CN101030080B - Error detection system and management method thereof - Google Patents

Abstract

An error detection system comprises a data server for collecting parameters of a machine, an error sensing module capable of sending an abnormal signal when the parameters exceed a preset specification, a monitoring module capable of restarting when the error sensing module does not work normally, and a remote controller for controlling the data server, the error sensing module and the monitoring module. The error sensing module updates the first access time when reading the parameters stored in the data server, and the monitoring module judges whether the error sensing module is abnormal or not by checking whether the first access time is updated in a first interval or not. In addition, when the data flow of the parameter exceeds the processing capacity of the error sensing module, the monitoring module starts another error sensing module to assist in processing the error analysis of the parameter.

Description

Error detection system and its management method

technical field

The present invention relates to an error detection system and its management method, in particular to an error detection system capable of self-monitoring and error-diagnosing and its management method.

Background technique

Continuous advances in integrated circuit manufacturing technology have resulted in the development of many new semiconductor processes, which typically require many inputs that must be finely regulated to maintain better process quality. Many different processes are required from semiconductor raw materials to packaged integrated circuit components, such as the growth process of semiconductor materials, the cutting process from semiconductor ingots to wafers, thin film deposition processes, etching processes, implantation processes, packaging processes, and testing procedures , and these processes are quite different from each other, most of them are carried out in different areas, and most of the different processes use different control technologies.

FIG. 1 illustrates an error detection system with a real-time database, which is disclosed in US Pat. No. 6,868,512. The error detection system includes at least one data collection source 125 , a real-time database 110 and a database management unit 120 . The data collection source 125 is used to generate error detection and correction (fault detection and correction, FDC) data, and the database management unit 120 is used to store the FDC data in the real-time database 110, wherein the database management unit 120 There is also an entry data directory 130 . In short, the operation of the error detection system is roughly to receive incoming FDC data, store the incoming FDC data in the real-time database 110 and generate the incoming data directory 130 (which indicates that the incoming FDC data is processed by the default incoming data processor 140 responsible for processing), and transmit the FDC data to the data processor 140 indicated by the incoming data directory 130 . However, the known error detection system does not design any self-monitoring or error diagnosis mechanism, so when an error occurs in an internal module of the system, it cannot be immediately remedied to cause greater damage.

Contents of the invention

The main purpose of the present invention is to provide an error detection system capable of self-monitoring and error diagnosis and its management method.

In order to achieve the above object, the present invention proposes an error detection system, which includes a data server for collecting the parameters of at least one machine, at least one error sensing module that can send an abnormal signal when the parameter exceeds a preset specification, and can be used in A monitoring module for restarting when the error sensing module does not work normally, and a remote controller for controlling the data server, the error sensing module and the monitoring module. Preferably, the machine, the data server, the error sensing module, the monitoring module and the remote controller are coupled to each other through a network. In addition, the remote controller can also be used to diagnose errors of the data server, the error sensing module and the monitoring module.

According to the above purpose, the present invention proposes a management method of an error detection system, which includes storing the parameters of at least one machine in a data server, and the error sensing module checks whether the parameter exceeds the preset specification in a last-in-first-out manner and when the parameter exceeds An abnormal signal is generated during the preset specification, and the monitoring module checks whether the error sensing module is working normally and restarts when the error sensing module is not working normally.

Preferably, the error sensing module updates the first access time when reading the parameters stored in the data server, and the monitoring module judges whether the first access time is updated within the first interval by checking whether the first access time is updated. Whether the error sensing module is abnormal. In addition, the remote controller can also diagnose whether an error occurs in the error sensing module by checking whether the first access time is updated within a first interval. Similarly, when the monitoring module reads the first access time of the error sensing module, it also updates the second access time, and the remote controller checks whether the second access time is within the second interval is updated to diagnose errors in the monitoring module.

The remote controller can also diagnose the error of the data server by handshaking with the data server, that is, the remote controller can send a detection signal to the data server, and according to whether the data server is in the The acknowledgment signal is returned within three intervals to determine whether the data service is working normally and to diagnose whether an error occurs in the data server. In addition, the monitoring module can check whether the data flow of the parameter entering the data server exceeds the processing capability of the error sensing module, and activate another error sensing module to assist in error analysis of the parameter when the checking result is true.

Compared with the known technology, the error detection system of the present invention uses the monitoring module to monitor the work of the error sensing module, and restarts the error sensing module when it is not working normally. If the monitoring module fails to restart the error sensing module for a predetermined number of times, it will notify the remote controller to replace the error sensing module to analyze the error of the parameter. In addition, the remote controller can also diagnose errors of the data server by exchanging signals with the data server.

In addition, the monitoring module can check whether the data flow of the parameter entering the data server exceeds the processing capability of the error sensing module, and activate another error sensing module to assist in error analysis of the parameter when the checking result is true. Furthermore, the monitoring module can also set access numbers on the data server, and the error sensing module reads the parameters from the data server in batches according to the access numbers.

Description of drawings

Figure 1 illustrates a known error detection system;

Figure 2 illustrates the error detection system of the present invention; and

3 to 5 illustrate the management method of the error detection system of the present invention.

Description of main component marking

10 error detection system 12 machine

14 Data Server 16 Error Sensing Module

18 Monitoring module 20 Remote controller

30 Factory 32 Network

110 Real-time database 120 Database management unit

125 Source of data collection 130 Enter the data directory

140 data processor

Detailed ways

Figure 1 illustrates an error detection system 10 of the present invention. The error detection system 10 includes a data server 14 for collecting the parameters of at least one machine 12, at least one error sensing module 16 that can send an abnormal signal when the parameter exceeds a preset specification, and can be used when the error sensing module 16 is abnormal. The monitoring module 18 restarted during work, the remote controller 20 used to control the data server 14 , the error sensing module 16 and the monitoring module 18 . Preferably, the machine 12 , the data server 14 , the error sensing module 16 , the monitoring module 18 and the remote controller 20 are coupled to each other through a network. In addition, the remote controller 20 can be connected to the factory 30 (such as a new factory building) through another network 32, which includes another error detection system 10 and the machine 12, so that the factory 30 can pass through the remote controller 20 Sharing data helps the factory 30 to establish process control capabilities in a short period of time.

Preferably, the remote controller 20 can also be used to diagnose whether errors occur in the data server 14 , the error sensing module 16 and the monitoring module 18 . The machine can be a measuring machine, a pump or a process machine, and the process machine includes a photolithography stepping machine, an etching machine, a deposition machine, a planarization machine, a rapid heat treatment machine, and an ion implantation machine Taiwan and so on. The parameter may be the original data measured by the sensor of the machine, such as the physical measurement data of the process machine or the electrical data of the DUT measured by the measuring machine.

3 to 5 illustrate the management method of the error detection system 10 of the present invention. The data server 14 receives and stores at least one parameter of the machine 12, and the error sensing module 16 checks whether the parameter exceeds a preset specification in a last-in-first-out manner, and generates an abnormal signal when the parameter exceeds the preset specification. In addition, the error sensing module 16 also updates the first access time when reading the parameters stored in the data server 14 .

Referring to FIG. 4 , the monitoring module 18 checks whether the error sensing module 16 is working normally, and restarts when the error sensing module 16 is not working normally. The error sensing module 16 updates the first access time when reading the parameters stored in the data server 14, and the monitoring module 18 can determine whether the first access time is updated within the first interval by checking whether the first access time is updated. Whether the error sensing module 16 is abnormal. If the first access time is not updated within the first interval, the monitoring module 18 then checks the stored value of the first counter, which records the restart times of the error sensing module 16 .

If the storage value of the first counter does not exceed the preset value (representing the maximum number of restarts that can allow the error sensing module 16), the monitoring module 18 restarts the error sensing module 16 and stores the first counter. The value is incremented by 1. Relatively, if the storage value of the first counter exceeds the preset value (that is, the monitoring module 18 has tried to restart the error sensing module 16 before, but it was invalid), the error sensing module 16 has been unable to work normally, the The monitoring module 18 notifies the remote controller 20 to replace the error sensing module 16 to analyze the error of the parameter, that is, the remote controller is a backup device of the error sensing module.

Referring to FIG. 5, the monitoring module 18 also updates the second access time when reading the first access time of the error sensing module 16, and the remote controller 20 can check the second access time Whether it is updated within the second interval, an error of the monitoring module 18 is diagnosed. If the second access time is not updated within the second interval, the remote controller 20 checks whether the stored value of the second counter exceeds a preset value (which records the restart times of the monitoring module 18 ). If the stored value of the second counter does not exceed the preset value, the remote controller 20 restarts the monitoring module 18 and increases the stored value of the second counter by 1. Relatively, if the storage value of the second counter exceeds the preset value, it means that the monitoring module 20 has failed to work, and the remote controller 20 replaces the monitoring module 18 to perform monitoring work, that is, the remote controller is As a backup device for this monitoring module.

In addition, the data server 14 can also calculate the incoming data flow (that is, the number of parameters entered within a period of time), and the monitoring module 18 can check whether the data flow entering the data server 14 exceeds the processing capacity of the error sensing module 16 , and start another error sensing module 16 to assist in the analysis of this parameter when the result of the check is true. Preferably, judging whether the data traffic entering the data server 14 exceeds the processing capability of the error sensing module 16 can be determined by checking whether the parameters stored in the data server 14 are read within the fourth interval.

The remote controller 20 can also diagnose the error of the data server 14 by exchanging signals with the data server 14, that is, the remote controller 20 can also transmit a detection signal to the data server 14, and then check the data server 14 Whether to return an acknowledgment signal within the third interval to determine whether the data server 14 is working normally and to diagnose errors of the data server 14 . Furthermore, the monitoring module 18 can also set the access number in the data server 14, and the error sensing module 16 reads the parameters from the data server 14 in batches according to the access number. If the data flow of the parameters entering the data server 14 exceeds the processing capacity of the error sensing module, the monitoring module 18 can increase the analysis efficiency of the error sensing module 16 by increasing the value of the access number.

Compared with the known technology, the error detection system of the present invention uses the monitoring module to monitor the work of the error sensing module, and restarts the error sensing module when it is not working normally. If the monitoring module fails to restart the error sensing module for a predetermined number of times, it will notify the remote controller to replace the error sensing module to analyze the error of the parameter. In addition, the remote controller can also diagnose errors of the data server by exchanging signals with the data server.

In addition, the monitoring module can check whether the data flow of the parameter entering the data server exceeds the processing capability of the error sensing module, and activate another error sensing module to assist in error analysis of the parameter when the checking result is true. Furthermore, the monitoring module can also set access numbers on the data server, and the error sensing module reads the parameters from the data server in batches according to the access numbers.

The technical content and technical characteristics of the present invention have been disclosed above, but those skilled in the art may still make various replacements and modifications based on the teaching and disclosure of the present invention without departing from the spirit of the present invention. Therefore, the protection scope of the present invention should not be limited to the content disclosed in the embodiments, but should include various replacements and modifications that do not depart from the present invention, and are covered by the claims.

Claims (18)

1. An error detection system characterized in that it comprises: The data server is used to collect the parameters of at least one machine; At least one error sensing module can send an abnormal signal when the parameter exceeds a preset specification, and the error sensing module updates the first access time when reading the parameter stored in the data server; and A monitoring module, the monitoring module judges whether the error sensing module is abnormal by checking whether the first access time is updated within the first interval, and can restart the error sensing module when it is not working normally; Wherein the data server, the error sensing module and the monitoring module are coupled to each other through a first network. 2. The error detection system according to claim 1, further comprising a remote controller for controlling the data server, the error sensing module and the monitoring module. 3. The error detection system according to claim 2, wherein the remote controller is used to diagnose errors of the data server, the error sensing module and the monitoring module. 4. The error detection system according to claim 2, wherein the remote controller is used as a backup device for the error sensing module and the monitoring module. 5. The error detection system according to claim 1, wherein the monitoring module can activate another error sensing module when the data flow of the parameter exceeds the processing capability of the error sensing module. 6. The error detection system according to claim 1, wherein the monitoring module can set the access number on the data server, and the error sensing module reads from the data server in batches according to the access number Take this parameter. 7. The error detection system according to claim 2, wherein the remote controller can be coupled to another error detection system through a second network to share data. 8. A method for managing an error detection system, characterized in that it comprises the following steps: storing the parameters of at least one machine in the data server; If the parameter exceeds a preset specification, the error sensing module generates an abnormal signal, wherein the error sensing module updates the first access time when reading the parameter stored in the data server; and The monitoring module judges whether the error sensing module is abnormal by checking whether the first access time is updated within the first interval. If the error sensing module is not working normally, the monitoring module restarts the error sensing module. 9. The management method of the error detection system according to claim 8, wherein the error sensing module checks whether the parameter exceeds the preset specification in a last-in-first-out manner. 10. The management method of the error detection system according to claim 8, wherein the monitoring module updates the second access time when reading the first access time of the error sensing module, and the error detection system further comprises The remote controller diagnoses errors of the monitoring module by checking whether the second access time is updated within a second interval. 11. The management method of the error detection system according to claim 8, wherein the error detection module updates the first access time when reading the parameters stored in the data server, and the error detection system further includes a remote control A device for diagnosing errors of the monitoring module by checking whether the first access time is updated within a first interval. 12. The management method of the error detection system according to claim 8, further comprising a remote controller, which diagnoses the error of the data server through the following steps: sending a detection signal to the data server; and Whether the data service works normally is determined by checking whether the data server returns an acknowledgment signal within the third interval. 13. The management method of the error detection system according to claim 8, further comprising the following steps: Check whether the data flow of the parameters entering the data server exceeds the processing capacity of the error sensing module; and If the checking result is true, start another error sensing module. 14. The management method of the error detection system according to claim 13, wherein the step of activating another error detection module is performed by the monitoring module. 15. The management method of the error detection system according to claim 13, wherein the step of checking whether the data flow of the parameters entering the data server exceeds the processing capacity of the error sensing module is by checking the parameters stored in the data server Whether to be read in the fourth interval. 16. The management method of the error detection system according to claim 8, further comprising the following steps: The monitoring module sets the access number to the data server; and The error sensing module reads the parameters from the data server in batches according to the access number. 17. The management method of the error detection system according to claim 16, wherein if the data flow of the parameters entering the data server exceeds the processing capacity of the error sensing module, the monitoring module increases the value of the access number. 18. The management method of the error detection system according to claim 8, further comprising the step of sharing data between the remote controller and another error detection system through the network.

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