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CH452313A - Vorrichtung zur Verdampfung von Stoffen im Vakuum - Google Patents

Vorrichtung zur Verdampfung von Stoffen im Vakuum

Info

Publication number
CH452313A
CH452313A CH1750165A CH1750165A CH452313A CH 452313 A CH452313 A CH 452313A CH 1750165 A CH1750165 A CH 1750165A CH 1750165 A CH1750165 A CH 1750165A CH 452313 A CH452313 A CH 452313A
Authority
CH
Switzerland
Prior art keywords
evaporation
substances
vacuum
Prior art date
Application number
CH1750165A
Other languages
German (de)
English (en)
Inventor
Gottfried Dr Geir
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH1750165A priority Critical patent/CH452313A/de
Priority to NL6600952A priority patent/NL6600952A/xx
Priority to DE19661521175 priority patent/DE1521175B2/de
Priority to GB53526/66A priority patent/GB1105989A/en
Priority to US602399A priority patent/US3544763A/en
Priority to FR87908A priority patent/FR1505169A/fr
Publication of CH452313A publication Critical patent/CH452313A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH1750165A 1965-12-18 1965-12-18 Vorrichtung zur Verdampfung von Stoffen im Vakuum CH452313A (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CH1750165A CH452313A (de) 1965-12-18 1965-12-18 Vorrichtung zur Verdampfung von Stoffen im Vakuum
NL6600952A NL6600952A (uk) 1965-12-18 1966-01-25
DE19661521175 DE1521175B2 (de) 1965-12-18 1966-11-16 Vorrichtung zur verdampfung von werkstoffen im vakuum
GB53526/66A GB1105989A (en) 1965-12-18 1966-11-30 Improvements in and relating to the evaporation of substances in vacuo
US602399A US3544763A (en) 1965-12-18 1966-12-16 Apparatus for the evaporation of materials in a vacuum
FR87908A FR1505169A (fr) 1965-12-18 1966-12-19 Appareil pour vaporisation de substances sous vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1750165A CH452313A (de) 1965-12-18 1965-12-18 Vorrichtung zur Verdampfung von Stoffen im Vakuum

Publications (1)

Publication Number Publication Date
CH452313A true CH452313A (de) 1968-05-31

Family

ID=4425902

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1750165A CH452313A (de) 1965-12-18 1965-12-18 Vorrichtung zur Verdampfung von Stoffen im Vakuum

Country Status (6)

Country Link
US (1) US3544763A (uk)
CH (1) CH452313A (uk)
DE (1) DE1521175B2 (uk)
FR (1) FR1505169A (uk)
GB (1) GB1105989A (uk)
NL (1) NL6600952A (uk)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4094269A (en) * 1974-06-14 1978-06-13 Zlafop Pri Ban Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances
BG20711A1 (uk) * 1974-06-14 1975-12-20
US3996469A (en) * 1975-01-06 1976-12-07 Jersey Nuclear-Avco Isotopes, Inc. Floating convection barrier for evaporation source
US4048462A (en) * 1975-01-17 1977-09-13 Airco, Inc. Compact rotary evaporation source
DE2628765C3 (de) * 1976-06-26 1979-01-11 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Vorrichtung zum Aufdampfen insbesondere sublimierbarer Stoffe im Vakuum mittels einer Elektronenstrahlquelle
FR2623819A1 (fr) * 1987-11-26 1989-06-02 Thomson Csf Four a bombardement electronique pour evaporation sous vide
DE4016225C2 (de) * 1990-05-19 1997-08-14 Leybold Ag Reihenverdampfer für Vakuumbedampfungsanlagen
DE4100541C1 (uk) * 1991-01-10 1992-01-16 Plasco Dr. Ehrich Plasma-Coating Gmbh, 6501 Heidesheim, De

Also Published As

Publication number Publication date
DE1521175A1 (de) 1969-07-31
US3544763A (en) 1970-12-01
DE1521175B2 (de) 1973-04-26
GB1105989A (en) 1968-03-13
FR1505169A (fr) 1967-12-08
NL6600952A (uk) 1967-06-19

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