CN100567972C - 体声波传感器 - Google Patents
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Abstract
本发明描述了一种包括衬底1和至少一个谐振器的传感器，所述谐振器包括声反射器2、压电层5、第一和第二电极3，4和传感层(6)，其中第一和第二电极3，4被放置在压电层5的相同侧。传感层通过吸收、吸附、解吸或化学反应与化学剂或生物制剂起反应。结果，谐振器的单独频率变化并且可以得到关于所述化学剂或生物制剂的结论。这些传感器对被检测的作用剂很敏感，特别当用于液体中时。
Description
技术领域
本发明涉及一种包括衬底和至少一个谐振器的传感器，所述谐振器包括声反射器、压电层、第一和第二电极和传感层。
快速并且精确检测化学剂和生物制剂对于诸如环境污染检测或军事应用之类的活动是很重要的。
至今，生物/化学传感器是基于量热效应或重量效应。
背景技术
例如，US5936150描述了一种使用涂有化学敏感吸附剂涂层的薄膜声谐振器的化学传感器。所述薄膜声谐振器具有由薄膜压电层分离的电极并且被多层谐振声隔离器所支撑。为了检测化学品，感兴趣的化学品(通常是蒸汽)接触到暴露的吸附剂表面涂层并且与该暴露的吸附剂表面涂层相互作用，这导致吸附剂涂层的质量和/或机械特性变化。吸附剂涂层中的变化将导致薄膜声谐振器的谐振频率变化，因为涂层直接地依赖于谐振器并且是声谐振路径的一部分。
当检测气体作用剂时最好应用上述的传感器。当在液体中使用所述传感器时，液体将衰减谐振器。这导致设备较低的敏感度和较低的Q系数。
发明内容
本发明的一个目的是提供一种在用于液体中时更敏感的传感器。
所述目的是通过包括衬底和至少一个谐振器的传感器实现，所述谐振器包括声反射器、第一和第二电极、压电层和传感层，其中第一和第二电极被置于压电层的同一侧。
这种谐振器的优点是液体不能吸收的主要剪切振动被激发，由于所激发的振动不能在液体中传播，则振动的衰减较低。这导致低的谐振器的声损耗。当由这种谐振器制成的传感器用于液体中时，该传感器具有高敏感度。
根据权利要求2所述的传感器包括具有低电阻抗的谐振器。
借助于权利要求3的优选实施例，可以获得用于检测液体中化学或生物制剂的非常强健和敏感的传感器。
根据权利要求4的传感器以很高的敏感度工作，因为用于传感层的每个材料在不同程度上与被检测的作用剂相互作用。所获得的输出信号有点复杂并且因此对于被检测的作用剂敏感。
下面参考两个附图更加详细地说明本发明。
附图说明
图1示出了传感器阵列电路；以及
图2示出了谐振器的横截面结构。
具体实施方式
根据本发明的传感器包括衬底和至少一个谐振器。所述谐振器包括声反射器、第一和第二电极、压电层、和传感层。
更加优选地，传感器包括多个单独可寻址的谐振器。更加优选地，所述多个谐振器被设置在包括m行和n列的矩形行和列配置中。通过这样的设置，实现传感器阵列。最优选地，可单独寻址每个谐振器。图1示出了包括m.n谐振器R的这种传感器阵列的电路。
如果传感器包括多个谐振器，则通过谐振能量不重叠的一个距离将每个谐振器与其相邻谐振器分离。
传感器包括衬底1，该衬底1包括诸如Si或GaAs之类的半导体材料或诸如玻璃或AL2O3之类的绝缘材料。谐振器被沉积在衬底1上。每个谐振器包括声反射器2、第一电极3和第二电极4、压电层5、和传感层6。
图2示出了根据本发明的谐振器横截面。
最优选地，声反射器2具有分层结构并且包括具有交替高和低的声阻抗的若干层。这些层示出了1/4谐振波长λ的厚度。具有低声阻抗的层例如包括有机或无机气凝胶、有机或无机干凝胶、泡沫、低密度合成材料或SiO2。具有高声阻抗的层例如包括Ta2O5、Si3N4、TiO2、ZnO、LiNbO3、LiTaO3、Al2O3、SiC、V2O5、Nb2O5、ZrO2、La2O3、WOx(0＜x≤3)、MoOx(0＜x≤3)、ZrC、WC、MoC、ThO2、CeO2、Nd2O3、Pr2O3、Sm2O3、Gd2O3、ReOx(0＜x≤3.5)、RuO2、IrO2、Y2O3、Sc2O3、LiGeO2、Bi12GeO20、GeO2、MgO、钇铝石榴石(Y3AL5O12，YAG)、钇铁石榴石(Y3Fe5O12，YIG)、LiGaO2、HfO2、AIN、高密度合成材料、钨(W)或碳(C)。
声反射器2中层的数目是奇数并且分层结构的第一层和最后一层包括具有低声阻抗的材料。应该理解的是，尽管示出了5个这样的层，但是可以使用更多层并且通常期望为5-9层。
置于声反射器2的项部上的压电层5最优选地包括A lN。可替换地，ZnO、KNbO3、锆钛酸铅(PZT)、掺镧锆钛酸铅(PLZT)等等可以用于压电层4。
第一和第二电极3，4被沉积在压电层5的项部上。电极3，4包括诸如Pt、Al、Al:Cu、Al:Si、Mo、W或合金之类的金属以及包括Ti、Cr或NiCr的额外粘附层。最优选地，两个电极3，4是叉指形电极。
在压电层5的外侧，存在接地金属化和/或结合焊点(bond-pads)(未示出)。接地金属化和结合焊点包括Al、Al:Si、Al:Cu、Cu、Ni、Au或其组合物。
传感层6完全地或仅仅部分地覆盖两个电极3，4。相对于被检测的作用剂，选择传感层6的材料。通过吸收、吸附、解吸或化学反应进行化学剂或生物制剂的检测。
化学剂或生物制剂包括原子、离子、分子、高分子、细胞器或细胞。化学剂或生物制剂也可以包括介质中的物质，该物质包括但不限于诸如三氯甲烷、四氯化碳、三氯乙烷、三氯乙烯、四氯乙烷、四氯乙烯、甲苯、苯、芳族化合物和烃杀虫剂之类的环境污染物。在此使用的术语“介质”指水介质、非水液体介质和气体。如在此使用的，术语“化学剂”或“生物制剂”也包括诸如蛋白质、糖蛋白、金属盐、离子等等之类的分子。该术语也包括神经传递质、激素、增长因子、胞质分裂(cytokines)、单核因子、淋巴细胞活、营养素、酶、受体。术语“化学剂”或“生物制剂”还指诸如高分子结构、细胞器和细胞之类的结构元件，其包括但不限于外胚层、中胚层和内胚层起源的细胞，例如干细胞、血细胞、神经细胞、免疫细胞和胃肠细胞；以及也包括微生物，例如真菌、病毒、细菌和原生动物。
传感层6例如包括化学反应物、抗体、能够结合作用剂的抗体的碎片(fragment)、用于特定作用剂的生物受体、酶、蛋白质、寡核苷酸、核酸(例如，DNA或RNA)、缩氨酸、金属-有机材料、或者例如配合基的小分子。传感层6也包括对存在于传感层6的作用剂起反应的聚合材料。另外，可以通过结合分子团来修改传感层6的聚合材料，该分子团将增强对目标作用剂的选择性。
在一些情况下，很困难获得对单个化学剂或生物制剂来说特定的物质，但是多个谐振器的存在允许在传感层6中使用若干种材料，每个谐振器上一种材料。每个传感层6可以对被检测到的化学剂或生物制剂有不同的反应性或敏感度。通过将来自谐振器组的信息放在一起，可以推断可疑作用剂的存在。使用由吸收、吸附、解吸或化学反应操作的谐振器上的材料，各个频率随着曝光而上升或下降。
可替换地，传感器可以仅仅包括两个谐振器。在这个实施例中，其中一个谐振器是参考谐振器并且传感层6对作用剂是非活性的。例如，如果通过吸收进行作用剂的检测，则由于因非活性涂层的吸收而参考谐振器不改变其质量。可替换地，参考谐振器包括传感层6中的材料，由此得知已知的固定吸收度。
在压电层4的相同侧包括电极3，4的谐振器具有的优点是，液体不能吸收激发的主要剪切振动。结果所激发的振动不能在液体中传播，并且振动的衰减较低。这导致低的谐振器的声损耗。由这样的一个谐振器或多个谐振器制成的传感器具有较高的敏感度。
电压施加到电极3，4导致压电层5被激发为振荡。为此，谐振器的第一电极3和第二电极4还与振荡器电路耦合，该振荡器电路能够在第一电极3和第二电极4之间施加随时间变化的激发电压，因此产生随时间变化的电场。
Claims (4)
1.一种包括衬底(1)和至少一个谐振器的传感器，所述谐振器包括声反射器(2)、第一和第二电极(3，4)、压电层(5)、和传感层(6)，其中第一和第二电极(3，4)被放置在压电层(5)的顶部以便激发液体不能吸收的剪切振动，所述声反射器(2)包括多个具有交替的高、低声阻抗的层，其中分层的结构的第一层和最后一层包括具有低声阻抗的材料，传感层(6)完全或部分覆盖第一和第二电极(3，4)。
2.根据权利要求1所述的传感器，其中第一和第二电极(3，4)是叉指形电极。
3.根据权利要求1或2所述的传感器，其中传感器包括多个可单独寻址的谐振器。
4.根据权利要求3所述的传感器，其中不同谐振器的传感层(6)包括不同材料。
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- 2004-09-28 CN CNB2004800295125A patent/CN100567972C/zh not_active Expired - Fee Related
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| US7498720B2 (en) | 2009-03-03 |
| WO2005036150A1 (en) | 2005-04-21 |
| CN1864063A (zh) | 2006-11-15 |
| JP4891772B2 (ja) | 2012-03-07 |
| US20070007851A1 (en) | 2007-01-11 |
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| EP1682880A1 (en) | 2006-07-26 |
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