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CN101290890A - Circuit board with embedded conductive circuit and manufacturing method thereof - Google Patents

Circuit board with embedded conductive circuit and manufacturing method thereof Download PDF

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Publication number
CN101290890A
CN101290890A CN 200810129055 CN200810129055A CN101290890A CN 101290890 A CN101290890 A CN 101290890A CN 200810129055 CN200810129055 CN 200810129055 CN 200810129055 A CN200810129055 A CN 200810129055A CN 101290890 A CN101290890 A CN 101290890A
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substrate
metal layer
layer
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circuit board
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CN101290890B (en
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廖国成
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Advanced Semiconductor Engineering Inc
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Manufacturing Of Printed Wiring (AREA)

Abstract

本发明提供一种具有内埋式导电线路的电路板的制造方法,是于基板的表面上形成内埋的导电线路层,并增加接垫及手指的高度,以利后续灌胶的制程。

The invention provides a method for manufacturing a circuit board with embedded conductive circuits, which forms an embedded conductive circuit layer on the surface of a substrate and increases the height of pads and fingers to facilitate the subsequent glue filling process.

Description

具有内埋式导电线路的电路板及其制造方法 Circuit board with embedded conductive circuit and manufacturing method thereof

技术领域 technical field

本发明是有关于一种电路板及其制造方法,更特别有关于一种具有内埋式导电线路的电路板及其制造方法。The present invention relates to a circuit board and its manufacturing method, more particularly to a circuit board with embedded conductive lines and its manufacturing method.

背景技术 Background technique

近年来由于电子组件已经变得多功能且体积越来越小,封装基板的技术也快速的发展,以便实现轻、薄、短、小以及高度密集的线路图案。特别地,如此轻、薄、短、小以及高度密集的线路图案是需要使用在芯片尺寸封装构造(chip scale package;CSP)的产品群上。为了能够在小尺寸的基板上形成密集的线路图案,一般是采用压合的方式在基板上形成内埋式的导电线路。In recent years, as electronic components have become multifunctional and smaller, the technology of packaging substrates has also developed rapidly in order to achieve light, thin, short, small and highly dense circuit patterns. In particular, such light, thin, short, small and highly dense circuit patterns are required to be used in chip scale package (CSP) product groups. In order to form dense circuit patterns on a small-sized substrate, embedded conductive circuits are generally formed on the substrate by pressing.

参考图1a至图1h,现有于基板上形成内埋式导电线路的制造方法是先于一载板110上形成一铜层120,该铜层120上具有突起的结构122与124,该些突起结构122、124的图案是与欲在基板上形成的导电线路的图案相对应(见图1a与图1b)。接着将载板110与一软的基板,例如是B阶段(B stage)的BT(Bismaleimide Triazine)基板130压合,使得铜层120上的突起结构122、124埋入基板130的一表面132。基板130的另一表面134亦可根据需要与另一具有突起结构142的铜层140压合(见图1c)。再将载板110从铜层120、140上移除,并利用蚀刻的方式将铜层120、140薄化,使得基板130的表面132、134裸露出,此时原先在铜层120、140上的突起结构122、124、142仍保留在基板130的表面132、134并与基板表面132、134齐平。这些埋入在基板130的表面132、134上的突起结构122、124、142最后会形成基板130上的导电线路层(见图1d)。Referring to FIG. 1a to FIG. 1h, the existing manufacturing method for forming embedded conductive circuits on a substrate is to form a copper layer 120 on a carrier board 110, and the copper layer 120 has protruding structures 122 and 124 on it. The patterns of the protruding structures 122, 124 correspond to the patterns of the conductive lines to be formed on the substrate (see FIGS. 1a and 1b). Then, the carrier 110 is pressed with a soft substrate, such as a B stage (B stage) BT (Bismaleimide Triazine) substrate 130 , so that the protrusion structures 122 and 124 on the copper layer 120 are embedded in a surface 132 of the substrate 130 . The other surface 134 of the substrate 130 can also be press-bonded with another copper layer 140 having a protruding structure 142 as required (see FIG. 1 c ). Then the carrier 110 is removed from the copper layers 120, 140, and the copper layers 120, 140 are thinned by etching, so that the surfaces 132, 134 of the substrate 130 are exposed, which were originally on the copper layers 120, 140. The protruding structures 122 , 124 , 142 remain on the surfaces 132 , 134 of the substrate 130 and are flush with the surfaces 132 , 134 of the substrate. These protruding structures 122 , 124 , 142 buried on the surfaces 132 , 134 of the substrate 130 will eventually form the conductive circuit layer on the substrate 130 (see FIG. 1 d ).

接着,利用蚀刻或钻孔的方式在基板130上形成通孔150,并利用无电电镀的方式在基板130的表面132、134以及通孔150的内壁上形成一铜层160(见图1e)。再于基板表面132、134上形成一层干膜170以做为电镀的遮蔽层,以使得基板表面132、134上的导电线路层,亦即埋在基板表面132、134上的结构122、124、142被干膜170所覆盖,而通孔150则被裸露出,之后再于通孔150的内壁上电镀一层铜180(见图1f)。接着将干膜170以及以无电电镀的方式形成在基板表面132、134上的铜层160移除。随后在基板表面132、134上形成一防焊层190,并将结构122、124、142裸露出,同时在结构122、142上一层有机保焊剂(organicsolderability preservative;OSP)(见图1g)。再于结构122与142上形成干膜170,并于结构124上电镀一层镍/金195(见图1h)。最后再将干膜170移除。Next, a through hole 150 is formed on the substrate 130 by etching or drilling, and a copper layer 160 is formed on the surfaces 132, 134 of the substrate 130 and the inner wall of the through hole 150 by electroless plating (see FIG. 1 e ). . Then form a layer of dry film 170 on the substrate surfaces 132, 134 as a shielding layer for electroplating, so that the conductive circuit layers on the substrate surfaces 132, 134, that is, the structures 122, 124 buried on the substrate surfaces 132, 134 , 142 are covered by a dry film 170, while the through hole 150 is exposed, and then a layer of copper 180 is electroplated on the inner wall of the through hole 150 (see FIG. 1f). The dry film 170 and the copper layer 160 formed on the substrate surfaces 132 , 134 by electroless plating are then removed. A solder resist layer 190 is then formed on the substrate surfaces 132, 134 to expose the structures 122, 124, 142, and a layer of organic solderability preservative (OSP) is formed on the structures 122, 142 (see FIG. 1g). A dry film 170 is then formed on the structures 122 and 142, and a layer of Ni/Au 195 is electroplated on the structure 124 (see FIG. 1h). Finally, the dry film 170 is removed.

上述镀有镍/金层195的结构124做为手指(finger),用以藉由焊线与外界电路电性连接,而结构122、142则做为接垫(pad),用以藉由锡球与外界电路电性连接。由于做为手指的结构124需要做电镀,所有的结构124是电性连接在一起,以利电镀的进行。然而,由于结构124是彼此电性连接,因此无法在出厂时对其做电性测试。The structure 124 plated with the nickel/gold layer 195 is used as a finger for electrically connecting with an external circuit through a bonding wire, and the structures 122 and 142 are used as a pad for connecting with an external circuit through a soldering wire. The ball is electrically connected with the external circuit. Since the structures 124 used as fingers need to be electroplated, all the structures 124 are electrically connected together to facilitate the electroplating. However, since the structures 124 are electrically connected to each other, they cannot be electrically tested when they leave the factory.

另外,由于所形成的接垫122是与基板130的表面132齐平且防焊层190一般均具有一个不小的厚度,当芯片藉由锡球与接垫122电性连接时,锡球会仅有部分的高度露出防焊层190(未显示),这会使得芯片与基板130之间的间隙(Die Gap)过小,在封装时使得底胶(underfill)或封模黑胶(Molding compound)不易填满芯片与基板130之间的间隙,因此造成孔洞(void)的产生。In addition, since the formed pads 122 are flush with the surface 132 of the substrate 130 and the solder resist layer 190 generally has a considerable thickness, when the chip is electrically connected to the pads 122 by solder balls, the solder balls will Only part of the height exposes the solder resist layer 190 (not shown), which will make the gap (Die Gap) between the chip and the substrate 130 too small, so that the underfill or molding compound (Molding compound) ) is not easy to fill the gap between the chip and the substrate 130, thus causing voids.

有鉴于此,便有需要提出一种具有内埋式导电线路的电路板的制造方法,以解决上述问题。In view of this, it is necessary to propose a method for manufacturing a circuit board with embedded conductive circuits to solve the above problems.

发明内容 Contents of the invention

本发明的目的在于提供一种具有内埋式导电线路的电路板的制造方法,其中接垫的高度被增加。The object of the present invention is to provide a method of manufacturing a circuit board with embedded conductive traces, wherein the height of the pads is increased.

为达上述目的,本发明第一实施例的具有内埋式导电线路的电路板的制造方法是先于一载板上形成一铜层,该铜层的第二表面是贴附于载板上,而与第二表面相对的第一表面上则具有突起的结构,该些突起结构的图案是与欲在基板上形成的导电线路的图案相对应。接着将载板与B阶段的BT基板压合,使得铜层上的突起结构埋入基板的一表面。基板的另一表面亦可根据需要与另一具有突起结构的铜层压合。再将载板从铜层上移除,使得铜层的第二表面裸露出,并于铜层上形成一层干膜以做为电镀的遮蔽层,同时干膜上开设有开口,以将铜层的第二表面上的第一及第二区域裸露出。In order to achieve the above purpose, the manufacturing method of the circuit board with embedded conductive circuit according to the first embodiment of the present invention is to form a copper layer on a carrier board first, and the second surface of the copper layer is attached to the carrier board , and the first surface opposite to the second surface has protruding structures, and the patterns of these protruding structures correspond to the patterns of the conductive lines to be formed on the substrate. Then, the carrier board is pressed against the B-stage BT substrate, so that the protruding structure on the copper layer is embedded in a surface of the substrate. The other surface of the substrate can also be laminated with another copper layer having a protrusion structure as required. Then the carrier board is removed from the copper layer, so that the second surface of the copper layer is exposed, and a layer of dry film is formed on the copper layer as a shielding layer for electroplating. The first and second regions on the second surface of the layer are exposed.

接着,对基板进行电镀,使得裸露的第一及第二区域上电镀有一镍/金层。之后,将干膜移除,并对铜层进行蚀刻,使得基板的表面裸露出,此时原先在铜层上的突起结构仍保留在基板的表面,并与基板表面齐平。于蚀刻制程中,由于镍/金层做为遮蔽层可保护其下方的铜层不会被蚀刻掉,以形成突出基板的结构。最后,在基板上形成一电镀通孔,再于基板表面上形成一防焊层,并将镍/金层裸露出。Then, the substrate is electroplated, so that a nickel/gold layer is electroplated on the exposed first and second regions. Afterwards, the dry film is removed, and the copper layer is etched to expose the surface of the substrate. At this time, the protrusion structure on the copper layer remains on the surface of the substrate and is flush with the surface of the substrate. During the etching process, since the nickel/gold layer serves as a masking layer to protect the underlying copper layer from being etched away, a structure protruding from the substrate is formed. Finally, an electroplating through hole is formed on the substrate, and a solder resist layer is formed on the surface of the substrate, and the nickel/gold layer is exposed.

本发明第二实施例的具有内埋式导电线路的电路板的制造方法是大体上相同于第一实施例的具有内埋式导电线路的电路板的制造方法,所不同之处在于铜层的第二表面上的第一及第二区域不须镀有镍/金层以做为遮蔽层,而是将干膜仅形成在第一及第二区域上,并对铜层进行蚀刻,以使得基板的表面裸露出,而原先在铜层上的突起结构仍保留在基板的表面,并与基板表面齐平。于蚀刻制程中,干膜做为遮蔽层可保护其下方的铜层不会被蚀刻掉,以形成突出基板的结构。之后,将干膜移除,并在基板上形成一电镀通孔,再于基板表面上形成一防焊层,并将第一及第二区域裸露出同时上一层有机保焊剂。The manufacturing method of the circuit board with embedded conductive circuit of the second embodiment of the present invention is substantially the same as the manufacturing method of the circuit board with embedded conductive circuit of the first embodiment, the difference lies in the copper layer The first and second areas on the second surface do not need to be plated with nickel/gold as a masking layer, but a dry film is formed only on the first and second areas, and the copper layer is etched so that The surface of the substrate is exposed, while the protrusion structure on the copper layer remains on the surface of the substrate and is flush with the surface of the substrate. In the etching process, the dry film is used as a masking layer to protect the underlying copper layer from being etched away, so as to form a structure protruding from the substrate. Afterwards, the dry film is removed, and an electroplated through hole is formed on the substrate, and a solder mask layer is formed on the surface of the substrate, and the first and second regions are exposed and a layer of organic solder flux is applied.

本发明的另一目的在于提供一种以上述的方法所制造出的电路板。Another object of the present invention is to provide a circuit board manufactured by the above method.

根据本发明的具有内埋式导电线路的电路板的制造方法,埋在基板的表面上的突起结构是形成基板上的导电线路,而位在第一及第二区域的铜层则分别用来做为接垫及手指,用以与外界电路,例如一芯片电性连接之用。由于做为接垫的第一区域是突出基板,使得芯片利用锡球与第一区域电性连接时,锡球会有更多部分的高度露出防焊层,藉此增加芯片与基板之间的间隙,在封装时让底胶或封模黑胶更易填满芯片与基板之间的间隙,避免孔洞的产生。另外,由于做为手指的第二区域不需要电性连接在一起,因此在出厂时即可对其做电性测试。According to the method for manufacturing a circuit board with embedded conductive circuits of the present invention, the protruding structure buried on the surface of the substrate forms the conductive circuits on the substrate, and the copper layers in the first and second regions are respectively used to As pads and fingers, it is used to electrically connect with external circuits, such as a chip. Since the first area used as a pad protrudes from the substrate, when the chip is electrically connected to the first area by using solder balls, more of the height of the solder balls will expose the solder resist layer, thereby increasing the distance between the chip and the substrate. The gap makes it easier for the primer or mold sealer to fill the gap between the chip and the substrate during packaging to avoid the generation of holes. In addition, because the second area used as the finger does not need to be electrically connected together, it can be electrically tested before leaving the factory.

为了让本发明的上述和其它目的、特征、和优点能更明显,下文特举本发明实施例,并配合所附图标,作详细说明如下。In order to make the above and other objects, features, and advantages of the present invention more apparent, the embodiments of the present invention, together with the attached figures, are described in detail below.

附图说明 Description of drawings

图1a至图1h:为习知具有内埋式导电线路的电路板的制造方法。FIG. 1a to FIG. 1h are conventional manufacturing methods of circuit boards with embedded conductive circuits.

图2a至图2g:为本发明第一实施例的具有内埋式导电线路的电路板的制造方法。2a to 2g are the manufacturing method of the circuit board with embedded conductive circuit according to the first embodiment of the present invention.

图3a至图3b:为本发明第二实施例的具有内埋式导电线路的电路板的制造方法。3a to 3b are the manufacturing method of the circuit board with embedded conductive lines according to the second embodiment of the present invention.

具体实施方式 Detailed ways

参考图2a至图2g,本发明第一实施例的具有内埋式导电线路的电路板的制造方法是于一载板210上形成一金属层220,例如是一铜层,该铜层220的第二表面223是贴附于载板210上,而与第二表面223相对的第一表面221上则具有突起的结构222与224,该些突起结构222、224的图案是与欲在基板上形成的导电线路的图案相对应(见图2a与图2b)。接着将载板210与一软的基板,例如是B阶段(B stage)的BT(BismaleimideTriazine)基板230压合,使得铜层220上的突起结构222、224埋入基板230的一表面232。基板230的另一表面234亦可根据需要与另一具有突起结构242的金属层240,例如是铜层压合(见第2c图)。再将载板210从铜层220、240上移除,使得铜层240与铜层220的第二表面223裸露出,并于铜层240与铜层220的第二表面223上形成一层干膜270以做为电镀的遮蔽层,同时干膜270上开设有开口272,以将铜层220的第二表面223上的区域226以及铜层240上的区域246裸露出(见图2d)。2a to 2g, the manufacturing method of the circuit board with embedded conductive lines according to the first embodiment of the present invention is to form a metal layer 220 on a carrier board 210, such as a copper layer, the copper layer 220 The second surface 223 is attached to the carrier board 210, and the first surface 221 opposite to the second surface 223 has protruding structures 222 and 224. The patterns of the formed conductive lines correspond (see Fig. 2a and Fig. 2b). Then, the carrier 210 is pressed against a soft substrate, such as a B stage (B stage) BT (BismaleimideTriazine) substrate 230 , so that the protrusion structures 222 and 224 on the copper layer 220 are embedded in a surface 232 of the substrate 230 . The other surface 234 of the substrate 230 can also be laminated with another metal layer 240 having a protruding structure 242 , such as a copper layer, as required (see FIG. 2 c ). Then the carrier 210 is removed from the copper layers 220, 240, so that the copper layer 240 and the second surface 223 of the copper layer 220 are exposed, and a dry layer is formed on the copper layer 240 and the second surface 223 of the copper layer 220. The film 270 is used as a masking layer for electroplating, and an opening 272 is opened on the dry film 270 to expose the region 226 on the second surface 223 of the copper layer 220 and the region 246 on the copper layer 240 (see FIG. 2 d ).

接着,对基板230进行电镀,使得裸露的区域226与246上电镀有一金属层280,例如是一镍/金层(见图2e)。之后,将干膜270移除,并对铜层220、240进行蚀刻,使得基板230的表面232、234裸露出,此时原先在铜层220、240上的突起结构222、224、242仍保留在基板230的表面232、234,并与基板表面232、234齐平。于蚀刻制程中,由于镍/金层280做为遮蔽层可保护其下方的铜层220不会被蚀刻掉,以形成突出基板230的结构(见图2f)。最后,在基板230上形成一电镀通孔250,再于基板表面232、234上形成一防焊层290,并将镍/金层280裸露出(见图2g)。Next, electroplating is performed on the substrate 230, so that a metal layer 280, such as a nickel/gold layer, is electroplated on the exposed regions 226 and 246 (see FIG. 2e). Afterwards, the dry film 270 is removed, and the copper layers 220, 240 are etched, so that the surfaces 232, 234 of the substrate 230 are exposed, and at this time, the original protrusion structures 222, 224, 242 on the copper layers 220, 240 remain. on the surfaces 232 , 234 of the substrate 230 and flush with the surfaces 232 , 234 of the substrate. During the etching process, since the Ni/Au layer 280 acts as a shielding layer, it can protect the underlying copper layer 220 from being etched away, so as to form a structure protruding from the substrate 230 (see FIG. 2f ). Finally, a plated through hole 250 is formed on the substrate 230, and a solder resist layer 290 is formed on the substrate surfaces 232, 234, and the nickel/gold layer 280 is exposed (see FIG. 2g).

参考图3a至图3b,本发明第二实施例的具有内埋式导电线路的电路板的制造方法是大体上相同于第一实施例的具有内埋式导电线路的电路板的制造方法,所不同之处在于铜层220的第二表面223上的区域226以及铜层240上的区域246不须镀有镍/金层280以做为遮蔽层,而是将干膜270仅形成在区域226与246上,并对铜层220、240进行蚀刻,以使得基板230的表面232、234裸露出,而原先在铜层220、240上的突起结构222、224、242仍保留在基板230的表面232、234,并与基板表面232、234齐平。于蚀刻制程中,干膜270做为遮蔽层可保护其下方的铜层220不会被蚀刻掉,以形成突出基板230的结构(见图3a)。之后,将干膜270移除,并在基板230上形成一电镀通孔250,再于基板表面232、234上形成一防焊层290,并将区域226、246裸露出同时上一层有机保焊剂(见图3b)。Referring to Fig. 3a to Fig. 3b, the manufacturing method of the circuit board with embedded conductive circuit of the second embodiment of the present invention is substantially the same as the manufacturing method of the circuit board with embedded conductive circuit of the first embodiment, so The difference is that the area 226 on the second surface 223 of the copper layer 220 and the area 246 on the copper layer 240 do not need to be plated with the nickel/gold layer 280 as a shielding layer, but the dry film 270 is only formed on the area 226 and 246, and etch the copper layers 220, 240, so that the surfaces 232, 234 of the substrate 230 are exposed, and the protruding structures 222, 224, 242 originally on the copper layers 220, 240 remain on the surface of the substrate 230 232, 234, and flush with the substrate surfaces 232, 234. During the etching process, the dry film 270 serves as a shielding layer to protect the underlying copper layer 220 from being etched away, so as to form a structure protruding from the substrate 230 (see FIG. 3 a ). Afterwards, the dry film 270 is removed, and a plated through hole 250 is formed on the substrate 230, and then a solder resist layer 290 is formed on the substrate surfaces 232, 234, and the regions 226, 246 are exposed and a layer of organic protection is applied. flux (see Figure 3b).

参考图2g,本发明的电路板包含有基板230,具有两相对的表面232、234,并具有镀有铜层的通孔250。导电线路层222是内埋在基板230且裸露于表面232上,而导电线路层242则内埋在基板230且裸露于表面234上,其中导电线路层222具有区域226,其是突出于基板230的表面232,而导电线路层242具有区域246,其是突出于基板230的表面234。镍/金层280是形成于区域226上,以做为接垫或手指,用以藉由锡球或焊线与外界电路电性连接,而镍/金层280亦形成于区域246上,以用以与另一电路板电性连接。Referring to FIG. 2g, the circuit board of the present invention includes a substrate 230 having two opposite surfaces 232, 234 and a through hole 250 plated with copper. The conductive circuit layer 222 is embedded in the substrate 230 and exposed on the surface 232, and the conductive circuit layer 242 is embedded in the substrate 230 and exposed on the surface 234, wherein the conductive circuit layer 222 has a region 226 protruding from the substrate 230. The surface 232 of the substrate 230 , and the conductive circuit layer 242 has a region 246 protruding from the surface 234 of the substrate 230 . The nickel/gold layer 280 is formed on the region 226 to be used as a pad or a finger for electrically connecting with an external circuit through solder balls or bonding wires, and the nickel/gold layer 280 is also formed on the region 246 to Used for electrical connection with another circuit board.

根据本发明的具有内埋式导电线路的电路板的制造方法,埋在基板230的表面232、234上的突起结构222、224、242是形成基板230上的导电线路,位在区域226的铜层220以及位在区域246的铜层240则用以与外界电路电性连接,其中结构222上的区域226做为接垫,用以藉由锡球与例如芯片电性连接,结构224上的区域226做为手指,用以藉由焊线与例如芯片电性连接,而结构242上的区域246做为接垫,用以藉由锡球与例如另一电路板电性连接(未显示)。由于做为接垫的区域226是突出基板230,使得芯片利用锡球与区域226电性连接时,锡球会有更多部分的高度露出防焊层290(未显示),藉此增加芯片与基板230之间的间隙,在封装时让底胶更易填满芯片与基板230之间的间隙,避免孔洞的产生。另外,由于做为手指的结构224上的区域226不需要电性连接在一起,因此在出厂时即可对其做电性测试。According to the manufacturing method of the circuit board with embedded conductive lines of the present invention, the protruding structures 222, 224, 242 buried on the surfaces 232, 234 of the substrate 230 form the conductive lines on the substrate 230, and the copper in the region 226 The layer 220 and the copper layer 240 located in the area 246 are used to electrically connect with the external circuit, wherein the area 226 on the structure 222 is used as a pad for electrically connecting with, for example, a chip through solder balls, and the area on the structure 224 The area 226 is used as a finger for electrically connecting with, for example, a chip by bonding wires, and the area 246 on the structure 242 is used as a pad for electrically connecting with, for example, another circuit board (not shown) via solder balls. . Since the area 226 used as a pad protrudes from the substrate 230, when the chip is electrically connected to the area 226 by using solder balls, more parts of the solder ball height will expose the solder resist layer 290 (not shown), thereby increasing the contact between the chip and the area 226. The gap between the substrates 230 makes it easier for the primer to fill the gap between the chip and the substrate 230 during packaging, so as to avoid the generation of holes. In addition, because the area 226 on the structure 224 used as a finger does not need to be electrically connected together, it can be electrically tested before leaving the factory.

虽然本发明已以前述较佳实施例揭示,然其并非用以限定本发明,任何熟习此技艺者,在不脱离本发明的精神和范围内,当可作各种的更动与修改。因此本发明的保护范围当视所附的权利要求所界定者为准。Although the present invention has been disclosed by the aforementioned preferred embodiments, it is not intended to limit the present invention. Any skilled person can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims (11)

1.一种制造电路板的方法,包含下列步骤:1. A method for manufacturing a circuit board, comprising the steps of: 提供基板,该基板具有两相对的第一表面与第二表面;providing a substrate having two opposite first and second surfaces; 于该基板的第一表面上形成第一金属层,该第一金属层具有两相对的第一表面与第二表面,该第一金属层的第一表面上形成有突起结构,其是埋入该基板的第一表面,其中该第一金属层的第二表面上具有一第一区域;A first metal layer is formed on the first surface of the substrate, the first metal layer has two opposite first surfaces and second surfaces, and a protruding structure is formed on the first surface of the first metal layer, which is buried the first surface of the substrate, wherein the first metal layer has a first region on the second surface; 于该第一区域上形成遮蔽层;forming a shielding layer on the first region; 对该第一金属层进行蚀刻,使得裸露于该遮蔽层之外的第一金属层被移除;etching the first metal layer, so that the first metal layer exposed outside the masking layer is removed; 将该遮蔽层移除;及remove the masking layer; and 于该基板的第一表面上形成防焊层,并裸露出该第一金属层。A solder resist layer is formed on the first surface of the substrate, and the first metal layer is exposed. 2.如权利要求1所述的方法,其中于该基板的第一表面上形成第一金属层的步骤包含:2. The method of claim 1, wherein the step of forming a first metal layer on the first surface of the substrate comprises: 提供载板;Provide the carrier board; 于该载板上形成该第一金属层,其中该第一金属层的第二表面是贴附于该载板上;forming the first metal layer on the carrier, wherein the second surface of the first metal layer is attached to the carrier; 将该载板与该基板压合,使得该第一金属层的突起结构埋入该基板的第一表面;及pressing the carrier plate to the substrate, so that the protruding structure of the first metal layer is embedded in the first surface of the substrate; and 将该载板移除。Remove the carrier board. 3.一种制造电路板的方法,包含下列步骤:3. A method of manufacturing a circuit board, comprising the steps of: 提供基板,该基板具有两相对的第一表面与第二表面;providing a substrate having two opposite first and second surfaces; 于该基板的第一表面上形成第一金属层,该第一金属层具有两相对的第一表面与第二表面,其第一表面上形成有突起结构,是埋入该基板的第一表面,其中该第一金属层的第二表面上具有第一区域与第二区域;A first metal layer is formed on the first surface of the substrate, the first metal layer has two opposite first surfaces and second surfaces, and a protruding structure is formed on the first surface, which is embedded in the first surface of the substrate , wherein the second surface of the first metal layer has a first region and a second region; 于该第一金属层的第二表面上形成遮蔽层,并裸露出该第一与第二区域;forming a shielding layer on the second surface of the first metal layer, and exposing the first and second regions; 于该第一与第二区域上形成第二金属层;forming a second metal layer on the first and second regions; 将该遮蔽层移除;remove the masking layer; 对该第一金属层进行蚀刻,使得裸露于该第二金属层之外的第一金属层被移除;及etching the first metal layer such that the first metal layer exposed outside the second metal layer is removed; and 于该基板的第一表面上形成防焊层,并裸露出该第二金属层。A solder resist layer is formed on the first surface of the substrate, and the second metal layer is exposed. 4.如权利要求3所述的方法,其中于该基板的第一表面上形成第一金属层的步骤包含:4. The method of claim 3, wherein the step of forming a first metal layer on the first surface of the substrate comprises: 提供载板;Provide the carrier board; 于该载板上形成该第一金属层,其中该第一金属层的第二表面是贴附于该载板上;forming the first metal layer on the carrier, wherein the second surface of the first metal layer is attached to the carrier; 将该载板与该基板压合,使得该第一金属层的突起结构埋入该基板的第一表面;及pressing the carrier plate to the substrate, so that the protruding structure of the first metal layer is embedded in the first surface of the substrate; and 将该载板移除。Remove the carrier board. 5.如权利要求3所述的方法,更包含:5. The method of claim 3, further comprising: 于该基板的第二表面上形成第三金属层,该第三金属层具有两相对的第一表面与第二表面,该第三金属层的第一表面上形成有突起结构,其是埋入该基板的第二表面,其中该第三金属层的第二表面上具有第一区域;A third metal layer is formed on the second surface of the substrate, the third metal layer has two opposite first surfaces and second surfaces, a protruding structure is formed on the first surface of the third metal layer, which is embedded the second surface of the substrate, wherein the third metal layer has a first region on the second surface; 于该第三金属层的第二表面上形成该遮蔽层,并裸露出该第三金属层的第一区域;forming the shielding layer on the second surface of the third metal layer, and exposing the first region of the third metal layer; 于该第三金属层的第一区域上形成第四金属层;forming a fourth metal layer on the first region of the third metal layer; 将该第三金属层的第二表面上的遮蔽层移除;removing the masking layer on the second surface of the third metal layer; 对该第三金属层进行蚀刻,使得裸露于该第四金属层之外的第三金属层被移除;及etching the third metal layer so that the third metal layer exposed outside the fourth metal layer is removed; and 于该基板的第二表面上形成该防焊层,并裸露出该第四金属层。The solder resist layer is formed on the second surface of the substrate, and the fourth metal layer is exposed. 6.一种电路板,其包含:6. A circuit board comprising: 基板,具有两相对的第一表面与第二表面;a substrate having two opposite first and second surfaces; 第一导电线路层,内埋在该基板且裸露于该基板的第一表面上,其中该第一导电线路层具有第一区域与一第二区域,该第一与第二区域是突出于该基板的第一表面;及The first conductive circuit layer is embedded in the substrate and exposed on the first surface of the substrate, wherein the first conductive circuit layer has a first region and a second region, and the first and second regions protrude from the first surface of the substrate. the first surface of the substrate; and 防焊层,形成于该基板的第一表面上,并裸露出该第一与第二区域。The solder resist layer is formed on the first surface of the substrate and exposes the first and second regions. 7.如权利要求6所述的电路板,更包含:7. The circuit board of claim 6, further comprising: 金属层,形成于该第一导电线路层的第一与第二区域上。The metal layer is formed on the first and second regions of the first conductive circuit layer. 8.如权利要求7所述的电路板,其中该第一区域上的金属层做为接垫,用以藉由锡球与外界电路电性连接。8. The circuit board as claimed in claim 7, wherein the metal layer on the first region is used as a pad for electrically connecting with external circuits through solder balls. 9.如权利要求7所述的电路板,其中该第二区域上的金属层做为手指,用以藉由焊线与外界电路电性连接。9. The circuit board as claimed in claim 7, wherein the metal layer on the second region is used as a finger for electrically connecting with an external circuit through a bonding wire. 10.如权利要求6所述的电路板,更包含:10. The circuit board of claim 6, further comprising: 第二导电线路层,内埋在该基板且裸露于该基板的第二表面上,其中该第二导电线路层具有第三区域,该第三区域是突出于该基板的第二表面,a second conductive circuit layer embedded in the substrate and exposed on the second surface of the substrate, wherein the second conductive circuit layer has a third region protruding from the second surface of the substrate, 其中该防焊层更形成于该基板的第二表面上,并裸露出该第三区域。Wherein the solder resist layer is further formed on the second surface of the substrate and exposes the third region. 11.如权利要求7所述的电路板,其中该金属层为镍/金层。11. The circuit board as claimed in claim 7, wherein the metal layer is a nickel/gold layer.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104392968A (en) * 2008-11-21 2015-03-04 先进封装技术私人有限公司 Semiconductor substrate
CN106033752A (en) * 2014-12-30 2016-10-19 日月光半导体制造股份有限公司 Semiconductor substrate and semiconductor packaging structure with same
US10462901B1 (en) 2018-07-26 2019-10-29 International Business Machines Corporation Implementing embedded wire repair for PCB constructs

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104392968A (en) * 2008-11-21 2015-03-04 先进封装技术私人有限公司 Semiconductor substrate
CN106033752A (en) * 2014-12-30 2016-10-19 日月光半导体制造股份有限公司 Semiconductor substrate and semiconductor packaging structure with same
CN106033752B (en) * 2014-12-30 2018-01-09 日月光半导体制造股份有限公司 Semiconductor substrate and semiconductor packaging structure with same
US9978705B2 (en) 2014-12-30 2018-05-22 Advanced Semiconductor Engineering, Inc. Semiconductor substrate and semiconductor package structure having the same
US10462901B1 (en) 2018-07-26 2019-10-29 International Business Machines Corporation Implementing embedded wire repair for PCB constructs
US11412612B2 (en) 2018-07-26 2022-08-09 International Business Machines Corporation Implementing embedded wire repair for PCB constructs

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