CN100516906C - Detection device and method for array base plate - Google Patents
Detection device and method for array base plate Download PDFInfo
- Publication number
- CN100516906C CN100516906C CNB2004100919385A CN200410091938A CN100516906C CN 100516906 C CN100516906 C CN 100516906C CN B2004100919385 A CNB2004100919385 A CN B2004100919385A CN 200410091938 A CN200410091938 A CN 200410091938A CN 100516906 C CN100516906 C CN 100516906C
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- array base
- base palte
- pick
- unit
- photovalve
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Abstract
The invention discloses an array substrate detecting device and method. And the detecting device comprises a light source, a photoelectric component, an optical detector on one side of the photoelectric component and a calculator system connected with the optical detector, where the to-be-detected array substrate is arranged between the photoelectric component and the light source. The invention firstly obtains video data of the array substrate, then compares the video data with the one prestored in the calculator system to determine if the array substrate has defects and accurately locates the defects, thus able to raise detecting efficiency.
Description
[technical field]
The present invention relates to a kind of array base palte pick-up unit and detection method.
[background technology]
LCD since have light, approach, be easy to carry and plurality of advantages such as environmental protection, obtain widespread use.But in the various operations that LCD is made, many detection steps must be set, especially in the substrate manufacture process of LCD, need repeated detection,, reduce cost to promote yield.Array base palte pick-up unit commonly used and detection method are mainly used in the line defct that detects in the substrate, as short circuit, open circuit etc.
As shown in Figure 1, be a kind of prior art array base palte pick-up unit.This array base palte pick-up unit 1 mainly comprises a photovalve 10, a power supply 11, a light source 12, an optical detector 13 and a monitor 14.
This photovalve 10 comprises a control photosphere 101 and the reflection horizon 102 whether a may command light passes through.This photovalve 10 is arranged on array base palte to be measured 16 tops and presses close to this array base palte 16, and power supply 11 is electrically connected with pixel electrode 15 on photovalve 10 and the array base palte 16.
Adopt this array base palte pick-up unit 1 can effectively detect array base palte 16 to be measured zero defect is arranged, if defectiveness, but the approximate location of display defect also, but because light is through repeatedly changing, arrive monitor 14, be difficult to accurately show the particular location of this defective, when causing follow-up reparation, need extra search defective process, increase cost.
[summary of the invention]
Can not be for overcoming prior art array base palte pick-up unit to the accurate problem of location of the defective on the substrate, the invention provides a kind of can be to the accurate array base palte pick-up unit of location of the defective on the array base palte.
The present invention also provide a kind of can be to the accurate array base palte detection method of location of the defective on the array base palte.
The technical scheme that technical solution problem of the present invention is adopted is: a kind of array base palte pick-up unit is provided, comprise that a light source, a may command light are positioned at the optical detector and a calculator system that is connected with this optical detector of this photovalve one side by whether photovalve,, array base palte to be measured is arranged between photovalve and the light source.
Another technical scheme that technical solution problem of the present invention is adopted is: a kind of array base palte detection method is provided, may further comprise the steps: aforesaid array base palte pick-up unit is provided; Array base palte to be measured is arranged between the light source and photovalve of this array base palte pick-up unit; Control the switch of the thin film transistor (TFT) on this array base palte, make this photovalve action to make this photovalve be in complete bright state or complete dark state; Utilize optical detector to take this photovalve respectively, and with the image data input calculator system that obtains; With the predetermined image data in these data and the calculator system relatively, if find defective, then determine the particular location of defective.
Compared with prior art, the invention has the beneficial effects as follows: array base palte pick-up unit of the present invention and detection method adopt optical detector that array base palte to be measured is taken and obtain its image data afterwards, and this image is presented on the display of calculator system, simultaneously the data that prestore in this image data input calculator system and the calculator system are compared, to obtain comparative result, and judge its difference, thereby obtain whether defectiveness of array base palte; If defectiveness then can be by comparing to determine the particular location of this defective with the image data pointwise that prestores.Thereby can directly carry out repair action according to testing result, and need not to determine again the step of defective locations, can effectively improve detection efficiency.
[description of drawings]
Fig. 1 is a prior art array base palte pick-up unit synoptic diagram.
Fig. 2 is an array base palte pick-up unit synoptic diagram of the present invention.
[embodiment]
Seeing also Fig. 2, is the synoptic diagram of array base palte pick-up unit 2 of the present invention.This array base palte pick-up unit 2 comprises that mainly a photovalve 20, that is positioned at these array base palte 26 tops is positioned at light source 22, an optical detector 23 and a calculator system 24 of these array base palte 26 belows.
This photovalve 20 comprises a transparency conducting layer 201 and a control photosphere 202.Conductive layer 201 and thin film transistor (TFT) 25 are applied voltage, and the luminous energy that the switch controls light source 21 by control TFT 25 sends is not by this photovalve 20.
This optical detector 23 can adopt charge coupled cell, and (resolution of this CCD camera is higher than the resolution of this array base palte 26 to be measured for Charge Coupled Device, CCD) camera.Calculator system 24 can provide default and array base palte 26 corresponding array patterns data to be measured.
Thin film transistor (TFT) on the array base palte 26 25 and conductive layer 201 are applied voltage, make thin film transistor (TFT) 25 and photovalve 20 work on this array base palte 26.The light that light source 22 sends shines this array base palte 26 below array base palte 26.Open this thin film transistor (TFT) 25, make and set up an electric field between this array base palte 26 and the photovalve 20, this electric field can make the control photosphere 202 of photovalve 20 move, the light that makes light source 22 send can pass through this photovalve 20, this moment, these photovalve 20 surfaces were in complete bright state, adopt 23 pairs of these array base paltes of optical detector 26 to take, obtain image data, and image data imported calculator system 24, display by this calculator system 24 shows this image, and the associated array substrate data that prestores in this image data and the calculator system 24 compared, if find flaw, then can go out the particular location and the record of this flaw by the contrast data presentation that prestores; If it is indefectible, then close this thin film transistor (TFT) 25, then the electric field between this array base palte 26 and this conductive layer 201 changes, make control photosphere 202 move, the light that light source 22 sends can not pass through this photovalve 20, this moment, array base palte 26 was in complete dark state, adopt 23 pairs of these array base paltes of optical detector 26 to take, obtain image data, and image data imported calculator system 24, the display by this calculator system 24 shows this image, and the associated array substrate data that prestores in this image data and the calculator system 24 is compared, if find flaw, then can contrast particular location and the record that pre-deposit data is found out this flaw by pointwise; If indefectible, then carry out the detection of next array base palte to be measured.
Compared with prior art, array base palte pick-up unit 2 of the present invention adopts 23 pairs of array base paltes 26 to be measured of optical detector to take and obtains its image data afterwards, and this image is presented on the display of calculator system 24, simultaneously the data that prestore in this image data input calculator system 24 and the calculator system 24 are compared, to obtain comparative result, and judge its difference, thereby obtain whether defectiveness of array base palte 26; If defectiveness then can be by comparing to determine the particular location of this defective with the image data pointwise that prestores.Thereby can directly carry out repair action according to testing result, and need not to determine again the step of defective locations, can effectively improve detection efficiency.
For this array base palte pick-up unit 2, described control light source 22 makes array base palte 26 complete bright or complete dark detection order interchangeable, optical detector 23 can also adopt high-resolution complementary metal oxide semiconductor (CMOS) (Complementary Metal OxideSemiconductor, CMOS) camera.This light source 22 can be pointolites such as light emitting diode, also can be (Cold Cathode Fluorescent Lamp, CCFL) electroluminescent cell of line source such as grade or film morphology (Electroluminance, EL) area sources such as grade such as cold cathode fluorescent.This control photosphere 202 can be liquid crystal layer or other aeolotropic crystal.This transparency conducting layer 201 can for tin indium oxide (Indium Tin Oxide, ITO) or indium zinc oxide (Indium Zinc Oxide, IZO).
Claims (13)
1. array base palte pick-up unit, it comprises that a light source, a may command light are positioned at the optical detector and a calculator system that is connected with this optical detector of this photovalve one side by whether photovalve,, and array base palte to be measured is arranged between photovalve and the light source.
2. array base palte pick-up unit as claimed in claim 1 is characterized in that: this optical detector is charge coupled cell camera or complementary metal oxide semiconductor (CMOS) camera.
3. array base palte pick-up unit as claimed in claim 1 is characterized in that: the resolution of this optical detector is higher than the resolution of array base palte to be measured.
4. array base palte pick-up unit as claimed in claim 1 is characterized in that: this photovalve comprises a control photosphere and a transparency conducting layer.
5. array base palte pick-up unit as claimed in claim 4 is characterized in that: this control photosphere is liquid crystal layer or aeolotropic crystal.
6. array base palte pick-up unit as claimed in claim 4 is characterized in that: this transparency conducting layer is tin indium oxide or indium zinc oxide.
7. array base palte pick-up unit as claimed in claim 1 is characterized in that: this light source is a pointolite.
8. array base palte pick-up unit as claimed in claim 7 is characterized in that: this pointolite is a light emitting diode.
9. array base palte pick-up unit as claimed in claim 1 is characterized in that: this light source is a line source.
10. array base palte pick-up unit as claimed in claim 9 is characterized in that: this line source is a cold-cathode fluorescence lamp.
11. array base palte pick-up unit as claimed in claim 1 is characterized in that: this light source is an area source.
12. array base palte pick-up unit as claimed in claim 11 is characterized in that: this area source is an electroluminescent cell.
13. an array base palte detection method may further comprise the steps: array base palte pick-up unit as claimed in claim 1 is provided; Array base palte to be measured is arranged between the light source and photovalve of this array base palte pick-up unit; Control the switch of the thin film transistor (TFT) on this array base palte, make this photovalve action to make this photovalve be in complete bright state or complete dark state; Utilize optical detector to take this photovalve respectively, and with the image data input calculator system that obtains; With the predetermined image data in these data and the calculator system relatively, if find defective, then determine the particular location of defective.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100919385A CN100516906C (en) | 2004-12-28 | 2004-12-28 | Detection device and method for array base plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100919385A CN100516906C (en) | 2004-12-28 | 2004-12-28 | Detection device and method for array base plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1797016A CN1797016A (en) | 2006-07-05 |
| CN100516906C true CN100516906C (en) | 2009-07-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2004100919385A Expired - Fee Related CN100516906C (en) | 2004-12-28 | 2004-12-28 | Detection device and method for array base plate |
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| CN (1) | CN100516906C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103064206A (en) * | 2013-01-08 | 2013-04-24 | 深圳市华星光电技术有限公司 | Glass substrate defect detection method |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102331633A (en) * | 2011-09-21 | 2012-01-25 | 深超光电（深圳）有限公司 | Mother substrate used for detecting winding of array and detecting method thereof |
| CN103969853B (en) * | 2013-02-05 | 2016-06-01 | 北京京东方光电科技有限公司 | Array substrate and detection method thereof and detection device |
| CN104678202B (en) * | 2013-11-29 | 2018-07-06 | 技嘉科技股份有限公司 | Test maintenance system and method thereof |
| CN111312130B (en) * | 2020-02-28 | 2023-07-21 | 云谷（固安）科技有限公司 | Array substrate detection method and system |
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| US5459409A (en) * | 1991-09-10 | 1995-10-17 | Photon Dynamics, Inc. | Testing device for liquid crystal display base plate |
| JP2003222877A (en) * | 2002-01-30 | 2003-08-08 | Toshiba Corp | Liquid crystal display device and method of manufacturing the same |
| CN1438521A (en) * | 2002-02-12 | 2003-08-27 | 精工爱普生株式会社 | Photoelectric device, electronic apparatus and method for making photoelectric apparatus |
| CN1469174A (en) * | 2002-06-28 | 2004-01-21 | Lg.菲利浦Lcd株式会社 | Liquid crystal display device with colour filter array substrate and producing method thereof |
| US20040119676A1 (en) * | 2002-12-13 | 2004-06-24 | Mi-Sook Nam | Trans-reflective liquid crystal display device for improving color reproducibility and brightness and method for driving thereof |
| KR20040058899A (en) * | 2002-12-27 | 2004-07-05 | 엘지.필립스 엘시디 주식회사 | array circuit board of Liquid Crystal Display Device and test method of thereof |
| US20040183978A1 (en) * | 2003-03-20 | 2004-09-23 | Hun Jeoung | Array substrate for in-plane switching liquid crystal display device and method of fabricating the same |
| CN2800286Y (en) * | 2004-12-28 | 2006-07-26 | 鸿富锦精密工业（深圳）有限公司 | Array substrate detecting device |
-
2004
- 2004-12-28 CN CNB2004100919385A patent/CN100516906C/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5459409A (en) * | 1991-09-10 | 1995-10-17 | Photon Dynamics, Inc. | Testing device for liquid crystal display base plate |
| JP2003222877A (en) * | 2002-01-30 | 2003-08-08 | Toshiba Corp | Liquid crystal display device and method of manufacturing the same |
| CN1438521A (en) * | 2002-02-12 | 2003-08-27 | 精工爱普生株式会社 | Photoelectric device, electronic apparatus and method for making photoelectric apparatus |
| CN1469174A (en) * | 2002-06-28 | 2004-01-21 | Lg.菲利浦Lcd株式会社 | Liquid crystal display device with colour filter array substrate and producing method thereof |
| US20040119676A1 (en) * | 2002-12-13 | 2004-06-24 | Mi-Sook Nam | Trans-reflective liquid crystal display device for improving color reproducibility and brightness and method for driving thereof |
| KR20040058899A (en) * | 2002-12-27 | 2004-07-05 | 엘지.필립스 엘시디 주식회사 | array circuit board of Liquid Crystal Display Device and test method of thereof |
| US20040183978A1 (en) * | 2003-03-20 | 2004-09-23 | Hun Jeoung | Array substrate for in-plane switching liquid crystal display device and method of fabricating the same |
| CN2800286Y (en) * | 2004-12-28 | 2006-07-26 | 鸿富锦精密工业（深圳）有限公司 | Array substrate detecting device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103064206A (en) * | 2013-01-08 | 2013-04-24 | 深圳市华星光电技术有限公司 | Glass substrate defect detection method |
| CN103064206B (en) * | 2013-01-08 | 2015-04-22 | 深圳市华星光电技术有限公司 | Glass substrate defect detection method |
Also Published As
| Publication number | Publication date |
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| CN1797016A (en) | 2006-07-05 |
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