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CH345662A - Verfahren zur Behandlung der Oberfläche von Körpern in einer Glimmentladung - Google Patents

Verfahren zur Behandlung der Oberfläche von Körpern in einer Glimmentladung

Info

Publication number
CH345662A
CH345662A CH345662DA CH345662A CH 345662 A CH345662 A CH 345662A CH 345662D A CH345662D A CH 345662DA CH 345662 A CH345662 A CH 345662A
Authority
CH
Switzerland
Prior art keywords
bodies
treating
glow discharge
glow
discharge
Prior art date
Application number
Other languages
German (de)
English (en)
Inventor
Knueppel Helmut Ing Dr
Original Assignee
Hoerder Huettenunion Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoerder Huettenunion Ag filed Critical Hoerder Huettenunion Ag
Publication of CH345662A publication Critical patent/CH345662A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/10—Reduction of greenhouse gas [GHG] emissions
    • Y02P10/143—Reduction of greenhouse gas [GHG] emissions of methane [CH4]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
CH345662D 1955-05-10 1956-05-11 Verfahren zur Behandlung der Oberfläche von Körpern in einer Glimmentladung CH345662A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE345662X 1955-05-10

Publications (1)

Publication Number Publication Date
CH345662A true CH345662A (de) 1960-04-15

Family

ID=6254753

Family Applications (1)

Application Number Title Priority Date Filing Date
CH345662D CH345662A (de) 1955-05-10 1956-05-11 Verfahren zur Behandlung der Oberfläche von Körpern in einer Glimmentladung

Country Status (5)

Country Link
BE (1) BE547667A (fi)
CH (1) CH345662A (fi)
FR (1) FR1152732A (fi)
GB (1) GB804597A (fi)
LU (1) LU34343A1 (fi)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3414503A (en) * 1964-03-12 1968-12-03 Glaverbel Apparatus for coating the surface of plates uniformly by cathode sputtering

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3097154A (en) * 1959-01-13 1963-07-09 Nuclear Materials & Equipment Apparatus for method for etching objects
GB1022360A (en) * 1961-12-13 1966-03-09 Berghaus Elektrophysik Anst Method of and apparatus for coating an article
JPS5278637A (en) * 1975-12-25 1977-07-02 Fuji Electronics Co Ltd Ion carburizing
DE2606454C2 (de) * 1976-02-18 1978-01-12 lonit Anstalt Bernhard Berghaus, Vaduz Thermoelementeinsatz
FR2446327A1 (fr) * 1979-01-09 1980-08-08 Fours Indls Cie Procede de traitement thermochimique de la paroi interne de corps ouverts a deux bouts par bombardement ionique, et dispositif pour la mise en oeuvre
FR2525636A1 (fr) * 1982-04-23 1983-10-28 Creusot Loire Methode et dispositif de nitruration ionique d'orifices allonges de petits diametres de pieces en aciers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3414503A (en) * 1964-03-12 1968-12-03 Glaverbel Apparatus for coating the surface of plates uniformly by cathode sputtering

Also Published As

Publication number Publication date
GB804597A (en) 1958-11-19
BE547667A (fi) 1900-01-01
LU34343A1 (fi)
FR1152732A (fr) 1958-02-24

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