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CN101324445A - Distributed fiber optic white light interferometric sensor array based on tunable Fabry-Perot resonator - Google Patents

Distributed fiber optic white light interferometric sensor array based on tunable Fabry-Perot resonator Download PDF

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CN101324445A
CN101324445A CNA2008101368335A CN200810136833A CN101324445A CN 101324445 A CN101324445 A CN 101324445A CN A2008101368335 A CNA2008101368335 A CN A2008101368335A CN 200810136833 A CN200810136833 A CN 200810136833A CN 101324445 A CN101324445 A CN 101324445A
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perot resonant
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CN101324445B (en
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苑立波
杨军
朱晓亮
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Harbin Engineering University
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Abstract

本发明提供的是一种基于可调Fabry-Perot谐振腔的分布式光纤白光干涉传感器阵列。由双工光电器件、可调Fabry-Perot谐振腔、单模连接光纤、传感器构成;可调Fabry-Perot谐振腔由扫描棱镜、自聚焦透镜、具有部分反射面的单模光纤连接构成;双工光电器件由具有共基极、发射极、集电极的宽谱光源与光电探测器通过分光棱镜组成;光源出射的具有一定光谱宽度的光束通过分光棱镜直接达到谐振腔,被谐振腔的左右腔面多次反射后,信号光从右腔面输出;信号光经单模连接光纤进入传感器,分别被传感器的左右两个端面反射后沿原路返回,再次经过谐振腔,从其左腔面输出后,到达光电探测器。本发明具有共光路结构,温度稳定性好;具有最简光纤光路结构,造价低廉、实用性强。

Figure 200810136833

The invention provides a distributed optical fiber white light interference sensor array based on an adjustable Fabry-Perot resonant cavity. It is composed of a duplex photoelectric device, an adjustable Fabry-Perot resonant cavity, a single-mode connecting optical fiber, and a sensor; an adjustable Fabry-Perot resonant cavity is composed of a scanning prism, a self-focusing lens, and a single-mode optical fiber connection with a partial reflection surface; the duplex The photoelectric device is composed of a wide-spectrum light source with a common base, an emitter, and a collector, and a photodetector through a beam-splitting prism; the light beam with a certain spectral width emitted by the light source directly reaches the resonator through the beam-splitting prism, and is absorbed by the left and right cavity surfaces of the resonator. After multiple reflections, the signal light is output from the right cavity surface; the signal light enters the sensor through the single-mode connection optical fiber, is respectively reflected by the left and right end surfaces of the sensor, returns along the original path, passes through the resonant cavity again, and is output from the left cavity surface , reaching the photodetector. The invention has a common optical path structure, good temperature stability, the simplest optical fiber optical path structure, low cost and strong practicability.

Figure 200810136833

Description

基于可调Fabry-Perot谐振腔的分布式光纤白光干涉传感器阵列 Distributed fiber optic white light interferometric sensor array based on tunable Fabry-Perot resonator

(一)技术领域(1) Technical field

本发明涉及的是一种光纤技术领域,具体涉及一种基于可调Fabry-Perot谐振腔长实现对多个传感器信号问讯的分布式光纤白光干涉传感器阵列。The present invention relates to the field of optical fiber technology, in particular to a distributed optical fiber white light interference sensor array for interrogating multiple sensor signals based on an adjustable Fabry-Perot resonant cavity length.

(二)背景技术(2) Background technology

采用低相干、宽谱带光源,例如发光二极管(LED)、超自发辐射光源(ASE)或者多模激光二极管驱动的光纤干涉仪通常被称为白光光纤干涉仪。典型的光纤白光干涉仪如图1所示,其结构组成为利用光纤搭建Micheslon式干涉仪,并采用宽谱光源LED或者ASE对干涉仪进行驱动,为其提供光能,通过探测器探测白光干涉条纹实现对待测物理量的测量。其工作原理如下,由宽谱光源11发出的宽谱光进入单模光纤后,被3dB单模光纤2×2耦合器13分成两束,一束光进入被作为测量臂的单模光纤14,被其后端的光学反射面15反射后沿原路返回,经过单模光纤14、耦合器13到达光电探测器12,这束光称为测量信号光;由光源11发出光被耦合器13分路的另外一束光,进入作为参考臂的单模连接光纤16、自聚焦透镜17,经过移动反射镜18的反射后同样沿原路返回到达光电探测器12,这束光被称为参考信号光。测量信号光和参考信号光在探测器表面发生相干叠加,由于宽谱光源的相干长度很短,大约为几个微米到几十个微米,只有当参考信号光和测量信号光程差小于光源的相干长度时,才会产生相干叠加,输出白光干涉图样(参见附图2)。Fiber-optic interferometers driven by low-coherence, broadband light sources such as light-emitting diodes (LEDs), superspontaneous emission sources (ASE) or multimode laser diodes are often referred to as white-light fiber interferometers. A typical optical fiber white light interferometer is shown in Figure 1. Its structure is to use optical fiber to build a Micheslon interferometer, and use a wide-spectrum light source LED or ASE to drive the interferometer to provide light energy for it, and detect white light interference through a detector. The stripes realize the measurement of the physical quantity to be measured. Its working principle is as follows. After the broadband light emitted by the broadband light source 11 enters the single-mode fiber, it is divided into two beams by the 3dB single-mode fiber 2×2 coupler 13, and one beam enters the single-mode fiber 14 used as the measuring arm. After being reflected by the optical reflection surface 15 at the rear end, it returns along the original path, passes through the single-mode optical fiber 14 and the coupler 13 to reach the photodetector 12, and this beam of light is called the measurement signal light; the light emitted by the light source 11 is shunted by the coupler 13 Another beam of light enters the single-mode connecting optical fiber 16 and the self-focusing lens 17 as the reference arm, and returns to the photodetector 12 along the same path after being reflected by the moving mirror 18. This beam of light is called the reference signal light . The measurement signal light and the reference signal light coherently superimpose on the surface of the detector. Since the coherence length of the broadband light source is very short, about several microns to tens of microns, only when the optical path difference between the reference signal light and the measurement signal is less than the light source When the coherence length is greater than the coherence length, coherent superposition will be generated, and a white light interference pattern will be output (see Figure 2).

如图2所示,白光干涉条纹的特征是有一个主极大值,称为中心条纹,它与零光程差为之相对应,即对应于参考光束和测量光束光程相等时,称为参考光束与测量光束具有光程匹配关系。通过改变光纤延迟线的延迟量,使参考信号的光程发生变化,可以获得中心干涉条纹。中心条纹的位置为测量提供了一个可靠的绝对位置参考,当测量光束由于外界待测物理量的影响光程发生变化时,只需通过参考臂光程扫描得到的白光干涉条纹的位置变化,即可获得被测量物理量的绝对值。与其他光纤干涉仪相比,除了具有高灵敏度、本质安全、抗电磁场干扰等优点外,最大特点是可对压力、应变、温度等待测量进行绝对测量。因此白光干涉性光纤干涉仪被广泛用于物理量、机械量、环境量、化学量、生物医学量的测量。As shown in Figure 2, the characteristic of white light interference fringes is that there is a main maximum value, called the central fringe, which corresponds to zero optical path difference, that is, when the optical path of the reference beam and the measurement beam are equal, it is called The reference beam and the measuring beam have an optical path matching relationship. By changing the delay amount of the fiber delay line and changing the optical path of the reference signal, the central interference fringe can be obtained. The position of the central fringe provides a reliable absolute position reference for the measurement. When the optical path of the measuring beam changes due to the influence of the external physical quantity to be measured, only the position of the white light interference fringe obtained by scanning the reference arm optical path changes. Gets the absolute value of the measured physical quantity. Compared with other fiber optic interferometers, in addition to the advantages of high sensitivity, intrinsic safety, and anti-electromagnetic field interference, the biggest feature is that it can perform absolute measurements on pressure, strain, and temperature. Therefore, the white light interferometric fiber optic interferometer is widely used in the measurement of physical quantities, mechanical quantities, environmental quantities, chemical quantities, and biomedical quantities.

申请人于2006年提出了名称为“多路复用光纤干涉仪及其嵌套构建方法”、申请号为200610151043.5的发明专利申请,公开了可以构造传感器阵列和网络的全光纤干涉仪光纤及其实现方法,解决光纤干涉仪的多路复用问题;申请人还于2007提出了名称为“低相干绞扭式类Sagnac光纤形变传感装置”,申请号为200710072350.9的发明专利申请,公开了一种主要用来解决光纤传感器阵列布设过程中的抗毁坏的问题的技术方案。在上述公开文件中,特别是白光干涉仪连接有光纤传感器阵列时,本地的解调干涉仪与远端的传感干涉仪的光程通过光程匹配来实现光纤传感器阵列的问讯与解调。这样传感干涉仪阵列可以是完全无源的,其好处是阵列中输出的多个干涉信号对本地解调干涉仪和传感器阵列之间的连接光纤长度的变化不灵敏,增强了测量的稳定性和可靠性。In 2006, the applicant filed an invention patent application titled "Multiplexing Optical Fiber Interferometer and Its Nesting Construction Method" with the application number 200610151043.5, disclosing an all-fiber interferometer optical fiber that can construct sensor arrays and networks and its The implementation method solves the multiplexing problem of the optical fiber interferometer; the applicant also proposed an invention patent application named "Low Coherence Twisted Sagnac-like Optical Fiber Deformation Sensing Device" in 2007, and the application number is 200710072350.9, which discloses a A technical solution mainly used to solve the problem of anti-damage in the process of laying out the fiber optic sensor array. In the above public documents, especially when the white light interferometer is connected with a fiber optic sensor array, the optical paths of the local demodulation interferometer and the remote sensing interferometer are matched to realize interrogation and demodulation of the fiber optic sensor array. In this way, the sensing interferometer array can be completely passive, and the advantage is that the multiple interference signals output in the array are insensitive to the change of the length of the connecting fiber between the local demodulation interferometer and the sensor array, which enhances the stability of the measurement and reliability.

但在上述基于空分复用的干涉仪结构中,本地的解调干涉仪大多采用Michelson干涉仪、Mach-Zehnder干涉仪等分立式干涉仪结构。它们通常具有两个相互独立的光传输通道,用于实现光程调谐与匹配。但由于它不存在共光路结构,极易受到环境因素(诸如温度和振动)的影响,导致两光路的光程产生不一致的变化,使传感器信号的解调产生影响,降低了干涉仪的信号解调灵敏度,使测量的精度下降,长期的稳定性和可靠性无法保证;同时干涉仪的结构也较为复杂,不利用于干涉仪的实用化。However, in the above interferometer structures based on space division multiplexing, most of the local demodulation interferometers use discrete interferometer structures such as Michelson interferometers and Mach-Zehnder interferometers. They usually have two independent optical transmission channels for optical path tuning and matching. However, because it does not have a common optical path structure, it is easily affected by environmental factors (such as temperature and vibration), resulting in inconsistent changes in the optical path of the two optical paths, which affects the demodulation of the sensor signal and reduces the signal resolution of the interferometer. Adjusting the sensitivity will reduce the measurement accuracy, and the long-term stability and reliability cannot be guaranteed; at the same time, the structure of the interferometer is also relatively complicated, which is not suitable for the practical application of the interferometer.

(三)发明内容(3) Contents of the invention

本发明的目的在于提供一种具有共光路结构,温度稳定性好,光路结构简单,造价低廉,实用性强,可对分布式形变、应变、温度、压力等物理量进行传感探测的分布式光纤白光干涉传感器阵列。The purpose of the present invention is to provide a distributed optical fiber with a common optical path structure, good temperature stability, simple optical path structure, low cost, strong practicability, and capable of sensing and detecting distributed deformation, strain, temperature, pressure and other physical quantities. White light interferometric sensor array.

本发明的目的是这样实现的:The purpose of the present invention is achieved like this:

本发明的分布式光纤白光干涉传感器阵列是一种基于可调Fabry-Perot谐振腔长实现问讯的分布式光纤白光干涉传感器阵列,由双工光电器件1、可调Fabry-Perot谐振腔2、单模连接光纤3、传感器4构成;可调Fabry-Perot谐振腔2由扫描棱镜231、自聚焦透镜221、具有部分反射面211的单模光纤连接构成;双工光电器件1由具有共基极113、发射极112、集电极122的宽谱光源111与光电探测器121通过分光棱镜131组成;光源111出射的具有一定光谱宽度的光束通过分光棱镜131直接达到可调Fabry-Perot谐振腔2,被谐振腔的具有部分反射面211的单模光纤的左右腔面多次反射后,信号光从右腔面输出;信号光经单模连接光纤3进入传感器411,分别被传感器411的左右两个端面反射后沿原路返回,再次经过Fabry-Perot谐振腔2后,到达光电探测器121。The distributed optical fiber white light interference sensor array of the present invention is a distributed optical fiber white light interference sensor array based on the adjustable Fabry-Perot resonant cavity length to realize interrogation, and consists of a duplex photoelectric device 1, an adjustable Fabry-Perot resonant cavity 2, a Mode connection optical fiber 3, sensor 4 constitutes; Adjustable Fabry-Perot resonant cavity 2 is composed of scanning prism 231, self-focusing lens 221, single-mode optical fiber connection with partial reflection surface 211; Duplex optoelectronic device 1 is composed of common base 113 , the wide-spectrum light source 111 of the emitter 112 and the collector 122 and the photodetector 121 are composed of a beam splitting prism 131; the light beam with a certain spectral width emitted by the light source 111 directly reaches the adjustable Fabry-Perot resonant cavity 2 through the beam splitting prism 131, and is After multiple reflections on the left and right cavity surfaces of the single-mode optical fiber with partial reflection surface 211 of the resonator, the signal light is output from the right cavity surface; the signal light enters the sensor 411 through the single-mode connecting optical fiber 3, and is respectively received by the left and right end surfaces of the sensor 411 After reflection, return along the original path, pass through the Fabry-Perot resonant cavity 2 again, and reach the photodetector 121 .

所述的传感器4是将一组光纤传感器411首尾相接组成的串行传感器阵列。The sensor 4 is a serial sensor array composed of a group of optical fiber sensors 411 connected end to end.

所述的光纤传感器411是由两端具有一定反射率的垂直于光纤端面的一段任意长度的光纤段构成,它是将一段根据实际测量需要截取的单模光纤两端加装陶瓷插芯901,端面经过抛光处理后,得到垂直于传输光方向的反射率大于等于1%的光纤端面制成的光纤传感器。The optical fiber sensor 411 is composed of an optical fiber section of any length perpendicular to the end face of the optical fiber with a certain reflectivity at both ends. It is a section of single-mode optical fiber that is intercepted according to actual measurement needs and is equipped with a ceramic ferrule 901 at both ends. After the end face is polished, an optical fiber sensor made of an optical fiber end face with a reflectivity perpendicular to the direction of light transmission greater than or equal to 1% is obtained.

本发明提出了一种基于可调Fabry-Perot谐振腔长实现对多个传感器信号问讯的方法,基于此方法构造出一种单纤在线最简结构的分布式光纤白光干涉传感器阵列。这种光纤白光干涉仪具有共光路结构,温度稳定性好;具有的最简光路结构,造价低廉、实用性强,可对分布式形变、应变、温度、压力等物理量进行传感探测。本发明可用于大尺寸的智能结构监测,亦可用于多任务传感、多元传感、局部应变传感以及大尺度形变传感。The invention proposes a method for interrogating multiple sensor signals based on the adjustable Fabry-Perot resonant cavity length, and constructs a distributed optical fiber white light interference sensor array with the simplest structure on the single fiber line based on the method. This optical fiber white light interferometer has a common optical path structure and good temperature stability; it has the simplest optical path structure, low cost, strong practicability, and can sense and detect distributed deformation, strain, temperature, pressure and other physical quantities. The invention can be used for large-scale intelligent structure monitoring, and can also be used for multi-task sensing, multi-element sensing, local strain sensing and large-scale deformation sensing.

本发明通过将宽带光源和光电探测器构成发射与接受的双工光电器件,使参考光波与测量光波在同一光路中传输,通过调谐Fabry-Perot谐振腔长,使传感器反射回的参考光波与测量光波的光程发生匹配,获得白光干涉条纹,实现对多个传感器信号的问讯。In the present invention, the broadband light source and the photodetector constitute a duplex optoelectronic device for transmitting and receiving, so that the reference light wave and the measurement light wave are transmitted in the same optical path, and the reference light wave reflected by the sensor is matched with the measurement light wave by tuning the length of the Fabry-Perot resonant cavity. The optical paths of the light waves are matched to obtain white light interference fringes, realizing the interrogation of multiple sensor signals.

这种基于可调Fabry-Perot谐振腔长实现问讯的分布式光纤白光干涉传感器阵列,由宽谱光源、光电探测器、可调Fabry-Perot谐振腔、单模连接光纤、光纤传感器组成的阵列构成。This distributed optical fiber white light interferometric sensor array based on adjustable Fabry-Perot resonant cavity length to achieve interrogation is composed of an array composed of broadband light source, photodetector, adjustable Fabry-Perot resonant cavity, single-mode connecting optical fiber, and optical fiber sensor .

所述的宽谱光源与光电探测器通过分光棱镜构成发射和接收的双工光电器件。The wide-spectrum light source and the photodetector form a duplex photoelectric device for transmitting and receiving through a beam splitting prism.

所述的可调Fabry-Perot谐振腔,由扫描棱镜、自聚焦透镜、具有部分反射面的单模光纤共同构成光纤延迟线。The adjustable Fabry-Perot resonant cavity consists of a scanning prism, a self-focusing lens, and a single-mode optical fiber with a partial reflection surface to form an optical fiber delay line.

所述的光纤干涉仪中光纤Fabry-Perot谐振腔器件,其谐振腔的腔面反射率可在1%-99%之间任意取值。In the optical fiber Fabry-Perot resonant cavity device in the optical fiber interferometer, the cavity surface reflectivity of the resonant cavity can be arbitrarily selected between 1% and 99%.

所述的光纤干涉仪中光纤Fabry-Perot谐振腔器件,其腔长度可以变化。In the optical fiber Fabry-Perot resonant cavity device in the optical fiber interferometer, the cavity length can be changed.

所述的光纤传感器组成的阵列,是由一系列长度不等的单模光纤段构成首尾相接的串行阵列。The array composed of optical fiber sensors is a serial array connected end to end by a series of single-mode optical fiber segments with different lengths.

所述的组成基于可调Fabry-Perot谐振腔长实现问讯的分布式光纤白光干涉传感器阵列的光纤器件,包括宽带光源、光电探测器、可调Fabry-Perot谐振腔、单模连接光纤、光纤传感器阵列,都工作在单模状态。The composition is based on the adjustable Fabry-Perot resonant cavity length to realize the optical fiber device of the distributed optical fiber white light interference sensor array, including broadband light source, photodetector, adjustable Fabry-Perot resonant cavity, single-mode connection optical fiber, optical fiber sensor Arrays, all work in a single-mode state.

本发明的优点和特点是:Advantages and characteristics of the present invention are:

(1)本发明采用可调Fabry-Perot谐振腔长构造分布式光纤白光干涉传感器系统,使得解调干涉仪和光纤传感器阵列可以通过一条光纤进行连接,极大地简化了测量系统的光路结构;同时使测量光路和参考光路实现了共光路,提高了对环境的抗干扰能力。(1) The present invention adopts the adjustable Fabry-Perot resonator length to construct the distributed optical fiber white light interference sensor system, so that the demodulation interferometer and the optical fiber sensor array can be connected through an optical fiber, which greatly simplifies the optical path structure of the measurement system; at the same time The measurement optical path and the reference optical path realize a common optical path, which improves the anti-interference ability to the environment.

(2)采用可调Fabry-Perot谐振腔长构造分布式光纤白光干涉传感器系统,无需采用复杂的时分复用或频分复用技术,只需通过连续的空间光程扫描,即可实现对多个传感器信号的问讯和测量,技术简单,易于实现。(2) Using adjustable Fabry-Perot resonant cavity length to construct a distributed optical fiber white light interferometric sensor system, without using complex time-division multiplexing or frequency-division multiplexing technology, only through continuous spatial optical path scanning, multiple The interrogation and measurement of a sensor signal is simple in technology and easy to implement.

(3)本发明构造的分布式光纤白光干涉传感器阵列,可以实现光纤传感器布设的阵列化,在测量时各传感器互不影响,传感器标称长度可由几厘米到几百米,具有多任务传感、多元传感、局部应变传感与大尺度形变传感的能力。(3) The distributed optical fiber white light interference sensor array constructed by the present invention can realize the arraying of optical fiber sensors, and the sensors do not affect each other during measurement. , multiple sensing, local strain sensing and large-scale deformation sensing capabilities.

(4)使用白光光源与光电探测器构成的双工光电器件,使得测量光路与参考光路复用,极大地简化了系统的复杂程度,降低了测试费用,保证了测试系统的实时性,提高了测量的可靠性。(4) Using a duplex photoelectric device composed of a white light source and a photodetector, the measurement light path and the reference light path are multiplexed, which greatly simplifies the complexity of the system, reduces the test cost, and ensures the real-time performance of the test system. Measurement reliability.

(5)本发明采用的光纤材料和器件均为标准光纤通信元件,成本价格低廉,容易获得,有利于推广。(5) The optical fiber materials and devices used in the present invention are all standard optical fiber communication components, which are cheap, easy to obtain, and conducive to popularization.

(四)附图说明(4) Description of drawings

图1是典型的白光干涉Michelson干涉仪结构示意图。Figure 1 is a schematic diagram of the structure of a typical white light interference Michelson interferometer.

图2是典型的白光干涉条纹信号示意图。Fig. 2 is a schematic diagram of a typical white light interference fringe signal.

图3是本发明的基于可调Fabry-Perot谐振腔长实现问讯的最简单的光纤白光干涉传感器的结构示意图。Fig. 3 is a structural schematic diagram of the simplest optical fiber white light interference sensor for interrogation based on the adjustable Fabry-Perot resonant cavity length of the present invention.

图4是本发明的光纤传感器的结构示意图。Fig. 4 is a structural schematic diagram of the optical fiber sensor of the present invention.

图5是本发明的可调Fabry-Perot谐振腔构成的光纤延迟线的结构示意图。Fig. 5 is a schematic structural diagram of an optical fiber delay line composed of an adjustable Fabry-Perot resonant cavity according to the present invention.

图6是本发明的基于可调Fabry-Perot谐振腔长实现问讯的分布式光纤白光干涉传感器阵列的结构示意图。FIG. 6 is a schematic structural diagram of a distributed optical fiber white light interference sensor array for interrogation based on an adjustable Fabry-Perot resonant cavity length of the present invention.

图7是本发明的宽谱光源与光电探测器构成的双工光电器件示意图。Fig. 7 is a schematic diagram of a duplex optoelectronic device composed of a wide-spectrum light source and a photodetector according to the present invention.

图8是本发明的基于可调Fabry-Perot谐振腔长实现问讯的分布式光纤白光干涉传感器阵列的白光干涉信号。Fig. 8 is the white light interference signal of the distributed optical fiber white light interference sensor array for interrogation based on the adjustable Fabry-Perot resonant cavity length of the present invention.

(五)具体实施方式(5) Specific implementation methods

下面结合附图举例对本发明做更详细地描述:The present invention is described in more detail below in conjunction with accompanying drawing example:

具体实施方式一:Specific implementation mode one:

本发明的基本原理是基于低相干、宽谱光(白光)的干涉原理和空分复用原理。最简单的可调Fabry-Perot谐振腔长的光纤白光干涉传感器阵列的结构如图3所示,即传感器阵列中只连接一个传感器的情况。白光光源111的出射光束通过一分光棱镜131直接达到可调Fabry-Perot谐振腔2,被谐振腔的左右腔面多次反射后,信号光从右腔面输出;信号光又分别被传感器411(如图4所示)的左右两个端面反射后沿原路返回,再次经过Fabry-Perot谐振腔2后,到达光电探测器121。在上述一系列的具有不同光程的光信号中,我们将光信号从光源传输到传感器,以及传感器再反射回探测器的这个过程中,来回都仅经过一次Fabry-Perot谐振腔2,并且被传感器右端面反射的信号光称为测量信号光;而将此过程中,来时经过两次,回时经过一次或者来时经过一次,回时经过两次可调Fabry-Perot谐振腔2,并且被传感器411左端面反射的光信号称为参考信号光。测量光信号和参考光信号在探测器121表面发生相干叠加,由于宽谱低相干光源的相干长度很短,大约为几个微米到几十个微米,只有当参考信号和测量信号的光程差小于光源的相干长度时,才会产生相干叠加,输出白光干涉图样。The basic principle of the present invention is based on the interference principle of low coherence, wide-spectrum light (white light) and the principle of space division multiplexing. The structure of the simplest optical fiber white light interference sensor array with adjustable Fabry-Perot resonant cavity length is shown in Figure 3, that is, only one sensor is connected to the sensor array. The outgoing light beam of the white light source 111 directly reaches the adjustable Fabry-Perot resonant cavity 2 through a dichroic prism 131, and after being repeatedly reflected by the left and right cavity surfaces of the resonator, the signal light is output from the right cavity surface; the signal light is respectively sent by the sensor 411 ( As shown in FIG. 4 ), the left and right end surfaces of the left and right sides return along the original path after reflection, and after passing through the Fabry-Perot resonant cavity 2 again, reach the photodetector 121 . In the above-mentioned series of optical signals with different optical paths, in the process of transmitting the optical signal from the light source to the sensor, and the sensor is reflected back to the detector, it only passes through the Fabry-Perot resonant cavity 2 once back and forth, and is detected The signal light reflected by the right end face of the sensor is called the measurement signal light; and in this process, it passes through twice when it comes and passes once when it returns or passes once when it comes and passes through the adjustable Fabry-Perot resonator twice when it comes back, and The light signal reflected by the left end face of the sensor 411 is called reference signal light. The measurement optical signal and the reference optical signal are coherently superimposed on the surface of the detector 121. Since the coherence length of the wide-spectrum low-coherence light source is very short, about several microns to tens of microns, only when the optical path difference between the reference signal and the measurement signal When it is smaller than the coherence length of the light source, coherent superposition will occur, and a white light interference pattern will be output.

II == II 11 ++ II 22 ++ 22 II 11 ·&Center Dot; II 22 ·&Center Dot; || γγ (( xx )) || ·&Center Dot; coscos (( kk ·&Center Dot; xx ++ φφ )) -- -- -- (( 11 ))

式中:I1、I2为参考光束和测量光束的信号强度,k为波数,x为两干涉信号光程差,Φ为初始相位,γ(x)为光源自相关函数。In the formula: I 1 and I 2 are the signal intensities of the reference beam and the measuring beam, k is the wave number, x is the optical path difference between the two interference signals, Φ is the initial phase, and γ(x) is the autocorrelation function of the light source.

按照前述参考信号与测量信号经历光程路径的定义,所谓参考光与测量光的匹配光程,具体到图3的光纤测量系统而言,即为测量信号在传感器4左右端面反射所累积的光程与参考信号在Fabry-Perot谐振腔2前后两个腔面所累积的光程相等,有:According to the above-mentioned definition of the optical path of the reference signal and the measurement signal, the so-called matching optical path of the reference light and the measurement light, specifically for the optical fiber measurement system in Figure 3, is the light accumulated by the reflection of the measurement signal on the left and right end faces of the sensor 4 The optical path is equal to the accumulated optical path length of the reference signal on the two cavity surfaces before and after the Fabry-Perot resonator 2, which is:

2nL+2nl=2nL+2(nL0+X)    (2)2nL+2nl=2nL+2(nL 0 +X) (2)

其中,L为共光程光纤部分的长度,l为左右反射面之间的光纤传感器的长度,n为光纤纤芯的折射率,nL0为不包括调谐长度X在内的Fabry-Perot谐振腔的腔长,X代表光纤延迟线的调谐距离,如图6所示。Among them, L is the length of the common optical fiber part, l is the length of the fiber sensor between the left and right reflective surfaces, n is the refractive index of the fiber core, nL 0 is the Fabry-Perot resonator excluding the tuning length X The cavity length, X represents the tuning distance of the fiber delay line, as shown in Figure 6.

基于白光干涉原理的光纤干涉仪的干涉条纹只发生在光程匹配附近的几个微米到几十个微米之间。利用这个特点,无需利用复杂的时分或者频分复用技术,即可实现传感器的复用。如图7所示,将光纤传感器411首尾相接组成串行阵列4。每个传感器411的端面都具有一定的反射率。如果每个传感器的长度大于光源的相干长度,则测量光与参考光之间产生的干涉条纹在各自相干长度内,只存在单一的白光干涉信号,即干涉条纹互不干扰相互独立;通过对Fabry-Perot谐振腔长的调谐可实现空间光程扫描,对多个传感器加以区分,实现对多个外界物理量的查询与问讯,十分方便的实现分布式传感。The interference fringes of the fiber optic interferometer based on the principle of white light interference only occur between a few microns and tens of microns near the optical path matching. Using this feature, multiplexing of sensors can be realized without using complex time division or frequency division multiplexing technology. As shown in FIG. 7 , the fiber optic sensors 411 are connected end to end to form a serial array 4 . The end face of each sensor 411 has a certain reflectivity. If the length of each sensor is greater than the coherence length of the light source, the interference fringes generated between the measurement light and the reference light are within their respective coherence lengths, and there is only a single white light interference signal, that is, the interference fringes do not interfere with each other and are independent; by Fabry -The tuning of the length of the Perot resonant cavity can realize spatial optical path scanning, distinguish multiple sensors, realize the query and interrogation of multiple external physical quantities, and realize distributed sensing very conveniently.

可见基于可调Fabry-Perot谐振腔长实现问讯的分布式光纤白光干涉传感器阵列的基本构造思想是参考光束经过可调Fabry-Perot谐振腔延迟后与测量光束经过相同的光路,发生一一对应的光程匹配,使产生的白光干涉条纹在光程扫描空间上相互独立、互不干扰。参考光束的匹配可以直接利用可调Fabry-Perot谐振腔构成的光纤延迟线实现光程的扫描。It can be seen that the basic construction idea of the distributed optical fiber white light interferometric sensor array based on the adjustable Fabry-Perot resonant cavity length to achieve interrogation is that the reference beam passes through the same optical path as the measuring beam after being delayed by the adjustable Fabry-Perot resonant cavity, and there is a one-to-one correspondence. Optical path matching makes the generated white light interference fringes independent and non-interfering with each other in the optical path scanning space. The matching of the reference beam can directly use the fiber delay line formed by the tunable Fabry-Perot resonant cavity to realize the scanning of the optical path.

具体实施方式二:Specific implementation mode two:

利用可调Fabry-Perot谐振腔长实现问讯构造的分布式光纤白光干涉传感器阵列的方案,如图7所示。由图可见,该分布式光纤白光干涉传感器阵列由双工光电器件1、可调Fabry-Perot谐振腔2、单模连接光纤3、串行传感器阵列4构成。The scheme of distributed optical fiber white light interferometric sensor array with interrogation structure is realized by using adjustable Fabry-Perot resonant cavity length, as shown in Figure 7. It can be seen from the figure that the distributed optical fiber white light interference sensor array is composed of a duplex optoelectronic device 1 , an adjustable Fabry-Perot resonant cavity 2 , a single-mode connecting optical fiber 3 , and a serial sensor array 4 .

光纤传感器411是由两端具有一定反射率的垂直于光纤端面的一段任意长度的光纤段构成,典型结构如图4所示,一段根据实际测量需要截取的单模光纤两端加装陶瓷插芯901,端面经过抛光处理后,得到垂直于传输光方向的反射率大于等于1%的光纤端面。光纤传感器411可以通过陶瓷套管902与传感器或者光纤连接,陶瓷套管同时起到对传感器端面的保护。若干个光纤传感器411首尾相接就形成一个串行的光纤传感器阵列4。本实施例中,由X1~X4共四个光纤传感器首尾相接组成传感阵列。光纤传感器的平均长度大约为500mm,具体长度如下:X1:499.0mm,X2:502.2mm,X3:498.0mm,X4:500.0mm。The optical fiber sensor 411 is composed of a section of optical fiber of any length perpendicular to the end face of the optical fiber with a certain reflectivity at both ends. The typical structure is shown in Figure 4. A section of single-mode optical fiber cut according to actual measurement needs is equipped with ceramic ferrules at both ends. 901. After the end face is polished, an optical fiber end face with a reflectivity perpendicular to the direction of transmitted light greater than or equal to 1% is obtained. The optical fiber sensor 411 can be connected to the sensor or the optical fiber through the ceramic sleeve 902, and the ceramic sleeve simultaneously protects the end face of the sensor. Several optical fiber sensors 411 are connected end to end to form a serial optical fiber sensor array 4 . In this embodiment, four fiber optic sensors X1 to X4 are connected end to end to form a sensing array. The average length of the fiber optic sensor is about 500mm, and the specific lengths are as follows: X1: 499.0mm, X2: 502.2mm, X3: 498.0mm, X4: 500.0mm.

如图5所示,双工光电器件1由具有共基极113、发射极112、集电极122的宽谱光源111与光电探测器121通过分光棱镜131组成。其中,宽谱光源出射光的中心波长为1300nm,谱宽为60nm,出射功率为100微瓦;探测器采用InGaAs基红外探测器,其光谱响应范围为1100nm~1700nm,其响应度为0.9。As shown in FIG. 5 , the duplex optoelectronic device 1 is composed of a wide-spectrum light source 111 having a common base 113 , an emitter 112 , and a collector 122 , and a photodetector 121 passing through a dichroic prism 131 . Among them, the central wavelength of the broadband light source is 1300nm, the spectral width is 60nm, and the output power is 100 microwatts; the detector uses an InGaAs-based infrared detector, and its spectral response range is 1100nm-1700nm, and its responsivity is 0.9.

如图6所示,可调Fabry-Perot谐振腔2由扫描棱镜231、自聚焦透镜221、具有部分反射面211的单模光纤构成,其中,单模光纤采用SMF-28型标准通信用光纤,其长度选择为400mm;扫描棱镜231选用边长为50.8mm的直角棱镜,光程扫描的运动范围X为0~100mm。As shown in Figure 6, the adjustable Fabry-Perot resonant cavity 2 is composed of a scanning prism 231, a self-focusing lens 221, and a single-mode optical fiber with a partial reflection surface 211, wherein the single-mode optical fiber is an SMF-28 standard communication optical fiber, Its length is selected as 400 mm; the scanning prism 231 is a right-angled prism with a side length of 50.8 mm, and the moving range X of optical path scanning is 0-100 mm.

如图7所示,利用可调Fabry-Perot谐振腔长实现问讯构造的分布式光纤白光干涉传感器阵列的测量臂连接有串行的光纤传感器阵列;而参考臂中嵌套可调Fabry-Perot谐振腔,其作用是使参考光束与测量光束光程匹配。使用宽带光源111与光电探测器121通过分光棱镜131构成的双工光电器件1使参考臂与测量臂合二为一。干涉仪工作时,双工光电器件中宽带光源111的光通过可调Fabry-Perot谐振腔2后直接耦合进入光纤传感器阵列4,被串行阵列中各个光纤传感器411的右端面反射后,形成了一系列具有不同光程的反射测量信号光;光束被串行阵列中各个光纤传感器411的左端面反射后,沿相同的路径经过调谐后的Fabry-Perot谐振腔所构成的光纤延迟线传输回双工光电器件中的探测端121,形成了一系列具有不同光程的参考测量信号光;参考光束与测量光束的光程匹配和白光干涉条纹的获得是通过二者共同动作实现的,当可调谐光纤延迟线调到某一位置处使Fabry-Perot谐振腔总光程与某一传感器的标称长度相匹配时,传感器的两端面反射信号产生白光干涉条纹,如图8所示。并且由图8可知,白光干涉峰值出现的位置与传感器X1~X4的长度具有一一对应关系,通过Fabry-Perot谐振腔长的连续调谐可实现空间光程扫描,可以对多个传感器加以区分,从而实现多个外界物理量的查询与问讯。当传感器由于温度、应力等参量的作用,产生应变或者位移时,其光程扫描位置也随之变化,记录变化前后的位置值,根据转换关系,即可进行参量的传感测量。As shown in Fig. 7, the measurement arm of the interrogation-structured distributed optical fiber white light interferometric sensor array is connected with a serial optical fiber sensor array by using the adjustable Fabry-Perot resonant cavity length; the adjustable Fabry-Perot resonator is nested in the reference arm The cavity, whose function is to match the optical path of the reference beam and the measurement beam. Using the duplex photoelectric device 1 composed of the broadband light source 111 and the photodetector 121 through the dichroic prism 131, the reference arm and the measurement arm are combined into one. When the interferometer is working, the light from the broadband light source 111 in the duplex optoelectronic device passes through the adjustable Fabry-Perot resonant cavity 2 and then directly couples into the fiber sensor array 4, and is reflected by the right end face of each fiber sensor 411 in the serial array to form a A series of reflection measurement signal lights with different optical paths; after the light beams are reflected by the left end face of each fiber optic sensor 411 in the serial array, they are transmitted back to the dual sensor along the same path through the fiber delay line formed by the tuned Fabry-Perot resonant cavity. The detection end 121 in the industrial optoelectronic device forms a series of reference measurement signal lights with different optical paths; the optical path matching of the reference beam and the measurement beam and the acquisition of white light interference fringes are realized through the joint action of the two, when the tunable When the fiber delay line is adjusted to a certain position so that the total optical path of the Fabry-Perot resonator matches the nominal length of a certain sensor, the reflected signals from both ends of the sensor will produce white light interference fringes, as shown in Figure 8. And it can be seen from Figure 8 that the positions of the white light interference peaks have a one-to-one correspondence with the lengths of the sensors X1~X4. The spatial optical path scanning can be realized through the continuous tuning of the Fabry-Perot resonant cavity length, and multiple sensors can be distinguished. Inquiry and interrogation of multiple external physical quantities can thus be realized. When the sensor produces strain or displacement due to temperature, stress and other parameters, its optical path scanning position also changes accordingly, and the position value before and after the change is recorded. According to the conversion relationship, the sensor measurement of the parameter can be carried out.

Claims (8)

1、一种基于可调Fabry-Perot谐振腔的分布式光纤白光干涉传感器阵列,其特征是:由双工光电器件(1)、可调Fabry-Perot谐振腔(2)、单模连接光纤(3)、传感器(4)构成;可调Fabry-Perot谐振腔(2)由扫描棱镜(231)、自聚焦透镜(221)、具有部分反射面(211)的单模光纤连接构成;双工光电器件(1)由具有共基极(113)、发射极(112)、集电极(122)的宽谱光源(111)与光电探测器(121)通过分光棱镜(131)组成;光源(111)出射的具有一定光谱宽度的光束通过分光棱镜(131)直接达到可调Fabry-Perot谐振腔(2),被谐振腔的具有部分反射面(211)的单模光纤的左右腔面多次反射后,信号光从右腔面输出;信号光经单模连接光纤(3)进入传感器(411),分别被传感器(411)的左右两个端面反射后沿原路返回,再次经过Fabry-Perot谐振腔(2),从其左腔面输出后,进入双工光电器件(1),经过分光棱镜(131)分光后,到达光电探测器(121)。1. A distributed optical fiber white light interference sensor array based on an adjustable Fabry-Perot resonator, characterized in that it consists of a duplex photoelectric device (1), an adjustable Fabry-Perot resonator (2), and a single-mode connection optical fiber ( 3), the sensor (4) is formed; the adjustable Fabry-Perot resonant cavity (2) is composed of a scanning prism (231), a self-focusing lens (221), and a single-mode optical fiber connection with a partial reflection surface (211); duplex photoelectric The device (1) is composed of a wide-spectrum light source (111) with a common base (113), an emitter (112), and a collector (122), and a photodetector (121) through a beam splitting prism (131); the light source (111) The outgoing light beam with a certain spectral width directly reaches the adjustable Fabry-Perot resonator (2) through the beam splitter (131), and is reflected multiple times by the left and right cavity surfaces of the single-mode optical fiber with the partial reflection surface (211) of the resonator , the signal light is output from the right cavity surface; the signal light enters the sensor (411) through the single-mode connecting optical fiber (3), is respectively reflected by the left and right end faces of the sensor (411), returns along the original path, and passes through the Fabry-Perot resonant cavity again (2), after being output from the left cavity surface, it enters the duplex optoelectronic device (1), passes through the beam splitting prism (131) and then reaches the photodetector (121). 2、根据权利要求1所述的基于可调Fabry-Perot谐振腔的分布式光纤白光干涉传感器阵列,其特征是:所述的传感器(4)是将一组光纤传感器(411)首尾相接组成的串行传感器阵列。2. The distributed optical fiber white light interference sensor array based on the adjustable Fabry-Perot resonant cavity according to claim 1, characterized in that: the sensor (4) is composed of a group of optical fiber sensors (411) connected end to end serial sensor array. 3、根据权利要求1或2所述的基于可调Fabry-Perot谐振腔的分布式光纤白光干涉传感器阵列,其特征是:所述的光纤传感器(411)是由两端具有一定反射率的垂直于光纤端面的一段任意长度的光纤段构成,它是将一段根据实际测量需要截取的单模光纤两端加装陶瓷插芯(901),端面经过抛光处理后,得到垂直于传输光方向的反射率大于等于1%的光纤端面制成的光纤传感器。3. The distributed optical fiber white light interference sensor array based on the adjustable Fabry-Perot resonant cavity according to claim 1 or 2, characterized in that: the optical fiber sensor (411) is a vertical sensor with a certain reflectivity at both ends. It is composed of a fiber segment of any length on the end face of the fiber. It is a single-mode fiber that is intercepted according to actual measurement needs and is equipped with a ceramic ferrule (901). After the end face is polished, the reflection perpendicular to the direction of the transmitted light is obtained. Optical fiber sensors made of optical fiber end faces with a rate greater than or equal to 1%. 4、根据权利要求1或2所述的基于可调Fabry-Perot谐振腔的分布式光纤白光干涉传感器阵列,其特征是:所述的Fabry-Perot谐振腔中腔面的反射率在1%-99%之间。4. The distributed optical fiber white light interference sensor array based on the adjustable Fabry-Perot resonant cavity according to claim 1 or 2, characterized in that: the reflectivity of the cavity surface in the Fabry-Perot resonant cavity is between 1%- Between 99%. 5、根据权利要求3所述的基于可调Fabry-Perot谐振腔的分布式光纤白光干涉传感器阵列,其特征是:所述的Fabry-Perot谐振腔中腔面的反射率在1%-99%之间。5. The distributed optical fiber white light interference sensor array based on the adjustable Fabry-Perot resonant cavity according to claim 3, characterized in that: the reflectivity of the cavity surface in the Fabry-Perot resonant cavity is between 1% and 99% between. 6、根据权利要求1或2所述的基于可调Fabry-Perot谐振腔的分布式光纤白光干涉传感器阵列,其特征是:所述的Fabry-Perot谐振腔的腔长连续可变。6. The distributed optical fiber white light interference sensor array based on adjustable Fabry-Perot resonant cavity according to claim 1 or 2, characterized in that: the cavity length of the Fabry-Perot resonant cavity is continuously variable. 7、根据权利要求3所述的基于可调Fabry-Perot谐振腔的分布式光纤白光干涉传感器阵列,其特征是:所述的Fabry-Perot谐振腔的腔长连续可变。7. The distributed optical fiber white light interference sensor array based on adjustable Fabry-Perot resonant cavity according to claim 3, characterized in that: the cavity length of the Fabry-Perot resonant cavity is continuously variable. 8、根据权利要求3所述的基于可调Fabry-Perot谐振腔的分布式光纤白光干涉传感器阵列,其特征是:光纤传感阵列中的传感器其长度各不相同。8. The distributed optical fiber white light interference sensor array based on the tunable Fabry-Perot resonant cavity according to claim 3, characterized in that: the sensors in the optical fiber sensing array have different lengths.
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