CN101328576B - A vacuum coating device and an atmospheric rotary table used for the device - Google Patents

Abstract

The invention discloses vacuum coating equipment, which comprises a vacuum coating chamber used to carry out vacuum coating of a workpiece, an atmosphere return cabin and an atmosphere turntable, wherein an inlet of the atmosphere return cabin is close to an outlet of the vacuum coating chamber, while an outlet of the atmosphere return cabin is close to an inlet of the vacuum coating chamber; the atmosphere turntable is close to the outlet of the vacuum coating chamber and the inlet of the atmosphere return cabin; moreover, the atmosphere turntable comprises a rotary mechanism, a third movable mechanism used to carry a workpiece support from the vacuum coating chamber to the atmosphere turntable and a fourth movable mechanism used to carry the workpiece support from the atmosphere turntable to the inside of the atmosphere return cabin; and the third movable mechanism and the fourth movable mechanism rotates along with the rotary mechanism so as to exchange positions. The vacuum coating equipment adopts the atmosphere turntable to reclaim coated workpiece, and has small land occupation, quick reclaiming tempo and low requirements on transmission accuracy and sealing so as to be beneficial to equipment maintenance.

Description

A vacuum coating device and an atmospheric rotary table used for the device

technical field

The invention relates to a vacuum coating device and an atmospheric rotary table used for the device.

Background technique

Since it is necessary to ensure the purification of the working environment when coating some products such as glass, the layout of the existing coating production line such as the ITO continuous vacuum coating production line is usually to load the film from the purification operation room and complete the coating through the vacuum coating equipment. Then return to the purification operation room to unload the film. Due to the high cost of the purification operation room, the loading and unloading of the wafers are usually designed in the same purification operation room, which requires the workpiece to be folded back to the loading operation room after coating, and the corresponding vacuum coating equipment is also folded back. The existing fold-back vacuum coating equipment mainly includes two methods: (1) vacuum double-sided coating + outlet translation + atmospheric return frame; (2) vacuum single-sided coating + vacuum rotary return frame.

For the first method, its vacuum coating equipment includes a vacuum double-sided coating chamber, a translational recovery table and an atmospheric return warehouse; the workpiece to be coated, such as a glass substrate, is loaded into the vacuum double-sided coating chamber from the purification operation room, and the workpiece rack is loaded with the workpiece to be coated Moving in the vacuum coating chamber, the vacuum double-sided coating chamber coats the workpiece to be coated. When the coating is completed, the workpiece rack to be coated moves to the translation recovery table and connects with the workpiece rack on the translation recovery table. The coated workpiece is taken from the vacuum coating chamber. Transfer to the translation recovery table, where the workpiece rack loaded with coated workpieces is translated from the position connected to the vacuum coating chamber to the position connected to the atmospheric return chamber. The atmospheric return chamber does not need to be designed as a vacuum environment, but it needs It is a high-purification environment, and the coated workpiece is transferred from the translation recovery table to the atmospheric return bin, and then turned back from the atmospheric return bin to the same purification operation room for unloading.

For the second method, its vacuum coating equipment includes a first vacuum coating chamber, a second vacuum coating chamber and a vacuum rotary table. The workpiece to be coated enters the first vacuum coating chamber from the purification operation room to start coating and move in it to complete the coating process. After arriving at the vacuum rotary table, the vacuum rotary table transfers the workpiece from the first vacuum coating chamber to the second vacuum coating chamber which is roughly parallel to the first vacuum coating chamber but opposite to the running direction, and continues to coat. The workpiece is in the second vacuum coating chamber. After coating in the chamber, return to the purification operation room.

The above two methods have their own defects. The first method not only occupies a large area due to the use of a translation recovery table, but also has a low production cycle, usually greater than 100s/pitch. The second method uses a vacuum rotary table, which requires a vacuum environment, and requires vacuum sealing with the first vacuum coating chamber and the second vacuum coating chamber, so it has high requirements for transmission accuracy and vacuum sealing, which increases manufacturing and difficult to maintain.

Contents of the invention

In order to solve the above technical problems, the present invention proposes a vacuum coating equipment and an atmospheric rotary table used for the equipment, which not only improves the production cycle, but also reduces the transmission accuracy and sealing requirements, and is more convenient for maintenance.

In order to achieve the above object, the present invention adopts the following technical solutions:

A vacuum coating device, comprising a vacuum coating chamber for vacuum coating a workpiece, a first moving mechanism located in the vacuum coating chamber for transporting a workpiece rack for carrying workpieces through the vacuum coating chamber, an atmospheric return bin and The second moving mechanism located in the atmospheric return bin is used to transport the workpiece rack for carrying workpieces through the atmospheric return bin. The first moving mechanism and the second moving mechanism operate in opposite directions, and the entrance of the atmospheric return bin It is close to the exit of the vacuum coating chamber, and the outlet of the atmospheric return chamber is close to the entrance of the vacuum coating chamber. It also includes an atmospheric rotary table, which is close to the exit of the vacuum coating chamber and the entrance of the atmospheric return chamber. The atmospheric rotary table It includes a rotating mechanism, a third moving mechanism for transporting the workpiece frame from the vacuum coating chamber to the atmospheric rotary table, and a fourth mobile mechanism for transporting the workpiece frame from the atmospheric rotary table to the atmospheric return bin. The third moving mechanism and the fourth moving mechanism rotate with the rotating mechanism to exchange positions; the third moving mechanism is located in the running direction of the first moving mechanism in a static state, and the fourth moving mechanism is located in a second moving direction in a static state. The operation of the mechanism is in the opposite direction, that is, the third moving mechanism is located on a track extending along which the first moving mechanism runs in a static state, and the fourth moving mechanism is located in a static state along which the second moving mechanism runs on the track extending in the opposite direction.

In a preferred implementation of the present invention, the rotating mechanism includes a rotating turntable, the third moving mechanism and the fourth moving mechanism are respectively fixed on two opposite sides of the rotating turntable, and the atmospheric turntable also includes Or the upper edge, and two fixing mechanisms respectively corresponding to the third moving mechanism and the fourth moving mechanism.

The rotation mechanism also includes a rotation motor and a turntable bearing, the turntable bearing is coupled with the output end of the rotation motor, and the rotary turntable and the turntable bearing are fastened together.

The third moving mechanism and the fourth moving mechanism respectively include a driving motor and at least two friction driving wheels driven and rotated by the driving motor, and the friction driving wheels are fixed on the outer surface of the rotating turntable; the fixing mechanism is used for accommodating Inverted "U" track on the upper edge of the workpiece holder.

Preferably, the inverted "U" track is a magnetic track, and a magnetic strip opposite to the magnetic track is provided on the upper edge of the workpiece holder.

Both ends of the magnetic track are bell mouths, and the atmospheric turntable also includes a magnetic track support on the rotary turntable for fixing the magnetic track.

Further, the atmospheric turntable further includes position sensors located on the same outer surface as the friction drive wheel, and there are at least two position sensors on each side.

The shortest distance from the rotation center of the rotation mechanism to the outlet of the vacuum coating chamber and the inlet of the atmospheric return chamber is greater than the maximum radial distance between the edge of the rotation mechanism and the rotation center.

The vacuum coating equipment also includes a workpiece loading and unloading table with the same structure as the atmospheric rotary table, and the workpiece loading and unloading table is close to the entrance of the vacuum coating chamber and the exit of the atmospheric return chamber.

The present invention also proposes an atmospheric turntable for vacuum coating equipment, including a rotating mechanism, a third moving mechanism and a fourth moving mechanism, the third moving mechanism is located at a position where the first moving mechanism runs along it in a static state On the track extending in the direction of the second moving mechanism, it is used to transport the workpiece frame from the vacuum coating chamber to the atmospheric turntable, and the fourth moving mechanism is located on the track extending in the opposite direction to the running of the second moving mechanism in a static state. When the workpiece frame is transported from the atmospheric turntable to the atmospheric return bin, the third moving mechanism and the fourth moving mechanism rotate with the rotating mechanism to exchange positions; the rotating mechanism includes a rotating turntable, the third moving mechanism and The fourth moving mechanism is respectively located on two opposite sides of the rotary turntable.

The rotary mechanism includes a rotary motor, a turntable bearing and a rotary turntable, the turntable bearing is coupled to the output end of the rotary motor, and the rotary turntable and the turntable bearing are fastened together; the third moving mechanism and the fourth moving mechanism are respectively It is fixed on two opposite sides of the rotary turntable, and the atmospheric turntable also includes two fixing mechanisms located above the rotary turntable and respectively corresponding to the third moving mechanism and the fourth moving mechanism.

The third moving mechanism and the fourth moving mechanism respectively include a driving motor and at least two friction driving wheels driven and rotated by the driving motor, and the friction driving wheels are fixed on the outer surface of the rotating turntable; the fixing mechanism is used for accommodating Inverted "U" shaped magnetic track on the upper edge of the workpiece holder.

The atmospheric turntable also includes position sensors located on the same outer surface as the friction drive wheel, and there are at least two position sensors on each side.

Compared with prior art, the beneficial effect of the present invention is:

The invention adopts the atmospheric rotary table to recycle the coated workpiece. The rotary recovery table has a small footprint and a fast recovery cycle. It can work in an atmospheric environment instead of a vacuum environment. It does not require high transmission accuracy and sealing. Conducive to equipment maintenance.

The workpiece loading and unloading table adopts the same structure as the atmospheric rotary table, so that the operator can complete the loading and unloading of the workpiece without changing the position, which simplifies the operation and improves the work efficiency.

Description of drawings

Fig. 1 is the structural representation of the vacuum coating equipment of the specific embodiment of the present invention;

Fig. 2 is a three-dimensional structure diagram of an atmospheric turntable according to a specific embodiment of the present invention;

Fig. 3 is an exploded structure diagram of an atmospheric turntable according to a specific embodiment of the present invention;

Fig. 4-A is the front view of the atmospheric turntable of the specific embodiment of the present invention;

Fig. 4-B is a side view of an atmospheric turntable according to a specific embodiment of the present invention;

Fig. 4-C is a top view of an atmospheric turntable according to a specific embodiment of the present invention;

Fig. 5 is a three-dimensional structure diagram of a vacuum coating device according to a specific embodiment of the present invention.

Detailed ways

The solutions and effects of the present invention will be further described in detail below in conjunction with the accompanying drawings.

Embodiment one:

Please refer to Fig. 1 and Fig. 5, the vacuum coating equipment of the present invention comprises workpiece loading and unloading platform 1, vacuum coating chamber 2, atmospheric rotary table 3 and atmospheric return warehouse 4, and workpiece loading and unloading platform 1 is placed in the purification operation room, near the vacuum coating chamber 2 and the outlet of the atmospheric return chamber 3; the entrance of the atmospheric return chamber 4 is close to the outlet of the vacuum coating chamber 2, and the outlet is close to the entrance of the vacuum coating chamber 2. The atmospheric return chamber 4 and the vacuum coating chamber 2 can be arranged side by side in parallel, The atmospheric turntable 3 is close to the exit of the vacuum coating chamber 2 and the entrance of the atmospheric return chamber 4 . At the workpiece loading and unloading platform 1, the workpiece to be plated, such as a glass substrate, is installed on the workpiece frame, and the workpiece frame moves into the vacuum coating chamber 2 from the workpiece loading and unloading platform 1 with the workpiece, and the workpiece frame is loaded with the workpiece to be plated. The vacuum coating chamber 2 coats the workpiece to be coated. When the coating is finished, the workpiece rack moves to the atmospheric rotary table 3, and the coated workpiece is transferred from the vacuum coating chamber 2 to the atmospheric rotary table 3. The atmospheric rotary table 3 will be loaded with the coated workpiece. The workpiece rack rotates from the exit position of the vacuum coating chamber 2 to the inlet position of the atmospheric return bin 4, and then the workpiece rack loaded with coated workpieces is transferred from the atmospheric rotary table 3 to the atmospheric return bin 4 and returns to the purification operation from the atmospheric return bin 4 Between the workpiece loading and unloading table 1 unloading. The air return bin 4 is constantly filled with purified gas to make it in a high pressure state relative to the external environment, so that dust can be discharged to ensure the purification state in the air return bin 4 .

The movement of the workpiece frame of loading the workpiece in the vacuum coating chamber 2 and the atmosphere return bin 4 is by means of the first moving mechanism (not shown in the accompanying drawings) in the vacuum coating chamber 2 and the second movement in the atmosphere return bin 4 Mechanism (not shown in the drawings), the running direction of the first moving mechanism and the second moving mechanism are opposite, all adopt the moving mechanism of the prior art, for example, the conveyor belt can be driven by a motor so that the workpiece holder moves with the conveyor belt. Or drive the rotating wheels along the axial distribution of the vacuum coating chamber 2 and the atmosphere back to the warehouse 4 with a motor, the workpiece frame is upright on the rotating wheel, and the rotating wheel rotates under the motor drive, and the workpiece frame is moved by the frictional force of rotation.

Please refer to Fig. 2, 3, 4-A, 4-B and 4-C, the atmosphere turntable 3 of the present invention comprises turntable base 31, fixing mechanism 32, fixing mechanism support 33, position sensor 34, sensor mount 35, rotating mechanism, the third mobile mechanism and the fourth mobile mechanism. The rotating mechanism comprises a rotating turntable 361, a turntable bearing 362, a bearing fixing plate 363 and a rotating motor 364; Coupling, the rotating turntable 361 is placed on the turntable bearing 362 and fastened together with the turntable bearing 362; the rotating drive force is output by the rotating motor 364, and the turntable bearing 362 rotates and drives the rotating turntable 361 to rotate on the turntable base 31. The 3rd moving mechanism and the 4th moving mechanism are respectively positioned at the opposite two sides of rotating turntable 361, and the 3rd moving mechanism is positioned at the track that the first moving mechanism in the vacuum coating chamber 2 extends along its running direction under static state, and the 4th moving mechanism The second moving mechanism in the air return bin 4 is located on a track extending in the opposite direction of its operation in a stationary state. The third moving mechanism is used to receive the workpiece frame from the vacuum coating chamber 2 and transport the workpiece frame to the third moving mechanism. After the third moving mechanism and the fourth moving mechanism rotate 180 degrees with the rotary turntable 361, the third moving mechanism and the fourth moving mechanism exchange positions, and the original third moving mechanism becomes a new fourth moving mechanism, and the workpiece on it The frame is transported and sent into the atmospheric return warehouse 4, and the original fourth moving mechanism becomes a new third moving mechanism to receive the workpiece frame from the vacuum coating chamber 2.

Because the atmospheric rotary table 3 needs to rotate, the atmospheric rotary table 3 cannot be close to the vacuum coating chamber 2 and/or the atmospheric return chamber 4, and the rotation center of the atmospheric rotary table 3 is respectively connected to the exit of the vacuum coating chamber 2 and the entrance of the atmospheric return chamber 4 The shortest distance should be greater than the maximum radial distance of the edge of the rotating mechanism relative to the center of rotation, so as to ensure that the atmospheric turntable 3 will not touch or collide with the vacuum coating chamber 2 and the atmospheric return chamber 4 when rotating.

The 3rd moving mechanism and the 4th moving mechanism comprise driving motor 371, driving belt 372 and friction driving wheel 373 respectively, and friction driving wheel 373 is fixed on the outer surface of rotating turntable 361, is " one " font, and the number of friction driving wheel 373 is different The limit can be 2, 3, 4 and so on. Driven by the drive motor 371, the drive belt 372 can drive the friction drive wheel 373 to rotate.

The fixed mechanism support 33 is installed on the rotary turntable 361, and two fixed mechanisms 32 are installed on it, corresponding to the third mobile mechanism and the fourth mobile mechanism respectively; The fixed mechanism 32 is used to accommodate the upper edge of the workpiece holder, so that the workpiece holder Stand upright on the friction drive wheel 373 and can not tip over to both sides. In this embodiment, the fixing mechanism 32 is an inverted "U"-shaped magnetic track, and the opening 321 is a trumpet shape, so as to prevent the workpiece rack from being slightly off the track, the workpiece rack can also be guided into the track, and the workpiece rack can be corrected back on the track . The working principle of the present invention is explained below.

After the workpiece is coated, the workpiece rack loaded with the coated workpiece is moved out of the vacuum coating chamber 2 by the first moving mechanism, and then transferred to the third moving mechanism of the atmospheric rotary table 3. At this time, the lower edge of the workpiece rack is moved by the third moving mechanism The first friction driving wheel 373 in the support, the upper edge then enters into the magnetic track as the fixing mechanism 32, and the magnetic strip opposite to the magnetic track is installed above the workpiece holder, and the workpiece holder can stand upright on the The friction drive wheel 373 is not in contact with any one side of the magnetic track; this can make the upper edge almost no friction when the workpiece holder moves on the moving mechanism, which is conducive to the movement of the workpiece holder.

After the workpiece rack has completely entered the atmospheric turntable 3, the rotating motor 364 drives the rotary turntable 361 to rotate, and the third moving mechanism and the fourth moving mechanism follow the rotating mechanism to rotate to exchange positions so that the coated workpiece is transferred from the outlet of the vacuum coating chamber 2 to the atmosphere Return to the entrance of the bin 4, and then move the coated workpiece into the atmosphere back bin 4 in the same way and return to the purification operation room for unloading; after the third moving mechanism and the fourth moving mechanism exchange positions, the third moving mechanism will have While the coated workpieces are moved into the atmospheric return bin 4, the fourth moving mechanism can continue to receive the coated workpieces from the vacuum coating chamber 2.

Of course, the shape of the fixing mechanism 32 in this embodiment is not limited to the inverted "U" shape, it can also be an inverted "V" shape or an inverted "L" shape, etc. The opening can also be in other shapes, and the use of magnetic tracks is not limited. , general orbits can also be used.

Embodiment two:

On the basis of Embodiment 1, a position sensor 34 is further added. The position sensor 34 and the friction drive wheel 373 are located on the same outer surface, and are installed on the rotary turntable 361 through the sensor mounting base 35. The number is not limited, and can be 2 or 3. , 4 and so on. The position sensor 34 is used to detect the moving position of the workpiece holder, and transmits the detection result to a PLC (programmable logic controller, not shown in the drawings), which controls the motor to rotate and stop according to the detection result.

It is advisable to have four friction drive wheels for the third moving mechanism and the fourth moving mechanism, and two position sensors 34 can be arranged on each side. If the four friction driving wheels on each side are the first friction driving wheel, the second friction driving wheel, the third friction driving wheel and the fourth friction driving wheel according to the direction of its operation, for the third moving mechanism, then the One position sensor is set on the right side of the first friction drive wheel, and the second position sensor is set on the left side of the fourth friction drive wheel. For the fourth movement mechanism, the first position sensor is set on the first friction drive wheel. The left side of the wheel, while the second position sensor is placed on the right side of the fourth friction drive wheel. When the first position sensor on the third moving mechanism side senses that the workpiece holder moves over, the position signal of the workpiece holder is transmitted to the PLC, and the PLC controls the drive motor 371 to output corresponding power to drive the friction drive wheel 373 to rotate, and the workpiece holder relies on The friction between it and the friction drive wheel moves it forward. When the second position sensor sensed the position of the workpiece rack, the signal was passed to the PLC, and the PLC controlled the driving motor 371 to stop, the friction drive wheel 373 stopped rotating, and the workpiece rack also stopped moving. At the same time, the PLC judges whether the second position sensor of the fourth moving mechanism senses that the workpiece rack is removed, that is, it judges the workpiece loaded with the coated workpiece that was transferred from the outlet of the vacuum coating chamber 2 to the inlet of the atmospheric return chamber 4 during the previous rotation. Whether the frame has entered the atmosphere back to the warehouse 4, if so, the control rotation motor 364 rotates, the rotary turntable 361 rotates, and the third mobile mechanism and the fourth mobile mechanism exchange positions.

Embodiment three:

This embodiment is a further improvement on the basis of the first or second basic embodiment, that is, the workpiece loading and unloading platform 1 adopts the same structure as the atmospheric rotary table 3. When the workpiece rack loaded with coated workpieces moves to the outlet of the atmospheric return bin 4, Move to the workpiece loading and unloading table 1, the workpiece loading and unloading table 1 rotates 180 degrees, the workpiece rack of the coated workpiece is transferred to the entrance of the vacuum coating chamber 2, the operator unloads the coated workpiece, and then installs the workpiece to be coated. The workpiece, the workpiece to be coated is sent into the vacuum coating chamber 2. In this embodiment, the operator can complete the loading and unloading of the workpiece without changing the position, which simplifies the operation and improves the working efficiency.

In summary, the present invention adopts the atmospheric rotary table in the vacuum coating equipment, which not only occupies a small area, but also has a fast recycling cycle, which can reach 60 seconds. At the same time, the atmospheric rotary method does not require a vacuum seal between the atmospheric rotary table, the vacuum coating chamber, and the atmospheric return chamber, so the requirements for transmission accuracy and sealing are lower than that of the vacuum rotary method. The rotary table bearing is used to complete the rotation, and the equipment is simple and low in cost. Conducive to operation and maintenance. Moreover, the loading and unloading of workpieces can be performed in the same purification operation room, which reduces the cost of the purification operation room. At the same time, the loading and unloading of workpieces can be at the same station, which improves work efficiency.

The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be assumed that the specific implementation of the present invention is limited to these descriptions. For those of ordinary skill in the technical field of the present invention, without departing from the concept of the present invention, some simple deduction or replacement can be made, which should be regarded as belonging to the protection scope of the present invention.

Claims (13)

1. A vacuum coating equipment, comprising a vacuum coating chamber for carrying out vacuum coating to a workpiece, being positioned in the vacuum coating chamber for transporting the workpiece rack for carrying the workpiece and passing through the first moving mechanism of the vacuum coating chamber, an atmospheric return The warehouse and the second moving mechanism located in the atmospheric return warehouse are used to transport the workpiece rack for carrying workpieces and pass through the atmospheric return warehouse. The running directions of the first moving mechanism and the second moving mechanism are opposite, and the atmospheric return warehouse The entrance of the vacuum coating chamber is close to the exit of the vacuum coating chamber, and the outlet of the atmospheric return chamber is close to the entrance of the vacuum coating chamber. , the atmospheric turntable includes a rotating mechanism, a third moving mechanism for transporting the workpiece frame from the vacuum coating chamber to the atmospheric rotary table, and a fourth moving mechanism for transporting the workpiece frame from the atmospheric rotary table to the atmospheric return bin. The moving mechanism, the third moving mechanism and the fourth moving mechanism rotate with the rotating mechanism to exchange positions; the third moving mechanism is located on a track extending along the running of the first moving mechanism in a static state, and the fourth moving mechanism In the stationary state, the moving mechanism is located on a track extending in the opposite direction to the running direction of the second moving mechanism. 2. The vacuum coating device according to claim 1, wherein the rotating mechanism comprises a rotating turntable, and the third moving mechanism and the fourth moving mechanism are respectively fixed on two opposite sides of the rotating turntable, so The atmospheric turntable further includes two fixing mechanisms located above or on the upper edge of the turntable and corresponding to the third moving mechanism and the fourth moving mechanism respectively. 3. The vacuum coating equipment according to claim 2, characterized in that: the rotating mechanism further comprises a rotating motor and a turntable bearing, the turntable bearing is coupled with the output end of the turning motor, and the rotating turntable is fastened to the turntable bearing together. 4. The vacuum coating device according to claim 3, characterized in that: the third moving mechanism and the fourth moving mechanism respectively comprise a driving motor, at least two friction driving wheels driven to rotate by the driving motor, and the friction driving The wheels are fixed on the outer surface of the rotary turntable; the fixing mechanism is an inverted "U" track for accommodating the upper edge of the workpiece holder. 5. The vacuum coating equipment according to claim 4, characterized in that: the inverted "U" track is a magnetic track, and the upper edge of the workpiece holder is provided with a magnetic strip magnetically opposite to the magnetic track. 6. The vacuum coating equipment according to claim 5, characterized in that: the two ends of the magnetic track are bell mouths, and the atmospheric turntable also includes a magnetic track support on the rotary turntable for fixing the magnetic track . 7. The vacuum coating equipment according to any one of claims 4 to 6, characterized in that: the atmospheric turntable also includes a position sensor located on the same outer surface as the friction drive wheel, and the position sensor on each side There are at least two. 8. The vacuum coating equipment according to any one of claims 1 to 6, characterized in that: the shortest distance from the center of rotation of the rotating mechanism to the outlet of the vacuum coating chamber and the inlet of the atmospheric return chamber is greater than that of the rotating mechanism The maximum radial distance of the edge of , relative to the center of rotation. 9. The vacuum coating equipment according to any one of claims 1 to 6, characterized in that: it also includes a workpiece loading and unloading table with the same structure as the atmospheric rotary table, and the workpiece loading and unloading table is close to the entrance of the vacuum coating chamber and the atmosphere Back to the exit of the warehouse. 10. An atmospheric turntable for vacuum coating equipment, characterized in that it includes a rotating mechanism, a third moving mechanism and a fourth moving mechanism, the third moving mechanism is positioned at a position where the first moving mechanism is positioned along its On the track extending in the running direction, it is used to transport the workpiece frame from the vacuum coating chamber to the atmospheric turntable, and the fourth moving mechanism is located on the track extending in the opposite direction to the running direction of the second moving mechanism in a static state, Used to transport the workpiece rack from the atmospheric turntable to the atmospheric return bin, the third moving mechanism and the fourth moving mechanism rotate with the rotating mechanism to exchange positions; the rotating mechanism includes a rotating turntable, and the third moving mechanism and the fourth moving mechanism are respectively located on opposite sides of the rotary turntable. 11. The atmospheric turntable as claimed in claim 10, characterized in that: the rotating mechanism comprises a rotating motor, a turntable bearing and a rotating turntable, the turntable bearing is coupled with the output end of the turning motor, and the rotating turntable and the turntable bearing fastened together; the third moving mechanism and the fourth moving mechanism are respectively fixed on the two opposite sides of the rotary turntable, and the atmospheric turntable also includes the third moving mechanism and the fourth moving Two fixed mechanisms corresponding to the mechanism respectively. 12. The atmospheric turntable as claimed in claim 11, characterized in that: the third moving mechanism and the fourth moving mechanism respectively comprise a driving motor, at least two friction driving wheels driven and rotated by the driving motor, and the friction driving The wheels are fixed on the outer surface of the rotary turntable; the fixing mechanism is an inverted "U"-shaped magnetic track for accommodating the upper edge of the workpiece holder. 13. The atmospheric turntable according to claim 12, further comprising position sensors located on the same outer surface as the friction drive wheel, and there are at least two position sensors on each side.

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