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CN100559199C - Inspection unit - Google Patents

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Publication number
CN100559199C
CN100559199C CNB2005800112631A CN200580011263A CN100559199C CN 100559199 C CN100559199 C CN 100559199C CN B2005800112631 A CNB2005800112631 A CN B2005800112631A CN 200580011263 A CN200580011263 A CN 200580011263A CN 100559199 C CN100559199 C CN 100559199C
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Prior art keywords
probe block
inspection
block
screw
probe
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CN1942773A (en
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风间俊男
上田阳一
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NHK Spring Co Ltd
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NHK Spring Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Liquid Crystal (AREA)

Abstract

一种检查单元(1),具有电连接检查对象物(7)的探针块(3)和装卸自如地安装探针块(3)的检查块(2),其中,检查块(2)具有从与探针块(3)的连接面的相反侧插入而固定探针块(3)的安装螺钉(12),探针块(3)在安装螺钉(12)的对应部分即连接面侧形成螺合安装螺钉(12)的内螺纹或埋入螺母。另外,在探针块(3)上设置落下防止螺钉(10),旋转卸下螺钉(11)以推出落下防止螺钉(10),使探针块(3)与检查块(2)切实地分离,由此,能够容易且安全地进行探针块的更换作业或微调整作业。

Figure 200580011263

An inspection unit (1) comprising a probe block (3) electrically connected to an inspection object (7) and an inspection block (2) detachably mounted to the probe block (3), wherein the inspection block (2) has The mounting screw (12) that fixes the probe block (3) is inserted from the opposite side to the connection surface of the probe block (3), and the probe block (3) is formed on the connection surface side that corresponds to the mounting screw (12). Screw the internal thread or embedded nut of the mounting screw (12). In addition, set the anti-drop screw (10) on the probe block (3), and rotate and remove the screw (11) to push out the anti-drop screw (10), so that the probe block (3) and the inspection block (2) can be separated reliably Therefore, the replacement work and the fine adjustment work of the probe block can be performed easily and safely.

Figure 200580011263

Description

检查单元 check unit

技术领域 technical field

本发明涉及一种检查单元,其具有电连接LCD面板等检查对象物的探针块和固定于装卸自如地安装该探针块的检查装置主体侧的检查块。The present invention relates to an inspection unit including a probe block electrically connected to an inspection object such as an LCD panel, and an inspection block fixed to a main body of an inspection device to which the probe block is detachably attached.

背景技术 Background technique

以往,在检查LCD面板等检查对象物时,经由导电性接触子(探针)与LCD面板的连接端子电接触,进而经由与各探针的另一端电连接的接触块与扁形电缆等连接,从连接于该扁形电缆的检查装置供给各种测试信号等,进行LCD面板的检查。Conventionally, when inspecting an object to be inspected such as an LCD panel, the connection terminals of the LCD panel are electrically contacted via conductive contacts (probes), and then connected to a flat cable or the like via a contact block electrically connected to the other end of each probe. Various test signals and the like are supplied from an inspection device connected to the flat cable to inspect the LCD panel.

该探针设于探针块上,且该探针块以适合于检查对象物的连接端子的配置状态的方式配置探针,随着检查对象物的种类变更或探针块的破损而更换。The probes are provided on a probe block, and the probe block is arranged so that the probes are suitable for the arrangement state of the connection terminals of the inspection object, and is replaced when the type of the inspection object is changed or the probe block is damaged.

专利文献1:特开2001-141747号公报Patent Document 1: JP-A-2001-141747

可是,如图7所示,探针块102经由检查块安装于框架101上,该框架101嵌入并固定于检查装置103的框体或盖的一部分。而且,探针块102设于检查装置103的内侧,在设于检查装置103内部的装置载物台104上配置检查对象物105,通过使该装置载物台104上下移动,使检查对象物105的接触端子与探针块102的探针电连接而实行检查。However, as shown in FIG. 7 , the probe block 102 is attached to the frame 101 via the inspection block, and the frame 101 is fitted and fixed to a part of the frame or cover of the inspection device 103 . Furthermore, the probe block 102 is installed inside the inspection device 103, the inspection object 105 is placed on the device stage 104 provided inside the inspection device 103, and the inspection object 105 is moved up and down by moving the device stage 104 up and down. The contact terminals of the probes are electrically connected to the probes of the probe block 102 for inspection.

但是,在随着检查对象物105的种类变更或探针块102的破损,而进行探针块102的更换作业或探针块102的位置微调整时,探针块102被朝向框架101侧安装的安装螺钉固定,并且,由于探针块102设在检查装置103的内部侧,因此,如图8所示,需要停止检查装置103的检查动作,进入到检查装置103的内部来进行作业。另外,如图9所示,检查装置103具有盖103a,在该盖103a上安装探针块时,需要停止检查装置103的检查动作,并打开该盖103a。However, when replacing the probe block 102 or finely adjusting the position of the probe block 102 as the type of the inspection object 105 is changed or the probe block 102 is damaged, the probe block 102 is attached toward the frame 101 side. and the probe block 102 is located inside the inspection device 103, therefore, as shown in FIG. In addition, as shown in FIG. 9, the inspection device 103 has a cover 103a, and when attaching the probe block to the cover 103a, it is necessary to stop the inspection operation of the inspection device 103 and open the cover 103a.

而且,对于检查装置103的操作者而言,会有以下问题存在,即:除了上述的探针块102的安装、卸下的不良作业性之外,作业时还不得不采用弯腰等造成身体不平衡的姿势,因而不能确保作业的安全性。Moreover, for the operator of the inspection device 103, there is a problem that, in addition to the poor workability of the above-mentioned attachment and detachment of the probe block 102, the operator has to bend his body during the operation, etc. Unbalanced posture, so the safety of the work cannot be ensured.

发明内容 Contents of the invention

本发明鉴于上述情况而实现,目的在于提供一种能够容易且安全地进行探针块的更换作业或微调整作业的检查单元。The present invention has been achieved in view of the above circumstances, and an object of the present invention is to provide an inspection unit that can easily and safely perform replacement work or fine adjustment work of a probe block.

为了解决上述课题并达到目的,第一发明的检查单元,具有电连接检查对象物的探针块和装卸自如地安装该探针块的检查块,其特征在于,所述检查块具有从与所述探针块的连接面的相反侧插入而固定所述探针块的安装螺钉,所述探针块在所述安装螺钉的对应部分即所述连接面侧形成有螺合该安装螺钉的内螺纹。该内螺纹也可以通过埋入螺母来实现。In order to solve the above-mentioned problems and achieve the object, the inspection unit according to the first invention includes a probe block electrically connected to the object to be inspected and an inspection block detachably attached to the probe block, wherein the inspection block has a The mounting screw for fixing the probe block is inserted into the opposite side of the connecting surface of the probe block, and the probe block is formed with an inner hole screwed to the mounting screw on the corresponding part of the mounting screw, that is, on the connecting surface side. thread. This internal thread can also be realized by embedded nuts.

另外,第二发明的检查单元根据上述的发明,其特征在于,所述探针块具有在所述连接面侧轴状地突起且其头部扩展的落下防止部,所述检查块具有引导所述落下防止部的导向槽,所述导向槽的宽度超过所述轴的宽度且小于所述头部的宽度。In addition, the inspection unit according to the second invention is according to the above-mentioned invention, wherein the probe block has a drop preventing portion that protrudes axially from the connection surface side and has a head that expands, and the inspection block has a guide. The guide groove of the drop prevention part, the width of the guide groove exceeds the width of the shaft and is smaller than the width of the head.

另外,第三发明的检查单元根据上述的发明,其特征在于,所述检查块具备推压所述落下防止部的头部并推出卸下所述探针块的卸下螺钉。In addition, the inspection unit according to the third invention is according to the above invention, wherein the inspection block includes a detachment screw that pushes the head of the drop preventing portion and pushes out the probe block.

另外,第四发明的检查单元根据上述的发明,其特征在于,所述检查块具有确定与所述探针块的安装位置的定位销,所述卸下螺钉超过所述定位销向所述探针块侧嵌入的长度,以推出所述落下防止部。In addition, the inspection unit of the fourth invention is according to the above-mentioned invention, wherein the inspection block has a positioning pin for determining the mounting position with the probe block, and the removing screw goes beyond the positioning pin to the probe block. The length of the needle block side embedded to push out the drop prevention part.

本发明的检查单元具有电连接检查对象物的探针块和装卸自如地安装该探针块的检查块,其中,所述检查块具有从与所述探针块的连接面的相反侧插入而固定所述探针块的安装螺钉,所述探针块在所述安装螺钉的对应部分即所述连接面侧形成有螺合该安装螺钉的内螺纹,因此,起到能够容易且安全地进行探针块的更换作业或微调整作业的效果。The inspection unit according to the present invention includes a probe block electrically connected to an object to be inspected, and an inspection block to which the probe block is detachably attached, wherein the inspection block has a hole that is inserted from the side opposite to the connection surface of the probe block. The mounting screw of the probe block is fixed, and the probe block is formed with an internal thread screwed on the connecting surface side of the corresponding part of the mounting screw, so that the mounting screw can be easily and safely carried out. Effects of probe block replacement work or fine-tuning work.

附图说明 Description of drawings

图1-1是本发明的实施方式的检查单元的主视图;Fig. 1-1 is the front view of the inspection unit of the embodiment of the present invention;

图1-2是图1-1所示的检查单元的A-A线剖视图;Figure 1-2 is a cross-sectional view of the A-A line of the inspection unit shown in Figure 1-1;

图2-1是表示从图1-1所示的检查单元拆下安装螺钉后的状态的主视图;Fig. 2-1 is a front view showing a state where mounting screws are removed from the inspection unit shown in Fig. 1-1;

图2-2是图2-1所示的检查单元的B-B线剖视图;Figure 2-2 is a B-B line sectional view of the inspection unit shown in Figure 2-1;

图3-1是表示对图1-1所示的检查单元推压卸下螺钉的状态的主视图;Fig. 3-1 is a front view showing a state in which the inspection unit shown in Fig. 1-1 is pushed and the screws are removed;

图3-2是图3-1所示的检查单元的C-C线剖视图;Figure 3-2 is a C-C sectional view of the inspection unit shown in Figure 3-1;

图4是表示在图1-1所示的检查单元中拆下探针单元后的状态的剖视图;Fig. 4 is a cross-sectional view showing a state in which a probe unit is removed from the inspection unit shown in Fig. 1-1;

图5是表示将图1-1所示的检查单元用于箱形检查装置时的作业状态的图;Fig. 5 is a diagram showing an operating state when the inspection unit shown in Fig. 1-1 is used in a box-shaped inspection device;

图6是表示将图1-1所示的检查单元用于带盖的检查装置时的作业状态的图;Fig. 6 is a diagram showing an operation state when the inspection unit shown in Fig. 1-1 is used in an inspection device with a cover;

图7是表示现有的检查单元设于检查装置的状态的图;Fig. 7 is a diagram showing a state in which a conventional inspection unit is installed in an inspection device;

图8是表示对使用了现有的检查单元的箱形检查装置进行作业的状态的图;Fig. 8 is a diagram showing a state of working on a box-shaped inspection device using a conventional inspection unit;

图9是表示对使用了现有的检查单元的带盖的检查装置进行作业的状态的图。FIG. 9 is a diagram showing a state of working on a covered inspection device using a conventional inspection unit.

图中:1-检查单元;2-检查块;3-探针块;4-探针;5-接触块;6-扁形电缆;7-检查对象物;10-落下防止螺钉;10a-轴;10b-头部;11-卸下螺钉;12-安装螺钉;13-定位销;14-导向槽;101-框架;103-检查装置;104-装置载物台。In the figure: 1-inspection unit; 2-inspection block; 3-probe block; 4-probe; 5-contact block; 6-flat cable; 7-inspection object; 10-drop prevention screw; 10b-head; 11-removal of screws; 12-installation screws; 13-locating pins; 14-guiding slots; 101-frame; 103-inspection device;

具体实施方式 Detailed ways

下面,对用于实施本发明的最优方式的检查单元进行说明。再有,在此对用于LCD面板的检查的检查单元进行说明。Next, an inspection unit for carrying out the best mode of the present invention will be described. In addition, an inspection unit used for inspection of LCD panels will be described here.

(实施方式)(implementation mode)

图1-1是本发明的实施方式的检查单元的主视图。图1-2是图1-1所示的检查单元的A-A线剖视图。在图1-1和图1-2中,该检查装置1在大致呈L型形状的检查块2的底部连接探针块3。该探针块3在对应于LCD面板等检查对象物7的连接端子的位置设多个探针4,该探针4的下部接触针与检查对象物7接触,上部接触针与接触块5的未图示的分型面接触,并与扁形电缆6连接。Fig. 1-1 is a front view of the inspection unit according to the embodiment of the present invention. Fig. 1-2 is an A-A sectional view of the inspection unit shown in Fig. 1-1. In FIG. 1-1 and FIG. 1-2 , the inspection device 1 is connected with a probe block 3 at the bottom of a substantially L-shaped inspection block 2 . The probe block 3 is provided with a plurality of probes 4 at the positions corresponding to the connection terminals of the inspection object 7 such as an LCD panel. The parting surface (not shown) contacts and is connected to the flat cable 6 .

探针块3对应于检查对象物7的连接端子的配置形态设置各种探针,随着检查对象物7的种类变更或探针块3的破损而进行更换。探针块3与接触块2由设于接触块2侧的定位销13定位,并由安装螺钉12固定。该安装螺钉12从探针块3的安装侧的相反侧插拔,在对应于该安装螺钉12的探针块3的接触面侧形成有安装螺钉13的内螺纹或埋入螺母。另外,在探针块3的接触面侧即对应于定位销13的位置,设有嵌合定位销13的孔。The probe block 3 is provided with various probes corresponding to the arrangement form of the connection terminals of the inspection object 7 , and is replaced when the type of the inspection object 7 is changed or the probe block 3 is damaged. The probe block 3 and the contact block 2 are positioned by the positioning pin 13 on the side of the contact block 2 and fixed by the mounting screw 12 . The mounting screws 12 are inserted and removed from the side opposite to the mounting side of the probe block 3 , and internal threads or embedded nuts of the mounting screws 13 are formed on the contact surface side of the probe block 3 corresponding to the mounting screws 12 . In addition, a hole for fitting the positioning pin 13 is provided on the contact surface side of the probe block 3 , that is, at a position corresponding to the positioning pin 13 .

在检查块2的接触面侧形成有导向槽14,由该导向槽14导向设于探针块2的接触面侧的落下防止螺钉10。落下防止螺钉10具有与探针块3螺接且近似垂直地形成在连接面的柱状的轴10a、和该轴10a的前端以锥形状扩展的头部10b。在此,导向槽14的宽度小于头部10b的直径、大于轴10a的直径。因此,在松开安装螺钉12解除检查块和探针块3的装配状态时,探针块3在图中上下部移动,但头部10b的锥部扣合于导向槽,从而防止脱落。A guide groove 14 is formed on the contact surface side of the inspection block 2 , and the drop prevention screw 10 provided on the contact surface side of the probe block 2 is guided by the guide groove 14 . The drop preventing screw 10 has a columnar shaft 10 a screwed to the probe block 3 and formed approximately vertically on the connection surface, and a head 10 b that tapers at the tip of the shaft 10 a. Here, the width of the guide groove 14 is smaller than the diameter of the head portion 10b and larger than the diameter of the shaft 10a. Therefore, when the assembly state of the inspection block and the probe block 3 is released by loosening the mounting screw 12, the probe block 3 moves up and down in the figure, but the tapered portion of the head 10b is engaged with the guide groove to prevent falling off.

卸下螺钉11设在对应于落下防止螺钉10的位置即头部10b的上部,能够推压落下防止螺钉10a的头部10b。在更换探针块3时等,可旋转该卸下螺钉11使落下防止螺钉10向下部移动。由此,能够切实且容易的分离检查块2与探针块3。The removal screw 11 is provided on the upper part of the head 10b which is a position corresponding to the fall prevention screw 10, and can press the head 10b of the fall prevention screw 10a. When the probe block 3 is replaced, etc., the removal screw 11 can be rotated to move the drop prevention screw 10 downward. Thereby, the inspection block 2 and the probe block 3 can be separated reliably and easily.

在此,参照图2-1、图2-2、图3-1、图3-2以及图4对探针块3的卸下进行说明。再有,探针块3的安装与卸下步骤相反进行即可。如图2-1、图2-2所示,首先,卸下安装螺钉12。在该状态下,探针块3和检查块2由定位销13定位,既有探针块3立即向下方移动的情况也有不移动的情况。Here, detachment of the probe block 3 will be described with reference to FIGS. 2-1 , 2-2 , 3-1 , 3-2 , and 4 . In addition, the steps of installing and removing the probe block 3 can be reversed. As shown in Figure 2-1 and Figure 2-2, first, remove the mounting screws 12. In this state, the probe block 3 and the inspection block 2 are positioned by the positioning pins 13, and the probe block 3 may immediately move downward or may not move.

之后,如图3-1、图3-2所示,旋转卸下螺钉12,由其前端推压落下防止螺钉10的头部10b并将其推到下方。由此,探针块3切实地向下方移动并与检查块2分离。但是,基于卸下螺钉12的向下方移动的长度h2设定为大于定位销13向接触面侧突出的长度h1。由此,定位销13与探针块3切实地分离,能够避免探针块3与定位销13接触地切实地卸下探针块3。Afterwards, as shown in Fig. 3-1 and Fig. 3-2, the screw 12 is rotated and removed, and the head 10b of the anti-drop screw 10 is pushed from its front end and pushed down. As a result, the probe block 3 is surely moved downward and separated from the inspection block 2 . However, the length h2 of the downward movement by removing the screw 12 is set to be larger than the length h1 of the protrusion of the positioning pin 13 to the contact surface side. Thereby, the positioning pin 13 and the probe block 3 are separated reliably, and the probe block 3 can be detached reliably without contacting the probe block 3 and the positioning pin 13.

之后,如图4所示,通过使落下防止螺钉10沿导向槽14滑动,如上所述,能够避免探针块3与定位销13接触而卸下探针块3,并且由于头部10b在导向槽14的上部滑动,所以能够防止探针块3脱落。Afterwards, as shown in FIG. 4 , by making the fall prevention screw 10 slide along the guide groove 14, as described above, the probe block 3 can be prevented from contacting the positioning pin 13 to remove the probe block 3, and since the head 10b is guiding Since the upper part of the groove 14 slides, it is possible to prevent the probe block 3 from coming off.

其结果,在如图5所示的箱形检查装置103中,朝向检查装置103的内侧设置探针块3,但该情况下也能够从检查装置103的外侧操作安装螺钉12,因此,能够容易地进行探针块3的卸下、安装、微调整等。进而,如上所述,通过检查块2的导向槽14和落下防止螺钉10能够切实地防止探针块3的脱落,并且通过卸下螺钉11能够防止检查块2和定位销13的接触,从而能够容易地进行探针块3的卸下、安装。另外,由于此时作业者不必进入检查装置103的内部,所以能够确保作业者的安全性。尤其,在检查装置103动作的状态下也能够进行安装、卸下及微调整。As a result, in the box-shaped inspection device 103 shown in FIG. The detachment, installation, and fine adjustment of the probe block 3 are easily performed. Furthermore, as described above, the probe block 3 can be reliably prevented from falling off by the guide groove 14 of the inspection block 2 and the drop prevention screw 10, and the contact between the inspection block 2 and the positioning pin 13 can be prevented by removing the screw 11, thereby enabling Detachment and attachment of the probe block 3 are easily performed. In addition, since the operator does not need to enter the inspection device 103 at this time, the safety of the operator can be ensured. In particular, attachment, detachment, and fine adjustment can be performed while the inspection device 103 is in operation.

另外,如图6所示,对于具有盖103a的检查装置103,在盖103a的内侧设置探针块3的情况下,也能够获得与图5所示的检查装置103同样的作用效果,尤其能够在不打开盖103a的情况下进行探针块3的卸下、安装及微调整,因此能够提高作业性及安全性。In addition, as shown in FIG. 6, for an inspection device 103 having a cover 103a, when the probe block 3 is provided inside the cover 103a, the same effect as that of the inspection device 103 shown in FIG. Since detachment, attachment, and fine adjustment of the probe block 3 are performed without opening the cover 103a, workability and safety can be improved.

再有,上述的探针块3优选由特愿2003-430400号所记载的导电性接触子支持器形成,该导电性接触子支持器通过将具有比被接触体的线膨胀系数高的线膨胀系数的高热膨胀支持框体、和相对该高热膨胀支持框体配置在接触面的法线方向且具有比被接触体的线膨胀系数低的线膨胀系数的低热膨胀支持框体层叠而形成。若使用该导电性接触子支持器,则由于强度比树脂等高,所以,即使在探针块3和检查块2的接触面侧形成内螺纹或埋入螺母等,也能够保持充分的安装力。In addition, the above-mentioned probe block 3 is preferably formed by the conductive contact holder described in Japanese Patent Application No. 2003-430400. A high thermal expansion support frame having a high coefficient of thermal expansion and a low thermal expansion support frame disposed in the normal direction of the contact surface with respect to the high thermal expansion support frame and having a linear expansion coefficient lower than that of the object to be contacted are laminated and formed. If this conductive contact holder is used, its strength is higher than that of resin, so even if internal threads or embedded nuts are formed on the contact surface side of the probe block 3 and the inspection block 2, sufficient mounting force can be maintained. .

另外,上述落下防止螺钉10不作成轴状,只要是能够在导向槽14内导向,则形状可以任意。此外,依靠落下防止螺钉10的头部10b的直径与导向槽14的宽度的关系来防止探针块3的落下,但并不限于此,在任意位置阻止落下防止螺钉10落下的机构即可。另外,卸下螺钉11是螺钉机构,但并不限于此,也可为卸下螺钉11只进行推压,推压后依靠弹簧力返回到原来位置的机构。此外,卸下螺钉11也可以不始终设置于检查块2上,而可以仅在卸下探针块时安装。In addition, the above-mentioned drop preventing screw 10 does not have a shaft shape, and any shape may be used as long as it can be guided in the guide groove 14 . The probe block 3 is prevented from falling depending on the diameter of the head portion 10b of the drop prevention screw 10 and the width of the guide groove 14. However, it is not limited thereto. A mechanism for preventing the drop prevention screw 10 from falling at any position is sufficient. In addition, the removal of the screw 11 is a screw mechanism, but it is not limited thereto. It may also be a mechanism that removes the screw 11 and pushes it, and then returns to the original position by spring force after the push. In addition, the detachment screw 11 may not always be installed on the inspection block 2, but may be attached only when the probe block is detached.

如上所述,本发明涉及一种检查单元,其具有电连接LCD面板等检查对象物的探针块和固定于装卸自如地安装该探针块的检查装置主体侧的检查块,尤其可用于能够容易且安全地进行探针块的更换作业或微调整作业的检查单元。As described above, the present invention relates to an inspection unit including a probe block electrically connected to an inspection object such as an LCD panel and an inspection block fixed to the main body of an inspection device on which the probe block is detachably attached, and is particularly useful for An inspection unit for easy and safe replacement of probe blocks and fine adjustments.

Claims (3)

1. an inspection unit has the probe block that is electrically connected the inspection object and loads and unloads the inspection piece that this probe block is installed freely, it is characterized in that,
Described inspection piece has from the opposition side with the joint face of described probe block and inserts and the mounting screw of fixing described probe block,
Described probe block is that described joint face side is formed with the internal thread that screws togather this mounting screw at the counterpart of described mounting screw,
Described probe block have described joint face side with the form projection of the axle of column and its header extension fall the portion of preventing,
Described inspection piece has the described gathering sill that falls the portion of preventing of guiding,
The width of described gathering sill surpasses the width of described axle and less than the width of described head.
2. inspection unit according to claim 1 is characterized in that,
Described inspection piece possesses the described head of the portion of preventing and the screw that unloads that described probe block is unloaded in release of falling of pushing.
3. inspection unit according to claim 2 is characterized in that,
Described inspection piece has the register pin of the installation site of definite and described probe block,
The described screw that unloads surpasses the length that described register pin embeds to described probe block side, to release the described portion of preventing that falls.
CNB2005800112631A 2004-04-14 2005-04-14 Inspection unit Expired - Fee Related CN100559199C (en)

Applications Claiming Priority (2)

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JP119015/2004 2004-04-14
JP2004119015A JP2005300409A (en) 2004-04-14 2004-04-14 Inspection unit

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CN100559199C true CN100559199C (en) 2009-11-11

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JP6184301B2 (en) * 2013-11-14 2017-08-23 株式会社日本マイクロニクス Inspection device
KR101572588B1 (en) * 2014-07-08 2015-11-30 주식회사 코디에스 Device and method for testing display panel
JP2017096949A (en) * 2015-11-24 2017-06-01 フォトン・ダイナミクス・インコーポレーテッド System and method for electrical inspection of flat panel display device using cell contact probing pads
US10302598B2 (en) 2016-10-24 2019-05-28 General Electric Company Corrosion and crack detection for fastener nuts
CN107909951A (en) * 2017-11-14 2018-04-13 合肥鑫晟光电科技有限公司 A kind of panel tester
CN109343279A (en) * 2018-10-23 2019-02-15 惠科股份有限公司 Power-up bearing device and alignment ultraviolet liquid crystal irradiation equipment
CN112462112B (en) * 2020-11-30 2022-04-08 强一半导体(苏州)有限公司 Probe card wedge amplitude modulation method
CN112462111B (en) * 2020-11-30 2022-04-12 强一半导体(苏州)有限公司 Wedge block amplitude modulation probe card amplitude modulation structure
CN112526179B (en) * 2020-11-30 2022-01-21 强一半导体(苏州)有限公司 Wedge block amplitude modulation probe card and main body thereof
CN112462110B (en) * 2020-11-30 2022-04-12 强一半导体(苏州)有限公司 Wedge block amplitude modulation probe card amplitude modulation piece and butt joint structure thereof
TWI829074B (en) * 2021-06-29 2024-01-11 美科樂電子股份有限公司 Probe holder structure
TWI771085B (en) * 2021-06-29 2022-07-11 美科樂電子股份有限公司 Probe base structure

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JP2000314746A (en) * 1999-04-30 2000-11-14 Micronics Japan Co Ltd Probe device
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TW200600775A (en) 2006-01-01
CN1942773A (en) 2007-04-04

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