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CN100371742C - CWDM filter with four channels - Google Patents

CWDM filter with four channels Download PDF

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CN100371742C
CN100371742C CNB2004100591099A CN200410059109A CN100371742C CN 100371742 C CN100371742 C CN 100371742C CN B2004100591099 A CNB2004100591099 A CN B2004100591099A CN 200410059109 A CN200410059109 A CN 200410059109A CN 100371742 C CN100371742 C CN 100371742C
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CN1734293A (en
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张陈益升
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Dongguan Xintai Optics Co Ltd
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Asia Optical Co Inc
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Abstract

The invention relates to a multi-channel CWDM optical filter, which comprises a substrate and N stacked structures, wherein N is an odd number not less than 2, and each stacked structure comprises a Fabry-Perot resonant cavity structure and a coupling layer from the substrate side. Wherein, the [ (N +1)/2-1 ] th]The coupling layer and the [ (N +1)/2+1 ] th layer of the stacked structure]The coupling layers of the stacked structure are all (2n +1) L, n is a positive integer, and L represents lambda0Low refractive index film layer of/4, lambda0Representing the center wavelength of the channels. Meanwhile, each Fabry-Perot resonant cavity structure is sequentially H (LH) from the substrate sideakL(HL)aH, a is a positive integer, k is an integer of not less than 2, L represents lambda0A film layer of low refractive index,/4, H represents lambda0High refractive index film layer of/4, lambda0Representing the center wavelength of the channels.

Description

具有四个信道的CWDM滤光片 CWDM filter with four channels

技术领域 technical field

本发明关于一种滤光片,尤其是一种适用于粗波分复用系统(CWDM;Coarse Wavelength Division Multip1ex)、同时具有四个信道的CWDM滤光片。The present invention relates to an optical filter, especially a CWDM optical filter suitable for a coarse wavelength division multiplexing system (CWDM; Coarse Wavelength Division Multip1ex) and having four channels at the same time.

背景技术 Background technique

光滤波器,或者称滤光器(optical filter)是一种波长选择器件,在光纤通信系统和光传感器系统中有着重要应用。光滤波器分为无源和有源两大类型,无源光滤波器的基础是棱镜、衍射光栅和光谱(频率)滤波器;而有源光滤波器是无源器件和可调谐检波器的组合,每个检波器调谐到一个特定的频率。Optical filter, or optical filter (optical filter) is a wavelength selective device, which has important applications in optical fiber communication systems and optical sensor systems. Optical filters are divided into two types: passive and active. Passive optical filters are based on prisms, diffraction gratings, and spectral (frequency) filters; active optical filters are passive devices and tunable detectors. Combined, each detector is tuned to a specific frequency.

无源光滤波器中有一种干涉膜型滤光器,其采用高、低折射率的材料以预先设计的厚度(通常为λ/4)沉积在玻璃等材质制成的基片上,以达到要求的波长响应特性。通常,介质膜干涉滤光器由每层厚度为λ/4的高折射率和低折射率的薄膜交叠制成,高折射率层内反射的光线的相位不会偏移,而低折射率层内反射的光线的相位则会偏移180°。由于光线行程的差异(2*λ/4的倍数),逐次的反射光线在前面重叠复合,产生狭窄波长范围内的高强度反射光束,而在此波长范围以外的输出波长则会突然减小。这类滤光器可用作高通滤光器、低通滤光器或高反射层。而且,由于其光学特性取决于光学膜的反射、透射特性,其光学膜一般镀制成带通滤光片(band-passfilter)、低通或高通滤光片(low pass filter or high pass filter)或带止滤光片(band reject filter)。Among the passive optical filters, there is an interference film filter, which uses high and low refractive index materials to be deposited on substrates made of glass and other materials with a pre-designed thickness (usually λ/4) to meet the requirements. wavelength response characteristics. Generally, the dielectric film interference filter is made of overlapping high-refractive index and low-refractive-index films with a thickness of λ/4. The phase of the light reflected in the high-refractive index layer will not shift, while the low-refractive index The phase of light reflected within the layer is shifted by 180°. Due to the difference in light travel (a multiple of 2*λ/4), the successive reflected light overlaps and recombines in the front, resulting in a high-intensity reflected beam in a narrow wavelength range, while the output wavelength outside this wavelength range will suddenly decrease. Such filters can be used as high-pass filters, low-pass filters or highly reflective layers. Moreover, because its optical properties depend on the reflection and transmission properties of the optical film, its optical film is generally coated with a band-pass filter, low pass filter or high pass filter Or band reject filter.

图2所示为现有技术的四信道CWDM滤光片。此四信道CWDM滤光片的整体膜层结构为:N0/L(HLH)4L(HLH)L(HLH)2L(HLH)L(HLHLH)2L(HLHLH)L(HLH)4L(HLH)L(HLHLH)2L(HLHLH)L(HLH)4L(HLH)L(HLHLH)2L(HLHLH)L(HLH)4L(HLH)L(HLHLH)2L(HLHLH)L(HLH)4L(HLH)L(HLHLH)2L(HLHLH)L(HLH)4L(HLH)L(HLHLH)2L(HLHLH)L(HLH)2L(HLH)L(HLH)4L(HLH)/NS;其中,NS表示基板折射率1.658,N0表示空气,L表示λ0/4的低折射率膜层,H表示λ0/4的高折射率膜层,λ0表示该等信道的中心波长。如图2所示,从左边开始起算其第67层和第87层皆为耦合层,且分别为一倍四分之一中心波长膜厚的低折射率膜层。Figure 2 shows a four-channel CWDM optical filter in the prior art. The overall film structure of this four-channel CWDM filter is: N 0 /L(HLH)4L(HLH)L(HLH)2L(HLH)L(HLHLH)2L(HLHLH)L(HLH)4L(HLH)L (HLHLH)2L(HLHLH)L(HLH)4L(HLH)L(HLHLH)2L(HLHLH)L(HLH)4L(HLH)L(HLHLH)2L(HLHLH)L(HLH)4L(HLH)L(HLHLH )2L(HLHLH)L(HLH)4L(HLH)L(HLHLH)2L(HLHLH)L(HLH)2L(HLH)L(HLH)4L(HLH)/ NS ; where, NS represents the substrate refractive index 1.658 , N 0 means air, L means λ 0 /4 low refractive index film layer, H means λ 0 /4 high refractive index film layer, λ 0 means the center wavelength of these channels. As shown in FIG. 2 , the 67th and 87th layers from the left are both coupling layers, and are respectively low-refractive-index film layers with a film thickness of one quarter of the central wavelength.

相应的光谱特性图请参考图3所示。此现有技术的四信道CWDM滤光片中,由于第67层和第87层的耦合层的膜厚都只设为一倍四分的一中心波长。然而,该CWDM滤光片在1500-1505nm和1575-1580nm两个波段通带的噪声的光透射率较大因而产生较大的干扰波纹(ripple),使光透射率下降。以一般的设计,会在整体膜层结构的最后两层以非四分之一中心波长的膜厚进行所谓的优化。但是,堆叠非四分之一中心波长的膜厚却是较为复杂的制程。Please refer to Figure 3 for the corresponding spectral characteristic diagram. In the four-channel CWDM optical filter of the prior art, since the film thicknesses of the coupling layers of the 67th layer and the 87th layer are only set to one quarter of one central wavelength. However, the light transmittance of the noise in the two passbands of the CWDM optical filter at 1500-1505nm and 1575-1580nm is relatively large, thus generating large interference ripples (ripple), which reduces the light transmittance. In a general design, the so-called optimization will be performed on the last two layers of the overall film structure with a film thickness other than a quarter of the central wavelength. However, stacking film thicknesses other than a quarter of the central wavelength is a more complicated process.

发明内容 Contents of the invention

本发明的目的在于克服上述现有技术的不足,提供一种适用于粗波分复用系统(CWDM;coarse wavelength division multiplex)、同时具有四个信道的CWDM滤光片,其可降低CWDM组装上整体的损失。The purpose of the present invention is to overcome the above-mentioned deficiencies in the prior art, provide a kind of CWDM optical filter that is suitable for coarse wavelength division multiplexing system (CWDM; coarse wavelength division multiplex), has four channels at the same time, it can reduce the cost of CWDM assembly. overall loss.

本发明的技术要点是:提供一种多信道CWDM滤光片,包括基板与N个堆叠结构,其中N为不小于2的奇数,每一堆叠结构自基板侧包括一个法布里-珀罗谐振腔结构与一个耦合层。The technical gist of the present invention is to provide a multi-channel CWDM optical filter, including a substrate and N stacked structures, wherein N is an odd number not less than 2, and each stacked structure includes a Fabry-Perot resonance from the substrate side cavity structure with a coupling layer.

每一堆叠结构自基板侧包括一第一膜堆、一空间层、一第二膜堆与一耦合层;且相对于空间层,第一膜堆与第二膜堆系对称设置。其中,空间层为kL,k为大于等于2的正整数,最好为正偶数,L表示λ0/4的低折射率膜层,λ0表示该等信道之中心波长。Each stack structure includes a first film stack, a space layer, a second film stack and a coupling layer from the substrate side; and relative to the space layer, the first film stack and the second film stack are arranged symmetrically. Among them, the space layer is kL, k is a positive integer greater than or equal to 2, preferably a positive even number, L represents a low refractive index film layer of λ 0 /4, and λ 0 represents the center wavelength of these channels.

并且,其第[(N+1)/2-1]堆叠结构的耦合层与第[(N+1)/2+1]堆叠结构的耦合层皆为(2n+1)L,n为正整数,L表示λ0/4的低折射率膜层,λ0表示该等信道之中心波长。Moreover, the coupling layer of the [(N+1)/2-1]th stack structure and the coupling layer of the [(N+1)/2+1] stacked structure are both (2n+1)L, n is positive Integer, L represents the low refractive index coating layer of λ 0 /4, λ 0 represents the center wavelength of these channels.

每一法布里-珀罗谐振腔结构自基板侧依序为H(LH)akL(HL)aH,且a为正整数,k为不小于2的整数,L表示λ0/4的低折射率膜层,H表示λ0/4的高折射率膜层,λ0表示该等信道之中心波长。其中,第一膜堆为H(LH)a,且第二膜堆为(HL)aH。Each Fabry-Perot cavity structure is sequentially H(LH) a kL(HL) a H from the substrate side, and a is a positive integer, k is an integer not less than 2, and L represents λ 0 /4 The low-refractive-index film layer, H represents the high-refractive-index film layer of λ 0 /4, and λ 0 represents the central wavelength of these channels. Wherein, the first membrane stack is H(LH) a , and the second membrane stack is (HL) a H .

其余堆叠结构的耦合层为L,L表示λ0/4的低折射率膜层,λ0表示该等信道之中心波长。The coupling layer of the other stacked structures is L, and L represents the low refractive index film layer of λ 0 /4, and λ 0 represents the center wavelength of these channels.

当本发明多信道CWDM滤光片提供1510nm、1530nm、1550nm与1570nm四个信道时,自基板侧的法布里-珀罗谐振腔结构依序为HLH4LHLH、HLH2LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH2LHLH、HLH4LHLH。When the multi-channel CWDM optical filter of the present invention provides four channels of 1510nm, 1530nm, 1550nm and 1570nm, the Fabry-Perot cavity structure from the substrate side is HLH4LHLH, HLH2LHLH, H(LH) 2 2L(HL ) 2 H, HLH4LHLH, H(LH) 2 2L(HL) 2 H, HLH4LHLH, H(LH) 2 2L(HL) 2 H, HLH4LHLH, H(LH) 2 2L(HL) 2 H, HLH4LHLH, H( LH) 2 2L(HL) 2 H, HLH4LHLH, H(LH) 2 2L(HL) 2H , HLH2LHLH, HLH4LHLH.

本发明多信道CWDM滤光片的中心波长λ0为1540nm。另外,自基板侧的耦合层依序为L、L、L、L、L、L、3L、L、3L、L、L、L、L、L、L。The central wavelength λ 0 of the multi-channel CWDM optical filter of the present invention is 1540nm. In addition, the coupling layers from the substrate side are L, L, L, L, L, L, 3L, L, 3L, L, L, L, L, L, L in order.

本发明具有四个光信道的CWDM滤光片的膜层设计技巧在于:采用了奇数倍的四分之一中心波长的低折射率耦合层(couplinglayer),以减小通带所产生的波纹(Ripple)、进而提升整个滤光片的光透射率,从而可降低组装完成后的CWDM上整体的损失。The film layer design technique of the CWDM optical filter with four optical channels of the present invention is: adopted the low-refractive index coupling layer (couplinglayer) of 1/4 center wavelength of odd multiples, to reduce the ripple (couplinglayer) that passband produces Ripple), thereby increasing the light transmittance of the entire filter, thereby reducing the overall loss on the CWDM after assembly.

附图说明 Description of drawings

图1是本发明具有四个信道的CWDM滤光片的膜层结构示意图;Fig. 1 is the film structure schematic diagram of the CWDM optical filter with four channels of the present invention;

图2是一现有技术CWDM滤光片的整体膜层结构与对应光透率关系示意图;Fig. 2 is a schematic diagram of the relationship between the overall film structure and the corresponding light transmittance of a prior art CWDM optical filter;

图3是图2对应的光谱特性图;Fig. 3 is the spectral characteristic diagram corresponding to Fig. 2;

图4是本发明具有四个信道的CWDM滤光片的整体膜层结构与对应光透率关系示意图;及Fig. 4 is a schematic diagram of the relationship between the overall film structure and the corresponding light transmittance of the CWDM optical filter with four channels of the present invention; and

图5是本发明CWDM滤光片的光谱特性图。Fig. 5 is a spectrum characteristic diagram of the CWDM optical filter of the present invention.

具体实施方式 Detailed ways

现结合说明书附图,对本发明具有四个信道的CWDM(coarsewavelength division multiplex)滤光片1作进一步详细说明。The CWDM (coarse wavelength division multiplex) filter 1 with four channels of the present invention will be further described in detail in conjunction with the accompanying drawings of the description.

如图1所示,本发明的具有四个信道的CWDM滤光片1,包括基板10与N个堆叠结构40;其中N为不小于2的奇数。每一堆叠结构自基板侧包括一第一膜堆21、一空间层(spacer layer)25、一第二膜堆22与一耦合层30。因此,上述第一膜堆21、空间层25及第二膜堆22构成法布里-珀罗谐振腔(Fabry-Perot Cavity)结构20。而且相对于空间层25,第一膜堆21与第二膜堆22为对称设置。其中,空间层25为kL,k为大于等于2的正整数,最好为正偶数。As shown in FIG. 1 , the CWDM optical filter 1 with four channels of the present invention includes a substrate 10 and N stacked structures 40 ; wherein N is an odd number not less than 2. Each stack structure includes a first film stack 21 , a spacer layer 25 , a second film stack 22 and a coupling layer 30 from the substrate side. Therefore, the first membrane stack 21 , the space layer 25 and the second membrane stack 22 constitute a Fabry-Perot cavity structure 20 . Moreover, relative to the space layer 25 , the first membrane stack 21 and the second membrane stack 22 are arranged symmetrically. Wherein, the spatial layer 25 is kL, and k is a positive integer greater than or equal to 2, preferably a positive even number.

参考图1与图4,第[(N+1)/2-1]堆叠结构40’的耦合层30’与第[(N+1)/2+1]堆叠结构40”的耦合层30”皆为(2n+1)L,n为正整数,L表示λ0/4的低折射率膜层,λ0表示该等信道之中心波长。而其余堆叠结构的耦合层30为L,L表示λ0/4的低折射率膜层,λ0表示该等信道之中心波长。Referring to FIG. 1 and FIG. 4, the coupling layer 30' of the [(N+1)/2-1] stacked structure 40' and the coupling layer 30" of the [(N+1)/2+1] stacked structure 40" Both are (2n+1)L, n is a positive integer, L represents the low refractive index film layer of λ 0 /4, and λ 0 represents the center wavelength of these channels. The coupling layer 30 of the rest of the stacked structure is L, L represents a low-refractive-index film layer of λ 0 /4, and λ 0 represents the center wavelength of these channels.

每一法布里-珀罗谐振腔结构自基板10侧依序为H(LH)akL(HL)aH,且a为正整数,k为不小于2的整数,L表示λ0/4的低折射率膜层,H表示λ0/4的高折射率膜层,λ0表示本发明各信道的中心波长。其中,第一膜堆可表达为H(LH)a,且第二膜堆可表达为(HL)aH。Each Fabry-Perot cavity structure is sequentially H(LH) a kL(HL) a H from the substrate 10 side, and a is a positive integer, k is an integer not less than 2, and L represents λ 0 /4 The low refractive index film layer, H represents the high refractive index film layer of λ 0 /4, and λ 0 represents the center wavelength of each channel of the present invention. Wherein, the first membrane stack can be expressed as H(LH) a , and the second membrane stack can be expressed as (HL) a H .

当本发明多信道CWDM滤光片1提供1510nm、1530nm、1550nm与1570nm四个信道时,自基板10一侧的法布里-珀罗谐振腔结构依序可表达为HLH4LHLH、HLH2LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH2LHLH、HLH4LHLH。When the multi-channel CWDM optical filter 1 of the present invention provides four channels of 1510nm, 1530nm, 1550nm and 1570nm, the structure of the Fabry-Perot cavity from one side of the substrate 10 can be expressed as HLH4LHLH, HLH2LHLH, H(LH ) 2 2L(HL) 2 H, HLH4LHLH, H(LH) 2 2L(HL) 2 H, HLH4LHLH, H(LH) 2 2L(HL) 2 H, HLH4LHLH, H(LH) 2 2L(HL) 2 H , HLH4LHLH, H(LH) 2 2L(HL) 2 H, HLH4LHLH, H(LH) 2 2L(HL) 2 H, HLH2LHLH, HLH4LHLH.

本发明多信道CWDM滤光片的中心波长λ0为1540nm。另外,自基板侧的耦合层依序为L、L、L、L、L、L、3L、L、3L、L、L、L、L、L、L。The central wavelength λ 0 of the multi-channel CWDM optical filter of the present invention is 1540nm. In addition, the coupling layers from the substrate side are L, L, L, L, L, L, 3L, L, 3L, L, L, L, L, L, L in order.

本发明CWDM滤光片1采用多个(可以是15个)四分之一中心波长膜厚的法布里-珀罗谐振腔膜堆20堆叠而成,同时具有1510nm、1530nm、1550nm和1570nm四个光信道。本发明CWDM滤光片的中心波长位于所述四个光信道的中心点λ0,为1540nm;且所有膜层的膜厚皆为四分之一的中心波长λ0The CWDM optical filter 1 of the present invention is formed by stacking a plurality of (can be 15) Fabry-Perot resonant cavity film stacks 20 with a film thickness of 1/4 of the central wavelength, and has four wavelengths of 1510nm, 1530nm, 1550nm and 1570nm at the same time. optical channel. The central wavelength of the CWDM optical filter of the present invention is located at the central point λ 0 of the four optical channels, which is 1540nm; and the thickness of all film layers is a quarter of the central wavelength λ 0 .

其中,各空间层25系采用四分之一中心波长λ0膜厚的膜层;每个法布里-珀罗谐振腔膜堆20分别由两个单数或偶数层的多层膜(stack)组成,且法布里-珀罗谐振腔膜堆20的耦合层30则采用奇数倍的四分之一中心波长的低折射率膜层。Wherein, each space layer 25 adopts the film layer of 1/4 central wavelength λ 0 film thickness; Composition, and the coupling layer 30 of the Fabry-Perot resonator film stack 20 adopts a low refractive index film layer that is an odd multiple of a quarter of the central wavelength.

而分别位于第67和87层的耦合层30可为(2n+1)倍四分之一中心波长λ0膜厚的低折射率膜层。本发明中,最好采用三倍的四分之一中心波长膜厚的低折射率膜层。The coupling layers 30 respectively located on the 67th and 87th layers can be (2n+1) times a quarter of the central wavelength λ0 film thickness of the low-refractive index film layer. In the present invention, it is preferable to use a low-refractive-index film layer with a film thickness three times the quarter of the central wavelength.

本发明的玻璃基板10的表面抛光直径为90mm,厚度为10mm;峰值透过率大于90%;带通为1502nm-1578nm。前述低折射率膜层可采用氧化硅材质,而高折射率膜层则采用氧化钽材质,基板为氧化硅、钡、锂、钠等元素所组成。其中,低折射率膜层的折射率为1.44,高折射率膜层的折射率为2.1-2.5。The surface polishing diameter of the glass substrate 10 of the present invention is 90mm, the thickness is 10mm; the peak transmittance is greater than 90%; the band pass is 1502nm-1578nm. The aforementioned low-refractive index film layer can be made of silicon oxide, while the high-refractive index film layer is made of tantalum oxide, and the substrate is composed of silicon oxide, barium, lithium, sodium and other elements. Wherein, the refractive index of the low refractive index film layer is 1.44, and the refractive index of the high refractive index film layer is 2.1-2.5.

如图4所示为本发明的具体实施例。该图中,从左边开始起算为本发明的第一层膜层,其第67层和第87层亦为耦合层,且分别为三倍四分之一中心波长膜厚的低折射率膜层。图5为该实施例对应的光谱特性图,从图5中可以看出,该实施例中在1500-1505nm和1575-1580nm两个波段通带的噪声波纹已经被消除,从而使滤光片1的整体光透射率得以提升。As shown in Figure 4 is a specific embodiment of the present invention. In this figure, counting from the left is the first film layer of the present invention, its 67th layer and 87th layer are also coupling layers, and are respectively three times the low refractive index film layer of the center wavelength film thickness . Fig. 5 is the spectral characteristic diagram corresponding to this embodiment, as can be seen from Fig. 5, in this embodiment, the noise ripples in the two band passbands of 1500-1505nm and 1575-1580nm have been eliminated, so that the optical filter 1 The overall light transmittance is improved.

综上所述,本发明的一个关键技术点就在于:其连结法布里-珀罗谐振腔膜堆与法布里-珀罗谐振腔膜堆之间的耦合层30采用奇数倍的四分之一中心波长的膜厚,以减小通带所产生的波纹,进而提升滤光片1的整体光透射率。这样,整个设计完全不采用非四分之一波长的膜厚,使得相应的生产制程得以简化,从而得以降低相应的生产成本。In summary, a key technical point of the present invention is that the coupling layer 30 connecting the Fabry-Perot resonant cavity film stack and the Fabry-Perot resonant cavity film stack adopts an odd multiple of quarters. The film thickness of one of the central wavelengths is used to reduce the ripple generated by the passband, thereby improving the overall light transmittance of the optical filter 1 . In this way, the whole design does not use a film thickness other than a quarter wavelength at all, which simplifies the corresponding production process and reduces the corresponding production cost.

本发明具有四个光信道的CWDM滤光片1的膜层设计技巧系在于,采用了奇数倍的四分之一中心波长的低折射率耦合层(couplinglayer),以减小通带所产生的波纹(Ripple)、进而提升整个滤光片的光透射率,从而可降低组装完成后的CWDM上整体的损失。The film layer design technique of the CWDM optical filter 1 with four optical channels of the present invention is to adopt a low refractive index coupling layer (coupling layer) of an odd multiple of 1/4 central wavelength to reduce the passband generated Ripple, thereby increasing the light transmittance of the entire filter, thereby reducing the overall loss on the CWDM after assembly.

Claims (20)

1. A multi-channel CWDM optical filter comprises a substrate and N stacked structures, wherein N is an odd number not less than 2, each stacked structure comprises a Fabry-Perot resonant cavity structure and a coupling layer from the substrate side, and the optical filter is characterized in that:
the [ (N +1)/2-1 ] th]The coupling layer and the [ (N +1)/2+1 ] th layer of the stacked structure]The coupling layers of the stacked structure are all (2n +1) L, n is a positive integer, and L represents lambda0Low refractive index film layer of/4, lambda0Representing the center wavelength of its channel.
2. The multi-channel CWDM filter of claim 1, wherein: each Fabry-Perot cavity structure is sequentially H (LH) from the substrate sideakL(HL)aH, a is a positive integer, k is an integer of not less than 2, L represents lambda0A film layer of low refractive index,/4, H represents lambda0High refractive index film layer of/4, lambda0Representing the center wavelength of its channel.
3. The multi-channel CWDM filter of claim 2, wherein: the coupling layer of the remaining stacked structure is L, L represents lambda0Low refractive index film layer of/4, lambda0Representing the center wavelength of its channel.
4. The multi-channel CWDM filter of claim 2, wherein k is an even number not less than 2.
5. The multi-channel CWDM filter of claim 2, wherein: when four channels of 1510nm, 1530nm, 1550nm and 1570nm are provided, the Fabry-Perot resonator structure from the substrate side is HLH4LHLH, HLH2LHLH, H (LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H、HLH4LHLH、H(LH)22L(HL)2H. HLH2LHLH, HLH4LHLH, and lambda0Is 1540 nm.
6. The multi-channel CWDM filter of claim 5, wherein: the coupling layers from the substrate side are L, L, L, L, L, L, 3L, L, 3L, L, L, L, L, L, L in this order.
7. A multi-channel CWDM filter comprises a substrate and N stacked structures, wherein N is an odd number not less than 2, each stacked structure comprises a first film stack, a spacer layer, a second film stack and a coupling layer from the substrate side, characterized in that:
the [ (N +1)/2-1 ] th]The coupling layer and the [ (N +1)/2+1 ] th layer of the stacked structure]The coupling layers of the stacked structure are all (2n +1) L, n is a positive integer, and L represents lambda0Low refractive index film layer of/4, lambda0Representing the center wavelength of its channel.
8. The multi-channel CWDM filter of claim 7, wherein the first film stack and the second film stack are symmetrically disposed with respect to the spatial layer.
9. The multi-channel CWDM filter of claim 8, wherein the first film stack is H (LH)aAnd the second film stack is (HL)aH, wherein a is a positive integer and L represents lambda0A film layer of low refractive index,/4, H represents lambda0High refractive index film layer of/4, lambda0Representing the center wavelength of its channel.
10. The multi-channel CWDM filter of claim 9, wherein the spatial layer is kL and k is a positive integer greater than or equal to 2.
11. The multi-channel CWDM filter of claim 10, wherein k is a positive even number.
12. The multi-channel CWDM filter of claim 7, wherein: the coupling layer of the remaining stacked structure is L, L represents lambda0Low refractive index film layer of/4, lambda0Representing the center wavelength of the channels.
13. The multi-channel CWDM filter of claim 11, wherein: when four channels of 1510nm, 1530nm, 1550nm and 1570nm are provided, each stack structure from the substrate side is [ HLH, 4L, HLH, L]、[HLH、2L、HLH、L]、[H(LH)2、2L、(HL)2H、L]、[HLH、4L、HLH、L]、[H(LH)2、2L、(HL)2H、L]、[HLH、4L、HLH、L]、[H(LH)2、2L、(HL)2H、3L]、[HLH、4L、HLH、L]、[H(LH)2、2L、(HL)2H、3L]、[HLH、4L、HLH、L]、[H(LH)2、2L、(HL)2H、L]、[HLH、4L、HLH、L]、[H(LH)2、2L、(HL)2H、L]、[HLH、2L、HLH、L]、[HLH、4L、HLH、L]And λ0Is 1540 nm.
14. A four-channel CWDM filter, the four channels are 1510nm, 1530nm, 1550nm and 1570nm, it includes the base plate and odd number stack structure, each stack structure includes a first membrane stack, a space layer, a second membrane stack and a coupling layer from the base plate side, its characterized in that:
the [ (N +1)/2-1 ] th]The coupling layer and the [ (N +1)/2+1 ] th layer of the stacked structure]The coupling layers of the stacked structure are all (2n +1) L, n is a positive integer, L represents λ0Low refractive index film layer of/4, lambda0Representing the center wavelength of the four channels at 1540 nm.
15. The four-channel CWDM filter of claim 14, wherein the first film stack and the second film stack are symmetrically disposed with respect to the spatial layer.
16. The four-channel CWDM filter of claim 15, wherein the first film stack is h (lh)aAnd the second film stack is (HL)aH, wherein a is a positive integer and L represents lambda0A film layer of low refractive index,/4, H represents lambda0High refractive index film layer of/4, lambda0Representing the center wavelength of its channel, 1540 nm.
17. The four-channel CWDM filter of claim 16, wherein the spatial layer is kL and k is a positive integer greater than or equal to 2.
18. The four-channel CWDM filter of claim 17, wherein k is a positive even number.
19. The four channel CWDM filter of claim 14A light sheet, wherein: the coupling layer of the remaining stacked structure is L, L represents lambda0Low refractive index film layer of/4, lambda0Representing the center wavelength of its channel, 1540 nm.
20. The four-channel CWDM filter of claim 18, wherein: each stacked structure from the substrate side is [ HLH, 4L, HLH, L]、[HLH、2L、HLH、L]、[H(LH)2、2L、(HL)2H、L]、[HLH、4L、HLH、L]、[H(LH)2、2L、(HL)2H、L]、[HLH、4L、HLH、L]、[H(LH)2、2L、(HL)2H、3L]、[HLH、4L、HLH、L]、[H(LH)2、2L、(HL)2H、3L]、[HLH、4L、HLH、L]、[H(LH)2、2L、(HL)2H、L]、[HLH、4L、HLH、L]、[H(LH)2、2L、(HL)2H、L]、[HLH、2L、HLH、L]、[HLH、4L、HLH、L]。
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