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CN100465850C - Laser Power Feedback Circuit - Google Patents

Laser Power Feedback Circuit Download PDF

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CN100465850C
CN100465850C CNB2005100354825A CN200510035482A CN100465850C CN 100465850 C CN100465850 C CN 100465850C CN B2005100354825 A CNB2005100354825 A CN B2005100354825A CN 200510035482 A CN200510035482 A CN 200510035482A CN 100465850 C CN100465850 C CN 100465850C
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CN1885222A (en
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高云峰
刘国峰
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Shenzhen Hans Laser Technology Co Ltd
Han s Laser Technology Co Ltd
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Abstract

一种该激光功率反馈电路,使用减法器或者使用加法器,把激光输出的功率信号和D/A发出的用户编辑波形信号Vr做减法或加法,并把所做减法结果或者加法结果转化为电流,把该电流通过电流放大器放大后,与恒频的锯齿电流比较后得出PWM控制脉冲序列,或把该放大的电流信号转化为电压信号,并将转化后得到的该电压信号与恒频锯齿电压比较从而得出PWM控制脉冲序列,PWM控制脉冲序列经PWM整形电路整形后,作为放电模块电路的驱动信号,其中,使用加法器时需将所述激光输出的功率信号和所述D/A发出的用户编辑波形信号Vr中的任一信号倒相。放大器采用了电流放大器,减法器是零增益,系统使用一般的中速半导体器件,对用户编辑的能量波形能进行很好的跟踪。

Figure 200510035482

A laser power feedback circuit that uses a subtractor or an adder to subtract or add the power signal output by the laser and the user-edited waveform signal Vr sent by the D/A, and convert the result of the subtraction or addition into a current After the current is amplified by the current amplifier, the PWM control pulse sequence is obtained after comparing with the constant frequency sawtooth current, or the amplified current signal is converted into a voltage signal, and the converted voltage signal is combined with the constant frequency sawtooth The voltage is compared to obtain the PWM control pulse sequence. After the PWM control pulse sequence is shaped by the PWM shaping circuit, it is used as the driving signal of the discharge module circuit. When using the adder, the power signal output by the laser and the D/A Any one of the emitted user-edited waveform signals Vr is inverted. The amplifier adopts a current amplifier, the subtractor is a zero gain, and the system uses a general medium-speed semiconductor device, which can track the energy waveform edited by the user very well.

Figure 200510035482

Description

激光功率反馈电路 Laser Power Feedback Circuit

技术领域 technical field

本发明涉及激光加工领域,特别是功率反馈型激光加工设备的激光功率反馈电路。The invention relates to the field of laser processing, in particular to a laser power feedback circuit of power feedback laser processing equipment.

背景技术 Background technique

功率反馈型激光加工设备一般需要输出高精度,高功率的可控激光,激光的光能是由电能提供的,若要精确的控制光能就要精确的控制电能。由于高质量激光束的电光转换效率普遍较低,例如:YAG激光器的电光转换效率一般在3%左右,这样,在大功率动态激光输出时(如焊接,切割),要求电能输出的峰值在0到数十,数百千瓦甚至兆瓦级动态工作。这样就要求控制电路能高速,实时的捕捉到激光的实时能量输出与设定能量的差别,并反馈到控制电路,及时修正电能的供给,达到实时能量输出精确地按用户要求的能量波形输出。Power feedback laser processing equipment generally needs to output a high-precision, high-power controllable laser. The light energy of the laser is provided by electric energy. To accurately control the light energy, it is necessary to accurately control the electric energy. Because the electro-optical conversion efficiency of high-quality laser beams is generally low, for example, the electro-optical conversion efficiency of YAG lasers is generally about 3%. In this way, when high-power dynamic laser output (such as welding, cutting), the peak value of electric energy output is required to be at 0 To dozens, hundreds of kilowatts or even megawatts dynamic work. In this way, the control circuit is required to capture the difference between the real-time energy output of the laser and the set energy at high speed in real time, and feed back to the control circuit to correct the supply of electric energy in time, so as to achieve the real-time energy output and accurately follow the energy waveform output required by the user.

在功率反馈型激光加工设备中,特别是大功率脉冲激光加工设备中的电能到激光能量的反馈控制电路一般需要解决以下几个问题:In power feedback laser processing equipment, especially in high-power pulse laser processing equipment, the feedback control circuit from electric energy to laser energy generally needs to solve the following problems:

1.激光能量输出静态及动态的精确.精细要求,所带来的电能控制问题。1. The static and dynamic precision and precision requirements of laser energy output, and the power control problems brought about.

2.激光能量输出波形的任意性,稳定性要求,所带来的电能控制问题。2. The arbitrariness of the laser energy output waveform, the stability requirements, and the power control problems brought about.

3电路的稳定性,可靠性问题。3 circuit stability, reliability issues.

常用控制方式如图1所示。Commonly used control methods are shown in Figure 1.

泵浦灯Y1的电能由Q2,D3,L2,D2组成的buck放电模块供给。M1检测到的激光功率信号经IC1放大后在IC2比较放大器与用户波形比较,直接得出BUCK的开关驱动信号,达到能量校正的目的。这种控制方法存在着:1、能量波形粗糙;2、能量输出不够精细;3能量输出的前后次波动大等问题。给激光精细加工带来障碍,如:能量波形粗糙在焊接中所导致的焊点不够光滑,能量波动所引起的前后焊点不一致。The electric energy of the pump lamp Y1 is supplied by the buck discharge module composed of Q2, D3, L2, and D2. The laser power signal detected by M1 is amplified by IC1 and then compared with the user's waveform by the comparison amplifier of IC2, and the switch drive signal of BUCK is obtained directly to achieve the purpose of energy correction. This control method has the following problems: 1. The energy waveform is rough; 2. The energy output is not fine enough; 3. The energy output fluctuates greatly before and after. It brings obstacles to laser fine processing, such as: the solder joints caused by rough energy waveforms during welding are not smooth enough, and the front and rear solder joints caused by energy fluctuations are inconsistent.

激光加工属于较前沿的高科技领域,国内外从事激光加工行业的公司都在从事此方面研究,激光功率反馈控制的方法成为一个较难解决的问题。Laser processing belongs to the cutting-edge high-tech field. Companies engaged in laser processing industry at home and abroad are engaged in research in this area. The method of laser power feedback control has become a difficult problem to solve.

发明内容 Contents of the invention

本发明的目的:提供一种全新的激光功率反馈控制电路,以获得精确,精细,稳定可靠的可控激光能量输出。此控制方法不仅克服了现有技术所存在的问题,且将现有的激光能量输出提到一个新的水平。The purpose of the present invention is to provide a brand-new laser power feedback control circuit to obtain accurate, fine, stable and reliable controllable laser energy output. This control method not only overcomes the problems existing in the prior art, but also raises the existing laser energy output to a new level.

本发明所采用的技术方案是:该激光功率反馈电路,使用减法器或者使用加法器,把激光输出的功率信号和D/A发出的用户编辑波形信号Vr做减法或加法,并把所做减法结果或者加法结果转化为电流,把该电流通过电流放大器放大后,与恒频的锯齿电流比较后得出PWM控制脉冲序列,或把该放大的电流信号转化为电压信号,并将转化后得到的该电压信号与恒频锯齿电压比较从而得出PWM控制脉冲序列,PWM控制脉冲序列经PWM整形电路整形后,作为放电模块电路的驱动信号,其中,使用加法器时需将所述激光输出的功率信号和所述D/A发出的用户编辑波形信号Vr中的任一信号倒相。The technical solution adopted in the present invention is: the laser power feedback circuit uses a subtractor or an adder to subtract or add the power signal output by the laser and the user-edited waveform signal Vr sent by the D/A, and perform the subtraction The result or the addition result is converted into a current, the current is amplified by the current amplifier, and compared with the constant frequency sawtooth current to obtain a PWM control pulse sequence, or the amplified current signal is converted into a voltage signal, and the converted The voltage signal is compared with the constant-frequency sawtooth voltage to obtain the PWM control pulse sequence. After the PWM control pulse sequence is shaped by the PWM shaping circuit, it is used as the driving signal of the discharge module circuit. When using the adder, the power output by the laser needs to be The signal is inverted with any signal in the user-edited waveform signal Vr sent by the D/A.

本发明的优点是:The advantages of the present invention are:

1.电路抗噪声能力强。1. The circuit has strong anti-noise ability.

2.实现了对能量的精确控制。2. Accurate control of energy is realized.

3.可实现能量的精细输出,3. It can realize the fine output of energy,

4.控制电路对激光电源的适用性宽,适用于任何单端PWM控制拓扑。4. The control circuit has wide applicability to laser power supply and is suitable for any single-ended PWM control topology.

5.整个功率反馈电路的设计简洁易用,且抗噪声能力强。5. The design of the entire power feedback circuit is simple and easy to use, and has strong anti-noise ability.

6.系统的动态很快,对用户编辑的能量波形适用性好。6. The dynamics of the system are fast, and the applicability to the energy waveform edited by the user is good.

7.调试好的电路,稳定可靠。7. The debugged circuit is stable and reliable.

附图说明 Description of drawings

下面结合附图和实施例对本发明进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

图1为与本发明相关的现有的激光功率反馈电路。Fig. 1 is an existing laser power feedback circuit related to the present invention.

图2为本发明激光功率反馈电路的原理示意图。Fig. 2 is a schematic diagram of the principle of the laser power feedback circuit of the present invention.

图3为本发明激光功率反馈电路中PWM生成电路中锯齿波发生器的电流Ir和电流比较信号Ic比较后得到PWM关断时刻的电流示意图。FIG. 3 is a schematic diagram of the current at the moment when the PWM is turned off after comparing the current Ir of the sawtooth wave generator in the PWM generation circuit in the laser power feedback circuit of the present invention with the current comparison signal Ic.

具体实施方式 Detailed ways

图2为本发明激光功率反馈电路的实施原理图,如图中所示,C7,D3,Q2,D2,L2组成BUCK放电电路,Y1为泵浦灯,M1为光电检测二极管,IC1为放大器。Fig. 2 is the implementation schematic diagram of the laser power feedback circuit of the present invention, as shown in the figure, C7, D3, Q2, D2, L2 form the BUCK discharge circuit, Y1 is the pump lamp, M1 is the photoelectric detection diode, and IC1 is the amplifier.

M1检测到的光电流信号,经IC1,C2,R5,组成的放大器放大到一定的幅度。R5调节放大器的增益,C2为改善放大器频宽而设置。The photocurrent signal detected by M1 is amplified to a certain amplitude by the amplifier composed of IC1, C2 and R5. R5 adjusts the gain of the amplifier, and C2 is set to improve the bandwidth of the amplifier.

IC2为减法器电路,由R6,R2,R10,R9,R8,IC2,组成,D/A发出的用户编辑波形信号Vr经R9输入,IC1放大后的能量信号Vi由R2输入。在减法器IC2执行减法操作Vs=Vr-Vi.得到差值信号Vs。IC2 is a subtractor circuit, which is composed of R6, R2, R10, R9, R8, and IC2. The user-edited waveform signal Vr sent by D/A is input through R9, and the energy signal Vi amplified by IC1 is input through R2. The subtraction operation Vs=Vr-Vi is performed in the subtractor IC2 to obtain the difference signal Vs.

IC3为电流放大器,由IC3,R3,R4,C3,R1,C4组成。R4,C3,C4和R1组成的负反馈电路,维持着整个电路的稳定。Vs经R3后转为电流信号Vs/R3,并经电流放大器IC3,放大后得到电流比较信号Ic。IC3 is a current amplifier consisting of IC3, R3, R4, C3, R1, and C4. The negative feedback circuit composed of R4, C3, C4 and R1 maintains the stability of the whole circuit. After passing through R3, Vs is converted into current signal Vs/R3, and then amplified by current amplifier IC3 to obtain current comparison signal Ic.

PWM生成电路包括恒频锯齿波电流发生器,电流比较器,及波形整形电路。锯齿波发生器的电流Ir,和电流比较信号Ic比较后得到PWM关断时刻的电流如图3所示。可以得出,最大占空比Dmax=(Ton+Toff-Td)/(Ton+Toff),其中Ton为开通时间,Toff为关断时间,Td为死区时间。经比较器得到的Ton,Toff时间,PWM序列经PWM整形电路整形后作为放电模块(BUCK或其他拓扑)电路的驱动信号。The PWM generation circuit includes a constant frequency sawtooth wave current generator, a current comparator, and a waveform shaping circuit. The current Ir of the sawtooth wave generator is compared with the current comparison signal Ic to obtain the current at the moment when the PWM is turned off, as shown in Figure 3. It can be obtained that the maximum duty ratio Dmax=(Ton+Toff-Td)/(Ton+Toff), where Ton is the on-time, Toff is the off-time, and Td is the dead time. The Ton and Toff times obtained by the comparator, and the PWM sequence are shaped by the PWM shaping circuit as the driving signal of the discharge module (BUCK or other topology) circuit.

本发明激光功率反馈电路的优点为:The advantage of the laser power feedback circuit of the present invention is:

1.电路抗噪声能力强。减法器对共模噪声有很好的抑制作用,放大器工作在电流模式,对电压噪声不敏感。1. The circuit has strong anti-noise ability. The subtractor has a good suppression effect on common mode noise, and the amplifier works in current mode, which is insensitive to voltage noise.

2.实现了对能量的精确控制,在PWM生成上,直接使用了激光输出的功率信号和功率编程信号的减法结果,作为PWM生成关断时刻的依据,这样做几乎是一个一个PWM开关周期的电能送给激光器,从而精确的控制了激光的能量输出。2. The precise control of energy is realized. In PWM generation, the subtraction result of the power signal output by the laser and the power programming signal is directly used as the basis for the off-time of PWM generation. This is almost the time of each PWM switching cycle. Electric energy is sent to the laser, thus precisely controlling the energy output of the laser.

3.可实现能量的精细输出,PWM的开关周期是恒定的,可以任意设置的,PWM周期小到一定程度时,由于激光发生装置对能量的平滑作用,激光输出的能量波形几乎没有纹波。3. Fine energy output can be realized. The PWM switching period is constant and can be set arbitrarily. When the PWM period is small to a certain extent, the energy waveform of the laser output has almost no ripple due to the smoothing effect of the laser generator on the energy.

4.控制电路对激光电源的适用性宽,PWM控制信号的得来仅仅依据于用户编辑波形信号和激光能量输出信号,适用于任何单端PWM控制拓扑。4. The control circuit has wide applicability to the laser power supply. The PWM control signal is only based on the user-edited waveform signal and the laser energy output signal, and is applicable to any single-ended PWM control topology.

5.整个功率反馈电路的设计简洁易用,且抗噪声能力强。信号处理上使用了免调试的减法器,控制环路采用IC3的单电流环控制,使得控制电路在调试、应用时都变得很简单。根据一般的使用经验,控制峰值0到数百千瓦的激光电源,只采用了简单的屏蔽,信号没有采用电容滤波等措施,设计好的电路几乎是免调试的。5. The design of the entire power feedback circuit is simple and easy to use, and has strong anti-noise ability. The signal processing uses a subtractor without debugging, and the control loop adopts the single current loop control of IC3, which makes the debugging and application of the control circuit very simple. According to general use experience, only simple shielding is used to control the laser power supply with a peak value of 0 to hundreds of kilowatts, and the signal does not use capacitance filtering and other measures. The designed circuit is almost free of debugging.

6.系统的动态很快,对用户编辑的能量波形适用性好,放大器采用了电流放大器,减法器是零增益,因此信号处理上,系统使用一般的中速半导体器件,实现了信号的高速处理,系统设计上对噪声的抑制,可不必使用引起信号延时的电容、电感滤波手段,结合PWM的生成机理(一个一个PWM开关周期的电能送给激光器),使得系统的动态很快,对用户编辑的能量波形能在能量的幅值、时间上进行很好的跟踪。6. The dynamics of the system are very fast, and the applicability to the energy waveform edited by the user is good. The amplifier adopts a current amplifier, and the subtractor is zero gain. Therefore, in signal processing, the system uses general medium-speed semiconductor devices to realize high-speed signal processing. , the suppression of noise in the system design does not need to use capacitance and inductance filtering methods that cause signal delays, combined with the generation mechanism of PWM (the power is sent to the laser one by one PWM switching cycle), so that the dynamics of the system are very fast. The edited energy waveform can track the energy amplitude and time very well.

7.依据1,2,5,6项优点,调试好的电路,稳定可靠。7. Based on the advantages of 1, 2, 5, and 6, the debugged circuit is stable and reliable.

根据本发明激光功率反馈电路的原理,不难推断,信号处理上可以采用加法器电路,即把激光输出的功率信号和D/A发出的用户编辑波形信号Vr中的任一信号倒相后再采用加法器,也可以实现减法功能。According to the principle of the laser power feedback circuit of the present invention, it is not difficult to deduce that an adder circuit can be used in signal processing, that is, any signal in the power signal output by the laser and the user-edited waveform signal Vr sent by D/A is inverted and then Using an adder, the subtraction function can also be implemented.

在PWM的得来上使用电压比较器也可实现,即把比较电流信号Ic转化为电压信号RIc后,和锯齿波的电压信号比较,也可得到PWM控制序列。原理和电流比较器的原理相同,只是所有的电流信号改为电压信号。It can also be realized by using a voltage comparator on the PWM, that is, after converting the comparative current signal Ic into a voltage signal RIc, and comparing it with the voltage signal of the sawtooth wave, the PWM control sequence can also be obtained. The principle is the same as that of the current comparator, except that all current signals are changed to voltage signals.

Claims (3)

1. laser power feedback circuit, it is characterized in that: use subtracter or use totalizer, the user that the power signal of laser output and D/A are sent edits waveform signal Vr and does subtraction or addition, and doing subtraction result or addition results be converted into electric current, after this electric current amplified by current amplifier, draw PWM gating pulse sequence with the sawtooth current of constant frequency after relatively, or this amplified current signal is converted into voltage signal, and thereby this voltage signal that will obtain after will transforming and the comparison of constant frequency sawtooth voltage draw PWM gating pulse sequence, PWM gating pulse sequence is after the shaping of PWM shaping circuit, drive signal as the discharge module circuit, the user that the power signal and the described D/A of described laser output need be sent when wherein, using totalizer edits the arbitrary signal paraphase among the waveform signal Vr.
2. laser power feedback circuit according to claim 1, it is characterized in that: the method that the user that the power signal of described laser output and described D/A send edits the processing of waveform signal Vr is: use subtracter or totalizer, promptly the user that described D/A is sent edits subtraction result that the power signal of waveform signal Vr and laser output does or the addition results source signal as error control, wherein, when adopting adder circuit on the signal Processing, adopt totalizer again after needing the user that the power signal of described laser output and described D/A send edited arbitrary signal paraphase among the waveform signal Vr.
3. laser power feedback circuit according to claim 1, it is characterized in that: the getting of PWM gating pulse sequence is to use the current signal after the amplification and the sawtooth current of constant frequency relatively to get, or the voltage signal and the constant frequency sawtooth voltage that use the current signal after amplifying to be converted into relatively get, both can use current comparator, but also working voltage comparer.
CNB2005100354825A 2005-06-21 2005-06-21 Laser Power Feedback Circuit Expired - Fee Related CN100465850C (en)

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CN117293641B (en) * 2023-11-27 2024-03-01 深圳市通甪科技有限公司 Laser energy feedback circuit, laser energy feedback device and laser ablation instrument

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JPH1079549A (en) * 1996-07-12 1998-03-24 Ricoh Co Ltd Semiconductor laser control device
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