CN100356071C - Minitype jet pump and preparation method - Google Patents

Abstract

The invention provides a micro-jet pump and a preparation method thereof. The pump body includes a driving structure and a suction structure. The driving structure is composed of a jet nozzle and a driving chamber connected thereto. The suction structure includes a suction inlet port, a suction flow channel and a diffusion outlet. The jet nozzle is located at the diffusion outlet, and the suction flow channel is arranged on both sides of the jet nozzle. A high-speed jet is generated at the outlet of the jet nozzle, and a vortex is generated at its boundary at the same time. The vortex entrains the fluid in the suction channel into the jet, and two mixed fluids with different flow velocities flow into the diffuser outlet together. The preparation of the micro-jet pump is designed by MEMS technology, which can be realized by two photolithography plates. The pump body material has a wide range of options and is easy to integrate with most micro-fluidic systems.

Description

Micro jet pump and preparation method thereof

technical field

The invention belongs to the technical fields of microfluid control, transmission and microactuator, and in particular relates to a microjet pump designed and manufactured by adopting microelectromechanical system (MEMS) technology.

Background technique

Fluid transport in microstructures has always had many problems due to small size, such as residual bubbles in the flow of liquid in microchannels, and the current MEMS micropump is limited by its complex structure, difficult processing and high cost. its wide application.

Micropumps are the core components of microfluidic control systems. Micropumps processed with MEMS technology are mainly divided into mechanical fluid control systems and non-mechanical fluid control systems. Mechanical micropumps mainly include piezoelectric micropumps, electromagnetic micropumps, electrostatic micropumps and Pneumatic micropumps, etc., the common problems of these types of micropumps are complex structures, difficult processing and realization, relatively high production costs, and the drive requires additional complicated electrical equipment; non-mechanical micropumps mainly include electrohydrodynamic pumps, magnetic Fluid power pumps, etc. These types of micropumps are driven by electricity, and the limitations of electric drive are also obvious. They cannot drive uncharged molecules, and they move heterogeneously. The device lacks flexibility and has little potential for further development. . Moreover, the inlet and outlet of many existing micropump systems have movable parts (such as microvalve structures), which increases the difficulty of micropump processing. the service life of the micropump. General biochips are not reusable, so the above two types of micropumps cannot be widely used in microfluidic chips because of their high cost and difficulty in implementation.

Contents of the invention

The present invention overcomes the above-mentioned shortcomings of the micro pump such as complicated structure and difficult preparation process, and provides a micro jet pump without additional complicated electric, magnetic, thermal and other driving systems; Microtransport of fluids.

Another feature of the present invention is that the preparation process is easy to realize, the pump body material can be selected in a wide range, and it is easy to integrate with most microfluidic systems.

Technical scheme of the present invention is as follows:

A micro-jet pump, the pump body includes a driving structure and a suction structure, characterized in that: the driving structure is composed of a jet nozzle and a driving cavity connected thereto, and the suction structure includes a suction inlet port, a suction flow channel and a diffuser At the outlet, the jet nozzle is located at the diffuser outlet, and the suction flow channel is set on both sides of the jet nozzle. Under the action of the driving force, a high-speed jet will be generated at the exit of the jet nozzle of the driving chamber, and a vortex will be generated at its boundary at the same time. The fluid in the entrainment suction flow channel enters the jet flow, and two mixed fluids with different flow velocities flow into the diffusion outlet together.

The suction flow channel is composed of a plurality of flow channels parallel to each other. The end of each flow channel is in the shape of a jet nozzle. When the fluid flows through the end of the flow channel, a vortex will be generated at the boundary of the jet generated by it. The vortex The swirl sucks fluid from adjacent channels into the jet.

The suction inlet port is connected with a microfluidic chip.

The driving chamber is provided with a driving fluid inlet hole, and the high-pressure driving gas or liquid enters the driving chamber through the driving fluid inlet hole, and produces a high-speed jet at the outlet of the jet nozzle.

The driving cavity is a sealed cavity, and jets are generated through piezoelectric, electromagnetic, electrostatic, shape memory alloy, finger pressure and other driving methods.

A preparation method of a micro jet pump, the steps comprising:

(1) The driving structure and suction structure of the micro-jet pump are photolithographically etched on the silicon chip. The driving structure includes the jet nozzle and the driving chamber connected to it. exit;

(2) Use plastic, polymer, glass or silicon as the cover;

(3) Silicon wafer and cover sheet are aligned and bonded.

A preparation method of a micropump, the steps comprising:

(1) Prepare the mold, and use three-dimensional molding processing molding or vacuum hot pressing to make a plastic or polymer material pump body structure, which includes the drive structure and suction structure of the micro jet pump. The drive structure includes jet nozzles and The driving chamber connected to it, the suction structure includes a suction port, a suction flow channel and a diffusion outlet;

(2) Use plastic, polymer, glass or silicon as the cover;

(3) Align and bond the prepared plastic or polymer pump body with the cover sheet.

Lithographically and etch through-hole patterns on the cover sheet, and drill through-holes at corresponding marked positions.

The mold structure is photoetched and etched on the silicon wafer, and the plastic or polymer material pump body structure is made by three-dimensional molding processing molding or vacuum hot pressing.

Technical effects of the present invention: According to the classic two-dimensional turbulent jet theory, the present invention uses the characteristic that the airflow with a certain pressure can generate high-speed jet at the micro nozzle, and designs a micro jet pump by using MEMS technology. According to the classical fluid mechanics theory, the design, fabrication and testing of gas-gas, gas-liquid, liquid-gas, liquid-liquid micro jet pumps have been completed. This micro-jet pump is suitable for micro-transportation of various fluids. It has the characteristics of simple structure, wide range of choices for pump body materials, easy process realization, simple driving mode and no need for additional complicated electric, magnetic, thermal and other driving systems. It makes it easy to integrate with most microfluidic systems, prolongs the service life of the micropump, and improves its working stability.

It is well known that biochips in the general sense are disposable. The biggest advantage of micro jet pumps is that in addition to processing on silicon wafers using MEMS technology, it also includes three-dimensional molding processing methods based on plastic or polymer materials such as molding and The hot pressing method makes it easy to integrate with some cheap plastic or polymer material chips, which greatly reduces the production cost of the entire chip. Therefore, it has laid a solid foundation for its wide application in the field of biological and medical detection. We can integrate it on a PCR array chip or a chemical analysis chip to smoothly realize the injection of reactants.

The driving pressure of the miniature jet pump mentioned in the present invention is relatively low, and the pressure of 40kPa can make it start to work, and a general medical syringe can drive it to work.

Description of drawings

Below in conjunction with accompanying drawing, this invention is described in detail.

Fig. 1 is the schematic diagram of the planar structure of the micro jet pump of the present invention;

Fig. 2 schematic diagram of micro jet pump test structure principle;

Fig. 3 is the fitting curve of the relationship between driving pressure and jet pump back pressure;

Figure 4 is a schematic diagram of the planar structure of a micro-jet pump with multi-stage nozzles;

Figure 5 is a cross-sectional view of the micro jet pump process;

Fig. 6 Electron micrograph of pump body structure corroded on silicon wafer.

Detailed ways:

Fig. 1 is a schematic plan view of the micro jet pump provided by the present invention. The main body of the micro-jet pump includes a driving structure and a suction structure. The driving structure is composed of a jet nozzle 4 and a driving chamber 2 connected thereto, wherein the driving chamber 2 is provided with a driving fluid inlet hole 1, and the driving fluid inlet hole 1 is located at A certain position corresponding to the upper part of the driving chamber 2 is an interface connected with an external pipeline, and the driving chamber 2 may be square, circular or oval. The driving chamber 2 and the jet nozzle 4 together constitute the driving structure for generating the jet. The present invention can also seal the driving cavity 2, process the pump cavity membrane by micromachining, stick a piezoelectric sheet, a magnetic sheet, a shape memory alloy film on it, or add a layer of membrane electrodes on the upper and lower surfaces of the pump cavity, It can also be driven by piezoelectric, electromagnetic, electrostatic or finger pressure to generate jets and drive its work. When the jet is injected into a static environment, a vortex is generated at the discontinuous surface between the jet and the surrounding static fluid, and the vortex entrains the surrounding fluid into the jet, and flows forward continuously with the originally injected fluid, thereby forming a negative pressure, which can be passed Changing the cross-sectional shape of the jet nozzle and the size of the annular cross-section at the outlet can control the working performance of the micro-jet pump. The suction structure includes a suction port, a suction flow channel 3 and a diffusion outlet 5, and the suction flow channel 3 is arranged on both sides of the jet nozzle. The working process of the micro-jet pump of the present invention is as follows: the high-pressure airflow is driven into the driving fluid inlet hole 1, and the high-speed jet is generated at the outlet of the jet nozzle 4 through the driving chamber 2, and there is a discontinuous velocity gap between the jet fluid and the surrounding static fluid. The discontinuous surface, the discontinuous surface is generally unavoidably disturbed and loses stability, so that a vortex is generated at the outlet of the suction flow channel 5, and the gas in the suction flow channel 3 on both sides of the vortex entrains enters the jet, and at the same time continuously moves and deforms , Splitting produces turbulence, and its influence gradually develops to the inner and outer sides to form two free turbulent mixed layers, due to the lateral transfer of momentum, the entrained fluid acquires momentum and flows forward with the originally injected fluid into the diffusion outlet 5. Form the mixing section of the fluid in different flow channels, form a certain flow velocity gradient in the mixing layer, and a shear layer appears. The original fluid loses momentum and reduces the speed. The main function of the diffusion outlet 5 is to transfer the kinetic energy at the outlet of the jet nozzle 4 Converted into pressure energy, so continuous work, in order to achieve the purpose of vacuuming. By adjusting the size of each structure of the micro jet pump, the control of different flow ranges can be realized. In addition, after the pump is processed and formed, the flow rate of the micro jet pump can be controlled by adjusting the pressure value of the driving gas.

In order to facilitate the measurement, we designed the inlet 6 and the inlet 7 on the left side of the micro jet pump body, as shown in Figure 2, the inlet 7 is located at a certain position on the upper part of the inlet. In practical applications, the inlet cavity 6 can be designed as various types of microfluidic chips, and the suction port of the micro jet pump is connected to the inlet cavity 6 to suck the gas or liquid in the chip, thereby generating negative pressure inside the chip and pulling The liquid fills the chip, and the negative pressure draws the liquid to flow to avoid the generation of air bubbles inside the microfluidic chip.

We use the Bernoulli equation on the annular section in the driving pipeline (ie, from the inlet of the driving gas to the outlet of the jet) and at the outlet of the nozzle respectively:

${\mathrm{<span\; class="notranslate">\; <figure-callout\; id="1"\; label="P\; loss"\; filenames="C20041000970200101.png"\; state="\{\{state\}\}">P</figure-callout></span><figure-callout\; id="1"\; label="P\; loss"\; filenames="C20041000970200101.png"\; state="\{\{state\}\}">\; </figure-callout>}}_{\mathrm{<span\; class="notranslate">\; </span>}}<span\; class="notranslate">\; +</span>\frac{\mathrm{<span\; class="notranslate">\; 1</span>}}{\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; \&rho;</span>}{{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="0"\; label="v"\; filenames="C20041000970200101.png"\; state="\{\{state\}\}">v</figure-callout></span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; =</span>{\mathrm{<span\; class="notranslate">\; P</span>}}_{\mathrm{<span\; class="notranslate">\; the\; pump</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; )</span>$

${\mathrm{<span\; class="notranslate">\; P</span>}}_{\mathrm{<span\; class="notranslate">\; the\; s</span>}}<span\; class="notranslate">\; +</span>\frac{\mathrm{<span\; class="notranslate">\; 1</span>}}{\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; \&rho;</span>}{{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="0"\; label="v"\; filenames="C20041000970200101.png"\; state="\{\{state\}\}">v</figure-callout></span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="2"\; label="P\; loss"\; filenames="C20041000970200101.png,C20041000970200111.png"\; state="\{\{state\}\}">P</figure-callout></span><figure-callout\; id="2"\; label="P\; loss"\; filenames="C20041000970200101.png,C20041000970200111.png"\; state="\{\{state\}\}">\; </figure-callout>}}_{\mathrm{<span\; class="notranslate">\; </span>}}<span\; class="notranslate">\; =</span>{\mathrm{<span\; class="notranslate">\; P</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 2</span>}<span\; class="notranslate">\; )</span>$

Here P _pump is the pressure of the driving gas, V ₀ is the velocity of the gas at the nozzle outlet, P _loss is the pressure loss in the pipeline, P ₀ is the static pressure of the gas, that is, atmospheric pressure, and P _s is the negative pressure generated at the nozzle outlet. We can find the flow velocity V ₀ at the outlet of the nozzle.

According to the theory of two-dimensional incompressible equal-density turbulent jet, the velocity V _m and entrainment velocity V _c on the jet axis can be expressed as:

$\frac{{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="0"\; label="v\; m\; v"\; filenames="C20041000970200101.png"\; state="\{\{state\}\}">v</figure-callout></span><figure-callout\; id="0"\; label="v\; m\; v"\; filenames="C20041000970200101.png"\; state="\{\{state\}\}">\; </figure-callout>}}_{\mathrm{<span\; class="notranslate">\; m</span>}}}{{}_{}}<span\; class="notranslate">\; =</span>{<span\; class="notranslate">\; (</span>\sqrt{\frac{\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; \&pi;</span>}}}\frac{\mathrm{<span\; class="notranslate">\; 1</span>}}{\mathrm{<span\; class="notranslate">\; \&epsiv;</span>}}<span\; class="notranslate">\; )</span>}^{\mathrm{<span\; class="notranslate">\; I</span>}\mathrm{<span\; class="notranslate">\; 2</span>}}{<span\; class="notranslate">\; (</span>\frac{\mathrm{<span\; class="notranslate">\; 2</span>}{\mathrm{<span\; class="notranslate">\; b</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}}{\mathrm{<span\; class="notranslate">\; x</span>}}<span\; class="notranslate">\; )</span>}^{\mathrm{<span\; class="notranslate">\; I</span>}\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 3</span>}<span\; class="notranslate">\; )</span>$

${\mathrm{<span\; class="notranslate">\; v</span>}}_{\mathrm{<span\; class="notranslate">\; c</span>}}<span\; class="notranslate">\; =</span>\frac{\sqrt{\mathrm{<span\; class="notranslate">\; \&pi;</span>}}\mathrm{<span\; class="notranslate">\; \&epsiv;</span>}}{\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; v</span>}}_{\mathrm{<span\; class="notranslate">\; m</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 4</span>}<span\; class="notranslate">\; )</span>$

Here b ₀ is the width of the nozzle, x is the distance between the jet surface and the exit origin, and the value of ε is the empirical value 0.154 obtained from experiments.

可以通过下式估算而得Average flow rate of any fluid driven by a jet pump

can be estimated by the following formula

$\mathrm{<span\; class="notranslate">\; v</span>}<span\; class="notranslate">\; =</span>\frac{{\mathrm{<span\; class="notranslate">\; <figure-callout\; id="2"\; label="d"\; filenames="C20041000970200101.png,C20041000970200111.png"\; state="\{\{state\}\}">d</figure-callout></span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; \&Delta;P</span>}}{\mathrm{<span\; class="notranslate">\; 32</span>}\mathrm{<span\; class="notranslate">\; \&mu;l</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 5</span>}<span\; class="notranslate">\; )</span>$

Here d is the hydraulic diameter of the pipe, ΔP is the pressure difference generated, μ is the viscosity coefficient of the liquid, and l is the pipe length.

The back pressure measurement of the micro jet pump: inject high-pressure driving gas into the drive inlet 1 of the device, connect a capillary glass tube to the inlet 7, put the end of the glass capillary vertically into the water, under different gas driving pressures, The stable height of the rising liquid level is different, so we can draw the relationship curve of different driving pressure and back pressure. Referring to Fig. 3, it can be seen that the result is basically in line with the theory, and the working pressure of the micro jet pump is relatively low.

In order to improve the efficiency of the jet pump, a pump body with a multi-stage nozzle structure can be used. Referring to Figure 4, the suction flow channel is a number of flow channels, each flow channel is parallel to each other, and the end of the flow channel forms a nozzle; when the fluid flows through the end of the flow channel, a high-speed jet will be generated at the exit, and at the same time at its boundary A vortex is created which entrains fluid in an adjacent flow channel into the jet.

In addition to air-air micro-jet pumps, we can also obtain air-liquid, liquid-liquid and liquid-air jet pumps based on the same principle, but due to the significant effect of the surface tension of the liquid on a micro scale, the resistance increases, and the corresponding driving pressure also increases. will increase.

The use form of the micro jet pump can also be: the air intake on both sides generates jets to suck the fluid in the middle pipeline, that is, the functions of the driving structure and the suction structure are interchanged, specifically, the high-pressure driving gas is injected into the air inlet 7, and the pumping on both sides The outlet of the suction channel 3 produces a jet, and the boundary of the jet produces a vortex, which entrains the gas in the jet nozzle 4 and the drive chamber.

Referring to Figure 5, the micro jet pump can be realized through the following process scheme:

Option 1, MEMS processing technology

1. Silicon wafer processing technology, the specific process is as follows:

1) As shown in Figure 5-a, the photolithographic development on the silicon wafer 9 exposes the part to be etched (ie the pump body structure of the micro diffusion pump);

2) As shown in Figure 5-b, the pump body structure is etched on the silicon wafer 9, and the specific etching depth is determined according to the performance index (dry etching and wet etching are both acceptable).

2. The processing technology of the cover sheet, the specific process is as follows:

As shown in Figure 5-c, the perforated mark 12 is photoetched on the cover sheet 11 made of glass or plastic, polymer, silicon wafer and other materials; as shown in Figure 5-d, a hole 13 is punched on the cover sheet 11 (connection port with external pipeline);

3. Alignment and bonding of silicon wafer and cover sheet.

As shown in FIG. 5-e, the etched silicon wafer 10 is aligned and bonded with the perforated cover sheet 14 (including methods such as anodic bonding and polymer bonding).

The micro-jet pump designed in this patent can realize the micro-pump structure through two photolithography plates. One plate is designed for etching the pump body structure on silicon, and the other is designed for glass drilling. In some cases, the glass perforated photolithography plate can be omitted, which further reduces the production cost.

FIG. 6 is an electron micrograph of the structure of the pump body on the etched silicon wafer. The main structure includes: a drive chamber 2 , a suction channel 3 , a jet nozzle 4 , and a diffusion outlet 5 .

Scheme 2. Three-dimensional molding processing method

1. The first step is to make a negative mold. The process is to photoetch and corrode the complementary structure of the micro-diffusion pump body on the surface of the silicon wafer. The specific steps are the same as the etching steps of the silicon wafer in Scheme 1. The mold can also be made of other materials, such as SU8 and so on.

2. The pump body of some plastic or polymer materials (such as PDMS, PFPE and PMMA, etc.) is made by using negative molds based on three-dimensional molding methods such as molding or hot pressing methods based on some plastic and polymer materials. The micro-molding method is as follows: First, a layer of polymer is grown on the silicon wafer as the negative mold to facilitate moulding, and then the fluid polymer is coated on the silicon mold, vacuumed, the polymer is cured at high temperature, and demoulding is obtained. Pump body structure complementary to negative mold pattern. Finally, it is aligned and bonded with a perforated cover sheet (including materials such as plastics, polymers, and silicon wafers) to realize the micropump structure.

3. Use plastic, polymer, glass sheet or silicon wafer as the cover sheet. If there is an entrance hole on the cover sheet, photoetch and etch the through-hole pattern on the cover sheet, and drill the through-hole at the corresponding marked position.

4. Align and bond the plastic or polymer pump body made by the negative mold with the cover sheet.

This three-dimensional molding processing method based on plastic and polymer materials makes the micro jet pump easy to integrate with some cheap material chips, which greatly reduces the production cost of the entire chip, thus making it widely used in the fields of biological and medical detection. Laid a solid foundation.

Claims (9)

1. A micro-jet pump, the pump body includes a driving structure and a suction structure, characterized in that: the driving structure is composed of a jet nozzle and a driving cavity connected thereto, and the suction structure includes a suction inlet port, a suction flow channel and the diffuser outlet, the jet nozzle is located at the diffuser outlet, the suction flow channel is set on both sides of the jet nozzle, under the action of the driving force, the jet nozzle exit of the drive structure will generate a high-speed jet, and at the same time generate a vortex at its boundary, The fluid in the vortex entrainment suction flow channel enters the jet flow, and two fluids with different flow rates are mixed and flow into the diffusion outlet. The suction flow channel is composed of multiple parallel flow channels, and the end of each flow channel is jet Nozzle-shaped, when the fluid flows through the end of the flow channel, a vortex will be generated at its boundary, and the vortex will entrain the fluid in the adjacent flow channel into the jet. 2. The micro-jet pump according to claim 1, characterized in that: the suction inlet port is connected with a micro-fluid chip. 3. The micro-jet pump according to claim 1, characterized in that: the driving chamber is provided with a driving fluid inlet hole, and the high-pressure driving gas or liquid enters the driving chamber through the driving fluid inlet hole, and produces a high-speed jet at the outlet of the jet nozzle. 4. The micro-jet pump according to claim 1, wherein the driving chamber is a sealed chamber, and the jet is generated by piezoelectric, electromagnetic, electrostatic, shape memory alloy or finger pressure driving methods. 5. A method for preparing the micro jet pump according to claim 1, the steps comprising: (1) The driving structure and suction structure of the micro-jet pump are photolithographically etched on the silicon chip. The driving structure is composed of a jet nozzle and a driving chamber connected to it. channels and diffuser outlets; (2) Using polymer, glass or silicon as the cover; (3) Align and bond the silicon wafer and the cover sheet. 6. The manufacturing method of the micro-jet pump according to claim 5, characterized in that: photoetching and etching through-hole patterns on the cover sheet, and drilling through-holes at corresponding marked positions. 7. The preparation method of the micro jet pump according to claim 5, characterized in that: photoetching and etching the driving structure and suction structure of the micro jet pump on the silicon wafer, the steps include: (1) coating the mask material photoresist on the surface of the silicon wafer; (2) Photolithography development exposes the part to be etched; (3) Dry or wet etching. 8. A method for preparing the micro jet pump according to claim 1, the steps comprising: (1) Prepare the negative mold, and use the micro-molding of three-dimensional molding processing or the vacuum hot pressing method to make the polymer material pump body structure, which includes the drive structure and suction structure of the micro jet pump. The drive structure is composed of jet nozzles and Composed of a drive chamber connected to it, the suction structure includes a suction inlet port, a suction flow channel and a diffusion outlet; (2) Using polymer, glass or silicon as the cover; (3) Align and bond the prepared polymer pump body with the cover sheet. 9. The manufacturing method of the micro-jet pump according to claim 8, characterized in that: photoetching and etching through-hole patterns on the cover sheet, and drilling through-holes at corresponding marked positions.

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