-08-16 | 2015-04-08 | 费斯托股份有限两合公司 | Fluid valve |
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| CN110805547A (en) * | 2019-11-13 | 2020-02-18 | 重庆大学 | PCB-integrated piezo-actuated fluid pump |
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| CN110809359A (en) * | 2019-11-13 | 2020-02-18 | 重庆大学 | Controllable multi-point active fluid cooling system integrated on the PCB |
| CN110798965A (en) * | 2019-11-13 | 2020-02-14 | 重庆大学 | Controllable active fluid heat dissipation system of electronic component integrated on PCB |
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