Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/02104—Forming layers
  • H01L21/02107—Forming insulating materials on a substrate
  • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
  • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
  • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L23/00—Details of semiconductor or other solid state devices
  • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
  • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
  • H01L23/3157—Partial encapsulation or coating
  • H01L23/3192—Multilayer coating

Landscapes

• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Manufacturing & Machinery (AREA)
• Formation Of Insulating Films (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=5816981

Family Applications (1)

Country Status (7)

Cited By (1)

• 1971
  • 1971-08-17 DE DE2141182A patent/DE2141182A1/de active Pending
• 1972
  • 1972-06-07 CH CH843572A patent/CH565450A5/xx not_active IP Right Cessation
  • 1972-06-30 NL NL7209209A patent/NL7209209A/xx unknown
  • 1972-08-09 IT IT28017/72A patent/IT963845B/it active
  • 1972-08-16 FR FR7229316A patent/FR2149485B1/fr not_active Expired
  • 1972-08-16 GB GB3816872A patent/GB1347178A/en not_active Expired
  • 1972-08-17 JP JP47082418A patent/JPS4830378A/ja active Pending

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