CN100559199C - Inspection unit - Google Patents
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- CN100559199C CN100559199C CNB2005800112631A CN200580011263A CN100559199C CN 100559199 C CN100559199 C CN 100559199C CN B2005800112631 A CNB2005800112631 A CN B2005800112631A CN 200580011263 A CN200580011263 A CN 200580011263A CN 100559199 C CN100559199 C CN 100559199C
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- 238000007689 inspection Methods 0.000 title claims abstract description 98
- 239000000523 sample Substances 0.000 claims abstract description 96
- 238000009434 installation Methods 0.000 claims description 3
- 230000002265 prevention Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
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- Measuring Leads Or Probes (AREA)
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Abstract
一种检查单元(1),具有电连接检查对象物(7)的探针块(3)和装卸自如地安装探针块(3)的检查块(2),其中,检查块(2)具有从与探针块(3)的连接面的相反侧插入而固定探针块(3)的安装螺钉(12),探针块(3)在安装螺钉(12)的对应部分即连接面侧形成螺合安装螺钉(12)的内螺纹或埋入螺母。另外,在探针块(3)上设置落下防止螺钉(10),旋转卸下螺钉(11)以推出落下防止螺钉(10),使探针块(3)与检查块(2)切实地分离,由此,能够容易且安全地进行探针块的更换作业或微调整作业。
An inspection unit (1) comprising a probe block (3) electrically connected to an inspection object (7) and an inspection block (2) detachably mounted to the probe block (3), wherein the inspection block (2) has The mounting screw (12) that fixes the probe block (3) is inserted from the opposite side to the connection surface of the probe block (3), and the probe block (3) is formed on the connection surface side that corresponds to the mounting screw (12). Screw the internal thread or embedded nut of the mounting screw (12). In addition, set the anti-drop screw (10) on the probe block (3), and rotate and remove the screw (11) to push out the anti-drop screw (10), so that the probe block (3) and the inspection block (2) can be separated reliably Therefore, the replacement work and the fine adjustment work of the probe block can be performed easily and safely.
Description
技术领域 technical field
本发明涉及一种检查单元,其具有电连接LCD面板等检查对象物的探针块和固定于装卸自如地安装该探针块的检查装置主体侧的检查块。The present invention relates to an inspection unit including a probe block electrically connected to an inspection object such as an LCD panel, and an inspection block fixed to a main body of an inspection device to which the probe block is detachably attached.
背景技术 Background technique
以往,在检查LCD面板等检查对象物时,经由导电性接触子(探针)与LCD面板的连接端子电接触,进而经由与各探针的另一端电连接的接触块与扁形电缆等连接,从连接于该扁形电缆的检查装置供给各种测试信号等,进行LCD面板的检查。Conventionally, when inspecting an object to be inspected such as an LCD panel, the connection terminals of the LCD panel are electrically contacted via conductive contacts (probes), and then connected to a flat cable or the like via a contact block electrically connected to the other end of each probe. Various test signals and the like are supplied from an inspection device connected to the flat cable to inspect the LCD panel.
该探针设于探针块上,且该探针块以适合于检查对象物的连接端子的配置状态的方式配置探针,随着检查对象物的种类变更或探针块的破损而更换。The probes are provided on a probe block, and the probe block is arranged so that the probes are suitable for the arrangement state of the connection terminals of the inspection object, and is replaced when the type of the inspection object is changed or the probe block is damaged.
专利文献1:特开2001-141747号公报Patent Document 1: JP-A-2001-141747
可是,如图7所示,探针块102经由检查块安装于框架101上,该框架101嵌入并固定于检查装置103的框体或盖的一部分。而且,探针块102设于检查装置103的内侧,在设于检查装置103内部的装置载物台104上配置检查对象物105,通过使该装置载物台104上下移动,使检查对象物105的接触端子与探针块102的探针电连接而实行检查。However, as shown in FIG. 7 , the
但是,在随着检查对象物105的种类变更或探针块102的破损,而进行探针块102的更换作业或探针块102的位置微调整时,探针块102被朝向框架101侧安装的安装螺钉固定,并且,由于探针块102设在检查装置103的内部侧,因此,如图8所示,需要停止检查装置103的检查动作,进入到检查装置103的内部来进行作业。另外,如图9所示,检查装置103具有盖103a,在该盖103a上安装探针块时,需要停止检查装置103的检查动作,并打开该盖103a。However, when replacing the
而且,对于检查装置103的操作者而言,会有以下问题存在,即:除了上述的探针块102的安装、卸下的不良作业性之外,作业时还不得不采用弯腰等造成身体不平衡的姿势,因而不能确保作业的安全性。Moreover, for the operator of the
发明内容 Contents of the invention
本发明鉴于上述情况而实现,目的在于提供一种能够容易且安全地进行探针块的更换作业或微调整作业的检查单元。The present invention has been achieved in view of the above circumstances, and an object of the present invention is to provide an inspection unit that can easily and safely perform replacement work or fine adjustment work of a probe block.
为了解决上述课题并达到目的,第一发明的检查单元,具有电连接检查对象物的探针块和装卸自如地安装该探针块的检查块,其特征在于,所述检查块具有从与所述探针块的连接面的相反侧插入而固定所述探针块的安装螺钉,所述探针块在所述安装螺钉的对应部分即所述连接面侧形成有螺合该安装螺钉的内螺纹。该内螺纹也可以通过埋入螺母来实现。In order to solve the above-mentioned problems and achieve the object, the inspection unit according to the first invention includes a probe block electrically connected to the object to be inspected and an inspection block detachably attached to the probe block, wherein the inspection block has a The mounting screw for fixing the probe block is inserted into the opposite side of the connecting surface of the probe block, and the probe block is formed with an inner hole screwed to the mounting screw on the corresponding part of the mounting screw, that is, on the connecting surface side. thread. This internal thread can also be realized by embedded nuts.
另外,第二发明的检查单元根据上述的发明,其特征在于,所述探针块具有在所述连接面侧轴状地突起且其头部扩展的落下防止部,所述检查块具有引导所述落下防止部的导向槽,所述导向槽的宽度超过所述轴的宽度且小于所述头部的宽度。In addition, the inspection unit according to the second invention is according to the above-mentioned invention, wherein the probe block has a drop preventing portion that protrudes axially from the connection surface side and has a head that expands, and the inspection block has a guide. The guide groove of the drop prevention part, the width of the guide groove exceeds the width of the shaft and is smaller than the width of the head.
另外,第三发明的检查单元根据上述的发明,其特征在于,所述检查块具备推压所述落下防止部的头部并推出卸下所述探针块的卸下螺钉。In addition, the inspection unit according to the third invention is according to the above invention, wherein the inspection block includes a detachment screw that pushes the head of the drop preventing portion and pushes out the probe block.
另外,第四发明的检查单元根据上述的发明,其特征在于,所述检查块具有确定与所述探针块的安装位置的定位销,所述卸下螺钉超过所述定位销向所述探针块侧嵌入的长度,以推出所述落下防止部。In addition, the inspection unit of the fourth invention is according to the above-mentioned invention, wherein the inspection block has a positioning pin for determining the mounting position with the probe block, and the removing screw goes beyond the positioning pin to the probe block. The length of the needle block side embedded to push out the drop prevention part.
本发明的检查单元具有电连接检查对象物的探针块和装卸自如地安装该探针块的检查块,其中,所述检查块具有从与所述探针块的连接面的相反侧插入而固定所述探针块的安装螺钉,所述探针块在所述安装螺钉的对应部分即所述连接面侧形成有螺合该安装螺钉的内螺纹,因此,起到能够容易且安全地进行探针块的更换作业或微调整作业的效果。The inspection unit according to the present invention includes a probe block electrically connected to an object to be inspected, and an inspection block to which the probe block is detachably attached, wherein the inspection block has a hole that is inserted from the side opposite to the connection surface of the probe block. The mounting screw of the probe block is fixed, and the probe block is formed with an internal thread screwed on the connecting surface side of the corresponding part of the mounting screw, so that the mounting screw can be easily and safely carried out. Effects of probe block replacement work or fine-tuning work.
附图说明 Description of drawings
图1-1是本发明的实施方式的检查单元的主视图;Fig. 1-1 is the front view of the inspection unit of the embodiment of the present invention;
图1-2是图1-1所示的检查单元的A-A线剖视图;Figure 1-2 is a cross-sectional view of the A-A line of the inspection unit shown in Figure 1-1;
图2-1是表示从图1-1所示的检查单元拆下安装螺钉后的状态的主视图;Fig. 2-1 is a front view showing a state where mounting screws are removed from the inspection unit shown in Fig. 1-1;
图2-2是图2-1所示的检查单元的B-B线剖视图;Figure 2-2 is a B-B line sectional view of the inspection unit shown in Figure 2-1;
图3-1是表示对图1-1所示的检查单元推压卸下螺钉的状态的主视图;Fig. 3-1 is a front view showing a state in which the inspection unit shown in Fig. 1-1 is pushed and the screws are removed;
图3-2是图3-1所示的检查单元的C-C线剖视图;Figure 3-2 is a C-C sectional view of the inspection unit shown in Figure 3-1;
图4是表示在图1-1所示的检查单元中拆下探针单元后的状态的剖视图;Fig. 4 is a cross-sectional view showing a state in which a probe unit is removed from the inspection unit shown in Fig. 1-1;
图5是表示将图1-1所示的检查单元用于箱形检查装置时的作业状态的图;Fig. 5 is a diagram showing an operating state when the inspection unit shown in Fig. 1-1 is used in a box-shaped inspection device;
图6是表示将图1-1所示的检查单元用于带盖的检查装置时的作业状态的图;Fig. 6 is a diagram showing an operation state when the inspection unit shown in Fig. 1-1 is used in an inspection device with a cover;
图7是表示现有的检查单元设于检查装置的状态的图;Fig. 7 is a diagram showing a state in which a conventional inspection unit is installed in an inspection device;
图8是表示对使用了现有的检查单元的箱形检查装置进行作业的状态的图;Fig. 8 is a diagram showing a state of working on a box-shaped inspection device using a conventional inspection unit;
图9是表示对使用了现有的检查单元的带盖的检查装置进行作业的状态的图。FIG. 9 is a diagram showing a state of working on a covered inspection device using a conventional inspection unit.
图中:1-检查单元;2-检查块;3-探针块;4-探针;5-接触块;6-扁形电缆;7-检查对象物;10-落下防止螺钉;10a-轴;10b-头部;11-卸下螺钉;12-安装螺钉;13-定位销;14-导向槽;101-框架;103-检查装置;104-装置载物台。In the figure: 1-inspection unit; 2-inspection block; 3-probe block; 4-probe; 5-contact block; 6-flat cable; 7-inspection object; 10-drop prevention screw; 10b-head; 11-removal of screws; 12-installation screws; 13-locating pins; 14-guiding slots; 101-frame; 103-inspection device;
具体实施方式 Detailed ways
下面,对用于实施本发明的最优方式的检查单元进行说明。再有,在此对用于LCD面板的检查的检查单元进行说明。Next, an inspection unit for carrying out the best mode of the present invention will be described. In addition, an inspection unit used for inspection of LCD panels will be described here.
(实施方式)(implementation mode)
图1-1是本发明的实施方式的检查单元的主视图。图1-2是图1-1所示的检查单元的A-A线剖视图。在图1-1和图1-2中,该检查装置1在大致呈L型形状的检查块2的底部连接探针块3。该探针块3在对应于LCD面板等检查对象物7的连接端子的位置设多个探针4,该探针4的下部接触针与检查对象物7接触,上部接触针与接触块5的未图示的分型面接触,并与扁形电缆6连接。Fig. 1-1 is a front view of the inspection unit according to the embodiment of the present invention. Fig. 1-2 is an A-A sectional view of the inspection unit shown in Fig. 1-1. In FIG. 1-1 and FIG. 1-2 , the inspection device 1 is connected with a
探针块3对应于检查对象物7的连接端子的配置形态设置各种探针,随着检查对象物7的种类变更或探针块3的破损而进行更换。探针块3与接触块2由设于接触块2侧的定位销13定位,并由安装螺钉12固定。该安装螺钉12从探针块3的安装侧的相反侧插拔,在对应于该安装螺钉12的探针块3的接触面侧形成有安装螺钉13的内螺纹或埋入螺母。另外,在探针块3的接触面侧即对应于定位销13的位置,设有嵌合定位销13的孔。The
在检查块2的接触面侧形成有导向槽14,由该导向槽14导向设于探针块2的接触面侧的落下防止螺钉10。落下防止螺钉10具有与探针块3螺接且近似垂直地形成在连接面的柱状的轴10a、和该轴10a的前端以锥形状扩展的头部10b。在此,导向槽14的宽度小于头部10b的直径、大于轴10a的直径。因此,在松开安装螺钉12解除检查块和探针块3的装配状态时,探针块3在图中上下部移动,但头部10b的锥部扣合于导向槽,从而防止脱落。A
卸下螺钉11设在对应于落下防止螺钉10的位置即头部10b的上部,能够推压落下防止螺钉10a的头部10b。在更换探针块3时等,可旋转该卸下螺钉11使落下防止螺钉10向下部移动。由此,能够切实且容易的分离检查块2与探针块3。The
在此,参照图2-1、图2-2、图3-1、图3-2以及图4对探针块3的卸下进行说明。再有,探针块3的安装与卸下步骤相反进行即可。如图2-1、图2-2所示,首先,卸下安装螺钉12。在该状态下,探针块3和检查块2由定位销13定位,既有探针块3立即向下方移动的情况也有不移动的情况。Here, detachment of the
之后,如图3-1、图3-2所示,旋转卸下螺钉12,由其前端推压落下防止螺钉10的头部10b并将其推到下方。由此,探针块3切实地向下方移动并与检查块2分离。但是,基于卸下螺钉12的向下方移动的长度h2设定为大于定位销13向接触面侧突出的长度h1。由此,定位销13与探针块3切实地分离,能够避免探针块3与定位销13接触地切实地卸下探针块3。Afterwards, as shown in Fig. 3-1 and Fig. 3-2, the
之后,如图4所示,通过使落下防止螺钉10沿导向槽14滑动,如上所述,能够避免探针块3与定位销13接触而卸下探针块3,并且由于头部10b在导向槽14的上部滑动,所以能够防止探针块3脱落。Afterwards, as shown in FIG. 4 , by making the
其结果,在如图5所示的箱形检查装置103中,朝向检查装置103的内侧设置探针块3,但该情况下也能够从检查装置103的外侧操作安装螺钉12,因此,能够容易地进行探针块3的卸下、安装、微调整等。进而,如上所述,通过检查块2的导向槽14和落下防止螺钉10能够切实地防止探针块3的脱落,并且通过卸下螺钉11能够防止检查块2和定位销13的接触,从而能够容易地进行探针块3的卸下、安装。另外,由于此时作业者不必进入检查装置103的内部,所以能够确保作业者的安全性。尤其,在检查装置103动作的状态下也能够进行安装、卸下及微调整。As a result, in the box-shaped
另外,如图6所示,对于具有盖103a的检查装置103,在盖103a的内侧设置探针块3的情况下,也能够获得与图5所示的检查装置103同样的作用效果,尤其能够在不打开盖103a的情况下进行探针块3的卸下、安装及微调整,因此能够提高作业性及安全性。In addition, as shown in FIG. 6, for an
再有,上述的探针块3优选由特愿2003-430400号所记载的导电性接触子支持器形成,该导电性接触子支持器通过将具有比被接触体的线膨胀系数高的线膨胀系数的高热膨胀支持框体、和相对该高热膨胀支持框体配置在接触面的法线方向且具有比被接触体的线膨胀系数低的线膨胀系数的低热膨胀支持框体层叠而形成。若使用该导电性接触子支持器,则由于强度比树脂等高,所以,即使在探针块3和检查块2的接触面侧形成内螺纹或埋入螺母等,也能够保持充分的安装力。In addition, the above-mentioned
另外,上述落下防止螺钉10不作成轴状,只要是能够在导向槽14内导向,则形状可以任意。此外,依靠落下防止螺钉10的头部10b的直径与导向槽14的宽度的关系来防止探针块3的落下,但并不限于此,在任意位置阻止落下防止螺钉10落下的机构即可。另外,卸下螺钉11是螺钉机构,但并不限于此,也可为卸下螺钉11只进行推压,推压后依靠弹簧力返回到原来位置的机构。此外,卸下螺钉11也可以不始终设置于检查块2上,而可以仅在卸下探针块时安装。In addition, the above-mentioned
如上所述,本发明涉及一种检查单元,其具有电连接LCD面板等检查对象物的探针块和固定于装卸自如地安装该探针块的检查装置主体侧的检查块,尤其可用于能够容易且安全地进行探针块的更换作业或微调整作业的检查单元。As described above, the present invention relates to an inspection unit including a probe block electrically connected to an inspection object such as an LCD panel and an inspection block fixed to the main body of an inspection device on which the probe block is detachably attached, and is particularly useful for An inspection unit for easy and safe replacement of probe blocks and fine adjustments.
Claims (3)
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Application Number | Priority Date | Filing Date | Title |
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JP119015/2004 | 2004-04-14 | ||
JP2004119015A JP2005300409A (en) | 2004-04-14 | 2004-04-14 | Inspection unit |
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CN1942773A CN1942773A (en) | 2007-04-04 |
CN100559199C true CN100559199C (en) | 2009-11-11 |
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CNB2005800112631A Expired - Fee Related CN100559199C (en) | 2004-04-14 | 2005-04-14 | Inspection unit |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2005300409A (en) |
CN (1) | CN100559199C (en) |
TW (1) | TWI330712B (en) |
WO (1) | WO2005101039A1 (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6184301B2 (en) * | 2013-11-14 | 2017-08-23 | 株式会社日本マイクロニクス | Inspection device |
KR101572588B1 (en) * | 2014-07-08 | 2015-11-30 | 주식회사 코디에스 | Device and method for testing display panel |
JP2017096949A (en) * | 2015-11-24 | 2017-06-01 | フォトン・ダイナミクス・インコーポレーテッド | System and method for electrical inspection of flat panel display device using cell contact probing pads |
US10302598B2 (en) | 2016-10-24 | 2019-05-28 | General Electric Company | Corrosion and crack detection for fastener nuts |
CN107909951A (en) * | 2017-11-14 | 2018-04-13 | 合肥鑫晟光电科技有限公司 | A kind of panel tester |
CN109343279A (en) * | 2018-10-23 | 2019-02-15 | 惠科股份有限公司 | Power-up bearing device and alignment ultraviolet liquid crystal irradiation equipment |
CN112462112B (en) * | 2020-11-30 | 2022-04-08 | 强一半导体(苏州)有限公司 | Probe card wedge amplitude modulation method |
CN112462111B (en) * | 2020-11-30 | 2022-04-12 | 强一半导体(苏州)有限公司 | Wedge block amplitude modulation probe card amplitude modulation structure |
CN112526179B (en) * | 2020-11-30 | 2022-01-21 | 强一半导体(苏州)有限公司 | Wedge block amplitude modulation probe card and main body thereof |
CN112462110B (en) * | 2020-11-30 | 2022-04-12 | 强一半导体(苏州)有限公司 | Wedge block amplitude modulation probe card amplitude modulation piece and butt joint structure thereof |
TWI829074B (en) * | 2021-06-29 | 2024-01-11 | 美科樂電子股份有限公司 | Probe holder structure |
TWI771085B (en) * | 2021-06-29 | 2022-07-11 | 美科樂電子股份有限公司 | Probe base structure |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0441342Y2 (en) * | 1987-07-30 | 1992-09-29 | ||
JPH09281459A (en) * | 1996-04-18 | 1997-10-31 | Tokyo Electron Ltd | Probe card for liquid crystal display body |
JP2000314746A (en) * | 1999-04-30 | 2000-11-14 | Micronics Japan Co Ltd | Probe device |
JP4171148B2 (en) * | 1999-11-12 | 2008-10-22 | 株式会社日本マイクロニクス | Probe device |
-
2004
- 2004-04-14 JP JP2004119015A patent/JP2005300409A/en active Pending
-
2005
- 2005-04-14 TW TW94111794A patent/TWI330712B/en not_active IP Right Cessation
- 2005-04-14 CN CNB2005800112631A patent/CN100559199C/en not_active Expired - Fee Related
- 2005-04-14 WO PCT/JP2005/007237 patent/WO2005101039A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2005101039A1 (en) | 2005-10-27 |
JP2005300409A (en) | 2005-10-27 |
TWI330712B (en) | 2010-09-21 |
TW200600775A (en) | 2006-01-01 |
CN1942773A (en) | 2007-04-04 |
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