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CN100445199C - Preparation method of silicon nitride nanowire or nanoribbon powder material - Google Patents

Preparation method of silicon nitride nanowire or nanoribbon powder material Download PDF

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CN100445199C
CN100445199C CNB2006100375811A CN200610037581A CN100445199C CN 100445199 C CN100445199 C CN 100445199C CN B2006100375811 A CNB2006100375811 A CN B2006100375811A CN 200610037581 A CN200610037581 A CN 200610037581A CN 100445199 C CN100445199 C CN 100445199C
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谷云乐
刘应亮
曾文
徐子林
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Jinan University
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Abstract

本发明公开了一种低温制备氮化硅纳米线和纳米带粉体材料的方法,以SiCl4、NaN3和金属钠为原料,调控反应物配比,在400-500℃下反应,产物经过洗涤、过滤和干燥,即可分别得到氮化硅(Si3N4)纳米线和纳米带粉体材料。产物主要是β-Si3N4,含少量α-Si3N4,相对于SiCl4总产率90%以上。副产物为NaCl和少量氮气。氮化硅纳米线平均直径30nm,氮化硅纳米带宽40-80nm,厚度不超过20nm,平均长度约为500nm。本发明反应操作简单、安全,产物纯净,收率高。

Figure 200610037581

The invention discloses a method for preparing silicon nitride nanowire and nanobelt powder materials at low temperature. SiCl 4 , NaN 3 and metal sodium are used as raw materials, and the proportion of reactants is adjusted and reacted at 400-500°C. Washing, filtering and drying can respectively obtain silicon nitride (Si 3 N 4 ) nanowire and nanobelt powder materials. The product is mainly β-Si 3 N 4 , containing a small amount of α-Si 3 N 4 , and the total yield relative to SiCl 4 is more than 90%. By-products are NaCl and a small amount of nitrogen. The silicon nitride nanowire has an average diameter of 30nm, a silicon nitride nanometer bandwidth of 40-80nm, a thickness of no more than 20nm, and an average length of about 500nm. The reaction operation of the invention is simple and safe, the product is pure and the yield is high.

Figure 200610037581

Description

氮化硅纳米线或纳米带粉体材料的制备方法 Preparation method of silicon nitride nanowire or nanoribbon powder material

技术领域: Technical field:

本发明涉及氮化硅纳米线或纳米带粉体材料的制备方法。The invention relates to a method for preparing a silicon nitride nanowire or nanobelt powder material.

背景技术 Background technique

氮化硅陶瓷由于具有高比强、高比模、耐高温、抗氧化和耐磨损以及抗热震等优点,作为结构材料和功能材料具有广阔的应用前景。特别是在现代技术中经常遇到的高温、高速、强腐蚀介质的应用环境,使氮化硅材料还具有很多特殊的应用价值。虽然其应用范围不断扩大,但存在制备成本高、高温性能降低和固有的脆性等缺点,在很大程度上限制了它的应用。纳米氮化硅粉体制备以及后续开发的精细陶瓷制品,是世界各国竞相研究开发的热点。鉴于用纳米氮化硅粉体为原料烧结的陶瓷制品,在纳米结构层次(1~100nm)上控制陶瓷成分和结构,有利于充分发挥Si3N4陶瓷材料的潜在性能。因其颗粒粒直径极小、比表面积和化学活性能大,可显著降低材料的烧结致密化程度并节约能源,烧成收缩一致且晶粒均匀,缺陷小,所制备的结构部件的强度和可靠性也较高,并能克服脆性,具有良好的可加工性能。氮化硅一维纳米线和氮化硅纳米带,其物理机械性能又不同于一般的纳米颗粒,在提高陶瓷材料强度和韧性方面具有较大潜力。Due to the advantages of high specific strength, high specific modulus, high temperature resistance, oxidation resistance, wear resistance and thermal shock resistance, silicon nitride ceramics have broad application prospects as structural materials and functional materials. Especially in the application environment of high temperature, high speed and strong corrosive medium often encountered in modern technology, silicon nitride materials also have many special application values. Although its application range is expanding, its application is largely limited by the disadvantages of high preparation cost, reduced high-temperature performance, and inherent brittleness. The preparation of nano-silicon nitride powder and the subsequent development of fine ceramic products are hot spots in the research and development of countries all over the world. In view of the ceramic products sintered with nano-silicon nitride powder as raw material, controlling the composition and structure of ceramics at the nanostructure level (1-100nm) is conducive to giving full play to the potential performance of Si 3 N 4 ceramic materials. Because of its extremely small particle diameter, large specific surface area and chemical activity energy, it can significantly reduce the degree of sintering densification of materials and save energy. The firing shrinkage is consistent, the grains are uniform, and the defects are small. The strength and reliability of the prepared structural parts The toughness is also high, and it can overcome brittleness and has good machinability. Silicon nitride one-dimensional nanowires and silicon nitride nanoribbons have different physical and mechanical properties from ordinary nanoparticles, and have great potential in improving the strength and toughness of ceramic materials.

在自然界中没有发现天然的氮化硅。在过去的数十年里,对于氮化硅的合成的研究,已经发展了多种制备方法。比如碳热还原法、高温自蔓延燃烧法(HSH)、化学气相沉积(CVD)、有机先驱物热解等。此外,还有利用激光照射法从SiH2Cl2和NH3混合气体制备15-110nm Si3N4非晶颗粒,采用等离子体法使硅粉与N2反应制备粒径为20-30nm的α-Si3N4(48-77%)和β-Si3N4(20-39%)粉。在寻求低成本、大批量和快速合成高质量氮化硅纳米材料的研究进程中,一个倍受关注的研究课题,是探索通过四氯化硅(SiCl4)与不同氮源原料在低温下引发的快速反应来制备氮化硅纳米材料。例如,SiCl4与氨气(NH3)在热丝-流动反应器发生反应可以获得氮化硅粉体。类似地,六氟硅酸钠热分解产生四氟化硅(SiF4),在高温下与反应NH3或氮气反应可制备含α和β相的颗粒状、晶须、纤维等氮化硅材料。采用氮化镁(Mg3N2)作为固体氮源,在600℃密封釜中与SiCl4反应,可以制备出α-Si3N4纳米线。采用叠氮化钠作为固体氮源,在叠氮化钠稍过量的情况下,与SiCl4反应,可以制备出树枝状和短棒状氮化硅α和β相混合粉体。Native silicon nitride is not found in nature. In the past few decades, for the research on the synthesis of silicon nitride, various preparation methods have been developed. Such as carbothermal reduction, high temperature self-propagating combustion (HSH), chemical vapor deposition (CVD), pyrolysis of organic precursors, etc. In addition, there are 15-110nm Si 3 N 4 amorphous particles prepared from the mixed gas of SiH 2 Cl 2 and NH 3 by laser irradiation method , and α - Si 3 N 4 (48-77%) and β-Si 3 N 4 (20-39%) powder. In the process of seeking low-cost, high-volume and rapid synthesis of high-quality silicon nitride nanomaterials, a research topic that has attracted much attention is to explore the low-temperature initiation of silicon tetrachloride (SiCl 4 ) and different nitrogen source materials. Fast reaction to prepare silicon nitride nanomaterials. For example, silicon nitride powder can be obtained by reacting SiCl 4 with ammonia (NH 3 ) in a hot wire-flow reactor. Similarly, sodium hexafluorosilicate thermally decomposes to produce silicon tetrafluoride (SiF 4 ), which reacts with NH 3 or nitrogen at high temperature to prepare silicon nitride materials containing α and β phases, such as particles, whiskers, fibers, etc. . α-Si 3 N 4 nanowires can be prepared by using magnesium nitride (Mg 3 N 2 ) as a solid nitrogen source and reacting with SiCl 4 in a sealed kettle at 600°C. Using sodium azide as a solid nitrogen source, in the case of a slight excess of sodium azide, it can react with SiCl 4 to prepare dendritic and short rod-shaped silicon nitride α and β mixed powder.

《美国陶瓷会志》报道了在1680℃的(Si/Al/Mg/Y)熔体中生长β-Si3N4晶体的研究,并发现氮化硅生长速度和晶体长径比与这种熔体的组成有关。《先进材料》报道了采用SiCl4液体作为氮化硅纳米晶和纳米棒生长媒介,其中氮化硅α和β相晶种是由SiCl4与NaN3在大约670℃下现场合成的。中国发明专利申请CN1491885公开了一种氮化硅和碳化硅一维纳米结构及其制备方法,是以含硅20~80%金属合金粒子为催化剂并提供硅源,以含氮或碳的气体或固体为氮源和碳源,高温下在管式炉中氮化或碳化含硅合金粒子得到Si3N4一维纳米结构,其中在高温的管式炉中氮化或碳化含硅合金粒子的温度范围为1200-1600℃。另一项中国发明专利申请CN1562735公开了一种低温制备氮化硅粉体材料的方法,采用SiCl4作硅源、以NaN3作氮源,在不锈钢反应釜中进行化学交换反应,对反应产物经过清洗、抽滤、烘干,其化学反应式为:3SiCl4+12NaN3=Si3N4+12NaCl+16N2"Journal of the American Ceramic Society" reported the study of growing β-Si 3 N 4 crystals in (Si/Al/Mg/Y) melts at 1680 °C, and found that the growth rate of silicon nitride and the crystal aspect ratio were related to this depending on the composition of the melt. "Advanced Materials" reported the use of SiCl 4 liquid as a growth medium for silicon nitride nanocrystals and nanorods, in which the silicon nitride α and β phase seeds were synthesized on-site by SiCl 4 and NaN 3 at about 670 °C. Chinese invention patent application CN1491885 discloses a silicon nitride and silicon carbide one-dimensional nanostructure and its preparation method, which uses metal alloy particles containing 20-80% silicon as a catalyst and provides a silicon source, and uses nitrogen or carbon-containing gas or The solid is the source of nitrogen and carbon, and the Si 3 N 4 one-dimensional nanostructure is obtained by nitriding or carbonizing the silicon-containing alloy particles in a tube furnace at high temperature. The temperature range is 1200-1600°C. Another Chinese invention patent application CN1562735 discloses a method for preparing silicon nitride powder materials at low temperature. SiCl4 is used as silicon source and NaN3 is used as nitrogen source to carry out chemical exchange reaction in a stainless steel reactor, and the reaction product After cleaning, suction filtration and drying, the chemical reaction formula is: 3SiCl 4 +12NaN 3 =Si 3 N 4 +12NaCl+16N 2 .

发明内容: Invention content:

本发明的目的是提供一种氮化硅纳米线或纳米带粉体材料的制备方法,反应操作简单、安全,所制得产物纯净,收率高。The purpose of the present invention is to provide a method for preparing silicon nitride nanowire or nanobelt powder material, the reaction operation is simple and safe, the obtained product is pure and the yield is high.

为达上述目的,本发明采用如下的技术方案:本发明的氮化硅纳米线或纳米带粉体材料的制备方法,以SiCl4为硅源、以NaN3为氮源、并加入金属钠,在反应釜中温度为400-600℃、体系自生压力为5-40MPa的条件下反应0.5-6小时,产物经洗涤、分离和干燥得白色粉末产品;For reaching above-mentioned purpose, the present invention adopts following technical scheme: the preparation method of silicon nitride nanowire or nanobelt powder material of the present invention, with SiCl 4 as silicon source, with NaN 3 as nitrogen source, and add metal sodium, React in the reaction kettle for 0.5-6 hours under the conditions of 400-600°C temperature and 5-40MPa self-generated pressure of the system, and the product is washed, separated and dried to obtain a white powder product;

本发明的化学反应可以用如下反应方程式表示:Chemical reaction of the present invention can represent with following reaction equation:

3SiCl4+n NaN3+(12-n)Na=Si3N4+12NaCl+(1.5n-2)N2     (1)3SiCl 4 +n NaN 3 +(12-n)Na=Si 3 N 4 +12NaCl+(1.5n-2)N 2 (1)

其中n满足1.334≤n≤11.998。根据反应标准自由能和焓计算,得到如下关系:Where n satisfies 1.334≤n≤11.998. According to the calculation of the standard free energy and enthalpy of the reaction, the following relationship is obtained:

ΔG°=-3391-187.52*n  kJ/mol                       (2)ΔG°=-3391-187.52*n kJ/mol (2)

ΔH°=-3617-21.71*n   kJ/mol                       (3)ΔH°=-3617-21.71*n kJ/mol (3)

其中n满足2≤n≤4效果最佳。Among them, the effect of n satisfying 2≤n≤4 is the best.

在适当范围内调控SiCl4、NaN3、Na的比例,可得到不同形貌的氮化硅。所加入的SiCl4、NaN3、Na的质量比为1∶0.4~0.5∶0.36~0.4时,可制得氮化硅纳米线;所加入的SiCl4、NaN3、Na的质量比为1∶0.25-0.38∶0.40-0.45时,可得到氮化硅纳米带。By adjusting the ratio of SiCl 4 , NaN 3 , and Na within an appropriate range, silicon nitride with different morphologies can be obtained. When the mass ratio of SiCl 4 , NaN 3 , and Na added is 1:0.4~0.5:0.36~0.4, silicon nitride nanowires can be prepared; the mass ratio of SiCl 4 , NaN 3 , Na added is 1: When the ratio is 0.25-0.38:0.40-0.45, silicon nitride nanobelts can be obtained.

为了更好地实现本发明,在所述反应釜中通入惰性气体并密封后再进行加热反应。所述惰性气体优选氮气或氩气。In order to better realize the present invention, an inert gas is introduced into the reactor and sealed before the heating reaction is performed. The inert gas is preferably nitrogen or argon.

作为优选方案,所述反应温度为450~500℃;所述反应体系自生压力约为15-25MPa;所述反应时间为0.5-5小时。As a preferred solution, the reaction temperature is 450-500° C.; the autogenous pressure of the reaction system is about 15-25 MPa; and the reaction time is 0.5-5 hours.

所述产物经水洗和无水乙醇洗涤后离心分离,然后在真空干燥箱中80℃下干燥24小时。The product was washed with water and ethanol, then centrifuged, and then dried in a vacuum oven at 80° C. for 24 hours.

SiCl4与NaN3混合,在100℃以上就能发生剧烈反应,形成多晶硅、氯化钠和少量氮化硅,同时产生大量氮气。叠氮化钠是一种价格低廉的固体氮源,单独加热到410℃分解形成金属钠和氮气,是一种容易爆炸和剧毒物质,在高温自蔓延合成氮化硅中常用作固体辅助氮源和催化剂,以便增加产物中的α-Si3N4含量。减少NaN3用量并使用大量金属钠代替,金属钠熔点低(97.82℃),不仅作为反应物、溶剂和吸热剂来改变化学反应和缓和反应环境,还能避免爆炸的危险,提高反应的安全性;同时,金属钠也作为氮化硅纳米晶生长媒介,从而可以制备比较纯净的纳米线和纳米带。在本发明中,金属钠用量不同,对反应和产物都有重要的影响,反应体系压力不同,产物中β-Si3N4和α-Si3N4比例不同,对产物形貌也有很大影响。实验证明,n的最佳范围为2≤n≤4。When SiCl 4 is mixed with NaN 3 , a violent reaction can occur above 100°C to form polysilicon, sodium chloride and a small amount of silicon nitride, while producing a large amount of nitrogen. Sodium azide is a low-cost solid nitrogen source, which can be decomposed into metallic sodium and nitrogen gas when heated to 410°C alone. It is an explosive and highly toxic substance, and is often used as solid auxiliary nitrogen in high-temperature self-propagating synthesis of silicon nitride. source and catalyst in order to increase the α-Si 3 N 4 content in the product. Reduce the amount of NaN 3 and replace it with a large amount of metallic sodium. The melting point of metallic sodium is low (97.82°C). It not only acts as a reactant, solvent, and endothermic agent to change the chemical reaction and ease the reaction environment, but also avoids the danger of explosion and improves the safety of the reaction. At the same time, metal sodium is also used as a growth medium for silicon nitride nanocrystals, so that relatively pure nanowires and nanobelts can be prepared. In the present invention, the amount of sodium metal is different, which has an important impact on the reaction and the product. The pressure of the reaction system is different, and the ratio of β-Si 3 N 4 and α-Si 3 N 4 in the product is different, which also has a great influence on the product morphology. Influence. Experiments have proved that the optimal range of n is 2≤n≤4.

本发明所用的无色液体SiCl4是分析纯试剂,白色固体结晶NaN3和金属Na是化学纯试剂。金属Na从煤油中取出,用滤纸吸干,切成小块。SiCl4和NaN3在使用前未经特别的处理。按预先设计的配比称量NaN3和金属Na加入大约60ml不锈钢反应釜,再加入计量的SiCl4。操作是在室温条件下充入干燥氩气的手套箱中进行。密封的反应釜放入井式坩埚炉中,于预定的温度下(400-600℃)恒温反应0.5-6小时,然后使之自然冷却,开釜并取出反应产物。产物经蒸馏水洗涤、无水乙醇洗涤和离心分离,除去副产物氯化钠,在真空干燥箱中于80℃下干燥24小时,即可得到白色粉末样品,称量并计算产率,产物氮化硅相对于原料SiCl4的总收率均在90%以上。The colorless liquid SiCl used in the present invention is an analytically pure reagent, and the white solid crystal NaN and metal Na are chemically pure reagents. Metal Na was removed from kerosene, blotted dry with filter paper, and cut into small pieces. SiCl 4 and NaN 3 were used without special treatment. Weigh NaN 3 and metal Na according to the pre-designed ratio and add them to about 60ml stainless steel reaction kettle, and then add metered SiCl 4 . The operation was carried out in a glove box filled with dry argon at room temperature. Put the sealed reaction kettle into a well-type crucible furnace, react at a constant temperature at a predetermined temperature (400-600° C.) for 0.5-6 hours, then allow it to cool naturally, open the kettle and take out the reaction product. The product is washed with distilled water, washed with absolute ethanol and centrifuged to remove the by-product sodium chloride, and dried in a vacuum oven at 80°C for 24 hours to obtain a white powder sample, weigh and calculate the yield, and the product is nitrogenized The total yield of silicon relative to the raw material SiCl4 is above 90%.

对于n=2,3和4,ΔG℃分别为-3766、-3954和-4141kJ/mol,ΔH°分别为-3660、-3682和-3704kJ/mol,说明上述反应是自发反应,而且放出大量反应热。但在反应初期,氮化硅的形成和成核都在液态的金属钠中,这种反应是与SiCl4只与NaN3反应而没有金属钠的参与是不同的。液态金属钠除提供结晶和生长环境之外,也是一种反应物和暂时的稀释剂和吸热剂,从而缓和反应并有助于产物结晶生长为纳米线和纳米带形状。本发明也研究了过量金属钠对产物形貌的影响,发现当金属钠过量到反应剂量的3-8倍时,对于氮化硅纳米线和纳米带形成反而不利,其产物形貌多为纳米颗粒和纳米短棒。这说明纳米晶生长伴随化学反应,可能是反应局部过热造成的。对于低于400℃的反应情况,反应产生一部分副产物多晶硅颗粒,给产品带来杂质,使提纯变得复杂。400℃以上因发反应且在1小时以上,产物中没有多晶硅,反应完全,相对于SiCl4产物氮化硅收率均为90%以上,但反应时间对产物形貌也有一定影响。产物配比与反应压力有一定的关系,因为反应是在密封的反应釜中进行,反应体系气体的形成多少使压力在在一定范围内变化。依据理想气体估计,n=4时,制备反应最大压力不超过220个大气压。For n=2, 3, and 4, ΔG°C are -3766, -3954, and -4141kJ/mol respectively, and ΔH° are -3660, -3682, and -3704kJ/mol respectively, indicating that the above reaction is a spontaneous reaction, and a large amount of reaction is released hot. But in the initial stage of the reaction, the formation and nucleation of silicon nitride are in the liquid metal sodium. This reaction is different from SiCl 4 which only reacts with NaN 3 without the participation of metal sodium. In addition to providing a crystallization and growth environment, the liquid metal sodium is also a reactant and a temporary diluent and heat sink, thereby moderating the reaction and facilitating the crystal growth of the product into nanowire and nanoribbon shapes. The present invention also studies the influence of excessive sodium metal on the product morphology, and finds that when the sodium metal is excessive to 3-8 times the reaction dose, it is unfavorable for the formation of silicon nitride nanowires and nanobelts, and the product morphology is mostly nano particles and nanorods. This shows that the growth of nanocrystals is accompanied by a chemical reaction, which may be caused by local overheating of the reaction. For the reaction below 400°C, a part of by-product polysilicon particles will be produced in the reaction, which will bring impurities to the product and complicate the purification. When the temperature is above 400°C, the reaction occurs for more than 1 hour. There is no polysilicon in the product, and the reaction is complete. Compared with SiCl 4 , the yield of silicon nitride is more than 90%, but the reaction time also has a certain influence on the morphology of the product. The product ratio has a certain relationship with the reaction pressure, because the reaction is carried out in a sealed reactor, and the formation of gas in the reaction system makes the pressure change within a certain range. According to ideal gas estimation, when n=4, the maximum pressure of the preparation reaction does not exceed 220 atmospheres.

所得产物样品结构用MSAL-XD2型X-光粉末衍射仪(40kV,20mA,λ=1.5406)分析,2θ在10-80°范围。用Technai-10型和JEM-2010HR型透射电子显微镜观察产物形貌,用电子衍射研究微区材料的微结构,用EDX分析其组成。电子显微观察、电子衍射和EDX分析的样品,是将产物粉末通过超声波分散在无水乙醇中,然后滴在TEM专用碳膜铜网上进行观察。产物样品还使用JSM-6330F型场发射扫描电子显微镜观察形貌和使用EDX分析其组成,其制样是直接采用产物粉末分布在双面胶上并粘在样品铜台上喷金后观察。FTIR分析采用Nicolet型红外光谱仪,产物粉末使用KBr压片制样。X-射线能谱分析采用ESCALAB 250型(Thermao Electron Corp.)X-射线能谱仪,以铝的Kα线为激发光源,碳(结合能C1s 285.5eV)为内标。The resulting product sample structure is with MSAL-XD2 type X-ray powder diffractometer (40kV, 20mA, λ=1.5406 ) analysis, 2θ is in the range of 10-80°. The product morphology was observed with Technai-10 and JEM-2010HR transmission electron microscopes, the microstructure of micro-domain materials was studied with electron diffraction, and its composition was analyzed with EDX. The samples for electron microscopic observation, electron diffraction and EDX analysis are to disperse the product powder in absolute ethanol by ultrasonic waves, and then drop it on the special carbon film copper grid for TEM for observation. The product sample was also observed by JSM-6330F field emission scanning electron microscope and its composition was analyzed by EDX. The sample was prepared by directly distributing the product powder on the double-sided adhesive and sticking it on the copper platform of the sample and spraying gold for observation. Nicolet-type infrared spectrometer was used for FTIR analysis, and the product powder was prepared by KBr pellets. ESCALAB 250 (Thermao Electron Corp.) X-ray energy spectrometer was used for X-ray energy spectroscopic analysis, the Kα line of aluminum was used as the excitation light source, and carbon (binding energy C1s 285.5eV) was used as the internal standard.

附图说明: Description of drawings:

图1.氮化硅纳米线X-射线衍射图.Figure 1. X-ray diffraction pattern of silicon nitride nanowires.

图2.氮化硅纳米线FTIR谱图.Figure 2. FTIR spectrum of silicon nitride nanowires.

图3.氮化硅纳米线透射电子显微镜照片(a),和电子衍射花样(b).Figure 3. Transmission electron micrograph (a) and electron diffraction pattern (b) of silicon nitride nanowires.

图4.氮化硅纳米线扫描电子显微镜照片(a),和EDX分析谱图(b)。Figure 4. Scanning electron micrograph (a) and EDX analysis spectrum (b) of silicon nitride nanowires.

图5.在不同条件下制备的氮化硅纳米线TEM照片。(a)400℃1小时,n=4;(b)500℃5小时,n=4;(c)500℃1小时,n=3;(d)500℃5小时,n=3。Figure 5. TEM photographs of silicon nitride nanowires prepared under different conditions. (a) 1 hour at 400°C, n=4; (b) 5 hours at 500°C, n=4; (c) 1 hour at 500°C, n=3; (d) 5 hours at 500°C, n=3.

图6.氮化硅纳米带X-射线衍射谱。Figure 6. X-ray diffraction spectrum of silicon nitride nanoribbons.

图7.氮化硅纳米带TEM照片(a、b)和EDS谱。Figure 7. TEM photos (a, b) and EDS spectra of silicon nitride nanobelts.

图8.氮化硅纳米带FTIR谱。Figure 8. FTIR spectrum of silicon nitride nanoribbons.

图9.氮化硅纳米线(a)和纳米带(b)X-射线能谱。Figure 9. X-ray energy spectra of silicon nitride nanowires (a) and nanoribbons (b).

图1-4展示了n=4时在450℃反应5小时得到的氮化硅纳米线的表征结果。Figures 1-4 show the characterization results of silicon nitride nanowires obtained by reacting at 450° C. for 5 hours when n=4.

其中图1是产物粉末的X-射线衍射花样。指标化的17个衍射封对应于β-Si3N4的衍射线,由此计算出的晶格常数是a=7.590和c=2.904

Figure C20061003758100071
,与JCPDS card# 82-0710相符合(粗线,a=7.634,c=2.921
Figure C20061003758100072
);其余较弱的衍射峰都对应于α-Si3N4(细线,JCPDS card# 83-0700)。没有杂质信号。这说明所制备的产物是结晶氮化硅。根据β-Si3N4衍射线较强而α-Si3N4较弱的特征,可以判断产物主要物相是β-Si3N4。采用有关文献的估计方法,得到α-Si3N4/β-Si3N4质量比等于0.1598,说明产物中β-Si3N4约占86.2%,α-Si3N4约占13.8%.Wherein Fig. 1 is the X-ray diffraction pattern of product powder. The indexed 17 diffraction envelopes correspond to the diffraction lines of β- Si3N4 , from which the calculated lattice constants are a = 7.590 and c = 2.904
Figure C20061003758100071
, consistent with JCPDS card# 82-0710 (bold line, a=7.634, c=2.921
Figure C20061003758100072
); the remaining weaker diffraction peaks all correspond to α-Si 3 N 4 (thin line, JCPDS card# 83-0700). No impurity signal. This indicates that the prepared product is crystalline silicon nitride. According to the feature that the β-Si 3 N 4 diffraction line is stronger and the α-Si 3 N 4 is weaker, it can be judged that the main phase of the product is β-Si 3 N 4 . Using the estimation method in relevant literature, the mass ratio of α-Si 3 N 4 /β-Si 3 N 4 is equal to 0.1598, indicating that β-Si 3 N 4 accounts for about 86.2% and α-Si 3 N 4 accounts for about 13.8% in the product .

图2给出了该样品的FTIR谱图。图中在445.6、578.2、858.2、990.7和1047cm-1显示出很强的吸收,说明产物是氮化硅。其中858.2和445.6,578.2cm-1分别对应于Si-N键的伸缩振动和变形振动。990.7cm-1对应于Si-N键不对称伸缩振动。1047cm-1对应于N-Si-O键的伸缩振动。这些吸收峰都是氮化硅的特征吸收。Si-O键的存在来源于材料表面的氧化和提纯过程中发生水解,从而形成少量Si-OH和N-H键。于是,在1635cm-1位置可以看到一个对应于N-H键的比较弱的吸收峰。至于3439cm-1周围的吸收,对应于O-H键的吸收,其主要形成原因是样品在空气中吸收的水分。Figure 2 shows the FTIR spectrum of this sample. The figure shows strong absorption at 445.6, 578.2, 858.2, 990.7 and 1047 cm -1 , indicating that the product is silicon nitride. Among them, 858.2 and 445.6, 578.2 cm -1 correspond to the stretching vibration and deformation vibration of Si-N bonds, respectively. 990.7 cm corresponds to the Si-N bond asymmetric stretching vibration. 1047 cm corresponds to the stretching vibration of the N-Si-O bond. These absorption peaks are characteristic absorptions of silicon nitride. The existence of Si-O bonds comes from the oxidation and purification of the material surface during hydrolysis, resulting in the formation of a small amount of Si-OH and NH bonds. Therefore, a relatively weak absorption peak corresponding to the NH bond can be seen at the position of 1635cm -1 . As for the absorption around 3439 cm -1 , which corresponds to the absorption of OH bonds, its main cause is the moisture absorbed by the sample in the air.

图3给出了该样品的透射电子显微镜照片和电子衍射花样。如附图3a所示,氮化硅纳米线平均直径约为30nm,长度较大,长度/直径比值约为25。附图3b中电子衍射给出清晰斑点,说明氮化硅纳米线结晶很好,根据计算,其d-值与β-Si3N4相符合,且与上述X-衍射中β-Si3N4一致。Figure 3 shows the transmission electron micrograph and electron diffraction pattern of the sample. As shown in Figure 3a, the silicon nitride nanowires have an average diameter of about 30nm, a relatively long length, and a length/diameter ratio of about 25. The electron diffraction in Figure 3b shows clear spots, indicating that the silicon nitride nanowires are well crystallized. According to calculations, its d-value is consistent with that of β-Si 3 N 4 , and is consistent with that of β-Si 3 N in the above-mentioned X-diffraction. 4 agree.

图4给出了该样品的氮化硅纳米线扫描电子显微镜照片和EDX分析谱图。如附图4a所示,氮化硅纳米线形貌和尺寸虽然与透射电镜观察到的一致,却相互缠绕成束。这是因为透射电镜观察到的是在乙醇中超声分散过的纳米线,而扫描电子显微镜照片直接显示其粉末样品。附图4b中EDX谱图给出了较强的Si和N信号,通过计算,Si与N含量的摩尔比值是0.812∶1,较理论值0.75∶1接近,但存在Si偏多的差异。这可能是由于材料表面因氧化或/和水解而导致失N造成的。EDX谱分析也发现金、少量氧等异质元素的信号,是因为制样时喷金、样品表面氧化或/和水解,以及制样用双面胶带而引起的。Figure 4 shows the silicon nitride nanowire scanning electron microscope photo and EDX analysis spectrum of the sample. As shown in Figure 4a, although the shape and size of the silicon nitride nanowires are consistent with those observed by the transmission electron microscope, they are intertwined into bundles. This is because the nanowires that were ultrasonically dispersed in ethanol were observed by transmission electron microscopy, while the powder samples were directly displayed by scanning electron microscopy. The EDX spectrum in Figure 4b shows strong Si and N signals. By calculation, the molar ratio of Si to N content is 0.812:1, which is close to the theoretical value of 0.75:1, but there is a difference that there is more Si. This may be due to the loss of N on the surface of the material due to oxidation and/or hydrolysis. EDX spectrum analysis also found signals of heterogeneous elements such as gold and a small amount of oxygen, which were caused by gold spraying during sample preparation, oxidation or/and hydrolysis of the sample surface, and double-sided tape used for sample preparation.

以上分析和表征说明在所述条件下制备了氮化硅纳米线。但对于不同的制备条件,所获得的氮化硅纳米线却具有不同的形貌。图5展示了几种不同的情况,分别为(a)n=4,400℃1小时,(b)n=4,500℃5小时,(c)n=3,500℃1小时,(d)n=3,500℃5小时。由图可见,配比、温度和反应时间等因素都会影响产物纳米线形貌特征。The above analysis and characterization indicate that silicon nitride nanowires were prepared under the conditions described above. However, for different preparation conditions, the obtained silicon nitride nanowires have different morphologies. Figure 5 shows several different situations, respectively (a) n=4,400°C for 1 hour, (b)n=4,500°C for 5 hours, (c)n=3,500°C for 1 hour, (d)n=3,500°C5 Hour. It can be seen from the figure that factors such as ratio, temperature and reaction time will affect the morphology characteristics of the product nanowires.

附图6-8展示了n=2时在450℃下反应5小时得到的氮化硅纳米带的表征结果。其中图6是产物粉末的X-射线衍射花样。指标化的衍射峰对应于β-Si3N4的衍射线,与JCPDS card# 82-0710相符合(粗线);其余较弱的衍射峰都对应于α-Si3N4(细线,JCPDS card# 83-0700)。另据相对强度的差异,说明所制备的产物主要是β-Si3N4。估计得到α-Si3N4/β-Si3N4质量比等于0.0713,说明产物中β-Si3N4约占93.3%,α-Si3N4约占6.7%.图7给出了该样品的透射电子显微镜照片和EDX分析谱图。如附图7a所示,氮化硅纳米带宽40-80nm,平均约60nm,长度超过500nm,厚度估计不超过20nm。附图7b中EDX谱图给出了较强的Si和N信号,Si与N含量的摩尔比值是0.792∶1,比较接近理论值0.75∶1接近,EDX谱分析也发现铜、少量氧等异质元素的信号,铜来自于TEM铜网,氧来自于样品表面氧化或/和水解。图8给出了该样品的FTIR谱图。其红外吸收特征与纳米线相似,说明产物是氮化硅。也可以看到一个对应于N-H键的比较弱的吸收峰和对应于O-H键的吸收峰。Figures 6-8 show the characterization results of silicon nitride nanoribbons obtained by reacting at 450° C. for 5 hours when n=2. Wherein Fig. 6 is the X-ray diffraction pattern of product powder. The indexed diffraction peaks correspond to the diffraction lines of β-Si 3 N 4 , which are consistent with JCPDS card# 82-0710 (thick lines); the rest of the weaker diffraction peaks correspond to α-Si 3 N 4 (thin lines, JCPDS card# 83-0700). According to the difference of relative intensity, it shows that the prepared product is mainly β-Si 3 N 4 . It is estimated that the mass ratio of α-Si 3 N 4 /β-Si 3 N 4 is equal to 0.0713, indicating that β-Si 3 N 4 accounts for about 93.3% and α-Si 3 N 4 accounts for about 6.7% in the product. Figure 7 shows Transmission electron micrograph and EDX analysis spectrum of the sample. As shown in Figure 7a, the silicon nitride nanometer bandwidth is 40-80nm, with an average of about 60nm, a length of more than 500nm, and a thickness estimated to be no more than 20nm. The EDX spectrum in Figure 7b shows strong Si and N signals. The molar ratio of Si to N content is 0.792:1, which is close to the theoretical value of 0.75:1. EDX spectrum analysis also found that copper, a small amount of oxygen, etc. Copper is from the TEM copper grid, and oxygen is from the oxidation or/and hydrolysis of the sample surface. Figure 8 shows the FTIR spectrum of this sample. Its infrared absorption characteristics are similar to those of nanowires, indicating that the product is silicon nitride. A weaker absorption peak corresponding to NH bonds and an absorption peak corresponding to OH bonds can also be seen.

图9展示了氮化硅纳米线(n=4时在450℃反应5小时)和纳米带(n=2时在450℃反应5小时)粉末的X-射线能谱的表征结果。由图可见,纳米线(a)、纳米带(b)样品的X-射线能谱在结合能101.8、152.8和397.3eV处都有较强的信号,分别对应于Si2p、Si2s和N1s结合能,与文献报道的一致,且N∶Si原子比分别为1.147和1.355,与Si3N4的理论值1.333比较接近,说明产物是氮化硅。在285.5eV的峰是内标碳的C1s信号,在532.5eV的峰对应于氧的O1s,氧的存在,一方面可能是来自于材料表面氧化或/和水解,另一方面是由于表面吸附。Figure 9 shows the X-ray energy spectrum characterization results of silicon nitride nanowires (reacted at 450°C for 5 hours when n=4) and nanoribbons (reacted at 450°C for 5 hours when n=2). It can be seen from the figure that the X-ray energy spectra of nanowire (a) and nanoribbon (b) samples have strong signals at binding energies of 101.8, 152.8 and 397.3eV, corresponding to Si2p, Si2s and N1s binding energies respectively, It is consistent with that reported in the literature, and the N: Si atomic ratios are 1.147 and 1.355, which is relatively close to the theoretical value of Si 3 N 4 1.333, indicating that the product is silicon nitride. The peak at 285.5eV is the C1s signal of the internal standard carbon, and the peak at 532.5eV corresponds to the O1s of oxygen. The presence of oxygen may come from surface oxidation or/and hydrolysis of the material on the one hand, and surface adsorption on the other hand.

具体实施方式: Detailed ways:

实施例1:制备氮化硅纳米线Embodiment 1: Preparation of silicon nitride nanowires

取3.8克NaN3和2.69克金属Na加入容积大约为60ml不锈钢反应釜,再加入5毫升液体SiCl4。SiCl4是分析纯试剂,白色固体结晶NaN3和金属Na是化学纯试剂。金属Na从煤油中取出,用滤纸吸干,切成小块。操作在室温条件下充入干燥氩气的手套箱中进行。将反应釜盖好,并密封,然后放入井式坩埚炉中,于450℃恒温反应5小时,自然冷却到室温后开釜并取出反应产物。产物经水洗、无水乙醇洗涤和离心分离,除去副产物氯化钠,在真空干燥箱中于80℃下干燥24小时,得到1.895克白色粉末产品。经过结构、组成和形貌分析,证明产物是纯净的氮化硅,其中β-Si3N4约占86.2%,α-Si3N4约占13.8%,相对于SiCl4总产率为92.5%,产物纳米线形貌均匀,其平均直径30nm,长度平均约为500nm。Take 3.8 grams of NaN 3 and 2.69 grams of metallic Na into a stainless steel reactor with a capacity of about 60 ml, and then add 5 ml of liquid SiCl 4 . SiCl4 is an analytically pure reagent, white solid crystalline NaN3 and metal Na are chemically pure reagents. Metal Na was removed from kerosene, blotted dry with filter paper, and cut into small pieces. Operations were carried out in a glove box filled with dry argon at room temperature. Cover and seal the reaction kettle, then put it into a well-type crucible furnace, react at a constant temperature of 450°C for 5 hours, cool to room temperature naturally, open the kettle and take out the reaction product. The product was washed with water, washed with absolute ethanol and centrifuged to remove the by-product sodium chloride, and dried in a vacuum oven at 80° C. for 24 hours to obtain 1.895 g of a white powder product. After structure, composition and morphology analysis, it is proved that the product is pure silicon nitride, of which β-Si 3 N 4 accounts for about 86.2%, α-Si 3 N 4 accounts for about 13.8%, and the total yield relative to SiCl 4 is 92.5% %, the shape of the product nanowire is uniform, its average diameter is 30nm, and its average length is about 500nm.

实施例2:制备氮化硅纳米线Embodiment 2: Preparation of silicon nitride nanowires

取3.25克NaN3和3.0克金属Na加入容积大约为60ml不锈钢反应釜,再加入5毫升液体SiCl4。于450℃恒温反应2小时,自然冷却到室温后开釜并取出反应产物。其余操作和上述实例1一样,得到1.947克白色粉末产品。经过结构、组成和形貌分析,证明产物是纯净的氮化硅,其中β-Si3N4约占90.3%,α-Si3N4约占9.7%,相对于SiCl4总产率为94.4%,产物形貌以纳米线为主,含少量纳米带均匀。Take 3.25 grams of NaN 3 and 3.0 grams of metal Na into a stainless steel reactor with a volume of about 60 ml, and then add 5 ml of liquid SiCl 4 . React at a constant temperature of 450°C for 2 hours, cool down to room temperature naturally, open the kettle and take out the reaction product. All the other operations are the same as above-mentioned example 1, obtain 1.947 gram white powder products. After structure, composition and morphology analysis, it is proved that the product is pure silicon nitride, of which β-Si 3 N 4 accounts for about 90.3%, α-Si 3 N 4 accounts for about 9.7%, and the total yield relative to SiCl 4 is 94.4% %, the morphology of the product is dominated by nanowires, with a small amount of uniform nanobelts.

实施例3:制备氮化硅纳米带Embodiment 3: Preparation of silicon nitride nanobelts

取2.70克NaN3和3.15克金属Na加入容积大约为60ml不锈钢反应釜,再加入5毫升液体SiCl4。于500℃恒温反应3.5小时,自然冷却到室温后开釜并取出反应产物。其余操作和上述实例1一样,得到1.863克白色粉末产品。经过结构、组成和形貌分析,证明产物是纯净的氮化硅,其中β-Si3N4约占89.7%,α-Si3N4约占10.3%,相对于SiCl4总产率为90.6%,产物以纳米线为主,还含有较多的纳米棒和纳米带。Take 2.70 grams of NaN 3 and 3.15 grams of metal Na into a stainless steel reactor with a volume of about 60 ml, and then add 5 ml of liquid SiCl 4 . React at a constant temperature of 500°C for 3.5 hours, cool down to room temperature naturally, open the kettle and take out the reaction product. All the other operations are the same as above-mentioned example 1, obtain 1.863 gram white powder products. After structure, composition and morphology analysis, it is proved that the product is pure silicon nitride, of which β-Si 3 N 4 accounts for about 89.7%, α-Si 3 N 4 accounts for about 10.3%, and the total yield relative to SiCl 4 is 90.6 %, the product is dominated by nanowires, and also contains more nanorods and nanobelts.

实施例4:制备氮化硅纳米带Embodiment 4: Preparation of silicon nitride nanoribbons

取3.8克NaN3和6.8克金属Na加入容积大约为60ml不锈钢反应釜,再加入10毫升液体SiCl4。SiCl4是分析纯试剂,白色固体结晶NaN3和金属Na是化学纯试剂。其余操作和上述实例1一样,得到3.733克白色粉末产品。经过结构、组成和形貌分析,证明产物是纯净的氮化硅,其中β-Si3N4约占93.3%,α-Si3N4约占6.7%,相对于SiCl4总产率为91.1%,纳米带均匀宽40-80nm,长度约为500nm,厚度估计不超过20nm。Take 3.8 grams of NaN 3 and 6.8 grams of metal Na into a stainless steel reactor with a volume of about 60 ml, and then add 10 ml of liquid SiCl 4 . SiCl4 is an analytically pure reagent, white solid crystalline NaN3 and metal Na are chemically pure reagents. All the other operations are the same as above-mentioned example 1, obtain 3.733 grams of white powder products. After structure, composition and morphology analysis, it is proved that the product is pure silicon nitride, of which β-Si 3 N 4 accounts for about 93.3%, α-Si 3 N 4 accounts for about 6.7%, and the total yield relative to SiCl 4 is 91.1% %, the uniform width of the nanobelt is 40-80nm, the length is about 500nm, and the thickness is estimated to be no more than 20nm.

Claims (10)

1、一种氮化硅纳米线或纳米带粉体材料的制备方法,以SiCl4为硅源,以NaN3为氮源,在反应釜中进行反应,产物经洗涤、分离和干燥得白色粉末产品,其特征在于:在反应釜中还加入金属Na;反应在400-600℃温度、体系自生压力为5-40MPa的条件下进行0.5-6小时,得到氮化硅纳米线或纳米带;其反应的化学方程式表示为:1. A method for preparing a silicon nitride nanowire or nanobelt powder material, using SiCl4 as a silicon source, NaN3 as a nitrogen source, reacting in a reactor, the product is washed, separated and dried to obtain a white powder The product is characterized in that: metal Na is also added to the reaction kettle; the reaction is carried out for 0.5-6 hours at a temperature of 400-600 ° C and a self-generated pressure of 5-40 MPa in the system to obtain silicon nitride nanowires or nanobelts; The chemical equation for the reaction is expressed as: 3SiCl4+n NaN3+(12-n)Na=Si3N4+12NaCl+(1.5n-2)N2 3SiCl 4 +n NaN 3 +(12-n)Na=Si 3 N 4 +12NaCl+(1.5n-2)N 2 其中n满足1.334≤n≤11.998。Where n satisfies 1.334≤n≤11.998. 2、根据权利要求1所述的制备方法,其特征在于:其中n满足2≤n≤4。2. The preparation method according to claim 1, wherein n satisfies 2≤n≤4. 3、根据权利要求1所述的制备方法,其特征在于:所加入的SiCl4、NaN3、Na的质量比为1∶0.4~0.5∶0.36~0.4,制备氮化硅纳米线。3. The preparation method according to claim 1, characterized in that: SiCl 4 , NaN 3 , and Na are added in a mass ratio of 1:0.4-0.5:0.36-0.4 to prepare silicon nitride nanowires. 4、根据权利要求1所述的制备方法,其特征在于:所加入的SiCl4、NaN3、Na的质量比为1∶0.25-0.38∶0.40-0.45,制备氮化硅纳米带。4. The preparation method according to claim 1, characterized in that the mass ratio of SiCl 4 , NaN 3 , and Na added is 1:0.25-0.38:0.40-0.45 to prepare silicon nitride nanobelts. 5、根据权利要求1所述的制备方法,其特征在于:在所述反应釜中通入惰性气体并密封后再进行加热反应。5. The preparation method according to claim 1, characterized in that: the reaction kettle is heated and reacted after passing an inert gas into the reaction kettle and sealing it. 6、根据权利要求5所述的制备方法,其特征在于:所述惰性气体为氮气或氩气。6. The preparation method according to claim 5, characterized in that: the inert gas is nitrogen or argon. 7、根据权利要求1所述的制备方法,其特征在于:所述反应温度为450~500℃。7. The preparation method according to claim 1, characterized in that: the reaction temperature is 450-500°C. 8、根据权利要求1所述的制备方法,其特征在于:所述反应体系自生压力为15~25MPa。8. The preparation method according to claim 1, characterized in that: the autogenous pressure of the reaction system is 15-25 MPa. 9、根据权利要求1所述的制备方法,其特征在于:所述反应时间为0.5~5小时。9. The preparation method according to claim 1, characterized in that: the reaction time is 0.5-5 hours. 10、根据权利要求1所述的制备方法,其特征在于:所述产物经水洗和无水乙醇洗涤后离心分离,然后在真空干燥箱中80℃下干燥24小时。10. The preparation method according to claim 1, characterized in that: the product is washed with water and absolute ethanol, then centrifuged and then dried in a vacuum oven at 80°C for 24 hours.
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