CN100489454C - 激励振荡器主控振动的方法和系统 - Google Patents
激励振荡器主控振动的方法和系统 Download PDFInfo
- Publication number
- CN100489454C CN100489454C CNB2004100304361A CN200410030436A CN100489454C CN 100489454 C CN100489454 C CN 100489454C CN B2004100304361 A CNB2004100304361 A CN B2004100304361A CN 200410030436 A CN200410030436 A CN 200410030436A CN 100489454 C CN100489454 C CN 100489454C
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- Prior art keywords
- master control
- control vibration
- circuit
- vibrator
- signal
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- 238000000034 method Methods 0.000 title claims description 14
- 238000001514 detection method Methods 0.000 claims abstract description 26
- 230000005284 excitation Effects 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims 2
- 230000010355 oscillation Effects 0.000 abstract description 25
- 230000004913 activation Effects 0.000 abstract description 5
- 230000003213 activating effect Effects 0.000 abstract 1
- 230000000087 stabilizing effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 14
- 239000012071 phase Substances 0.000 description 9
- 230000003321 amplification Effects 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 5
- 238000003199 nucleic acid amplification method Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- RIUWBIIVUYSTCN-UHFFFAOYSA-N trilithium borate Chemical compound [Li+].[Li+].[Li+].[O-]B([O-])[O-] RIUWBIIVUYSTCN-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
Description
Claims (4)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003077155 | 2003-03-20 | ||
JP2003077155A JP4336946B2 (ja) | 2003-03-20 | 2003-03-20 | 回転角速度の測定方法および装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1532524A CN1532524A (zh) | 2004-09-29 |
CN100489454C true CN100489454C (zh) | 2009-05-20 |
Family
ID=32821371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100304361A Expired - Lifetime CN100489454C (zh) | 2003-03-20 | 2004-03-19 | 激励振荡器主控振动的方法和系统 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7089793B2 (zh) |
EP (1) | EP1460380B1 (zh) |
JP (1) | JP4336946B2 (zh) |
CN (1) | CN100489454C (zh) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7370531B2 (en) * | 2004-01-20 | 2008-05-13 | Ngk Insulators, Ltd. | Detection circuits, detection method and systems of measuring physical quantities |
JP4930253B2 (ja) * | 2006-08-02 | 2012-05-16 | セイコーエプソン株式会社 | 駆動装置、物理量測定装置及び電子機器 |
US7849744B2 (en) | 2006-08-02 | 2010-12-14 | Seiko Epson Corporation | Driving device, physical quantity measurement device, and electronic instrument |
JP2008089577A (ja) | 2006-09-08 | 2008-04-17 | Seiko Epson Corp | 駆動装置、物理量測定装置及び電子機器 |
JP5034808B2 (ja) | 2006-10-17 | 2012-09-26 | セイコーエプソン株式会社 | 駆動装置、物理量測定装置及び電子機器 |
JP5200491B2 (ja) * | 2006-11-06 | 2013-06-05 | セイコーエプソン株式会社 | 駆動装置、物理量測定装置及び電子機器 |
US7895894B2 (en) | 2006-11-06 | 2011-03-01 | Seiko Epson Corporation | Driver device, physical quantity measuring device, and electronic instrument |
US8026771B2 (en) | 2006-11-27 | 2011-09-27 | Seiko Epson Corporation | Driver device, physical quantity measuring device, and electronic instrument |
JP5136016B2 (ja) | 2006-11-27 | 2013-02-06 | セイコーエプソン株式会社 | 駆動装置、物理量測定装置及び電子機器 |
US7692506B2 (en) | 2007-08-01 | 2010-04-06 | Seiko Epson Corporation | Oscillation driver device, physical quantity measuring device, and electronic instrument |
US20100206073A1 (en) * | 2007-09-25 | 2010-08-19 | Rohm Co., Ltd | Angular velocity detecting device and manufacturing method of the same |
US8265308B2 (en) | 2007-12-07 | 2012-09-11 | Motorola Mobility Llc | Apparatus including two housings and a piezoelectric transducer |
US8395587B2 (en) * | 2007-12-21 | 2013-03-12 | Motorola Mobility Llc | Haptic response apparatus for an electronic device |
JP2010190766A (ja) | 2009-02-19 | 2010-09-02 | Seiko Epson Corp | 発振駆動装置、物理量測定装置及び電子機器 |
US8710599B2 (en) | 2009-08-04 | 2014-04-29 | Fairchild Semiconductor Corporation | Micromachined devices and fabricating the same |
GB201005875D0 (en) | 2010-04-08 | 2010-05-26 | Silicon Sensing Systems Ltd | Sensors |
KR101904178B1 (ko) | 2010-09-18 | 2018-10-04 | 페어차일드 세미컨덕터 코포레이션 | 단일 구동 모드를 가진 미세기계화 모노리식 3축 자이로스코프 |
CN103221779B (zh) | 2010-09-18 | 2017-05-31 | 快捷半导体公司 | 微机械整体式六轴惯性传感器 |
DE112011103124T5 (de) | 2010-09-18 | 2013-12-19 | Fairchild Semiconductor Corporation | Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen |
US9278845B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope Z-axis electrode structure |
CN103221332B (zh) | 2010-09-18 | 2015-11-25 | 快捷半导体公司 | 减小微机电系统上的应力的封装 |
CN103221333B (zh) | 2010-09-18 | 2017-05-31 | 快捷半导体公司 | 多晶片mems封装 |
CN103221795B (zh) | 2010-09-20 | 2015-03-11 | 快捷半导体公司 | 包括参考电容器的微机电压力传感器 |
KR101311966B1 (ko) | 2010-09-20 | 2013-10-14 | 페어차일드 세미컨덕터 코포레이션 | 감소된 션트 커패시턴스를 갖는 관통 실리콘 비아 |
US9062972B2 (en) | 2012-01-31 | 2015-06-23 | Fairchild Semiconductor Corporation | MEMS multi-axis accelerometer electrode structure |
US8978475B2 (en) | 2012-02-01 | 2015-03-17 | Fairchild Semiconductor Corporation | MEMS proof mass with split z-axis portions |
JP5729323B2 (ja) * | 2012-02-09 | 2015-06-03 | 株式会社デンソー | 自励共振回路 |
KR102048393B1 (ko) * | 2012-04-03 | 2019-11-25 | 페어차일드 세미컨덕터 코포레이션 | 정밀한 직각 위상 변이기 |
US8754694B2 (en) * | 2012-04-03 | 2014-06-17 | Fairchild Semiconductor Corporation | Accurate ninety-degree phase shifter |
US8742964B2 (en) | 2012-04-04 | 2014-06-03 | Fairchild Semiconductor Corporation | Noise reduction method with chopping for a merged MEMS accelerometer sensor |
US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
KR102058489B1 (ko) | 2012-04-05 | 2019-12-23 | 페어차일드 세미컨덕터 코포레이션 | 멤스 장치 프론트 엔드 전하 증폭기 |
US9069006B2 (en) | 2012-04-05 | 2015-06-30 | Fairchild Semiconductor Corporation | Self test of MEMS gyroscope with ASICs integrated capacitors |
EP2647955B8 (en) | 2012-04-05 | 2018-12-19 | Fairchild Semiconductor Corporation | MEMS device quadrature phase shift cancellation |
EP2647952B1 (en) | 2012-04-05 | 2017-11-15 | Fairchild Semiconductor Corporation | Mems device automatic-gain control loop for mechanical amplitude drive |
KR101999745B1 (ko) | 2012-04-12 | 2019-10-01 | 페어차일드 세미컨덕터 코포레이션 | 미세 전자 기계 시스템 구동기 |
US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
DE102013014881B4 (de) | 2012-09-12 | 2023-05-04 | Fairchild Semiconductor Corporation | Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien |
KR20140123259A (ko) * | 2013-04-12 | 2014-10-22 | 삼성전기주식회사 | 자가발진 회로 및 그 방법 |
JP6032243B2 (ja) * | 2014-05-23 | 2016-11-24 | 横河電機株式会社 | 電流電圧変換回路及び自励発振回路 |
JP6570428B2 (ja) * | 2015-11-09 | 2019-09-04 | セイコーエプソン株式会社 | 物理量検出装置、電子機器および移動体 |
CN107104637B (zh) * | 2016-02-19 | 2021-03-12 | 横河电机株式会社 | 自振荡电路 |
CN110470291B (zh) * | 2019-09-04 | 2023-11-24 | 中国海洋大学 | 一种mems谐振式陀螺仪接口电路与测控系统 |
CN113296397B (zh) * | 2021-07-27 | 2021-10-29 | 中国人民解放军国防科技大学 | 基于参数激励的陀螺仪快速起振的方法和装置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3805592A (en) * | 1970-08-20 | 1974-04-23 | Itt | Densitometer |
US4020330A (en) * | 1976-05-03 | 1977-04-26 | International Telephone And Telegraph Corporation | Densitometer |
US5365768A (en) * | 1989-07-20 | 1994-11-22 | Hitachi, Ltd. | Sensor |
JP3235006B2 (ja) * | 1993-10-28 | 2001-12-04 | 日本プレシジョン・サーキッツ株式会社 | 発振用集積回路 |
JPH0933262A (ja) * | 1995-07-25 | 1997-02-07 | Nikon Corp | 励振駆動回路及び方法並びにこれを用いた圧電振動角速度計 |
US5630216A (en) * | 1994-09-06 | 1997-05-13 | The Regents Of The University Of California | Micropower RF transponder with superregenerative receiver and RF receiver with sampling mixer |
JP3739492B2 (ja) | 1996-02-21 | 2006-01-25 | 富士通株式会社 | 音叉型圧電振動ジャイロ |
JPH10221083A (ja) * | 1997-02-05 | 1998-08-21 | Murata Mfg Co Ltd | 振動型ジャイロ装置 |
JP3718786B2 (ja) * | 1997-02-17 | 2005-11-24 | 日本航空電子工業株式会社 | 振動ジャイロ |
JP3697847B2 (ja) * | 1997-08-21 | 2005-09-21 | ソニー株式会社 | 電圧制御発振回路 |
JP3999377B2 (ja) | 1997-11-04 | 2007-10-31 | 日本碍子株式会社 | 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法 |
DE19811025B4 (de) | 1998-03-13 | 2004-04-15 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Mechanischer Oszillator und Verfahren zum Erzeugen einer mechanischen Schwingung |
KR20000053591A (ko) * | 1999-01-25 | 2000-08-25 | 사토 요시하루 | 초음파센서를 사용하여 검출대상으로서의 용기내의 액체를검출하는 시스템 및 방법 |
JP4361174B2 (ja) * | 1999-09-16 | 2009-11-11 | セイコーエプソン株式会社 | 振動型ジャイロスコープ |
DE10046958B4 (de) * | 1999-09-27 | 2009-01-02 | Denso Corp., Kariya-shi | Kapazitive Vorrichtung zum Erfassen einer physikalischen Grösse |
US6445195B1 (en) | 2000-08-02 | 2002-09-03 | The Charles Stark Draper Laboratory, Inc. | Drive feedthrough nulling system |
US6510737B1 (en) * | 2000-09-15 | 2003-01-28 | Bei Technologies, Inc. | Inertial rate sensor and method with improved tuning fork drive |
JP4449262B2 (ja) | 2001-07-09 | 2010-04-14 | セイコーエプソン株式会社 | 振動子を用いた測定方法、測定装置および振動子の駆動装置 |
JP2003032039A (ja) * | 2001-07-16 | 2003-01-31 | Toyo Commun Equip Co Ltd | 圧電発振回路 |
-
2003
- 2003-03-20 JP JP2003077155A patent/JP4336946B2/ja not_active Expired - Lifetime
-
2004
- 2004-03-17 US US10/803,176 patent/US7089793B2/en not_active Expired - Lifetime
- 2004-03-19 EP EP04251600.5A patent/EP1460380B1/en not_active Expired - Lifetime
- 2004-03-19 CN CNB2004100304361A patent/CN100489454C/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1460380B1 (en) | 2017-08-23 |
CN1532524A (zh) | 2004-09-29 |
EP1460380A1 (en) | 2004-09-22 |
US20040182184A1 (en) | 2004-09-23 |
JP2004286503A (ja) | 2004-10-14 |
US7089793B2 (en) | 2006-08-15 |
JP4336946B2 (ja) | 2009-09-30 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: SEIKO EPSON CORP. Free format text: FORMER OWNER: NGK INSULATORS LTD.; APPLICANT Effective date: 20081121 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20081121 Address after: Tokyo, Japan Applicant after: Seiko Epson Corp. Address before: Nagoya Prefecture, Aichi Prefecture, Japan Applicant before: NGK INSULATORS, Ltd. Co-applicant before: Seiko Epson Corp. |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CX01 | Expiry of patent term |
Granted publication date: 20090520 |
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CX01 | Expiry of patent term |