CN100492019C - Electrical contact device of probe card - Google Patents

Abstract

An electrical contact device for a probe card includes a base and at least one probe. The base has a surface and a groove recessed in the surface. The groove forms a wall adjacent to the surface and at least one positioning portion is provided on the wall. Each probe includes a first end and a second end. Each first end is provided on each positioning portion of the base so that each second end extends toward the groove.

Description

Electrical Contact Device for Probe Cards

technical field

The present invention relates to an electrical contact device of a probe card, in particular to an electrical contact device with better structural strength.

Background technique

In the manufacturing process of semiconductor chips, when the chip is manufactured but before the packaging process, it is usually necessary to go through a test program to test the circuit function of the chip; Between the stage and the chip, the electrical contact device has a plurality of probes, and each probe is respectively abutted against the bonding pad of the chip, so that the test signal of the testing machine can be transmitted back and forth between the chip and the testing machine.

A kind of existing electrical contact device 80, as shown in Figure 28, comprises a base 81, and a plurality of probes 82 that are arranged on the base 81, the first end 83 of each probe 82 is welded in the mode of joining. It is arranged on the surface of the base 81, and the second end 84 of the probe 82 extends toward the top of a groove 85 of the base 81. The second end 84 is used to contact the pad of the chip, and the probe 82 and the base The structure between 81 makes the probes 82 themselves elastic, and when the solder pads of the chip are pressed against the second ends 84, the probes 82 can more reliably touch the solder pads.

Another known electrical contact device 90, as shown in Figure 29, also includes a base 91 and a plurality of probes 92, the first end 93 of the probes 92 is directly formed on the surface of the base 91, The second end 94 is located above a groove 95 of the base 91 , so that the structure of each probe 92 is also elastic, and each second end 94 can be used to contact the bonding pad of the chip.

However, since the structural size of the semiconductor chip is getting smaller and smaller, the number of pads on the chip is increasing, and the number of probes that the electrical contact device must have in a unit area is relatively increasing, so that The area that can be used for mutual bonding between the probe and the base is getting smaller and smaller. When the chip is tested repeatedly for a long time, the joint between the probe and the base is prone to damage, causing the probe to separate from the base. Circumstances that cause failure of electrical contact devices.

Contents of the invention

Therefore, the main purpose of the present invention is to provide an electrical contact device for a probe card, in which the structural strength of each probe is better, and each probe is less likely to be damaged during long-term repeated testing work. Phenomenon, so that the electrical contact device is not easy to fail.

In order to achieve the purpose disclosed above, the present invention provides an electrical contact device for a probe card, which is characterized in that it includes:

A base, the base has a surface, and a receptacle recessed in the surface, the receptacle forms at least one wall adjacent to the surface, and at least one positioning portion is provided on the walls; and

At least one probe, each of the probes includes a first end and a second end, each of the first ends is arranged on each positioning portion of the base, and each of the second ends extends toward the container.

Wherein the positioning portion is recessed on the wall surface and the top surface.

Wherein the base forms at least one protrusion on the side corresponding to each of the positioning parts, and the first end of each of the probes has at least one recess, and each of the recesses of the probe corresponds to each protrusion of the base Partially embedded in the positioning part.

Wherein the cross-sectional shape of the first end of each probe corresponds to the cross-sectional shape of each positioning portion.

Wherein the base forms at least one groove on the side corresponding to each of the positioning parts, the extending direction of each of the grooves is parallel to the top surface, and each of the probes has at least one fillet on the outer periphery, and each of the probes can Each of the fillets is used to embed each of the grooves, so that each of the probes is arranged on the base.

Wherein the top or bottom surface of each of the probes is provided with a convex wall, the extending direction of the convex wall is the same as that of each fillet, and the convex wall is embedded in the groove of the base.

The cross-sectional shape of the positioning part is irregular, and the cross-sectional shape of each probe corresponds to the cross-sectional shape of the positioning part.

Wherein the container runs through the base from the top surface.

Wherein the cavity of the base forms a first wall and a second wall, and the second wall protrudes from the first wall.

Wherein the base further has at least one extension portion, each extension portion extends from each positioning portion toward the storage tank, and each probe is arranged on each positioning portion and each extension portion.

Each of the extensions has two sidewalls spaced apart from each other, and each of the probes is disposed between the two sidewalls.

Wherein each of the extension parts is arranged in each of the positioning parts and extends towards the direction of the container, and each of the probes is arranged on the top surface or the bottom surface of each of the extension parts.

Wherein the top side or the bottom side of each of the probes is additionally provided with a convex wall.

A conductive part is further provided between each of the extension parts and each of the positioning parts, and each of the conductive parts is used as a ground.

An electrical contact device for a probe card of the present invention is characterized in that it includes:

a base, the base has a surface, and a receptacle recessed in the surface, the surface is provided with at least one positioning portion, and the positioning portion is also recessed in the surface; and

At least one probe, each of the probes includes a first end and a second end, each of the first ends is arranged on each positioning portion of the base, and each of the second ends extends toward the container.

Wherein the base forms at least one protrusion on the side corresponding to each of the positioning parts, and the first end of each of the probes has at least one recess, and each of the recesses of the probe corresponds to each protrusion of the base Partially embedded in the positioning part.

Wherein the cross-sectional shape of the first end of each probe corresponds to the cross-sectional shape of each positioning portion.

Wherein the base forms at least one groove on the side corresponding to each of the positioning parts, the extending direction of each of the grooves is parallel to the top surface, and each of the probes has at least one fillet on the outer periphery, and each of the probes can Each of the fillets is used to embed each of the grooves, so that each of the probes is arranged on the base.

Wherein the top or bottom surface of each of the probes is provided with a convex wall, the extending direction of the convex wall is the same as that of each fillet, and the convex wall is embedded in the groove of the base.

The cross-sectional shape of the positioning part is irregular, and the cross-sectional shape of each probe corresponds to the cross-sectional shape of the positioning part.

Wherein the container runs through the base from the top surface.

A method for making an electrical contact device of the present invention is characterized in that it comprises the following steps:

a. preparing a base, the base has a top surface and a bottom surface;

b. etching a recessed first space from the top surface of the base;

c. Perform photoresist forming and micro-electroforming processes on the first space and the top surface of the base, so that the base is formed with a plurality of probes and multi-layer sacrificial layers, each probe has a first end and a first end two ends, the second end has a contact portion;

d. Etching a cavity on the bottom surface of the base, the position of the cavity corresponds to the bottom of the second ends of the probes; and

e. removing each of the sacrificial layers, each of the probes can be formed on the base, the first end of each of the probes is located on the base, and the second end of each of the probes is facing the cavity extend.

The pedestal can be made of silicon material, SOI pedestal, dielectric pedestal, or a pedestal with dielectric material on its surface.

Wherein after the step b, a dielectric material can be pre-laid on the surface where the base and each of the probes are combined to keep each of the probes in an insulating state.

Wherein in the step d, a first wall surface is etched from the top surface of the base by using a first etching process, and a second wall surface is etched from the bottom surface of the base by a second etching process, and the The base forms the cavity, and the first wall protrudes from the second wall.

The etching process in step b can also be replaced by laser processing.

Thus, the present invention can utilize the structure that the probes and the base are combined with each other, so that the structural strength of the overall electrical contact device is better, so that the probes are less likely to be damaged during long-term repeated test work, and the electrical contacts The purpose of making sexual contact devices less prone to failure.

Description of drawings

Below, a number of preferred embodiments are listed in conjunction with the accompanying drawings, in order to describe the structure and effect of the present invention in detail, wherein the brief description of each drawing used is as follows, wherein:

Fig. 1 is the perspective view of the first preferred embodiment of the present invention;

Fig. 2 is the sectional view of 2-2 section line in Fig. 1;

Fig. 3 is the method schematic diagram of the first preferred embodiment of the present invention;

Fig. 4 is the method schematic diagram of the first preferred embodiment of the present invention;

Fig. 5 is the method schematic diagram of the first preferred embodiment of the present invention;

Fig. 6 is the method schematic diagram of the first preferred embodiment of the present invention;

Fig. 7 is the method schematic diagram of the first preferred embodiment of the present invention;

Fig. 8 is the method schematic diagram of the first preferred embodiment of the present invention;

Fig. 9 is another implementation aspect of the first preferred embodiment of the present invention;

Fig. 10 is a schematic partial cross-sectional view of the second preferred embodiment of the present invention, mainly showing the state that the probe and the base are combined with each other;

Fig. 11 is a partial cross-sectional schematic view of the third preferred embodiment of the present invention, mainly showing the state of the probe and the base combined with each other;

Fig. 12 is a partial cross-sectional schematic view of the fourth preferred embodiment of the present invention, mainly showing the state that the probe and the base are combined with each other;

Fig. 13 is another implementation aspect of the fourth preferred embodiment of the present invention;

Fig. 14 is another implementation aspect of the fourth preferred embodiment of the present invention;

Fig. 15 is a partial cross-sectional schematic view of the fifth preferred embodiment of the present invention, mainly showing the state of the probe and the base combined with each other;

Fig. 16 is a partial cross-sectional schematic view of the sixth preferred embodiment of the present invention, mainly showing the state of the probe and the base combined with each other;

Fig. 17 is another implementation aspect of the sixth preferred embodiment of the present invention;

Fig. 18 is a partial perspective view of a seventh preferred embodiment of the present invention;

Figure 19 is a cross-sectional view of line 19-19 in Figure 18;

Fig. 20 is a partial perspective view of an eighth preferred embodiment of the present invention;

Fig. 21 is a sectional view of section line 21-21 in Fig. 20;

Fig. 22 is an implementation aspect of the eighth preferred embodiment of the present invention;

Fig. 23 is another implementation aspect of the eighth preferred embodiment of the present invention;

Fig. 24 is a partial perspective view of a ninth preferred embodiment of the present invention;

Fig. 25 is a cross-sectional view of line 25-25 in Fig. 24;

Fig. 26 is a partial perspective view of a tenth preferred embodiment of the present invention;

Fig. 27 is a sectional view taken along line 27-27 in Fig. 26 .

Figure 28 is a schematic diagram of a conventional electrical contact device; and

FIG. 29 is a schematic diagram of another conventional electrical contact device.

Detailed ways

Please refer to Fig. 1 and shown in Fig. 2, it is the electrical contact device 10 of the probe card provided by the first preferred embodiment of the present invention, the electrical contact device 10 comprises a base 20 and a plurality of probes 30; 20 is made of silicon, the base 20 has a top surface 21, the center of the top surface 21 has a recessed container 22, the container 22 forms four walls 23 adjacent to the top surface 21, two opposite wall surfaces 23 A plurality of positioning portions 24 are respectively provided, and each positioning portion 24 is recessed in each wall surface 23 and the top surface 21 ; a plurality of conductive circuits 25 are also provided in the base 20 .

Each of the probes 30 is a rod made of conductive material. Each probe 30 has a first end 31 and a second end 32. The cross-sectional shape of the first end 31 is similar to that of the positioning portion 24 of the base 20. The cross-sectional shape, the second end 32 has a generally vertical contact portion 33, the first end 31 of each probe 30 is embedded in each positioning portion 24, the probe 30 and the top surface 21 are flush with each other, and are connected to the conductive The lines 25 are electrically connected to each other, and each second end 32 extends toward the container 22 , and each contact portion 33 faces upward of the top surface 21 .

As shown in FIGS. 3 to 8 , it is a manufacturing method of an electrical contact device 10 according to a preferred embodiment of the present invention, which includes the following steps:

Step 1: As shown in FIG. 3 , prepare a base 20 made of silicon, so that the base 20 has a top surface 21 and a bottom surface 26 .

Step 2: As shown in FIG. 4 , form a concave first space 27 from the top surface 21 of the base 20 by etching or laser processing.

Step 3: As shown in FIG. 5 to FIG. 6 , perform photoresist forming and micro-electroforming processes on the first space 27 and the top surface 21 of the base 20 to form a plurality of probes 30 and multi-layer sacrificial layers on the base 20 28. Each probe 30 has a first end 31 and a second end 32, and the second end 32 has a contact portion 33; if you want to control the thickness of the probe 30 more precisely, you can further The surface of the probe 30 is precisely ground to make the surface of the probe 30 flat and ground to a desired thickness.

Step 4: As shown in FIG. 7 , etch a cavity 22 from the bottom surface 26 of the base 20 by isotropic dry etching or wet etching, the position of the cavity 22 corresponds to the position below the second end 32 of the probe 30 .

Step 5: As shown in FIG. 8 , remove each sacrificial layer 28 to form the structure of each probe 30 on the base 20 , the first end 31 of each probe 30 is arranged on the base 20 , and the probe 30 The second end 32 extends toward the tank 22 .

In addition to being made of silicon material, the base 20 can also use an SOI (Silicon on Insulator) base, a dielectric base, or a base with a dielectric material on the surface; and before electroforming each probe 30, also A dielectric material can be pre-laid on the surface where the base 20 and the probes 30 are combined to keep each probe 30 in an insulating state; the laying method of the dielectric material can be chemical deposition, or high-temperature furnace tubes such as silicon oxide , silicon nitride and other materials.

As shown in FIGS. 7 and 8 , since the opening size of the cavity 22 is not easy to control when the cavity 22 is etched from the bottom surface 30 of the base 20 , if the probes 30 are suspended in the cavity after the sacrificial layer 28 is removed 22 The distances between the walls 23 are all different, which will directly affect the consistency of the elasticity and rigidity of the probes 30 and the impedance of the probes 30; length, so that the elastically deformable lengths of the probes 30 are the same, thereby improving the consistency of the contact impedance of the probes 30. As shown in FIG. The first wall surface 36' of the range, at this time, the probe 30' will be clamped and fixed by the side wall of the positioning part 24', and the length of the probe 30' hanging in the cavity 22' starts from a second wall surface 37', Since the dimensional accuracy of the positioning portion 24 ′ is consistent with that of the probes 30 ′, it is relatively easy to control the length of each probe 30 ′ protruding from the cavity 22 ′.

Through the description of the above structure and manufacturing method, when the electrical contact device 10 is applied to a probe card (not shown in the figure), the contact portions 33 of each probe 30 are in contact with each pad of a chip, and the chip is The force of pressing down will push the second end 32 of each probe 30, so that the second end 32 of each probe 30 will move towards the direction of the reservoir 22, and the body of the probe 30 will be curved, and the second end 32 of each probe 30 will be bent. One end 31 is embedded in each positioning part 24 of the base 20, and each probe 30 can have a predetermined elasticity, and each solder pad of the chip and each probe 30 can abut against each other reliably; at the same time, using the positioning part 24 Combined with the structure of the probe 30, the contact area between the probe 30 and the base 20 is increased, and the parts that can withstand stress are increased. After a long time and multiple times, each probe 30 is in contact with each pad. Afterwards, each first end 31 can still be firmly combined with each positioning portion 24 , and then the probe 30 and the base 20 are separated from each other.

Thus, the present invention can utilize the structure between the probe and the base to make the structural strength of the overall electrical contact device better, so that the probes are less likely to be damaged during long-term repeated test work, and The purpose of the electrical contact device is not easy to fail.

The structure in which the positioning part and the probes in the above embodiment are combined with each other can also be changed to other shapes, which can also achieve the purpose of the present invention; as shown in Figure 10, it is provided for the second preferred embodiment of the present invention The electrical contact device 40 of the present invention has the same main components as those of the first preferred embodiment, and is characterized in that: the base 41 has a convex portion 43 on the two sides of each positioning portion 42, and each convex portion 43 is in a convex shape. , and the two outer peripheral surfaces of the first end 45 of each probe 44 respectively have a concave portion 46, and each probe 44 is embedded in the positioning portion 42 in such a way that each concave portion 46 corresponds to each convex portion 43 of the base 41, so that The probe 44 is combined with the base 41 .

As shown in Figure 11, it is the electrical contact device 50 provided for the third preferred embodiment of the present invention, and its characteristic is that: the two side surfaces 56 of each positioning part 52 of the base 51 are respectively gradually expanding from the wall surface 53 Extend inwardly, and the cross-sectional shape of the first end 55 of each probe 54 corresponds to the cross-sectional shape of the positioning part 52, so that the first end 55 of the probe 54 can be embedded in the positioning part 52 along the two sides 56, and the probe The body of the needle 54 extends outward from the wall 53 .

As shown in Figure 12, it is the electrical contact device 60 provided for the fourth preferred embodiment of the present invention, and its characteristic is that: the base 61 forms a plurality of grooves 63 respectively on the two sides of the positioning part 62, and each groove The extending direction of 63 is roughly parallel to the top surface 64, and the outer periphery of each probe 65 has a plurality of fillets 66, and each probe 65 can be embedded in each groove 63 by each fillet 66, so that the probes 65 are arranged on the base 61 of the positioning portion 62; as shown in Figure 13 and Figure 14, the probe 65 'top or bottom surface can be added a convex wall 67', and the probe 65' embedded in the base 61 'positioning portion 62', That is to say, the bonding strength between the probe 65' and the base 61' can be increased; and the convex wall 67' on the bottom surface of the probe 65' can be formed by isotropic etching to form the outer space of the convex wall 67', and then It is formed by electroforming, and the convex wall 67' on the top surface can be formed by stacking photoresist forming and micro-electroforming process.

As shown in Figure 15, it is the electrical contact device 66 provided by the fifth preferred embodiment of the present invention. The cross-sectional shape of the positioning portion 67, so that the probe 68 can still be combined with the base 69 (provided that the irregular shapes of the probes cannot be too different from each other, so as not to affect the electrical specifications).

As shown in Figure 16 again, it is the electrical contact device 70 provided for the sixth preferred embodiment of the present invention, which is characterized in that the first end 72 of each probe 71 has a vertical fitting portion 73, and each The positioning portion 74 is recessed in the top surface 75, and the fitting portion 73 of each probe 71 is embedded in each positioning portion 74, so that the probe 71 can be combined with the base 76; and similarly, as shown in Figure 17, the probe The cross-sectional shape of the fitting part 73' of the needle 71' can also be substantially trapezoidal, and the cross-sectional shape of the positioning part 74' is roughly the same as the cross-sectional shape of the fitting part 73', and the probe 71' can also be connected to the base. Seats 76' fit into each other. In each probe structure provided by the present invention, since the contact parts are used to bond to the pads of the chip, the dimensional accuracy of the overall probe is within the allowable range, and the same micro-electroforming process can be used on a substrate. Independently manufacture the tip part, and then connect the tip part and the contact part. The electroforming method can be die casting, using the photoresist patterned opening as a mold for electroforming, and etching the tip-shaped opening on the substrate. Electroforming is performed, or chemical etching, precision machining, laser machining, electrical discharge machining and other processing methods are used to make the top of the contact part in a pointed shape.

In order to increase the bonding area between each probe and the base, and the structural strength of the probe, as shown in Figure 18 and Figure 19, an electrical contact device 400 for the probe card is provided for the seventh preferred embodiment of the present invention , its structure also includes a base 402 and at least one probe 403, characterized in that: the base 402 has at least one extension 404, each extension 404 is integrally formed on the wall 405 of the base 402 by etching, and each extension The part 404 has two sidewalls 406 spaced apart from each other, and extends from each positioning part 407 toward the direction of the container 408, and each probe 403 is arranged between each positioning part 407 and the two sidewalls 406 by a micro-electroforming process to increase the probe. The combined area of the needle 403 and the base 402, at the same time, utilize the material structure of the extension part 404 to make the structure of the probe 403 suspended on the tank 408 as a whole stronger; and if the base 402 is made of non-insulator material, the probe A dielectric layer (such as silicon dioxide) should be provided between the needle 403 and the base 402 and the extension 404 to insulate the probe 403 from the base 402 .

As shown in Figure 20 and Figure 21, it is the electrical contact device 500 of the eighth preferred embodiment of the present invention, its structure is roughly the same as that of the seventh preferred embodiment, and the feature is that the extension part 501 is elongated Extending from the positioning portion 502 toward the container 503, the probes 504 are electroformed on the top and bottom surfaces of the extension portion 501, and the top and bottom sides of each probe 504 are respectively provided with a raised wall portion 505, which can also be increased. structural strength of the probe 504; and as shown in FIG. 22 and FIG.

As shown in Figure 24 and Figure 25, it is the electrical contact device 600 of the ninth preferred embodiment of the present invention, its structure is roughly the same as that of the seventh preferred embodiment, and the feature is that the extension part 601 is a self-positioning part 602 The bottom side of the extension portion 601 extends toward the container 603 , and the probe 604 is disposed on the top surface of the extension portion 601 .

As shown in Fig. 26 and Fig. 27, it is the electrical contact device 700 of the tenth preferred embodiment of the present invention, its structure is roughly the same as that of the seventh preferred embodiment, and the probes 701 are located on both sides of the extension part 702 Between the walls 703, the characteristic is that a conductive part 705 is provided between the outer circumference of the two side walls 703 and the positioning part 704. Therefore, in addition to the probe 701 can be used for signal transmission, the conductive part 705 can be used as a grounding purpose. This isolates noise and increases the bandwidth of signal transmission.

Claims (26)

1. An electrical contact device for a probe card, characterized in that it comprises: A base, the base has a surface, and a receptacle recessed in the surface, the receptacle forms at least one wall adjacent to the surface, and at least one positioning portion is provided on the walls; and At least one probe, each of the probes includes a first end and a second end, each of the first ends is arranged on each positioning portion of the base, and each of the second ends extends toward the container. 2 . The electrical contact device for a probe card according to claim 1 , wherein the positioning portion is recessed in the wall surface and the top surface. 3 . 3. The electrical contact device for a probe card according to claim 2, wherein at least one convex portion is formed on the side of the base corresponding to each of the positioning portions, and the first of each of the probes The end has at least one concave portion, and the probe is embedded in the positioning portion with each concave portion corresponding to each convex portion of the base. 4 . The electrical contact device for a probe card according to claim 2 , wherein the cross-sectional shape of the first end of each probe corresponds to the cross-sectional shape of each positioning portion. 5. The electrical contact device for a probe card according to claim 2, wherein at least one groove is formed on the side of the base corresponding to each positioning portion, and the extending direction of each groove is parallel to The top surface and the periphery of each of the probes have at least one fillet, and each of the probes can be inserted into each of the grooves by using each of the fillets, so that each of the probes is arranged on the base. 6. The electrical contact device for a probe card according to claim 5, wherein a convex wall is provided on the top or bottom surface of each of the probes, and the extending direction of the convex wall is the same as that of each of the molding strips, The convex wall is embedded in the groove of the base. 7. The electrical contact device for a probe card according to claim 2, wherein the cross-sectional shape of the positioning portion is irregular, and the cross-sectional shape of each probe corresponds to that of the positioning portion Section shape. 8 . The electrical contact device of a probe card according to claim 1 , wherein the cavity penetrates the base from the top surface. 9. The electrical contact device for a probe card according to claim 1, wherein the cavity of the base forms a first wall and a second wall, and the second wall protrudes from the first wall a wall. 10. The electrical contact device for a probe card according to claim 1, wherein the base further has at least one extension portion, each of the extension portions extends from each of the positioning portions toward the direction of the cavity, each The probes are arranged on each of the positioning parts and each of the extension parts. 11 . The electrical contact device for a probe card according to claim 10 , wherein each of the extensions has two side walls spaced apart from each other, and each of the probes is disposed between the two side walls. 12. The electrical contact device for a probe card according to claim 10, wherein each of the extension parts is arranged in each of the positioning parts and extends toward the direction of the cavity, and each of the probes is arranged in each of the positioning parts. The top or bottom surface of the extension. 13. The electrical contact device for a probe card according to claim 12, wherein a protrusion is further provided on the top side or the bottom side of each of the probes. 14 . The electrical contact device for a probe card according to claim 10 , wherein a conductive part is further provided between each of the extension parts and each of the positioning parts, and each of the conductive parts is used as a ground. 15. An electrical contact device for a probe card, characterized in that it comprises: a base, the base has a surface, and a receptacle recessed in the surface, the surface is provided with at least one positioning portion, and the positioning portion is also recessed in the surface; and At least one probe, each of the probes includes a first end and a second end, each of the first ends is arranged on each positioning portion of the base, and each of the second ends extends toward the container. 16. The electrical contact device for a probe card according to claim 15, wherein at least one convex portion is formed on the side of the base corresponding to each of the positioning portions, and the first of each of the probes The end has at least one concave portion, and the probe is embedded in the positioning portion with each concave portion corresponding to each convex portion of the base. 17. The electrical contact device of a probe card according to claim 15, wherein the cross-sectional shape of the first end of each probe corresponds to the cross-sectional shape of each positioning portion. 18. The electrical contact device for a probe card according to claim 15, wherein at least one groove is formed on the side of the base corresponding to each positioning portion, and the extending direction of each groove is parallel to The top surface and the periphery of each of the probes have at least one fillet, and each of the probes can be inserted into each of the grooves by using each of the fillets, so that each of the probes is arranged on the base. 19. The electrical contact device for a probe card according to claim 18, wherein a convex wall is provided on the top surface or bottom surface of each probe, and the extending direction of the convex wall is the same as that of each molding strip, The convex wall is embedded in the groove of the base. 20. The electrical contact device for a probe card according to claim 15, wherein the cross-sectional shape of the positioning portion is irregular, and the cross-sectional shape of each probe corresponds to that of the positioning portion Section shape. 21. The electrical contact device for a probe card according to claim 15, wherein the cavity penetrates the base from the top surface. 22. A method for making an electrical contact device, comprising the following steps: a. preparing a base, the base has a top surface and a bottom surface; b. etching a recessed first space from the top surface of the base; c. Perform photoresist forming and micro-electroforming processes on the first space and the top surface of the base, so that the base is formed with a plurality of probes and multi-layer sacrificial layers, each probe has a first end and a first end two ends, the second end has a contact portion; d. Etching a cavity on the bottom surface of the base, the position of the cavity corresponds to the bottom of the second ends of the probes; and e. removing each of the sacrificial layers, each of the probes can be formed on the base, the first end of each of the probes is located on the base, and the second end of each of the probes is facing the cavity extend. 23. The manufacturing method of an electrical contact device according to claim 22, wherein the base is made of available silicon material, SOI base, dielectric base, or a base with a dielectric material on the surface made by. 24. The manufacturing method of the electrical contact device according to claim 22, wherein after the step b, a dielectric material can be pre-laid on the surface where the base and each of the probes are combined, so that Each of the probes remains insulated. 25. The manufacturing method of an electrical contact device according to claim 22, wherein in the step d, a first wall is etched from the bottom surface of the base by a first etching process, and then a first wall is etched out by a first etching process. The second etching process etches a second wall surface from the top surface of the base, and makes the base form the cavity, the second wall protrudes from the first wall surface, and the second end of the probe is from the The second wall begins. 26. The method for manufacturing an electrical contact device according to claim 22, wherein the etching process in step b can also be replaced by laser processing.

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