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CN100415641C - A method for synthesizing homogeneous silicon nitride powder by layered cloth combustion - Google Patents

A method for synthesizing homogeneous silicon nitride powder by layered cloth combustion Download PDF

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CN100415641C
CN100415641C CNB2005101306782A CN200510130678A CN100415641C CN 100415641 C CN100415641 C CN 100415641C CN B2005101306782 A CNB2005101306782 A CN B2005101306782A CN 200510130678 A CN200510130678 A CN 200510130678A CN 100415641 C CN100415641 C CN 100415641C
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silicon nitride
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nitride powder
combustion synthesis
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CN1799995A (en
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葛昌纯
王飞
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University of Science and Technology Beijing USTB
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Abstract

本发明提供了一种层状布料燃烧合成均质氮化硅粉体的方法,属于无机非金属材料领域。将硅粉与氮化硅粉按不同比例进行研磨混合,得到所需的一组不同组分配比的反应混合物,干燥后以层状布料的方法置于燃烧合成反应装置内,充入1~20MPa含氮气体,经点火诱发燃烧合成反应,使反应混合物燃烧合成为均质氮化硅粉体。解决了常规燃烧合成方法制备氮化硅粉体时尤其是工业规模生产条件下的合成产物中不同部位物相成分和微观形貌不均匀的问题。并实现了节约能源、设备简单、成本低廉、易于操作、生产效率高,合成的氮化硅粉体纯度高、α相含量高,具有物相组成均匀一致、颗粒尺寸均匀细小的特点。

Figure 200510130678

The invention provides a method for synthesizing homogeneous silicon nitride powder by burning layered cloth, which belongs to the field of inorganic non-metallic materials. Grind and mix silicon powder and silicon nitride powder in different proportions to obtain a required reaction mixture with different component ratios. After drying, place it in a combustion synthesis reaction device in the form of layered cloth, and fill it with 1-20MPa The nitrogen-containing gas is ignited to induce a combustion synthesis reaction, so that the reaction mixture is combusted and synthesized into a homogeneous silicon nitride powder. The invention solves the problem of inhomogeneous phase composition and microscopic appearance in different parts of the synthetic product when the silicon nitride powder is prepared by the conventional combustion synthesis method, especially under industrial scale production conditions. It also realizes energy saving, simple equipment, low cost, easy operation, high production efficiency, high purity of the synthesized silicon nitride powder, high α phase content, uniform phase composition, uniform and fine particle size.

Figure 200510130678

Description

一种层状布料燃烧合成均质氮化硅粉体的方法 A method for synthesizing homogeneous silicon nitride powder by layered cloth combustion

技术领域 technical field

本发明属于无机非金属材料领域,特别是提供了一种层状布料燃烧合成(Combustion Synthesis,CS)均质氮化硅粉体的方法。The invention belongs to the field of inorganic non-metallic materials, and in particular provides a method for layered cloth combustion synthesis (Combustion Synthesis, CS) homogeneous silicon nitride powder.

背景技术 Background technique

氮化硅是一种人工合成的非氧化物陶瓷。具有密度低、比重低、硬度高、强度高、耐腐蚀、抗氧化、耐磨损、弹性模量大、耐高温,热膨胀系数小、导热系数大、抗热震性和电绝缘性能好等特点,其力学性能和热学性能明显优于一般氧化物陶瓷。通过不同烧结工艺制造的氮化硅陶瓷制品和氮化硅基复相陶瓷制品可广泛应用于切削刀具、轴承、发动机部件,以及化工、冶金、机械、石油、电子、军工、航天航空、核能和轻工业所需的各种耐磨、耐热、耐蚀部件以及屏蔽材料、装甲材料等,是当代公认的最重要和最有应用潜力的耐热、高强、耐磨、耐腐蚀的工程陶瓷材料之一。Silicon nitride is a synthetic non-oxide ceramic. It has the characteristics of low density, low specific gravity, high hardness, high strength, corrosion resistance, oxidation resistance, wear resistance, high elastic modulus, high temperature resistance, small thermal expansion coefficient, large thermal conductivity, thermal shock resistance and good electrical insulation performance. , its mechanical properties and thermal properties are significantly better than general oxide ceramics. Silicon nitride ceramic products and silicon nitride-based composite ceramic products manufactured by different sintering processes can be widely used in cutting tools, bearings, engine parts, as well as chemical industry, metallurgy, machinery, petroleum, electronics, military industry, aerospace, nuclear energy and All kinds of wear-resistant, heat-resistant, corrosion-resistant parts and shielding materials, armor materials, etc. required by light industry are recognized as one of the most important and most potential engineering ceramic materials for heat resistance, high strength, wear resistance and corrosion resistance. one.

国内外研究开发的氮化硅粉体制备方法主要有硅粉直接氮化法、碳热还原氮化法、化学气相合成法、等离子体法和燃烧合成法。直接氮化法是将硅粉置于氮气(或氮气/氢气)流动气氛中,分几个阶段进行较长时间的保温,充分氮化即可获得氮化硅粉体。该法生产周期较长(40小时以上),能源消耗较大,需要二次氮化,而且对原料纯度要求高,此外需要严格控制工艺参数如反应温度和氮气流量等。德国Starck公司、日本Denka公司用此法生产多种牌号的氮化硅粉体。碳热还原法存在反应速度慢,反应过程复杂,生产周期较长等缺点,同时也存在能耗大、效率低、产物中碳、氧等杂质含量高等问题化学气相合成法由于是气相反应,反应时气流容易控制,产物纯度高,粒度细。此法可制得α相含量最高达98%以上的氮化硅粉体,是目前公认最好的商品氮化硅粉,以日本UBE公司生产的粉体为代表。但该法工艺复杂,成本较高,且存在生产过程中的腐蚀问题和产物含氯量高的缺点。等离子体法是在等离子体发生器中通入等离子体工作气体(如N2-H2-Ar等),通过等离子体电弧加热工作气体后注入含氮原料(如NH3、N2等)和含硅原料(如SiH4、SiCl4等)进行化学气相反应来制备氮化硅粉体。等离子体法直接制备的氮化硅大多是无定型氮化硅粉体,且含有氯化铵杂质,需要经过500℃以上脱除氯化铵杂质以及1400℃以上高温转相处理才能获得α相氮化硅粉体。等离子法也存在设备复杂,工艺过程繁琐等缺点,而且也需要较大的能源消耗。The preparation methods of silicon nitride powder researched and developed at home and abroad mainly include silicon powder direct nitriding method, carbothermal reduction nitriding method, chemical vapor phase synthesis method, plasma method and combustion synthesis method. The direct nitriding method is to place the silicon powder in a nitrogen (or nitrogen/hydrogen) flowing atmosphere, hold it for a long time in several stages, and fully nitride it to obtain the silicon nitride powder. This method has a long production cycle (more than 40 hours), high energy consumption, requires secondary nitriding, and requires high purity of raw materials. In addition, strict control of process parameters such as reaction temperature and nitrogen flow rate is required. German Starck Company and Japanese Denka Company use this method to produce various brands of silicon nitride powder. The carbothermal reduction method has the disadvantages of slow reaction speed, complicated reaction process, and long production cycle. At the same time, it also has problems such as high energy consumption, low efficiency, and high content of impurities such as carbon and oxygen in the product. Because the chemical vapor phase synthesis method is a gas phase reaction, the reaction The air flow is easy to control, the product has high purity and fine particle size. This method can produce silicon nitride powder with an α-phase content of up to 98%, which is currently recognized as the best commercial silicon nitride powder, represented by the powder produced by Japan UBE Company. However, the process is complex, the cost is high, and there are corrosion problems in the production process and the disadvantages of high chlorine content in the product. The plasma method is to pass the plasma working gas (such as N 2 -H 2 -Ar, etc.) into the plasma generator, and inject nitrogen-containing raw materials (such as NH 3 , N 2 , etc.) Si-containing raw materials (such as SiH 4 , SiCl 4 , etc.) undergo a chemical vapor phase reaction to prepare silicon nitride powder. Most of the silicon nitride directly prepared by the plasma method is amorphous silicon nitride powder, and contains ammonium chloride impurities. It needs to go through the removal of ammonium chloride impurities above 500°C and high temperature phase inversion treatment above 1400°C to obtain α-phase nitrogen. Silicon powder. The plasma method also has disadvantages such as complex equipment and cumbersome process, and also requires large energy consumption.

燃烧合成技术(Combustion Synthesis,缩写CS)是近年来得到广泛研究和应用的材料合成制备新技术。燃烧合成也称为自蔓延高温合成(Self-propagatingHigh-temperature Synthesis,缩写SHS)。燃烧合成技术的基本特点是:利用外部提供必要的能量,诱发高放热化学反应体系局部发生化学反应(这个过程称为点燃),形成燃烧反应前沿(即燃烧波),此后燃烧反应在自身放出热量的支持下,反应自持续进行(即自蔓延),表现为燃烧波蔓延整个反应体系,在燃烧波蔓延前进的过程中,反应物转变成为合成材料。燃烧合成技术最突出的优点是反应迅速、节约能源、成本低廉、设备简单、合成产物纯度高等。所以迄今为止采用燃烧合成技术生产的产品已经发展到500种以上。对于氮-硅体系的燃烧合成而言,由于氮气和固相硅粉间的反应体系属于高放热体系(743.5KJ/mol),可以在短时间内快速合成氮化硅粉体。而且由于原料价格低廉、易于获得,生产周期短,产品后续处理简单等特点,采用燃烧合成技术制备氮化硅粉体从二十世纪90年代以来就受到国内外材料研究者的高度重视和广泛研究。Combustion Synthesis (Combustion Synthesis, abbreviated as CS) is a new technology for material synthesis and preparation that has been widely studied and applied in recent years. Combustion synthesis is also called self-propagating high-temperature synthesis (Self-propagating High-temperature Synthesis, abbreviated as SHS). The basic characteristics of combustion synthesis technology are: using externally provided necessary energy to induce a local chemical reaction in a highly exothermic chemical reaction system (this process is called ignition), forming a front of the combustion reaction (that is, a combustion wave), after which the combustion reaction emits With the support of heat, the reaction is self-sustaining (that is, self-propagating), showing that the combustion wave spreads throughout the reaction system. During the process of the combustion wave spreading and advancing, the reactants are transformed into synthetic materials. The most prominent advantages of combustion synthesis technology are rapid reaction, energy saving, low cost, simple equipment, and high purity of synthetic products. So far, more than 500 products have been produced by combustion synthesis technology. For the combustion synthesis of nitrogen-silicon system, since the reaction system between nitrogen and solid-phase silicon powder is a highly exothermic system (743.5KJ/mol), silicon nitride powder can be rapidly synthesized in a short time. Moreover, due to the low price of raw materials, easy availability, short production cycle, and simple follow-up treatment of products, the preparation of silicon nitride powder by combustion synthesis technology has been highly valued and extensively studied by material researchers at home and abroad since the 1990s. .

涉及燃烧合成氮化硅粉体的国内外专利各有侧重,也分别存在各自的局限性。如俄罗斯的A.G.Merzhanov等发明的“高α相含量氮化硅的制备方法”(美国专利号US5032370),其燃烧合成氮化硅粉体需要的氮气压力过高(最高达30MPa),而且铵盐加入量过高(最高达硅粉重量的60%),此外,在其使用的硅粉原料中加入了不同含量的无定型硅或硅亚胺,增加了原料成本。美国J.B Holt等发明的“以燃烧方法合成细晶α相氮化硅(美国专利号US4944930)采用碱金属的叠代物(如NaN3等)作为氮源,其NaN3使用量较多(约占反应物硅粉的50%),不适用于大尺寸试样规模化生产。中国陈克新等发明的“一种低压燃烧合成高α相氮化硅粉体的方法”(中国专利申请号为02100183.9)采用悬浮氮化硅粉的技术,可以在较低的氮气压力下合成高α相氮化硅粉体。但在其使用的硅粉原料中也加入了不同含量的无定型硅或硅亚胺,而且生产设备和工艺流程较复杂,生产周期较长,能耗大,生产过程控制难度较大,最终导致生产成本过高。以上专利大多使用不同添加剂和工艺(如降低氮气压力等),侧重于提高燃烧合成产物中的α相氮化硅含量,没有涉及燃烧合成产物结构和组成上的均匀性,尤其是燃烧合成粉体在物相组成、杂质含量、微观结构以及晶粒大小方面的均匀性。Domestic and foreign patents related to combustion synthesis of silicon nitride powder have their own focus and limitations. Such as the "preparation method of silicon nitride with high α-phase content" (US Patent No. US5032370) invented by AGMerzhanov of Russia, etc., the nitrogen pressure required for the combustion and synthesis of silicon nitride powder is too high (up to 30MPa), and the ammonium salt is added The amount is too high (up to 60% of the weight of silicon powder). In addition, different contents of amorphous silicon or silicon imide are added to the silicon powder raw materials used, which increases the cost of raw materials. U.S. JB Holt et al. invented "synthesis of fine-grained α-phase silicon nitride by combustion method" (U.S. Patent No. US4944930), which uses alkali metal superimposed products (such as NaN 3 etc. ) 50% of the reactant silicon powder), is not suitable for the large-scale production of large-scale samples. "A method for low-pressure combustion synthesis of high-α-phase silicon nitride powder" (Chinese patent application number is 02100183.9) invented by Chen Kexin, etc. Using the technology of suspending silicon nitride powder, high α-phase silicon nitride powder can be synthesized under lower nitrogen pressure. However, different contents of amorphous silicon or silicon imine are also added to the silicon powder raw materials used. Moreover, the production equipment and technological process are relatively complicated, the production cycle is long, the energy consumption is large, and the production process control is difficult, which ultimately leads to excessive production costs. Most of the above patents use different additives and processes (such as reducing nitrogen pressure, etc.), focusing on Increasing the content of α-phase silicon nitride in the combustion synthesis product does not involve the uniformity of the structure and composition of the combustion synthesis product, especially the uniformity of the combustion synthesis powder in terms of phase composition, impurity content, microstructure and grain size .

对于燃烧合成氮化硅粉体而言,在单炉装料量较少(小于1Kg)的情况下燃烧合成产物结构和组成上的均匀性问题不太突出,但也存在分层或夹心现象,即由于粉坯内部燃烧温度过高而引起过烧,最终导致合成产物内部与产物外部物相组成相差较大的问题。在规模化生产的条件下(单炉装料量大于4Kg),由于每次装料量较大,反应物粉坯内部和外层在发生燃烧合成自反应时的热量传递条件和氮气供给条件有很大不同,主要是由于反应物粉坯外层与氮气接触面积大,氮气渗透性好,因而氮化反应迅速,更主要的是由于反应物粉坯外层散热条件好,燃烧温度较低,适合于α相氮化硅的生成,控制不好的情况下有燃烧不完全的现象存在,而且容易有一定的游离硅。而反应物粉坯内部与氮气接触面积小,氮气渗透性差,因而氮化反应相对缓慢,易出现后氮化现象,再加上反应物粉坯内部散热条件差,反应释放的热量无法迅速散失,导致反应物粉坯内部燃烧温度较高,从而使高温稳定的β相氮化硅更容易生成。已经生成的α相氮化硅在高温下也容易发生相变转化为β相氮化硅。尤其重要的是,由于高温过烧,反应物内部经常出现难于破碎的致密硬块,这种过烧后的粉体烧结性能也相对较差。总之,由于装料量过多引起的燃烧合成反应过程中热量分布的不均匀易导致合成产物的不均匀性,主要体现在燃烧产物内部与外部在物相组成、杂质含量、微观结构以及晶粒大小方面的存在较大的不均匀性。这种合成产物的不均匀性现象在燃烧合成氮化硅粉体过程中经常出现,极大地影响了燃烧合成氮化硅粉体的生产效率和产品纯度,也增加了后续分离处理的困难,严重限制燃烧合成氮化硅粉体的大规模产业化生产应用。For the combustion synthesis of silicon nitride powder, the problem of uniformity in the structure and composition of the combustion synthesis product is not so prominent in the case of a small amount of charge in a single furnace (less than 1Kg), but there are also stratification or sandwich phenomena. That is to say, overburning is caused by the high internal combustion temperature of the powder body, which eventually leads to the problem that the phase composition of the synthetic product is quite different from that of the external product. Under the condition of large-scale production (single furnace charge is greater than 4Kg), due to the large amount of charge each time, the heat transfer conditions and nitrogen supply conditions of the inside and outside of the reactant powder blank are different when the combustion synthesis self-reaction occurs. It is very different, mainly because the outer layer of the reactant powder has a large contact area with nitrogen, and the nitrogen permeability is good, so the nitriding reaction is rapid, and the main reason is that the outer layer of the reactant powder has good heat dissipation conditions and the combustion temperature is lower. It is suitable for the formation of α-phase silicon nitride. If the control is not good, there will be incomplete combustion, and there will be a certain amount of free silicon. However, the contact area of the reactant powder with nitrogen is small, and the nitrogen permeability is poor, so the nitriding reaction is relatively slow, and post-nitridation is prone to occur. In addition, the heat dissipation conditions inside the reactant powder are poor, and the heat released by the reaction cannot be quickly dissipated. As a result, the internal combustion temperature of the reactant powder is higher, so that the high-temperature stable β-phase silicon nitride is easier to form. The α-phase silicon nitride that has been formed is also prone to phase transformation and transformation into β-phase silicon nitride at high temperature. What's more important is that due to high-temperature over-burning, dense hard lumps that are difficult to break often appear inside the reactants, and the sintering performance of the over-burned powder is relatively poor. In a word, the inhomogeneity of the heat distribution in the process of combustion synthesis reaction caused by too much charge can easily lead to the inhomogeneity of the synthesis product, which is mainly reflected in the phase composition, impurity content, microstructure and grain of the combustion product inside and outside. There is greater inhomogeneity in size. The inhomogeneity of the synthetic product often occurs in the process of combustion synthesis of silicon nitride powder, which greatly affects the production efficiency and product purity of combustion synthesis silicon nitride powder, and also increases the difficulty of subsequent separation and treatment, seriously Limit the large-scale industrial production and application of burning and synthesizing silicon nitride powder.

发明内容 Contents of the invention

本发明的目的在于:提供一种层状布料燃烧合成均质氮化硅粉体的方法,解决常规燃烧合成方法燃烧产物内部与外部在物相组成、杂质含量、微观结构以及晶粒大小方面的存在较大不均匀性的问题,使制备的氮化硅粉体产物物相组成均匀,烧结活性好,粉体颗粒细小均匀,杂质含量低,而且操作方便,设备简单,生产效率高。The purpose of the present invention is to provide a method for the combustion synthesis of homogeneous silicon nitride powder in layered cloth, which solves the problems of phase composition, impurity content, microstructure and grain size of the internal and external combustion products of the conventional combustion synthesis method. There is a problem of large inhomogeneity, so that the phase composition of the prepared silicon nitride powder product is uniform, the sintering activity is good, the powder particles are fine and uniform, the impurity content is low, and the operation is convenient, the equipment is simple, and the production efficiency is high.

本发明是以硅粉和惰性稀释剂氮化硅粉为原料,经研磨混合、干燥后,按不同组分配比配制得到一组不同组分配比的反应混合物,在多孔反应容器中进行层状布料,其布料方式为把反应混合物分为2~5层,每层中采用不同组分配比的反应混合物,各相邻层中硅粉重量与惰性稀释剂氮化硅粉重量的比例不同,根据采用的层数不同其硅粉和惰性稀释剂氮化硅组分变化幅度在1~50%之间,然后将布料后的多孔反应容器置于燃烧合成反应装置中,反应装置抽真空后充入氮气或氨气或氮气与其他气体(氨气、氩气、氟化氢、氯化氢、溴化氢、碘化氢、氢气等)的混合气体,使燃烧合成反应装置中的气体压力控制在压力范围1~20MPa之内,然后点燃点火剂诱发反应混合物进行燃烧合成反应,反应完成后其产物辅以细磨等后处理工艺即得到均质氮化硅粉体。The invention uses silicon powder and silicon nitride powder as an inert diluent as raw materials. After grinding, mixing and drying, a group of reaction mixtures with different component ratios are prepared to obtain a group of reaction mixtures with different component ratios, and layered cloth is carried out in a porous reaction container. , the distributing method is to divide the reaction mixture into 2 to 5 layers, each layer uses a reaction mixture with different component ratios, and the ratio of the weight of silicon powder in each adjacent layer to the weight of silicon nitride powder as an inert diluent is different. The number of layers is different, and the silicon powder and inert diluent silicon nitride components vary from 1 to 50%. Then the porous reaction vessel after the cloth is placed in the combustion synthesis reaction device, and the reaction device is vacuumed and filled with nitrogen. Or the mixed gas of ammonia or nitrogen and other gases (ammonia, argon, hydrogen fluoride, hydrogen chloride, hydrogen bromide, hydrogen iodide, hydrogen, etc.), so that the gas pressure in the combustion synthesis reaction device is controlled within the pressure range of 1 ~ 20MPa Then, the ignition agent is ignited to induce the reaction mixture to carry out the combustion synthesis reaction. After the reaction is completed, the product is supplemented with post-treatment processes such as fine grinding to obtain a homogeneous silicon nitride powder.

主要包括以下步骤:It mainly includes the following steps:

1、配置不同组分的原料:1. Configure raw materials of different components:

按重量比将硅粉40%~90%,惰性稀释剂氮化硅10%~60%按不同比例分别进行混合,得到一组不同组分配比的反应混合物;40% to 90% of silicon powder and 10% to 60% of inert diluent silicon nitride are mixed in different proportions by weight to obtain a set of reaction mixtures with different component ratios;

其中所述的硅粉纯度为95~99.99%,优选纯度为97%以上,粒径范围为0.1~90μm,优选粒径0.1~30μm;The silicon powder described herein has a purity of 95-99.99%, preferably a purity of more than 97%, and a particle size range of 0.1-90 μm, preferably a particle size of 0.1-30 μm;

其中,所述的惰性稀释剂氮化硅可以通过燃烧合成方法或其他传统方法制备,纯度为90~99.9%,优选纯度为95%~99.9%;粒径范围为0.05~50μm,优选粒径0.05~10μm;氧含量为0.01~10%,优选氧含量为0.01~3%;α相含量为80~99.9%,优选α相含量为90%以上;Wherein, the inert diluent silicon nitride can be prepared by combustion synthesis method or other traditional methods, the purity is 90-99.9%, preferably 95%-99.9%; the particle size range is 0.05-50 μm, preferably 0.05 ~10μm; oxygen content is 0.01-10%, preferably 0.01-3%; α-phase content is 80-99.9%, preferably α-phase content is more than 90%;

2、原料研磨混合:2. Grinding and mixing of raw materials:

将按照步骤1配制得到的一组不同组分配比的反应混合物在研磨设备上进行研磨混合;其中所述的研磨混合可以是空气气氛下或氮气气氛或氨气气氛下的湿法研磨或干法研磨;其中所述的湿法研磨介质可以是甲醇、乙醇、异丁醇、丙酮、水、液氮等其中的一种;Grinding and mixing a group of reaction mixtures with different component ratios prepared according to step 1 on the grinding equipment; wherein the grinding and mixing can be wet grinding or dry grinding under air atmosphere, nitrogen atmosphere or ammonia atmosphere Grinding; wherein the wet grinding medium can be one of methanol, ethanol, isobutanol, acetone, water, liquid nitrogen, etc.;

3、干燥反应混合物:3. Dry the reaction mixture:

将按照步骤2研磨混合后的一组不同组分配比的反应混合物在干燥设备上进行干燥,干燥温度为30~90℃之间;Drying a group of reaction mixtures with different component ratios after grinding and mixing according to step 2 on the drying equipment, the drying temperature is between 30°C and 90°C;

其中所述的干燥可以是在空气气氛或氮气气氛或真空条件下进行的干燥;Wherein said drying can be carried out under air atmosphere or nitrogen atmosphere or vacuum condition;

4、层状布料:4. Layered fabric:

将按照步骤2、3充分研磨干燥后的一组不同组分配比的反应混合物根据多孔反应容器的大小和形状进行层状布料。其布料方式为把反应物料分为2~5层,每层中采用不同组分配比的反应混合物,布料后的反应物粉坯根据多孔反应容器的形状可以是圆柱状、半圆柱状等各种形状。各相邻层中硅粉重量与惰性稀释剂氮化硅粉重量的比例不同,根据采用的层数不同其每种组分变化幅度在1~50%之间;A group of reaction mixtures with different component ratios after fully grinding and drying according to steps 2 and 3 are distributed in layers according to the size and shape of the porous reaction vessel. The distributing method is to divide the reaction material into 2 to 5 layers, each layer uses a reaction mixture with different component ratios, and the reactant powder after distributing can be in various shapes such as cylindrical and semi-cylindrical according to the shape of the porous reaction container. . The ratio of the weight of silicon powder to the weight of inert diluent silicon nitride powder in each adjacent layer is different, and the variation range of each component is between 1% and 50% according to the number of layers used;

其中所述的一组不同组分配比的反应混合物是指每份反应混合物中硅粉和惰性稀释剂氮化硅粉的重量的比例不同;A group of reaction mixtures with different component proportions described therein means that the weight ratio of silicon powder and inert diluent silicon nitride powder in each part of reaction mixture is different;

其中所述的多孔反应容器可以是碳毡、纸质材料、石棉布、多孔石墨、多孔陶瓷等其中的一种材料制成的任意形状的反应容器;Wherein the porous reaction vessel can be a reaction vessel of any shape made of carbon felt, paper material, asbestos cloth, porous graphite, porous ceramics, etc.;

其中所述的多孔反应容器和反应物粉坯形状可以是圆柱状、半圆柱状、盘状、长方形、圆形等任意形状中的一种;The shape of the porous reaction vessel and the reactant powder base can be one of any shape such as cylinder, semi-cylindrical, disc, rectangle, circle, etc.;

5、燃烧合成反应:5. Combustion synthesis reaction:

将按照步骤4进行层状布料后的多孔反应容器放入燃烧合成反应装置中,抽真空后,充入氮气或氨气或氮气与其他气体(氨气、氩气、氟化氢、氯化氢、溴化氢、碘化氢、氢气等)的混合气体,使燃烧合成反应装置中的气体压力控制在适合压力范围(1~20MPa)之内,然后通过适当点火方式点燃点火剂诱发反应混合物进行燃烧合成反应,燃烧合成反应持续几十分钟之后完成,冷却至室温并释放反应器内压力后,可以得到粉末状或松散的块状产物,经磨细分级等后处理工艺后得到均质氮化硅粉体;Put the porous reaction container after the layered cloth according to step 4 into the combustion synthesis reaction device, after vacuuming, fill it with nitrogen or ammonia or nitrogen and other gases (ammonia, argon, hydrogen fluoride, hydrogen chloride, hydrogen bromide , hydrogen iodide, hydrogen, etc.) to control the gas pressure in the combustion synthesis reaction device within a suitable pressure range (1 to 20 MPa), and then ignite the ignition agent to induce the reaction mixture to carry out the combustion synthesis reaction by an appropriate ignition method. The combustion synthesis reaction lasts for tens of minutes and is completed. After cooling to room temperature and releasing the pressure in the reactor, a powder or loose block product can be obtained, and a homogeneous silicon nitride powder can be obtained after post-treatment processes such as grinding and classification. ;

其中所述的燃烧合成反应装置是指由不锈钢等材料制成的耐高温的高压容器,其容积为1~60升;Wherein said combustion synthesis reaction device refers to the high-temperature-resistant high-pressure container made of materials such as stainless steel, and its volume is 1~60 liters;

当使用氮气与其他气体的混合气体时,其中所述的其他气体为氨气、氩气、氟化氢、氯化氢、溴化氢、碘化氢、氢气等的一种或其组合,其他气体占氮气体积的1~50%;When using a mixture of nitrogen and other gases, the other gases mentioned are one or a combination of ammonia, argon, hydrogen fluoride, hydrogen chloride, hydrogen bromide, hydrogen iodide, hydrogen, etc., and other gases account for the volume of nitrogen 1~50% of

其中所述的气体压力范围为1~20MPa之间,优选2~15MPa之间;Wherein said gas pressure range is between 1~20MPa, preferably between 2~15MPa;

其中所述的点火方式可以是电火花、电弧放电、钨丝、激光、微波、红外热源等点火方式中的一种;The ignition method described herein may be one of ignition methods such as electric spark, arc discharge, tungsten wire, laser, microwave, and infrared heat source;

其中所述的点火剂可以是Ti、Ti+C、Fe3O4+Al等点火剂中的一种。The igniter mentioned therein may be one of Ti, Ti+C, Fe 3 O 4 +Al and other igniters.

其中所述的层状布料是指把反应物料分为2~5层,每层中采用不同组分配比的反应混合物。The layered fabric mentioned therein means that the reaction materials are divided into 2 to 5 layers, and each layer adopts a reaction mixture with different component ratios.

其中所述的各相邻层中硅粉重量与惰性稀释剂氮化硅粉重量的比例不同,可以是以下组分变化中的一种:The ratio of silicon powder weight and inert diluent silicon nitride powder weight in each adjacent layer described therein is different, and can be a kind of in the following composition change:

(1)从反应物料中心层到中间层再到外表各层的反应物料中硅粉重量比例逐步增加1~50%,惰性稀释剂氮化硅粉重量比例保持不变;(1) The weight ratio of silicon powder in the reaction material from the center layer of the reaction material to the middle layer and then to the outer layers gradually increases by 1 to 50%, and the weight ratio of the inert diluent silicon nitride powder remains unchanged;

(2)从反应物料中心层到中间层再到外表各层的反应物料中硅粉重量比例保持不变,惰性稀释剂氮化硅粉重量比例逐步减少1~50%;(2) The weight ratio of silicon powder in the reaction material from the center layer of the reaction material to the middle layer and then to the outer layers remains unchanged, and the weight ratio of the inert diluent silicon nitride powder gradually decreases by 1 to 50%;

(3)从反应物料中心层到中间层再到外表各层的反应物料中硅粉重量比例逐步增加1~50%,惰性稀释剂氮化硅粉重量比例逐步减少1~50%。(3) The weight proportion of silicon powder in the reaction material from the central layer of the reaction material to the middle layer and then to the outer layers gradually increases by 1-50%, and the weight proportion of the inert diluent silicon nitride powder gradually decreases by 1-50%.

本发明提出的层状布料燃烧合成均质氮化硅粉体的方法,解决了常规燃烧合成法存在的由于热量散失和热量积聚条件不同而导致的反应混合物体系各部位的温度场分布不均的问题,克服了常规燃烧合成法存在的合成产物的成分和微观形貌不均匀性问题,尤其是合成产物内部物相组成、杂质含量、晶粒大小与晶粒形态相差较大的问题。针对反应混合物体系中不同部位温度场分布不均匀的特点,通过对反应混合物体系的成份设计和层状布料,充分利用了惰性稀释剂在燃烧合成反应过程中的吸热降温等促进作用,达到既能降低最高燃烧温度,又能控制反应混合物体系各部位的温度场分布的目的。最终使反应混合物体系各部位的反应温度都能够保持在同一水平上。在反应混合物体系中加入一定量的氮化硅作为惰性稀释剂,可以起到阻止反应时硅的熔融团聚从而增加氮气渗透性、降低燃烧温度以及作为晶种促进硅粉氮化等作用。The method of layered cloth combustion synthesis of homogeneous silicon nitride powder proposed by the present invention solves the problem of uneven temperature field distribution in various parts of the reaction mixture system caused by the different conditions of heat loss and heat accumulation in the conventional combustion synthesis method. The problem is to overcome the problem of inhomogeneity in the composition and microscopic morphology of the synthetic product existing in the conventional combustion synthesis method, especially the problem that the internal phase composition, impurity content, grain size and grain shape of the synthetic product are quite different. In view of the uneven distribution of temperature field in different parts of the reaction mixture system, through the composition design and layered distribution of the reaction mixture system, the promotion effect of the inert diluent in the process of combustion synthesis reaction, such as heat absorption and cooling, is fully utilized to achieve both The purpose of reducing the maximum combustion temperature and controlling the temperature field distribution of each part of the reaction mixture system. Finally, the reaction temperature of each part of the reaction mixture system can be kept at the same level. Adding a certain amount of silicon nitride as an inert diluent in the reaction mixture system can prevent the melting and agglomeration of silicon during the reaction, thereby increasing the permeability of nitrogen gas, reducing the combustion temperature, and promoting the nitriding of silicon powder as a seed crystal.

本发明与已有技术相比的优点:Advantage of the present invention compared with prior art:

1)本发明通过对反应混合物体系的成份设计和层状布料,实现了整体反应物近等温模式下硅粉的完全氮化,提高了燃烧合成产物中氮化硅粉体的均匀性,所合成的氮化硅粉体纯度高,相含量一致,烧结活性高。1) The present invention realizes the complete nitriding of silicon powder under the nearly isothermal mode of the whole reactant through the component design and layered distribution of the reaction mixture system, and improves the uniformity of silicon nitride powder in the combustion synthesis product. The synthesized The silicon nitride powder has high purity, consistent phase content and high sintering activity.

2)本发明解决了常规燃烧合成过程中由于反应温度过高或反应混合物体系的温度场分布不均匀导致的反应不完全或合成产物的成分和微观形貌不均匀的问题,尤其是克服了合成产物存在分层和夹心现象的问题。通过对反应混合物体系的成份设计和层状布料,从原料配方角度调控整个反应混合物体系的温度场分布,有效地控制了燃烧合成反应过程及其反应温度,从而达到控制燃烧产物微观形貌和成分均匀性的目的,最终使燃烧合成的氮化硅粉体中不同部位具有物相组成均匀一致、颗粒尺寸均匀细小的特点。2) The present invention solves the problem of incomplete reaction or uneven composition and microscopic appearance of the synthetic product due to excessive reaction temperature or uneven temperature field distribution of the reaction mixture system in the conventional combustion synthesis process, especially overcomes the problem of incomplete synthesis The product has the problems of delamination and sandwich phenomenon. Through the composition design and layered distribution of the reaction mixture system, the temperature field distribution of the entire reaction mixture system is regulated from the perspective of raw material formula, and the combustion synthesis reaction process and reaction temperature are effectively controlled, so as to achieve the control of the microscopic morphology and composition of the combustion products. The purpose of uniformity is to finally make the different parts of the combustion-synthesized silicon nitride powder have the characteristics of uniform phase composition and uniform and fine particle size.

3)本发明通过对反应混合物体系的成份设计和层状布料,提高了氮化硅粉体的产出率和产量合格率,避免了常规燃烧合成过程由于合成产物的成分和微观形貌不均匀而增加的后续分离精选工艺,能够稳定合成出纯度高,相含量一致、粒度分布均匀的氮化硅粉体。3) The present invention improves the output rate and output qualification rate of silicon nitride powder through the composition design and layered distribution of the reaction mixture system, and avoids the non-uniform composition and microscopic appearance of the synthetic product during the conventional combustion synthesis process. The added follow-up separation and purification process can stably synthesize silicon nitride powder with high purity, consistent phase content and uniform particle size distribution.

4)能源消耗小,生产成本低。除诱发反应需要外加能源加热点燃点火剂外,燃烧合成均质氮化硅粉体依靠反应自身的热效应完成。因此本方法在降低能源消耗和生产成本方面具有优势。4) The energy consumption is small and the production cost is low. In addition to the need to add energy to heat and ignite the ignition agent to induce the reaction, the combustion synthesis of homogeneous silicon nitride powder depends on the thermal effect of the reaction itself. Therefore, the method has advantages in reducing energy consumption and production cost.

5)反应时间短,生产效率高。整个燃烧合成反应过程迅速,反应时间根据原料重量、配比等一般为几分钟到几十分钟,生产周期短,能够节省生产工艺时间。5) The reaction time is short and the production efficiency is high. The entire combustion synthesis reaction process is rapid, and the reaction time is generally several minutes to tens of minutes according to the weight and proportion of raw materials. The production cycle is short and the production process time can be saved.

本发明提出的层状布料燃烧合成均质氮化硅粉体的方法,对燃烧合成反应装置及工艺过程没有特别限制,燃烧合成反应装置的大小依据生产能力确定。The method for combusting and synthesizing homogeneous silicon nitride powder with layered cloth proposed by the present invention has no special restrictions on the combustion synthesis reaction device and the process, and the size of the combustion synthesis reaction device is determined according to the production capacity.

附图说明 Description of drawings

图1为实施例1所采用的层状布料反应物粉坯示意图,其中1为外表层,2为中间层,3为中心层。Figure 1 is a schematic diagram of the layered cloth reactant powder used in Example 1, wherein 1 is the outer layer, 2 is the middle layer, and 3 is the center layer.

图2为实施例2所采用的层状布料反应物粉坯示意图,其中1为上表层,2为中间层,3为下表层。2 is a schematic diagram of the layered cloth reactant powder used in Example 2, wherein 1 is the upper surface layer, 2 is the middle layer, and 3 is the lower surface layer.

图3为实施例3所采用的层状布料反应物粉坯示意图,其中1为上表层,2为中间层,3为下表层。3 is a schematic diagram of the layered cloth reactant powder used in Example 3, wherein 1 is the upper surface layer, 2 is the middle layer, and 3 is the lower surface layer.

图4为实施例4所采用的层状布料反应物粉坯示意图,其中1为中间层,2为外表层。4 is a schematic diagram of the layered cloth reactant powder used in Example 4, wherein 1 is the middle layer, and 2 is the outer layer.

图5为实施例1燃烧合成产物中心部位取样的氮化硅粉体扫描电镜显微分析图。Fig. 5 is a scanning electron microscope microscopic analysis diagram of the silicon nitride powder sampled from the center of the combustion synthesis product in Example 1.

图6为实施例1燃烧合成产物中心部位取样的氮化硅粉体X射线衍射图。6 is an X-ray diffraction pattern of silicon nitride powder sampled from the center of the combustion synthesis product in Example 1.

图7为实施例1燃烧合成产物表层区域取样的氮化硅粉体扫描电镜显微分析图。7 is a scanning electron microscope microscopic analysis diagram of the silicon nitride powder sampled from the surface region of the combustion synthesis product in Example 1.

图8为实施例1燃烧合成产物表层区域取样的氮化硅粉体X射线衍射图。Fig. 8 is an X-ray diffraction pattern of silicon nitride powder sampled from the surface region of the combustion synthesis product in Example 1.

具体实施方式 Detailed ways

实施例1Example 1

将平均粒径25μm的硅粉(纯度大于98.5%)与平均粒径2.2μm的氮化硅粉体(纯度大于96%,α相含量93%左右),分别按照不同重量比(本实施例中为三种配料比)配料后在滚筒球磨机的球磨罐中球磨72小时进行研磨混合,得到三份不同组分配比的反应混合物,即反应混合物A(配料比为Si∶Si3N4=45∶55)、反应混合物B(配料比为Si∶Si3N4=47.5∶52.5)和反应混合物C(配料比为Si∶Si3N4=50∶50),反应混合物A、B、C总重量为4.8千克。将反应混合物A、B、C分别放入电热烘箱中于70℃进行干燥。再将这三份不同组分配比的反应混合物在圆柱状多孔石墨坩埚中按照附图1所示进行层状布料,即圆柱状反应物粉坯的中心层采用反应混合物A,中心层采用反应混合物B,而外表层采用反应混合物C。将布粉后的圆柱状多孔石墨坩埚放入60升燃烧合成反应装置内,在圆柱状反应物粉坯的一端安放绕成螺旋状的钨丝做点火源。抽真空后,在燃烧合成反应装置内部充入氮气,直到氮气压力达到9MPa。给螺旋状钨丝通以脉冲电流,点燃点火剂诱发反应混合物进行燃烧合成反应,点火剂为钛粉。诱发原料粉体燃烧,燃烧反应结束后,冷却至室温,卸压排放燃烧合成反应装置内的氮气,得到的燃烧合成产物整体色泽均匀,没有分层和夹心现象,辅以细磨等后处理工艺即得到纯度为98.5%、α相氮化硅含量为96wt%、游离硅为0.06wt%、平均粒径为0.8μm的均质氮化硅粉体。Silicon powder with an average particle diameter of 25 μm (purity greater than 98.5%) and silicon nitride powder with an average particle diameter of 2.2 μm (purity greater than 96%, α-phase content of about 93%), respectively, according to different weight ratios (in this embodiment For three batching ratios) after the batching, ball milling in the ball mill tank of the roller ball mill for 72 hours was ground and mixed to obtain three parts of reaction mixtures with different component distribution ratios, i.e. reaction mixture A (the batching ratio is Si: Si 3 N 4 =45: 55), reaction mixture B (ingredient ratio is Si: Si 3 N 4 =47.5: 52.5) and reaction mixture C (ingredient ratio is Si: Si 3 N 4 = 50: 50), reaction mixture A, B, C total weight 4.8 kg. The reaction mixtures A, B, and C were respectively placed in an electric oven for drying at 70°C. Then these three parts of reaction mixtures with different component ratios are layered in a cylindrical porous graphite crucible as shown in Figure 1, that is, the central layer of the cylindrical reactant powder adopts the reaction mixture A, and the central layer adopts the reaction mixture B, while the outer layer uses reaction mixture C. Put the powdered cylindrical porous graphite crucible into a 60-liter combustion synthesis reaction device, and place a spirally wound tungsten wire at one end of the cylindrical reactant powder as an ignition source. After vacuuming, nitrogen is filled inside the combustion synthesis reaction device until the nitrogen pressure reaches 9MPa. A pulse current is applied to the helical tungsten wire to ignite the igniter to induce the reaction mixture to carry out the combustion synthesis reaction. The igniter is titanium powder. Induce the combustion of raw material powder, after the combustion reaction is completed, cool to room temperature, release the nitrogen gas in the combustion synthesis reaction device, and the obtained combustion synthesis product has uniform color and luster, without layering and sandwiching, supplemented by post-treatment processes such as fine grinding That is, a homogeneous silicon nitride powder body with a purity of 98.5%, an α-phase silicon nitride content of 96 wt%, a free silicon content of 0.06 wt%, and an average particle size of 0.8 μm was obtained.

本实施例中未进行细磨等后处理工艺的燃烧合成产物中心部位取样的氮化硅粉体采用X射线荧光分析分析其化学成分为:Si(59.53wt%),N(39.03%),Fe(0.0352wt%),Ca(0.045wt%),Al(0.0343wt%),C(0.16wt%),O(1.16wt%)。采用X射线衍射分析法定量计算其α相氮化硅含量为96.52wt%。其扫描电镜显微分析图和X射线衍射图见附图5、6。表层区域取样的氮化硅粉体采用X射线荧光分析法分析其化学成分为:Si(59.47wt%),N(38.96%),Fe(0.0448wt%),Ca(0.049wt%),Al(0.0292wt%),C(0.1wt%),O(1.34wt%)。采用X射线衍射分析法定量计算其α相氮化硅含量为96.62wt%。其扫描电镜显微分析图和X射线衍射图见附图7、8。由以上分析结果可知,本实施例中燃烧合成产物中心部位和表层区域取样的氮化硅粉体的化学成分一致,物相组成相同,α相氮化硅含量接近,颗粒尺寸和微观形貌相似,具备均质氮化硅粉体的特点。In this embodiment, the silicon nitride powder sampled from the central part of the combustion synthesis product without fine grinding and other post-treatment processes is analyzed by X-ray fluorescence analysis and its chemical composition is: Si (59.53wt%), N (39.03%), Fe (0.0352wt%), Ca (0.045wt%), Al (0.0343wt%), C (0.16wt%), O (1.16wt%). The content of α-phase silicon nitride was quantitatively calculated by X-ray diffraction analysis method to be 96.52wt%. See accompanying drawings 5 and 6 for its scanning electron microscope microanalysis diagram and X-ray diffraction diagram. The silicon nitride powder body sampled in the surface area is analyzed by X-ray fluorescence analysis method and its chemical composition is: Si (59.47wt%), N (38.96%), Fe (0.0448wt%), Ca (0.049wt%), Al ( 0.0292wt%), C (0.1wt%), O (1.34wt%). The content of α-phase silicon nitride was quantitatively calculated by X-ray diffraction analysis method to be 96.62wt%. See accompanying drawings 7 and 8 for its scanning electron microscope microscopic analysis diagram and X-ray diffraction diagram. From the above analysis results, it can be seen that the chemical composition of the silicon nitride powder sampled in the center and surface area of the combustion synthesis product in this example is the same, the phase composition is the same, the content of α-phase silicon nitride is close, and the particle size and microscopic appearance are similar , with the characteristics of homogeneous silicon nitride powder.

实施例2Example 2

本实施例采用的原料为平均粒径17μm的硅粉(纯度大于98.5%)与平均粒径1.5μm的氮化硅粉体(纯度大于98%,α相含量95%左右)。分别按照不同重量比进行配料并研磨混合,得到三份不同组分配比的反应混合物,即反应混合物A(配料比为Si∶Si3N4=45∶55)、反应混合物B(配料比为Si∶Si3N4=50∶50)和反应混合物C(配料比为Si∶Si3N4=55∶45),反应混合物A、B、C总重量为1.2千克。上述对这三份反应混合物的研磨混合按以下方式进行:先把硅粉在搅动球磨机的球磨桶中以无水乙醇为球磨介质球磨10小时进行研磨混合,然后再加入惰性稀释剂氮化硅粉后在振动磨上研磨混合0.5小时。后在电热烘箱中于80℃进行干燥。再将这三份不同组分配比的反应混合物在长方形纸质容器中按照附图2所示进行层状布料,即长方形反应物粉坯的中心层采用反应混合物A,下表层采用反应混合物B,而上表层采用反应混合物C。将布粉后的长方形纸质容器放入10升燃烧合成反应装置内,在长方形反应物粉坯的一端安放绕成螺旋状的钨丝做点火源。抽真空后,在燃烧合成反应装置内部充入氮气和氢气的混合气体,其中氢气所占比例为20vol%,直到气体压力达到10MPa。给螺旋状钨丝通以脉冲电流,点燃点火剂诱发反应混合物进行燃烧合成反应,点火剂为钛粉和碳黑的混合物。诱发原料粉体燃烧,燃烧反应结束后,冷却至室温,卸压排放燃烧合成反应装置内的氮气,得到的燃烧合成产物整体色泽均匀,没有分层和夹心现象,辅以细磨等后处理工艺即得到纯度为98%、α相氮化硅含量为97wt%、游离硅为0.07wt%、平均粒径为1μm的均质氮化硅粉体。The raw materials used in this example are silicon powder with an average particle size of 17 μm (purity greater than 98.5%) and silicon nitride powder with an average particle size of 1.5 μm (purity greater than 98%, and α-phase content of about 95%). Batching was carried out according to different weight ratios and ground and mixed respectively to obtain three parts of reaction mixtures with different component distribution ratios, i.e. reaction mixture A (the batching ratio was Si:Si 3 N 4 =45:55), reaction mixture B (the batching ratio was Si :Si 3 N 4 =50:50) and reaction mixture C (the proportioning ratio is Si:Si 3 N 4 =55:45), and the total weight of reaction mixtures A, B, and C is 1.2 kg. The above-mentioned grinding and mixing of the three reaction mixtures is carried out in the following manner: first, the silicon powder is ground and mixed for 10 hours in the ball mill barrel of the agitating ball mill with absolute ethanol as the ball milling medium, and then the inert diluent silicon nitride powder is added Then grind and mix on a vibrating mill for 0.5 hours. Then dry it in an electric oven at 80°C. Then these three parts of reaction mixtures with different component ratios are carried out in a rectangular paper container according to the layered cloth shown in Figure 2, that is, the central layer of the rectangular reactant powder base adopts reaction mixture A, and the lower surface layer adopts reaction mixture B. Reaction mixture C was used for the upper skin layer. Put the rectangular paper container after powder distribution into a 10-liter combustion synthesis reaction device, and place a spirally wound tungsten wire at one end of the rectangular reactant powder blank as an ignition source. After evacuation, the interior of the combustion synthesis reaction device is filled with a mixture of nitrogen and hydrogen, wherein the proportion of hydrogen is 20vol%, until the gas pressure reaches 10MPa. A pulse current is applied to the helical tungsten wire to ignite the igniter to induce the reaction mixture to carry out the combustion synthesis reaction. The igniter is a mixture of titanium powder and carbon black. Induce the combustion of raw material powder, after the combustion reaction is completed, cool to room temperature, release the nitrogen gas in the combustion synthesis reaction device, and the obtained combustion synthesis product has uniform color and luster, without layering and sandwiching, supplemented by post-treatment processes such as fine grinding That is, a homogeneous silicon nitride powder body with a purity of 98%, an α-phase silicon nitride content of 97 wt%, a free silicon content of 0.07 wt%, and an average particle size of 1 μm was obtained.

实施例3Example 3

本实施例采用的原料为平均粒径5μm的硅粉(纯度大于98.5%)与平均粒径3μm的氮化硅粉体(纯度大于96%,α相含量90%左右)。分别按照不同重量比进行配料并研磨混合,得到三份不同组分配比的反应混合物,即反应混合物A(配料比为Si∶Si3N4=42.5∶57.5)、反应混合物B(配料比为Si∶Si3N4=47.5∶52.5)和反应混合物C(配料比为Si∶Si3N4=52.5∶47.5),反应混合物A、B、C总重量为5千克。上述对这三份反应混合物的研磨混合按以下方式进行:先把硅粉在搅动球磨机的球磨桶中以无水乙醇为球磨介质球磨6小时进行研磨混合,后在真空烘箱中于60℃进行干燥。再把惰性稀释剂氮化硅粉在搅动球磨机的球磨桶中以丙酮为球磨介质球磨6小时进行研磨混合,后在真空烘箱中于40℃进行干燥。然后再混合干燥后的硅粉与惰性稀释剂氮化硅粉于振动磨上研磨混合2小时。再将这三份不同组分配比的反应混合物在圆形碳毡中按照附图3所示进行层状布料,即圆形反应物粉坯的中心层采用反应混合物A,下表层采用反应混合物B,而上表层采用反应混合物C。将布粉后的圆形碳毡放入60升燃烧合成反应装置内,在圆形反应物粉坯的一端安放一个长条形石墨片做点火源。抽真空后,在燃烧合成反应装置内部充入氮气,直到气体压力达到8MPa。给石墨片通以脉冲电流,点燃点火剂诱发反应混合物进行燃烧合成反应,点火剂为钛粉。诱发原料粉体燃烧,燃烧反应结束后,冷却至室温,卸压排放燃烧合成反应装置内的氮气,得到的燃烧合成产物整体色泽均匀,没有分层和夹心现象,辅以细磨等后处理工艺即得到纯度为98%、α相氮化硅含量为93wt%、游离硅为0.1wt%、平均粒径为1.2μm的均质氮化硅粉体。The raw materials used in this example are silicon powder with an average particle size of 5 μm (purity greater than 98.5%) and silicon nitride powder with an average particle size of 3 μm (purity greater than 96%, and α-phase content of about 90%). Batching was carried out according to different weight ratios and ground and mixed respectively to obtain three parts of reaction mixtures with different component distribution ratios, i.e. reaction mixture A (the batching ratio was Si:Si 3 N 4 =42.5:57.5), reaction mixture B (the batching ratio was Si :Si 3 N 4 =47.5:52.5) and reaction mixture C (the proportioning ratio is Si:Si 3 N 4 =52.5:47.5), the total weight of reaction mixtures A, B, and C is 5 kg. The above-mentioned grinding and mixing of the three reaction mixtures is carried out in the following manner: first, the silicon powder is ground and mixed for 6 hours in the ball mill barrel of the agitating ball mill with absolute ethanol as the ball milling medium, and then dried in a vacuum oven at 60°C . Then, the inert diluent silicon nitride powder was ground and mixed in the ball mill bucket of the agitating ball mill with acetone as the ball milling medium for 6 hours, and then dried in a vacuum oven at 40°C. Then mix the dried silicon powder and silicon nitride powder as an inert diluent, grind and mix on a vibrating mill for 2 hours. Then these three parts of reaction mixtures with different component ratios are layered in the circular carbon felt as shown in Figure 3, that is, the central layer of the circular reactant powder adopts the reaction mixture A, and the lower surface layer adopts the reaction mixture B , while the upper surface layer uses reaction mixture C. Put the circular carbon felt after powder distribution into a 60-liter combustion synthesis reaction device, and place a strip graphite sheet at one end of the circular reactant powder blank as an ignition source. After vacuuming, nitrogen is filled inside the combustion synthesis reaction device until the gas pressure reaches 8MPa. A pulse current is applied to the graphite sheet, and the igniter is ignited to induce the reaction mixture to carry out the combustion synthesis reaction, and the igniter is titanium powder. Induce the combustion of raw material powder, after the combustion reaction is completed, cool to room temperature, release the nitrogen gas in the combustion synthesis reaction device, and the obtained combustion synthesis product has uniform color and luster, without layering and sandwiching, supplemented by post-treatment processes such as fine grinding That is, a homogeneous silicon nitride powder body with a purity of 98%, an α-phase silicon nitride content of 93 wt%, a free silicon content of 0.1 wt%, and an average particle size of 1.2 μm was obtained.

实施例4Example 4

本实施例采用的原料为平均粒径10μm的硅粉(纯度大于98.5%)与平均粒径1μm的氮化硅粉体(纯度大于98%,α相含量95%左右)。分别按照不同重量比进行配料并研磨混合,得到2份不同组分配比的反应混合物,即反应混合物A(配料比为Si∶Si3N4=46∶54)和反应混合物B(配料比为Si∶Si3N4=52∶48),反应混合物A、B总重量为4千克。上述对这2份反应混合物的研磨混合按以下方式进行:先把硅粉在搅动球磨机的球磨桶中以无水乙醇为球磨介质球磨12小时进行研磨混合,然后再加入惰性稀释剂氮化硅粉后继续在滚筒球磨机的球磨桶中球磨3小时,在电热烘箱中于65℃进行干燥。再将这2份不同组分配比的反应混合物在石棉布中按照附图4所示进行层状布料,即反应物粉坯的中间层采用反应混合物A,外表层采用反应混合物B。将布粉后的石棉布放入60升燃烧合成反应装置内,在反应物粉坯的一端安放绕成螺旋状的钨丝做点火源。抽真空后,在燃烧合成反应装置内部充入氮气,直到气体压力达到10MPa。给绕成螺旋状的钨丝通以脉冲电流,点燃点火剂诱发反应混合物进行燃烧合成反应,点火剂为钛粉。诱发原料粉体燃烧,燃烧反应结束后,冷却至室温,卸压排放燃烧合成反应装置内的氮气,得到的燃烧合成产物整体色泽均匀,没有分层和夹心现象,辅以细磨等后处理工艺即得到纯度为98%、α相氮化硅含量为98wt%、游离硅为0.06wt%、平均粒径为0.8μm的均质氮化硅粉体。The raw materials used in this example are silicon powder with an average particle size of 10 μm (purity greater than 98.5%) and silicon nitride powder with an average particle size of 1 μm (purity greater than 98%, and α-phase content of about 95%). Batching was carried out according to different weight ratios and ground and mixed to obtain 2 parts of reaction mixtures with different component ratios, i.e. reaction mixture A (the batching ratio was Si:Si 3 N 4 =46:54) and reaction mixture B (the batching ratio was Si : Si 3 N 4 =52:48), the total weight of the reaction mixtures A and B is 4 kg. The above-mentioned grinding and mixing of the two parts of the reaction mixture is carried out in the following manner: first, the silicon powder is ground and mixed for 12 hours in the ball mill barrel of the agitating ball mill with absolute ethanol as the ball milling medium, and then the inert diluent silicon nitride powder is added Afterwards, continue to mill for 3 hours in the ball mill barrel of the roller ball mill, and dry at 65° C. in an electric oven. Then these 2 parts of reaction mixtures with different component ratios are layered in the asbestos cloth as shown in Figure 4, that is, the middle layer of the reactant powder adopts the reaction mixture A, and the outer layer adopts the reaction mixture B. Put the powdered asbestos cloth into a 60-liter combustion synthesis reaction device, and place a spirally wound tungsten wire at one end of the reactant powder blank as an ignition source. After vacuuming, nitrogen gas is filled inside the combustion synthesis reaction device until the gas pressure reaches 10 MPa. A pulse current is applied to the spirally wound tungsten wire to ignite the igniting agent to induce the reaction mixture to carry out the combustion synthesis reaction. The igniting agent is titanium powder. Induce the combustion of raw material powder, after the combustion reaction is completed, cool to room temperature, release the nitrogen gas in the combustion synthesis reaction device, and the obtained combustion synthesis product has uniform color and luster, without layering and sandwiching, supplemented by post-treatment processes such as fine grinding That is, a homogeneous silicon nitride powder body with a purity of 98%, an α-phase silicon nitride content of 98 wt%, a free silicon content of 0.06 wt%, and an average particle size of 0.8 μm was obtained.

虽然本发明已以较佳实施例对发明内容进行了阐释如上,但这些实施例并非用以对本发明的范围加以限制。任何了解并已熟悉本发明所述工艺者,在不脱离本发明的精神和范围内,有可能做某些更改和润饰,因此本发明的保护范围当以所附权利要求所界定的内容为准。Although the present invention has been explained above with preferred embodiments, these embodiments are not intended to limit the scope of the present invention. Anyone who understands and is familiar with the technology described in the present invention may make some changes and modifications without departing from the spirit and scope of the present invention, so the protection scope of the present invention should be based on the content defined by the appended claims .

Claims (4)

1. 一种层状布料燃烧合成均质氮化硅粉体的方法,其特征在于:以硅粉和惰性稀释剂氮化硅粉为原料,经研磨混合、干燥后,按不同组分配比配制得到一组反应混合物,在多孔反应容器中进行层状布料,其布料方式为把反应混合物分为2~5层,每层中采用不同组分配比的反应混合物,各相邻层中硅粉重量与惰性稀释剂氮化硅粉重量的比例不同,根据采用的层数不同其硅粉和惰性稀释剂氮化硅组分重量的比例变化幅度在1~50%之间,然后将布料后的多孔反应容器置于燃烧合成反应装置中,反应装置抽真空后充入氮气或氮气与氢气的混合气体,其中氢气在混合气体中占氮气体积的1~50%,使燃烧合成反应装置中的气体压力控制在压力范围1~20MPa之内,然后点燃点火剂诱发反应混合物进行燃烧合成反应,反应完成后,其产物辅以细磨,得到均质氮化硅粉体。1. A method for synthesizing homogeneous silicon nitride powder by layered cloth combustion, characterized in that: using silicon powder and inert diluent silicon nitride powder as raw materials, after grinding, mixing and drying, it is prepared according to the ratio of different components Obtain a set of reaction mixtures, and carry out layered distribution in a porous reaction container. The distribution method is to divide the reaction mixture into 2 to 5 layers, and use a reaction mixture with different component ratios in each layer. The weight of silicon powder in each adjacent layer Different from the weight ratio of the inert diluent silicon nitride powder, the ratio of the weight ratio of the silicon powder to the inert diluent silicon nitride component varies from 1 to 50% according to the number of layers used, and then the porous material after the cloth The reaction vessel is placed in a combustion synthesis reaction device, and the reaction device is vacuumized and filled with nitrogen or a mixed gas of nitrogen and hydrogen, wherein hydrogen accounts for 1 to 50% of the nitrogen volume in the mixed gas, so that the gas pressure in the combustion synthesis reaction device The pressure is controlled within the range of 1-20MPa, and then the ignition agent is ignited to induce the reaction mixture to carry out the combustion synthesis reaction. After the reaction is completed, the product is supplemented with fine grinding to obtain homogeneous silicon nitride powder. 2. 根据权利要求1所述的方法,其特征在于:一组不同组分配比的反应混合物是按重量比将硅粉40%~90%,惰性稀释剂氮化硅10%~60%进行混合,得到一组不同组分配比的反应混合物;其中,硅粉纯度为95~99.99%,粒径范围为0.1~90μm;所述的惰性稀释剂氮化硅纯度为90~99.9%,粒径范围为0.05~50μm,氧含量为0.01~10%,α相含量为80~99.9%。2. The method according to claim 1, characterized in that: a group of reaction mixtures with different component ratios is mixed with 40% to 90% of silicon powder and 10% to 60% of silicon nitride as an inert diluent by weight , to obtain a group of reaction mixtures with different component ratios; wherein, the silicon powder has a purity of 95-99.99% and a particle size range of 0.1-90 μm; the inert diluent silicon nitride has a purity of 90-99.9% and a particle size range of 0.05-50 μm, the oxygen content is 0.01-10%, and the α-phase content is 80-99.9%. 3. 根据权利要求1所述的方法,其特征在于:所述的多孔反应容器为碳毡、纸质材料、石棉布、多孔石墨或多孔陶瓷中的一种材料制成的反应容器;多孔反应容器和反应物粉坯形状为圆柱状、半圆柱状或盘状中的一种。3. method according to claim 1, is characterized in that: described porous reaction vessel is the reaction vessel that a kind of material in carbon felt, paper material, asbestos cloth, porous graphite or porous ceramics is made; The shape of the container and the reactant powder is one of cylindrical, semi-cylindrical or disc. 4. 根据权利要求1所述的方法,其特征在于:所述的燃烧合成反应装置由不锈钢材料制成的耐高温的高压容器,其容积为1~60升;所述的点燃采用电火花、电弧放电、钨丝、激光、微波或红外热源点火方式中的一种;点火剂为Ti、Ti+C或Fe3O4+Al点火剂中的一种。4. The method according to claim 1, characterized in that: said combustion synthesis reaction device is a high-temperature-resistant high-pressure vessel made of stainless steel, with a volume of 1 to 60 liters; said ignition adopts electric spark, One of the ignition methods of arc discharge, tungsten wire, laser, microwave or infrared heat source; the ignition agent is one of Ti, Ti+C or Fe 3 O 4 +Al ignition agent.
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