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CH345397A - Kompensationspolschuh zum Kompensieren des Astigmatismus einer magnetischen Elektronenlinse - Google Patents

Kompensationspolschuh zum Kompensieren des Astigmatismus einer magnetischen Elektronenlinse

Info

Publication number
CH345397A
CH345397A CH345397DA CH345397A CH 345397 A CH345397 A CH 345397A CH 345397D A CH345397D A CH 345397DA CH 345397 A CH345397 A CH 345397A
Authority
CH
Switzerland
Prior art keywords
astigmatism
compensating
pole piece
electron lens
magnetic electron
Prior art date
Application number
Other languages
English (en)
Inventor
Cornelis Van Dorsten Adrianus
Jozef Franken Adrianus Jacobus
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH345397A publication Critical patent/CH345397A/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/14Lenses magnetic
    • H01J37/141Electromagnetic lenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
CH345397D 1955-10-04 1956-10-02 Kompensationspolschuh zum Kompensieren des Astigmatismus einer magnetischen Elektronenlinse CH345397A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL345397X 1955-10-04

Publications (1)

Publication Number Publication Date
CH345397A true CH345397A (de) 1960-03-31

Family

ID=19784879

Family Applications (1)

Application Number Title Priority Date Filing Date
CH345397D CH345397A (de) 1955-10-04 1956-10-02 Kompensationspolschuh zum Kompensieren des Astigmatismus einer magnetischen Elektronenlinse

Country Status (7)

Country Link
US (1) US2910603A (de)
BE (1) BE551462A (de)
CH (1) CH345397A (de)
DE (1) DE1089089B (de)
FR (1) FR1171295A (de)
GB (1) GB833249A (de)
NL (2) NL200957A (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL242894A (de) * 1958-09-06
US3046397A (en) * 1959-06-17 1962-07-24 Tesla Np Device for compensating axial astigmatism of electron-optical systems
US3021445A (en) * 1959-07-24 1962-02-13 Bbc Brown Boveri & Cie Electron lens
US3253144A (en) * 1963-05-27 1966-05-24 Tektronix Inc Electron lens having means for correcting astigmatism
US3322950A (en) * 1964-09-01 1967-05-30 Varian Associates Linear accelerator radiotherapy device and associated beam defining structure
JPS58123648A (ja) * 1982-01-18 1983-07-22 Hitachi Ltd 電磁レンズポ−ルピ−ス構造体
US7995443B2 (en) * 2007-07-30 2011-08-09 International Business Machines Corporation Apparatus and method to store information in a holographic data storage medium
JP6219741B2 (ja) * 2014-02-13 2017-10-25 日本電子株式会社 多極子レンズの製造方法、多極子レンズ、および荷電粒子線装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL54829C (de) * 1936-09-11
DE973258C (de) * 1938-03-08 1959-12-31 Siemens Ag Magnetische Polschuhlinse kleiner Brennweite fuer elektronenoptische Vergroesserungen in Elektronenmikroskopen
US2568456A (en) * 1949-12-06 1951-09-18 Gen Electric Electromagnetic deflection yoke structure
US2587942A (en) * 1949-12-27 1952-03-04 Leitz Ernst Gmbh Electronic optical correction mechanism for magnetic lenses
US2608665A (en) * 1950-07-29 1952-08-26 Gen Electric Permanent magnet focusing device
NL94737C (de) * 1950-08-29
NL194113A (de) * 1954-01-22

Also Published As

Publication number Publication date
GB833249A (en) 1960-04-21
FR1171295A (fr) 1959-01-23
DE1089089B (de) 1960-09-15
US2910603A (en) 1959-10-27
NL200957A (de)
BE551462A (de)
NL100357C (de)

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