CN101255858B - Diaphragm pump and device having a diaphragm pump - Google Patents

Abstract

A membrane pump and a device with the membrane pump are provided, the structure mainly comprises a cavity, a first cavity and a second cavity are arranged in the cavity, the first cavity is communicated with the second cavity, one side or two sides of the cavity are respectively provided with a water inlet pipeline and a water outlet pipeline which are communicated with the first cavity and the second cavity, the inner wall surfaces of the first cavity and the second cavity at the same side are respectively provided with a valve body, to prevent the working fluid from generating a reflux state, a film is arranged on the top surface of the cavity body, an actuating component is attached on the film, the membrane is driven to swing up and down to press the working fluid in the first cavity to generate circulating flow in a single direction, so that the pump structure is thinned, the working efficiency of the pump is improved, and the flow of the working fluid is increased.

Description

Membrane pump and device with membrane pump

technical field

The invention relates to a pump structure, in particular to a membrane pump applied to a fluid transport or circulation system.

Background technique

Existing common piezoelectric pump structure, as shown in Figure 1, described structure is to comprise a cavity 10, and the bottom surface of described cavity 10 is provided with a water inlet pipeline 101 and water outlet pipeline 102, simultaneously in the water inlet pipeline 101 Check valves 20 and 20a are respectively arranged on the internal nozzles of the water outlet pipeline 102, a film 103 is arranged on the top surface of the cavity 10, and an actuating assembly 104 is flatly attached to the top of the film 103. The actuating assembly 104 It is a piezoelectric film; thereby, after the actuating component 104 is energized, the film 103 is driven to swing up and down in the middle section (as shown by the arrow in the figure), and because the two check valves 20, 20a are located in the water inlet pipe 101 and the special position design of the water outlet pipe 102, when the actuating assembly 104 swings up, the pressure inside the cavity 10 is lower than the external pressure, and the two check valves 20, 20a will both move upward, and the check valve 20 will The passage between the water inlet pipe 101 and the cavity 10 is opened, so that the working fluid flowing into the water inlet pipe 101 can enter the inside of the chamber 10, and the check valve 20a blocks the passage between the water outlet pipe 102 and the chamber 10, and flows out. The working fluid in the outlet pipe 102 will not flow back into the cavity 10; and when the actuating component 104 is pressed down, the film 103 is driven to compress the space of the cavity 10 to generate pressure, and the two check valves 20, 20a Both will move downward, then the check valve 20a will open the passage between the outlet pipe 102 and the cavity 10, so that the compressed working fluid inside the cavity 10 will flow out from the outlet pipe 102, and the check valve 20 will enter the water The passage between the pipe 101 and the cavity 10 is blocked, and the water in the cavity 10 will not flow out of the water inlet pipe 101. By means of the continuous up and down swing action, the working fluid can enter the cavity 10 from the water inlet pipe 101 step by step. Then the water flows out of the water outlet pipe 102 , therefore, the pump structure becomes the source of promoting the flow of the working fluid.

However, there are some defects in this kind of piezoelectric pump structure. First, because the water inlet pipe 101 and the water outlet pipe 102 are all arranged on the bottom surface of the cavity 10, although its structure is smaller than the previous old structure, The design of the position of the pipeline is not easy to be reduced, and it is difficult to apply in a thinner application space, such as the current notebook computer or the application of miniaturized biomedical equipment; moreover, the way the actuating assembly 104 swings The upper and lower swings are generated by the middle section. When the actuating component 104 is pressed down, it simultaneously drives the membrane 103 to press the working fluid in the cavity 10 downward, so that the working fluid flows to both sides. The nozzles of the pipe 101 and the water outlet pipe 102 are respectively provided with check valves 20 and 20a to prevent the working fluid from flowing into the water inlet pipe 101 and causing backflow. The swing range of the moving assembly 104 is too small, so that the flow rate into and out of the cavity 10 is not high every time it swings, which is an unsatisfactory part of the pump structure.

Contents of the invention

In view of the above shortcomings, the purpose of the present invention is to provide a membrane pump and a device with a membrane pump, which utilizes the actuation component that swings in a unilateral fan shape to actuate, and the actuation method that swings upwards and downwards greatly compresses the flow through the pump. The internal working fluid drives the working fluid to flow in a single direction. In addition to compressing the structure of the pump to make it thinner, its unilateral swinging movement mode matches the direction of water flow, which further improves the pump. The efficiency of the pump and its circulation system.

In order to achieve the above object, the present invention provides a membrane pump and a device with the membrane pump, the structure mainly includes a cavity, the cavity has a first chamber and a second chamber, and the The first chamber and the second chamber communicate with each other, and one side or two sides of the cavity are respectively provided with a water inlet pipe and a water outlet pipe, and form communication with the first chamber and the second chamber state, valve bodies are respectively provided on the inner walls of the same side of the first chamber and the second chamber to prevent the backflow state of the working fluid. In addition, a film is provided on the top surface of the chamber, and An actuating component is attached to the top to drive the membrane to swing up and down, and press the working fluid in the first chamber to generate a single-direction circulation flow. In this way, in addition to making the pump structure thinner, it also improves the pump. The working efficiency of the pump increases the flow rate of the working fluid.

The present invention also provides a membrane pump, which includes: a cavity with a water inlet pipe and a water outlet pipe respectively; a membrane arranged on the top surface of the cavity; and an actuating component , is flat on the upper surface of the film, the actuation component has a fixed end and a swing end, and the swing end swings in a unilateral fan shape; the fan shape generated by the actuation component is large The amplitude swing effect changes the volume inside the cavity, so that the working fluid stored in the cavity is introduced from the water inlet pipe and exported from the water outlet pipe, thereby generating a flow in a single direction.

The present invention also provides a device with a membrane pump, which includes: a cavity, the cavity has a water inlet pipe and a water outlet pipe respectively; a membrane is arranged on the top surface of the cavity; and An actuation component is flatly attached to the upper surface of the film, the actuation component has a fixed end and a swing end, and the swing end moves in a unilateral fan-shaped swing; a second cavity is connected to the The cavities are connected; through the fan-shaped large-scale swing effect generated by the actuating component, the volume inside the cavity is changed, so that the working fluid stored in the cavity is introduced from the water inlet pipe and discharged from the water outlet pipe. export, resulting in a unidirectional flow.

Description of drawings

Fig. 1 is existing structure sectional view;

Fig. 2 is the exploded schematic diagram of three-dimensional structure of the present invention;

Fig. 3 is the combined completion figure of the present invention;

Fig. 4 is a schematic sectional view 1 of the operation of the present invention;

Fig. 5 is a schematic sectional view 2 of the operation of the present invention;

Fig. 6 is a sectional view one of the pipeline structure of the present invention;

Fig. 7 is the second cross-sectional view of the pipeline structure of the present invention;

Fig. 8 is a top view of the structure of the second embodiment of the present invention;

Fig. 9 is a top view of the device structure of the present invention;

Fig. 10 is a top view of another device structure of the present invention;

Fig. 11 is a schematic diagram showing the comparison between the present invention and the existing film swing mode.

Explanation of reference signs

(Existing): cavity 10 ; water inlet pipe 101 ; water outlet pipe 102 ; membrane 103 ; actuating component 104 ; check valve 20 .

(The present invention): cavity 1; first chamber 11; through groove 111; second chamber 12; through hole 13; water inlet pipe 14; water outlet pipe 15; valve body 2, 2a; cylinder 21; 22; film 3; actuating assembly 4; fixed end 41; swing end 42; electrode lead 5; Water pipe 82; water outlet pipe 83; first cavity 9; first chamber 91; water inlet pipe 92; water outlet pipe 93; swing angle θ; deformation δ1, δ2.

Detailed ways

Please refer to FIG. 2 and FIG. 3 , which are respectively an exploded view of the three-dimensional structure and a completed assembly view of the present invention. As shown in the figure, the pump structure of the present invention is based on a cavity 1, and the cavity 1 has a first chamber 11 and a second chamber 12 respectively, and the first chamber 11 and the second chamber The second chamber 12 is used to accommodate the working fluid. In this embodiment, the first chamber 11 is larger than the second chamber 12 and separated from each other, and the two communicate with each other. In this embodiment, the two A through hole 13 is provided between the first chamber 11 and the second chamber 12 to communicate with each other, and the left and right sides of the outer edge of the cavity 1 are respectively provided with a water inlet pipe 14 and a water outlet pipe 15, and the The water inlet pipe 14 and the water outlet pipe 15 communicate with the first chamber 11 and the second chamber 12 respectively, and a valve body is provided on the inner wall of the first chamber 11 corresponding to the water inlet pipe 14 2. In this embodiment, one end of the valve body 2 is provided with a cylinder 21, which is sleeved on the inner wall surface of the through groove 111, and a plate 22 extends from the cylinder 21, and corresponds to the The position of the nozzle of the water inlet pipe 14 is used to prevent the working fluid from flowing back into the water inlet pipe 14 from the first chamber 11 and flow out of the chamber body 1, while on the inner wall of the second chamber 12 and corresponding to the A valve body 2a is also provided at the position of the through hole 13, which is used to prevent the working fluid from the second chamber 12 from flowing back into the first chamber 11 through the through hole 13, and the arrangement of the valve body 2a is equivalent to The valve body 2 in the first chamber 11.

Continue referring to Fig. 2, be provided with film 3 on the upper end surface of described cavity 1, described film 3 is made of the material with high tension, and the size of described film 3 is equal to the area of an end surface of described cavity 1 , and completely cover the first chamber 11 and the second chamber 12; and an actuating component 4 is arranged above the film 3, and in this embodiment, the actuating component 4 is a piezoelectric sheet, and Correspondingly arranged above the first chamber 11, and flat against the film 3, wherein the actuating component 4 has a fixed end 41 and a swing end 42, the fixed end 41 is connected to the outlet pipe 15 On the same side, and the fixed end 41 is connected to a plurality of electrode wires 5 to provide the power required by the actuating assembly 4, while the swing end 42 is flatly attached to the surface of the film 3, after electrification The oscillating end 42 forms a unilateral fan-shaped and large-scale oscillating manner. As shown in the comparison diagram of FIG. 11 , under the same oscillating angle θ, the deformation δ2 obtained by the fan-shaped oscillating method is much larger than that obtained by the middle-section oscillating method. δ1, so that the fan-shaped swing mode can concentrate the working fluid to flow in the same direction, and at the same time drive the film 3 to press against the first chamber 11, so as to improve the small swing generated by the existing actuating assembly when it is actuated The problem of the lack of and the resulting small water output, in addition, the swing frequency of the actuating assembly 4 can be adjusted differently according to different needs.

Finally, the cavity 1 can also be correspondingly combined with a casing 6 to cover the above-mentioned film 3 and the actuating component 4 therein, and the casing 6 is provided with a plurality of through grooves 61, 61a and 61b, are respectively corresponding to the positions of the actuating component 4, the electrode lead 5 and the second chamber 12, and the actuating component 4 is exposed to have an extension space, and the actuating component 4 also passes through the Electrode lead wire 5; Its combination completion diagram is as shown in Figure 3.

Please refer to Fig. 4 and Fig. 5, which are schematic sectional views of the operation of the present invention, which can be applied to liquid transportation systems or circulation systems (such as water cooling circulation systems), etc., as shown in the figure, the water inlet pipe 14 and the water outlet pipe 15 are respectively connected The conduit 7 of the system makes the membrane pump communicate with other components included in the system (not shown in the figure), so that the working fluid enters the membrane pump; As shown in Figure 4, when the swing end 42 of the actuator assembly 4 swings downward, the film 3 is driven Compress the internal space of the first chamber 11 to generate pressure, forcing the working fluid to generate momentum to rush through the valve body 2a (as shown by the arrow) and flow to the second chamber 12, although a small part of the working fluid will flow into the water Pipeline 14 flows, but the impulsive force that film 3 produces also can press valve body 2 to close the pipe mouth of described water inlet pipe 14, to prevent working fluid from flowing back to water inlet pipe 14; 42 when swinging upwards, as shown in Figure 5, the membrane 3 returns to its original shape to release the space in the first chamber 11, so that the pressure inside the first chamber 11 is lower than the external pressure, and the working fluid is forced to enter the water The pipeline 11 rushes through the valve body 2 (as shown by the arrow) and flows into the first chamber 11, and the working fluid remaining in the water outlet pipeline 15 and the second chamber 12 also generates an impulse due to pressure, so as to Stamping the valve body 2a makes the valve body 2a tightly close the through hole 13, preventing the working fluid stored in the outlet pipe 15 and the second chamber 12 from flowing back into the first chamber 11, thereby making the membrane pump The internal working fluid forms a large flow rate and flows in a single direction.

In addition, the location of the water inlet pipe 14 and the water outlet pipe 15 can be changed according to different needs, in addition to being located on the left and right sides of the cavity 1 as described above. As shown in Figure 6, the water inlet pipe 14 is arranged on one side of the cavity 1 and forms a communication state with the first chamber 11, while the water outlet pipe 15 is arranged at the bottom of the cavity 1, and Form communication with described second chamber 12; Or as shown in Figure 7, described water inlet pipe 14 and water outlet pipe 15 are all arranged at the bottom of described cavity 1, and water inlet pipe 14 and water outlet pipe 15 are respectively connected with The first chamber 11 and the second chamber 12 form communication, and the position of the valve body 2 arranged in the first chamber 11 corresponds to the position of the water inlet pipe 14, so as to prevent the working fluid from flowing back into the water inlet pipe 14 Thereby, through the function of the valve body 2, the working fluid entering the cavity 1 forms a pump action of one in and one out, so as to improve the lack of too small water output in the existing pump structure.

Please refer to FIG. 8 , which is a structural top view of the second embodiment of the present invention. As shown in the figure, the membrane pump is based on a cavity 1, wherein the cavity 1 has a first chamber 11 and a second chamber 12 inside, the second chamber in this embodiment The chamber 12 is located on one side of the first chamber 11, and the two communicate with each other through a through hole 13, and the cavity 1 has a water inlet pipe 14 and a water outlet pipe 15, and the water inlet pipe 14 and the water outlet pipe are located on the same side, and the water inlet pipe 14 and the water outlet pipe 15 form a communication state with the first chamber 11 and the second chamber 12 respectively, on the inner wall surface of the first chamber 11 and A valve body 2 is provided corresponding to the position of the water inlet pipe 14, and a valve body 2a is provided on the inner wall surface of the second chamber 12 and corresponding to the position of the through hole 13; film 3, and cover the positions of the first chamber 11 and the second chamber 12 at the same time, an actuating component 4 is provided on the upper surface of the film 3, and the actuating component 4 has a fixed end 41 and a fixed end 41 respectively. The swing end 42, the fixed end 41 is electrically connected with a plurality of electrode wires 5, and in this embodiment, the fixed end 41 is on the same side as the water inlet pipe 14 and the water outlet pipe 15, so as to facilitate the actuation assembly The oscillating end 42 of 4 forms a unilateral fan-shaped oscillating effect; finally, the cavity 1 can also be correspondingly combined with a housing 6 to cover the above-mentioned film 3 and the actuating component 4 therein.

Therefore, when the actuating assembly 4 provided on the cavity 1 is energized, the swing end 42 of the actuating assembly 4 is caused to produce a unilateral fan-shaped swing action, and when the swing end 42 swings downward, it simultaneously drives the film 3 to the second The internal compression of the first chamber 11 causes the pressure in the first chamber 11 to increase, forcing the working fluid stored in the first chamber 11 to generate momentum and move toward the water inlet pipe 14 and the water outlet pipe 15 at the same time. When the water inlet pipe 14 flows, the generated impulse will punch the valve body 2 corresponding to the position of the water inlet pipe 14, so that the valve body 2 tightly closes the water inlet pipe 14, so as to prevent the working fluid from flowing into the water inlet pipe 14 to produce a backflow phenomenon, at the same time, the impulse generated by the working fluid flowing to the outlet pipe 15 will wash away the valve body 2a, making the working fluid flow to other component positions through the second chamber 12; and when The actuating assembly 4 swings upwards, and the pressure in the first chamber 11 is restored after the film 3 returns to its original shape, causing the external pressure to be greater than the internal pressure of the first chamber 11, forcing the working fluid to flow into the water inlet pipe 14 and pushing In addition, the working fluid stored in the second chamber 12 also generates a momentum due to the pressure, and punches the valve body at the position of the through hole 13. 2a, make the valve body 2a tightly close the through hole 13, so as to prevent the working fluid from flowing back into the first chamber 11, so that the membrane pump forms a single-flow circulation.

Please refer to FIG. 9 , which is a top view of the structure of the device including the membrane pump of the present invention. As shown in the figure, the pump structure in this embodiment includes a cavity 1, wherein the cavity 1 has a first cavity 11, and a water inlet is provided on the left and right sides of the cavity 1 respectively. The pipeline 14 and a water outlet pipeline 15 are provided with a valve body 2 on the inner wall surface of the first chamber 11 and corresponding to the position of the water inlet pipeline 14, so as to prevent the working fluid in the first chamber 11 from flowing back to the In the water inlet pipe 14, a film 3 is provided on the top surface of the cavity 1, and the upper surface of the film 3 is flatly attached to an actuation assembly 4, and the actuation assembly 4 has a fixed end 41 and a swing end 42 , the fixed end 41 is electrically connected to the electrode wire 5 to provide the required power; finally, the cavity 1 can be engaged with a housing 6 correspondingly to cover the above-mentioned components therein; in addition, the The positions of the water inlet pipe 14 and the water outlet pipe 15 can be changed according to different needs, except that they are respectively arranged on the corresponding side of the cavity 1 as mentioned above. The bottom position, or at the side and the bottom position at the same time.

In addition, the cavity 1 is connected to a second cavity 8, and the second cavity 8 has a second cavity 81, and the left and right sides of the second cavity 8 are provided with a water inlet pipeline 82 and a water outlet pipeline 83, and the water inlet pipeline 82 forms communication with the water outlet pipeline 15 of the cavity 1 through a conduit 7, and a valve body 2a is provided on the inner wall of the second chamber 81, and corresponds to the In the position of the water inlet pipe 82, in addition, the water outlet pipe is also connected to the conduit 7; therefore, when the actuating assembly 4 on the membrane pump is energized and operated, it will operate in a unilateral fan-shaped swing mode, and the actuating assembly 4 will generate After the pressing action, the film 3 is driven to compress the inner space of the first chamber 11 to increase the pressure in the space, forcing the working fluid remaining in the first chamber 11 to generate momentum to flow out from the water outlet pipe 15 and rush through the conduit 7. The valve body 2a set in the second chamber 8 flows to the second chamber 81, the water outlet pipe 83, the conduit 7 in sequence, and then flows into other components. On the other hand, a small part of the working fluid also flows simultaneously Impact the valve body 2 provided in the first chamber 11, so that the valve body 2 closes the water inlet pipe 14, preventing the working fluid outside the water inlet pipe 14 from flowing back into the cavity 1; and when When the actuating assembly 4 swings upward, the internal pressure of the first chamber 11 returns to normal, so that the external pressure is greater than the internal pressure of the cavity 1, and the working fluid will enter the first chamber 11 through the water inlet pipe 14 At the same time, the working fluid stored in the second chamber 8 also generates momentum due to the pressure, and directly punches the valve body 2a located in the second chamber 81, forcing the valve body 2a to tightly close the water inlet pipe 82 to block the working fluid. The fluid flows back into the cavity 1, causing the working fluid to circulate in a single direction.

Please refer to FIG. 10 , which is a top view of another device structure including the application of the membrane pump of the present invention. As shown in the figure, the structure includes a cavity 1, the cavity 1 has a first cavity 11 inside, and the left and right sides of the cavity 1 are respectively provided with a water inlet pipe 14 and A water outlet pipe 15, and a film 3 is provided on the top surface of the first chamber 11, and an actuation assembly 4 is provided on the upper surface of the film 3, and the actuation assembly 4 has a fixed end 41 and a swing end 42, wherein the fixed end 41 is electrically connected to a plurality of electrode wires 5, and the swing end 42 produces a unilateral fan-shaped swing effect after being energized. In addition, the cavity 1 can correspond to a housing 6 In addition, the positions of the water inlet pipe 14 and the water outlet pipe 15 can be changed according to different needs except that they are respectively arranged on the corresponding side of the cavity 1. At the same time, they are arranged on the same side of the cavity 1, or at the bottom of the cavity 1, or on one side and the bottom at the same time.

In addition, the water inlet pipe 14 and the water outlet pipe 15 of the cavity 1 are respectively connected to a third cavity 9 and a second cavity 8, and the second cavity 8 and the third cavity 9 have a The second chamber 81 and the third chamber 91, the left and right sides of the second chamber 8 and the third chamber 9 respectively have a water inlet pipe 82,92 and a water outlet pipe 83,93, and the The water outlet pipe 93 of the third chamber 9 is in communication with the water inlet pipe 14 of the chamber 1 through a conduit 7, and the water inlet pipe 82 of the second chamber 8 is connected with the water outlet pipe 15 of the chamber 1 through a pipe 7. Conduit 7 is connected, and a valve body 2 is provided on the inner wall of the third chamber 91 and corresponds to the position of the water inlet pipe 92. A valve body 2a; whereby, when the actuating assembly 4 on the cavity 1 starts to move and swing downward, the film 3 is driven to compress the inner space of the first chamber 11 of the cavity 1, forcing the working fluid to enter The water pipe 14 and the water outlet pipe 15 flow, and the force generated by the extrusion of the working fluid passes through the valve body 2a through the water outlet pipe 15, and flows to the second chamber 81, the water outlet pipe 83, and the conduit 7 in sequence. , and then continue to flow to other components, and at the same time, the working fluid rushing to the water inlet pipe 14 will press the valve body 2 arranged in the third cavity 9 to tightly close the position of the water inlet pipe 93 of the third cavity 9 , to prevent the working fluid outside the water inlet pipe 92 from flowing back into the third chamber 91; and when the actuating assembly 4 swings upwards, the first chamber 11 returns to its original space, because the external pressure is greater than that of the first chamber 11 The pressure inside forces the working fluid to rush through the valve body 2 from the water inlet pipe 92, and then flows into the first chamber 11. At the same time, the working fluid stored in the second chamber 8 also generates an impulsive force. The valve body 2a in the second chamber 81 makes the valve body 2a tightly close the position of the water inlet pipe 82, so as to prevent the working fluid from flowing back into the first chamber 11, thereby making the membrane pump form a Cyclical action in one direction.

The above-mentioned implementation mode is a preferred implementation example, and should not limit the scope of the present invention. If the equivalent changes or modifications made according to the claims of the present invention and the contents of the description, all should belong to the following aspects of the present invention. Patent coverage.

Claims (50)

1. A membrane pump, characterized in that, comprises: A cavity, the cavity is respectively provided with a water inlet pipe and a water outlet pipe; A first chamber is located in the cavity and communicates with the water inlet pipe; A second chamber is located in the chamber and communicates with the first chamber and the outlet pipe; A plurality of valve bodies used to prevent the backflow of working fluid are respectively arranged on the inner walls of the first chamber and the second chamber, one of which corresponds to the position of the water inlet pipe, and the other valve body Corresponding to the position where the first chamber and the second chamber communicate; A thin film is arranged on the top surface of the cavity; An actuating component is flatly attached to the upper surface of the film, and the actuating component has a fixed end and a swing end; Through the unilateral large-scale fan-shaped swing effect of the swing end of the actuating component, the volume inside the cavity is changed, so that the working fluid stored in the cavity is introduced from the water inlet pipe and exported from the water outlet pipe , resulting in a flow in one direction. 2. The membrane pump according to claim 1, characterized in that: the cavity is further connected to a housing, and the housing is provided with three through slots, which respectively correspond to the fixed ends of the actuating components , the position of the swing end and the second chamber. 3. The membrane pump according to claim 2, wherein the fixed end is electrically connected to a plurality of electrode wires. 4. The membrane pump according to claim 3, wherein the plurality of electrode wires are passed through the corresponding through grooves. 5. The membrane pump according to claim 1, wherein a through hole is provided between the first chamber and the second chamber. 6. The membrane pump according to claim 1, characterized in that: the first chamber is provided with a groove adjacent to the inner wall of the water inlet pipe, and the valve body has a cylinder and a plate, so The column is installed in the groove, and the plate corresponds to the position of the water inlet pipe. 7. The membrane pump according to claim 5, characterized in that: the second chamber is provided with a through groove adjacent to the inner wall of the through hole, and the valve body has a cylinder and a plate, The column is disposed in the groove, and the plate corresponds to the position of the through hole. 8. The membrane pump according to claim 1, wherein the fixed end is on the same side as the outlet pipe. 9. The membrane pump according to claim 1, characterized in that: the water inlet pipe and the water outlet pipe are respectively arranged on the corresponding sides of the cavity. 10. The membrane pump according to claim 1, wherein the water inlet pipe and the water outlet pipe are arranged on the same side of the cavity. 11. The membrane pump according to claim 1, characterized in that: the water inlet pipe and the water outlet pipe are arranged at the bottom of the cavity. 12. The membrane pump according to claim 1, characterized in that: the water inlet pipe and the water outlet pipe are respectively arranged on one side and the bottom of the cavity. 13. The membrane pump according to claim 1, wherein the fixed end is electrically connected to a plurality of electrode wires. 14. The membrane pump according to claim 1, wherein the actuating component is a piezoelectric film. 15. A membrane pump, characterized in that it comprises: A cavity, the cavity is respectively provided with a water inlet pipe and a water outlet pipe; a thin film is arranged on the top surface of the cavity; and An actuation component is flatly attached to the upper surface of the film, the actuation component has a fixed end and a swing end, and the swing end swings in a unilateral fan shape; Through the fan-shaped large-scale swing effect generated by the actuating component, the volume inside the cavity is changed, so that the working fluid stored in the cavity is introduced from the water inlet pipe and exported from the water outlet pipe, so that a single direction flow is generated. flow. 16. The membrane pump according to claim 15, characterized in that: the cavity is further connected to a housing, and the housing is provided with a plurality of through slots, which respectively correspond to the fixed parts of the actuating components. end, swing end. 17. The membrane pump according to claim 16, wherein the fixed end is further electrically connected to a plurality of electrode wires. 18. The membrane pump according to claim 17, wherein the plurality of electrode wires are passed through the corresponding through grooves. 19. The membrane pump according to claim 15, wherein the fixed end is on the same side as the outlet pipe. 20. The membrane pump according to claim 15, characterized in that: the water inlet pipe and the water outlet pipe are respectively arranged on the corresponding sides of the cavity. 21. The membrane pump according to claim 15, wherein the water inlet pipe and the water outlet pipe are located on the same side of the cavity. 22. The membrane pump according to claim 15, characterized in that: the water inlet pipe and the water outlet pipe are arranged at the bottom of the cavity. 23. The membrane pump according to claim 15, characterized in that: the water inlet pipe and the water outlet pipe are respectively arranged on one side and the bottom of the cavity. 24. The membrane pump according to claim 15, characterized in that: said cavity further comprises: A first chamber communicated with the water inlet pipe; A second chamber communicates with the first chamber and the water outlet pipe. 25. The membrane pump according to claim 24, wherein a through hole is provided between the first chamber and the second chamber. 26. The membrane pump according to claim 25, wherein a valve body is provided in the second chamber corresponding to the position of the through hole. 27. The membrane pump according to claim 26, characterized in that: the second chamber is provided with a through groove adjacent to the inner wall of the through hole, and the valve body has a cylinder and a plate, The column is disposed in the groove, and the plate corresponds to the position of the through hole. 28. The membrane pump according to claim 24, wherein a valve body is provided on the inner wall of the first chamber corresponding to the position of the water inlet pipe. 29. The membrane pump according to claim 28, characterized in that: the first chamber is provided with a through groove adjacent to the inner wall of the water inlet pipe, and the valve body has a cylinder and a plate, so The column is installed in the groove, and the plate corresponds to the position of the water inlet pipe. 30. The membrane pump according to claim 15, wherein the actuating component is a piezoelectric film. 31. The membrane pump according to claim 15, wherein the fixed end is further electrically connected to a plurality of electrode wires. 32. A device with a membrane pump, comprising: A cavity, the cavity is respectively provided with a water inlet pipe and a water outlet pipe; a thin film is arranged on the top surface of the cavity; and An actuation component is flatly attached to the upper surface of the film, the actuation component has a fixed end and a swing end, and the swing end swings in a unilateral fan shape; A second cavity communicates with the cavity; Through the fan-shaped large-scale swing effect generated by the actuating component, the volume inside the cavity is changed, so that the working fluid stored in the cavity is introduced from the water inlet pipe and exported from the water outlet pipe, so that a single direction flow is generated. flow. 33. The device with a membrane pump as claimed in claim 32, wherein the second chamber further comprises a second chamber, a water inlet pipe and a water outlet pipe, and the water inlet pipe and the water outlet pipe A pipe communicates with the second chamber. 34. The device with a membrane pump according to claim 32, characterized in that: the water inlet pipe of the second cavity communicates with the water outlet pipe of the cavity. 35. The device with a membrane pump according to claim 32, characterized in that: the water outlet pipe of the second cavity communicates with the water inlet pipe of the cavity. 36. The device with a membrane pump as claimed in claim 32, characterized in that: a valve body is provided on the inner wall of the second cavity corresponding to the water inlet pipe. 37. The device with a membrane pump as claimed in claim 32, wherein the chamber further comprises a chamber, which communicates with the water inlet pipe and the water outlet pipe on the chamber. 38. The device with a membrane pump as claimed in claim 32, wherein a valve body is provided on the inner wall of the chamber corresponding to the position of the water inlet pipe. 39. The device with a membrane pump as claimed in claim 32, wherein the cavity is further connected to a third cavity. 40. The device with a membrane pump as claimed in claim 39, wherein the third chamber further comprises a third chamber, a water inlet pipe and a water outlet pipe, and the water inlet pipe and the water outlet pipe The pipe communicates with the third chamber. 41. The device with a membrane pump as claimed in claim 39, wherein a valve body is provided on the inner wall of the third chamber corresponding to the position of the water inlet pipe. 42. The device with a membrane pump as claimed in claim 34, characterized in that: the cavity is further connected to a housing, and the housing is provided with three through slots, which respectively correspond to the actuating components The fixed end, the swing end. 43. The device with a membrane pump according to claim 42, wherein the fixed end is electrically connected to a plurality of electrode wires. 44. The device with a membrane pump as claimed in claim 43, wherein the plurality of electrode wires are passed through the corresponding through grooves. 45. The device with a membrane pump as claimed in claim 34, wherein said actuating element is a piezoelectric film. 46. The device with a membrane pump as claimed in claim 34, wherein said fixed end is electrically connected to a plurality of electrode wires. 47. The device with a membrane pump as claimed in claim 34, characterized in that: the water inlet pipe and the water outlet pipe are respectively arranged on the corresponding sides of the cavity. 48. The device with a membrane pump as claimed in claim 34, wherein the water inlet pipe and the water outlet pipe are arranged on the same side of the cavity. 49. The device with a membrane pump as claimed in claim 34, wherein the water inlet pipe and the water outlet pipe are arranged at the bottom of the cavity. 50. The device with a membrane pump as claimed in claim 34, wherein the water inlet pipe and the water outlet pipe are respectively arranged at one side and the bottom of the cavity.

Images