CA933238A - Ion gauge - Google Patents
Ion gaugeInfo
- Publication number
- CA933238A CA933238A CA096891A CA96891A CA933238A CA 933238 A CA933238 A CA 933238A CA 096891 A CA096891 A CA 096891A CA 96891 A CA96891 A CA 96891A CA 933238 A CA933238 A CA 933238A
- Authority
- CA
- Canada
- Prior art keywords
- ion gauge
- gauge
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5300769 | 1969-10-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA933238A true CA933238A (en) | 1973-09-04 |
Family
ID=10466254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA096891A Expired CA933238A (en) | 1969-10-29 | 1970-10-29 | Ion gauge |
Country Status (6)
Country | Link |
---|---|
US (1) | US3742343A (en) |
JP (1) | JPS497511B1 (en) |
CA (1) | CA933238A (en) |
DE (1) | DE2052094A1 (en) |
FR (1) | FR2066651A5 (en) |
GB (1) | GB1336126A (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1437174A (en) * | 1972-05-26 | 1976-05-26 | Mullard Ltd | Ion gauges |
US4307323A (en) * | 1980-04-04 | 1981-12-22 | Granville-Phillips Company | Vacuum gauge |
US4636680A (en) * | 1983-05-24 | 1987-01-13 | Granville-Phillips Company | Vacuum gauge |
US5422573A (en) * | 1990-04-11 | 1995-06-06 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
US5250906A (en) * | 1991-10-17 | 1993-10-05 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
US5296817A (en) * | 1990-04-11 | 1994-03-22 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
DE4338535C2 (en) * | 1993-11-11 | 2003-06-18 | Unaxis Deutschland Holding | Extractor ion gauge |
DE29614489U1 (en) * | 1996-08-21 | 1996-10-10 | Leybold Vakuum GmbH, 50968 Köln | Measuring system for a vacuum meter |
CH707685A1 (en) * | 2013-03-06 | 2014-09-15 | Inficon Gmbh | Ionization vacuum measuring cell with shielding. |
-
1969
- 1969-10-29 GB GB5300769A patent/GB1336126A/en not_active Expired
-
1970
- 1970-10-23 DE DE19702052094 patent/DE2052094A1/en active Pending
- 1970-10-27 JP JP45094244A patent/JPS497511B1/ja active Pending
- 1970-10-28 FR FR7038866A patent/FR2066651A5/fr not_active Expired
- 1970-10-29 US US00085157A patent/US3742343A/en not_active Expired - Lifetime
- 1970-10-29 CA CA096891A patent/CA933238A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
US3742343A (en) | 1973-06-26 |
DE2052094A1 (en) | 1971-05-06 |
FR2066651A5 (en) | 1971-08-06 |
JPS497511B1 (en) | 1974-02-20 |
GB1336126A (en) | 1973-11-07 |
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