CN100505986C - Substrate processing equipment - Google Patents

Abstract

The present invention relates to a substrate processing apparatus used in wet etching and stripping process. The substrate processing apparatus comprises: a box supplying the substrates; a processing part integrated with the top of the box, processing the substrates with reagent solution; a container integrated with the bottom of the box, containing the reagent solution; an aspirator disposed in the container, recycling the reagent solution to the processing part; and a spray part connected with the aspirator, spraying the reagent solution to the substrates in the processing part.

Description

Substrate processing equipment

technical field

The present invention relates to a substrate processing device, specifically, a processing part and a storage part for developing, etching and stripping processes are formed into an integrated structure, and a suction device for circulating chemical liquid is arranged inside, thereby improving Substrate processing equipment with high processing efficiency.

Background technique

Usually, in the manufacturing process of a display device, the process of forming a circuit pattern on a glass substrate consists of the following processes: a process of coating a photosensitive resin (photosensitive-polymer) on the surface of the substrate to form a photosensitive film; exposing the photosensitive film through a certain circuit pattern, The process of image development; the process of etching the surface of the substrate; the process of peeling off with an organic solvent after the etching process.

In these display device manufacturing processes, the above-mentioned etching process is divided into wet etching and dry etching.

That is, wet etching is a process of etching with a chemical solution, and dry etching is a process of etching with gas such as plasma.

This wet etching and stripping device usually consists of the following parts: a processing part for etching and stripping; a storage part that is independent from the processing part and stores the chemical solution; connected to the storage part, and supplies the chemical solution to the processing part pump.

Therefore, when the etching and peeling processes are performed on the substrate, the chemical liquid stored in the storage unit is supplied to the processing unit by a pump, and the processing process is performed.

However, in this substrate processing apparatus, the pump and the processing section are separately provided to circulate the chemical solution, so heat loss easily occurs during the circulation process of the chemical solution, and it is difficult to maintain an appropriate temperature of the chemical solution during the etching process.

Moreover, the separate arrangement of the pump and the processing part will lead to the problem of leakage of the liquid medicine during the circulation of the liquid medicine.

In addition, the separate arrangement of the storage unit and the processing unit requires an increase in the space for the storage unit, thus increasing the volume of the device.

Contents of the invention

The present invention is made in view of the above-mentioned problems, and its object is to provide a pump for pumping the liquid medicine inside the storage unit that is integrally structured with the treatment unit, thereby minimizing the heat loss during the circulation of the liquid medicine. Substrate processing equipment that can maintain the temperature required in the etching process.

Another object of the present invention is to provide a substrate processing apparatus in which a pump and a storage unit are integrated so as to prevent leakage of a chemical solution during circulation.

Another object of the present invention is to provide a substrate processing apparatus that improves space utilization by reducing the occupied space of a storage unit, and makes each bath modularized so as to quickly respond to process changes.

Another object of the present invention is to provide a substrate processing apparatus that can reduce vibration when driven by a motor, thereby improving process stability.

In order to achieve the above object, the present invention provides a substrate processing device, which includes:

A box for supplying substrates; a processing unit that forms an integral structure with the upper part of the above-mentioned box and performs a chemical liquid treatment process on the above-mentioned substrate; forms an integral structure with the lower part of the above-mentioned box and stores the chemical liquid required for the above-mentioned chemical liquid treatment process a storage part; a suction device located inside the storage part and circulating the chemical solution to the processing part; and a spraying device connected to the suction device and spraying the pumped chemical solution to the substrate in the processing part department. The inside of the box is divided into upper and lower parts by a partition plate, the upper part is a processing part, and the lower part is a storage part, and a part of the partition board is provided with an opening to allow the liquid medicine to be supplied from the processing part to the storage part.

The present invention has the following advantages.

First, since the suction device for pumping out the chemical solution is integrally formed inside the storage unit, the heat loss and pressure drop that occur when the chemical solution circulates can be maintained to maintain the temperature and pressure of the chemical solution suitable for the etching process. , which has the advantages of preventing fouling and improving reactivity.

Second, since the suction device is provided inside the storage part, leakage of the medical solution during circulation can be prevented.

Third, since the storage unit and the treatment unit are integrally formed, the occupied space of the storage unit is reduced, thereby improving the space utilization rate, and since each bath is modularized, it is possible to quickly respond to process changes.

Fourth, the vibration generated by the motor drive is reduced, thereby increasing process stability.

Fifth, by integrating the processing unit, the storage unit, and the suction device, the volume of the equipment can be reduced and the production cost can be saved.

Description of drawings

FIG. 1 is a perspective view showing the internal structure of a substrate processing apparatus used in wet etching and peeling steps according to a preferred embodiment of the present invention.

FIG. 2 is a side sectional view of FIG. 1 .

Fig. 3 is an enlarged view of the suction device in Fig. 2 .

Detailed ways

Hereinafter, a substrate processing apparatus according to a preferred embodiment of the present invention will be described in detail with reference to the drawings.

1 is a perspective view showing the internal structure of a substrate processing apparatus used in wet etching and peeling steps according to a preferred embodiment of the present invention, and FIG. 2 is a side sectional view of FIG. 1 .

As shown in the figure, the substrate processing device provided by the present invention can be applied to various substrate processing processes, but it is commonly used in devices for developing processes, wet etching processes, and stripping processes. Therefore, the following is applicable to developing processes , etching and stripping process examples will be described.

The substrate processing device provided by the present invention includes: a box body 3, which is divided into upper and lower parts; a processing unit 5, which is located on the upper part of the box body 3, and performs a chemical liquid treatment process; a storage unit 7, which is connected to the box body. The lower part of the body 3 is integrated and stores the liquid medicine; the suction device 15 is located inside the storage part 7 and pumps the liquid medicine to the treatment part 5; the spray part 11 is connected to the suction device 15 , and spray the pumped chemical solution onto the substrate G in the processing unit 5 .

In the substrate processing apparatus having the above structure, the box 3 has a certain space inside, and the inside is divided into upper and lower parts by the partition plate 9 .

That is, the processing unit 5 is provided on the upper portion of the partition plate 9 , and the storage unit 7 is provided on the lower portion of the partition plate 9 .

Furthermore, the transfer roller R which supports and transfers the board|substrate G is provided inside the said processing part 5. As shown in FIG. Therefore, the substrate G can be conveyed to the inside of the processing section 5 through the feed port 14 provided on one side of the box 3 .

In addition, the above-mentioned storage part 7 is integrated with the lower part of the processing part 5 to store the liquid medicine supplied by the processing part 5 .

At this time, the partition plate 9 that separates the treatment unit 5 from the storage unit 7 is provided with an opening 13 formed with a plurality of through holes, so that the liquid medicine in the treatment unit 5 can be dropped into the storage unit 7 .

In this way, the integrated structure of the processing unit 5 and the storage unit 7 can reduce the additional space used for the storage unit 7 in the prior art where the processing unit and the storage unit are independently provided.

Furthermore, by integrating the processing unit 5 and the storage unit 7, the baths of the processing line are modularized, thereby flexibly responding to process changes.

In the above content, the inner part of the box is divided into upper and lower parts, but the present invention is not limited thereto, and an embodiment in which the inner part of the box is divided into left and right parts, or the partition plate is omitted, may also be adopted.

The storage part 7 has a liquid medicine circulation pipe in it, so the contaminated liquid medicine can be replaced appropriately. The liquid medicine circulation pipe includes an inflow pipe 27 and an outflow pipe 25 located on both sides of the storage part 7. The inflow pipe 27 and the outflow pipe 25 are respectively connected with valves 26a and 26b, so they can be opened and closed.

Therefore, when replacing the contaminated medical solution due to long-term use, new medical solution can be replaced through the inflow tube 27 and the outflow tube 25 .

In this case, the above-mentioned inflow pipe 27 and outflow pipe 25 may be provided at the same time, or one of them may be provided.

As described above, the medical solution stored in the storage unit 7 can be supplied to the treatment unit 5 through the above-mentioned suction device 15 .

The suction device 15 is composed of a pump 17 mounted inside the storage unit 7 and a magnetic drive unit located outside the case 3 and transmitting rotational force to the pump 17 by magnetic force in a non-contact manner.

More specifically, as shown in FIG. 3 , the above-mentioned pump 17 generally includes a chemical pump such as a Teflon pump or an FRP pump whose exterior is treated with a chemical-resistant coating.

Above-mentioned pump 17 comprises: housing 31, and it is positioned at the inner bottom of storage part 7; Rotating shaft 37 is arranged on the inside of above-mentioned housing 31 rotatably; 19 , when transmitting magnetic force, it rotates to generate an attractive force;

In the pump having the above-mentioned structure, the casing 31 has a suction port 21 at its inlet for sucking in the chemical solution, and has a discharge port 33 at its outlet for discharging the chemical solution inside the casing 31 to the outside.

Therefore, the liquid medicine in the storage unit 7 can be sucked through the suction port 21 of the housing 31 and then discharged to the ejection unit 11 through the discharge port 33 .

In addition, the upper end portion of the rotating shaft 37 is rotatably fixed inside a rib 38 at the top of the casing 31 by a bearing 39 . Furthermore, the lower end portion of the above-mentioned rotary shaft 37 is rotatably fixed to the bottom of the casing 31 by ribs 40 and bearings 41 .

Therefore, the above-mentioned rotating shaft 37 can rotate inside the casing 31 .

In addition, the middle portion of the rotating shaft 37 has the above-mentioned impeller 35 integrally formed therewith, and the lower end portion has the above-mentioned first magnetic plate 42 .

At this time, the first magnetic plate 42 and the second magnetic plate 43 to be described later are arranged to correspond to each other via the case 3 .

Therefore, when the magnetic force generated by the second magnetic plate of the magnetic drive unit 19 passes through the case 3 and is transmitted to the first magnetic plate 42 in a non-contact manner, the impeller 35 rotates.

As mentioned above, when the impeller 35 rotates, the impeller 35 will push away the liquid medicine inside the housing 31 to generate a certain pressure of suction, so as to suck the medicine liquid in the storage part 7 through the suction port 21, and the medicine liquid sucked It is discharged to the above-mentioned injection part 11 through the discharge port 33 .

In addition, the magnetic drive unit 19 is connected to the motor unit 20 that generates rotational force and the shaft of the motor unit 20 , and includes a second magnetic plate 43 that generates magnetic force and transmits it to the impeller 35 .

The above-mentioned first magnetic plate 42 and the second magnetic plate 43 preferably include magnetic bodies such as magnets, and as mentioned above, the two magnetic plates are centered on the casing 3 and correspond to each other at a certain distance outside and inside the casing 3. non-contact structure.

In addition, both the first magnetic plate 42 and the second magnetic plate 43 may be magnetic bodies, or only the second magnetic plate 43 may be a magnetic body. In this case, the magnetic body may be a permanent magnet or an electromagnet.

Therefore, when the second magnetic plate 43 is rotated by the motor unit 19 , the magnetic force will pass through the box body 3 and be transmitted to the first magnetic plate 42 in a non-contact manner.

As a result, noise due to contact can be prevented during power transmission to the impeller 35, and there is no need to form a connection port or the like on the case 3, so that leakage of the chemical solution can also be prevented.

Above, the embodiment in which the magnetic drive unit is used to drive the pump in a non-contact manner has been described, but the present invention is not limited thereto. The present invention can also adopt a common motor unit installed inside the box, and the motor unit Connect the pump directly and use it to drive the pump. Of course, the motor unit described in this case should be waterproof.

In addition, the chemical solution discharged from the discharge port 33 of the pump 17 is supplied to the treatment unit 5 through the spray unit 11 .

The above-mentioned injection part 11 includes an injection device of a generally known structure.

That is, its structure is constituted by the delivery pipe 23 connected to the discharge port 33 of the pump 17 , the spray pipe 45 for supplying the liquid medicine, and the plurality of nozzles 47 formed on the spray pipe 45 .

Accordingly, the chemical liquid supplied via the spray pipe 45 is sprayed through the nozzle 47 to be supplied to the surface of the substrate G for processing.

Hereinafter, referring to the accompanying drawings, the working process of the substrate processing apparatus involved in the preferred embodiment of the present invention will be further described in detail.

As shown in FIG. 1 to FIG. 3 , when using the substrate processing apparatus provided by the present invention to perform developing, etching and stripping processes on the substrate G, the substrate G is first transferred to the inside of the box 3 by the transport roller R.

Thereafter, the suction device 15 is driven to extract a certain level of chemical solution stored in the storage unit 7 and spray it onto the substrate G of the processing unit 5 .

That is, when the magnetic driving part 19 of the above-mentioned suction device 15 is driven, the second magnetic plate 43 will rotate, and the magnetic force passes through the casing 3 and is transmitted to the first magnetic plate 42 in a non-contact manner, so that the impeller 35 turn.

As mentioned above, when the impeller 35 is inside the casing 31 and rotates at a certain speed, since the inside of the casing 31 is in a state of storing medical solution, the impeller 35 will push away the medical solution, causing a negative pressure to be generated inside the casing 31. pressure.

Along with this, through the suction port 21 of the case 31 , the liquid medicine is sucked into the inside of the case 31 , and the sucked liquid medicine can be discharged to the outside of the case 31 .

The discharged chemical solution is supplied to the spray pipe 45 through the delivery pipe 23 of the spray unit 11, and the chemical solution supplied to the spray pipe 45 is sprayed on the surface of the substrate G through a plurality of nozzles 47, so that the substrate G can be etched and peeled off. deal with.

In this way, after the chemical solution sprayed inside the processing unit 5 processes the substrate, it drops through the opening 13 of the partition plate 9 and returns to the lower storage unit 7 again. Thereafter, the above-mentioned process of being sucked by the suction device 15 and supplied to the processing unit 5 is repeated.

As long as there is a person with an ordinary technical level in the technical field to which the present invention belongs, various changes and modifications can be made to the present invention on the basis of the technical idea of the present invention, so the scope of protection claimed in the present invention is not limited to the above-mentioned comparison. good example.

Claims (11)

1. A substrate processing device, comprising: Boxes for supplying substrates; The upper part of the above-mentioned box is an integral structure, and a processing part that performs a chemical liquid processing process on the above-mentioned substrate; It is an integral structure with the lower part of the above-mentioned box, and stores the storage part for the liquid medicine required in the above-mentioned liquid medicine treatment process; a suction device located inside the above-mentioned storage part and circulating the liquid medicine to the above-mentioned treatment part; and connected to the above-mentioned suction device, and sprays the liquid medicine to the injection part of the substrate on the above-mentioned processing part, It is characterized by: The inside of the box is divided into upper and lower parts by a partition plate, the upper part is a processing part, and the lower part is a storage part, and a part of the partition board is provided with an opening to allow the liquid medicine to be supplied from the processing part to the storage part. 2. The substrate processing apparatus according to claim 1, characterized in that: The suction device includes a pump located inside the storage unit for pumping out the liquid medicine, and a magnetic drive unit located outside the case and transmitting rotational force to the pump in a non-contact manner through magnetic force. 3. The substrate processing apparatus according to claim 2, characterized in that: The above-mentioned pump includes a casing located at the bottom of the storage part; a rotating shaft rotatably arranged inside the above-mentioned casing; an impeller arranged on the above-mentioned rotating shaft and sucking fluid through rotating motion; The drive unit receives the magnetic force and rotates the first magnetic plate of the rotating shaft. 4. The substrate processing apparatus according to claim 2, characterized in that: The exterior of the above pumps is coated for chemical resistance. 5. The substrate processing apparatus according to claim 3, characterized in that: The housing of the above pump includes a suction port formed on one side of the housing to allow the liquid medicine to flow in; exit. 6. The substrate processing apparatus according to claim 3, characterized in that: The upper end and the lower end of the above-mentioned rotating shaft are respectively supported on the top and the bottom of the housing by ribs and bearings, and thus rotate. 7. The substrate processing apparatus according to claim 2, characterized in that: The magnetic drive unit includes a motor unit that generates rotational force by receiving electric energy, and a second magnet plate that is installed on the shaft of the motor unit and applies magnetic force to rotate the first magnet plate of the pump. 8. The substrate processing apparatus according to claim 3, characterized in that: Both sides or one side of the above-mentioned first magnetic plate are magnetic bodies. 9. The substrate processing apparatus according to claim 7, characterized in that: Both sides or one side of the above-mentioned first magnetic plate and second magnetic plate are magnetic bodies. 10. The substrate processing apparatus according to claim 1, characterized in that: The ejection unit includes a delivery pipe connected to the suction device; a spray pipe connected to the delivery pipe to supply the chemical solution; and a nozzle located in the spray pipe to spray the chemical solution to the substrate. 11. The substrate processing apparatus according to claim 1, characterized in that: The storage part of the above-mentioned box is often provided with a liquid medicine replacement tube, thereby replacing the liquid medicine in the storage part.

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