CN100578796C - Active element array substrate - Google Patents
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Abstract
Description
技术领域 technical field
本发明是有关于一种阵列基板,且特别是有关于一种有源元件阵列基板。The present invention relates to an array substrate, and particularly relates to an active element array substrate.
背景技术 Background technique
由于显示器的需求与日俱增,因此业界全力投入相关显示器的发展。其中,又以阴极射线管(cathode ray tube,CRT)因具有优异的显示品质与技术成熟性,因此长年独占显示器市场。然而,近来由于绿色环保概念的兴起对于其能源消耗较大与产生辐射量较大的特性,加上产品扁平化空间有限,因此无法满足市场对于轻、薄、短、小、美以及低消耗功率的市场趋势。因此,具有高画质、空间利用效率佳、低消耗功率、无辐射等优越特性的薄膜晶体管液晶显示器(thin film transistor liquid crystal display,TFT-LCD)逐渐成为市场的主流。Due to the increasing demand for displays, the industry is fully committed to the development of related displays. Among them, the cathode ray tube (cathode ray tube, CRT) has been monopolizing the display market for many years because of its excellent display quality and technological maturity. However, due to the rise of the concept of green environmental protection, the characteristics of large energy consumption and large radiation, and the limited space for product flattening, it cannot meet the market demand for light, thin, short, small, beautiful and low power consumption. market trends. Therefore, thin film transistor liquid crystal display (TFT-LCD) with superior characteristics such as high image quality, good space utilization efficiency, low power consumption, and no radiation has gradually become the mainstream of the market.
以薄膜晶体管液晶显示模组(TFT-LCD module)而言,其主要是由一液晶显示面板(liquid crystal display panel)及一背光模组(backlight module)所构成。其中,液晶显示面板通常是由一薄膜晶体管阵列基板(thin film transistorarray substrate)、一彩色滤光基板(color filter substrate)与配置于此两基板间的一液晶层所构成,而背光模组用以提供此液晶显示面板所需的面光源,以使液晶显示模组达到显示的效果。For a TFT-LCD module, it is mainly composed of a liquid crystal display panel and a backlight module. Among them, the liquid crystal display panel is usually composed of a thin film transistor array substrate (thin film transistor array substrate), a color filter substrate (color filter substrate) and a liquid crystal layer arranged between the two substrates, and the backlight module is used for Provide the surface light source required by the liquid crystal display panel, so that the liquid crystal display module can achieve the display effect.
薄膜晶体管阵列基板可分为显示区(display region)与周边线路区(peripheral circuit region),其中在显示区上配置有以阵列排列的多个像素单元,而每一像素单元包括薄膜晶体管以及与薄膜晶体管连接的像素电极(pixelelectrode)。另外,在周边线路区与显示区上内配置有多条扫描配线(scan line)与数据配线(data line),其中每一个像素单元的薄膜晶体管由对应的扫描配线与数据配线所控制。The thin film transistor array substrate can be divided into a display region and a peripheral circuit region, where a plurality of pixel units arranged in an array are arranged on the display region, and each pixel unit includes a thin film transistor and a thin film The pixel electrode (pixelelectrode) to which the transistor is connected. In addition, a plurality of scan lines and data lines are arranged in the peripheral circuit area and the display area, wherein the thin film transistor of each pixel unit is formed by the corresponding scan lines and data lines. control.
为了避免在制造过程中产生静电破坏的问题,通常会于薄膜晶体管阵列基板的周边线路区上配置一静电放电(electrostatic discharge,ESD)保护线路,其中静电放电保护线路包括外部静电放电保护环(outer short ring,OSR)以及内部静电放电保护环(inner short ring,ISR)。在完成整个薄膜晶体管阵列基板的制作之后,通常会进行一切割工艺,以移除外部静电放电保护环。然而,移除外部静电放电保护环后的薄膜晶体管阵列基板对于静电放电的防护能力便下降。In order to avoid the problem of electrostatic damage during the manufacturing process, an electrostatic discharge (ESD) protection circuit is usually arranged on the peripheral circuit area of the thin film transistor array substrate, wherein the electrostatic discharge protection circuit includes an outer electrostatic discharge protection ring (outer short ring, OSR) and internal electrostatic discharge protection ring (inner short ring, ISR). After the fabrication of the entire thin film transistor array substrate is completed, a cutting process is usually performed to remove the external ESD protection ring. However, the protection ability of the thin film transistor array substrate against electrostatic discharge is reduced after removing the external electrostatic discharge protection ring.
发明内容 Contents of the invention
本发明所要解决的问题是提供一种有源元件阵列基板,以提高静电放电防护能力。The problem to be solved by the present invention is to provide an active element array substrate to improve the electrostatic discharge protection capability.
本发明提出一种有源元件阵列基板,其包括一基板、一像素阵列、多个接垫、多个第一开关元件与多个第二开关元件。其中,基板具有一周边电路区与一显示区,而像素阵列配置于显示区上。接垫配置于周边电路区上,并与像素阵列电性连接。第一开关元件配置于该周边电路区上,并位于接垫外侧,且各第一开关元件分别与这些接垫其中之一电性连接。各第一开关元件具有一栅极、一源极与一漏极,其中栅极与源极电性连接,且栅极与接垫电性连接。第二开关元件配置于周边电路区上,并位于这些接垫外侧。各第二开关元件分别电性连接于两相邻的第一开关元件,而各第二开关元件具有一栅极、一源极与一漏极。其中,源极与相邻的第一开关元件的漏极电性连接,且漏极与相邻的第一开关元件的源极电性连接。The invention provides an active element array substrate, which includes a substrate, a pixel array, multiple pads, multiple first switch elements and multiple second switch elements. Wherein, the substrate has a peripheral circuit area and a display area, and the pixel array is arranged on the display area. The pads are arranged on the peripheral circuit area and electrically connected with the pixel array. The first switching elements are arranged on the peripheral circuit area and located outside the pads, and each first switching element is electrically connected to one of the pads. Each first switching element has a gate, a source and a drain, wherein the gate is electrically connected to the source, and the gate is electrically connected to the pad. The second switching element is disposed on the peripheral circuit area and located outside the pads. Each second switch element is respectively electrically connected to two adjacent first switch elements, and each second switch element has a gate, a source and a drain. Wherein, the source is electrically connected to the drain of the adjacent first switch element, and the drain is electrically connected to the source of the adjacent first switch element.
在本发明的有源元件阵列基板中,各第二开关元件的栅极为一浮动栅极。In the active element array substrate of the present invention, the gate of each second switching element is a floating gate.
在本发明的有源元件阵列基板中,各第二开关元件的栅极与源极电性连接。In the active element array substrate of the present invention, the gate and source of each second switching element are electrically connected.
在本发明的有源元件阵列基板中,有源元件阵列基板还包括一连接线,其配置于周边电路区上,并位于第一开关元件与第二开关元件的外侧。各第二开关元件的源极电性连接至连接线,且各第二开关元件的栅极为一浮动栅极。In the active element array substrate of the present invention, the active element array substrate further includes a connection line disposed on the peripheral circuit area and located outside the first switch element and the second switch element. The source of each second switching element is electrically connected to the connection line, and the gate of each second switching element is a floating gate.
在本发明的有源元件阵列基板中,这些接垫包括数据线接垫或扫描线接垫。In the active element array substrate of the present invention, these pads include data line pads or scan line pads.
本发明提出一种有源元件阵列基板,其包括一基板、一像素阵列、多个接垫、多个第一开关元件与多个第二开关元件。其中,基板具有一周边电路区与一显示区,而像素阵列配置于显示区上。接垫配置于周边电路区上,并与像素阵列电性连接。第一开关元件配置于该周边电路区上,并位于接垫外侧,且各第一开关元件分别与这些接垫其中之一电性连接。各第一开关元件具有一栅极、一源极与一漏极,其中栅极与源极电性连接,而栅极与接垫电性连接,且漏极为浮动漏极。第二开关元件配置于周边电路区上,并位于接垫外侧。各第二开关元件分别与这些第一开关元件其中之一电性连接,而各第二开关元件具有一栅极、一源极与一漏极,其中漏极与第一开关元件的源极电性连接。此外,源极为浮动源极,栅极为浮动栅极。The invention provides an active element array substrate, which includes a substrate, a pixel array, multiple pads, multiple first switch elements and multiple second switch elements. Wherein, the substrate has a peripheral circuit area and a display area, and the pixel array is arranged on the display area. The pads are arranged on the peripheral circuit area and electrically connected with the pixel array. The first switching elements are arranged on the peripheral circuit area and located outside the pads, and each first switching element is electrically connected to one of the pads. Each first switching element has a gate, a source and a drain, wherein the gate is electrically connected to the source, and the gate is electrically connected to the pad, and the drain is a floating drain. The second switch element is disposed on the peripheral circuit area and located outside the pad. Each second switching element is electrically connected to one of the first switching elements respectively, and each second switching element has a gate, a source and a drain, wherein the drain is electrically connected to the source of the first switching element sexual connection. Also, the source is a floating source and the gate is a floating gate.
在本发明的有源元件阵列基板中,这些接垫包括数据线接垫或扫描线接垫。In the active element array substrate of the present invention, these pads include data line pads or scan line pads.
本发明提出一种有源元件阵列基板,其包括一基板、一像素阵列、多个接垫、多个第一开关元件、多个第二开关元件与一外部静电放电保护环。其中,基板具有一周边电路区与一显示区,而像素阵列配置于显示区上。接垫配置于周边电路区上,并与像素阵列电性连接。第一开关元件配置于该周边电路区上,并位于接垫外侧,且各第一开关元件分别与这些接垫其中之一电性连接。各第一开关元件具有一栅极、一源极与一漏极,其中栅极与源极电性连接,且栅极与接垫电性连接。第二开关元件配置于周边电路区上,并位于这些接垫外侧。各第二开关元件分别电性连接于两相邻的第一开关元件,而各第二开关元件具有一栅极、一源极与一漏极。其中,源极与相邻的第一开关元件的漏极电性连接,且漏极与相邻的第一开关元件的源极电性连接。外部静电放电保护环配置于周边电路区上,并位于第一开关元件与第二开关元件外侧,且各第二开关元件的栅极电性连接至外部静电放电保护环。The present invention provides an active device array substrate, which includes a substrate, a pixel array, a plurality of pads, a plurality of first switching elements, a plurality of second switching elements and an external electrostatic discharge protection ring. Wherein, the substrate has a peripheral circuit area and a display area, and the pixel array is arranged on the display area. The pads are arranged on the peripheral circuit area and electrically connected with the pixel array. The first switching elements are arranged on the peripheral circuit area and located outside the pads, and each first switching element is electrically connected to one of the pads. Each first switching element has a gate, a source and a drain, wherein the gate is electrically connected to the source, and the gate is electrically connected to the pad. The second switching element is disposed on the peripheral circuit area and located outside the pads. Each second switch element is respectively electrically connected to two adjacent first switch elements, and each second switch element has a gate, a source and a drain. Wherein, the source is electrically connected to the drain of the adjacent first switch element, and the drain is electrically connected to the source of the adjacent first switch element. The external electrostatic discharge protection ring is disposed on the peripheral circuit area and located outside the first switch element and the second switch element, and the gates of each second switch element are electrically connected to the external electrostatic discharge protection ring.
在本发明的有源元件阵列基板中,各第二开关元件的源极电性连接至外部静电放电保护环。In the active element array substrate of the present invention, the sources of the second switching elements are electrically connected to the external electrostatic discharge protection ring.
在本发明的有源元件阵列基板中,各第二开关元件的栅极与源极电性连接。In the active element array substrate of the present invention, the gate and source of each second switching element are electrically connected.
在本发明的有源元件阵列基板中,有源元件阵列基板还包括一连接线,其配置于周边电路区上,并位于第一开关元件与第二开关元件的外侧以及外部静电放电保护环的内侧。各第二开关元件的源极电性连接至连接线,且各第二开关元件的栅极电性连接至外部静电放电保护环。In the active element array substrate of the present invention, the active element array substrate further includes a connection line, which is arranged on the peripheral circuit area, and is located outside the first switching element and the second switching element and outside the outer electrostatic discharge protection ring. inside. The source of each second switching element is electrically connected to the connection line, and the gate of each second switching element is electrically connected to the external electrostatic discharge protection ring.
在本发明的有源元件阵列基板中,这些接垫包括数据线接垫或扫描线接垫。In the active element array substrate of the present invention, these pads include data line pads or scan line pads.
本发明提出一种有源元件阵列基板,其包括一基板、一像素阵列、多个接垫、多个第一开关元件、多个第二开关元件与一外部静电放电保护环。其中,基板具有一周边电路区与一显示区,而像素阵列配置于显示区上。接垫配置于周边电路区上,并与像素阵列电性连接。第一开关元件配置于该周边电路区上,并位于接垫外侧,且各第一开关元件分别与这些接垫其中之一电性连接。各第一开关元件具有一栅极、一源极与一漏极,其中栅极与源极电性连接,而栅极与接垫电性连接。第二开关元件配置于周边电路区上,并位于接垫外侧。各第二开关元件分别与这些第一开关元件其中之一电性连接,而各第二开关元件具有一栅极、一源极与一漏极,其中漏极与第一开关元件的源极电性连接。外部静电放电保护环配置于周边电路区上,并位于第一开关元件与第二开关元件外侧,且各第二开关元件的栅极与源极分别电性连接至外部静电放电保护环,且各第一开关元件的漏极电性连接至外部静电放电保护环。The present invention provides an active device array substrate, which includes a substrate, a pixel array, a plurality of pads, a plurality of first switching elements, a plurality of second switching elements and an external electrostatic discharge protection ring. Wherein, the substrate has a peripheral circuit area and a display area, and the pixel array is arranged on the display area. The pads are arranged on the peripheral circuit area and electrically connected with the pixel array. The first switching elements are arranged on the peripheral circuit area and located outside the pads, and each first switching element is electrically connected to one of the pads. Each first switching element has a gate, a source and a drain, wherein the gate is electrically connected to the source, and the gate is electrically connected to the pad. The second switch element is disposed on the peripheral circuit area and located outside the pad. Each second switching element is electrically connected to one of the first switching elements respectively, and each second switching element has a gate, a source and a drain, wherein the drain is electrically connected to the source of the first switching element sexual connection. The external electrostatic discharge protection ring is arranged on the peripheral circuit area, and is located outside the first switch element and the second switch element, and the gate and source of each second switch element are respectively electrically connected to the external electrostatic discharge protection ring, and each The drain of the first switch element is electrically connected to the external ESD protection ring.
在本发明的有源元件阵列基板中,这些接垫包括数据线接垫或扫描线接垫。In the active element array substrate of the present invention, these pads include data line pads or scan line pads.
基于上述,本发明采用第一开关元件与第二开关元件,以电性连接各接垫,因此此种有源阵列基板具有静电放电防护的功能。此外,各接垫间也可以电性绝缘,以降低信号的相互干扰。Based on the above, the present invention adopts the first switch element and the second switch element to electrically connect each pad, so the active matrix substrate has the function of electrostatic discharge protection. In addition, the pads can also be electrically insulated to reduce mutual interference of signals.
附图说明 Description of drawings
为让本发明的上述目的、特征和优点能更明显易懂,以下结合附图对本发明的具体实施方式作详细说明,其中:In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and understandable, the specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein:
图1A是本发明的第一实施例的一种有源元件阵列基板于切割工艺前的等效电路图。FIG. 1A is an equivalent circuit diagram of an active device array substrate before a dicing process according to the first embodiment of the present invention.
图1B是本发明的第一实施例的一种有源元件阵列基板的切割工艺前的俯视图,其未绘示像素阵列。1B is a top view of an active device array substrate before a cutting process according to the first embodiment of the present invention, which does not show a pixel array.
图2A是本发明的第一实施例的一种有源元件阵列基板的等效电路图。FIG. 2A is an equivalent circuit diagram of an active element array substrate according to the first embodiment of the present invention.
图2B是本发明的第一实施例的一种有源元件阵列基板的俯视图,其未绘示像素阵列。FIG. 2B is a top view of an active device array substrate according to the first embodiment of the present invention, which does not show a pixel array.
图3A是本发明的第二实施例的一种有源元件阵列基板于切割工艺前的等效电路图。3A is an equivalent circuit diagram of an active device array substrate before a cutting process according to the second embodiment of the present invention.
图3B是本发明的第二实施例的一种有源元件阵列基板的切割工艺前的俯视图,其未绘示像素阵列。FIG. 3B is a top view of an active device array substrate before cutting process according to the second embodiment of the present invention, which does not show the pixel array.
图4A是本发明的第二实施例的一种有源元件阵列基板的等效电路图。FIG. 4A is an equivalent circuit diagram of an active element array substrate according to the second embodiment of the present invention.
图4B是本发明的第二实施例的一种有源元件阵列基板的俯视图,其未绘示像素阵列。FIG. 4B is a top view of an active element array substrate according to the second embodiment of the present invention, which does not show a pixel array.
图5A是本发明的第三实施例的一种有源元件阵列基板于切割工艺前的等效电路图。FIG. 5A is an equivalent circuit diagram of an active device array substrate before cutting process according to the third embodiment of the present invention.
图5B是本发明的第三实施例的一种有源元件阵列基板的切割工艺前的俯视图,其未绘示像素阵列。5B is a top view of an active device array substrate before cutting process according to the third embodiment of the present invention, which does not show the pixel array.
图6A是本发明的第三实施例的一种有源元件阵列基板的等效电路图。FIG. 6A is an equivalent circuit diagram of an active element array substrate according to the third embodiment of the present invention.
图6B是本发明的第三实施例的一种有源元件阵列基板的俯视图,其未绘示像素阵列。FIG. 6B is a top view of an active device array substrate according to a third embodiment of the present invention, which does not show a pixel array.
图7A是本发明的第四实施例的一种有源元件阵列基板于切割工艺前的等效电路图。FIG. 7A is an equivalent circuit diagram of an active device array substrate before cutting process according to the fourth embodiment of the present invention.
图7B是本发明的第四实施例的一种有源元件阵列基板的切割工艺前的俯视图,其未绘示像素阵列。FIG. 7B is a top view of an active element array substrate before cutting process according to the fourth embodiment of the present invention, which does not show the pixel array.
图8A是本发明的第四实施例的一种有源元件阵列基板的等效电路图。FIG. 8A is an equivalent circuit diagram of an active element array substrate according to the fourth embodiment of the present invention.
图8B是本发明的第四实施例的一种有源元件阵列基板的俯视图,其未绘示像素阵列。FIG. 8B is a top view of an active device array substrate according to a fourth embodiment of the present invention, which does not show a pixel array.
具体实施方式 Detailed ways
第一实施例first embodiment
图1A是本发明的第一实施例的一种有源元件阵列基板于切割工艺前的等效电路图。图1B是本发明的第一实施例的一种有源元件阵列基板的切割工艺前的俯视图,其未绘示像素阵列。FIG. 1A is an equivalent circuit diagram of an active device array substrate before a dicing process according to the first embodiment of the present invention. 1B is a top view of an active device array substrate before a cutting process according to the first embodiment of the present invention, which does not show a pixel array.
请参考图1A,本实施例的有源元件阵列基板制造方法包括下列步骤。首先,提供一基板110,而此基板110具有一周边电路区110a与一显示区110b,其中在显示区110b上已形成一像素阵列120。此像素阵列120通常包括多条扫描线、多条数据线、多个薄膜晶体管以及多个像素电极,但为了简化说明,像素阵列120的细部结构便不再绘出。此外,在周边电路区110a上已形成多个接垫130、多个第一开关元件140、多个第二开关元件150以及一外部静电放电保护环(outer short ring,OSR)160。接垫130与像素阵列120电性连接,而此接垫130可以是数据线接垫、扫描线接垫或其他类型的接垫。Please refer to FIG. 1A , the method for manufacturing an active device array substrate in this embodiment includes the following steps. Firstly, a
第一开关元件140与第二开关元件150位于接垫130的外侧,其中各第一开关元件140分别电性连接至这些接垫130其中之一。更详细而言,各第一开关元件140具有一栅极140g、一源极140s与一漏极140d,其中栅极140g与源极140s电性连接,且栅极140g与接垫130电性连接。换言之,第一开关元件140可以视为一个二极管(diode)。此外,各第二开关元件150分别电性连接于两相邻的第一开关元件140。换言之,这些第二开关元件150与这些第一开关元件140电性串联,因此当静电放电产生时,电流便可沿着图1A中的放电路径B移动而扩散至整个基板110上,以降低发生静电放电破坏的可能性。各第二开关元件150具有一栅极150g、一源极150s与一漏极150d。其中,源极150s与相邻的第一开关元件140的漏极140d电性连接,且漏极150d与相邻的第一开关元件140的源极140s电性连接。另外,各第二开关元件150的源极150s与栅极150g均电性连接至外部静电放电保护环160。The
以下就细部结构进行详细说明,但值得注意的是,图1A的等效电路图所代表的结构并不限定于图1B所绘示的结构。本发明所属技术领域中的技术人员,基于图1A的等效电路图,应可变化出其他结构。The detailed structure will be described in detail below, but it should be noted that the structure represented by the equivalent circuit diagram of FIG. 1A is not limited to the structure shown in FIG. 1B . Those skilled in the technical field of the present invention should be able to change other structures based on the equivalent circuit diagram of FIG. 1A .
请参考图1B,为了简化说明,像素阵列120的细部结构便不再绘出。接垫130包括一第一金属层132、一第二金属层134、一透明导电层136与多个接触窗130a、130b,其中第一金属层132与第二金属层134分别配置于基板110上,而透明导电层136配置于第一金属层132与第二金属层134上方。此外,透明导电层136经由接触窗130a电性连接至第一金属层132,且透明导电层136经由接触窗130b电性连接第二金属层134。Please refer to FIG. 1B , in order to simplify the description, the detailed structure of the
第一开关元件140包括一栅极140g、一源极140s、一漏极140d、多个接触窗142a、142b、一半导体层144、一透明导电层146,其中栅极140g配置于基板110上,并与接垫130的第一金属层132相连。半导体层144配置于栅极140g上方,而源极140s与漏极140d分别覆盖部分半导体层144。透明导电层146配置于部分源极140s上方以及部分栅极140g上方,且透明导电层146经由接触窗142a与源极140s电性连接。透明导电层146经由接触窗142b与栅极140g电性连接。因此,第一开关元件140的源极140s便经由透明导电层146电性连接至栅极140g。此外,漏极140d连接至外部静电放电保护环160。The
第二开关元件150包括一栅极150g、一源极150s、一漏极150d以及一半导体层152。其中,栅极150g配置于基板110上,而半导体层152配置于栅极150g上方。源极150s与漏极150d分别覆盖部分半导体层152,其中漏极150d与第一开关元件140的源极140s相连,而源极150s与栅极150g均连接至外部静电放电保护环160。此外,源极150s与相邻的第一开关元件140的漏极140d相连。因此,第二开关元件150与第一开关元件140电性串联。The
外部静电放电保护环160包括一第一金属层162、一第二金属层164、一透明导电层166与多个接触窗168a、168b,其中第一金属层162配置于基板110上,而第二开关元件150的栅极150g与第一金属层162相连。第二金属层164配置于基板110上,并覆盖部分第一金属层162。此外,第二开关元件150的源极150s以及第一开关元件140的漏极140d均连接至第二金属层164。透明导电层166覆盖第一金属层162与第二金属层164,其中透明导电层166经由接触窗168a电性连接至第一金属层162,且透明导电层166经由接触窗168b电性连接至第二金属层164。The external
请继续参考图1A与图1B,然后,沿着切割线A进行一切割工艺,以移除外部静电放电保护环160。此时,便完成有源元件阵列基板100的工艺。Please continue to refer to FIG. 1A and FIG. 1B , and then, a cutting process is performed along the cutting line A to remove the external
图2A是本发明的第一实施例的一种有源元件阵列基板的等效电路图。图2B是本发明的第一实施例的一种有源元件阵列基板的俯视图,其未绘示像素阵列。请参考图2A与图2B,经过切割工艺后,各第二开关元件150的栅极150g成为一浮动栅极。换言之,栅极150g并未与任何线路相连。由于这些接垫130经由第一开关元件140与第二开关元件150电性串联,因此当静电放电发生时,电流便可沿着放电路径B而扩散至整个有源元件阵列基板100,以降低发生静电放电破坏的情况发生。换言之,此有源元件阵列基板100具有静电放电防护的功能。FIG. 2A is an equivalent circuit diagram of an active element array substrate according to the first embodiment of the present invention. FIG. 2B is a top view of an active device array substrate according to the first embodiment of the present invention, which does not show a pixel array. Please refer to FIG. 2A and FIG. 2B , after the cutting process, the
第二实施例second embodiment
图3A是本发明的第二实施例的一种有源元件阵列基板于切割工艺前的等效电路图。图3B是本发明的第二实施例的一种有源元件阵列基板的切割工艺前的俯视图,其未绘示像素阵列。请先参考图3A,本实施例与第一实施例相似,其不同之处在于:各第二开关元件250的栅极250g与源极250s电性连接。因此,第二开关元件250可以视为一个二极管。此外,第二开关元件250的漏极250d与第一开关元件140的源极140s电性连接。3A is an equivalent circuit diagram of an active device array substrate before a cutting process according to the second embodiment of the present invention. FIG. 3B is a top view of an active device array substrate before cutting process according to the second embodiment of the present invention, which does not show the pixel array. Please refer to FIG. 3A first. This embodiment is similar to the first embodiment, the difference is that: the
以下就细部结构进行详细说明,但值得注意的是,图3A的等效电路图所代表的结构并不限定于图3B所绘示的结构。本发明所属技术领域中的技术人员,基于图3A的等效电路图,应可变化出其他结构。The detailed structure will be described in detail below, but it should be noted that the structure represented by the equivalent circuit diagram of FIG. 3A is not limited to the structure shown in FIG. 3B . Those skilled in the technical field of the present invention should be able to change other structures based on the equivalent circuit diagram of FIG. 3A .
请参考图3B,更详细而言,第二开关元件250包括一栅极250g、一源极250s、一漏极250d、一半导体层252、一透明导电层254与多个接触窗256a、256b。其中,栅极250g配置于基板110上,并连接至外部静电放电保护环160的第一金属层162。半导体层252位于栅极250g上方。源极250s与漏极250d分别覆盖部分半导体层252。此外,在本实施例中,源极250s更跨过栅极250g,且透明导电层254覆盖于部分源极250s与栅极250g。透明导电层254经由接触窗256a与栅极250g电性连接,且透明导电层254经由接触窗256b与源极250s电性连接。由于这些第二开关元件250与这些第一开关元件140电性串联,因此当静电放电产生时,电流便可沿着放电路径B移动而扩散至整个基板110上,以降低发生静电放电破坏的可能性。Please refer to FIG. 3B , in more detail, the
请继续参考图3A与图3B,然后,沿着切割线A进行一切割工艺,以移除外部静电放电保护环160。此时,便完成有源元件阵列基板200的工艺。Please continue to refer to FIG. 3A and FIG. 3B , and then, a cutting process is performed along the cutting line A to remove the outer
图4A是本发明的第二实施例的一种有源元件阵列基板的等效电路图。图4B是本发明的第二实施例的一种有源元件阵列基板的俯视图,其未绘示像素阵列。请参考图4A与图4B,在经过切割工艺后,各第二开关元件250的栅极250g被切断。此外,各第二开关元件250的栅极250g与源极250s电性连接。换言之,在本实施例中,第二开关元件250与第一开关元件140可以视为两个二极管串联。由于这些接垫130经由第一开关元件140与第二开关元件250电性串联,因此当静电放电发生时,电流便可沿着放电路径B而扩散至整个有源元件阵列基板200,以降低发生静电放电破坏的情况发生。换言之,此有源元件阵列基板200具有静电放电防护的功能。再者,由于切割工艺仅切断各第二开关元件250的栅极250g,因此由切割工艺所产生的金属碎屑所造成的线路短路的可能性便能够降低。FIG. 4A is an equivalent circuit diagram of an active element array substrate according to the second embodiment of the present invention. FIG. 4B is a top view of an active element array substrate according to the second embodiment of the present invention, which does not show a pixel array. Please refer to FIG. 4A and FIG. 4B , after the cutting process, the
第三实施例third embodiment
图5A是本发明的第三实施例的一种有源元件阵列基板于切割工艺前的等效电路图。图5B是本发明的第三实施例的一种有源元件阵列基板的切割工艺前的俯视图,其未绘示像素阵列。请先参考图5A,本实施例与第一实施例相似,其不同之处在于:在基板110的周边电路区110a上还形成一连接线370,其配置于第一开关元件140与第二开关元件150的外侧,且各第二开关元件150的源极150s电性连接至连接线370。FIG. 5A is an equivalent circuit diagram of an active device array substrate before cutting process according to the third embodiment of the present invention. 5B is a top view of an active device array substrate before cutting process according to the third embodiment of the present invention, which does not show the pixel array. Please refer to FIG. 5A first. This embodiment is similar to the first embodiment. The difference is that a
以下就细部结构进行详细说明,但值得注意的是,图5A的等效电路图所代表的结构并不限定于图5B所绘示的结构。本发明所属技术领域中的技术人员,基于图5A的等效电路图,应可变化出其他结构。The detailed structure will be described in detail below, but it should be noted that the structure represented by the equivalent circuit diagram of FIG. 5A is not limited to the structure shown in FIG. 5B . Those skilled in the technical field of the present invention should be able to change other structures based on the equivalent circuit diagram of FIG. 5A .
请参考图5B,更详细而言,连接线370配置于周边电路区110a上,并位于第一开关元件140与第二开关元件150的外侧。此外,连接线370跨过各第二开关元件150的栅极150g,而各第二开关元件150的源极150s电性连接至连接线370。由于这些第二开关元件150与这些第一开关元件140电性串联,因此当静电放电产生时,电流便可沿着放电路径B移动而扩散至整个基板110上,以降低发生静电放电破坏的可能性。此外,连接线370也有助于降低发生静电放电破坏的可能性。Please refer to FIG. 5B , in more detail, the
请继续参考图5A与图5B,然后,沿着切割线A进行一切割工艺,以移除外部静电放电保护环160。此时,便完成有源元件阵列基板300的工艺。Please continue to refer to FIG. 5A and FIG. 5B , and then, a cutting process is performed along the cutting line A to remove the outer
图6A是本发明的第三实施例的一种有源元件阵列基板的等效电路图。图6B是本发明的第三实施例的一种有源元件阵列基板的俯视图,其未绘示像素阵列。请参考图6A与图6B,在经过切割工艺后,各第二开关元件150的栅极150g成为一浮动栅极。换言之,栅极150g并未与任何线路相连。FIG. 6A is an equivalent circuit diagram of an active element array substrate according to the third embodiment of the present invention. FIG. 6B is a top view of an active device array substrate according to a third embodiment of the present invention, which does not show a pixel array. Please refer to FIG. 6A and FIG. 6B , after the cutting process, the
由于这些接垫130经由第一开关元件140与第二开关元件150电性串联,且各第二开关元件150的源极150s更经由连接线370电性串联,因此当静电放电发生时,电流便可沿着放电路径B以及连接线370而扩散至整个有源元件阵列基板300,以降低发生静电放电破坏的情况发生。换言之,此有源元件阵列基板300具有较佳的静电放电防护的功能。再者,由于切割工艺仅切断各第二开关元件150的栅极150g,因此由切割工艺所产生的金属碎屑所造成的线路短路的可能性便能够降低。Since these
第四实施例Fourth embodiment
图7A是本发明的第四实施例的一种有源元件阵列基板于切割工艺前的等效电路图。图7B是本发明的第四实施例的一种有源元件阵列基板的切割工艺前的俯视图,其未绘示像素阵列。请先参考图7A,本实施例与第一实施例相似,其不同之处在于:第一开关元件140的漏极140d直接连接至外部静电放电保护环160,而第二开关元件150的源极150s也直接连接至外部静电放电保护环160。换言之,相较于第一实施例,本实施例的第一开关元件140的漏极140d与第二开关元件150的源极150s分别连接至外部静电放电保护环160。此外,第一开关元件140的漏极140d与第二开关元件150的源极150s为分离。FIG. 7A is an equivalent circuit diagram of an active device array substrate before cutting process according to the fourth embodiment of the present invention. FIG. 7B is a top view of an active element array substrate before cutting process according to the fourth embodiment of the present invention, which does not show the pixel array. Please refer to FIG. 7A first, this embodiment is similar to the first embodiment, the difference is that: the
以下就细部结构进行详细说明,但值得注意的是,图7A的等效电路图所代表的结构并不限定于图7B所绘示的结构。本发明所属技术领域中的技术人员,基于图7A的等效电路图,应可变化出其他结构。The detailed structure will be described in detail below, but it should be noted that the structure represented by the equivalent circuit diagram of FIG. 7A is not limited to the structure shown in FIG. 7B . Those skilled in the technical field of the present invention should be able to change other structures based on the equivalent circuit diagram of FIG. 7A .
请参考图7B,更详细而言,第二开关元件150的源极150s覆盖部分栅极150g,且第二开关元件150的源极150s直接连接至外部静电放电保护环160的第二金属层164。此外,第一开关元件140的漏极140d也是直接连接至外部静电放电保护环160的第二金属层164。Please refer to FIG. 7B. In more detail, the
请继续参考图7A与图7B,然后,沿着切割线A进行一切割工艺,以移除外部静电放电保护环160。此时,便完成有源元件阵列基板400的工艺。Please continue to refer to FIG. 7A and FIG. 7B , and then, a cutting process is performed along the cutting line A to remove the outer
图8A是本发明的第四实施例的一种有源元件阵列基板的等效电路图。图8B是本发明的第四实施例的一种有源元件阵列基板的俯视图,其未绘示像素阵列。请参考图8A与图8B,在经过切割工艺后,各第二开关元件150的栅极150g以及源极150s均被切断。因此,各第二开关元件150的栅极150g成为一浮动栅极,而各第二开关元件150的源极150s也成为一浮动源极。换言之,栅极150g与源极150s均并未与任何线路相连。此外,第一开关元件140的漏极140d也被切断,因此第一开关元件140的漏极140d也成为一浮动漏极。同样地,漏极140d未与任何线路相连。因此,有源元件阵列基板400的各接垫130之间便形成电性断路,以降低信号干扰的可能性。FIG. 8A is an equivalent circuit diagram of an active element array substrate according to the fourth embodiment of the present invention. FIG. 8B is a top view of an active device array substrate according to a fourth embodiment of the present invention, which does not show a pixel array. Please refer to FIG. 8A and FIG. 8B , after the cutting process, the
虽然本发明已以较佳实施例揭示如上,然其并非用以限定本发明,任何本领域技术人员,在不脱离本发明的精神和范围内,当可作些许的修改和完善,因此本发明的保护范围当以权利要求书所界定的为准。Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art may make some modifications and improvements without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection should be defined by the claims.
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Patent Citations (3)
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CN1388404A (en) * | 1995-10-03 | 2003-01-01 | 精工爱普生株式会社 | Active matrix base plate and its producing method |
US6493047B2 (en) * | 1997-08-07 | 2002-12-10 | Lg. Philips Lcd Co., Ltd. | Liquid crystal display panel having electrostatic discharge prevention circuitry |
CN1719313A (en) * | 2005-08-08 | 2006-01-11 | 友达光电股份有限公司 | Active element array substrate |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020001085A1 (en) * | 2018-06-29 | 2020-01-02 | 京东方科技集团股份有限公司 | Display panel and manufacturing method, detection method therefor and display device |
US11563071B2 (en) | 2018-06-29 | 2023-01-24 | Chengdu Boe Optoelectronics Technology Co., Ltd. | Display panel, manufacturing method and detecting method thereof, and display device |
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CN101350356A (en) | 2009-01-21 |
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