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CN101264926A - Method for preparing nano-ITO powder by ammonia salt combustion method - Google Patents

Method for preparing nano-ITO powder by ammonia salt combustion method Download PDF

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CN101264926A
CN101264926A CNA2008100583279A CN200810058327A CN101264926A CN 101264926 A CN101264926 A CN 101264926A CN A2008100583279 A CNA2008100583279 A CN A2008100583279A CN 200810058327 A CN200810058327 A CN 200810058327A CN 101264926 A CN101264926 A CN 101264926A
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竺培显
陈敬超
孙丽达
李仲揆
王勋业
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Kunming University of Science and Technology
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Abstract

一种氨盐燃烧法制备纳米ITO粉末的方法,其方法为:把金属铟和锡溶于硝酸溶液中制成硝酸盐溶液,向该溶液中加入有机络合剂,分散剂,搅拌均匀,温度控制在40~70℃,再加入氨水,调节pH值为1~3.8,最后把制备好的氨盐溶液添加无水乙醇作为助燃剂,再把该溶液液滴滴入700~1200℃的回转窑烧结10~30分钟,即得到纳米ITO粉末。本发明制得的粉末纯度高,粒径在10~30nm之间,为规则的球形颗粒,不含其它杂质,特别是氯离子,解决了由于ITO粉末中富含氯元素,烧结法及热等静压法制备ITO靶材过程中出现的靶材严重开裂的问题;且工艺周期短,生产效率高,可连续送料,连续产粉,实现规模化生产,对环境不会造成污染。

A method for preparing nano-ITO powder by ammonia salt combustion method, the method is: dissolving metal indium and tin in nitric acid solution to make nitrate solution, adding organic complexing agent and dispersant to the solution, stirring evenly, temperature Control the temperature at 40-70°C, then add ammonia water, adjust the pH value to 1-3.8, and finally add absolute ethanol to the prepared ammonia salt solution as a combustion aid, and then drop the solution into the rotary kiln at 700-1200°C Sinter for 10-30 minutes to obtain nano-ITO powder. The powder prepared by the invention has high purity, the particle size is between 10-30nm, and is a regular spherical particle without other impurities, especially chloride ions. The problem of severe target cracking in the process of preparing ITO targets by static pressure method; and the process cycle is short, the production efficiency is high, continuous feeding, continuous powder production, large-scale production can be achieved, and no pollution to the environment.

Description

氨盐燃烧法制备纳米ITO粉末的方法 Method for preparing nano-ITO powder by ammonia salt combustion method

技术领域 technical field

本发明涉及一种高纯度铟锡氧化物纳米粉末的制备方法,属于湿法制备纳米ITO粉末的一种。The invention relates to a preparation method of high-purity indium tin oxide nanometer powder, which belongs to a kind of wet method preparation of nanometer ITO powder.

背景技术 Background technique

铟锡氧化物(Indium Tin Oxides,英文缩写为ITO)纳米粉末是指90%的In2O3与10%的SnO2组成的氧化物材料,是一种新型的特殊功能材料、金属铟的深加工高新技术产品。ITO粉末主要用于制备ITO靶材及ITO薄膜。ITO薄膜具有对可见光透过率高,红外光区的反射率高,紫外光区的吸收率高,良好的导电性,良好的基体附着性及化学稳定性。ITO的上述特性使其在许多领域有着非常广泛的应用,成为现阶段具有重要应用和研究价值的透明导电材料。通常,只有高质量的ITO粉末才能制备出性能完善的ITO靶材。因此,ITO纳米粉末的研制是国内外材料学科研究的热点之一。Indium tin oxide (Indium Tin Oxides, English abbreviation ITO) nanopowder refers to the oxide material composed of 90% In 2 O 3 and 10% SnO 2. It is a new type of special functional material and deep processing of metal indium. High-tech products. ITO powder is mainly used to prepare ITO targets and ITO thin films. ITO film has high transmittance to visible light, high reflectivity in the infrared region, high absorption rate in the ultraviolet region, good electrical conductivity, good substrate adhesion and chemical stability. The above-mentioned characteristics of ITO make it widely used in many fields, and become a transparent conductive material with important application and research value at this stage. Usually, only high-quality ITO powders can prepare ITO targets with perfect properties. Therefore, the development of ITO nano-powder is one of the hotspots of material science research at home and abroad.

中南大学陈世柱等(NONFERROUS METALS,2000,52,88-90)以金属铟和锡为原料,通过喷雾燃烧法制备出纳米ITO粉末,该方法生产效率很高,适合大批量生产,制备出的粉末纯度也很高,但需要在10-15MPa的高压下雾化,这对设备的需求较高,且操作具有一定的危险性,工艺操作复杂。Chi-Hwan等人(Materials Latters 61(2007)1701-1703)利用溶胶-凝胶法成功制备出粒径在16-33纳米的粉末,Nam等(Scripta Mater,2001,44,2047-2050)用共沉淀法制得纳米级ITO粉末。溶胶-凝胶法及共沉淀法是常用的制备纳米ITO粉末的方法,但是对于溶胶-凝胶法来说,影响因素比较多,如溶液的浓度、温度、pH值等都会影响胶体的形成;而共沉淀法制得的粉末颗粒粒径不均匀。Yanagisawa等(J.Am.Cerama,Soc,2001,84,251-253)以氯盐为原料采用共沉淀法得到铟、锡的氢氧化物前驱体,然后进行反复洗涤去除氯离子,再进行水热处理,最后进行热处理得到ITO粉体。该方法中,氯离子的去除是一大关键,如果氯离子残留会影响到ITO靶材的烧结,然而,氯离子的去除是一个很费时的工艺过程,往往需要消耗大量的水、电力,同时还会造成产物的大量流失,使产品生产成本增加,并造成严重的环境污染。Chen Shizhu of Central South University et al. (NONFERROUS METALS, 2000, 52, 88-90) used metal indium and tin as raw materials to prepare nano-ITO powder by spray combustion method. This method has high production efficiency and is suitable for mass production. The prepared powder The purity is also very high, but it needs to be atomized under a high pressure of 10-15MPa, which requires high equipment, and the operation has certain risks, and the process operation is complicated. Chi-Hwan et al. (Materials Latters 61 (2007) 1701-1703) successfully prepared powders with a particle size of 16-33 nanometers using the sol-gel method. Nam et al. (Scripta Mater, 2001, 44, 2047-2050) used Nanoscale ITO powder was prepared by co-precipitation method. The sol-gel method and co-precipitation method are commonly used methods for preparing nano-ITO powder, but for the sol-gel method, there are many influencing factors, such as the concentration, temperature, and pH value of the solution, which will affect the formation of colloids; However, the particle size of the powder produced by the co-precipitation method is not uniform. (J.Am.Cerama, Soc, 2001, 84, 251-253) such as Yanagisawa (J.Am.Cerama, Soc, 2001, 84, 251-253) adopts co-precipitation method to obtain the hydroxide precursor of indium and tin by using chloride salt as raw material, then carry out repeated washing to remove chloride ion, and then carry out water heat treatment, and finally heat treatment to obtain ITO powder. In this method, the removal of chloride ions is a key point. If the residual chloride ions will affect the sintering of the ITO target, however, the removal of chloride ions is a time-consuming process that often consumes a lot of water and electricity. It will also cause a large amount of loss of products, increase the production cost of products, and cause serious environmental pollution.

CN1978323A公开了“一种高烧结活性ITO粉的制备方法”,它是利用铟和锡的醇盐及其它有机和无机盐制备出粒径为6~25纳米的高烧结活性ITO粉。虽然该方法没有直接利用氯化物进行制备,但该方法中有一个工序是在反应器中于130~260℃进行水热反应3~24小时,时间过长,导致整个反应的周期过长。CN1301911C公开了“一种氧化铟中固溶锡的ITO粉末制备方法”,它是把硝酸铟和氯化锡混合溶液为原料,利用喷雾热分解法制备纳米ITO粉,该方法制得的粉末为球形,但由于含有氯离子,同样会影响靶材的烧结。CN1978323A discloses "a method for preparing ITO powder with high sintering activity", which uses alkoxides of indium and tin and other organic and inorganic salts to prepare ITO powder with a particle size of 6-25 nanometers. Although this method does not directly utilize chlorides for preparation, there is a process in the method of performing hydrothermal reaction in a reactor at 130-260° C. for 3-24 hours. The time is too long, resulting in a long cycle of the entire reaction. CN1301911C discloses " a kind of ITO powder preparation method of solid-solution tin in indium oxide ", and it is to use indium nitrate and tin chloride mixed solution as raw material, utilizes spray pyrolysis method to prepare nanometer ITO powder, the powder that this method makes is Spherical, but because it contains chloride ions, it will also affect the sintering of the target.

发明内容 Contents of the invention

本发明的目的在于克服现有技术存在的不足,提供一种晶粒尺寸小,比表面积高、形貌规则、纯度高,工艺流程简单,制备周期短的纳米级ITO粉末的制备方法。工艺流程如图1所示The purpose of the present invention is to overcome the deficiencies in the prior art and provide a method for preparing nanoscale ITO powder with small grain size, high specific surface area, regular shape, high purity, simple process flow and short preparation cycle. The process flow is shown in Figure 1

本发明氨盐燃烧法制备纳米ITO粉末的方法,包括铟和锡的硝酸盐溶液的制备,加入有机络合剂,用氨水调节pH值和烧结工序,其特征是,具体制备工序如下:The method for preparing nano-ITO powder by the ammonium salt combustion method of the present invention comprises the preparation of the nitrate solution of indium and tin, adding an organic complexing agent, adjusting the pH value and sintering process with ammonia water, and is characterized in that the specific preparation process is as follows:

A将纯度为99.99%的铟和锡溶于分析纯的硝酸溶液中,制成浓度1~4mol/L的硝酸盐溶液,其中铟和锡的重量比为9.04∶1;A. Dissolve indium and tin with a purity of 99.99% in analytically pure nitric acid solution to make a nitrate solution with a concentration of 1 to 4mol/L, wherein the weight ratio of indium and tin is 9.04:1;

B、向该溶液中加入有机络合剂聚乙烯醇和聚丙烯酰胺,二者与溶液的体积比分别为1∶(8~15)和1∶(5~10),接着再加入分散剂柠檬酸和果糖,二者与溶液的体积比均为1∶(15~20),搅拌均匀,温度控制在40~70℃;B. Add organic complexing agent polyvinyl alcohol and polyacrylamide to the solution, the volume ratio of the two to the solution is 1: (8-15) and 1: (5-10) respectively, and then add dispersant citric acid and fructose, the volume ratio of the two to the solution is 1: (15-20), stir evenly, and the temperature is controlled at 40-70°C;

C、再滴加氨水,用磁力搅拌器不断搅拌,使其充分反应,调节溶液的pH值为1~3.8;C. Add ammonia water dropwise, stir continuously with a magnetic stirrer to make it fully react, and adjust the pH value of the solution to 1-3.8;

D、把C工序制备好的氨盐溶液再添加与溶液体积比为1∶(10~18)的无水乙醇,作为助燃剂;D, adding the ammonia salt solution prepared by the C operation is 1: (10~18) dehydrated alcohol with the volume ratio of the solution, as a combustion aid;

E、最后把C工序制备好的氨盐溶液放入700~1200℃的回转窑炉中烧结10~30分钟,即得到纳米ITO粉末。E. Finally, put the ammonia salt solution prepared in step C into a rotary kiln at 700-1200°C and sinter for 10-30 minutes to obtain nano-ITO powder.

同现有技术相比,本发明有如下优点或积极效果:Compared with prior art, the present invention has following advantage or positive effect:

1、制得的纳米ITO粉粒径在10~30纳米之间,颗粒形貌呈均匀球形,粒度分布窄。1. The particle size of the prepared nano-ITO powder is between 10 and 30 nanometers, the shape of the particles is uniform and spherical, and the particle size distribution is narrow.

2、制备过程中所需的原料易得,操作简单,工艺流程短且减少了去除氯离子这一环节,从根本上解决了由于ITO粉末中富含氯元素,烧结法及热等静压法制备ITO靶材的过程中出现的靶材严重开裂的问题,并对环境不会产生污染。2. The raw materials required in the preparation process are easy to obtain, the operation is simple, the process flow is short and the removal of chloride ions is reduced, which fundamentally solves the problem of sintering and hot isostatic pressing due to the fact that ITO powder is rich in chlorine. During the process of preparing ITO target materials, the problem of severe cracking of the target material occurs, and the environment will not be polluted.

附图说明 Description of drawings

图1为氨盐燃烧法制备纳米TIO粉的工艺流程图。Figure 1 is a process flow chart for preparing nanometer TIO powder by ammonia salt combustion method.

图2为实施例2所制备的粉末的透射电镜的图片。从图上可以看到,该粉末为粒径20-35纳米的球形颗粒,且形状规则,晶形结构好。FIG. 2 is a transmission electron microscope picture of the powder prepared in Example 2. It can be seen from the figure that the powder is a spherical particle with a particle diameter of 20-35 nanometers, and has a regular shape and a good crystal structure.

图3为实施例2所制备的粉末的X射线衍射图谱。从中可以看到,在20°~80°的范围出现了11个衍射峰的峰位,对照PDF卡片可知,谱线均为In2O3晶体的衍射谱线,没有发现有SnO2及金属Sn的谱线和其它杂波,该粉末为氧化铟固溶氧化锡的ITO粉末。Fig. 3 is the X-ray diffraction spectrum of the powder prepared in Example 2. It can be seen that there are 11 diffraction peaks in the range of 20° to 80°. According to the PDF card, the spectral lines are all In 2 O 3 crystal diffraction lines, and no SnO 2 and metal Sn The spectral lines and other clutter, the powder is ITO powder of indium oxide solid solution tin oxide.

具体实施方式 Detailed ways

下面用实例对本发明作进一步说明The present invention will be further described below with example

实施例1、称取一定量的纯金属In10g,Sn1.1062g(重量比为In∶Sn=9.04∶1)溶解于63%的HNO3中,配制成80ml浓度为1.2mol/L的硝酸盐溶液,依次加入有机络合剂聚乙烯醇10ml(与溶液的体积比为1∶8)和聚丙烯酰胺13.3ml(与溶液的体积比为1∶6);再依次加入分散剂柠檬酸5.3g(与溶液的体积比为1∶15)、果糖5.3g(与溶液的体积比为1∶15),不断搅拌,温度控制在45℃,待所加的络合剂和分散剂完全溶解后,滴加氨水,调节pH值为3.8,在所制得的氨盐溶液中添加与溶液体积比为1∶11的无水乙醇7.3ml,作为助燃剂,放入800℃的回转窑中烧结10分钟,即得到ITO粉末。Embodiment 1, take by weighing a certain amount of pure metal In10g, Sn1.1062g (weight ratio is In: Sn=9.04: 1) is dissolved in 63% HNO3 , is mixed with the nitrate solution that 80ml concentration is 1.2mol/L , add organic complexing agent polyvinyl alcohol 10ml (with the volume ratio of solution being 1: 8) and polyacrylamide 13.3ml (with the volume ratio of solution being 1: 6) successively; Then add dispersing agent citric acid 5.3g ( The volume ratio with the solution is 1: 15), fructose 5.3g (the volume ratio with the solution is 1: 15), constantly stirring, the temperature is controlled at 45 ° C, after the complexing agent and dispersant added are completely dissolved, drip Add ammoniacal liquor, adjust pH value to be 3.8, add in the obtained ammonia salt solution and be the dehydrated alcohol 7.3ml of 1: 11 with solution volume ratio, put into the rotary kiln of 800 ℃ and sinter 10 minutes as combustion aid, That is, ITO powder is obtained.

实施例2、称取一定量的纯金属In10g,Sn1.1062g(重量比为In∶Sn=9.04∶1)溶解于63%的HNO3中,配置成60ml浓度为1.6mol/L的硝酸盐溶液,依次加入有机络合剂聚乙烯醇5ml(与溶液的体积比为1∶12)和聚丙烯酰胺7.5ml(与溶液的体积比为1∶8);再依次加入分散剂柠檬酸3.75g(与溶液的体积比为1∶16)、果糖3.75g(与溶液的体积比为1∶16),不断搅拌,温度控制在60℃,待所加的络合剂和分散剂完全溶解后,滴加氨水,调节pH值为3.5,在所制得的氨盐溶液中添加与溶液体积比为1∶12的无水乙醇5ml,作为助燃剂,放入1000℃的回转窑中烧结20分钟得到ITO粉末。Embodiment 2, take a certain amount of pure metal In10g, Sn1.1062g (weight ratio is In: Sn=9.04:1) is dissolved in the HNO of 63% , is configured into the nitrate solution that 60ml concentration is 1.6mol/L , add organic complexing agent polyvinyl alcohol 5ml (with the volume ratio of solution is 1: 12) and polyacrylamide 7.5ml (with the volume ratio of solution is 1: 8) successively; Then add dispersant citric acid 3.75g ( The volume ratio with the solution is 1: 16), fructose 3.75g (the volume ratio with the solution is 1: 16), constantly stirring, the temperature is controlled at 60 ° C, after the complexing agent and dispersant added are completely dissolved, drop Add ammonia water to adjust the pH value to 3.5, add 5ml of absolute ethanol with a solution volume ratio of 1:12 to the prepared ammonia salt solution, as a combustion aid, put it in a rotary kiln at 1000 ° C for 20 minutes to obtain ITO powder.

实施例3、称取一定量的纯金属In10g,Sn1.1062g(重量比为In∶Sn=9.04∶1)溶解于63%HNO3中,配置成50ml浓度为1.92mol/L的硝酸盐溶液,依次加入有机络合剂聚乙烯醇3.6ml(与溶液的体积比为1∶14)和聚丙烯酰胺5ml(与溶液的体积比为1∶10);再依次加入分散剂柠檬酸2.8g(与溶液的体积比为1∶18)、果糖2.8g(与溶液的体积比为1∶18),不断搅拌,温度控制在70℃,待所加的络合剂和分散剂完全溶解后,滴加氨水,调节pH值为2.5,在所制得的氨盐溶液中添加与溶液体积比为1∶13的无水乙醇3.8ml,作为助燃剂放入1100℃的回转窑中烧结30分钟得到ITO粉末。Embodiment 3, take by weighing a certain amount of pure metal In10g, Sn1.1062g (weight ratio is In: Sn=9.04:1) is dissolved in 63% HNO3 , is configured into the nitrate solution that 50ml concentration is 1.92mol/L, Add organic complexing agent polyvinyl alcohol 3.6ml (with the volume ratio of solution being 1: 14) and polyacrylamide 5ml (with the volume ratio of solution being 1: 10) successively; The volume ratio of the solution is 1: 18), fructose 2.8g (the volume ratio of the solution is 1: 18), stirring constantly, the temperature is controlled at 70 ° C, after the complexing agent and dispersant added are completely dissolved, add dropwise Ammonia, adjust the pH value to 2.5, add 3.8ml of absolute ethanol with a solution volume ratio of 1:13 to the prepared ammonia salt solution, put it into a rotary kiln at 1100°C as a combustion aid and sinter for 30 minutes to obtain ITO powder .

实施例4、称取一定量的纯金属In10g,Sn1.1062g(重量比为In∶Sn=9.04∶1)溶解于63%HNO3中,配置成30ml浓度为3.21mol/L的硝酸盐溶液,依次加入有机络合剂聚乙烯醇3.6ml(与溶液的体积比为1∶14)和聚丙烯酰胺5ml(与溶液的体积比为1∶10);再依次加入分散剂柠檬酸1.5g(与溶液的体积比为1∶20)、果糖1.5g(与溶液的体积比为1∶20),不断搅拌,温度控制在70℃,待所加的络合剂和分散剂完全溶解后,滴加氨水,调节pH值为1.5,在所制得的氨盐溶液中添加与溶液体积比为1∶15的无水乙醇2ml,作为助燃剂放入1200℃的回转窑中烧结30分钟得到ITO粉末。Embodiment 4, take a certain amount of pure metal In10g, Sn1.1062g (weight ratio is In: Sn=9.04:1) is dissolved in 63%HNO 3 , is configured into the nitrate solution that 30ml concentration is 3.21mol/L, Add 3.6ml of organic complexing agent polyvinyl alcohol (with the volume ratio of the solution is 1: 14) and polyacrylamide 5ml (with the volume ratio of the solution is 1: 10); The volume ratio of the solution is 1:20), fructose 1.5g (the volume ratio of the solution is 1:20), stirring constantly, the temperature is controlled at 70 ° C, after the complexing agent and dispersant added are completely dissolved, add dropwise Ammonia, adjust the pH value to 1.5, add 2ml of absolute ethanol with a solution volume ratio of 1:15 to the prepared ammonia salt solution, put it into a rotary kiln at 1200°C as a combustion aid and sinter for 30 minutes to obtain ITO powder.

Claims (1)

1、一种氨盐燃烧法制备纳米ITO粉末的方法,包括铟和锡的硝酸盐溶液的制备,加入有机络合剂,用氨水调节pH值和烧结工序,其特征是,具体制备工序如下:1, a method for preparing nano-ITO powder by ammonia salt combustion method, comprising the preparation of the nitrate solution of indium and tin, adding organic complexing agent, adjusting pH value and sintering process with ammoniacal liquor, it is characterized in that, concrete preparation process is as follows: A将纯度为99.99%的铟和锡溶于分析纯的硝酸溶液中,制成浓度1~4mol/L的硝酸盐溶液,其中铟和锡的重量比为9.04∶1;A. Dissolve indium and tin with a purity of 99.99% in analytically pure nitric acid solution to make a nitrate solution with a concentration of 1 to 4mol/L, wherein the weight ratio of indium and tin is 9.04:1; B、向该溶液中加入有机络合剂聚乙烯醇和聚丙烯酰胺,二者与溶液的体积比分别为1∶(8~15)和1∶(5~10),接着再加入分散剂柠檬酸和果糖,二者与溶液的体积比均为1∶(15~20),搅拌均匀,温度控制在40~70℃;B. Add organic complexing agent polyvinyl alcohol and polyacrylamide to the solution, the volume ratio of the two to the solution is 1: (8-15) and 1: (5-10) respectively, and then add dispersant citric acid and fructose, the volume ratio of the two to the solution is 1: (15-20), stir evenly, and the temperature is controlled at 40-70°C; C、再滴加氨水,用磁力搅拌器不断搅拌,使其充分反应,调节溶液的pH值为1~3.8;C. Add ammonia water dropwise, stir continuously with a magnetic stirrer to make it fully react, and adjust the pH value of the solution to 1-3.8; D、把C工序制备好的氨盐溶液再添加与溶液体积比为1∶(10~18)的无水乙醇,作为助燃剂;D, adding the ammonia salt solution prepared by the C operation is 1: (10~18) dehydrated alcohol with the volume ratio of the solution, as a combustion aid; E、最后把D工序制备好的氨盐溶液放入700~1200℃的回转窑炉中烧结10~30分钟,即得到纳米ITO粉末。E. Finally, put the ammonia salt solution prepared in step D into a rotary kiln at 700-1200°C for sintering for 10-30 minutes to obtain nano-ITO powder.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102417203A (en) * 2011-08-31 2012-04-18 广西师范大学 Method for preparing ultrafine ITO powder by combustion synthesis process
CN102923765A (en) * 2012-10-08 2013-02-13 中山大学 Indium tin oxide (ITO) nano powder and preparation method thereof
CN111601774A (en) * 2018-01-15 2020-08-28 国立大学法人东北大学 ITO particles, dispersion liquid, and method for producing ITO film
CN112591787A (en) * 2021-02-03 2021-04-02 河南大学 Method for preparing nano antimony doped tin oxide powder by microexplosion method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102417203A (en) * 2011-08-31 2012-04-18 广西师范大学 Method for preparing ultrafine ITO powder by combustion synthesis process
CN102923765A (en) * 2012-10-08 2013-02-13 中山大学 Indium tin oxide (ITO) nano powder and preparation method thereof
CN111601774A (en) * 2018-01-15 2020-08-28 国立大学法人东北大学 ITO particles, dispersion liquid, and method for producing ITO film
CN112591787A (en) * 2021-02-03 2021-04-02 河南大学 Method for preparing nano antimony doped tin oxide powder by microexplosion method
CN112591787B (en) * 2021-02-03 2022-01-21 河南大学 Method for preparing nano antimony doped tin oxide powder by microexplosion method

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