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CN100464087C - 耐磨组件的制备方法 - Google Patents

耐磨组件的制备方法 Download PDF

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CN100464087C
CN100464087C CNB2006100067026A CN200610006702A CN100464087C CN 100464087 C CN100464087 C CN 100464087C CN B2006100067026 A CNB2006100067026 A CN B2006100067026A CN 200610006702 A CN200610006702 A CN 200610006702A CN 100464087 C CN100464087 C CN 100464087C
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belt
vacuum chamber
chamber
bias voltage
gas
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CN1811221A (zh
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Y·王
R·魏
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Motors Liquidation Co
General Motors LLC
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General Motors Corp
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16G—BELTS, CABLES, OR ROPES, PREDOMINANTLY USED FOR DRIVING PURPOSES; CHAINS; FITTINGS PREDOMINANTLY USED THEREFOR
    • F16G5/00—V-belts, i.e. belts of tapered cross-section
    • F16G5/16—V-belts, i.e. belts of tapered cross-section consisting of several parts

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

本发明涉及一种对CVT皮带进行清洗和涂层的方法，包括预清洗步骤、氩气轰击步骤、粘结层沉积步骤和最终层沉积。

Description

耐磨组件的制备方法
发明领域
本发明涉及一种用于适当地涂覆组分以提高耐磨性的方法，尤其是，涉及适当地制造用于连续变速传动装置(CVT)的耐磨皮带的方法。
背景技术
多数现有的连续变速传动装置(CVT)使用推送带技术，其中由多个连续带支撑组件或底板。所述组件啮合一对槽轮，其中的一个是可动，以在输出与输入之间提供一个合适的比例。在运行过程中，上述连续带会彼此相对移动并相对底板组件发生移动。这些移动会在CVT中产生噪音。上述噪音通常被称为“皮带颤动(belt shudder)”，其是一种有害的震动，因而要求被消除掉。
皮带颤动在使用不久后就开始出现，所以一般是不能接受的。皮带颤动通常是由在最内侧的带和底板组件肩部之间产生的粘滑现象造成的。
发明内容
本发明的目的是提供一种用改善的工艺制备CVT用皮带或带的方法。
本发明的一个方面，皮带经电声波(electrosonically)去油。
本发明的另一个方面，去油后的皮带用去离子水漂洗。
本发明的另一个方面，皮带还用甲醇清洗。
本发明的另一个方面，也可以用水洗方法对皮带进行去油去污。
本发明的另一个方面，将皮带置于真空室内与高压电源连接的固定装置上。
本发明的再一个方面，对所述室进行减压以提供低气压并将氩气(Ar)导入该室中。
本发明的再一个方面，氩气在约15毫托的条件下导入真空槽。
本发明的再一个方面，皮带脉冲偏压约—4kV。
本发明的再一个方面，把硅烷(SiH4)气体导入到真空室中以代替氩气，同时偏压保持不变。
本发明的再一个方面，用乙炔(C2H2)气体代替硅烷气体，同时偏压仍旧保持不变。
本发明的再一个方面，本方法在偏压关闭并完成工序时在皮带上沉积了厚度约1-3μm的类金刚石碳涂层(DCL)。
附图说明
图1是连续变速传动装置使用的常规皮带的等距图。
图2是连续变速传动装置使用的一个底板组件的端视图。
图3是制备改善的连续变速传动带的部分工序的图示。
具体实施方式
连续变速传动装置(CVT)皮带或带10如图1所示，如本领域技术人员所知道的，皮带10是一个连续环。
图2表示用于CVT中的底板组件12。底板组件12带有锥形侧面14和16，以适于啮合常规滑轮或槽轮上的驱动表面。底板组件12有一对槽18和20，在槽内排列多个带10。带10用于保持底板适当的定位并使用在CVT中。在某些驱动条件或电力输送条件下，皮带10在槽18和20中滑动以至于槽的内表面22和24在某种情况下将与最内侧带10的内表面产生粘滑现象。
为了减小这种粘滑现象，处理皮带10以便在皮带10上生成合适的表面是合乎需要的。根据本发明，这种表面由被称为类金刚石碳氢(DLC)面的表面提供。DLC涂层是通过放电等离子体增强化学气相沉积法(PECVD)施加的。此方法包括几个步骤：(1)在真空处理前预清洗部件；(2)把部件放置于真空室中；(3)氩气轰击(sputtering)；(4)粘结层沉积；(5)类金刚石碳沉积；和(6)把部件从真空室中移出。
图3表示PECVD系统，包括真空室26、放置带10的固定装置28、供气系统30、电源32和真空泵34。
涂层工艺要求部件优选在55℃的5％工业除油剂溶液中和5％其他工业清洗剂溶液中进行超声波除油。CVT带10在每个30分钟清洗步骤后用去离子水进行漂洗。最后的清洗工序是用大量的(copious amounts of)甲醇对CVT带10进行漂洗。也可以用水洗法对皮带进行去油去污。
将CVT带10安置在真空室26中的固定装置28上，固定装置与高压电源32相联。带10放好后，通过真空泵34对真空室26进行减压。此方法的操作气压优选低于2×10-5托。一旦达到上述气压条件，把氩气(Ar)导入到真空室中直到气压达到约15毫托。偏置脉冲电压通过固定装置28施加到部件上。偏压优选在2000Hz下为—4kV。所用电压的脉宽约为20μsec。负的脉冲电压在部件周围产生辉光放电从而驱动离子从等离子体移动到部件上。
在这部分操作过程中，发生氩气轰击并最终除去表面氧化物，这些氧化物在预清洗工艺中不能被洗掉。氩气轰击后，把硅烷气体(SiH4)导入到真空室26中同时逐步排出氩气，同时偏压保持不变。硅(Si)粘结层沉积到每个皮带10上。当达到期望的优选为0.1-0.2μm的粘结层厚度时，逐步导入乙炔气体(C2H2)并关闭或排出硅烷(SiH4)气体，同时偏压保持不变。
在存在乙炔气体(C2H2)的条件下，在部件上沉积DLC涂层。当达到所期望的典型值为1-3μm的涂层厚度时，关闭偏压，完成此方法，真空室被恢复到常压后将皮带10从真空室中移出。
应注意到含硅(Si)的初始粘结层可以是SiC、Si3N4或SixNy。这些层是用硅烷(SiH4)加上乙炔(C2H2)或甲烷(CH4)、甲基硅烷(CH3)SiH3、二甲基硅烷(CH3)2SiH2、三甲基硅烷(CH3)3SiH和四甲基硅烷(CH3)4Si形成的。DLC可以用乙炔(C2H2)、甲烷(CH4)或其他含碳气体形成。DLC也可以包含其他元素如硅(Si)或金属例如钨(W)、铬(Cr)或钛(Ti)以增强耐磨性。
DLC沉积前后的表面参数用光学表面光度仪进行测定。带10表面的平均粗糙度Ra为0.47-0.59μm。涂层硬度在1500-3000Hv范围内，比皮带10的基体硬得多。由于涂层薄而且是通过PECVD法沉积而成，因而其与皮带10基体的粘结性比其他类型涂层如镀覆和热喷射要高得多。

Claims (1)

1.一种耐磨连续变速传动装置的皮带的制备方法，包括如下步骤：
(1)在55℃下在除油溶液中和在工业清洗剂溶液中对所述皮带进行预清洗；
(2)在每一个清洗步骤后对所述连续变速传动装置的皮带进行漂洗；
(3)用大量的甲醇对所述皮带进行清洗；
(4)把所述皮带放置在一个真空室内，并把真空室减压到预定值；
(5)在预定压力下，把氩气导入到所述室中；
(6)使用具有预定电压电平周期和周期时间的偏压对所述室和所述皮带实施脉冲；
(7)把硅烷气体导入所述真空室中，并清除所述氩气，同时所述偏压保持不变；
(8)把乙炔气体导入所述室中，并减少或排出所述硅烷气体，同时所述偏压保持不变；
(9)维持所述乙炔气体直到在所述带上沉积厚度为1-3μm的类金刚石碳氢涂层；
(10)除去所述偏压并把所述皮带从所述真空室中移出。
CNB2006100067026A 2005-01-20 2006-01-20 耐磨组件的制备方法 Expired - Fee Related CN100464087C (zh)

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US11/039,571 US20060159848A1 (en) 2005-01-20 2005-01-20 Method of making wear-resistant components

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CN103469205A (zh) * 2013-08-01 2013-12-25 合肥永信等离子技术有限公司 一种荷叶类金刚石膜的镀膜工艺
US9476485B2 (en) * 2014-03-14 2016-10-25 Ford Global Technologies, Llc Diamond-like carbon coating on chain guides and tensioning arms for internal combustion engines
US10526996B2 (en) 2016-08-10 2020-01-07 GM Global Technology Operations LLC Adhesion of thermal spray using compression technique

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