CN100526025C - Method for improving teaching efficiency of the mechanical arm - Google Patents
Method for improving teaching efficiency of the mechanical arm Download PDFInfo
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- CN100526025C CN100526025C CNB2007100466800A CN200710046680A CN100526025C CN 100526025 C CN100526025 C CN 100526025C CN B2007100466800 A CNB2007100466800 A CN B2007100466800A CN 200710046680 A CN200710046680 A CN 200710046680A CN 100526025 C CN100526025 C CN 100526025C
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Abstract
The present invention provides a method for improving the teaching efficiency of a manipulator, which can effectively solve the problem that the installation error of the storage has an influence on the transmission of a manipulator and can improve the teaching efficiency. The method includes the following three steps: 1. a user-defined coordinate system is defined and the physical coordinate system of the teaching storage of the manipulator is stored in the data structure of the user-defined coordinate system. 2. The loading or unloading positions of the manipulator in the highest and lowest grooves in the storage in the user-defined coordinate system are respectively taught. 3. The relative positions of the loading or unloading action of the manipulator in each groove of a storage intermediate groove are computed by the loading or unloading position in the highest or lowest groove. The main purpose of the present invention is to help the manipulator to complete the loading or unloading operation of a silicon wafer with a high efficiency during an exposure process.
Description
Technical field
The present invention relates to the manipulator application, relate in particular to a kind of method that improves the manipulator teaching efficiency.
Background technology
At present, the automations of adopting manipulator to realize and manufacturing in a lot of manufacturing industry more.Semiconductor manufacturing industry is no exception, and a lot of manufacturing links wherein all need manipulator to finish the transmission work of silicon chip automatically.In the exposure process of silicon chip, just need manipulator from different valuts, to get sheet and transmission work is finished in film releasing.These different valuts comprise useless valut, the storehouse that takes up, feed storehouse.
All comprise the groove that several can deposit sheet in the different valuts, the mounting means of valut has two kinds of divergent shape and non-divergent shapes.The teach mode of valut also is divided into divergent shape and non-divergent shape according to the mounting means of valut.Traditional teaching method all is to carry out primary calibration behind installation manipulator, determines a master coordinate system.The principal coordinate position remains unchanged in the whole teaching process.Installing at divergent shape under the situation of valut, when error appears in the installation site of valut, need be axle horizontal rotation valut with the valut center in the teaching process, with its installation site of reorientation; Install at non-divergent shape under the situation of valut, when error appears in the installation site of valut, tradition teaching process can't directly solve level to, vertical and rotation error longitudinally, only way has only the installation site of adjusting valut or manipulator, because what adjust is loaded down with trivial details that the relative position of a plurality of valuts and manipulator thereby make is measured and installation steps are unusual.
In sum, traditional teaching method all can't solve the influence of valut alignment error to the manipulator transmission simply fast.
Summary of the invention
The object of the present invention is to provide a kind of method that improves the manipulator teaching efficiency,, just can simply and fast solve of the influence of valut alignment error the manipulator transmission by the teaching process.
In order to achieve the above object, the method of raising manipulator teaching efficiency of the present invention, described manipulator needs to get sheet and film releasing operation in valut, described valut includes the groove of several sheets deposited that number in order, it may further comprise the steps: step 1: define self-defined coordinate system, the physical coordinates system of the valut of manipulator teaching is deposited in the data structure of self-defined coordinate system; Step 2: respectively the teaching manipulator under self-defined coordinate system, be arranged in the minimum groove of valut and the highest groove get sheet or film releasing position; Step 3: by minimum groove or the highest groove get sheet or the film releasing position can calculate the relevant position of getting sheet or film releasing action of manipulator at each groove of valut medial launder.
In step 1, three positions are to determine the data structure of self-defined reference frame in the physical coordinates system of described self-defined coordinate system need manipulator teaching valut.Three positions of described manipulator teaching are respectively the valut vessel port, minimum groove position, the highest groove position.In step 3, described manipulator is described by three location points at the relevant position of getting sheet or film releasing action of each groove of valut medial launder.
In step 3, described manipulator calculates by following formula at the relevant position of getting sheet or film releasing action of each groove of valut medial launder: P1={ (i-1) Δ x+x
1, (i-1) Δ y+d+y
1, (i-1) Δ z+z
1, (i-1) Δ rx+rx
1, (i-1) Δ ry+ry
1, (i-1) Δ rz+rz
1P2={ (i-1) Δ x+x
1, (i-1) Δ y+y
1, (i-1) Δ z+z
1, (i-1) Δ rx+rx
1, (i-1) Δ ry+ry
1, (i-1) Δ rz+rz
1P3={ (i-1) Δ x+x
1, (i-1) Δ y-d+y
1, (i-1) Δ z+z
1, (i-1) Δ rx+rx
1, (i-1) Δ ry+ry
1, (i-1) Δ rz+rz
1Wherein i be the numbering of groove in the valut, P1, P2, P3 are position 1, position 2, the position 3 of manipulator when getting sheet or film releasing action in the groove i of valut, d is the distance that position 2 relative positions 1 or position 3 relative positions 2 change on the y direction, x
1, y
1, z
1, rx
1, ry
1, rz
1Be minimum groove six-freedom degree teaching position in the valut, Δ x, Δ y, Δ z, Δ rx, Δ ry, Δ rz are the relative variable on six-freedom degree respectively between groove and the groove in the valut.In the described valut between groove and the groove respectively the relative variable on six-freedom degree can try to achieve by following formula:
Δx＝(x
n-x
1)/n-1，Δy＝(y
n-y
1)/n-1，Δz＝(z
n-z
1)/n-1
Δrx＝(rx
n-rx
i)/n-1，Δry＝(ry
n-ry
1)/n-1，Δrz＝(rz
n-rz
1)/n-1
X wherein
n, y
n, z
n, rx
n, ry
n, rz
nBe the highest groove six-freedom degree teaching positional value in the valut, n is the total groove number in the valut.
Described manipulator is six axis robot, is furnished with vacuum plant, relies on vacuum to carry out pulldown.
The method of raising manipulator teaching efficiency of the present invention, the self-defined coordinate system of manipulator teaching definition and the installation site basically identical of valut, manipulator is that the reference frame location can quick and precisely navigate to the relevant position that the valut specified slot picks and places sheet with self-defined coordinate like this, can effectively improve the teaching efficiency of manipulator, reduce requirement the valut installation accuracy; Further, because of described manipulator is six axis robot, manipulator can be at x, y, and z, rx, ry, the freely-movable of rz direction, but flexible motion is got sheet or film releasing position to what the six degree of freedom variable was determined, at rx, and ry, the alignment error of the big stroke compensation of rz direction valut.
Description of drawings
By following examples and in conjunction with its accompanying drawing, can further understand the concrete feature and advantage of its invention.Wherein, accompanying drawing is:
Fig. 1 is a manipulator valut teaching schematic diagram.
Fig. 2 is the highest groove of manipulator and minimum groove teaching schematic diagram.
Fig. 3 is that manipulator is got sheet or film releasing action schematic diagram.
Fig. 4 is a manipulator teaching schematic flow sheet.
The specific embodiment
Below will the method for raising manipulator teaching efficiency of the present invention be described in further detail.
The method of raising manipulator teaching efficiency of the present invention, described manipulator need to get sheet and film releasing operation in valut, suppose that having comprised 25 in the described valut deposits film trap.Described manipulator is six axis robot, and this six axis robot is furnished with vacuum plant, relies on the vacuum pulldown.
Define self-defined coordinate system, have side-play amount between the master coordinate system in self-defined coordinate system and the traditional teaching.The physical coordinates system of the valut of manipulator teaching is deposited in the data structure of self-defined coordinate system.The physical coordinates system of the valut of manipulator teaching needs three positions of manipulator teaching to determine the data structure of self-defined reference coordinate.These three teaching positions, one is the initial point that is used for determining self-defined coordinate system, and one is to be used for determining self-defined coordinate system forward X-axis, and one is to be used for determining self-defined coordinate system forward Y-axis.
7 is the valut vessel port as shown in Figure 1, valut vessel port 7 is set is self-defined reference coordinate initial point, manipulator arm level is moved into the minimum film trap of valut, and make before the mechanical arm dististyle fork just contact nethermost silicon chip to arrive minimum groove position 8, can determine self-defined reference coordinate X-axis like this, the 3rd point needs the manipulator arm is moved into the highest film trap of valut, makes manipulator last slice fork just contact uppermost silicon chip and arrives the highest groove position 9, can determine self-defined reference coordinate Y-axis like this.The Z axle is perpendicular to the plane at X-axis and Y-axis place.So promptly determined the self-defined coordinate system of valut.
Then manipulator respectively teaching under self-defined coordinate system, be arranged in the minimum groove of valut and the highest groove get sheet or film releasing position.Minimum as shown in Figure 2 groove teaching position 10 and the highest groove teaching position 11.Getting sheet with manipulator is example, prepares the position of getting silicon chip when the knee-piece position of minimum groove teaching contacts the first groove silicon chip lower surface for manipulator sheet fork rigidly connects.It is to be that manipulator just touches the position that silicon chip is got in the preparation of the 25th groove silicon chip lower surface that the highest groove is got the sheet position.The teaching position of supposing first groove and the 25 groove is respectively:
{x
1，y
1，z
1，rx
1，ry
1，rz
1}＝{105，70，300，76，230，150}
{ x
25, y
25, z
25, rx
25, ry
25, rz
25}={ 100,320,297,73,236,151}x, y, the unit of z is millimeter, rx, ry, the unit degree of being of rz.
Further, by minimum groove or the highest groove get sheet or the film releasing position calculation goes out manipulator is got sheet or film releasing in valut medial launder position relevant position value.Manipulator is got sheet or film releasing action as shown in Figure 3, and 4 is the sheet fork on manipulator top, and 5 is silicon chip, and manipulator can move to position 2 by position 1 in getting the sheet process, open vacuum when position 2, the absorption silicon chip, and the manipulator sheet fork that is adsorbing silicon chip moves to position 3.The process of film releasing is an opposite process, and the sheet fork of manipulator at first can be on position shown in 23, and the in-position 2 then, and close vacuum this moment, puts down silicon chip, on the last in-position 1.Manipulator is described by above-mentioned three location points at the relevant position of getting sheet or film releasing action of each groove of valut medial launder.These three positions can be calculated by following formula respectively by the six-freedom degree variable description: P1={ (i-1) Δ x+x
1, (i-1) Δ y+d+y
1, (i-1) Δ z+z
1, (i-1) Δ rx+rx
1, (i-1) Δ ry+ry
1, (i-1) Δ rz+rz
1P2={ (i-1) Δ x+x
1, (i-1) Δ y+y
1, (i-1) Δ z+z
1, (i-1) Δ rx+rx
1, (i-1) Δ ry+ry
1, (i-1) Δ rz+rz
1P3={ (i-1) Δ x+x
1, (i-1) Δ y-d+y
1, (i-1) Δ z+z
1, (i-1) Δ rx+rx
1, (i-1) Δ ry+ry
1, (i-1) Δ rz+rz
1Wherein i be the numbering of groove in the valut, P1, P2, P3 are position 1, position 2, the position 3 of manipulator when getting sheet or film releasing action in the groove i of valut, d is the distance that position 2 relative positions 1 or position 3 relative positions 2 change on the y direction, x
1, y
1, z
1, rx
1, ry
1, rz
1Be minimum groove six-freedom degree teaching position in the valut, Δ x, Δ y, Δ z, Δ rx, Δ ry, Δ rz are the relative variable on six-freedom degree respectively between groove and the groove in the valut.Relative variable on the six-freedom degree can be tried to achieve by following formula:
Δx＝(x
n-x
1)/n-1，Δy＝(y
n-y
1)/n-1，Δz＝(z
n-z
1)/n-1
Δrx＝(rx
n-rx
i)/n-1，Δry＝(ry
n-ry
1)/n-1，Δrz＝(rz
n-rz
1)/n-1
That supposes 11st groove of manipulator in the valut medial launder gets sheet or film releasing, and the concrete numerical value that is got six relative variablees by the teaching position of the 1st groove and the 25th groove and relative variable computing formula on the above-mentioned six degree of freedom is:
Δx＝(x
25-x
1)/25-1＝(100-105)/24＝-0.2083
Δy＝(y
25-y
1)/25-1＝(320-70)/24＝10.4166
Δz＝(z
25-z
1)/25-1＝(297-300)/24＝-0.125
Δrx＝(rx
25-rx
1)/25-1＝(73-76)/24＝-0.125
Δry＝(ry
25-ry
1)/25-1＝(236-230)/24＝0.25
Δrz＝(rz
25-rz
1)/25-1＝(151-150)/24＝0.0416
The computing formula that sheet or film releasing relevant position are got in six the relative variate-values and the substitution of minimum groove teaching positional value of aforementioned calculation so, the empirical value of d is 2, unit is a millimeter, in the valut 11 grooves get position 1 coordinate of sheet or film releasing
P
111＝{(11-1)·Δx+x
1，(11-1)·Δy+d+y
1，(11-1)·Δz+z
1，(11-1)·Δrx+rx
1，(11-1)·Δry+ry
1，(11-1)·Δrz+rz
1}
Try to achieve:
P
111＝{102.917，176.166，298.75，74.75，232.5，150.416}
With the reason formula
Try to achieve:
Just can quick and precisely finish in the valut the 11st film trap by this method manipulator and get sheet or film releasing operation.
The foregoing description is suitable for all valuts, and the valut, the operation of manipulator in valut is single in exposure manufacture process, and for example manipulator only need be got the sheet operation in the feed storehouse, and manipulator only need be finished the film releasing operation in take up storehouse and useless valut.So calculating the operating position of manipulator in the feed storehouse is to get the sheet position, the Robot actions position of calculating in take up storehouse and useless valut is the film releasing position.The teaching of the highest groove and minimum groove correspondence, the highest groove of teaching is got the sheet position and minimum groove is got the sheet position, teaching the highest groove film releasing position and minimum groove film releasing position in take up storehouse and useless valut under the self-defined coordinate system in feed storehouse.The teaching process of all valuts can be represented by Fig. 4.
Adopt the present invention can effectively improve the manipulator teaching efficiency, adopt self-defined coordinate system and correlation computations method to reduce the requirement of valut installation accuracy, the realization manipulator is located fast and accurately; Simultaneously, manipulator is that six axis robot can be further at rx, ry, big stroke compensation valut alignment error on the rz direction.
Claims (7)
1, a kind of method that improves the manipulator teaching efficiency, described manipulator need to get sheet and film releasing operation in valut, described valut includes the groove of several sheets deposited that number in order, and it is characterized in that, it may further comprise the steps:
Step 1: define self-defined coordinate system, the physical coordinates system of the valut of manipulator teaching is deposited in the data structure of self-defined coordinate system;
Step 2: respectively the teaching manipulator under self-defined coordinate system, be arranged in the minimum groove of valut and the highest groove get sheet or film releasing position;
Step 3: by minimum groove or the highest groove get sheet or the film releasing position calculation goes out the relevant position of getting sheet or film releasing action of manipulator at each groove of valut medial launder.
2, the method for raising manipulator teaching efficiency as claimed in claim 1 is characterized in that: in step 1, three positions are to determine the data structure of self-defined reference frame in the physical coordinates system of described self-defined coordinate system need manipulator teaching valut.
3, the method for raising manipulator teaching efficiency as claimed in claim 2 is characterized in that: three positions of described manipulator teaching are respectively valut vessel port (7), minimum groove position (8), the highest groove position (9).
4, the method for raising manipulator teaching efficiency as claimed in claim 1 is characterized in that: in step 3, described manipulator is described by three location points at the relevant position of getting sheet or film releasing action of each groove of valut medial launder.
5, the method for raising manipulator teaching efficiency as claimed in claim 4 is characterized in that: in step 3, described manipulator calculates by following formula in relevant three positions of getting sheet or film releasing action of each groove of valut medial launder:
P1＝{(i-1)·Δx+x
1，(i-1)·Δy+d+y
1，(i-1)·Δz+z
1，(i-1)·Δrx+rx
1，(i-1)·Δry+ry
1，(i-1)·Δrz+rz
1}
P2＝{(i-1)·Δx+x
1，(i-1)·Δy+y
1，(i-1)·Δz+z
1，(i-1)·Δrx+rx
1，(i-1)·Δry+ry
1，(i-1)·Δrz+rz
1}
P3＝{(i-1)·Δx+x
1，(i-1)·Δy-d+y
1，(i-1)·Δz+z
1，(i-1)·Δrx+rx
1，(i-1)·Δry+ry
1，(i-1)·Δrz+rz
1}
Wherein i is the numbering of groove in the valut, and P1, P2, P3 are position 1, position 2, the position 3 of manipulator when getting sheet or film releasing action in the groove i of valut, and d is the distance that position 2 relative positions 1 or position 3 relative positions 2 change on the y direction, x
1, y
1, z
1, rx
1, ry
1, rz
1Be minimum groove six-freedom degree teaching position in the valut, Δ x, Δ y, Δ z, Δ rx, Δ ry, Δ rz are the relative variable on six-freedom degree respectively between groove and the groove in the valut.
6, the method for raising manipulator teaching efficiency as claimed in claim 5 is characterized in that: in the described valut between groove and the groove respectively the relative variable on six-freedom degree can try to achieve by following formula:
Δx＝(x
n-x
1)/n-1，Δy＝(y
n-y
1)/n-1，Δz＝(z
n-z
1)/n-1
Δrx＝(rx
n-rx
1)/n-1，Δry＝(ry
n-ry
1)/n-1，Δr
z＝(rz
n-rz
1)/n-1
X wherein
n, y
n, z
n, rx
n, ry
n, rz
nBe the highest groove six-freedom degree teaching positional value in the valut, n is the total groove number in the valut.
7, the method for raising manipulator teaching efficiency as claimed in claim 4, it is characterized in that: described manipulator is six axis robot, is furnished with vacuum plant, relies on vacuum to carry out pulldown.
Priority Applications (1)
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|---|---|---|---|
| CNB2007100466800A CN100526025C (en) | 2007-09-29 | 2007-09-29 | Method for improving teaching efficiency of the mechanical arm |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100466800A CN100526025C (en) | 2007-09-29 | 2007-09-29 | Method for improving teaching efficiency of the mechanical arm |
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| CN100526025C true CN100526025C (en) | 2009-08-12 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014223167A1 (en) * | 2014-11-13 | 2016-05-19 | Kuka Roboter Gmbh | Determining object-related gripping spaces by means of a robot |
| CN109530935B (en) * | 2018-12-12 | 2021-10-01 | 上海新时达机器人有限公司 | Method for machining regular holes by using laser cutting mechanical arm |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1824471A (en) * | 2005-02-25 | 2006-08-30 | 精工爱普生株式会社 | Robot locus control method and apparatus and program of robot locus control method |
| CN101036984A (en) * | 2006-03-13 | 2007-09-19 | 发那科株式会社 | Teaching position correcting apparatus and teaching position correction method |
-
2007
- 2007-09-29 CN CNB2007100466800A patent/CN100526025C/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1824471A (en) * | 2005-02-25 | 2006-08-30 | 精工爱普生株式会社 | Robot locus control method and apparatus and program of robot locus control method |
| CN101036984A (en) * | 2006-03-13 | 2007-09-19 | 发那科株式会社 | Teaching position correcting apparatus and teaching position correction method |
Non-Patent Citations (2)
| Title |
|---|
| 旋转关节型堆垛机的运动轨迹分析. 包胜华，刘安生.组合机床与自动化加工技术，第4期. 2004 |
| 旋转关节型堆垛机的运动轨迹分析. 包胜华，刘安生.组合机床与自动化加工技术，第4期. 2004 * |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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