CN100384032C - Laser device with laser diode bar array of collimation modules - Google Patents

Abstract

A laser device containing a laser diode linear array with a collimation module includes a tube shell, a semiconductor cooler is placed on the base inside the tube shell, a transition heat sink, and the light-emitting surface of the laser diode linear array with the heat sink are aligned with the window with a window sheet on the tube shell cover, and a collimation module is built into the window between the laser diode linear array and the window sheet. The collimation module contains a micro-cylindrical lens and a micro-cylindrical lens array fixed by a fixing block with a certain bonding gap spacing. The receiving surface of the collimation module is aligned with the light-emitting surface of the laser diode linear array. It has the characteristics of simple and reasonable structure, convenient processing and adjustment, and high collimation efficiency and coupled output light power efficiency.

Description

Laser device with laser diode bar array of collimation modules

The invention relates to a laser device containing a laser diode line array of a collimation module.

In the prior art, high-power (continuous 20W-100W, quasi-continuous 60W-300W) laser diode bar array (hereinafter referred to as LDBAR) is an important laser source with wide application. Regardless of whether the optical system or the optical fiber coupling is used for transmission, there is a key and difficult technical problem of how to efficiently collimate and couple the laser power emitted by the LDBAR. For this reason, in the 1990s, the international optical community proposed a variety of collimation structures. One of the better structures is to first use a cylindrical microlens array to collimate the divergent beam of the LDBAR slow axis plane, and then use a large cylindrical lens to collimate the beam. The divergent beam in the plane of the straight fast axis can obtain a nearly elongated rectangular collimated beam, and the collimation efficiency can reach T≈90%. The overall transmittance of the system is only ≤70%, and the processing of large cylindrical lenses is difficult and costly (prior technology Optics Letters, 1995, 20(2): 155).

The object of the present invention is to overcome the deficiencies in the prior art and provide a laser device containing a laser diode bar array with a collimation module, which has a simple and reasonable structure, is convenient to process and adjust, and improves the collimation efficiency and the transmittance of the entire device.

The laser device of the present invention includes: as shown in FIGS. 1 , 2 and 3 . There is a tube shell 1, the bottom surface of the tube shell 1 is a base 101 with four screw counterbores 2 for fixing the tube shell 1 evenly distributed around the edge. On top of the package 1 is a cover plate 6 with a central window 601 . There is a tube wall 102 between the cover plate 6 and the base 101 . A shoulder 602 on the edge of the cover plate 6 is placed in the port groove 5 on the top port of the tube wall 102 . The joint between the shoulder 602 and the port groove 5 is treated with a sealant. On the base 101 outside the tube case 1 there are a plurality of electrode pins 16 leading into the tube case 1 . A semiconductor refrigerator 15 is placed on the inner base 101 of the shell 1 , a transitional heat sink 8 is placed on the semiconductor cooler 15 , and a heat sink 13 of the laser diode bar array 11 is placed on the transitional heat sink 8 . The light-emitting surface of the laser diode bar array 11 placed on the heat sink 13 is aligned with the window 601 with the window 10 on the cover plate 6 . The laser diode bar array 11 placed in the package 1 , the window 601 and the window 10 on the cover plate 6 are all on the same central axis 00 as the package 1 . A collimation module 9 including a microcylindrical lens 902 and a microcylindrical lens array 901 is built in the window 601 between the laser diode bar array 11 and the window 10 . The microcylindrical lens 902 in the collimation module 9 faces the light emitting surface of the laser diode bar array 11 . As shown in Figure 4. The receiving surface 905 of the collimation module 9 is flush with the inner surface of the cover plate 6 . The central axis of the collimation module 9 coincides with the central axis OO of the window 601 and the laser diode bar array 11 . The collimation module 9 is on the same optical axis as the laser diode bar array 11 and the window 10 . In the tube shell 1 , there are two left-right symmetrical adjusting and fixing blocks 4 fixed on the base 101 between the tube wall 102 , the semiconductor refrigerator 15 and the transition heat sink 8 . The adjusting and fixing block 4 has an adjusting screw hole 3 with one end facing the transition heat sink 8 and the other end communicating with the screw hole on the tube wall 102 . As shown in Figure 2, this adjustment screw hole 3 is used for screwing in the adjustment screw. In the tube shell 1 , between the tube wall 102 , the semiconductor refrigerator 15 and the transitional heat sink 8 , there are two translational groove blocks 17 fixed on the base 101 symmetrically. The position where the translational groove block 17 faces the transitional heat sink 8 has a groove block groove 1701 that matches with the heat sink groove 801 on the transitional heat sink 8 to form a channel, and a guide rail 20 is built in the channel. As shown in FIG. 3 , the guide rail 20 cooperates with the adjusting screw in the adjusting screw hole 3 to make the transition heat sink 8 drive the laser diode bar array 11 to move left and right. There is a piezoelectric element 10 between the semiconductor refrigerator 15 and the transition heat sink 8 . Adjusting the piezoelectric element 10 can make the laser diode bar array 11 placed on the transitional heat sink 8 and fixed on the heat sink 13 move up and down. There is an electrical insulating sheet 7 between the above-mentioned two adjusting and fixing blocks (4) and the two translation groove blocks 17, the transition heat sink 8 and the semiconductor refrigerator 15. This electrical insulating sheet 7 is preferably made of mica sheet.

The two ends of microcylindrical lens 902 and microcylindrical lens array 901 in the said collimation module 9 along the length direction respectively have first fixed block 904 and second fixed block 908 to fix both, between the two There is a bonding gap 907 between them, and optical bonding glue is placed in the bonding gap 907 . Both the light-transmitting surfaces of the micro-cylindrical lens 902 and the two light-transmitting surfaces of the micro-cylindrical lens array 901 are coated with an anti-reflection coating 906 with a transmittance greater than or equal to 99.5% for the light beam emitted by the laser diode bar array 11 . The light incident surface of the microcylindrical lens 902 is the receiving surface 905 of the collimation module 9 , and the light exit surface of the microcylindrical lens array 901 is the output surface 903 of the collimation module 9 . As shown in Figure 4.

The length L _m of the collimation module 9 is greater than the length L _c of the laser diode bar array, that is, L _m > L _c , and usually L _m = L _c + 2 mm is sufficient. It is mainly required that the effective length of the collimation module 9 be greater than the effective length of the light-emitting surface of the laser diode bar array 11 . The width D _m of the collimation module 9 is greater than the width D _c of the laser diode bar array 11 , that is, D _m >D _c .

The radius of curvature R of the microcylindrical lens 902 in the collimation module 9 is less than 2 mm, and the focal length f of the microcylindrical lens 902 is less than 1.5 mm.

As mentioned above, the laser device shown in Figures 1, 2 and 3 of the present invention will be described in detail below in conjunction with the accompanying drawings. In the figure, 1 is a tube shell, and the bottom surface of the tube shell 1 is a base 101 made of red copper, and the bottom surface of the base 101 is connected on the radiator. The 2nd, four screw counterbores that are distributed on the edge of the base 101 symmetrically and uniformly at 90° are used for screwing in the screws to fix the base 101 on the radiator. 3 is to spin through the tube wall 102 and adjust the fixed block 4, the surface of which is oxidized black in a pair of adjusting screw holes whose top end is on the side of the transitional heat sink 8. 4 is a pair of left and right symmetrical adjustment and fixing blocks located on the base 101, which can be made of aluminum blocks to make the surface oxidized black, and the middle symmetrical part of each block runs through two electrode leads insulatedly, and there are a pair of symmetrically distributed upper and lower light holes on its two sides , fix the adjusting and fixing block 4 on the base 101 with screws, and close to the tube wall 102 in the tube shell 1 along the arc-shaped side. 5 is the port groove on the top port of the tube wall 102 and the shoulder 602 of the cover plate 6 Joint, the joint is fixed and sealed with epoxy resin as the sealant. There are four pairs of 8 electrodes placed symmetrically inside the shell 1, the material of which is red copper wire of Φ2.5-3mm, among which there are laser diode line array 11, semiconductor cooler 15, temperature sensor, piezoelectric element 14 respectively Connect two electrodes. These electrodes are connected to the electrode pins 16 on the stem 101 . The structural shape of the transitional heat sink 8 is a square bottom, and the side is a half-pyramid flat top, which is beneficial to the work and heat dissipation of the LDBAR11. The middle part of the transition heat sink 8 forms a vertical concave vertical groove from the upper surface of the bottom plate to the top surface, and the heat sink 13 of LDBAR11 fixes the center position of the vertical vertical groove of the transition heat sink 8 with four symmetrically distributed screws (Figure 2). The light-emitting surface of LDBAR11 is perpendicular to the central axis of the shell (00). At this time, there is a gap of about 1 mm between the lower edge of LDBAR11 heat sink 13 and the bottom plate of transition heat sink 8 to ensure that the heat sink 13 of LDBAR11 (also called the bottom of LDBAR11) Electrode) is in good electrical contact with the transition heat sink 8, and the electrical insulation between the upper electrode 12 of the LDBAR 11 and the transition heat sink 8 is good. The upper electrode 12 of the LDBAR is electrically insulated and fixedly connected to the lower telegraph (i.e. the heat sink 13) with two screws 19 (the upper two as shown in Figure 3), and the lower screw 18 is used as the upper electrode of the LDBAR11 in Figure 3 The leads are fixed. The LDBAR 11 is press-welded from the upper electrode 12 to the lower electrode 13 through the soft transition of the spring piece 1201 which it can bear. The light emitting surface of LDBAR11 is exactly aligned with the end faces of the upper and lower electrodes. On the one hand, the upper and lower electrodes play a role of mechanical protection for LDBAR11, and on the other hand, the lower electrode serves as a reference for axially adjusting the coupling distance. A collimation module 9 including a micro-cylindrical lens 902 and a micro-cylindrical lens array 901 is built in the window 601 of the cover plate 6 at the same orientation as the optical axis of the LDBAR 11 . As shown in FIG. 4 , in the collimation module 9 , the microcylindrical lens 902 faces the light emitting surface of the LBDAR 11 , the microcylindrical lens array 901 is behind, and the distance between the bonding gaps 907 is 50 μm to 260 μm. The cover plate 6 can be made of duralumin LY12 to make the surface deeply oxidized black. The collimation module 9 is placed in the window 601 on the cover plate 6 . The input light surface of the collimation module 9, that is, the receiving surface 905, must be completely flush with the inner surface of the cover plate 6; the input and output surfaces of each optical element in the collimation module 9 are coated with T≥99.5% antireflection for the LDBAR11 laser wavelength Film 906; the optical axis of the collimation module 9 must be strictly consistent with the optical axis of LDBAR11; the window 10 should also be coated with an anti-reflection coating of T≥99.5% for the LDBAR11 laser wavelength; the window 10 and the collimation module 9 are also on the same optical axis , and at the same time, the window 10 is the sealing window at the output end of the device and also functions as a feedback mirror for certain coupling. The coupling distance between the receiving surface of the collimation module 9 and the emitting surface of the LDBAR 11 is usually 85 μm±5 μm.

Among Fig. 3, 17 is a pair of front and rear symmetrical translation slot blocks, the surface is oxidized black, and the middle symmetrical part runs through two electrodes (insulated from the electrodes) up and down, and two upper and lower light holes are arranged on its two sides, and the translation slot block 17 is screwed. It is fixed on the base 101 inside the tube shell 1 , and its arc side is closely connected with the inner side of the tube wall 102 . There is a 90° heat sink groove 801 and a groove block groove 1701 respectively on the front and rear sides of the bottom plate of the transitional heat sink 8 and the sides corresponding to the translation groove block 17 to form a Φ4 round rod guide rail 20 in each of the front and rear channels. 20 surface oxide black. A well-insulated mica sheet (~30 μm thick) is inserted between the translation block 17 and the guide rail 20 . The guide rail 20 mechanism not only plays the role of flexible installation and disassembly of the transitional heat sink 8 but also plays the role of left-right translation and fine-tuning of the left-right coupling alignment of the transitional heat sink 8 and LDBAR11. In addition, in order to measure the actual working temperature of LDBAR11, there are light holes of Φ2～Φ5 on the bottom plate of transition heat sink 8 as shown in Fig. or AD590) use.

In the device of the present invention, the LDBAR11 is insulated from the tube shell 1 and works safely and reliably. As mentioned above, the 8 electrodes of the device are insulated from the shell 1, the base 101 of the device, the cover plate 6, the adjusting and fixing block 4, the adjusting screw hole 3, and the translation groove block 17 are insulated from the housing 1, and the base 101, The surfaces of the cover plate 6, the adjusting fixed block 4, the adjusting screw hole 3, the translation groove block 17, the guide rail 20, and the transition heat sink 8 are all deeply oxidized black, and the transition heat sink 8, the adjustment screw hole 3 and the guide rail 20 are evenly spaced. Insert the mica insulating sheet 7 with good electrical insulation, there is usually a micro-gap between the cover plate 6 and the top surface of the transition heat sink 8, even if there is no gap, the electrical insulation is also good when the deep surface of the two is well oxidized and black. In this way, LDBAR11 only introduces the working current through two electrodes, and is well insulated from the shell 1, which not only avoids the shunt effect of the LDBAR11 injection current, but also avoids the adjustment or adjustment of the operator (in general, it should be an anti-static belt on the wrist). Use the impact of static electricity or surge current spikes that may be brought into the working circuit of LDBAR11 by operation contact to ensure the safe and reliable operation of LDBAR11. For the expensive LDBAR11, this measure is extremely important to ensure the safety of operation during debugging or later.

The debugging and installation features of the device of the present invention are as follows: the collimation module 9 is placed in the center position that is embedded in the window 601 on the cover plate 6, fixed with glue, and the receiving surface of the microcylindrical lens 902 must be in line with the cover plate 6 The inner surface is flush, and its optical axis must be adjusted to be consistent with LDBAR11 and the central axis OO of the device without deviation and in the same direction. The left and right positions of LDBAR11 on the transitional heat sink 8 are required to be roughly adjusted under the microscope in advance, that is, the LDBAR11 and its heat sink 13 are basically set on the left and right central positions of the vertical concave vertical grooves of the transitional heat sink 8 to fix. LDBAR11 is coupled with the collimation module 9 left and right to align with the center position, fine-tuning is adjusted by adjusting the left and right positions of the transitional heat sink 8 with the screws in the screw hole 3, the standard for fine-tuning is to reach the light intensity of the output spot of the collimation module 9 The zero-order diffraction-limited spot with the largest and highest definition and the smallest spot, and the positions of the first-order weak spots on both sides are strictly symmetrical to the optical axis of the device. The optimal coupling distance between the receiving surface of the collimation module 9 and the light emitting surface of the LDBAR 11 is 85 μm±5 μm. If the piezoelectric element 14 fine-tuning control is not used, that is, there is no piezoelectric element 14, the key of debugging at this time is that the top port of the base tube wall is as high as the top surface after the transition heat sink 8 is installed. The inner surface of the plate 6 and the receiving surface (actually the same plane) of the collimation module 9 are just joined with the top surface of the transitional heat sink 8 . The drop between the light-emitting surface on which the LDBAR11 is installed and the top surface of the transition heat sink 8 (that is, the LDBAR light-emitting surface is indented from the top surface of the transition heat sink 8) is 85 μm ± 5 μm, which is the difference between the light-emitting surface of the collimation module 9 and the LDBAR11. The coupling distance can be accurately measured with a dry meter. If there is a fine-tuning structure of the piezoelectric element 14. as shown in picture 2. At this time, the key to fine-tuning is to strictly control the drop (indentation distance) between the light-emitting surface of LDBAR11 and the top surface of the transition heat sink 8 to be less than the optimal coupling distance of 85 μm, for example, to be controlled at ~70 μm, and there is still a fine microcosm of about 15±5 μm. Adjustment of the piezoelectric element 14 is accomplished. The criteria for fine-tuning the optimal coupling distance in the above two cases are the same, that is, a series of the clearest and thinnest diffraction fringes appear on the target surface at a certain optional distance from the output beam coupled by the collimator module 9 until the coupling efficiency is the highest. Of course, the first case above. It is necessary to manually adjust the drop between the top surfaces of the LDBAR11 light-emitting surface indented transition heat sink 8 until the standard of the optimal coupling distance is reached, which will be difficult to a certain extent. In contrast, the second type with the piezoelectric element 14 is more convenient and finer, as long as the voltage of the piezoelectric element 14 is controlled, the standard for optimal coupling distance can be controlled.

The above-mentioned collimation module 9 (FIG. 4) is formed by bonding a fast-axis collimating micro-cylindrical lens 902 and a slow-axis collimating micro-cylindrical lens array 901. The former is usually 12 mm long and 1.5 mm thick. The width is 2mm, and the numerical aperture is as high as NA=0.85 (refractive index of optical material n≥1.85), which is a microcylindrical lens strip with high efficiency coupling of diffraction limit). °The full width at half maximum (FWHM) laser beam is collimated into a near-parallel beam (plane wave) with a divergence of only ~3mrad. The latter is usually an array with a length of 12mm, an effective length of 10.8mm, and a thickness of 0.39mm (a total of 1.5mm with the substrate), which is monolithically integrated by dozens of diffraction-limited microcylindrical lens elements. The light beams that have been collimated with the fast axis of the light-emitting elements of LDBAR11 are coupled through the diffraction coupling of the collimated micro-cylindrical lens array elements one by one, and the beams of the light-emitting elements after collimation are superimposed on each other to form a plane wave and generate zero-order diffraction Single-spot far-field pattern. At this time, the first-order far-field beam spots symmetrically distributed on the left and right sides show very weak intensity, and more than 95% of the laser intensity of LDBAR11 is concentrated in the zero-order diffraction single-spot far-field pattern, which is the collimation module 9 high coupling efficiency. The parallelism of the collimated beam is 3mrad×40mrad(θ _⊥ ×θ _∥ ). In order to achieve this ideal collimating coupling effect, the collimating module 9 is: 1) The fast-axis collimating microcylindrical lens 902 must use optical glass with a high refractive index (n≥1.85), which is θ _⊥ ～40 of LDBAR11 ° match, the numerical aperture NA of microcylindrical lens 902≥0.85, and microcylindrical lens 902 must have low spherical aberration, reach diffraction limit; 2) the pitch of the array element of microcylindrical lens array 901 must Equal to the pitch of the LDBAR11 array element; 3) The f of the microcylindrical lens array element must match the beam spread of the LDBAR11 light-emitting element to minimize the coupling loss; 4) The microcylindrical lens array element must have Low spherical aberration, reaching near-diffraction limit coupling performance; 5) The incident/exit light planes of the micro-cylindrical lens 902 and the micro-cylindrical lens array 901 in the collimation module 9 must align with the laser wavelength of the collimated LDBAR Plating T≥99.5% anti-reflection coating, 6) in order to achieve the best collimation characteristics (the highest coupling efficiency, the beam spread of the smallest coupling beam) the bonding gap between the microcylindrical lens 902 and the microcylindrical lens array 901 The pitch of 907 is typically 50 μm to 260 μm.

The above-mentioned debugging structure of the present invention, that is, the fine-tuning structure of the coupling distance between the light-emitting surface of LDBAR11 and the collimation module 9, can be adjusted to the best state by cooperating with the left and right fine-tuning mechanisms, and can obtain the highest intensity, the highest definition, and the smallest divergence of the output beam spot. Zero-order single-spot diffraction far-field beam pattern.

The present invention adopts a special high-power (>100W) semiconductor refrigerator 15, equipped with a corresponding large heat dissipation radiator, as long as air cooling is not required, it can maintain 20W, 30W, 40W or even higher power CWLDBAR11 at the setting It works stably and reliably under normal temperature.

Advantages of the present invention:

1. The most important advantage of the present invention from the above-mentioned structure is that it contains the collimation module 9 . The collimation module 9 is placed in the window 601 on the cover plate 6, the receiving surface 905 is strictly aligned with the light-emitting surface of the laser diode bar array 11, and the receiving surface 905 of the collimation module 9 is the incident light surface of the micro-face cylindrical lens 902 That is to say, the micro-cylindrical lens 902 of the collimation module 9 is close to the laser diode bar array 11. The laser beam emitted by the laser diode bar array 11 first enters the micro-cylindrical lens 902 to place the laser diode bar array 11 on the fast axis plane. The inner divergent laser beam is collimated, and then enters the microcylindrical lens array 901 to align the laser diode bar array 11 . The laser beam diverging in the plane of the slow axis is collimated. This structure is completely opposite to the prior art, which is to make the light emitted by the laser diode line array first enter the micro-cylindrical lens array to collimate the light beam diverging in the slow axis plane of the laser diode line array, and then enter the large cylinder The divergent light beam of lens collimation fast axis plane, then need big cylindrical lens in prior art, its curvature radius R＞10mm, focal length f＞10mm, and the curvature radius＜2mm of microcylindrical lens 902 in the present invention, focal length F<1.5mm. Apparently, the microcylindrical lens 902 used in the present invention is easier to process than the large cylindrical lens in the prior art, and the cost is lower. The microcylindrical lens 902 of the present invention and the microcylindrical lens array 901 are fixed together by the first fixed block 904 and the second fixed block 908, and the spacing of the adhesive gap 907 between the two has been matched (usually selected at 50 μm～260 μm) to form a collimation module 9, which is very convenient to use, and there is no need to adjust the distance between the microcylindrical lens 902 and the microcylindrical lens array 901 when installing the laser device, and the adjustment process is reduced. Moreover, the adjustment precision of the optical path is high, and the adjustment error is reduced. The coupling output light power efficiency is improved, and the coupling efficiency of the device is improved.

2. The present invention uses a special semiconductor refrigerator 15 with a power ≥ 100W for cooling and temperature control, and is equipped with a corresponding special large heat dissipation radiator, which can maintain the stability and reliability of the set temperature of the LDBAR11 under the condition of air cooling instead of water cooling Work, suitable for CW 20W, 30W, 40W or higher high-power LDBAR11 and Q-CW 60W～100W or higher power LDBAR, which broadens the application range, especially for airborne and military.

3. In the device of the present invention, the LDBAR11 and the housing 12 are well electrically insulated, which ensures the safe and reliable operation of the LDBAR11 during commissioning and use. Since LDBAR is expensive, its safe and reliable operation shows the application value of this device.

4. Although the device of the present invention is used for the collimation coupling of the line array collimation module and the line array LDBAR, it can also be extended to the two-dimensional area array LDBAR (or diode array stack) and the area array collimation module The only difference is that one more dimension is added, and the parameter control of this dimension lies in the one-to-one correspondence between the parameter of the area array collimation module and the parameter of the area array LDBAR. The device of the present invention has further developed the application on a type of quasi-continuous work (Q-CW) and the peak optical power is as high as hundreds of watts or even kilowatts of area array LDBAR. The invention has wide potential application prospects in the high-tech fields of infrared active illumination and advanced all-solid semiconductor laser pumping solid-state lasers.

Description of drawings:

Figure 1 is a top view of the laser device of the present invention.

Fig. 2 is a sectional view of A-A of Fig. 1 of the laser device of the present invention.

Fig. 3 is a B-B sectional view of Fig. 1 of the laser device of the present invention.

FIG. 4 is a schematic structural diagram of the collimation module 9 used in the laser device of the present invention.

Example:

As shown in Fig. 1, 2, 3, 4 laser device of the present invention, the laser diode bar array 11 (LDBAR) parameter that adopts in the embodiment is as follows:

Laser center wavelength λ 806.2nm

Optical power output PCW 20W (injection working current 29A)

The total light-emitting surface size of the line array is 1cm×1μm, including 25 array elements

The size of the light-emitting surface of the array element is 100μm×1μm, and the pitch between the two light-emitting elements is 400μm

LDBAR11 laser beam divergence angle Fast axis direction θ _⊥ 40°(FWHM)

Slow axis direction θ _∥ 10°(FWHM)

The composition of the collimation module 9 and the parameters of the optical elements are as follows:

1. The micro-cylindrical lens 902 is strip-shaped (bar), length L _m =12mm, thickness T=1.5mm, width D _m =2mm, numerical aperture NA=0.85, effective focal length f=0.91mm, used optical glass The refractive index of the material is n=1.85.

2. Microcylindrical lens array 901, length L _m = 12 mm, effective length L' = 10.8 mm, width D _m = 2 mm, corrugated area thickness 0.39 mm, total thickness 1.5 mm even with the substrate, and the number of array elements is 25 , the pitch between the array elements is 400μm, the effective focal length f'=2.21mm, and the refractive index of the optical glass material used is n≥1.85.

3. Table 1 shows the results obtained when the spacing between the microcylindrical lens and the bonding gap 907 of the microcylindrical lens array 901 is 260 μm and 50 μm.

Table 1

Example Bond gap 907 gap Coupling distance between collimation module 9 and LDBAR Coupling output optical power (I＝29A) coupling efficiency Output beam divergence (θ_⊥×θ_∥) 1 50μm 88μm 18.9W 95% 3mrad×40mrad 2 260μm 88μm 17.0W ＞85% 3mrad×57mrad 3 260μm 88μm 17.0W ＞85% 3mrad×57mrad

It can be seen that the optimal spacing of the bonding gap 907 between the two collimating optical elements micro-cylindrical lens 902 and the micro-cylindrical lens array 901 of the collimating module 9 is 50 μm; The coupling efficiency of 9 is reduced, and the output optical power is also reduced. Of course, the divergence of the output beam θ _∥ is also increased.

Therefore, the spacing of the adhesive gaps 907 should be properly matched, and it can be seen from Table 1 that even when the spacing of the adhesive gaps 907 is 260 μm, the coupling efficiency of the device is higher than 85%. It is also higher than less than 70% in the prior art.

This embodiment fully demonstrates the above-mentioned advantages of the present invention.

Claims (5)

1. A laser device containing a collimation module laser diode bar array, comprising: <1> pipe shell (1), the bottom surface of pipe shell (1) is the base (101) that four screw counterbores (2) are evenly distributed around the edge, and the top of pipe shell (1) has a central window ( 601) of the cover plate (6), there is a tube wall (102) between the cover plate (6) and the base (101), and there is a shoulder (602) on the edge of the cover plate (6) placed on the top port of the tube arm (102) In the port groove (5), there is a sealant at the junction of the shoulder (602) and the port groove (5), and there is a sealant on the base (101) outside the shell (1) leading to the shell (1) The inner electrode pin (16); <2> a semiconductor refrigerator (15) is placed on the base (101) in the tube shell (1), a transition heat sink (8) is placed on the semiconductor refrigerator (15), and a transition heat sink (8) ) is provided with a heat sink (13) of a laser diode line array (11), and the light-emitting surface of the laser diode line array (11) is aligned with the window (601) with the window (10) on the cover plate (6) , the window (601) on the laser diode bar array (11) and the cover plate (6) and the window (10) on the window (601) are all on the same central axis (00) as the tube shell (1); It is characterized by: <3> the window (601) placed between the laser diode bar array (11) and the window (10) has a collimation module comprising a microcylindrical lens (902) and a microcylindrical lens array (901) (9), the microcylindrical lens (902) in the collimation module (9) faces the light-emitting surface of the laser diode bar array (11), the receiving surface (905) of the collimation module (9) and the cover plate (6 ) is flush with the inner surface; the central axis of the collimation module (9) coincides with the central axis (00) of the window (601) and the laser diode line array (11), and the collimation module (9) and the laser diode line array (11) and the same optical axis of the window plate (10); <4> There are two symmetrically fixed fixed blocks ( 4), the adjustment fixing block (4) has an adjustment screw hole (3) with one end facing the transition heat sink (8), and the other end communicating with the screw hole on the pipe wall (102); <5> There are two translation groove blocks ( 17), the position of the translational groove block (17) facing the transitional heat sink (8) has a groove block groove (1701) that matches the heat sink groove (801) on the transitional heat sink (8) to form a groove, and The channel is built with a guide rail (20); <6> There is a piezoelectric element (14) between the semiconductor refrigerator (15) and the transition heat sink (8); <7> there is an electrical insulating sheet (7) between the above-mentioned two adjustment fixed blocks (4) and the two translational groove blocks (17) and the transitional heat sink (8) and the semiconductor refrigerator (15). 2. The laser device containing the collimation module laser diode bar array according to claim 1, characterized in that the microcylindrical lens (902) and the microcylindrical lens array in the said collimation module (9) (901) There are respectively a first fixed block (904) and a second fixed block (908) at both ends along the length direction to fix the two, and there is a bonding gap (907) between the two, and in the bonding gap (907 ) is placed with optical adhesive glue, and the two light-transmitting surfaces of the micro-cylindrical lens (902) and the two light-transmitting surfaces of the micro-cylindrical lens array (901) are all coated with the emission of the laser diode line array (11). An anti-reflection coating (906) with a beam transmittance greater than or equal to 99.5%, the incident surface of the microcylindrical lens (902) is the receiving surface (905) of the collimation module (9), the microcylindrical lens array (901 ) is the output surface (903) of the collimation module (9). 3. the laser device containing the collimation module laser diode bar array according to claim 1 or 2, is characterized in that the length of said collimation module (9) is greater than the length of the laser diode bar array, and the collimation module (9) has a width greater than that of the laser diode bar array. 4. The laser device containing the collimation module laser diode line according to claim 1 or 2, characterized in that the radius of curvature of the microcylindrical lens (902) in the said collimation module (9) is less than 2 millimeters , the focal length of the microcylindrical lens (902) is less than 1.5 millimeters. 5. The laser device containing the collimation module laser diode bar array according to claim 1 or 2, characterized in that micro-cylindrical lens (902) and micro-cylindrical lens array in said collimation module (9) The bonding gaps (907) between the arrays (901) have a pitch of 50 microns to 260 microns.

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